TWI536533B - 靜電放電保護裝置及方法 - Google Patents

靜電放電保護裝置及方法 Download PDF

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Publication number
TWI536533B
TWI536533B TW100102139A TW100102139A TWI536533B TW I536533 B TWI536533 B TW I536533B TW 100102139 A TW100102139 A TW 100102139A TW 100102139 A TW100102139 A TW 100102139A TW I536533 B TWI536533 B TW I536533B
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TW
Taiwan
Prior art keywords
region
dopant
collector
interface
esd
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TW100102139A
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English (en)
Chinese (zh)
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TW201140790A (en
Inventor
艾默里 傑朗
柴 伊恩 吉爾
洪昌士
Original Assignee
飛思卡爾半導體公司
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Application filed by 飛思卡爾半導體公司 filed Critical 飛思卡爾半導體公司
Publication of TW201140790A publication Critical patent/TW201140790A/zh
Application granted granted Critical
Publication of TWI536533B publication Critical patent/TWI536533B/zh

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D10/00—Bipolar junction transistors [BJT]
    • H10D10/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D10/00—Bipolar junction transistors [BJT]
    • H10D10/01—Manufacture or treatment
    • H10D10/061—Manufacture or treatment of lateral BJTs 
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D10/00—Bipolar junction transistors [BJT]
    • H10D10/60—Lateral BJTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • H10D89/60—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
    • H10D89/601—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs
    • H10D89/711—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs using bipolar transistors as protective elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/13—Semiconductor regions connected to electrodes carrying current to be rectified, amplified or switched, e.g. source or drain regions
    • H10D62/137—Collector regions of BJTs

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Bipolar Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)
TW100102139A 2010-01-20 2011-01-20 靜電放電保護裝置及方法 TWI536533B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/690,771 US8648419B2 (en) 2010-01-20 2010-01-20 ESD protection device and method

Publications (2)

Publication Number Publication Date
TW201140790A TW201140790A (en) 2011-11-16
TWI536533B true TWI536533B (zh) 2016-06-01

Family

ID=44277438

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100102139A TWI536533B (zh) 2010-01-20 2011-01-20 靜電放電保護裝置及方法

Country Status (5)

Country Link
US (2) US8648419B2 (enExample)
JP (1) JP5843323B2 (enExample)
CN (1) CN102714206B (enExample)
TW (1) TWI536533B (enExample)
WO (1) WO2011090827A2 (enExample)

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Also Published As

Publication number Publication date
JP5843323B2 (ja) 2016-01-13
US8648419B2 (en) 2014-02-11
CN102714206B (zh) 2015-06-03
US9018072B2 (en) 2015-04-28
JP2013517633A (ja) 2013-05-16
CN102714206A (zh) 2012-10-03
US20140147983A1 (en) 2014-05-29
WO2011090827A2 (en) 2011-07-28
US20110176244A1 (en) 2011-07-21
WO2011090827A3 (en) 2011-10-20
TW201140790A (en) 2011-11-16

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