TWI492309B - Heat treatment device - Google Patents

Heat treatment device Download PDF

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Publication number
TWI492309B
TWI492309B TW102100529A TW102100529A TWI492309B TW I492309 B TWI492309 B TW I492309B TW 102100529 A TW102100529 A TW 102100529A TW 102100529 A TW102100529 A TW 102100529A TW I492309 B TWI492309 B TW I492309B
Authority
TW
Taiwan
Prior art keywords
heat treatment
control device
thermoelectric conversion
conversion member
electric power
Prior art date
Application number
TW102100529A
Other languages
English (en)
Chinese (zh)
Other versions
TW201415556A (zh
Inventor
向井正行
Original Assignee
光洋熱系統股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 光洋熱系統股份有限公司 filed Critical 光洋熱系統股份有限公司
Publication of TW201415556A publication Critical patent/TW201415556A/zh
Application granted granted Critical
Publication of TWI492309B publication Critical patent/TWI492309B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D19/00—Arrangements of controlling devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D17/00—Arrangements for using waste heat; Arrangements for using, or disposing of, waste gases
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/10—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects operating with only the Peltier or Seebeck effects
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/10—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects operating with only the Peltier or Seebeck effects
    • H10N10/13—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects operating with only the Peltier or Seebeck effects characterised by the heat-exchanging means at the junction
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P32/00—Diffusion of dopants within, into or out of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0602—Temperature monitoring
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H10P95/90—Thermal treatments, e.g. annealing or sintering

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Furnace Details (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
TW102100529A 2012-10-05 2013-01-08 Heat treatment device TWI492309B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012222863A JP5951438B2 (ja) 2012-10-05 2012-10-05 熱処理装置

Publications (2)

Publication Number Publication Date
TW201415556A TW201415556A (zh) 2014-04-16
TWI492309B true TWI492309B (zh) 2015-07-11

Family

ID=50405637

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102100529A TWI492309B (zh) 2012-10-05 2013-01-08 Heat treatment device

Country Status (4)

Country Link
JP (1) JP5951438B2 (https=)
KR (1) KR101429387B1 (https=)
CN (2) CN105758203B (https=)
TW (1) TWI492309B (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6442339B2 (ja) 2015-03-26 2018-12-19 株式会社Ｓｃｒｅｅｎホールディングス 熱処理装置および熱処理方法
JP6498060B2 (ja) * 2015-07-01 2019-04-10 中外炉工業株式会社 工業炉の制御方法
KR102295852B1 (ko) * 2018-06-21 2021-08-31 한국전기연구원 다기능 축열 열전하이브리드 발전장치
JP6925377B2 (ja) * 2019-03-12 2021-08-25 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 基板処理装置、半導体装置の製造方法およびプログラム
CN111706843B (zh) * 2020-07-01 2021-01-15 海南鸣川智能科技有限公司 一种可将热能进行多级回收利用的船舶用尾气处理装置
JP2022049287A (ja) * 2020-09-16 2022-03-29 高砂工業株式会社 熱処理炉および熱処理設備

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000068183A (ja) * 1998-08-19 2000-03-03 Dainippon Screen Mfg Co Ltd 基板加熱処理装置ならびに基板加熱処理装置の熱エネルギー変換方法および熱エネルギー回収方法
US20030071032A1 (en) * 2001-10-17 2003-04-17 Ngk Insulators, Ltd. Heating system
TW200830409A (en) * 2006-08-15 2008-07-16 Tokyo Electron Ltd Heat processing apparatus, heat processing method, computer program and storage medium

Family Cites Families (16)

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JPH0545067A (ja) * 1991-08-08 1993-02-23 Toshiba Corp 溶解炉装置
JPH06154589A (ja) * 1992-11-20 1994-06-03 Kubota Corp エネルギー回収型の断熱容器
JP4178746B2 (ja) * 2000-12-04 2008-11-12 株式会社Ｉｈｉ 工業炉用熱電発電装置
JP4742431B2 (ja) 2001-02-27 2011-08-10 東京エレクトロン株式会社 熱処理装置
JP2004350479A (ja) * 2003-05-26 2004-12-09 Hitachi Powdered Metals Co Ltd 熱電変換発電ユニットおよびこの熱電変換発電ユニットを備えるトンネル型炉
JP4661235B2 (ja) * 2005-01-27 2011-03-30 株式会社Ihi 熱電変換装置
JP4808425B2 (ja) 2005-03-22 2011-11-02 光洋サーモシステム株式会社 熱処理装置
JP5087875B2 (ja) * 2006-07-31 2012-12-05 株式会社Ｉｈｉ 熱処理装置
US8260166B2 (en) * 2007-05-24 2012-09-04 Ricoh Company, Limited Image forming apparatus and electric appliance including a thermoelectric element
CN101650068B (zh) * 2008-08-12 2012-05-02 广东万和新电气股份有限公司 带有热电转换装置自供电的强排燃气热水器
CN201561547U (zh) * 2009-05-04 2010-08-25 广州市红日燃具有限公司 一种带自供电装置的燃气热水器
JP2011129827A (ja) 2009-12-21 2011-06-30 Sharp Corp 太陽電池システム
RU2012137692A (ru) * 2010-03-10 2014-04-20 БиЭйчПи БИЛЛИТОН ЭЛЮМИНИУМ ТЕКНОЛОДЖИС ЛИМИТЕД Система регенерации тепла для пирометаллургического сосуда с применением термоэлектрических/термомагнитных устройств
JP3160926U (ja) * 2010-03-30 2010-07-15 東京エレクトロン株式会社 熱処理装置
CN102593936B (zh) * 2012-02-20 2015-10-28 海尔集团公司 一种太阳能与市电互补式制冷供电系统
JP2013201830A (ja) * 2012-03-26 2013-10-03 Toshiba Corp プラントの非常用電力供給装置及び方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000068183A (ja) * 1998-08-19 2000-03-03 Dainippon Screen Mfg Co Ltd 基板加熱処理装置ならびに基板加熱処理装置の熱エネルギー変換方法および熱エネルギー回収方法
US20030071032A1 (en) * 2001-10-17 2003-04-17 Ngk Insulators, Ltd. Heating system
TW200830409A (en) * 2006-08-15 2008-07-16 Tokyo Electron Ltd Heat processing apparatus, heat processing method, computer program and storage medium

Also Published As

Publication number Publication date
TW201415556A (zh) 2014-04-16
CN103712465A (zh) 2014-04-09
CN105758203B (zh) 2019-01-01
KR20140044723A (ko) 2014-04-15
CN103712465B (zh) 2016-04-20
KR101429387B1 (ko) 2014-08-11
JP2014074559A (ja) 2014-04-24
JP5951438B2 (ja) 2016-07-13
CN105758203A (zh) 2016-07-13

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