TWI466845B - Laminated ceramic capacitors - Google Patents
Laminated ceramic capacitors Download PDFInfo
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- TWI466845B TWI466845B TW100134868A TW100134868A TWI466845B TW I466845 B TWI466845 B TW I466845B TW 100134868 A TW100134868 A TW 100134868A TW 100134868 A TW100134868 A TW 100134868A TW I466845 B TWI466845 B TW I466845B
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- Prior art keywords
- dielectric
- ceramic
- dielectric ceramic
- main component
- forming
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- 239000003985 ceramic capacitor Substances 0.000 title claims description 39
- 239000000919 ceramic Substances 0.000 claims description 124
- 239000000203 mixture Substances 0.000 claims description 62
- 238000001354 calcination Methods 0.000 claims description 25
- 239000002994 raw material Substances 0.000 claims description 22
- 238000005245 sintering Methods 0.000 claims description 18
- 238000005520 cutting process Methods 0.000 claims description 17
- 150000001875 compounds Chemical class 0.000 claims description 16
- 229910052802 copper Inorganic materials 0.000 claims description 16
- 238000007639 printing Methods 0.000 claims description 16
- 229910052750 molybdenum Inorganic materials 0.000 claims description 13
- 229910052720 vanadium Inorganic materials 0.000 claims description 13
- 229910052712 strontium Inorganic materials 0.000 claims description 12
- 229910052796 boron Inorganic materials 0.000 claims description 11
- 229910052791 calcium Inorganic materials 0.000 claims description 11
- 229910052744 lithium Inorganic materials 0.000 claims description 11
- 229910052692 Dysprosium Inorganic materials 0.000 claims description 10
- 229910052691 Erbium Inorganic materials 0.000 claims description 10
- 229910052693 Europium Inorganic materials 0.000 claims description 10
- 229910052688 Gadolinium Inorganic materials 0.000 claims description 10
- 229910052689 Holmium Inorganic materials 0.000 claims description 10
- 229910052769 Ytterbium Inorganic materials 0.000 claims description 10
- 229910052748 manganese Inorganic materials 0.000 claims description 10
- 229910052727 yttrium Inorganic materials 0.000 claims description 10
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 239000012298 atmosphere Substances 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 8
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 6
- 229910052788 barium Inorganic materials 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 6
- 238000010030 laminating Methods 0.000 claims description 6
- 229910052702 rhenium Inorganic materials 0.000 claims description 6
- 239000012535 impurity Substances 0.000 claims description 5
- 238000009966 trimming Methods 0.000 claims 1
- 239000010949 copper Substances 0.000 description 56
- 239000010410 layer Substances 0.000 description 36
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 15
- 229910052751 metal Inorganic materials 0.000 description 12
- 239000002184 metal Substances 0.000 description 12
- 238000009413 insulation Methods 0.000 description 9
- 238000009766 low-temperature sintering Methods 0.000 description 8
- 229910052759 nickel Inorganic materials 0.000 description 6
- 239000000843 powder Substances 0.000 description 6
- 239000002002 slurry Substances 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052787 antimony Inorganic materials 0.000 description 5
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 5
- 238000000280 densification Methods 0.000 description 5
- 229910018068 Li 2 O Inorganic materials 0.000 description 4
- 239000003989 dielectric material Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000011267 electrode slurry Substances 0.000 description 4
- 238000010304 firing Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 230000001747 exhibiting effect Effects 0.000 description 3
- 239000012299 nitrogen atmosphere Substances 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 239000007858 starting material Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 229910000990 Ni alloy Inorganic materials 0.000 description 2
- 229910052772 Samarium Inorganic materials 0.000 description 2
- 229910052771 Terbium Inorganic materials 0.000 description 2
- 229910052775 Thulium Inorganic materials 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 238000004898 kneading Methods 0.000 description 2
- 229910052746 lanthanum Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 239000004014 plasticizer Substances 0.000 description 2
- 229920006267 polyester film Polymers 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 229910052707 ruthenium Inorganic materials 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical class [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 229910052765 Lutetium Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 229920005822 acrylic binder Polymers 0.000 description 1
- 239000003522 acrylic cement Substances 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910002090 carbon oxide Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
- 238000004876 x-ray fluorescence Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/12—Ceramic dielectrics
- H01G4/1209—Ceramic dielectrics characterised by the ceramic dielectric material
- H01G4/1218—Ceramic dielectrics characterised by the ceramic dielectric material based on titanium oxides or titanates
- H01G4/1227—Ceramic dielectrics characterised by the ceramic dielectric material based on titanium oxides or titanates based on alkaline earth titanates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
- C04B35/462—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates
- C04B35/465—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates
- C04B35/468—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates based on barium titanates
- C04B35/4682—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates based on barium titanates based on BaTiO3 perovskite phase
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- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
- H01B3/02—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances
- H01B3/12—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances ceramics
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- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
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- H01G4/002—Details
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- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/30—Stacked capacitors
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Description
本發明係關於一種即使組合物中不含有對環境或人體有害之鉛或鉍等,亦可於1030℃以下進行低溫燒結,且可進行與以Cu作為主成分之導電性優異之金屬之共燒結,顯示出高介電係數及滿足X7R特性或X5R特性之介電特性,並且即使於還原環境下進行煅燒,絕緣電阻亦較高,進而高溫負荷等之壽命特性優異之介電陶瓷組合物、及使用該介電陶瓷組合物之積層陶瓷電容器等電子零件以及其製造方法。
近年來,作為小型且大容量之電容器元件,業界正開發藉由介電陶瓷組合物與內部電極之同時煅燒而製作之積層陶瓷電容器。然而,先前之介電陶瓷組合物由於煅燒溫度高達1150℃~1400℃,故而作為用以與內部電極同時進行煅燒之電極材料,耐高溫之鎳(Ni)或鎳合金為主流。但是,鎳係一種稀有金屬,預計稀有金屬之需求會擴大,在此背景下最近其替代技術備受矚目,使用更廉價之銅(Cu)代替鎳之需求提高。
另一方面,由於銅之熔點為1085℃,低於鎳之熔點,故而於使用銅作為內部電極之情形時,需要於1030℃、期待為1000℃以下進行煅燒,需要即使於低於先前之溫度下進行煅燒亦發揮充分之特性之積層陶瓷電容器用之介電材料。
作為滿足此種要求之介電陶瓷組合物,公知有如下之發明,該等發明中揭示有將銅作為內部電極而用於積層陶瓷電容器之情況。
例如專利文獻1中揭示有一種介電陶瓷組合物,其以組成式:100(Ba1-x
Cax
)m
TiO3
+aMnO+bV2
O5
+cSiO2
+dRe2
O3
(其中,Re為選自Y、La、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、及Yb中之至少1種金屬元素,a、b、c、及d表示莫耳比)表示,且處於0.030≦x≦0.20、0.990≦m≦1.030、0.010≦a≦5.0、0.050≦b≦2.5、0.20≦c≦8.0、0.050≦d≦2.5之範圍內,並且該介電陶瓷組合物係「可獲得比介電係數為3000以上,並且即使將介電陶瓷層薄層化至1 μm左右,施加2 V/μm之直流電壓時之DC偏壓變化率之絕對值亦為小如20%以下,比介電係數之溫度特性為滿足EIA規格之X7R特性(以25℃下之比介電係數作為標準,在-55℃至125℃之範圍內之比介電係數之溫度變化率之絕對值為15%以內)之平坦,絕緣電阻以25℃下之電阻率計,高達10-11
Ω‧m以上,又,高溫負荷可靠性為150℃,以施加電場強度10 V/μm之直流電壓時之平均故障壽命計高達100 h以上之介電陶瓷組合物」(段落[0018])者,並且「內部電極係由選自Ni、Ni合金、Cu、及Cu合金中之至少1種導電性材料所構成」(段落[0017])。
但是,由於所獲得之介電陶瓷組合物之煅燒溫度仍高達1100℃以上,實質上無法將銅用於內部電極而穩定地進行煅燒,故而需要進一步之低溫燒結化之改善。
又,專利文獻2中揭示有一種耐還原性介電陶瓷組合物,其於將主成分之組成式以α(SrX
CaY
Ba1-X-Y
)(Ti1-W
MW
)O3
+(1-α)((Bi1-Z
n*AZ
)2
O3
+βTiO2
)(其中,M為選自Zr、Mg中之至少1種以上,A為選自Li、K、Na中之至少1種以上)表示之情形時,(SrX
CaY
Ba1-X-Y
)(Ti1-W
MW
)O3
相對於主成分整體之莫耳比α、與Ti相對於(Bi1-Z
n*AZ
)2
O3
之1莫耳之莫耳比β處於0.60<α<0.85、1.5<β<4.0之範圍,且該耐還原性介電陶瓷組合物係「提供於獲得與Cu電極等賤金屬電極對應之耐還原性介電陶瓷組合物之情形時,可於組合物中不含有對環境或人體有害之鉛之情況下提高比介電係數,且減小比介電係數之溫度變化率之耐還原性介電陶瓷組合物」(段落[0009])者,且係「可獲得組合物中不含有鉛,比介電係數之值高達1000以上,且比介電係數之溫度變化率於-25℃至+85℃之間為±10%以內而溫度特性優異,並且用靜電電容之值乘以絕緣電阻之值而獲得之CR積為1000 MΩμF以上而於還原煅燒後絕緣性亦優異的耐還原性介電陶瓷組合物」(段落[0013])者。
但是,專利文獻2之耐還原性介電陶瓷組合物係使用作為重金屬之鉍代替鉛,未實現無鉍之耐還原性介電陶瓷組合物。
進而,專利文獻3中揭示有一種介電陶瓷組合物,其特徵在於:含有xBaO-yTiO2
-zReO3/2
(其中,x、y、z為莫耳%,且8≦x≦18、52.5≦y≦65及20≦z≦40、x+y+z=100,Re為稀土類元素)所示之BaO-TiO2
-ReO3/2
系陶瓷組合物、與含有10~25重量%之SiO2
、10~40重量%之B2
O3
、25~55重量%之MgO、0~20重量%之ZnO、0~15重量%之Al2
O3
、0.5~10重量%之Li2
O、及0~10重量%之RO(其中,R為Ba、Sr、Ca之內之至少1種)之玻璃組合物,並且「可於1000℃以下之低溫下進行煅燒,且可與Ag、Au或Cu等導電性優異之金屬進行共燒結」(段落[0016])。
但是,所獲得之介電陶瓷組合物之比介電係數為50以下,不適合用作小型且大容量之積層陶瓷電容器用之介電材料。
本發明者鑒於以上情況,為了獲得於還原環境下可於1080℃以下進行燒結,介電陶瓷層之材料中不含有鉛(Pb)或鉍(Bi),介電係數為2000以上,介電係數之溫度特性為X7R特性,具有與先前之Ni內電積層陶瓷電容器同等水平之高溫加速壽命特性的積層陶瓷電容器而進行了研究,結果發現:於以BaTiO3
系化合物作為主成分之介電陶瓷組合物中,Ba/Ti比、或作為副成分之稀土類之組成比及MnO之組成比之條件。
並且,提出有一種積層陶瓷電容器,其具有複數層介電陶瓷層、以交替地導出至不同端面之方式於該介電陶瓷層間對向形成的內部電極、及於上述介電陶瓷層之兩端面所形成之分別與上述內部電極電性連接之外部電極,其特徵在於:上述介電陶瓷層於以ABO3
+aRe2
O3
+bMnO(其中,ABO3
為以BaTiO3
作為主體之鈣鈦礦系介電質,Re2
O3
為選自La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、Yb、Lu及Y中之1種以上之金屬氧化物,a、b表示相對於ABO3
100莫耳之莫耳數)表示時,係由1.000≦A/B≦1.035之範圍、0.05≦a≦0.75之範圍、0.25≦b≦2.0之範圍之主成分、與含有B、Li或Si中之一種以上且分別以B2
O3
、Li2
O、SiO2
換算時之總計為0.16~1.6重量份之副成分所構成的燒結體,並且上述內部電極係由Cu或Cu合金所構成(專利文獻4)。
又,本發明者亦提出有於內部電極由Cu或Cu合金所構成之積層陶瓷電容器中,藉由將介電陶瓷製成由從剖面觀察時之直徑之平均值為400 nm以下之晶粒與晶界構成的以BaTiO3
作為主體之鈣鈦礦型介電材料之燒結體,而獲得溫度特性為X7R特性或X8R特性者(專利文獻5),於實施例中,燒結體之起始原料係使用於MnO中混合作為添加劑之稀土類之氧化物、及作為燒結助劑之B2
O3
、Li2
O、SiO2
者。
[專利文獻1] 日本專利特開2005-194138號公報
[專利文獻2] 日本專利特開2006-213575號公報
[專利文獻3] 日本專利特開2002-97072號公報
[專利文獻4] 日本專利特開2008-42150號公報
[專利文獻5] 日本專利特開2008-72072號公報
本發明者進而對上述專利文獻4、5中所記載之以BaTiO3
系化合物作為主成分之介電陶瓷組合物繼續研究,結果判明使用該介電陶瓷組合物之積層陶瓷電容器尚有改善之餘地。
即,本發明之目的在於解決上述先前技術未充分研究之課題,提供一種使用以BaTiO3
系化合物作為主成分之介電陶瓷組合物,即使組合物中不含有對環境或人體有害之鉛或鉍等,亦可於1030℃以下進行低溫燒結,可進行與以Cu作為主成分之導電性優異之金屬之共燒結,藉由將Cu作為內部電極,顯示出高介電係數及滿足X7R特性(以25℃下之比介電係數作為標準,-55℃至125℃之範圍內之比介電係數之溫度變化率之絕對值為15%以內)或X5R特性(以25℃下之比介電係數作為標準,-55℃至85℃之範圍內之比介電係數之溫度變化率之絕對值為15%以內)之介電特性,並且即使於還原環境下進行煅燒,絕緣電阻亦較高,進而高溫負荷等之壽命特性優異的介電陶瓷組合物、與使用該介電陶瓷組合物之積層陶瓷電容器及其製造方法。
本發明者為了實現上述目的進而反覆研究,結果判明:於以BaTiO3
系化合物作為主成分之介電陶瓷組合物中,除Re、Mn、B、Li之含量以外,V及Mo之合計含量亦會對使用以Cu作為主成分之內部電極的積層陶瓷電容器之壽命特性產生影響。又,判明Cu自以Cu作為主成分之內部電極向介電層擴散之量會對積層陶瓷電容器之壽命特性產生影響。進而亦獲得如下見解:就低溫燒結化之觀點而言,重要的是抑制先前所含有之Si之含量,包括作為雜質而含有者在內。又,於抑制Si含量之情形時,介電質之結構變得不穩定而成為導致壽命下降之原因,但於本發明中,藉由較先前增加B含有比率而適當調整Ba/Ti比(=m)與B含量(=f)、Li含量(=g)之比率,可同時實現1030℃以下之低溫燒結與高壽命之特性。
本發明係基於該等見解反覆進行研究,結果完成者,其內容如下。
[1] 一種介電陶瓷組合物,其係含有包含BaTiO3
之主成分、與包含Re、Mn、V、Mo、Cu、B、Li、Ca、Sr之副成分者,其特徵在於:
於將上述介電陶瓷組成以BaTiO3
+aRe2
O3
+bMnO+cV2
O5
+dMoO3
+eCuO+fB2
O3
+gLi2
O+xSrO+yCaO(其中,Re為選自Eu、Gd、Dy、Ho、Er、Yb、及Y中之1種以上,a~g、x及y表示相對於包含BaTiO3
之主成分100莫耳之莫耳數)表示,將該介電陶瓷組合物所含有之(Ba+Sr+Ca)/Ti之莫耳比設為m時,
0.10≦a≦0.50
0.20≦b≦0.80
0≦c≦0.12
0≦d≦0.07
0.04≦c+d≦0.12
0≦e≦1.00
0.50≦f≦2.00
0.6≦(100(m-1)+2g)/2f≦1.3
0.5≦100(m-1)/2g≦5.1
0≦x≦1.5
0≦y≦1.5。
[2] 如上述[1]之介電陶瓷組合物,其中作為雜質而含有之Si於將包含BaTiO3
之主成分設為100莫耳時,以SiO2
換算計為1.0莫耳以下。
[3] 如上述[1]至[2]之介電陶瓷組合物,其中於將上述介電陶瓷組成以(Ba1-v-w
Srv
Caw
)TiO3
+aRe2
O3
+bMnO+cV2
O5
+dMoO3
+eCuO+fB2
O3
+gLi2
O+xSrO+yCaO表示時,
0≦x+v×100≦1.5
0≦y+w×100≦1.5。
[4] 如上述[1]至[3]中任一項之介電陶瓷組合物,其可於燒結溫度為1030℃以下進行緻密化。
[5] 一種積層陶瓷電容器,其係具有複數層介電陶瓷層、及於該介電陶瓷層間對向形成之內部電極者,其特徵在於:上述介電陶瓷層係由上述[1]至[4]中任一項之介電陶瓷組合物所構成之燒結體,上述內部電極係由Cu或Cu合金所構成。
[6] 如上述[5]之積層陶瓷電容器,其中上述積層陶瓷電容器具有複數層介電陶瓷層、以交替地導出至不同端面之方式形成於該介電陶瓷層間對向形成的內部電極、及於上述介電陶瓷層之兩端面所形成之與上述各自之內部電極電性連接之外部電極。
[7] 一種上述[5]或[6]之積層陶瓷電容器之製造方法,其特徵在於具備如下步驟:準備於包含BaTiO3
系化合物之主成分原料中,以氧化物或玻璃、其他化合物等形態至少含有Re(此處,Re為選自Eu、Gd、Dy、Ho、Er、Yb、及Y中之1種以上)、Mn、B、及Li,進而V、Mo中之1種以上,或進而Cu或Ba、Sr、Ca作為副成分原料的陶瓷原料之步驟;片材形成步驟,其係使用該陶瓷原料形成陶瓷生片;印刷步驟,其係將以Cu作為主成分之內部電極圖案印刷於該陶瓷生片上;積層步驟,其係積層經過該印刷步驟之陶瓷生片而形成積層體;裁剪步驟,其係將該積層體以每個內部電極圖案進行裁剪而獲得小片狀之積層體;煅燒步驟,其係於1030℃以下之溫度下,於還原性環境下煅燒該裁剪步驟所獲得之小片狀之積層體而獲得燒結體;及外部電極形成步驟,其係以於該燒結體之兩端部與該內部電極電性連接之方式塗佈外部電極用導電膏並實施燒附處理。
[8] 一種上述[5]或[6]之積層陶瓷電容器之製造方法,其特徵在於具備如下步驟:準備於包含BaTiO3
系化合物之主成分原料中,以氧化物或玻璃、其他化合物等形態至少含有Re(此處,Re為選自Eu、Gd、Dy、Ho、Er、Yb、及Y中之1種以上)、Mn、B、及Li,進而V、Mo中之1種以上,或進而Cu或Ba、Sr、Ca作為副成分原料之陶瓷原料之步驟;片材形成步驟,其係使用該陶瓷原料形成陶瓷生片;印刷步驟,其係將以Cu作為主成分之內部電極圖案印刷於該陶瓷生片上;積層步驟,其係積層經過該印刷步驟之陶瓷生片而形成積層體;裁剪步驟,其係將該積層體以每個內部電極圖案進行裁剪而獲得小片狀之積層體;外部電極形成步驟,其係以於該裁剪步驟所獲得之小片狀之積層體之兩端部與該內部電極電性連接之方式塗佈外部電極用導電膏;及煅燒步驟,其係於1030℃以下之溫度下,於還原性環境下煅燒該外部電極形成步驟所獲得之小片狀之積層體。
根據本發明,可獲得一種即使介電陶瓷組合物中不含有對環境或人體有害之鉛或鉍等,亦可於1030℃以下進行低溫燒結,且可進行與以Cu作為主成分之導電性優異之金屬之共燒結,藉由將Cu作為內部電極,顯示出高介電係數及滿足X7R特性(或X5R特性)之介電特性,並且即使於還原環境下進行煅燒,絕緣電阻亦較高,進而高溫負荷等之壽命特性優異之介電陶瓷組合物及積層陶瓷電容器。
圖1係示意性表示將本發明之介電陶瓷組合物用於介電層的積層陶瓷電容器之一實施形態的圖。
如圖1所示,本發明之積層陶瓷電容器1具有包含陶瓷的燒結體之介電層2與以Cu作為主成分之內部電極3交替積層而成之構成,並且於該積層陶瓷電容器1之兩端部形成有一對分別與於該介電層2之內部交替配置之該內部電極3電性連接之外部電極4。
該積層陶瓷電容器1之形狀並無特別限制,通常採用長方體狀。又,其尺寸亦無特別限制,根據用途採用適當尺寸即可。
本發明之上述介電層2所使用之介電陶瓷組合物含有包含BaTiO3
之主成分、與包含Re、Mn、V、Mo、Cu、B、Li之副成分。
此處,其特徵在於:於將本發明之上述介電層2之介電陶瓷組成以
BaTiO3
+aRe2
O3
+bMnO+cV2
O5
+dMoO3
+eCuO+fB2
O3
+gLi2
O+xSrO+yCaO
(其中,Re為選自Eu、Gd、Dy、Ho、Er、Yb、及Y中之1種以上,a~g、x及y表示相對於包含BaTiO3
之主成分100莫耳之莫耳數)表示,將該介電陶瓷組合物所含有之(Ba+Sr+Ca)/Ti之莫耳比設為m時,
0.10≦a≦0.50、更期待為0.20≦a≦0.35、
0.20≦b≦0.80、更期待為0.20≦b≦0.60、
0≦c≦0.12、更期待為0≦c≦0.10、
0≦d≦0.07
0.04≦c+d≦0.12
0≦e≦1.00
0.50≦f≦2.00、更期待為0.65≦f≦1.50、
0.6≦(100(m-1)+2g)/2f≦1.3
0.5≦100(m-1)/2g≦5.1
0≦x≦1.5
0≦y≦1.5。
此處,於Re2
O3
之量、即a較小之情形時,尤其是未達0.10之情形時,壽命明顯下降,另一方面,若變得過大,則燒結性下降,尤其是大於0.50之情形時,難以於1030℃以下進行燒結。因此,期待為0.10≦a≦0.50之範圍。更期待為0.20≦a≦0.35,可實現高壽命特性與1000℃以下之緻密化。
又,若MnO之量、即b較小之情形時,壽命下降,另一方面,若成為過量,則燒結性下降,尤其是若大於0.80,則難以於1030℃以下進行燒結。因此,期待為0.20≦b≦0.80之範圍。更期待為0.20≦b≦0.60,可實現高壽命特性與1000℃以下之緻密化。
若不含有V或Mo中之至少一者作為副成分,則由於壽命特性會下降,故而期待為c+d≧0.04,另一方面,即使V及Mo之合計含量過量,亦可見壽命特性之下降。因此,期待為0.04≦c+d≦0.12之範圍。又,即使V及Mo各自之添加量超過0.12及0.07,亦可見壽命特性之下降,因此期待為0≦c≦0.12及0≦d≦0.07之範圍。又,尤其是設為0≦c≦0.10之範圍之情形時,顯示出更佳之壽命特性。
於將Cu用於內部電極之情形時,已知Cu會自內部電極向介電層擴散。因此,認為即使不添加Cu,介電層中亦含有Cu,藉由含有Cu會改善壽命特性。此時,於不添加CuO之情形時,認為Cu自內部電極向介電層之擴散達到平衡狀態而穩定化。但是,於自外部添加Cu而存在過量之Cu之情形時,可見壽命反而下降之傾向。因此,期待為0≦e≦1.00。
又,即使於原料步驟中不添加Cu作為原料,亦可於煅燒步驟中,使Cu自Cu內部電極擴散至介電層中,而使介電層含有Cu。
若B2
O3
之含量、即f未達0.50,則燒結性下降,難以於1030℃以下進行燒結,另一方面,若大於2.00,則由於壽命會下降,故而期待為0.50≦f≦2.00之範圍。進而,為了於更低溫度下進行煅燒,更期待為0.65≦f≦1.5之範圍,可實現高壽命特性與1000℃以下之緻密化。
又,關於Li2
O之量、即g,若(100(m-1)+2g)/2f未達0.6,則壽命會下降,相反若大於1.3,則燒結性會下降,難以於1030℃以下進行緻密化。因此,期待為0.6≦(100(m-1)+2g)/2f≦1.3之範圍。
又,於m≦1之情形時,由於壽命特性會下降,故而期待為m>1。其中,m之值並非於BaTiO3
系化合物之合成時決定唯一值,於原料步驟中添加Ba或Sr、Ca之氧化物或碳化物以調整m之值,亦可獲得相同之效果。
於100(m-1)/2g未達0.50之情形時,壽命特性會下降,另一方面,若大於5.1,則燒結性會下降,難以於1030℃以下進行燒結。因此,期待為0.50≦100(m-1)/2h≦5.1之範圍。
又,Sr或Ca可與Ba同樣地用作m之調整元素。確認本發明中,於0≦x≦1.5、0≦y≦1.5之範圍內對m之調整有效。
進而,由於所添加之Sr或Ca於煅燒過程中會固溶至作為主成分之BaTiO3
系化合物中,故而即使使用以Sr或Ca作為主成分而添加之(Ba1-x-y
Srv
Caw
)TiO3
,亦可獲得相同之效果。
雖然為了實現低溫燒結化而期望不含有Si,但例如於分散步驟等製造步驟中含有之可能性較高。
因此,於本發明中,刻意地添加SiO2
,確認體系相對於Si含量之穩定性,結果確認:若藉由SiO2
換算為1.0莫耳%以下,則於特性上不會帶來太大影響。另一方面,若含量高於1.0莫耳%,則燒結性之下降變得明顯,因此需要使SiO2
之雜質含量成為1.0莫耳%以下。
如此,於本發明中,可提供一種藉由設計用於介電層2之介電陶瓷組合物,即使於組合物中不含有對環境或人體有害之鉛或鉍等,亦可於1030℃以下、期望為1000℃以下進行低溫燒結,且可進行與以Cu作為主成分之導電性優異之金屬之共燒結,顯示出高介電係數及滿足X7R特性或X5R特性之介電特性,並且即使於中性或還原環境下進行煅燒,絕緣電阻亦較高,進而高溫負荷等之壽命特性優異的介電陶瓷組合物及積層陶瓷電容器。
又,於不將Cu用於內部電極之情形時,不僅無法獲得由煅燒過程中之Cu自Cu內部電極之擴散引起的高壽命化之效果,而且將Ni等用於內部電極之情形時,原料步驟中所添加之Cu於煅燒過程中被Ni電極吸收,因此內部電極需要使用Cu或Cu合金。
再者,只要不妨礙本發明之目的,亦可含有其他元素。例如存在於分散步驟中混入Zr等作為雜質之可能性。
其次,記載本發明之積層陶瓷電容器之製造方法。
本發明之積層陶瓷電容器之製造方法具備如下步驟:(1)準備於包含BaTiO3
系化合物之主成分原料中,以氧化物或玻璃、其他化合物等形態至少含有Re(此處,Re為選自Eu、Gd、Dy、Ho、Er、Yb、及Y中之1種以上)、Mn、B、Si及Li,進而V、Mo中之1種以上,或進而Cu或Ba、Sr、Ca作為副成分原料之陶瓷原料之步驟;(2)片材形成步驟,其係使用該陶瓷原料形成陶瓷生片;(3)印刷步驟,其係將以Cu作為主成分之內部電極圖案印刷於該陶瓷生片上;(4)積層步驟,其係積層經過該印刷步驟之陶瓷生片而形成積層體;(5)裁剪步驟,其係將該積層體以每個內部電極圖案進行裁剪而獲得小片狀之積層體;(6)煅燒步驟,其係藉由於1030℃以下、期望為1000℃以下之溫度下,於還原性環境下煅燒該裁剪步驟所獲得之小片狀之積層體而獲得燒結體;及(7)外部電極形成步驟,其係以於該燒結體之兩端部與該內部電極電性連接之方式塗佈外部電極用導電膏並實施燒附處理。
進而,(7)之外部電極形成步驟亦可於以於該裁剪步驟所獲得之小片狀之積層體之兩端部與該內部電極電性連接之方式塗佈外部電極用導電膏後,於1030℃以下、期望為1000℃以下之溫度下,於還原性環境下進行煅燒,藉此亦同時進行外部電極形成步驟與煅燒步驟。
以下,基於實施例更詳細地說明本發明,但本發明不受該等實施例之任何限定。
又,於實施本發明時,充分注意不可自稱量至混合、粉碎、成形、煅燒等各步驟中混入Si。
(實施例1)
準備BaTiO3
、Re2
O3
、MnO2
、B2
O3
、SiO2
及Li2
CO3
、V2
O5
、MoO3
、CuO或BaCO3
、SrCO3
、CaCO3
作為起始原料。此時,為了調整介電陶瓷組合物之(Ba+Sr+Ca)/Ti比,預先利用XRF(X-ray Fluorescence Spectrometer,X射線螢光光譜儀)分析起始原料之BaTiO3
之Ba/Ti比(=n)。其後,以獲得表1(1)、(2)中之規定之組成之方式進行稱量。
此處,於將BaTiO3
設為100莫耳時,將BaCO3
、SrCO3
、CaCO3
之添加量分別以i、j、k(mol)表示之情形時,m可由m=n+i/100+j/100+k/100表示。
其次,將該等所稱量之上述稱量物與陶瓷球一併加入至罐磨機中,以濕式混合、粉碎,其後放入不鏽鋼槽中,使用熱風式乾燥器進行乾燥,藉此獲得介電質粉末。再者,該等用於主成分、副成分之陶瓷原料只要為藉由熱處理而轉化為氧化物者即可,亦可不為碳氧化物或氧化物。
繼而,作為用以確認燒結性之先前實驗,係使用聚乙烯醇等將所獲得之介電質粉末造粒後,放入規定之模具中進行單軸成形,於含有水蒸氣之氮氣:98%-H2
:2%氣體之環境下,於1030℃下保持2小時,藉此獲得陶瓷煅燒體。
關於所獲得之陶瓷煅燒體,依據JIS-R1634,測定其開氣孔率,將開氣孔率成為1%以下者設為燒結性○,將開氣孔率超過1%者設為×,並示於以下之表2(1)、(2)中。又,將煅燒溫度變更為1000℃進行相同之研究,將即使煅燒溫度設為1000℃開氣孔率亦成為1%以下者表示為◎。
繼而,於如上述而獲得之介電質粉末中,關於在1030℃以下進行緻密化者(將燒結性設為○或◎者),可適當添加PVB黏合劑或丙烯酸系黏合劑、塑化劑、成為溶劑之有機溶劑,而製作陶瓷漿料後,使用反向輥塗佈機等,將該陶瓷漿料於聚酯膜上加工成厚度為7 μm之生片。其後,切割成規定尺寸而獲得矩形之陶瓷生片。
使用絲網印刷法等,將以Cu作為主成分之內部電極用漿料印刷於所獲得之矩形之陶瓷生片上,形成導電圖案。
再者,內部電極用漿料係使用將以Cu作為主成分之金屬微粒子與使有機黏合劑溶解至溶劑中而成之有機媒劑等一併進行混練而製備者。
又,為了進行比較,而準備部分印刷有Ni內部電極用漿料之試樣。
其次,將形成有導電圖案之陶瓷生片沿規定方積層複數層。此時,鄰接之上下之陶瓷生片係以沿內部電極圖案之長度方向移動約一半之程度之方式配置其印刷面。進而,於該積層物之上下兩面積層未印刷內部電極圖案之保護層用之陶瓷生片並壓接。其後,切成規定之形狀而製作陶瓷積層體。
其後,於不會氧化Cu之程度之惰性環境下,於300~600℃下進行脫黏合劑處理後,於含有水蒸氣之氮氣:98%-H2
:2%氣體環境下,以300℃/hr之速度升溫至規定之煅燒溫度(960~1020℃)。達到煅燒溫度後保持2小時,其後以300℃/hr之速度降低溫度,於約700℃下將環境改變為氮氣環境,保持2小時後,降低至室溫,藉此獲得埋設有內部電極3之積層陶瓷燒結體。
其次,對該積層陶瓷燒結體進行滾筒研磨,使內部電極3自燒結體端面露出,其後於兩端部塗佈外部電極用漿料並乾燥後,於氮氣環境下,於規定之溫度(700~900℃)下進行燒附處理,而形成外部電極4。再者,雖然外部電極漿料係使用將以Cu作為主成分之金屬微粒子與有機媒劑及少量之粉末等一併進行混練而製備者,但不限定於此,亦可將Ni或Ag等用作外部電極。
所獲得之積層陶瓷電容器係使用自動橋接式測定器,於頻率1 kHz、有效電壓AC1 Vrms、溫度25℃之條件下測定靜電電容C及tanδ值,由靜電電容C及試樣尺寸算出比介電係數。
又,關於靜電電容之溫度依賴性,於-55℃~150℃之溫度範圍內進行容量測定,將處於EIA規格之X7R或X5R內者設為合格品,將該範圍外設者為×。又,關於絕緣電阻(IR),將使用絕緣電阻計,於25℃下施加50 V之直流電壓60 s後測得之電阻值為5 GΩ以上者設為○,將未達5 GΩ者設為×。進而,於加速壽命試驗(HALT,Highly accelerated life test)中,針對設置於加熱至150℃之恆溫槽內之試樣,於對相互積層之內部電極間之介電層所施加之電壓以電場強度換算計設為20 V/μm之情形時,將至絕緣破壞為止之程度之平均加速壽命為500 hr以上者設為◎,將100 hr以上者設為○,將其以下者設為×。
將所獲得之積層陶瓷電容器之特性示於表2。
(實施例2)
以成為表3所示之組成之方式,使用與實施例1相同之方法準備介電質粉末,並確認燒結性。
於藉由上述方式獲得之介電質粉末中,適當添加PVB黏合劑或丙烯酸系黏合劑、塑化劑、成為溶劑之有機溶劑,而製作陶瓷漿料後,使用反向輥塗佈機等,將該陶瓷漿料於聚酯膜上加工成厚度為7 μm之生片。其後,切割成規定尺寸而獲得矩形之陶瓷生片。
於所獲得之矩形之陶瓷生片上,使用絲網印刷法等印刷以Cu作為主成分之內部電極用漿料,形成導電圖案。
其次,將形成有導電圖案之陶瓷生片沿規定方向積層複數層。此時,鄰接之上下之陶瓷生片係以沿內部電極圖案之長度方向移動約一半之程度之方式配置其印刷面。進而,於該積層物之上下兩面積層未印刷內部電極圖案之保護層用之陶瓷生片並壓接。其後,切成規定之形狀而製作陶瓷積層體。
其次,預先將外部電極用漿料塗佈於所切出之陶瓷積層體中之露出內部電極3之端面並乾燥後,於(不會氧化Cu之程度之)惰性環境下,於300~600℃下進行脫黏合劑處理,其後於含有水蒸氣之氮氣:98%-H2
:2%氣體環境下,以300℃/hr之速度,升溫至規定之煅燒溫度(940~1030℃),達到煅燒溫度後,保持2小時,其後以300℃/hr之速度降低溫度,於約700℃下將環境改變為氮氣環境,保持2小時後,冷卻至室溫,藉此同時進行積層陶瓷之燒結與外部電極4之形成。
針對所獲得之積層陶瓷電容器,與實施例1同樣地進行評價,將其結果示於表4。
如表4所示,即使同時進行外部電極之形成與介電層之燒結,亦可獲得規定之特性。
由以上內容得知,於構成積層陶瓷電容器中之介電層的含有包含BaTiO3
之主成分、與包含Re、Mn、V、Mo、Cu、B、Li、Sr、Ca之副成分之介電陶瓷組合物中,藉由如上述般規定構成組合物之成分之含量等,可獲得如下之積層陶瓷電容器,其即使組合物中不含有對環境或人體有害之鉛或鉍等,亦可於1080℃以下進行低溫燒結,且可進行與以Cu作為主成分之導電性優異之金屬之共燒結,藉由將Cu作為內部電極,顯示出高介電係數及滿足X7R特性(或X5R特性)之介電特性,並且即使於還原環境下進行煅燒,絕緣電阻亦較高,進而高溫負荷等之壽命特性優異。
1...積層陶瓷電容器
2...介電層
3...內部電極
4...外部電極
圖1係示意性地表示本發明之積層陶瓷電容器之一實施形態的圖。
1...積層陶瓷電容器
2...介電層
3...內部電極
4...外部電極
Claims (9)
- 一種介電陶瓷組合物,其係含有包含BaTiO3 之主成分、與包含Re、Mn、V、Mo、Cu、B、Li、Ca、Sr之副成分者,其特徵在於:於將上述介電陶瓷組成以BaTiO3 +aRe2 O3 +bMnO+cV2 O5 +dMoO3 +eCuO+fB2 O3 +gLi2 O+xSrO+yCaO(其中,Re為選自Eu、Gd、Dy、Ho、Er、Yb、及Y中之1種以上,a~g、x及y表示相對於包含BaTiO3 之主成分100莫耳之莫耳數)表示,將該介電陶瓷組合物所含有之(Ba+Sr+Ca)/Ti之莫耳比設為m時,0.10≦a≦0.50 0.20≦b≦0.80 0≦c≦0.12 0≦d≦0.07 0.04≦c+d≦0.12 0≦e≦1.00 0.50≦f≦2.00 0.6≦(100(m-1)+2g)/2f≦1.3 0.5≦100(m-1)/2g≦5.1 0≦x≦1.5 0≦y≦1.5。
- 如請求項1之介電陶瓷組合物,其中作為雜質而含有之Si於將包含BaTiO3 之主成分設為100莫耳時,以SiO2 換算計為1.0莫耳以下。
- 如請求項1或2之介電陶瓷組合物,其可於燒結溫度為1030℃以下進行緻密化。
- 如請求項1或2之介電陶瓷組合物,其中於將上述介電陶瓷組成以(Ba1-v-w Srv Caw )TiO3 +aRe2 O3 +bMnO+cV2 O5 +dMoO3 +eCuO+fB2 O3 +gLi2 O+xSrO+yCaO表示時,0≦x+v×100≦1.5 0≦y+w×100≦1.5。
- 如請求項4之介電陶瓷組合物,其可於燒結溫度為1030℃以下進行緻密化。
- 一種積層陶瓷電容器,其係具有複數層介電陶瓷層、及於該介電陶瓷層間對向形成之內部電極者,其特徵在於:上述介電陶瓷層係由請求項1至5中任一項之介電陶瓷組合物所構成之燒結體,上述內部電極係由Cu或Cu合金所構成。
- 如請求項6之積層陶瓷電容器,其中上述積層陶瓷電容器具有複數層介電陶瓷層、以交替地導出至不同端面之方式於該介電陶瓷層間對向形成之內部電極、及於上述介電陶瓷層之兩端面所形成之與上述各自之內部電極電性連接之外部電極。
- 一種請求項6或7之積層陶瓷電容器之製造方法,其特徵在於具備如下步驟:準備於包含BaTiO3 系化合物之主成分原料中,以氧化物或玻璃、其他化合物等形態至少含有Re(此處,Re為選自Eu、Gd、Dy、Ho、Er、Yb、及Y中之1種以上)、Mn、B、及Li,進而V、Mo中之1種以上, 或進而Cu或Ba、Sr、Ca作為副成分原料之陶瓷原料之步驟;片材形成步驟,其係使用該陶瓷原料形成陶瓷生片;印刷步驟,其係將以Cu作為主成分之內部電極圖案印刷於該陶瓷生片上;積層步驟,其係積層經過該印刷步驟之陶瓷生片而形成積層體;裁剪步驟,其係將該積層體以每個內部電極圖案進行裁剪而獲得小片狀之積層體;煅燒步驟,其係於1030℃以下之溫度下,於還原性環境下煅燒該裁剪步驟所獲得之小片狀之積層體而獲得燒結體;及外部電極形成步驟,其係以於該燒結體之兩端部與該內部電極電性連接之方式塗佈外部電極用導電膏並實施燒附處理。
- 一種請求項6或7之積層陶瓷電容器之製造方法,其特徵在於具備如下步驟:準備於包含BaTiO3 系化合物之主成分原料中,以氧化物或玻璃、其他化合物等形態至少含有Re(此處,Re為選自Eu、Gd、Dy、Ho、Er、Yb、及Y中之1種以上)、Mn、B、及Li,進而V、Mo中之1種以上,或進而Cu或Ba、Sr、Ca作為副成分原料之陶瓷原料之步驟;片材形成步驟,其係使用該陶瓷原料形成陶瓷生片;印刷步驟,其係將以Cu作為主成分之內部電極圖案印刷於該陶瓷生片上;積層步驟,其係積層經過該印刷步驟之陶瓷生片而形成積層體;裁剪步驟,其係將該積層體以每個內部電極圖案進行裁剪而獲得小片狀之積層體;外部電極形成步驟,其係以於該裁剪步驟所獲得之小片狀之積層體之兩端部與該內部電極電性連接之方式塗佈 外部電極用導電膏;及煅燒步驟,其係於1030℃以下之溫度下,於還原性環境下煅燒該外部電極形成步驟所獲得之小片狀之積層體。
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