TWI456678B - 用於基板之自動化載具,尤指用於製造矽基太陽能電池之晶圓 - Google Patents
用於基板之自動化載具,尤指用於製造矽基太陽能電池之晶圓 Download PDFInfo
- Publication number
- TWI456678B TWI456678B TW097106172A TW97106172A TWI456678B TW I456678 B TWI456678 B TW I456678B TW 097106172 A TW097106172 A TW 097106172A TW 97106172 A TW97106172 A TW 97106172A TW I456678 B TWI456678 B TW I456678B
- Authority
- TW
- Taiwan
- Prior art keywords
- wafer
- carrier
- cover plate
- automated
- carrier according
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE200720003416 DE202007003416U1 (de) | 2007-03-04 | 2007-03-04 | Automatisierungscarrier für Substrate, insbesondere für Wafer zur Herstellung siliziumbasierter Solarzellen |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200847313A TW200847313A (en) | 2008-12-01 |
TWI456678B true TWI456678B (zh) | 2014-10-11 |
Family
ID=38136193
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW097106172A TWI456678B (zh) | 2007-03-04 | 2008-02-22 | 用於基板之自動化載具,尤指用於製造矽基太陽能電池之晶圓 |
Country Status (3)
Country | Link |
---|---|
DE (1) | DE202007003416U1 (de) |
TW (1) | TWI456678B (de) |
WO (1) | WO2008106913A2 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008062123A1 (de) | 2008-12-16 | 2010-06-17 | Q-Cells Se | Modularer Carrier |
DE102009024239A1 (de) | 2009-05-29 | 2010-12-02 | Schmid Technology Systems Gmbh | Vorrichtung und Verfahren zum Stapeln bzw. Transport einer Vielzahl von flachen Substraten |
DE102013008100A1 (de) | 2012-05-15 | 2013-11-21 | Jonas & Redmann Automationstechnik Gmbh | Vorrichtung zur Veränderung von Abständen zwischen einzelnen Substraten |
EP2711979A1 (de) * | 2012-09-24 | 2014-03-26 | Meyer Burger AG | Wafer-Schneidsystem |
EP2711978A1 (de) | 2012-09-24 | 2014-03-26 | Meyer Burger AG | Verfahren zur Herstellung von Wafern |
EP2720258A1 (de) | 2012-10-12 | 2014-04-16 | Meyer Burger AG | System zur Handhabung von Wafern |
EP2944444A1 (de) | 2014-05-16 | 2015-11-18 | Meyer Burger AG | Waferverarbeitungsverfahren |
FR3114437B1 (fr) | 2020-09-21 | 2023-03-31 | Commissariat Energie Atomique | Dispositif de maintien de plaquette, ensemble de traitement de plaquette et procédé de traitement de plaquette associés |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4228902A (en) * | 1979-02-21 | 1980-10-21 | Kasper Instruments, Inc. | Carrier for semiconductive wafers |
EP0579099A1 (de) * | 1992-07-08 | 1994-01-19 | Daifuku Co., Ltd. | Behälter für scheibenähnliche Gegenstände |
JPH0853187A (ja) * | 1994-08-09 | 1996-02-27 | Sony Corp | 板状物品収納用キャリア |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4153164A (en) * | 1978-06-13 | 1979-05-08 | Kasper Instruments, Inc. | Carrier for semiconductive wafers |
EP0100539A3 (de) * | 1982-07-30 | 1985-05-22 | Tecnisco Ltd. | Zusammengefügte Anordnung zur Halterung von Halbleiterscheiben oder ähnlichem |
JP3148832B2 (ja) * | 1993-01-11 | 2001-03-26 | 株式会社ダイフク | 物品収納容器 |
JPH09107026A (ja) * | 1995-10-12 | 1997-04-22 | Shin Etsu Polymer Co Ltd | ウェーハ収納容器のウェーハカセット |
JPH09129718A (ja) * | 1995-11-02 | 1997-05-16 | Kawasaki Steel Corp | 板状部品収容器 |
JPH11302481A (ja) * | 1998-04-22 | 1999-11-02 | Idemitsu Petrochem Co Ltd | スチレン系樹脂組成物及び半導体搬送用治具 |
US7121414B2 (en) * | 2001-12-28 | 2006-10-17 | Brooks Automation, Inc. | Semiconductor cassette reducer |
DE10215283B4 (de) * | 2002-04-05 | 2004-06-03 | Astec Halbleitertechnologie Gmbh | Vorrichtung zur Aufnahme von Substraten |
JP2004095942A (ja) * | 2002-09-02 | 2004-03-25 | Kokusai Electric Semiconductor Service Inc | ウェーハカセット |
US20040238623A1 (en) * | 2003-05-09 | 2004-12-02 | Wayne Asp | Component handling device having a film insert molded RFID tag |
JP4667769B2 (ja) * | 2004-06-11 | 2011-04-13 | 信越ポリマー株式会社 | 基板収納容器 |
-
2007
- 2007-03-04 DE DE200720003416 patent/DE202007003416U1/de not_active Expired - Lifetime
-
2008
- 2008-01-15 WO PCT/DE2008/000083 patent/WO2008106913A2/de active Application Filing
- 2008-02-22 TW TW097106172A patent/TWI456678B/zh not_active IP Right Cessation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4228902A (en) * | 1979-02-21 | 1980-10-21 | Kasper Instruments, Inc. | Carrier for semiconductive wafers |
EP0579099A1 (de) * | 1992-07-08 | 1994-01-19 | Daifuku Co., Ltd. | Behälter für scheibenähnliche Gegenstände |
JPH0853187A (ja) * | 1994-08-09 | 1996-02-27 | Sony Corp | 板状物品収納用キャリア |
Also Published As
Publication number | Publication date |
---|---|
WO2008106913A2 (de) | 2008-09-12 |
TW200847313A (en) | 2008-12-01 |
DE202007003416U1 (de) | 2007-05-31 |
WO2008106913A4 (de) | 2009-01-15 |
WO2008106913A3 (de) | 2008-11-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |