TWI429050B - 堆疊式晶片封裝 - Google Patents
堆疊式晶片封裝 Download PDFInfo
- Publication number
- TWI429050B TWI429050B TW096121889A TW96121889A TWI429050B TW I429050 B TWI429050 B TW I429050B TW 096121889 A TW096121889 A TW 096121889A TW 96121889 A TW96121889 A TW 96121889A TW I429050 B TWI429050 B TW I429050B
- Authority
- TW
- Taiwan
- Prior art keywords
- integrated circuit
- wire bond
- electrical contact
- wafer
- chip
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/551—Materials of bond wires
- H10W72/552—Materials of bond wires comprising metals or metalloids, e.g. silver
- H10W72/5522—Materials of bond wires comprising metals or metalloids, e.g. silver comprising gold [Au]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/851—Dispositions of multiple connectors or interconnections
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/851—Dispositions of multiple connectors or interconnections
- H10W72/853—On the same surface
- H10W72/859—Bump connectors and bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/851—Dispositions of multiple connectors or interconnections
- H10W72/874—On different surfaces
- H10W72/877—Bump connectors and die-attach connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/851—Dispositions of multiple connectors or interconnections
- H10W72/874—On different surfaces
- H10W72/884—Die-attach connectors and bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
- H10W90/722—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between stacked chips
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/732—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between stacked chips
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/752—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between stacked chips
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/754—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Wire Bonding (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US81377806P | 2006-06-15 | 2006-06-15 | |
| US11/801,317 US7535110B2 (en) | 2006-06-15 | 2007-05-09 | Stack die packages |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200807670A TW200807670A (en) | 2008-02-01 |
| TWI429050B true TWI429050B (zh) | 2014-03-01 |
Family
ID=38666964
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW096121889A TWI429050B (zh) | 2006-06-15 | 2007-06-15 | 堆疊式晶片封裝 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US7535110B2 (https=) |
| EP (1) | EP2033220B1 (https=) |
| JP (1) | JP5320611B2 (https=) |
| CN (1) | CN101506975B (https=) |
| TW (1) | TWI429050B (https=) |
| WO (1) | WO2007146307A2 (https=) |
Families Citing this family (51)
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| JP5388422B2 (ja) * | 2007-05-11 | 2014-01-15 | スパンション エルエルシー | 半導体装置及びその製造方法 |
| US7677109B2 (en) * | 2008-02-27 | 2010-03-16 | Honeywell International Inc. | Pressure sense die pad layout and method for direct wire bonding to programmable compensation integrated circuit die |
| US8310051B2 (en) | 2008-05-27 | 2012-11-13 | Mediatek Inc. | Package-on-package with fan-out WLCSP |
| US8093722B2 (en) * | 2008-05-27 | 2012-01-10 | Mediatek Inc. | System-in-package with fan-out WLCSP |
| US8253231B2 (en) * | 2008-09-23 | 2012-08-28 | Marvell International Ltd. | Stacked integrated circuit package using a window substrate |
| US9009393B1 (en) | 2008-09-23 | 2015-04-14 | Marvell International Ltd. | Hybrid solid-state disk (SSD)/hard disk drive (HDD) architectures |
| US8896126B2 (en) | 2011-08-23 | 2014-11-25 | Marvell World Trade Ltd. | Packaging DRAM and SOC in an IC package |
| US20100213588A1 (en) * | 2009-02-20 | 2010-08-26 | Tung-Hsien Hsieh | Wire bond chip package |
| US8236607B2 (en) * | 2009-06-19 | 2012-08-07 | Stats Chippac Ltd. | Integrated circuit packaging system with stacked integrated circuit and method of manufacture thereof |
| US8304917B2 (en) * | 2009-12-03 | 2012-11-06 | Powertech Technology Inc. | Multi-chip stacked package and its mother chip to save interposer |
| TWI501380B (zh) * | 2010-01-29 | 2015-09-21 | 財團法人國家實驗研究院國家晶片系統設計中心 | 多基板晶片模組堆疊之三維系統晶片結構 |
| KR101683814B1 (ko) | 2010-07-26 | 2016-12-08 | 삼성전자주식회사 | 관통 전극을 구비하는 반도체 장치 |
| US9490003B2 (en) * | 2011-03-31 | 2016-11-08 | Intel Corporation | Induced thermal gradients |
| US9658678B2 (en) | 2011-03-31 | 2017-05-23 | Intel Corporation | Induced thermal gradients |
| US8674483B2 (en) | 2011-06-27 | 2014-03-18 | Marvell World Trade Ltd. | Methods and arrangements relating to semiconductor packages including multi-memory dies |
| US8823165B2 (en) | 2011-07-12 | 2014-09-02 | Invensas Corporation | Memory module in a package |
| US8513817B2 (en) | 2011-07-12 | 2013-08-20 | Invensas Corporation | Memory module in a package |
| US8502390B2 (en) | 2011-07-12 | 2013-08-06 | Tessera, Inc. | De-skewed multi-die packages |
| US8659140B2 (en) | 2011-10-03 | 2014-02-25 | Invensas Corporation | Stub minimization using duplicate sets of signal terminals in assemblies without wirebonds to package substrate |
| US8436457B2 (en) | 2011-10-03 | 2013-05-07 | Invensas Corporation | Stub minimization for multi-die wirebond assemblies with parallel windows |
| US8659142B2 (en) | 2011-10-03 | 2014-02-25 | Invensas Corporation | Stub minimization for wirebond assemblies without windows |
| US8525327B2 (en) | 2011-10-03 | 2013-09-03 | Invensas Corporation | Stub minimization for assemblies without wirebonds to package substrate |
| WO2013052080A1 (en) | 2011-10-03 | 2013-04-11 | Invensas Corporation | Stub minimization for multi-die wirebond assemblies with orthogonal windows |
| US8659141B2 (en) | 2011-10-03 | 2014-02-25 | Invensas Corporation | Stub minimization using duplicate sets of terminals for wirebond assemblies without windows |
| US8441111B2 (en) | 2011-10-03 | 2013-05-14 | Invensas Corporation | Stub minimization for multi-die wirebond assemblies with parallel windows |
| EP2764543A2 (en) | 2011-10-03 | 2014-08-13 | Invensas Corporation | Stub minimization for multi-die wirebond assemblies with parallel windows |
| US8917532B2 (en) | 2011-10-03 | 2014-12-23 | Invensas Corporation | Stub minimization with terminal grids offset from center of package |
| CN102446882B (zh) | 2011-12-30 | 2013-12-04 | 北京工业大学 | 一种半导体封装中封装系统结构及制造方法 |
| US8787034B2 (en) | 2012-08-27 | 2014-07-22 | Invensas Corporation | Co-support system and microelectronic assembly |
| US9368477B2 (en) | 2012-08-27 | 2016-06-14 | Invensas Corporation | Co-support circuit panel and microelectronic packages |
| US8848392B2 (en) | 2012-08-27 | 2014-09-30 | Invensas Corporation | Co-support module and microelectronic assembly |
| US8848391B2 (en) | 2012-08-27 | 2014-09-30 | Invensas Corporation | Co-support component and microelectronic assembly |
| US9070423B2 (en) | 2013-06-11 | 2015-06-30 | Invensas Corporation | Single package dual channel memory with co-support |
| CN103426871B (zh) * | 2013-07-25 | 2017-05-31 | 上海航天测控通信研究所 | 一种高密度混合叠层封装结构及其制作方法 |
| US9123555B2 (en) | 2013-10-25 | 2015-09-01 | Invensas Corporation | Co-support for XFD packaging |
| CN103558903A (zh) * | 2013-11-12 | 2014-02-05 | 上海航天测控通信研究所 | 一种具有抗辐性能的PowerPC计算机模块 |
| US9153560B2 (en) | 2014-01-22 | 2015-10-06 | Qualcomm Incorporated | Package on package (PoP) integrated device comprising a redistribution layer |
| US9281296B2 (en) | 2014-07-31 | 2016-03-08 | Invensas Corporation | Die stacking techniques in BGA memory package for small footprint CPU and memory motherboard design |
| US9691437B2 (en) | 2014-09-25 | 2017-06-27 | Invensas Corporation | Compact microelectronic assembly having reduced spacing between controller and memory packages |
| JP2016192447A (ja) * | 2015-03-30 | 2016-11-10 | 株式会社東芝 | 半導体装置 |
| CN108140632B (zh) * | 2015-04-14 | 2020-08-25 | 华为技术有限公司 | 一种芯片 |
| US9871019B2 (en) | 2015-07-17 | 2018-01-16 | Invensas Corporation | Flipped die stack assemblies with leadframe interconnects |
| US9484080B1 (en) | 2015-11-09 | 2016-11-01 | Invensas Corporation | High-bandwidth memory application with controlled impedance loading |
| US10566310B2 (en) * | 2016-04-11 | 2020-02-18 | Invensas Corporation | Microelectronic packages having stacked die and wire bond interconnects |
| US9679613B1 (en) | 2016-05-06 | 2017-06-13 | Invensas Corporation | TFD I/O partition for high-speed, high-density applications |
| US9953904B1 (en) | 2016-10-25 | 2018-04-24 | Nxp Usa, Inc. | Electronic component package with heatsink and multiple electronic components |
| CN108336030A (zh) * | 2018-01-16 | 2018-07-27 | 奥肯思(北京)科技有限公司 | 一种多层堆叠系统级封装 |
| KR102699633B1 (ko) | 2019-06-25 | 2024-08-29 | 삼성전자주식회사 | 반도체 장치 및 그 제조 방법 |
| US11075147B2 (en) * | 2019-07-08 | 2021-07-27 | Texas Instruments Incorporated | Stacked die semiconductor package |
| CN110943077A (zh) * | 2019-11-08 | 2020-03-31 | 关键禾芯科技股份有限公司 | 毫米波应用的多颗晶片封装结构 |
| US20240072002A1 (en) * | 2022-08-23 | 2024-02-29 | Micron Technology, Inc. | Semiconductor devices, assemblies, and associated methods |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0274046A (ja) * | 1988-09-09 | 1990-03-14 | Nec Ic Microcomput Syst Ltd | 半導体集積回路装置 |
| JP3602888B2 (ja) * | 1995-06-14 | 2004-12-15 | 松下電器産業株式会社 | 半導体装置 |
| US5815372A (en) | 1997-03-25 | 1998-09-29 | Intel Corporation | Packaging multiple dies on a ball grid array substrate |
| US6271598B1 (en) * | 1997-07-29 | 2001-08-07 | Cubic Memory, Inc. | Conductive epoxy flip-chip on chip |
| US6413797B2 (en) | 1997-10-09 | 2002-07-02 | Rohm Co., Ltd. | Semiconductor device and method for making the same |
| JP3111312B2 (ja) * | 1997-10-29 | 2000-11-20 | ローム株式会社 | 半導体装置 |
| US6222260B1 (en) * | 1998-05-07 | 2001-04-24 | Vlsi Technology, Inc. | Integrated circuit device with integral decoupling capacitor |
| JP3494901B2 (ja) * | 1998-09-18 | 2004-02-09 | シャープ株式会社 | 半導体集積回路装置 |
| JP2001196529A (ja) * | 2000-01-17 | 2001-07-19 | Mitsubishi Electric Corp | 半導体装置及びその配線方法 |
| JP2001223324A (ja) * | 2000-02-10 | 2001-08-17 | Mitsubishi Electric Corp | 半導体装置 |
| JP2003197856A (ja) * | 2001-12-28 | 2003-07-11 | Oki Electric Ind Co Ltd | 半導体装置 |
| JP2003332522A (ja) * | 2002-05-17 | 2003-11-21 | Mitsubishi Electric Corp | 半導体装置 |
| US6747341B2 (en) * | 2002-06-27 | 2004-06-08 | Semiconductor Components Industries, L.L.C. | Integrated circuit and laminated leadframe package |
| JP2005109068A (ja) * | 2003-09-30 | 2005-04-21 | Sanyo Electric Co Ltd | 半導体装置およびその製造方法 |
| JP4103796B2 (ja) * | 2003-12-25 | 2008-06-18 | 沖電気工業株式会社 | 半導体チップパッケージ及びマルチチップパッケージ |
| JP2005268534A (ja) * | 2004-03-18 | 2005-09-29 | Shinko Electric Ind Co Ltd | 半導体チップおよび積層型半導体装置 |
| US20050212144A1 (en) * | 2004-03-25 | 2005-09-29 | Rugg William L | Stacked die for inclusion in standard package technology |
| US7217597B2 (en) * | 2004-06-22 | 2007-05-15 | Micron Technology, Inc. | Die stacking scheme |
| US8212367B2 (en) | 2004-11-10 | 2012-07-03 | Sandisk Il Ltd. | Integrated circuit die with logically equivalent bonding pads |
-
2007
- 2007-05-09 US US11/801,317 patent/US7535110B2/en active Active
- 2007-06-13 CN CN2007800304876A patent/CN101506975B/zh active Active
- 2007-06-13 WO PCT/US2007/013821 patent/WO2007146307A2/en not_active Ceased
- 2007-06-13 EP EP07809502.3A patent/EP2033220B1/en active Active
- 2007-06-13 JP JP2009515464A patent/JP5320611B2/ja active Active
- 2007-06-15 TW TW096121889A patent/TWI429050B/zh active
-
2009
- 2009-05-01 US US12/434,264 patent/US7825521B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| WO2007146307A3 (en) | 2008-03-06 |
| WO2007146307B1 (en) | 2008-05-22 |
| US7825521B2 (en) | 2010-11-02 |
| US7535110B2 (en) | 2009-05-19 |
| US20090212410A1 (en) | 2009-08-27 |
| CN101506975A (zh) | 2009-08-12 |
| EP2033220B1 (en) | 2019-10-16 |
| EP2033220A2 (en) | 2009-03-11 |
| JP5320611B2 (ja) | 2013-10-23 |
| TW200807670A (en) | 2008-02-01 |
| CN101506975B (zh) | 2011-04-06 |
| US20080006948A1 (en) | 2008-01-10 |
| WO2007146307A2 (en) | 2007-12-21 |
| JP2009540606A (ja) | 2009-11-19 |
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