TWI419252B - 基板搬運裝置及基板搬運方法 - Google Patents

基板搬運裝置及基板搬運方法 Download PDF

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Publication number
TWI419252B
TWI419252B TW098138797A TW98138797A TWI419252B TW I419252 B TWI419252 B TW I419252B TW 098138797 A TW098138797 A TW 098138797A TW 98138797 A TW98138797 A TW 98138797A TW I419252 B TWI419252 B TW I419252B
Authority
TW
Taiwan
Prior art keywords
wafer
arm
substrate
transfer device
arm portions
Prior art date
Application number
TW098138797A
Other languages
English (en)
Chinese (zh)
Other versions
TW201029097A (en
Inventor
蛇石廣康
Original Assignee
奧林巴斯股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 奧林巴斯股份有限公司 filed Critical 奧林巴斯股份有限公司
Publication of TW201029097A publication Critical patent/TW201029097A/zh
Application granted granted Critical
Publication of TWI419252B publication Critical patent/TWI419252B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7602—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a robot blade or gripped by a gripper for conveyance
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/51—Plural diverse manufacturing apparatus including means for metal shaping or assembling
    • Y10T29/518—Carriage stop mechanism

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
TW098138797A 2008-12-02 2009-11-16 基板搬運裝置及基板搬運方法 TWI419252B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008307375A JP4660586B2 (ja) 2008-12-02 2008-12-02 基板搬送装置、及び、基板搬送方法

Publications (2)

Publication Number Publication Date
TW201029097A TW201029097A (en) 2010-08-01
TWI419252B true TWI419252B (zh) 2013-12-11

Family

ID=42222950

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098138797A TWI419252B (zh) 2008-12-02 2009-11-16 基板搬運裝置及基板搬運方法

Country Status (5)

Country Link
US (1) US8172291B2 (https=)
JP (1) JP4660586B2 (https=)
KR (1) KR101135557B1 (https=)
CN (1) CN101752283B (https=)
TW (1) TWI419252B (https=)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM394568U (en) * 2010-07-23 2010-12-11 Chen Long Technology Corp Ltd Multiplexing wafer baking processing system
TWI478793B (zh) * 2010-08-04 2015-04-01 Hon Hai Prec Ind Co Ltd 夾持裝置
JP5182339B2 (ja) * 2010-08-31 2013-04-17 三星ダイヤモンド工業株式会社 基板ブレーク装置
JP2014130899A (ja) * 2012-12-28 2014-07-10 Olympus Corp 基板搬送装置、基板検査装置及び基板搬送方法
JP6059565B2 (ja) * 2013-03-13 2017-01-11 三星ダイヤモンド工業株式会社 吸着反転装置
JP2017098275A (ja) * 2014-03-28 2017-06-01 パナソニックＩｐマネジメント株式会社 半導体ウエハ搬送装置およびそれを利用した太陽電池の製造方法
JP6589419B2 (ja) * 2015-07-09 2019-10-16 株式会社デンソー 基板加工装置および基板加工方法
CN107973122B (zh) * 2016-10-21 2020-04-28 南京瀚宇彩欣科技有限责任公司 活动式支撑机构
JP7088641B2 (ja) * 2017-08-09 2022-06-21 株式会社Ｓｃｒｅｅｎ Ｓｐｅ テック 基板搬送装置
US11964383B2 (en) * 2019-01-16 2024-04-23 Kawasaki Jukogyo Kabushiki Kaisha Robot hand and robot having the same
US20230133493A1 (en) * 2020-02-12 2023-05-04 Jabil Inc. Apparatus, system and method for providing a flipper for in-process substrates
JP7466360B2 (ja) * 2020-04-10 2024-04-12 ニデックインスツルメンツ株式会社 産業用ロボットのハンドおよび産業用ロボット
TWI796709B (zh) * 2021-06-16 2023-03-21 盛詮科技股份有限公司 晶圓懸浮手臂
TWI814679B (zh) * 2023-02-13 2023-09-01 盛詮科技股份有限公司 載板懸浮手臂

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1022364A (ja) * 1996-07-05 1998-01-23 Metsukusu:Kk 搬送装置における吸着ハンド
JP2005093893A (ja) * 2003-09-19 2005-04-07 Nec Yamagata Ltd ウェハ搬送装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10146784A (ja) * 1996-11-19 1998-06-02 Dainippon Printing Co Ltd 基板搬送用ロボットハンド
JPH11268829A (ja) * 1998-03-20 1999-10-05 Olympus Optical Co Ltd ローダ・アンローダ
JP2001277169A (ja) * 2000-04-03 2001-10-09 Matsushita Electric Ind Co Ltd ロボットハンド
JP4298188B2 (ja) * 2001-08-03 2009-07-15 シャープ株式会社 基板搬送装置及び基板搬送方法
JP4016622B2 (ja) * 2001-08-28 2007-12-05 セイコーエプソン株式会社 吸着保持器、搬送装置、基板の搬送方法、及び、電気光学装置の製造方法
JP4524132B2 (ja) 2004-03-30 2010-08-11 東京エレクトロン株式会社 真空処理装置
JP2006310709A (ja) * 2005-05-02 2006-11-09 Hitachi Plant Technologies Ltd 半導体ウェハ保持装置及び方法
JP2009154213A (ja) * 2006-04-11 2009-07-16 Nikon Corp 搬送装置、搬送方法、およびデバイス製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1022364A (ja) * 1996-07-05 1998-01-23 Metsukusu:Kk 搬送装置における吸着ハンド
JP2005093893A (ja) * 2003-09-19 2005-04-07 Nec Yamagata Ltd ウェハ搬送装置

Also Published As

Publication number Publication date
CN101752283B (zh) 2012-06-13
JP2010135381A (ja) 2010-06-17
US20100135761A1 (en) 2010-06-03
TW201029097A (en) 2010-08-01
KR101135557B1 (ko) 2012-04-17
KR20100062924A (ko) 2010-06-10
CN101752283A (zh) 2010-06-23
JP4660586B2 (ja) 2011-03-30
US8172291B2 (en) 2012-05-08

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