JP4723204B2 - 統合された大型ガラス取り扱いシステム - Google Patents
統合された大型ガラス取り扱いシステム Download PDFInfo
- Publication number
- JP4723204B2 JP4723204B2 JP2004139481A JP2004139481A JP4723204B2 JP 4723204 B2 JP4723204 B2 JP 4723204B2 JP 2004139481 A JP2004139481 A JP 2004139481A JP 2004139481 A JP2004139481 A JP 2004139481A JP 4723204 B2 JP4723204 B2 JP 4723204B2
- Authority
- JP
- Japan
- Prior art keywords
- glass
- translation stage
- handling system
- glass plate
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000011521 glass Substances 0.000 title claims description 31
- 238000007689 inspection Methods 0.000 description 4
- 230000014759 maintenance of location Effects 0.000 description 3
- 238000005286 illumination Methods 0.000 description 2
- 230000001066 destructive effect Effects 0.000 description 1
- 239000012636 effector Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/10—Structural association with clutches, brakes, gears, pulleys or mechanical starters
- H02K7/102—Structural association with clutches, brakes, gears, pulleys or mechanical starters with friction brakes
- H02K7/1021—Magnetically influenced friction brakes
- H02K7/1023—Magnetically influenced friction brakes using electromagnets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/062—Easels, stands or shelves, e.g. castor-shelves, supporting means on vehicles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
- F16D55/00—Brakes with substantially-radial braking surfaces pressed together in axial direction, e.g. disc brakes
- F16D55/02—Brakes with substantially-radial braking surfaces pressed together in axial direction, e.g. disc brakes with axially-movable discs or pads pressed against axially-located rotating members
- F16D55/22—Brakes with substantially-radial braking surfaces pressed together in axial direction, e.g. disc brakes with axially-movable discs or pads pressed against axially-located rotating members by clamping an axially-located rotating disc between movable braking members, e.g. movable brake discs or brake pads
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
- F16D65/00—Parts or details
- F16D65/0006—Noise or vibration control
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
- F16D2121/00—Type of actuator operation force
- F16D2121/18—Electric or magnetic
- F16D2121/20—Electric or magnetic using electromagnets
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- Liquid Crystal (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Laminated Bodies (AREA)
Description
Claims (4)
- 大型の薄いガラス・プレートの平行移動および支持を行うためのガラス取り扱いシステムであって:
ベースプレートと;
前記ベースプレートに結合された、前記ガラス・プレートと対向するように配置されたレール・チャックレットのアレイであり、前記チャックレットのそれぞれは、エア・ベアリングとして前記ガラス・プレート上に当たるガスを放出するように配置された小孔を有し、前記チャックレットは、平行に整列させられており、それによってバキューム接触の下において、前記ガラス・プレートを受け、支持し、かつ確保するためのグリルを形成するレール・チャックレットのアレイと;
保持、回転整列および限定的なx方向内での平行移動整列のために前記ガラス・プレートに取り付けられるようにスライドにマウントされた複数の真空パッドと;
前記ガラス・プレートの下側に、その質量中心を通る軸に沿って配置されるY平行移動ステージと;および、
前記Y平行移動ステージに沿って設けられた、前記ガラス・プレートに取り付けるための複数の真空クランプと;
を備えるガラス取り扱いシステム。 - 前記真空パッドは、前記ガラス・プレートと、そのエッジ近傍において対向するように配置されているものとする請求項1に記載のガラス取り扱いシステム。
- さらに、前記ベースプレートにマウントされるレールX平行移動ステージ、前記X平行移動ステージにマウントされる旋回Z平行移動ステージを備え、前記Y平行移動ステージは、エア・ベアリング上である請求項1に記載のガラス取り扱いシステム。
- 前記Y平行移動ステージは、エア・ベアリング上のレールであり、リニア・モータが前記Y平行移動ステージに、前記ガラス・プレートと、その質量中心に沿って係合し、移動のトルクを最小化するために、マウントされている請求項2に記載のガラス取り扱いシステム。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/435,323 US6736588B1 (en) | 2003-05-09 | 2003-05-09 | Integrated large glass handling system |
US10/435,323 | 2003-05-09 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004334220A JP2004334220A (ja) | 2004-11-25 |
JP4723204B2 true JP4723204B2 (ja) | 2011-07-13 |
Family
ID=32298324
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004139481A Expired - Lifetime JP4723204B2 (ja) | 2003-05-09 | 2004-05-10 | 統合された大型ガラス取り扱いシステム |
Country Status (5)
Country | Link |
---|---|
US (1) | US6736588B1 (ja) |
JP (1) | JP4723204B2 (ja) |
KR (1) | KR20040095710A (ja) |
CN (1) | CN1550434A (ja) |
TW (1) | TWI324979B (ja) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL1015030C2 (nl) * | 2000-04-14 | 2001-10-16 | Fico Bv | Werkwijze en inrichting voor transport van elektronische componenten. |
DE10157703B4 (de) * | 2001-11-24 | 2004-05-06 | Weidenmüller, Ralf | Vorrichtung zum gleichzeitigen Fördern und Temperieren von Formteilen |
WO2004076320A1 (de) * | 2003-02-25 | 2004-09-10 | Technische Universität München | Vorrichtung zum berührungslosen transportieren und positionieren von bauteilen |
KR100956348B1 (ko) * | 2003-09-05 | 2010-05-06 | 삼성전자주식회사 | 인라인 반송 시스템 |
JP4626975B2 (ja) * | 2005-01-14 | 2011-02-09 | 株式会社日立ハイテクノロジーズ | 基板検査装置及び基板検査方法 |
US7301133B2 (en) * | 2005-01-21 | 2007-11-27 | Photon Dynamics, Inc. | Tracking auto focus system |
TWI316503B (en) * | 2005-01-26 | 2009-11-01 | Sfa Engineering Corp | Substrate transferring apparatus |
KR100665715B1 (ko) * | 2005-01-27 | 2007-01-09 | 주식회사 태성기연 | 판유리 이송장치 |
KR100742153B1 (ko) * | 2005-07-08 | 2007-07-24 | 주식회사 태성기연 | 판유리 이송장치 |
KR100713815B1 (ko) * | 2005-07-08 | 2007-05-02 | 주식회사 태성기연 | 판유리 이송장치 |
KR100765124B1 (ko) * | 2006-02-14 | 2007-10-11 | 주식회사 엔씨비네트웍스 | 글라스 반송장치 |
CN100368882C (zh) * | 2006-04-14 | 2008-02-13 | 友达光电股份有限公司 | 支撑架与其垫片 |
US7941237B2 (en) * | 2006-04-18 | 2011-05-10 | Multibeam Corporation | Flat panel display substrate testing system |
KR100794930B1 (ko) * | 2006-12-06 | 2008-01-15 | 아프로시스템 주식회사 | 압축공기를 이용한 평판 디스플레이용 글라스의 롤러샤프트 처짐 방지 장치 |
JP4840595B2 (ja) * | 2007-02-20 | 2011-12-21 | 株式会社Ihi | 基板搬送機 |
DE102008006956B3 (de) * | 2008-01-31 | 2009-09-03 | Grenzebach Maschinenbau Gmbh | Portalumsetzer für großflächige Glasplatten |
US7976261B2 (en) | 2008-05-20 | 2011-07-12 | Fas Holdings Group, Llc | Apparatus for moving and securing a substrate |
KR200470005Y1 (ko) | 2008-12-29 | 2013-11-21 | 주식회사 탑 엔지니어링 | 디스펜서 스테이지 |
KR101162056B1 (ko) | 2009-12-09 | 2012-07-03 | 엘아이지에이디피 주식회사 | 기판 이송장치 및 이를 이용한 기판 검사장치 |
US9035673B2 (en) * | 2010-01-25 | 2015-05-19 | Palo Alto Research Center Incorporated | Method of in-process intralayer yield detection, interlayer shunt detection and correction |
CN103776408B (zh) * | 2012-10-22 | 2017-02-15 | 昆山杰士德精密工业有限公司 | 产品厚度自动快速定位检测治具 |
CN104229475B (zh) * | 2013-06-17 | 2017-07-18 | 深圳富泰宏精密工业有限公司 | 分料装置 |
CN105382523A (zh) * | 2015-12-10 | 2016-03-09 | 广州福耀玻璃有限公司 | 玻璃夹具系统及其安装方法、玻璃附件安装系统 |
CN111601763B (zh) | 2017-07-11 | 2022-03-29 | 康宁公司 | 玻璃加工设备及方法 |
CN109502344A (zh) * | 2018-11-30 | 2019-03-22 | 佛山市博斯马克机器人有限公司 | 一种智能玻璃加工装置 |
KR20210100165A (ko) | 2018-12-13 | 2021-08-13 | 코닝 인코포레이티드 | 이송 장치 및 리본 이송 |
CN110155720B (zh) * | 2019-06-27 | 2021-04-23 | 明池玻璃股份有限公司 | 一种具有夹持装置的玻璃基板操作平台 |
CN113146642B (zh) * | 2021-05-19 | 2022-06-10 | 杭州恒立制造科技有限公司 | 一种用于油箱板加工的机械臂控制方法、装置及智能终端 |
CN114955428B (zh) * | 2022-06-17 | 2023-08-18 | 江西理工大学 | 一种便于运输的金属增材制造成型质量监控工作台 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002181714A (ja) * | 2000-12-19 | 2002-06-26 | Ishikawajima Harima Heavy Ind Co Ltd | 薄板検査装置 |
JP2002540031A (ja) * | 1999-03-22 | 2002-11-26 | アスカー・インコーポレーテッド | 真空により支援される歩動ビーム装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1137555A (en) * | 1965-10-22 | 1968-12-27 | Pilkington Brothers Ltd | Improvements in or relating to the transporting of sheet materials |
US6203250B1 (en) * | 1997-12-16 | 2001-03-20 | Ngk Insulators, Ltd. | Article feeding apparatus |
US6336775B1 (en) * | 1998-08-20 | 2002-01-08 | Matsushita Electric Industrial Co., Ltd. | Gas floating apparatus, gas floating-transporting apparatus, and thermal treatment apparatus |
-
2003
- 2003-05-09 US US10/435,323 patent/US6736588B1/en not_active Expired - Lifetime
-
2004
- 2004-04-16 TW TW093110589A patent/TWI324979B/zh not_active IP Right Cessation
- 2004-05-07 KR KR1020040032151A patent/KR20040095710A/ko not_active Application Discontinuation
- 2004-05-08 CN CNA2004100381141A patent/CN1550434A/zh active Pending
- 2004-05-10 JP JP2004139481A patent/JP4723204B2/ja not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002540031A (ja) * | 1999-03-22 | 2002-11-26 | アスカー・インコーポレーテッド | 真空により支援される歩動ビーム装置 |
JP2002181714A (ja) * | 2000-12-19 | 2002-06-26 | Ishikawajima Harima Heavy Ind Co Ltd | 薄板検査装置 |
Also Published As
Publication number | Publication date |
---|---|
CN1550434A (zh) | 2004-12-01 |
TWI324979B (en) | 2010-05-21 |
US6736588B1 (en) | 2004-05-18 |
TW200517324A (en) | 2005-06-01 |
KR20040095710A (ko) | 2004-11-15 |
JP2004334220A (ja) | 2004-11-25 |
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