WO2001022069A1 - Mecanisme parallele et appareil d'essai - Google Patents

Mecanisme parallele et appareil d'essai Download PDF

Info

Publication number
WO2001022069A1
WO2001022069A1 PCT/JP2000/006476 JP0006476W WO0122069A1 WO 2001022069 A1 WO2001022069 A1 WO 2001022069A1 JP 0006476 W JP0006476 W JP 0006476W WO 0122069 A1 WO0122069 A1 WO 0122069A1
Authority
WO
WIPO (PCT)
Prior art keywords
actuator
substrate
linear
guide rail
linear actuators
Prior art date
Application number
PCT/JP2000/006476
Other languages
English (en)
Japanese (ja)
Inventor
Naobumi Okada
Naohisa Nakahara
Hajime Takahashi
Hiroyuki Kiba
Kazuya Hirose
Original Assignee
Olympus Optical Co., Ltd.
Hephaist Seiko Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co., Ltd., Hephaist Seiko Co., Ltd. filed Critical Olympus Optical Co., Ltd.
Priority to JP2001525191A priority Critical patent/JP3635572B2/ja
Publication of WO2001022069A1 publication Critical patent/WO2001022069A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H21/00—Gearings comprising primarily only links or levers, with or without slides
    • F16H21/46—Gearings comprising primarily only links or levers, with or without slides with movements in three dimensions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B25J17/02—Wrist joints
    • B25J17/0258—Two-dimensional joints
    • B25J17/0266—Two-dimensional joints comprising more than two actuating or connecting rods
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications

Definitions

  • the present invention relates to a parallel mechanism and an inspection device having a plurality of links and controlling the attitude of a movable plate.
  • the upper movable plate and the lower fixed plate are connected to each other by a plurality of links that have been expanded and contracted by an actuator such as a hydraulic cylinder, and each of the actuators is expanded and contracted.
  • the length of the link can be changed as needed, and the posture of the movable plate can be controlled so that it can be held at various angles (horizontal or inclined).
  • ⁇ A black-form parallelism mechanism It has been known.
  • the parallel mechanism is applied to, for example, a substrate inspection apparatus for a mac, and by mounting the substrate to be inspected on a movable plate, defects such as film thickness irregularities and scratches on the surface of the substrate to be inspected are reduced. It can be observed visually.
  • the posture of the movable plate that can be set by adjusting each link length is limited to the horizontal direction and the inclined direction, so it is difficult to see depending on the direction in which the surface of the board to be inspected has been scratched. There is also a laser problem, and high-accuracy inspection cannot be performed.
  • the present invention achieves high efficiency and high accuracy by using the nora renoreme canism, which is capable of realizing a wide range of motion by increasing the degree of freedom, and by using this parallelism mechanism. It is an object of the present invention to provide an inspection apparatus capable of performing a high-level board inspection.
  • At least three linear actuators each of which includes a telescopic actuator, and a base end of each of the linear actuators are supported so as to be linearly movable along a traveling path.
  • traveling drive means having at least one of these traveling paths having an inclined portion whose height changes together with the movement of the direct acting actuator, and a driving means of the linear acting actuator.
  • a movable member supported at the distal end. The linear actuator is moved along the inclined portion, and the expansion and contraction control of each linear actuator is coordinated.
  • the movable member can be variously moved in the front, rear, left, and right directions.
  • At least three linear actuators each having a telescopic unit, and a base end of each linear actuator are supported so as to be linearly movable along a traveling path.
  • the movement of the direct acting actuator is at least high in at least one of these paths.
  • Traveling drive means having an inclined portion that changes the height, a movable member supported at the tip of the linear actuator, and a subject provided on the movable member and rotatably holding the subject. It is characterized by having a holding means and.
  • the subject holding means holding the subject can be moved close to the eyes of the examiner, and the subject holding means can be moved forward, backward, left and right in various ways. Since it can be moved to change the angle of reflection of the lighting, it is easy to find defects and it is possible to perform high-precision macro inspection.
  • FIG. 1A and 1B are views showing a substrate inspection apparatus according to an embodiment of the present invention, wherein FIG. 1A is a perspective view showing the whole, and FIG. 1B is a plan view showing a substrate holder.
  • Fig. 2 is a front view showing a moving table for actuators incorporated in the board inspection apparatus.
  • Fig. 3 is a longitudinal sectional view showing a direct acting actuator incorporated in the board inspection apparatus.
  • Fig. 4 is an explanatory diagram showing the operation of the board inspection device.
  • FIG. 5 is an explanatory view showing the operation of the board inspection apparatus.
  • FIG. 6 is an explanatory view showing the operation of the board inspection apparatus.
  • FIG. 1A is a perspective view showing a substrate inspection apparatus using a parallel mechanism according to an embodiment of the present invention
  • FIG. 1B is an object.
  • FIG. 6 is a plan view showing a substrate holder 24 that holds a substrate W to be inspected.
  • reference numeral 1 denotes a base made of a rectangular frame, and the base 1 has a recess 10 of a predetermined length in the center of a side la corresponding to the front surface of the apparatus where the inspector is located.
  • slopes 102 and 103 are formed at sides lb corresponding to both side surfaces of the device so as to gradually increase in height toward the front of the device.
  • a guide rail 2 forming a running path is arranged along the recess 101 of the base 1, and the actuator carriage 3 is moved along the guide rail 2.
  • the actuator 3 is provided so as to be movable, and a base end of a direct-acting actuator 5 is provided on the actuator moving table 3 via a swing unit 4.
  • guide rails 6 and 7 forming a running path are arranged along the upper surface of the inclined portions 102 and 103 of the base 1, and the actuators are arranged along the guide rails 6 and 7.
  • Movable bases 8 and 9 are provided so as to be movable, and these movable bases 8 and 9 are connected to the linear actuators 12 and 13 via swinging parts 10 and 11 respectively. A base end is provided.
  • the oscillating parts 4, 10, 0, 11 are free rotation joints having one degree of freedom around the rotation axes 4a, 10a, 11a, respectively.
  • the rotation axis 4 a of the swing part 4 is parallel to the axial direction of the guide rail 2.
  • the rotation axes 10a and 11a of the oscillating parts 10 and 11 are parallel to the horizontal plane and inclined inward by an angle ⁇ with respect to an imaginary line that projects the axes of the guide rails 6 and 7 on the horizontal plane. ing.
  • ⁇ is set to about 15 degrees, but this value can be changed in design according to a required operation range and the like.
  • the actuator carriage 3 is movably supported along the guide rails 2 as shown in FIG. 2 and is arranged along the guide rails 2.
  • the guide rail is connected to the screw shaft 14 via the fixing screw part 15 and is rotated by the motor 16 to rotate the screw shaft 14 via the fixing screw part 15. It is reciprocated along the line 2 and is ready.
  • Such a configuration is the same for the actuator mobilities 8 and 9, and a description thereof will be omitted with reference to FIG. 2 described above.
  • the direct acting actuator 5 has a guide 18 and a screw shaft 19 arranged side by side along the hollow portion of the fixed cylindrical body 17, and a screw shaft 19.
  • An operating shaft 21 is provided via a fixing screw portion 20 on the shaft, and a screw shaft 19 is rotated by a motor 22 via a gear 231, and along the guide 18 By moving the fixed screw part 20 back and forth, the operating shaft 21 moves linearly.
  • Such a configuration is the same for the direct acting actuators 12 and 13, and a description thereof will be omitted with reference to FIG. 3 described above.
  • the distal end of the operating shaft 21 of such a direct acting actuator 5, 12, 13 is connected to a free connecting means 21a such as a ball joint.
  • a stage supporting portion 23 made of a rectangular frame as a movable member is connected.
  • the stage support 23 is connected to the operating shaft 21 of the direct acting actuator 5 at the center of the side 23a corresponding to the front of the device.
  • the protrusions 23a1 and 23b1 vertically projecting from the side 23b corresponding to the side of the device are formed so as to face each other, and these protrusions are formed.
  • a linear actuator is connected to 23a1 and 23b1].
  • the operating shaft 21 of 2 and 13 is connected.
  • the substrate holder 24 is rotatably supported between the protrusions 23a1 and 23b1.
  • the protruding portions 23 a 1 and 23 b 1 are provided with a rotation drive portion 25.
  • the rotation drive section 25 supports and rotates the substrate holder 24.
  • the substrate holder 24 mounts the substrate to be inspected W thereon, and includes a frame 24 a facing the periphery of the substrate W to be inspected, and a plurality of suction ports 2 provided in the frame 24 a. 4 b.
  • a vacuum suction force is applied to each suction port 24b by a vacuum pump (not shown) so as to suck and hold the substrate W to be inspected.
  • 24c indicates the opening.
  • the stage supporting section 23 is moved to the loading standby position for the substrate to be inspected W (not shown) by cooperatively controlling the expansion and contraction state of the linear actuators 5, 12, and 13 to wait in the horizontal state.
  • the substrate to be inspected W to the existing substrate holder 24.
  • the board holder 24 aligns the received board to be inspected W to the normal position. At the same time, the substrate W to be inspected is suction-held by vacuum suction at the suction port 24b.
  • the actuator stages 8 and 9 of the linear actuators 12 and 13 are moved along the inclined portions 102 and 103, respectively.
  • the actuator carriages 8 and 9 are moved along the guide rails 6 and 7 toward the front of the apparatus.
  • the surface of the substrate W to be inspected on the substrate holder 24 is irradiated with illumination light. Then, the rotary drive unit 25 is driven to incline the substrate holder 24 from a horizontal state to a predetermined angle optimal for visual observation, and the reflected light from the surface of the substrate W to be inspected is used. Inspection of the external appearance is performed by visually observing the thickness unevenness and scratches on the surface of the substrate W to be inspected macroscopically.
  • the force S that does not move the linear actuators 12 and 13 along the inclined portions 102 and 103 cooperates with the expansion and contraction of the linear actuators 5, 12 and 13.
  • the substrate holder 24 can be swung back and forth, left and right, so that the macro inspection can be performed while visually observing the substrate holder 24 from various directions. .
  • the inspection of the back surface of the substrate to be inspected W has also been emphasized. This is because dust and moisture adhere to the back surface of the substrate W to be inspected. If this is the case, cracks will occur in the cross section during dicing, and poor bonding will occur when the chip after dicing is bonded to the substrate, resulting in an increase in the product failure rate. It is.
  • the substrate holder 24 is rotated 180 ° by the rotation drive unit 25 while the substrate to be inspected W is held by suction on the substrate holder 24, and the substrate
  • the mask opening inspection can be performed by visual inspection of the rear surface of the inspection substrate W in the same manner as described above.
  • the linear actuators 12 and 13 can be moved along the inclined portions 102 and 103 formed on the side 1 b of the base 1. This makes it possible to move the substrate holder 24 holding the substrate to be inspected W close to the eyes of the inspector, and at the same time, to move each of the linear actuators 5, 12, 13.
  • the board holder 24 together with the stage support 23 can be moved in various directions from front to back and left and right. , And the subsequent visual inspection can be performed with high accuracy.
  • the substrate holder 24 be as high as possible and as high as possible. For this reason, there is a recording method in which the extendable stroke of the linear actuators 12 and 13 can be extended, but the rigidity of the device is reduced and the device is also reduced. The center of gravity of the whole becomes higher, and the stability decreases.
  • the linear motion mechanism is used.
  • the board holder 24 can be positioned at a higher position without lengthening the telescopic stroke, and stable. Can be secured.
  • the inspector observes the substrate to be inspected W from the front side of the apparatus, it is inconvenient if there is a member obstructing the observation, for example, a direct acting actuator.
  • a direct acting actuator In this substrate apparatus, the fulcrum of the linear actuator 5 in the foreground is attached near the bottom of the stage support portion 23, so that it does not disturb the observation.
  • the direct acting actuators 12 and 13 of both sides are arranged at the rear, they do not obstruct the observation.
  • the substrate to be inspected W is tilted at an angle that is easy for the observer to observe. Mouth inspection can be performed. Further, by rotating the substrate holder 24 further, the rear surface of the substrate W to be inspected can be directed to the front of the apparatus. You can do it.
  • the substrate holder 24 is rotated by operating the rotation drive unit 25 on the stage support unit 23, the substrate W to be inspected is formed only by the parallel mechanism. As compared with the case where the unit is turned over, there is no need to lengthen the telescopic storage ports of the linear actuators 5, 12, and 13 and the device can be compact and simply configured. .
  • the present invention is intended to realize a wide range of motion at a high speed with a high degree of freedom. This is useful in the technical field of parallel mechanism that is useful in the field of inspection equipment that is useful in efficiently performing high-precision board inspections and the like using this mechanism.

Abstract

Un mécanisme parallèle comprend trois actionneurs linéaires extensibles (5, 12, 13), des moyens d'entraînement destinés à porter les extrémités proches des actionneurs linéaires (5, 12, 13) de manière qu'elles puissent se déplacer le long de rails de guidage (2, 6, 7), au moins un des rails de guidage comprenant des pentes (102, 103) sur lesquelles les actionneurs (12, 13) passent avec leur niveau variable, un support (23) à étage maintenu par les extrémités distales des actionneurs linéaires (5, 12, 13), et un support (24) de plaquette fixé sur un élément mobile et destiné à maintenir une pièce à usiner.
PCT/JP2000/006476 1999-09-22 2000-09-21 Mecanisme parallele et appareil d'essai WO2001022069A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001525191A JP3635572B2 (ja) 1999-09-22 2000-09-21 パラレルメカニズム及び検査装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP26876399 1999-09-22
JP11/268763 1999-09-22

Publications (1)

Publication Number Publication Date
WO2001022069A1 true WO2001022069A1 (fr) 2001-03-29

Family

ID=17462984

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2000/006476 WO2001022069A1 (fr) 1999-09-22 2000-09-21 Mecanisme parallele et appareil d'essai

Country Status (5)

Country Link
JP (1) JP3635572B2 (fr)
KR (1) KR100432359B1 (fr)
CN (1) CN1288434C (fr)
TW (1) TW455684B (fr)
WO (1) WO2001022069A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100368794C (zh) * 2001-11-05 2008-02-13 奥林巴斯株式会社 基板检查装置
CN103954626A (zh) * 2014-04-17 2014-07-30 来安县新元机电设备设计有限公司 手机屏幕裂纹检测仪
CN105606614A (zh) * 2016-01-27 2016-05-25 太仓井林机械科技有限公司 一种外观检测设备

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104440875B (zh) * 2014-11-06 2016-04-06 河南理工大学 工作空间可调的三自由度并联机构及其调整方法
CN105150199B (zh) * 2015-10-27 2017-02-01 河南理工大学 结构可调的三自由度并联机构
CN105252524B (zh) * 2015-11-25 2017-01-25 河南理工大学 带加强柱的三自由度并联机构

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0559219U (ja) * 1992-01-21 1993-08-06 テクノエイト株式会社 基板検査装置
JPH106159A (ja) * 1996-02-07 1998-01-13 Vdw Verein Deutscher Werkzeug Mas Fab Ev 物体を空間において運動させるための装置
JPH10110799A (ja) * 1996-10-02 1998-04-28 Hitachi Ltd モーションベース
US5752834A (en) * 1995-11-27 1998-05-19 Ling; Shou Hung Motion/force simulators with six or three degrees of freedom
JPH11160242A (ja) * 1997-09-24 1999-06-18 Olympus Optical Co Ltd 基板検査装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0559219U (ja) * 1992-01-21 1993-08-06 テクノエイト株式会社 基板検査装置
US5752834A (en) * 1995-11-27 1998-05-19 Ling; Shou Hung Motion/force simulators with six or three degrees of freedom
JPH106159A (ja) * 1996-02-07 1998-01-13 Vdw Verein Deutscher Werkzeug Mas Fab Ev 物体を空間において運動させるための装置
JPH10110799A (ja) * 1996-10-02 1998-04-28 Hitachi Ltd モーションベース
JPH11160242A (ja) * 1997-09-24 1999-06-18 Olympus Optical Co Ltd 基板検査装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Isao SHIMAMOTO, Takuji SASAKI, "Saibou Kougaku Bessatsu, Shokubutsu Saibou Kougaku Series 7: Shinpan Shokubutsu no PCR Jikken Protocol; Kakusan no Tanrihou to Genome Idenshi Hatsugen no Saishin Kaisekihou", Kabushiki Kaisha Shujunsha, 01 July 1997, the 1st printing and issue, pages 182-189. *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100368794C (zh) * 2001-11-05 2008-02-13 奥林巴斯株式会社 基板检查装置
CN103954626A (zh) * 2014-04-17 2014-07-30 来安县新元机电设备设计有限公司 手机屏幕裂纹检测仪
CN105606614A (zh) * 2016-01-27 2016-05-25 太仓井林机械科技有限公司 一种外观检测设备

Also Published As

Publication number Publication date
JP3635572B2 (ja) 2005-04-06
TW455684B (en) 2001-09-21
KR100432359B1 (ko) 2004-05-20
CN1288434C (zh) 2006-12-06
CN1376265A (zh) 2002-10-23
KR20020035875A (ko) 2002-05-15

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