TWI385784B - 半導體積體電路內建的電子裝置 - Google Patents

半導體積體電路內建的電子裝置 Download PDF

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Publication number
TWI385784B
TWI385784B TW098102544A TW98102544A TWI385784B TW I385784 B TWI385784 B TW I385784B TW 098102544 A TW098102544 A TW 098102544A TW 98102544 A TW98102544 A TW 98102544A TW I385784 B TWI385784 B TW I385784B
Authority
TW
Taiwan
Prior art keywords
film layer
electronic device
insulated
insulating
wiring
Prior art date
Application number
TW098102544A
Other languages
English (en)
Chinese (zh)
Other versions
TW200945551A (en
Inventor
小島章弘
杉崎吉昭
下岡義明
Original Assignee
東芝股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東芝股份有限公司 filed Critical 東芝股份有限公司
Publication of TW200945551A publication Critical patent/TW200945551A/zh
Application granted granted Critical
Publication of TWI385784B publication Critical patent/TWI385784B/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0035—Packages or encapsulation for maintaining a controlled atmosphere inside of the chamber containing the MEMS
    • B81B7/0038—Packages or encapsulation for maintaining a controlled atmosphere inside of the chamber containing the MEMS using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
    • B81C1/00468—Releasing structures
    • B81C1/00476—Releasing structures removing a sacrificial layer
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W76/00—Containers; Fillings or auxiliary members therefor; Seals
    • H10W76/10—Containers or parts thereof
    • H10W76/12—Containers or parts thereof characterised by their shape
    • H10W76/15—Containers comprising an insulating or insulated base
    • H10W76/153—Containers comprising an insulating or insulated base having interconnections in passages through the insulating or insulated base
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0221—Variable capacitors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/04—Electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Micromachines (AREA)
TW098102544A 2008-01-25 2009-01-22 半導體積體電路內建的電子裝置 TWI385784B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008015510 2008-01-25
JP2008282499A JP4581011B2 (ja) 2008-01-25 2008-10-31 電気部品とその製造方法

Publications (2)

Publication Number Publication Date
TW200945551A TW200945551A (en) 2009-11-01
TWI385784B true TWI385784B (zh) 2013-02-11

Family

ID=40898069

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098102544A TWI385784B (zh) 2008-01-25 2009-01-22 半導體積體電路內建的電子裝置

Country Status (5)

Country Link
US (3) US8309858B2 (https=)
JP (1) JP4581011B2 (https=)
KR (1) KR101057905B1 (https=)
CN (2) CN101492149B (https=)
TW (1) TWI385784B (https=)

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JP5204171B2 (ja) * 2010-08-25 2013-06-05 株式会社東芝 電気部品およびその製造方法
JP5578012B2 (ja) * 2010-10-15 2014-08-27 三菱電機株式会社 エアブリッジの製造方法
US8878071B2 (en) * 2011-01-20 2014-11-04 International Business Machines Corporation Integrated device with defined heat flow
JP5760502B2 (ja) * 2011-02-25 2015-08-12 富士通株式会社 電子デバイスとその製造方法
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JP2014200857A (ja) 2013-04-01 2014-10-27 株式会社東芝 Ｍｅｍｓ装置及びその製造方法
US9955949B2 (en) * 2013-08-23 2018-05-01 Canon Kabushiki Kaisha Method for manufacturing a capacitive transducer
JP5985451B2 (ja) * 2013-09-06 2016-09-06 株式会社東芝 Ｍｅｍｓデバイス
US10163828B2 (en) * 2013-11-18 2018-12-25 Taiwan Semiconductor Manufacturing Company Ltd. Semiconductor device and fabricating method thereof
JP2015174154A (ja) * 2014-03-13 2015-10-05 株式会社東芝 Ｍｅｍｓデバイスおよびその製造方法
JP6314568B2 (ja) * 2014-03-18 2018-04-25 セイコーエプソン株式会社 Ｍｅｍｓデバイス及びその製造方法
JP2015223689A (ja) * 2014-05-30 2015-12-14 株式会社東芝 電子部品及びその製造方法
CN105645349B (zh) * 2014-12-04 2017-09-22 中芯国际集成电路制造(上海)有限公司 Mems器件的形成方法
TWI610406B (zh) * 2015-02-09 2018-01-01 精材科技股份有限公司 晶片封裝體與其製備方法
US10384929B2 (en) * 2016-03-22 2019-08-20 Murata Manufacturing Co., Ltd. Impact element for a sensor device and a manufacturing method
US10574202B2 (en) 2016-04-01 2020-02-25 Skyworks Filter Solutions Japan Co., Ltd. Electronic package including cavity formed by removal of sacrificial material from within a cap
JP6648637B2 (ja) * 2016-05-24 2020-02-14 Tdk株式会社 電子部品パッケージ
JP6685839B2 (ja) * 2016-05-30 2020-04-22 株式会社東芝 ガス検出装置
WO2018133940A1 (en) * 2017-01-19 2018-07-26 Osram Opto Semiconductors Gmbh Method for producing an optoelectronic element
CN106865489B (zh) * 2017-02-14 2019-01-18 上海华虹宏力半导体制造有限公司 Mems器件的制造方法
JP6990997B2 (ja) * 2017-06-06 2022-01-12 株式会社日立製作所 Ｍｅｍｓデバイス
WO2019097573A1 (ja) * 2017-11-14 2019-05-23 三菱電機株式会社 半導体装置およびその製造方法
DE102018118701B3 (de) * 2018-08-01 2019-10-17 RF360 Europe GmbH BAW-Resonator mit verbesserter Verbindung der oberen Elektrode
KR102165882B1 (ko) * 2018-12-28 2020-10-14 주식회사 제이피드림 박막 패키지 및 그의 형성방법
JP7591886B2 (ja) * 2020-03-18 2024-11-29 日本航空電子工業株式会社 デバイス
CN111370375B (zh) * 2020-03-23 2025-03-14 苏州晶方半导体科技股份有限公司 封装结构、半导体器件和封装方法
JP7735629B2 (ja) * 2020-05-25 2025-09-09 ミネベアパワーデバイス株式会社 半導体装置および電力変換装置
US11800643B2 (en) * 2021-04-05 2023-10-24 Japan Aviation Electronics Industry, Limited Device having closed space between overlapping sealing members
JP7696372B2 (ja) * 2022-08-15 2025-06-20 エーエーシーアコースティックテクノロジーズ（シンセン）カンパニーリミテッド Ｍｅｍｓデバイスの製造方法及びｍｅｍｓデバイス

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Also Published As

Publication number Publication date
KR20090082148A (ko) 2009-07-29
JP2009196078A (ja) 2009-09-03
US8829359B2 (en) 2014-09-09
CN101492149A (zh) 2009-07-29
JP4581011B2 (ja) 2010-11-17
CN102336392A (zh) 2012-02-01
CN101492149B (zh) 2011-11-02
KR101057905B1 (ko) 2011-08-19
US20130032386A1 (en) 2013-02-07
US9676608B2 (en) 2017-06-13
TW200945551A (en) 2009-11-01
US20090188709A1 (en) 2009-07-30
US20140353777A1 (en) 2014-12-04
US8309858B2 (en) 2012-11-13
CN102336392B (zh) 2015-10-21

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