TWI367392B - - Google Patents
Info
- Publication number
- TWI367392B TWI367392B TW096148130A TW96148130A TWI367392B TW I367392 B TWI367392 B TW I367392B TW 096148130 A TW096148130 A TW 096148130A TW 96148130 A TW96148130 A TW 96148130A TW I367392 B TWI367392 B TW I367392B
- Authority
- TW
- Taiwan
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/16—Nitrogen-containing compounds
- C08K5/17—Amines; Quaternary ammonium compounds
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L61/00—Compositions of condensation polymers of aldehydes or ketones; Compositions of derivatives of such polymers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L61/00—Compositions of condensation polymers of aldehydes or ketones; Compositions of derivatives of such polymers
- C08L61/04—Condensation polymers of aldehydes or ketones with phenols only
- C08L61/06—Condensation polymers of aldehydes or ketones with phenols only of aldehydes with phenols
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L63/00—Compositions of epoxy resins; Compositions of derivatives of epoxy resins
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L81/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing sulfur with or without nitrogen, oxygen or carbon only; Compositions of polysulfones; Compositions of derivatives of such polymers
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D163/00—Coating compositions based on epoxy resins; Coating compositions based on derivatives of epoxy resins
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
- C09D7/40—Additives
- C09D7/60—Additives non-macromolecular
- C09D7/63—Additives non-macromolecular organic
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
- C09D7/40—Additives
- C09D7/65—Additives macromolecular
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/16—Nitrogen-containing compounds
- C08K5/29—Compounds containing one or more carbon-to-nitrogen double bonds
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/106—Binder containing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/106—Binder containing
- Y10S430/111—Polymer of unsaturated acid or ester
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/114—Initiator containing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/114—Initiator containing
- Y10S430/12—Nitrogen compound containing
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Medicinal Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Polymers & Plastics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Wood Science & Technology (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Epoxy Resins (AREA)
- Materials For Photolithography (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Nitrogen Condensed Heterocyclic Rings (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006336901 | 2006-12-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200848924A TW200848924A (en) | 2008-12-16 |
TWI367392B true TWI367392B (zh) | 2012-07-01 |
Family
ID=39511668
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW096148130A TW200848924A (en) | 2006-12-14 | 2007-12-14 | Photobase generator and photocurable resin composition |
Country Status (7)
Country | Link |
---|---|
US (1) | US8137892B2 (zh) |
EP (1) | EP2093269A4 (zh) |
JP (1) | JP5356828B2 (zh) |
KR (1) | KR101114694B1 (zh) |
CN (1) | CN101553549B (zh) |
TW (1) | TW200848924A (zh) |
WO (1) | WO2008072651A1 (zh) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5707622B2 (ja) * | 2007-08-09 | 2015-04-30 | 積水化学工業株式会社 | 光硬化性組成物 |
JP5086965B2 (ja) * | 2008-10-20 | 2012-11-28 | 旭化成イーマテリアルズ株式会社 | 光塩基発生剤及び光硬化性樹脂組成物 |
JP5208673B2 (ja) * | 2008-10-28 | 2013-06-12 | 旭化成イーマテリアルズ株式会社 | 光塩基発生剤及び光硬化型樹脂組成物 |
JP5274206B2 (ja) * | 2008-11-06 | 2013-08-28 | 旭化成イーマテリアルズ株式会社 | 光硬化型樹脂組成物、その硬化物及び硬化物の製造方法 |
JP2010126662A (ja) * | 2008-11-28 | 2010-06-10 | Asahi Kasei E-Materials Corp | 光塩基発生剤、それを用いた光硬化性樹脂組成物及び硬化物 |
JP5516417B2 (ja) * | 2008-12-02 | 2014-06-11 | 和光純薬工業株式会社 | 光塩基発生剤 |
JP2010174210A (ja) * | 2009-02-02 | 2010-08-12 | Asahi Kasei E-Materials Corp | 光硬化型樹脂組成物及びその硬化物 |
KR20110019636A (ko) * | 2009-08-20 | 2011-02-28 | 삼성모바일디스플레이주식회사 | 가요성 표시 장치용 기판 및 그 제조 방법과 상기 기판을 포함하는 유기 발광 표시 장치 |
US8216767B2 (en) * | 2009-09-08 | 2012-07-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | Patterning process and chemical amplified photoresist with a photodegradable base |
US8956806B2 (en) | 2009-09-18 | 2015-02-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Photoresist and patterning process |
US8512939B2 (en) * | 2009-09-25 | 2013-08-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Photoresist stripping technique |
JP2011195616A (ja) * | 2010-03-17 | 2011-10-06 | Eiweiss Kk | 光硬化性樹脂組成物 |
JP6011956B2 (ja) * | 2010-04-14 | 2016-10-25 | 学校法人東京理科大学 | 感光性樹脂組成物 |
JP5612373B2 (ja) * | 2010-06-16 | 2014-10-22 | 旭化成イーマテリアルズ株式会社 | 光硬化型樹脂組成物、パターン形成された基板の製造方法及び電子部品 |
JP2012159657A (ja) * | 2011-01-31 | 2012-08-23 | Asahi Kasei E-Materials Corp | 光硬化型樹脂組成物及びそれを用いたパターン形成された基材の製造方法、並びに該基材を備える電子部品 |
CN102338985A (zh) * | 2011-06-29 | 2012-02-01 | 山东大学 | 含羟基的烃基双环胍光碱产生剂的环保型光刻胶组合物 |
JP2017125101A (ja) * | 2016-01-12 | 2017-07-20 | 太陽インキ製造株式会社 | 硬化性樹脂組成物、ドライフィルム、硬化物およびプリント配線板 |
JP7012424B2 (ja) * | 2016-03-25 | 2022-02-14 | 東京応化工業株式会社 | エネルギー感受性組成物、硬化物及び硬化物の製造方法 |
CN108885944B (zh) * | 2016-03-30 | 2020-11-24 | 日本瑞翁株式会社 | 有机系太阳能电池用密封剂组合物、密封剂、电极以及有机系太阳能电池 |
CN109825034B (zh) * | 2019-01-21 | 2020-10-30 | 江南大学 | 一种实现巯基-环氧深层光固化的方法及其组合物 |
WO2021097852A1 (zh) * | 2019-11-22 | 2021-05-27 | 南昌欧菲显示科技有限公司 | 纳米银导电薄膜及其制备方法和电子装置 |
EP3848179A1 (de) * | 2020-01-10 | 2021-07-14 | Carl Zeiss Vision International GmbH | Inkjet-verfahren zur herstellung eines brillenglases |
CN111546805B (zh) * | 2020-04-28 | 2021-05-25 | 中山大学 | 一种可制备全息彩色图案的材料及其制备方法和应用 |
CN114163322B (zh) * | 2021-11-23 | 2023-09-12 | 中国农业科学院农业环境与可持续发展研究所 | 紫外线吸收剂、制备方法和用途 |
CN114517043B (zh) * | 2022-01-27 | 2022-12-16 | 福建泓光半导体材料有限公司 | 含有有机刚性笼状化合物的底部抗反射涂料组合物及其制备方法和微电子结构的形成方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL130085C (zh) * | 1963-08-07 | |||
FR2080201A6 (zh) | 1970-02-26 | 1971-11-12 | Wendel Sidelor | |
JPS48818U (zh) | 1971-05-26 | 1973-01-08 | ||
JP3008468B2 (ja) | 1990-09-26 | 2000-02-14 | ソニー株式会社 | 感光性組成物、及び該感光性組成物を用いたパターン形成方法及び半導体の製造方法 |
US5406328A (en) | 1993-09-28 | 1995-04-11 | Hughes Aircraft Company | Adaptive track loop bandwidth reduction in cluttered scenes |
JPH1077264A (ja) | 1996-09-05 | 1998-03-24 | Shin Etsu Chem Co Ltd | N−(2−ニトロベンジルオキシカルボニル)環状アミン類およびその製造方法 |
CN1326904C (zh) * | 2000-12-27 | 2007-07-18 | 日立化成工业株式会社 | 光碱发生剂以及应用它的固化性组合物及固化方法 |
JP2003020339A (ja) | 2001-07-10 | 2003-01-24 | Nippon Kayaku Co Ltd | 光硬化型樹脂組成物並びにその硬化物 |
JP2004043760A (ja) | 2001-08-27 | 2004-02-12 | Hitachi Chem Co Ltd | 接着シート並びに半導体装置及びその製造方法 |
JP5005149B2 (ja) | 2001-11-14 | 2012-08-22 | 日立化成工業株式会社 | 光塩基発生剤、硬化性組成物及び硬化方法 |
JP4202148B2 (ja) * | 2003-01-09 | 2008-12-24 | 独立行政法人科学技術振興機構 | 2−アミノトロポンの製造方法 |
EP1652870B1 (en) * | 2003-08-06 | 2009-06-17 | Mitsubishi Gas Chemical Company, Inc. | Photocurable composition and coating composition |
EP1564255B1 (en) * | 2004-02-16 | 2007-09-26 | Mitsubishi Gas Chemical Company, Inc. | Photobase generator and curable composition |
JP4843955B2 (ja) * | 2004-02-16 | 2011-12-21 | 三菱瓦斯化学株式会社 | 光塩基発生剤 |
-
2007
- 2007-12-12 US US12/518,313 patent/US8137892B2/en not_active Expired - Fee Related
- 2007-12-12 CN CN2007800456703A patent/CN101553549B/zh not_active Expired - Fee Related
- 2007-12-12 EP EP07850467A patent/EP2093269A4/en not_active Withdrawn
- 2007-12-12 JP JP2008549327A patent/JP5356828B2/ja not_active Expired - Fee Related
- 2007-12-12 KR KR1020097008290A patent/KR101114694B1/ko active IP Right Grant
- 2007-12-12 WO PCT/JP2007/073916 patent/WO2008072651A1/ja active Application Filing
- 2007-12-14 TW TW096148130A patent/TW200848924A/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR20090057319A (ko) | 2009-06-04 |
JP5356828B2 (ja) | 2013-12-04 |
US8137892B2 (en) | 2012-03-20 |
CN101553549B (zh) | 2013-02-20 |
CN101553549A (zh) | 2009-10-07 |
EP2093269A4 (en) | 2011-03-30 |
US20100151386A1 (en) | 2010-06-17 |
JPWO2008072651A1 (ja) | 2010-04-02 |
EP2093269A1 (en) | 2009-08-26 |
TW200848924A (en) | 2008-12-16 |
KR101114694B1 (ko) | 2012-03-13 |
WO2008072651A1 (ja) | 2008-06-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |