TWI364402B - - Google Patents
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- TWI364402B TWI364402B TW94103236A TW94103236A TWI364402B TW I364402 B TWI364402 B TW I364402B TW 94103236 A TW94103236 A TW 94103236A TW 94103236 A TW94103236 A TW 94103236A TW I364402 B TWI364402 B TW I364402B
- Authority
- TW
- Taiwan
- Prior art keywords
- fine particles
- gas
- transparent conductive
- conductive film
- metal
- Prior art date
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- 239000010419 fine particle Substances 0.000 claims description 153
- 239000007789 gas Substances 0.000 claims description 86
- 229910052751 metal Inorganic materials 0.000 claims description 72
- 239000002184 metal Substances 0.000 claims description 72
- 239000012298 atmosphere Substances 0.000 claims description 57
- 238000000034 method Methods 0.000 claims description 42
- 239000006185 dispersion Substances 0.000 claims description 38
- 239000011701 zinc Substances 0.000 claims description 38
- 238000010304 firing Methods 0.000 claims description 29
- 239000000758 substrate Substances 0.000 claims description 28
- 230000001590 oxidative effect Effects 0.000 claims description 27
- 229910045601 alloy Inorganic materials 0.000 claims description 23
- 239000000956 alloy Substances 0.000 claims description 23
- 239000011261 inert gas Substances 0.000 claims description 18
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 15
- 239000011859 microparticle Substances 0.000 claims description 15
- 239000001301 oxygen Substances 0.000 claims description 15
- 229910052760 oxygen Inorganic materials 0.000 claims description 15
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 14
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 12
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 12
- 239000003960 organic solvent Substances 0.000 claims description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 10
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 8
- 239000001257 hydrogen Substances 0.000 claims description 7
- 229910052739 hydrogen Inorganic materials 0.000 claims description 7
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- 229910052787 antimony Inorganic materials 0.000 claims description 5
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 5
- 239000001569 carbon dioxide Substances 0.000 claims description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 4
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- 229910008757 Sn—Sb Inorganic materials 0.000 description 12
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- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
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- FYGHSUNMUKGBRK-UHFFFAOYSA-N 1,2,3-trimethylbenzene Chemical compound CC1=CC=CC(C)=C1C FYGHSUNMUKGBRK-UHFFFAOYSA-N 0.000 description 2
- KBPLFHHGFOOTCA-UHFFFAOYSA-N 1-Octanol Chemical compound CCCCCCCCO KBPLFHHGFOOTCA-UHFFFAOYSA-N 0.000 description 2
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- RSWGJHLUYNHPMX-UHFFFAOYSA-N Abietic-Saeure Natural products C12CCC(C(C)C)=CC2=CCC2C1(C)CCCC2(C)C(O)=O RSWGJHLUYNHPMX-UHFFFAOYSA-N 0.000 description 2
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- YWFWDNVOPHGWMX-UHFFFAOYSA-N n,n-dimethyldodecan-1-amine Chemical compound CCCCCCCCCCCCN(C)C YWFWDNVOPHGWMX-UHFFFAOYSA-N 0.000 description 1
- JLKNUWMHLAWPRV-UHFFFAOYSA-N n-methyl-n-tridecyltetradecan-1-amine Chemical compound CCCCCCCCCCCCCCN(C)CCCCCCCCCCCCC JLKNUWMHLAWPRV-UHFFFAOYSA-N 0.000 description 1
- OMEMQVZNTDHENJ-UHFFFAOYSA-N n-methyldodecan-1-amine Chemical compound CCCCCCCCCCCCNC OMEMQVZNTDHENJ-UHFFFAOYSA-N 0.000 description 1
- ZOLJFBQEKSZVCB-UHFFFAOYSA-N n-phenyloctadecanamide Chemical compound CCCCCCCCCCCCCCCCCC(=O)NC1=CC=CC=C1 ZOLJFBQEKSZVCB-UHFFFAOYSA-N 0.000 description 1
- NTNWKDHZTDQSST-UHFFFAOYSA-N naphthalene-1,2-diamine Chemical compound C1=CC=CC2=C(N)C(N)=CC=C21 NTNWKDHZTDQSST-UHFFFAOYSA-N 0.000 description 1
- 239000012454 non-polar solvent Substances 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 229940060184 oil ingredients Drugs 0.000 description 1
- 235000019198 oils Nutrition 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000013557 residual solvent Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000012279 sodium borohydride Substances 0.000 description 1
- 229910000033 sodium borohydride Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- FLTJDUOFAQWHDF-UHFFFAOYSA-N trimethyl pentane Natural products CCCCC(C)(C)C FLTJDUOFAQWHDF-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/20—Conductive material dispersed in non-conductive organic material
- H01B1/22—Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Conductive Materials (AREA)
- Non-Insulated Conductors (AREA)
- Manufacturing Of Electric Cables (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004047342A JP4814491B2 (ja) | 2004-02-24 | 2004-02-24 | 透明導電膜の形成方法及び透明電極 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200535090A TW200535090A (en) | 2005-11-01 |
| TWI364402B true TWI364402B (https=) | 2012-05-21 |
Family
ID=34879471
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW94103236A TW200535090A (en) | 2004-02-24 | 2005-02-02 | Dispersion liquid for forming transparent conductive film, method for forming transparent conductive film and transparent electrode |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP4814491B2 (https=) |
| TW (1) | TW200535090A (https=) |
| WO (1) | WO2005081265A1 (https=) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007182605A (ja) * | 2006-01-06 | 2007-07-19 | Konica Minolta Holdings Inc | 薄膜形成方法及び薄膜 |
| TWI309050B (en) * | 2006-04-03 | 2009-04-21 | Ind Tech Res Inst | Azo transparent conducting film with metallic nano particles and method of producing thereof |
| CN101496117B (zh) * | 2006-07-28 | 2012-04-18 | 株式会社爱发科 | 透明导电膜的成膜方法 |
| JP2008182141A (ja) * | 2007-01-26 | 2008-08-07 | Seiko Epson Corp | 紫外線検出センサー、紫外線検出センサーの製造方法、紫外線の検出方法及び太陽電池 |
| JP2008258050A (ja) * | 2007-04-06 | 2008-10-23 | Ulvac Japan Ltd | 透明導電膜形成用塗布液、透明導電膜の形成方法及び透明電極 |
| JP5222486B2 (ja) * | 2007-04-11 | 2013-06-26 | 株式会社アルバック | 透明導電膜の形成方法 |
| TWI491751B (zh) * | 2010-10-29 | 2015-07-11 | 鴻海精密工業股份有限公司 | 鍍膜件及其製備方法 |
| TWI490353B (zh) * | 2010-10-29 | 2015-07-01 | Hon Hai Prec Ind Co Ltd | 鍍膜件及其製備方法 |
| CN103451618B (zh) * | 2013-08-15 | 2016-06-15 | 京东方科技集团股份有限公司 | 一种透明导电氧化物膜层的制备方法 |
| TWI689622B (zh) * | 2014-12-05 | 2020-04-01 | 日商富士軟片股份有限公司 | 金屬氧化物膜的製造方法、金屬氧化物膜、薄膜電晶體、薄膜電晶體的製造方法、電子元件及紫外線照射裝置 |
| JPWO2024209990A1 (https=) * | 2023-04-03 | 2024-10-10 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6196609A (ja) * | 1984-10-15 | 1986-05-15 | 大阪特殊合金株式会社 | 透明導電膜 |
| JPH02234309A (ja) * | 1989-03-06 | 1990-09-17 | Japan Synthetic Rubber Co Ltd | 導電性皮膜形成用組成物 |
| JPH06139822A (ja) * | 1992-10-23 | 1994-05-20 | Asahi Glass Co Ltd | 透明導電膜、低反射帯電防止膜およびこれらの製造方法 |
| KR100472496B1 (ko) * | 1997-07-23 | 2005-05-16 | 삼성에스디아이 주식회사 | 투명도전성조성물,이로부터형성된투명도전막및그제조방법 |
| JP4377003B2 (ja) * | 1999-07-23 | 2009-12-02 | 日本曹達株式会社 | 透明導電膜のシート抵抗値の調整方法及び透明導電膜の形成方法 |
| JP4099911B2 (ja) * | 1999-10-07 | 2008-06-11 | 日立電線株式会社 | 透明導電膜形成基板及び形成方法 |
| JP4902048B2 (ja) * | 2001-01-11 | 2012-03-21 | 日揮触媒化成株式会社 | 透明導電性被膜付基材および表示装置 |
| JP2003249131A (ja) * | 2002-02-26 | 2003-09-05 | Fuji Photo Film Co Ltd | 透明導電膜の製造方法 |
| JP4002469B2 (ja) * | 2002-05-21 | 2007-10-31 | 触媒化成工業株式会社 | インジウム系金属微粒子の製造方法、インジウム系金属微粒子を含む透明導電性被膜形成用塗布液、分散ゾル、透明導電性被膜付基材、表示装置 |
-
2004
- 2004-02-24 JP JP2004047342A patent/JP4814491B2/ja not_active Expired - Lifetime
-
2005
- 2005-02-02 TW TW94103236A patent/TW200535090A/zh not_active IP Right Cessation
- 2005-02-24 WO PCT/JP2005/003009 patent/WO2005081265A1/ja not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| TW200535090A (en) | 2005-11-01 |
| WO2005081265A1 (ja) | 2005-09-01 |
| JP2005243249A (ja) | 2005-09-08 |
| JP4814491B2 (ja) | 2011-11-16 |
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