TWI350606B - - Google Patents

Info

Publication number
TWI350606B
TWI350606B TW096119635A TW96119635A TWI350606B TW I350606 B TWI350606 B TW I350606B TW 096119635 A TW096119635 A TW 096119635A TW 96119635 A TW96119635 A TW 96119635A TW I350606 B TWI350606 B TW I350606B
Authority
TW
Taiwan
Application number
TW096119635A
Other versions
TW200818569A (en
Inventor
Ryuichi Nagase
Yoshio Kajiya
Original Assignee
Jx Nippon Mining & Metals Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jx Nippon Mining & Metals Corp filed Critical Jx Nippon Mining & Metals Corp
Publication of TW200818569A publication Critical patent/TW200818569A/zh
Application granted granted Critical
Publication of TWI350606B publication Critical patent/TWI350606B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/052—Li-accumulators
    • H01M10/0525—Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H01M4/0402—Methods of deposition of the material
    • H01M4/0421—Methods of deposition of the material involving vapour deposition
    • H01M4/0423—Physical vapour deposition
    • H01M4/0426—Sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/131—Electrodes based on mixed oxides or hydroxides, or on mixtures of oxides or hydroxides, e.g. LiCoOx
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/139—Processes of manufacture
    • H01M4/1391—Processes of manufacture of electrodes based on mixed oxides or hydroxides, or on mixtures of oxides or hydroxides, e.g. LiCoOx
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/36—Selection of substances as active materials, active masses, active liquids
    • H01M4/48—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides
    • H01M4/485—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides of mixed oxides or hydroxides for inserting or intercalating light metals, e.g. LiTi2O4 or LiTi2OxFy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/36—Selection of substances as active materials, active masses, active liquids
    • H01M4/48—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides
    • H01M4/50—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides of manganese
    • H01M4/505—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides of manganese of mixed oxides or hydroxides containing manganese for inserting or intercalating light metals, e.g. LiMn2O4 or LiMn2OxFy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/36—Selection of substances as active materials, active masses, active liquids
    • H01M4/48—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides
    • H01M4/52—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides of nickel, cobalt or iron
    • H01M4/525—Selection of substances as active materials, active masses, active liquids of inorganic oxides or hydroxides of nickel, cobalt or iron of mixed oxides or hydroxides containing iron, cobalt or nickel for inserting or intercalating light metals, e.g. LiNiO2, LiCoO2 or LiCoOxFy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Battery Electrode And Active Subsutance (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Physical Vapour Deposition (AREA)
  • Compositions Of Oxide Ceramics (AREA)
TW096119635A 2006-07-27 2007-06-01 Lithium-containing transition metal oxide target, process for producing the same and lithium ion thin-film secondary battery TW200818569A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006204564 2006-07-27

Publications (2)

Publication Number Publication Date
TW200818569A TW200818569A (en) 2008-04-16
TWI350606B true TWI350606B (zh) 2011-10-11

Family

ID=38981286

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096119635A TW200818569A (en) 2006-07-27 2007-06-01 Lithium-containing transition metal oxide target, process for producing the same and lithium ion thin-film secondary battery

Country Status (7)

Country Link
US (1) US8062486B2 (zh)
EP (1) EP2048262B1 (zh)
JP (2) JP5246777B2 (zh)
KR (1) KR101042864B1 (zh)
CN (1) CN101495666B (zh)
TW (1) TW200818569A (zh)
WO (1) WO2008012970A1 (zh)

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WO2006049001A1 (ja) * 2004-11-02 2006-05-11 Nippon Mining & Metals Co., Ltd. リチウム二次電池用正極材料及びその製造方法
WO2007083457A1 (ja) * 2006-01-20 2007-07-26 Nippon Mining & Metals Co., Ltd. リチウムニッケルマンガンコバルト複合酸化物及びリチウム二次電池
US8999558B2 (en) 2007-01-12 2015-04-07 Enovix Corporation Three-dimensional batteries and methods of manufacturing the same
JP5396717B2 (ja) * 2008-02-12 2014-01-22 住友電気工業株式会社 リチウム電池、リチウム電池用正極およびその製造方法
JP2009249689A (ja) * 2008-04-07 2009-10-29 Toyota Motor Corp リチウム複合酸化物薄膜の製造方法、及び、電極体の製造方法
WO2009128289A1 (ja) * 2008-04-17 2009-10-22 日鉱金属株式会社 リチウムイオン電池用正極活物質、二次電池用正極及びリチウムイオン電池
CN102067362B (zh) * 2008-12-05 2013-12-25 Jx日矿日石金属株式会社 锂离子二次电池用正极活性物质、使用其的二次电池用正极及使用该正极的锂离子二次电池
CN102379049B (zh) * 2009-07-13 2014-08-13 丰田自动车株式会社 正极活性物质层的制造方法
WO2011086649A1 (ja) * 2010-01-15 2011-07-21 株式会社アルバック ＬｉＣｏＯ２焼結体の製造方法及びスパッタリングターゲット
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JP5969786B2 (ja) * 2012-03-21 2016-08-17 株式会社コベルコ科研 ＬｉＣｏＯ２焼結体およびスパッタリングターゲット、並びにその製造方法
KR102230556B1 (ko) 2012-08-16 2021-03-22 에노빅스 코오퍼레이션 3차원 배터리들을 위한 전극 구조들
GB2505447A (en) * 2012-08-30 2014-03-05 Harrold J Rust Iii Electrode structures for three-dimensional batteries
TWI476291B (zh) * 2012-12-17 2015-03-11 Nat Inst Chung Shan Science & Technology Preparation method of spinel nickel cobalt oxide target
KR101726117B1 (ko) * 2013-03-13 2017-04-11 가부시키가이샤 코베루코 카겐 LiCoO2 함유 소결체 및 스퍼터링 타깃, 및 LiCoO2 함유 소결체의 제조 방법
EP4084140B1 (en) 2013-03-15 2023-12-06 Enovix Corporation Three-dimensional batteries
EP2993250A4 (en) 2013-04-30 2017-01-18 Kobelco Research Institute , Inc. Li-CONTAINING OXIDE TARGET ASSEMBLY
CN103456983B (zh) * 2013-09-09 2016-10-19 桂林电子科技大学 薄膜固体电解质材料及其制备方法
KR102142258B1 (ko) 2014-03-26 2020-08-07 제이엑스금속주식회사 LiCoO2 스퍼터링 타깃 및 그 제조 방법, 그리고 정극재 박막
EP4113683A1 (en) 2015-05-14 2023-01-04 Enovix Corporation Longitudinal constraints for energy storage devices
DE102015007291A1 (de) * 2015-06-10 2016-12-15 Forschungszentrum Jülich GmbH Verfahren zur Herstellung nanostrukturierter Schichten
JP2017075377A (ja) * 2015-10-15 2017-04-20 株式会社コベルコ科研 ＬｉＣｏＯ２含有焼結体およびＬｉＣｏＯ２含有スパッタリングターゲット、並びにＬｉＣｏＯ２含有焼結体の製造方法
JP6326396B2 (ja) * 2015-11-10 2018-05-16 株式会社神戸製鋼所 ＬｉＣｏＯ２含有スパッタリングターゲットおよびＬｉＣｏＯ２含有焼結体
DE102016000799A1 (de) * 2016-01-27 2017-07-27 Forschungszentrum Jülich GmbH Verfahren zur Herstellung von keramischen Kathodenschichten auf Stromkollektoren
JP6430427B2 (ja) * 2016-03-17 2018-11-28 Ｊｘ金属株式会社 コバルト酸リチウム焼結体及び該焼結体を用いて作製されるスパッタリングターゲット及びコバルト酸リチウム焼結体の製造方法並びにコバルト酸リチウムからなる薄膜
TWI772156B (zh) 2016-05-13 2022-07-21 美商易諾維公司 用於三維電池之尺寸拘束件
JP7086978B2 (ja) 2016-11-16 2022-06-20 エノビクス・コーポレイション 圧縮性カソードを備えた３次元電池
US10707477B2 (en) * 2017-09-15 2020-07-07 Dyson Technology Limited High energy density multilayer battery cell with thermally processed components and method for making same
TWI794330B (zh) 2017-11-15 2023-03-01 美商易諾維公司 電極總成、蓄電池組、及製造方法
US10256507B1 (en) 2017-11-15 2019-04-09 Enovix Corporation Constrained electrode assembly
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CN112151789B (zh) 2019-06-28 2021-10-01 宁德时代新能源科技股份有限公司 一种正极材料及其制备方法和用途
JP2023547993A (ja) 2020-09-18 2023-11-15 エノビクス・コーポレイション 電池に使用する電極の製造のための装置、システム、及び方法
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JP7225288B2 (ja) * 2021-02-22 2023-02-20 プライムプラネットエナジー＆ソリューションズ株式会社 正極活物質およびリチウムイオン二次電池
CN113387683B (zh) * 2021-06-11 2023-06-02 武汉科技大学 一种锂钴锰氧化物靶材及其制备方法

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JP4916094B2 (ja) * 2004-03-30 2012-04-11 Ｊｘ日鉱日石金属株式会社 リチウムイオン二次電池正極材料用前駆体とその製造方法並びにそれを用いた正極材料の製造方法
WO2006049001A1 (ja) * 2004-11-02 2006-05-11 Nippon Mining & Metals Co., Ltd. リチウム二次電池用正極材料及びその製造方法
WO2007083457A1 (ja) * 2006-01-20 2007-07-26 Nippon Mining & Metals Co., Ltd. リチウムニッケルマンガンコバルト複合酸化物及びリチウム二次電池
WO2009128289A1 (ja) * 2008-04-17 2009-10-22 日鉱金属株式会社 リチウムイオン電池用正極活物質、二次電池用正極及びリチウムイオン電池
CN102067362B (zh) * 2008-12-05 2013-12-25 Jx日矿日石金属株式会社 锂离子二次电池用正极活性物质、使用其的二次电池用正极及使用该正极的锂离子二次电池

Also Published As

Publication number Publication date
EP2048262A1 (en) 2009-04-15
WO2008012970A1 (fr) 2008-01-31
CN101495666B (zh) 2012-09-26
US20090166187A1 (en) 2009-07-02
US8062486B2 (en) 2011-11-22
JPWO2008012970A1 (ja) 2009-12-17
CN101495666A (zh) 2009-07-29
JP2012164671A (ja) 2012-08-30
EP2048262B1 (en) 2018-09-12
JP5433044B2 (ja) 2014-03-05
KR20080106466A (ko) 2008-12-05
JP5246777B2 (ja) 2013-07-24
KR101042864B1 (ko) 2011-06-20
EP2048262A4 (en) 2012-05-02
TW200818569A (en) 2008-04-16

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