TWI341554B - Copper metallization of through silicon via - Google Patents
Copper metallization of through silicon viaInfo
- Publication number
- TWI341554B TWI341554B TW097129380A TW97129380A TWI341554B TW I341554 B TWI341554 B TW I341554B TW 097129380 A TW097129380 A TW 097129380A TW 97129380 A TW97129380 A TW 97129380A TW I341554 B TWI341554 B TW I341554B
- Authority
- TW
- Taiwan
- Prior art keywords
- silicon via
- copper metallization
- metallization
- copper
- silicon
- Prior art date
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title 1
- 229910052802 copper Inorganic materials 0.000 title 1
- 239000010949 copper Substances 0.000 title 1
- 238000001465 metallisation Methods 0.000 title 1
- 229910052710 silicon Inorganic materials 0.000 title 1
- 239000010703 silicon Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76898—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics formed through a semiconductor substrate
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/02—Electroplating of selected surface areas
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/12—Semiconductors
- C25D7/123—Semiconductors first coated with a seed layer or a conductive layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/288—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition
- H01L21/2885—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition using an external electrical current, i.e. electro-deposition
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Electrochemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Electrodes Of Semiconductors (AREA)
- Electroplating Methods And Accessories (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US95360207P | 2007-08-02 | 2007-08-02 | |
US5903908P | 2008-06-05 | 2008-06-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200924036A TW200924036A (en) | 2009-06-01 |
TWI341554B true TWI341554B (en) | 2011-05-01 |
Family
ID=40304935
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW097129380A TWI341554B (en) | 2007-08-02 | 2008-08-01 | Copper metallization of through silicon via |
Country Status (7)
Country | Link |
---|---|
US (1) | US7670950B2 (zh) |
EP (1) | EP2183769B8 (zh) |
JP (1) | JP2010535289A (zh) |
KR (1) | KR101529342B1 (zh) |
CN (1) | CN101855714B (zh) |
TW (1) | TWI341554B (zh) |
WO (1) | WO2009018581A1 (zh) |
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2008
- 2008-08-01 TW TW097129380A patent/TWI341554B/zh active
- 2008-08-04 CN CN2008801097952A patent/CN101855714B/zh active Active
- 2008-08-04 US US12/185,641 patent/US7670950B2/en active Active
- 2008-08-04 WO PCT/US2008/072136 patent/WO2009018581A1/en active Application Filing
- 2008-08-04 JP JP2010519274A patent/JP2010535289A/ja active Pending
- 2008-08-04 KR KR1020107004714A patent/KR101529342B1/ko active IP Right Grant
- 2008-08-04 EP EP08797141.2A patent/EP2183769B8/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP2010535289A (ja) | 2010-11-18 |
EP2183769A1 (en) | 2010-05-12 |
CN101855714A (zh) | 2010-10-06 |
WO2009018581A1 (en) | 2009-02-05 |
KR101529342B1 (ko) | 2015-06-19 |
CN101855714B (zh) | 2013-05-08 |
EP2183769B1 (en) | 2017-07-19 |
EP2183769A4 (en) | 2015-12-09 |
KR20100055446A (ko) | 2010-05-26 |
EP2183769B8 (en) | 2017-08-23 |
US20090035940A1 (en) | 2009-02-05 |
TW200924036A (en) | 2009-06-01 |
US7670950B2 (en) | 2010-03-02 |
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