TWI322268B - Probe unit and inspecting apparatus - Google Patents

Probe unit and inspecting apparatus Download PDF

Info

Publication number
TWI322268B
TWI322268B TW096109970A TW96109970A TWI322268B TW I322268 B TWI322268 B TW I322268B TW 096109970 A TW096109970 A TW 096109970A TW 96109970 A TW96109970 A TW 96109970A TW I322268 B TWI322268 B TW I322268B
Authority
TW
Taiwan
Prior art keywords
block
connecting block
probe assembly
frame
support
Prior art date
Application number
TW096109970A
Other languages
English (en)
Chinese (zh)
Other versions
TW200745566A (en
Inventor
Toyokazu Saitoh
Megumi Akahira
Kazuyoshi Miura
Original Assignee
Nihon Micronics Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Micronics Kk filed Critical Nihon Micronics Kk
Publication of TW200745566A publication Critical patent/TW200745566A/zh
Application granted granted Critical
Publication of TWI322268B publication Critical patent/TWI322268B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
    • F16B5/00—Joining sheets or plates, e.g. panels, to one another or to strips or bars parallel to them
    • F16B5/02—Joining sheets or plates, e.g. panels, to one another or to strips or bars parallel to them by means of fastening members using screw-thread
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Liquid Crystal (AREA)
  • Measuring Leads Or Probes (AREA)
TW096109970A 2006-05-30 2007-03-22 Probe unit and inspecting apparatus TWI322268B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006150176A JP4758826B2 (ja) 2006-05-30 2006-05-30 プローブユニット及び検査装置

Publications (2)

Publication Number Publication Date
TW200745566A TW200745566A (en) 2007-12-16
TWI322268B true TWI322268B (en) 2010-03-21

Family

ID=38855122

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096109970A TWI322268B (en) 2006-05-30 2007-03-22 Probe unit and inspecting apparatus

Country Status (3)

Country Link
JP (1) JP4758826B2 (ja)
KR (1) KR100832905B1 (ja)
TW (1) TWI322268B (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5156970B2 (ja) * 2008-11-10 2013-03-06 株式会社日本マイクロニクス 電気的検査のためのプローブユニット、電気的検査装置および点灯検査装置
JP5491790B2 (ja) * 2009-07-27 2014-05-14 株式会社日本マイクロニクス プローブ装置
KR101168953B1 (ko) * 2009-08-04 2012-07-30 가부시키가이샤 니혼 마이크로닉스 프로브 유닛 및 이것을 이용한 시험장치
JP6184301B2 (ja) * 2013-11-14 2017-08-23 株式会社日本マイクロニクス 検査装置
KR20150142142A (ko) * 2014-06-10 2015-12-22 솔브레인이엔지 주식회사 Display 장비 검사 Noise 제거방안
CN108074511A (zh) * 2016-11-09 2018-05-25 永友Dsp有限公司 显示面板检测用探针单元的夹紧装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5621333A (en) * 1995-05-19 1997-04-15 Microconnect, Inc. Contact device for making connection to an electronic circuit device
JPH1164382A (ja) * 1997-08-12 1999-03-05 Mitsubishi Materials Corp プローブヘッド
JP2002311051A (ja) * 2001-04-13 2002-10-23 Oshin Kagi Kofun Yugenkoshi メンブレン・プローブ・ブロック
KR20020080580A (ko) * 2001-04-16 2002-10-26 유렉스 프리시젼 인코포레이티드 멤브레인 프로브 블록
JP4313565B2 (ja) * 2002-12-06 2009-08-12 株式会社日本マイクロニクス プローブ装置
KR100599989B1 (ko) * 2003-12-24 2006-07-13 주식회사 파이컴 프로브 유닛을 이용한 프로브 장치
JP4634059B2 (ja) * 2004-03-26 2011-02-16 株式会社日本マイクロニクス プローブ組立体
KR200365959Y1 (ko) * 2004-07-30 2004-11-02 주식회사 파이컴 프로브 블록의 평탄화부가 구비된 평판표시소자 검사용프로브 조립체
KR200423585Y1 (ko) * 2006-05-30 2006-08-08 김영주 프로브 조립체

Also Published As

Publication number Publication date
JP2007322158A (ja) 2007-12-13
KR20070115597A (ko) 2007-12-06
JP4758826B2 (ja) 2011-08-31
TW200745566A (en) 2007-12-16
KR100832905B1 (ko) 2008-05-28

Similar Documents

Publication Publication Date Title
TWI322268B (en) Probe unit and inspecting apparatus
KR100781379B1 (ko) 프로브장치
KR100940505B1 (ko) 디스플레이 패널 검사를 위한 프로브 유닛
US20080174326A1 (en) Probe, probe assembly and probe card for electrical testing
TW200848750A (en) Probe device and inspection apparatus
CN110573889B (zh) 检查治具以及基板检查装置
TW200925615A (en) Probe assembly and inspection apparatus
KR20060108426A (ko) 액정 디스플레이 패널 검사용 프로브 유니트
KR100533193B1 (ko) 평판표시패널 검사용 프로브 장치
KR101010534B1 (ko) 비주얼검사용 머니퓰레이터부 및 프로브블록부를 구비한 프로브 유닛
CN106932615B (zh) 检查夹具及具备该检查夹具的检查装置
JP5209215B2 (ja) プローブユニット及び検査装置
JP2007017189A (ja) 電気的接続装置
JP5364240B2 (ja) プローブユニット及び検査装置
KR101000456B1 (ko) 유지 및 보수가 용이한 프로브유닛
JP5406790B2 (ja) プローブユニット及びこれを用いる試験装置
JP5193506B2 (ja) プローブユニット及び検査装置
CN210072002U (zh) 一种coc芯片老化测试设备
KR20110138652A (ko) 디스플레이 패널 검사를 위한 프로브 유닛
KR20080052710A (ko) 프로브 조립체
TWI434045B (zh) Probe assembly
TWI420112B (zh) Probe device
JPH10333597A (ja) 表示パネル検査装置
KR101318159B1 (ko) 프로브 장치 및 피검사체의 청소방법
JP2011039244A (ja) 表示パネルのためのワークテーブル及び試験装置