200848750 九、發明說明 【發明所屬之技術領域】 本發明，係有關於在對液晶面板、積體電路等之平板 狀的被檢查體之檢查中所被使用之探針裝置及檢查裝置。 【先前技術】 液晶面板等之平板狀的被檢查體，一般而言，係使用 探針卡之類的探針裝置來進行檢查。作爲此種探針裝置的 其中之一，係有利用在電性絕緣性薄膜的其中一面上形成 相互平行延伸之複數的配線，並將各配線之一部分作爲探 針要素而使用的探針薄片者。作爲其例子，例如係有專利 文獻1。以下，槪略說明此專利文獻1之發明。 探針裝置1，係如圖2所示一般，包含有探針區塊2 而被構成。探針區塊2，在圖示之例中，係藉由探針薄片 3、和被連接於探針薄片3之薄片狀的第1連接薄片4、和 被連接於第1薄片4之第2連接薄片5、和此些之薄片3 、4以及5所被裝著之探針支持器6而被形成。 探針薄片3，係爲將其前端部如圖3所示一般的，在 電性絕緣性薄膜9之其中一面上設置相互並列地延伸於前 後方向之複數的配線8之薄膜型探針單元。配線8之配列 間距，係與液晶面板1 〇之電極1 1 (參考圖2 )的配列間 距爲相同。 探針薄片3，係又在各配線8之前端部具備有突起電 極13。各突起電極13，係具備有半球狀之形狀。 -4- 200848750 第1連接薄片4，係如圖4所示一般，爲將複數之配 線1 5及1 6形成在電性絕緣性薄膜1 7之其中一面的標籤 片（TAB)，又，於其中一面上，具備有被電性連接於配 線1 5、1 6之驅動用積體電路1 8。 第1連接薄片4之各配線1 5，係與探針薄片3之配線 8以一對一的形式來作對應，而被電性連接於相對應之配 線8。積體電路1 8，係被使用於液晶面板1 〇之驅動，從 配線1 6而接收驅動用控制訊號，並將驅動訊號輸出至配 線1 5。 第2連接薄片5，係爲在電性絕緣性薄膜20之其中一 面上形成有複數的配線1 9之扁平纜線（FPC )。第2連接 薄片5之各配線1 9，係與第1連接薄片4之配線1 6以一 對一的形式來作對應，而被電性連接於相對應之配線i 6。 探針支持器6，係如圖5所示一般，藉由板狀部2 2與 安裝部23而被形成。探針薄片3，係以其前端部朝向安裝 部23之前方而突出且配線8成爲較薄膜9而更下方之狀 態，而在薄膜9處被裝著於安裝部23之下面。連接薄片4 以及5，係在配線1 6以及1 9成爲下側之狀態下，在薄膜 17處被裝著於板狀部22之下面。 各配線8之前端部、對應於該前端部之薄膜9的部位 、以及突起電極1 3，係作爲探針要素而起作用。故而，探 針薄片3之前端部，特別是被形成有突起電極1 3之區域 ，係作爲探針區域而起作用。 探針裝置1，係又包含有：與探針支持器6相結合之 -5- 200848750 區塊支持器’亦即是探針基底25 ;和藉由複數之螺絲構件 而被結合於探針基底2 5之下側的配線構件2 6 ;和被連結 於探針基底25之臂27 ;和被配置在臂27之前端部，並將 探針薄片3之前端部朝下方推壓之推壓機構28 ;和可將推 壓機構2 8對探針薄片3作推壓之狀態作解除而維持臂2 7 之螺絲構件29。 配線構件26，如圖4所示一般，係爲在電性絕緣性基 板3 2之其中一面上平行形成有複數的配線3 1之連接基板 。配線構件26 ’如圖5所示一般，係爲在配線3 1成爲下 方之狀態下’經由間隔物3 4而被組裝於探針基底2 5之下 面。 配線構件26之各配線3 1，係被電性連接於第2連接 薄片25之相對應的配線19。 臂27係被結合於探針基底25處，並於後部具備有螺 絲構件29的孔。螺絲構件29，係被螺合於形成在探針基 底2 5處的螺孔。 推壓機構28，如圖6所示一般，係具備有：被配置在 臂27之前端部下側的基底構件3 5 ;和於上下方向而貫通 臂27之前端部，並螺合於基底構件3 5之1以上的調整螺 絲（未圖示）；和被配置在被2 7與基底構件3 5之間，並 將基底構件3 5對於臂27而朝向下方施力之1以上的第1 彈性體3 6 ;和被配置在基底構件3 5處，並與探針薄片3 之前端部上面相接觸的第2彈性體3 7 ;和以調整螺絲作爲 間隔，並在左右方向空出有間隔而朝向上下方向延伸之複 -6 - 200848750 數的導引銷38。 基底構件3 5，係朝向左右方向延伸，又，係藉由調整 螺絲以及導引銷3 8，而可上下移動地被組裝在臂2 7處。 導引銷3 8，係在被支持於臂2 7以及基底構件3 5之其中一 方的同時，在臂27以及基底構件35之另外一方，以可於 上下方向作相對性移動的方式而被導入，又，係貫通第1 彈性體3 6並延伸。 [專利文獻1]日本特開200 1 - 1 4 1 747號公報 [專利文獻2]日本特開平8-25 4677號公報 【發明內容】 [發明所欲解決之課題] 然而，在前述推壓機構28中，如圖6所示一般，第2 彈性體3 7係藉由第1彈性體3 6而被加壓，並將各突起電 極1 3推壓於液晶面板1 0之各電極1 1上。此時，藉由將 並排爲一列之各突起電極1 3以半切割之圓柱狀的彈性體 3 7來作加壓，此各突起電極1 3係以均勻之壓力而被推壓 於液晶面板1 0之各電極1 1處，並被電性連接。 但是，當各突起電極1 3係並非爲一列，而係如圖7 所示一般之交互偏移的配置（2列鋸齒狀），或是圖8之 3列鋸齒、圖9之4列鋸齒、其他之多數列鋸齒的情況時 ’則無法藉由半切割之圓柱狀的彈性體3 7來作均勻的加 壓。 作爲對應於此種情況之對策，在專利文獻2中，係提 -7- 200848750 案有：使用薄片狀之彈性薄膜，來對複數之接觸元件作 勻的加壓。具體而言，係提案有：如圖9及圖10所矛 般，在加壓平板40與薄膜型探針4 1之間設置彈性薄膜 ，而以均勻之力來對薄膜型探針4 1作加壓。 但是，於此情況，若是將被配設於多數列鋸齒狀的 觸元件43藉由薄片狀之彈性薄膜42來加壓，則如圖 所示一般，在被複數配設之接觸元件4 3的區域中，於 央部之各接觸元件43雖係受到有推壓力，但是，在周 邊緣部，接觸元件43係變少又或是變成沒有，故而， 於均勻地被施加之加壓力，薄膜型探針4 1會撓折，而 會產生中央部之各接觸元件43A浮起並產生接觸不良之 題。 本發明，係爲用以解決上述之問題點而進行者，其 的，係在於提供一種：對於鋸齒狀等之非正規配置的各 觸元件，能夠均勻地作推壓，而使各接觸元件確實地接 於各電極之探針裝置以及檢查裝置。 [用以解決課題之手段] 爲了解決前述課題，本發明之探針裝置，其特徵爲 具備有：被固定在本體框架側之探針基底；和支持薄膜 探針而使其與被檢查體之電極作電性接觸的探針區塊； 在前述薄膜型探針之各接觸元件與被檢查體之電極相接 的狀態下，對此薄膜型探針以均勻之壓力來加壓之加壓 構，前述加壓機構，係具備有與前述薄膜型探針直接作 均 42 接 11 中 圍 由 有 問 巨 接 觸 型 和 Mm 觸 機 接 -8 - 200848750 觸’並在此薄膜型探針之各接觸元件與被檢查體之電極相 接觸的狀態下，對此薄膜型探針作加壓之前端加壓部，前 述前端加壓部，係由對前述薄膜型探針作加壓之加壓平板 、和使該當加壓平板所致之壓力成爲均等的彈性體、和被 設置於前述薄膜型探針之前述接觸元件測，並與前述彈性 體而一同使被附加在前述各接觸元件處之壓力成爲均勻的 輔助薄膜所構成。 藉由前述構成，前述加壓機構之前述前端加壓部，係 藉由該加壓平板而對彈性體作加壓，而此彈性體係使壓力 均等化，並對各接觸元件施加均勻之壓力。進而，輔助薄 膜係從前述薄膜型探針之前述接觸元件側來支持薄膜型探 針，並使附加於前述各接觸元件之壓力成爲均勻。 前述輔助薄膜，係以設置於前述薄膜型探針之接觸元 件側的一叢之接觸元件之周圍爲理想。藉由此，使前述彈 性體所致之壓力藉由該一叢之接觸元件與其周圍之輔助薄 膜而被支持，並使被附加於各接觸元件處之壓力成爲均勻 在具備有：將被檢查體從外部而搬入，並在檢查結束 後將其搬送至外部之定位部；和將從該定位部所搬送而來 之被檢查體作支持，並進行試驗之測定部’而被使用於被 檢查體之檢查的檢查裝置中，作爲前述測定部之探針裝置 ，係以使用前述探針裝置爲理想。 [發明效果] -9- 200848750 如上述一般，由於係將前述彈性體所致之壓力以各接 觸元件與輔助薄膜來支持，並使附加於各接觸元件之壓力 成爲均勻，因此，能夠使前述薄膜型探針之各接觸元件與 前述被檢查體之電極確實地作接觸。 【實施方式】 以下，針對本發明之實施形態的探針裝置以及檢查裝 置，一面參考所添附之圖面一面作說明。本實施形態的檢 查裝置，由於係與前述之先前技術的檢查裝置爲幾乎相同 ，因此，在此係以探針裝置爲中心來作說明。另外，作爲 檢查裝置，係可適用於可使用本實施形態中之探針裝置的 所有裝置中。 本實施形態之探針裝置1，係爲在液晶面板的檢查裝 置中所被使用之裝置。液晶面板，係成爲長方形之形狀， 又，係將複數之電極（未圖示）在對應於長方形之相鄰的 兩邊之邊緣部處，以特定之間距來形成。 探針裝置5 1，係如圖1 2〜圖1 4所示一般，包含有探 針基底52、和探針區塊53、和加壓機構54，而被構成。 探針基底5 2，係爲被固定在檢查裝置之本體框架側的 構件。探針基底52，係在被固定於本體框架側之狀態下， 將探針區塊53以及加壓機構54作支持。在探針基底52 之下側面，係被設置有與探針區塊5 3之突部6 5相嵌合的 導引部56。 在探針基底52之上側面，係被設置有探針區塊固定 -10- 200848750 螺絲5 7、和螺孔5 8、和絞練收容部5 9。探針基底 絲5 7，係爲使其頭部嵌合於被設置在探針區塊5 3 65內的嵌合溝66，而用以將探針區塊53固定在探 52處的螺絲。螺孔58，係爲用以使後述之加壓機釋 固定螺絲82螺合轉入的螺孔。絞練收容部59，係 與後述之加壓臂81的基端平板部8 5之絞練嵌合窗 嵌合之部分。 探針區塊53，係爲用以藉由其之前端等而支持 與液晶面板6 1之電極（未圖示）作電性接觸的構 針區塊5 3，主要係具備有FP C平板62和配線構件 被構成。FPC平板62，係具備有：與探針基底52 面的導引部5 6相嵌合之突部65、和被設置在此突g 之嵌合溝66、和在凸部65與導引部56相嵌合的狀 抵接於探針基底52之邊緣部，而進行探針區塊53 決定的停止部67等。 配線構件63，係爲用以將進行液晶面板6 1之 號或檢測訊號等之交換的外部裝置，和被形成於液 6 1之表面的電路作電性連接之構件。配線構件63 係具備有基底側基板70、和FPC71、和FPC基板 薄膜型探針7 3，而被構成。 基底側基板7 0，係被安裝於探針區塊5 2側， 性連接於前述外部裝置。FPC71，係爲用以將基底 7 0和薄膜型探針7 3，經由F P C基板7 2而作電性連 件。F P C之基端部，係經由被設置在F p c平板6 2 固定螺 之突部 針基底 齡54的 爲用以 ;89相 探針並 件。探 :63而 之下側 15 65 內 態下， 之位置 控制訊 晶面板 ，主要 72、和 而被電 側基板 接的構 的基端 -11 - 200848750 部之圓柱狀的彈性體74，而被連接於基底側基板70。具 體而言，係在將FPC71之配線側的接點與基底側基板70 之配線側的接點相互抵接的狀態下，經由前述彈性體74 而從FPC71側被推壓，並相互作電性連接。FPC基板72 ，係爲搭載有驅動用積體電路75等之基板。FPC基板72 ，係被設置在FPC71之途中。 薄膜型探針73，係爲用以將液晶面板6 1之各電極作 電性連接的構件。薄膜型探針73，係被設置在FPC71之 前端部。薄膜型探針73，係如圖1所示一般，藉由基板 77與接觸元件78而被構成。基板77，係直接利用FPC71 之一部份而被構成。藉由使用FPC71，而成爲柔軟且可撓 折之基板。接觸元件78，係被設置在基板77之下側面的 對應於液晶面板61之各電極的位置。接觸元件7 8，具體 而言，係如圖1、7所示一般，被適宜配設爲交互偏移的 配置（2列鋸齒狀），或是圖8之3列鋸齒、或是圖9之 4列鋸齒。 加壓機構5 4，係爲用以在探針區塊5 3之薄膜型探針 73的接觸元件78與液晶面板6丨之電極相接觸的狀態下， 對此薄膜型探針73以均一之壓力來加壓的機構。將包覆 被配設爲鋸齒狀之接觸元件7 8全體的範圍，設爲加壓範 圍80 (參考圖7、8 )，加壓機構54，係被設定爲對此範 圍進行加壓。加壓機構5 4，係如圖1 3、圖14所示一般， 包含有加壓臂8 1、和固定螺絲8 2、和前端加壓部8 3，而 被構成。 -12- 200848750 加壓臂8 1，係爲用以支持前端加壓部83，並經由 前端加壓部83，而對前述薄膜型探針73作加壓之構件 加壓臂8 1，係由基端平板部85、和斜板部86、和前端 壓板部8 7所構成。 基端平板部85，係爲在探針基底52處被可旋轉地 支持之構件。在基端平板部85之基端處，係被設置有 練嵌合部8 9。此絞練嵌合部8 9，係經由與探針基底5 2 絞練收容部5 9相嵌合，而將基端平板部8 5相對於探針 底52而可旋轉地作安裝。 斜板部86，係爲將前端推壓板部87作支持之構件 斜板部8 6，其基端係被支持於基端平板部8 5處，並藉 其前端來支持前端推壓板部8 7。 前端推壓板部87，係爲將前端加壓部83作支持之 件。此前端推壓板部8 7，係被形成爲將前述加壓範圍 作覆蓋之尺寸的長方形狀，並將面向於薄膜型探針7 3 位置之前端加壓部8 3作支持。 固定螺絲8 2，係爲用以將加壓臂8 1固定在設定位 處之螺絲。在本實施形態中，固定螺絲8 2，係在加壓 8 1之基端平板部8 5抵接於探針基底5 2之上側面的狀態 ，將加壓臂8 1作固定。 前端加壓部8 3，係與前述薄膜型探針7 3直接接觸 並在此薄膜型探針73的接觸元件78與液晶面板61之 極相接觸的狀態下，用以對此薄膜型探針7 3作加壓的 件。此前端加壓部8 3，係如圖1所示一般，由加壓平 此 〇 推 作 絞 之 基 由 構 80 而 置 臂 下 電 構 板 -13- 200848750 9 1、和彈性支持部92、和彈性體93、和輔助薄膜94所構 成。 加壓平板9 1，係爲經由彈性體93而用以對前述薄膜 型探針73作加壓之構件。加壓平板9 1，係被形成爲配合 於加壓範圍8 0之尺寸的長方形狀。在加壓平板9 1處，係 被設置有3個的螺孔96，該螺孔96，係被螺絲鎖入有後 述之彈性支持部92的滑動銷97。 彈性支持部92，係爲用以將加壓平板9 1作彈性支持 之構件。彈性支持部92，係由滑動銷97與彈簧98所構成 。滑動銷97，係可滑動地被插入至被設置於加壓臂8 1之 前端推壓板部87處的銷孔99中。在滑動銷97之前端， 係被設置有螺絲鎖入加壓平板9 1之螺孔5 8中的螺牙。 彈簧98，係爲用以將前述前端加壓部87作支持，並 將加壓平板9 1朝向液晶面板6 1側作推壓之構件。彈簧98 ，係被安裝於滑動銷97處。經由在此狀態下將滑動銷97 螺絲鎖合至加壓平板9 1的螺孔96中，前述彈簧98，其基 端係被前端推壓板部8 7所支持，並藉由前端而將加壓平 板9 1朝向液晶面板6 1側作推壓。 彈性支持部92，係在前端推壓板部87處，被並列配 設有3個。此彈性支持部92之配置位置，係以能夠使其 經由彈性體93而將所有之接觸元件78對於各電極來以均 一之壓力而加壓的方式來配置。具體而言，係將彈性支持 部92，設定在以各接觸元件78之座標上的位置爲依據而 統計性地求取出之各接觸元件7 8的中心位置處。例如， -14- 200848750 將各接觸元件7 8分爲複數之群組，並在每一群組中，特 疋出各接觸兀件7 8之統計性的中心位置，而將彈性支持 部92特製在該位置。 彈性體9 3 ’係爲用以使加壓平板91側之壓力成爲均 等並對各接觸元件7 8施加均勻之壓力的構件。彈性支持 部93，係由具備有彈性之薄片狀構件所構成。例如，係可 使用絕緣性之薄片狀彈性體等之高分子材料。 輔助薄膜94，係爲用以與彈性體93 —同而使被施加 於薄膜型探針7 3之各接觸元件7 8的壓力成爲均勻之構件 。此輔助薄膜94，係被設置在集合於薄膜型探針73之基 板77的接觸元件78側近旁之一群的接觸元件78之周圍 。輔助薄膜94，係將藉由彈性體93而被推壓之薄膜型探 針73的基板77處之易於彎曲的周圍部分（接觸元件數量 少、又或是無接觸元件之處）作支持，並抑制薄膜型探針 73之基板77的彎曲（參考圖11)，而如圖15、16所示 一般，使被施加於各接觸元件78之壓力成爲均勻。輔助 薄膜94之厚度，係被設定爲與各接觸元件78之高度爲幾 乎相同的高度。 輔助薄膜9 4之位置，係如圖1 5所示一般，在包挾各 接觸元件7 8之兩側（圖7、8之左右兩側）處’被配設爲 細長狀。又，作爲輔助薄膜94之配設位置，係亦可如圖 17所示一般，延伸至薄膜型探針73之兩側的FPC71處’ 而對廣闊範圍作輔助。進而，輔助薄膜94之內側端的位 置，係可如圖1 5所示一般，位置在較彈性體93之周圍邊 -15- 200848750 緣部爲更內側之位置，亦可爲如圖1 7、1 8所示-置在較彈性體93之周圍邊緣部爲更外側之位置。 ，當如圖17之4列鋸齒狀般的接觸元件78之數i 情況時，係以將輔助薄膜94之內側端的位置，設 置在較彈性體93之周圍邊緣部爲更外側，而使從 93而來之壓力，在輔助薄膜94之內側而對基板77 ，並使其集中於各接觸元件78處爲理想。於此情 於彈性體93所致之壓力，係由多數之接觸元件78 範圍來被支持，而基板77之如同圖1 1 一般而彎曲 性係爲低，因此，係以使彈性體93所致之壓力集 接觸元件78處爲理想。因此，係將輔助薄膜94之 的位置，設定爲位置在較彈性體93之周圍邊緣部 側。另外，作爲接觸元件78之形狀，係有圖1 5、 之尖銳形狀，或是如圖1 7、1 8 —般之圓頭形狀等。 輔助薄膜94，係由絕緣性之薄片狀彈性體等之 材料所構成。輔助薄膜94之硬度，係被設定爲相 壓平板91所致之壓力而僅會被些許壓下的程度。 ，輔助薄膜94，係在彈性體93經由基板77而對各 件7 8以充分之壓力來作推壓的狀態下，抑制基板 圍邊緣部（各接觸元件78之外側）的彎曲，而使 於各接觸元件78之壓力成爲均一。 在如同上述一般而被構成之探針裝置51中， 液晶面板6 1載置於工作平台上，並在各接觸元件 晶面板6 1之各電極相互接觸的狀態下，對其施力口 般，位 特別是 :爲多的 置爲位 彈性體 作加壓 況，由 而以廣 的可能 中於各 內側端 爲更外 16 —般 高分子 對於加 藉由此 接觸元 77之周 被施加 若是將 78與液 過驅動 -16- 200848750 (overdrive )，則係藉由以彈性支持體92而作彈性支持 之彈性體93，來對薄膜型探針73之基板77作均等地加壓 。而後，被作均等加壓之基板77，係對各接觸元件78與 輔助薄膜9 4加壓。而後，由於係將一叢之各接觸元件7 8 的周圍，藉由輔助薄膜94來作支持，因此，基板77係不 會彎曲，而對各接觸元件78加壓。而後，此彈性體93所 致之加壓由於係均等地被施加於基板7 7上，因此在各接 觸元件7 8處係作用有相同之壓力。 藉由此，各接觸元件7 8係被以均一之壓力而加壓， 所有之接觸元件7 8係確實地與液晶面板6 1的各電極接觸 ，而能夠以高精確度來對液晶面板6 1進行檢查。 [變形例] 在前述實施形態中，雖係以具有彈性之構件來構成輔 助薄膜94，但是，亦可將輔助薄膜94之厚度設定爲僅較 接觸元件78之高度略薄的尺寸，並藉由幾乎不具備有彈 性之構件來構成。於此情況，當圖1 6之狀態時，由於各 接觸元件78之周圍係被輔助薄膜94所支持而幾乎沒有彎 曲，因此，在薄膜型探針73之基板77中的輔助薄膜94 之內側係被重點性加壓，各接觸元件78係以充分之力量 而被推壓附著在液晶面板6 1之各電極處。藉由此，能夠 使各接觸元件7 8確實地接觸於液晶面板6 1的電極。 前述輔助薄膜94，係可設置於一叢之接觸元件78的 周圍之一部分處，亦可以包覆全周之方式來設置。前述輔 -17- 200848750 助薄膜9 4 ’係被設置在薄膜型探針7 3之基板7 7的容易彎 曲之部分。 【圖式簡單說明】 [圖1 ]展示本發明之實施形態的探針裝置之重要部分 的側面剖面圖。 [圖2]展示先前之檢查裝置的探針裝置之探針區塊的 立體圖。 [圖3 ]展示先前之檢查裝置的探針裝置之探針薄片的 立體圖。 [圖4]展示先前之檢查裝置的探針裝置之背面圖。 [圖5]展示先前之檢查裝置的探針裝置之側面剖面圖 〇 [圖6]展示先前之檢查裝置的探針裝置之重要部分剖 面圖。 [圖7]展不先前之檢查裝置的探針裝置之突起電極的 配列例之底面圖。 [圖8]展示先前之檢查裝置的探針裝置之突起電極的 配列例之底面圖。 [圖9]展不先前之檢查裝置的探針裝置之接觸元件部 分的重要部分擴大圖。 [圖10]展示先前之檢查裝置的探針裝置之重要部分的 側面剖面圖。 [圖1 1 ]展示先前之檢查裝置的探針裝置之接觸元件部 -18 - 200848750 分的重要部分擴大圖。 [圖12]展示本發明之實施形態的檢查裝置之探針裝置 的立體圖。 [圖13]展示本發明之實施形態的檢查裝置之探針裝置 的分解立體圖。 [圖14]展示本發明之實施形態的檢查裝置之探針裝置 的部分截斷側面圖。 [圖1 5 ]展示本發明之實施形態的檢查裝置之探針裝置 的接觸元件部分的重要部分擴大圖。 [圖16]展示本發明之實施形態的檢查裝置之探針裝置 的接觸元件部分的重要部分擴大圖。 [圖丨7]展示在本發明之實施形態的檢查裝置之探針裝 置處被安裝有廣闊之輔助薄膜的例子之重要部分擴大圖。 [圖18]展示圖17之輔助薄膜與彈性體間之邊界部分 的重要部分擴大圖。 【主要元件符號說明】 5 1 :探針裝置 5 2 ·探針基底 5 3 :探針區塊 54 :加壓機構 56 :導引部 57 :探針區塊固定螺絲 5 8 :螺孔 -19- 200848750 5 9 =絞練收容部 6 1 :液晶面板 6 2: F P C平板 63 :配線構件 6 5 :凸部 6 6 :嵌合溝 67 :停止部 70 :基底側基板[Technical Field] The present invention relates to a probe device and an inspection device which are used for inspection of a flat object to be inspected such as a liquid crystal panel or an integrated circuit. [Prior Art] A flat object to be inspected such as a liquid crystal panel is generally inspected using a probe device such as a probe card. One of the probe devices is a probe sheet which is formed by forming a plurality of wires extending in parallel with each other on one surface of the electrically insulating film and using one of the wires as a probe element. . As an example thereof, for example, Patent Document 1 is attached. Hereinafter, the invention of Patent Document 1 will be briefly described. The probe device 1 is generally constructed as shown in Fig. 2 and includes a probe block 2. In the illustrated example, the probe block 2 is composed of a probe sheet 3, a sheet-like first connecting sheet 4 connected to the probe sheet 3, and a second sheet connected to the first sheet 4. The connecting sheet 5, and the probe holders 6 on which the sheets 3, 4, and 5 are attached are formed. The probe sheet 3 is a film type probe unit in which a plurality of wirings 8 extending in parallel in the front-rear direction are provided on one surface of the electrically insulating film 9 as shown in Fig. 3, as shown in Fig. 3 . The arrangement pitch of the wirings 8 is the same as the arrangement pitch of the electrodes 1 1 (refer to Fig. 2) of the liquid crystal panel 1 . The probe sheet 3 is provided with a bump electrode 13 at the end of each of the wirings 8. Each of the bump electrodes 13 has a hemispherical shape. -4- 200848750 The first connecting sheet 4 is a label sheet (TAB) in which a plurality of wirings 15 and 16 are formed on one side of the electrically insulating film 17 as shown in FIG. On one of the sides, a driving integrated circuit 18 electrically connected to the wirings 15 and 16 is provided. The wirings 15 of the first connecting sheet 4 are electrically connected to the corresponding wirings 8 in correspondence with the wirings 8 of the probe sheets 3 in a one-to-one manner. The integrated circuit 18 is used for driving the liquid crystal panel 1 , receives the driving control signal from the wiring 16 , and outputs the driving signal to the wiring 15 . The second connecting sheet 5 is a flat cable (FPC) in which a plurality of wirings 19 are formed on one surface of the electrically insulating film 20. The wirings 197 of the second connection sheet 5 are electrically connected to the corresponding wirings i 6 in correspondence with the wirings 16 of the first connection sheets 4 in a one-to-one correspondence. The probe holder 6 is generally formed as shown in Fig. 5 by the plate portion 22 and the mounting portion 23. The probe sheet 3 is protruded from the front end portion toward the front side of the mounting portion 23, and the wiring 8 is lower than the film 9, and is attached to the lower surface of the mounting portion 23 at the film 9. The connecting sheets 4 and 5 are attached to the lower surface of the plate-like portion 22 at the film 17 in a state where the wirings 16 and 19 are on the lower side. The front end portion of each of the wirings 8, the portion of the film 9 corresponding to the front end portion, and the protruding electrode 13 function as probe elements. Therefore, the front end portion of the probe sheet 3, particularly the region where the projection electrode 13 is formed, functions as a probe region. The probe device 1 further includes: a -5-200848750 block holder that is combined with the probe holder 6, that is, the probe substrate 25; and is coupled to the probe substrate by a plurality of screw members a wiring member 2 6 on the lower side of the 205; and an arm 27 coupled to the probe base 25; and a pressing mechanism disposed at the front end of the arm 27 and pushing the front end portion of the probe sheet 3 downward 28; and the screw member 29 for holding the arm 27 can be released by releasing the pressing mechanism 28 against the probe sheet 3. As shown in Fig. 4, the wiring member 26 is generally a connecting substrate in which a plurality of wirings 3 1 are formed in parallel on one surface of the electrically insulating substrate 32. As shown in Fig. 5, the wiring member 26' is generally mounted on the lower surface of the probe base 25 via the spacers 3 in a state where the wiring 31 is lower. Each of the wirings 31 of the wiring member 26 is electrically connected to the corresponding wiring 19 of the second connecting sheet 25. The arm 27 is coupled to the probe base 25 and provided with a hole having a screw member 29 at the rear. The screw member 29 is screwed to a screw hole formed at the probe base 25. As shown in FIG. 6, the pressing mechanism 28 is generally provided with a base member 35 disposed on the lower side of the front end of the arm 27, and a front end portion penetrating the arm 27 in the up-and-down direction, and screwed to the base member 3. 5 or more adjustment screws (not shown); and 1st elastic body disposed between the member 27 and the base member 35 and biasing the base member 35 downward and downward with respect to the arm 27; 3 6 ; and the second elastic body 3 7 disposed at the base member 35 and in contact with the upper end portion of the probe sheet 3; and with the adjusting screw as an interval, and spaced apart in the left-right direction The guide pin 38 of the complex -6 - 200848750 is extended in the up and down direction. The base member 35 extends in the left-right direction, and is assembled to the arm 27 by up-and-down movement by means of an adjusting screw and a guide pin 38. The guide pin 38 is supported by one of the arm 27 and the base member 35, and is introduced in the other direction of the arm 27 and the base member 35 so as to be movable in the vertical direction. Further, it extends through the first elastic body 36. [Patent Document 1] Japanese Laid-Open Patent Publication No. JP-A No. Hei. No. Hei. No. Hei. In Fig. 6, as shown in Fig. 6, the second elastic body 37 is pressurized by the first elastic body 36, and the projection electrodes 13 are pressed against the respective electrodes 1 1 of the liquid crystal panel 10. . At this time, each of the protruding electrodes 13 which are arranged side by side in a row is pressurized by a semi-cut cylindrical elastic body 37, and the respective protruding electrodes 13 are pressed against the liquid crystal panel 1 with a uniform pressure. Each of the electrodes 1 of 1 is electrically connected. However, when the protruding electrodes 13 are not in a row, they are generally alternately offset as shown in FIG. 7 (two columns of zigzag), or three columns of FIG. 8 and nine columns of FIG. In the case of the other majority of the serrations, it is impossible to uniformly pressurize the semi-cut cylindrical elastic body 37. As a countermeasure against such a situation, in Patent Document 2, the method of -7-200848750 is to use a sheet-like elastic film to uniformly press a plurality of contact elements. Specifically, it is proposed that an elastic film is provided between the pressure plate 40 and the film type probe 4 1 as shown in FIG. 9 and FIG. 10, and the film type probe 4 1 is made with a uniform force. Pressurize. However, in this case, if the contact elements 43 arranged in a plurality of rows of serrations are pressed by the sheet-like elastic film 42, as shown in the figure, the contact elements 43 are provided in plural numbers. In the region, the contact elements 43 in the central portion are subjected to the pressing force, but the contact elements 43 are reduced or become unnecessary at the peripheral edge portion, so that the pressing force is uniformly applied, and the film type The probe 4 1 is deflected, and the contact elements 43A at the center portion are caused to float and cause contact failure. The present invention has been made to solve the above-mentioned problems, and it is preferable to provide a contact element that is irregularly arranged in a zigzag shape or the like so as to be uniformly pressed, and each contact element is surely The probe device and the inspection device are connected to each electrode. [Means for Solving the Problems] In order to solve the above problems, the probe device of the present invention includes: a probe base fixed to the main body frame side; and a support film probe to be inspected with the object to be inspected a probe block in which the electrode is electrically contacted; in a state in which the contact elements of the film-type probe are in contact with the electrode of the object to be inspected, the film-type probe is pressurized with a uniform pressure. The pressurizing mechanism is provided with a direct connection with the film-type probe, and is connected to the M-contact device by a contact type and a touch contact with the Mm contactor. In the state in which the element is in contact with the electrode of the object to be inspected, the film type probe is subjected to a pressurized front end pressurizing portion, and the front end pressurizing portion is a press plate for pressurizing the film type probe. And an elastic body that makes the pressure by the pressure flat plate equal, and the contact element provided in the film type probe, and the pressure attached to each of the contact elements together with the elastic body becomes Uniform Auxiliary film formed. According to the above configuration, the front end pressurizing portion of the pressurizing mechanism pressurizes the elastic body by the pressurizing flat plate, and the elastic system equalizes the pressure and applies a uniform pressure to each of the contact elements. Further, the auxiliary film supports the film type probe from the side of the contact element of the film type probe, and the pressure applied to each of the contact elements is made uniform. The auxiliary film is preferably provided around a contact element of a bundle provided on the contact element side of the film type probe. Thereby, the pressure caused by the elastic body is supported by the contact elements of the bundle and the auxiliary film around the bundle, and the pressure applied to the contact elements is uniformed to be provided: the object to be inspected When the inspection is completed, the inspection unit is transported to the outside positioning unit, and the inspection unit that has been transported from the positioning unit is supported, and the test unit is tested and used for the object to be inspected. In the inspection apparatus for inspection, it is preferable to use the probe device as the probe device of the measurement unit. [Effect of the Invention] -9- 200848750 As described above, since the pressure due to the elastic body is supported by the contact elements and the auxiliary film, and the pressure applied to each contact element is made uniform, the film can be made Each contact element of the probe is in positive contact with the electrode of the test object. [Embodiment] Hereinafter, a probe device and an inspection device according to an embodiment of the present invention will be described with reference to the attached drawings. The inspection apparatus of the present embodiment is almost the same as the inspection apparatus of the prior art described above, and therefore, the probe device will be mainly described here. Further, the inspection device can be applied to all devices in which the probe device of the present embodiment can be used. The probe device 1 of the present embodiment is a device used in an inspection device for a liquid crystal panel. The liquid crystal panel has a rectangular shape, and a plurality of electrodes (not shown) are formed at a predetermined distance between the edges of the two sides adjacent to each other. The probe device 5 1 is constructed as shown in Figs. 12 to 14 and includes a probe base 52, a probe block 53, and a pressurizing mechanism 54. The probe base 52 is a member that is fixed to the body frame side of the inspection device. The probe base 52 is supported by the probe block 53 and the pressurizing mechanism 54 in a state of being fixed to the side of the main body frame. On the lower side of the probe base 52, a guide portion 56 fitted to the projection 65 of the probe block 53 is provided. On the upper side of the probe substrate 52, a probe block is fixed -10- 200848750 screw 5 7 , and a screw hole 5 8 , and a snagging receiving portion 5 9 . The probe base wire 57 is a screw for fitting the head portion to the fitting groove 66 provided in the probe block 535, and for fixing the probe block 53 to the probe 52. The screw hole 58 is a screw hole for screwing the press machine fixing screw 82 to be described later. The squeezing accommodating portion 59 is a portion to be fitted to the splicing fitting window of the base end flat portion 85 of the pressurizing arm 81 to be described later. The probe block 53 is a pin block 53 for supporting electrical contact with an electrode (not shown) of the liquid crystal panel 61 by its front end or the like, and is mainly provided with an FP C plate 62. And wiring members are constructed. The FPC flat plate 62 is provided with a projection 65 that is fitted to the guide portion 56 of the probe base 52 surface, a fitting groove 66 provided at the projection g, and a projection portion 65 and a guide portion. The 56-phase fitting shape abuts against the edge portion of the probe base 52, and the stopper portion 67 determined by the probe block 53 and the like are performed. The wiring member 63 is a member for electrically connecting an external device for exchanging the liquid crystal panel 61 or a detection signal or the like, and a circuit formed on the surface of the liquid 61. The wiring member 63 is configured to include a base-side substrate 70, an FPC 71, and an FPC substrate film-type probe 733. The base-side substrate 70 is attached to the probe block 52 side and is connected to the external device. The FPC 71 is used to electrically connect the substrate 70 and the film type probe 7 3 via the F P C substrate 72. The base end portion of the F P C is used for the base portion 54 of the needle which is disposed on the F p c plate 6 2 to fix the screw, and the 89 phase probe is used for the assembly. Detecting: 63 and the lower side of the 65 65 internal state, the position control transistor panel, mainly 72, and the base end of the structure connected by the electric side substrate -11 - 200848750 cylindrical elastic body 74, It is connected to the base side substrate 70. Specifically, in a state where the contact on the wiring side of the FPC 71 and the contact on the wiring side of the base-side substrate 70 are in contact with each other, the elastic body 74 is pressed from the FPC 71 side and electrically connected to each other. connection. The FPC board 72 is a board on which the drive integrated circuit 75 or the like is mounted. The FPC board 72 is placed on the way to the FPC 71. The film type probe 73 is a member for electrically connecting the respective electrodes of the liquid crystal panel 61. The film type probe 73 is provided at the front end portion of the FPC 71. The film type probe 73 is generally formed as shown in Fig. 1 by a substrate 77 and a contact member 78. The substrate 77 is constructed by directly using one of the FPCs 71. By using the FPC 71, it becomes a flexible and flexible substrate. The contact member 78 is disposed at a position corresponding to each electrode of the liquid crystal panel 61 on the lower side of the substrate 77. The contact element 7 8 is, in particular, generally arranged as an interactive offset (2 columns of zigzag) as shown in FIGS. 1 and 7 , or 3 rows of saw teeth of FIG. 8 or FIG. 9 4 columns of sawtooth. The pressurizing mechanism 54 is configured to make the film type probe 73 uniform in a state in which the contact member 78 of the film type probe 73 of the probe block 53 is in contact with the electrode of the liquid crystal panel 6A. Pressure to pressurize the mechanism. The range in which the entire contact element 7 which is arranged in a zigzag shape is covered is set as the pressurizing range 80 (refer to Figs. 7 and 8), and the pressurizing mechanism 54 is set to pressurize the range. As shown in Figs. 13 and 14, the pressurizing mechanism 54 includes a pressurizing arm 81, a fixing screw 82, and a distal end pressurizing portion 83. -12- 200848750 The pressing arm 181 is a member pressing arm 81 for supporting the front end pressing portion 83 and pressing the film type probe 73 via the front end pressing portion 83. The base end flat plate portion 85, the swash plate portion 86, and the front end plate portion 87 are formed. The base end flat portion 85 is a member that is rotatably supported at the probe base 52. At the base end of the base end flat portion 85, a fitting portion 8.9 is provided. The snagging fitting portion 8.9 is rotatably attached to the probe bottom portion 52 by fitting the base end flat portion 85 to the probe base portion 5 by fitting the probe base portion 5 to the probe base portion 59. The swash plate portion 86 is a member swash plate portion 8 6 for supporting the front end pressing plate portion 87, and the base end thereof is supported by the base end flat plate portion 85, and the front end pushing plate portion 8 is supported by the front end thereof. . The front end pressing portion 87 is a member for supporting the front end pressing portion 83. The front end pressing plate portion 87 is formed in a rectangular shape having a size to cover the pressure range, and supports the front end pressing portion 83 facing the film type probe 7 3 . The fixing screw 8 2 is a screw for fixing the pressing arm 8 1 at the set position. In the present embodiment, the fixing screw 8 2 is in a state in which the base end flat plate portion 85 of the pressurizing member 8 abuts against the upper surface of the probe base 5 2 , and the pressurizing arm 8 1 is fixed. The front end pressing portion 83 is in direct contact with the film type probe 7 3 and is in contact with the pole of the liquid crystal panel 61 in a state where the contact member 78 of the film type probe 73 is in contact with the pole of the liquid crystal panel 61. 7 3 as a pressurized piece. The front end pressurizing portion 83 is generally as shown in FIG. 1 , and the arm is lowered by the base of the yoke, and the arm lower electrical plate 13 - 200848750 9 1 and the elastic support portion 92 are disposed. It is composed of an elastic body 93 and an auxiliary film 94. The pressurizing plate 911 is a member for pressurizing the film type probe 73 via the elastic body 93. The pressurizing plate 911 is formed into a rectangular shape that fits the size of the pressurizing range 80. At the pressure plate 9 1 , three screw holes 96 are provided, and the screw holes 96 are screwed into the slide pins 97 of the elastic support portion 92 to be described later. The elastic support portion 92 is a member for elastically supporting the press plate 9 1 . The elastic support portion 92 is composed of a slide pin 97 and a spring 98. The slide pin 97 is slidably inserted into a pin hole 99 provided at the front end pressing plate portion 87 of the pressurizing arm 81. At the front end of the slide pin 97, a screw that is screwed into the screw hole 58 of the pressure plate 9 1 is provided. The spring 98 is a member for supporting the front end pressing portion 87 and pressing the pressing flat plate 91 toward the liquid crystal panel 61. The spring 98 is attached to the slide pin 97. By screwing the slide pin 97 into the screw hole 96 of the press plate 9 1 in this state, the spring 98 has its base end supported by the front end pressing plate portion 87 and is pressurized by the front end. The flat plate 9 1 is pressed toward the side of the liquid crystal panel 6 1 . The elastic support portion 92 is provided at the front end pressing plate portion 87, and three are arranged in parallel. The position of the elastic support portion 92 is such that all of the contact members 78 can be pressurized by a uniform pressure with respect to the respective electrodes via the elastic body 93. Specifically, the elastic support portion 92 is set at the center position of each of the contact members 78 which is statistically extracted based on the position on the coordinates of the contact elements 78. For example, -14- 200848750 divides each contact element 7 8 into a plurality of groups, and in each group, the statistical center position of each contact element 78 is specifically extracted, and the elastic support portion 92 is specially made. In that position. The elastic body 9 3 ' is a member for making the pressure on the pressure flat plate 91 side uniform and applying a uniform pressure to each of the contact members 78. The elastic support portion 93 is composed of a sheet-like member having elasticity. For example, a polymer material such as an insulating sheet-like elastomer can be used. The auxiliary film 94 is a member for uniformly applying the pressure applied to each of the contact elements 78 of the film type probe 7 3 together with the elastic body 93. This auxiliary film 94 is provided around the contact member 78 of a group of the vicinity of the contact member 78 side of the substrate 77 of the film type probe 73. The auxiliary film 94 is supported by a peripheral portion (a small number of contact elements or a contactless member) at the substrate 77 of the film type probe 73 which is pressed by the elastic body 93, and The bending of the substrate 77 of the film type probe 73 is suppressed (refer to Fig. 11), and as shown in Figs. 15 and 16, the pressure applied to each of the contact elements 78 is made uniform. The thickness of the auxiliary film 94 is set to be approximately the same height as the height of each contact member 78. The position of the auxiliary film 94 is generally as shown in Fig. 15, and is disposed on both sides (left and right sides of Figs. 7 and 8) of the respective contact members 78 to be elongated. Further, as the arrangement position of the auxiliary film 94, as shown in Fig. 17, it is possible to extend to the FPC 71' on both sides of the film type probe 73 to assist a wide range. Further, the position of the inner end of the auxiliary film 94 can be generally as shown in FIG. 15, and the position is at the inner side of the edge of the outer edge of the elastic body 93 from -15 to 200848750, or as shown in FIG. 8 is placed at a position further outward than the peripheral edge portion of the elastic body 93. When the number i of the contact elements 78 in the shape of a zigzag as shown in FIG. 17 is arranged, the position of the inner end of the auxiliary film 94 is set to be more outward than the peripheral edge portion of the elastic body 93, so that from 93 The resulting pressure is ideal for the substrate 77 on the inside of the auxiliary film 94 and for focusing on the contact elements 78. The pressure caused by the elastomer 93 is supported by a plurality of contact elements 78, and the substrate 77 is generally low as shown in Fig. 11. Therefore, it is caused by the elastic body 93. The pressure set contact element 78 is ideal. Therefore, the position of the auxiliary film 94 is set to be positioned closer to the peripheral edge portion of the elastic body 93. Further, as the shape of the contact member 78, there is a sharp shape of Fig. 15, or a round head shape as shown in Figs. The auxiliary film 94 is made of a material such as an insulating sheet-like elastic body. The hardness of the auxiliary film 94 is set to the extent that the pressure caused by the pressure plate 91 is only slightly depressed. The auxiliary film 94 suppresses the bending of the peripheral edge portion of the substrate (the outer side of each contact member 78) while the elastic member 93 is pressed against the respective members 78 by a sufficient pressure via the substrate 77. The pressure of each contact element 78 becomes uniform. In the probe device 51 configured as described above, the liquid crystal panel 61 is placed on the work platform, and in the state where the electrodes of the contact element crystal plates 61 are in contact with each other, the force is applied thereto. In particular, the pressure is applied to a plurality of elastic bodies, and a wide range is possible for the inner ends to be more external. The polymer is applied to the circumference of the contact element 77. 78 and the liquid overdrive-16-200848750 (overdrive), the substrate 77 of the film type probe 73 is uniformly pressurized by the elastic body 93 which is elastically supported by the elastic support body 92. Then, the substrate 77 which is equally pressurized is pressed against the contact elements 78 and the auxiliary film 94. Then, since the periphery of each of the contact elements 7 8 of a bundle is supported by the auxiliary film 94, the substrate 77 is not bent, and the contact elements 78 are pressurized. Then, the pressurization by the elastic body 93 is applied to the substrate 77 uniformly, so that the same pressure is applied to each of the contact elements 78. Thereby, each of the contact elements 78 is pressurized with a uniform pressure, and all of the contact elements 78 are surely brought into contact with the respective electrodes of the liquid crystal panel 61, and the liquid crystal panel 6 1 can be highly accurately aligned. checking. [Modification] In the above embodiment, the auxiliary film 94 is formed of a member having elasticity. However, the thickness of the auxiliary film 94 may be set to be slightly thinner than the height of the contact member 78, and by There are few components that are flexible. In this case, in the state of Fig. 16, since the periphery of each contact member 78 is supported by the auxiliary film 94 and hardly bent, the inside of the auxiliary film 94 in the substrate 77 of the film type probe 73 is When the pressure is applied, the contact elements 78 are pressed and adhered to the respective electrodes of the liquid crystal panel 61 with sufficient force. Thereby, each contact element 7 8 can be surely brought into contact with the electrode of the liquid crystal panel 61. The auxiliary film 94 may be disposed at a portion around a contact member 78 of a bundle or may be provided to cover the entire circumference. The aforementioned auxiliary -17-200848750 helper film 9 4 ' is provided in the easily bendable portion of the substrate 7 7 of the film type probe 7 3 . BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a side cross-sectional view showing an essential part of a probe device according to an embodiment of the present invention. Fig. 2 is a perspective view showing a probe block of a probe device of the prior inspection device. Fig. 3 is a perspective view showing a probe sheet of a probe device of the prior inspection device. Fig. 4 is a rear view showing the probe device of the prior inspection device. Fig. 5 is a side sectional view showing the probe device of the prior inspection device. Fig. 6 is a cross-sectional view showing an essential part of the probe device of the prior inspection device. Fig. 7 is a bottom plan view showing an arrangement example of the projection electrodes of the probe device of the prior inspection apparatus. Fig. 8 is a bottom view showing an arrangement example of projection electrodes of the probe device of the prior inspection apparatus. Fig. 9 is an enlarged view of an essential part of a contact element portion of the probe device of the prior inspection apparatus. Fig. 10 is a side sectional view showing an important part of a probe device of the prior inspection device. [Fig. 1 1] An enlarged view of an important part of the contact element portion -18 - 200848750 of the probe device of the prior inspection device is shown. Fig. 12 is a perspective view showing a probe device of an inspection apparatus according to an embodiment of the present invention. Fig. 13 is an exploded perspective view showing the probe device of the inspection apparatus according to the embodiment of the present invention. Fig. 14 is a partially cutaway side view showing the probe device of the inspection apparatus according to the embodiment of the present invention. Fig. 15 is an enlarged view showing an essential part of a contact element portion of a probe device of an inspection apparatus according to an embodiment of the present invention. Fig. 16 is an enlarged view showing an essential part of a contact element portion of a probe device of an inspection apparatus according to an embodiment of the present invention. [Fig. 7] An enlarged view of an important part of an example in which a wide auxiliary film is attached to a probe device of an inspection apparatus according to an embodiment of the present invention. Fig. 18 is an enlarged view showing an important part of a boundary portion between the auxiliary film and the elastic body of Fig. 17; [Explanation of main component symbols] 5 1 : Probe device 5 2 · Probe substrate 5 3 : Probe block 54 : Pressurizing mechanism 56 : Guide portion 57 : Probe block fixing screw 5 8 : Screw hole -19 - 200848750 5 9 = squeezing accommodating portion 6 1 : liquid crystal panel 6 2 : FPC flat plate 63 : wiring member 6 5 : convex portion 6 6 : fitting groove 67 : stopping portion 70 : base side substrate
71 ： FPC 72 : FPC基板 73 :薄膜型探針 74 :彈性體 75 =驅動用積體電路 77 :基板 7 8 :接觸元件 8 1 :加壓臂 8 2 :固定螺絲 8 3 :前端加壓部 85 :基端平板部 8 6 :斜板部 87 :前端推壓板部 8 9 :絞練嵌合部 9 1 L加壓平板 92 :彈性支持部 -20- 200848750 9 3 :彈性體 94 :輔助薄膜 9 6 :螺孔 97 :滑動銷 9 8 :彈簧 -21 -71 : FPC 72 : FPC board 73 : Film type probe 74 : Elastomer 75 = Driving integrated circuit 77 : Substrate 7 8 : Contact element 8 1 : Pressing arm 8 2 : Fixing screw 8 3 : Front end pressurizing part 85: base end flat plate portion 8 6 : swash plate portion 87 : front end pressing plate portion 8 9 : snagging fitting portion 9 1 L pressure flat plate 92 : elastic support portion -20 - 200848750 9 3 : elastic body 94 : auxiliary film 9 6 : Screw hole 97 : Slide pin 9 8 : Spring 21 -