TWI368035B - Probe device and inspection apparatus - Google Patents
Probe device and inspection apparatusInfo
- Publication number
- TWI368035B TWI368035B TW097110604A TW97110604A TWI368035B TW I368035 B TWI368035 B TW I368035B TW 097110604 A TW097110604 A TW 097110604A TW 97110604 A TW97110604 A TW 97110604A TW I368035 B TWI368035 B TW I368035B
- Authority
- TW
- Taiwan
- Prior art keywords
- inspection apparatus
- probe device
- probe
- inspection
- Prior art date
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007118128A JP2008275406A (en) | 2007-04-27 | 2007-04-27 | Probe device and inspection device |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200848750A TW200848750A (en) | 2008-12-16 |
TWI368035B true TWI368035B (en) | 2012-07-11 |
Family
ID=40053539
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW097110604A TWI368035B (en) | 2007-04-27 | 2008-03-25 | Probe device and inspection apparatus |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2008275406A (en) |
CN (1) | CN101294984B (en) |
TW (1) | TWI368035B (en) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101000418B1 (en) * | 2009-02-05 | 2010-12-13 | (주)유비프리시젼 | Blade type probe block |
JP2011149938A (en) * | 2010-01-22 | 2011-08-04 | Kodi-S Co Ltd | Film type probe unit, and method of manufacturing the same |
KR101152182B1 (en) * | 2010-05-04 | 2012-06-15 | 주식회사디아이 | Probe film used probe block and method for manufacturing thereof |
KR101152181B1 (en) * | 2010-05-06 | 2012-06-15 | 주식회사디아이 | Probe block for examining display panel and probe unit including thereor |
KR101177513B1 (en) * | 2010-11-26 | 2012-08-27 | 주식회사 코디에스 | Probe unit for testing chip on glass panel |
KR101177514B1 (en) * | 2010-11-26 | 2012-08-27 | 주식회사 코디에스 | Probe unit for testing chip on glass panel |
KR101177515B1 (en) * | 2010-11-26 | 2012-08-27 | 주식회사 코디에스 | Probe unit for testing chip on glass panel |
KR101177511B1 (en) * | 2010-11-26 | 2012-08-27 | 주식회사 코디에스 | Probe unit for testing chip on glass panel |
KR101177512B1 (en) * | 2010-11-26 | 2012-08-27 | 주식회사 코디에스 | Probe unit for testing chip on glass panel |
KR101177510B1 (en) * | 2010-11-26 | 2012-08-27 | 주식회사 코디에스 | Probe unit for testing chip on glass panel |
JP2013200256A (en) * | 2012-03-26 | 2013-10-03 | Micronics Japan Co Ltd | Probe device |
CN102692530A (en) * | 2012-06-26 | 2012-09-26 | 日月光半导体制造股份有限公司 | Probe structure and manufacturing method of diaphragm type probe |
CN104422800B (en) * | 2013-09-09 | 2017-11-21 | 宇德曼斯有限公司 | For testing the probe unit of the panel with micro- pitch arrays |
KR101541861B1 (en) * | 2014-04-04 | 2015-08-06 | (주)에이티테크놀러지 | Electric Inspection Apparatus for Conductive Film |
KR20160012764A (en) * | 2014-07-25 | 2016-02-03 | 주식회사 코디에스 | Device and method for testing display panel |
CN104464583B (en) * | 2014-12-09 | 2018-05-25 | 合肥鑫晟光电科技有限公司 | A kind of lighting detection device and method |
CN105527040A (en) * | 2016-01-25 | 2016-04-27 | 京东方科技集团股份有限公司 | Circuit detection device |
CN105842557A (en) * | 2016-03-21 | 2016-08-10 | 深圳市小智勇机器人有限公司 | Illumination tool having detection function |
CN106483690A (en) * | 2016-12-06 | 2017-03-08 | 无锡市创恒机械有限公司 | A kind of ITO presses screen device |
WO2020129135A1 (en) * | 2018-12-17 | 2020-06-25 | 株式会社東芝 | Probe pin inspection mechanism and inspection device |
CN111896782B (en) * | 2020-08-04 | 2021-10-26 | 河南大学 | Probe and measuring instrument for nondestructive measurement of thin film |
KR102458162B1 (en) * | 2020-09-16 | 2022-10-25 | 일본전산리드코리아 주식회사 | Jig for PCB inspection |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0797114B2 (en) * | 1993-07-30 | 1995-10-18 | 日本アビオニクス株式会社 | probe |
JPH1019991A (en) * | 1996-07-09 | 1998-01-23 | Yokowo Co Ltd | Test head for circuit board tester |
JP3365612B2 (en) * | 1998-01-30 | 2003-01-14 | 富士通株式会社 | Test equipment for electronic equipment |
JP3958875B2 (en) * | 1998-07-24 | 2007-08-15 | 株式会社日本マイクロニクス | Prober and probe needle contact method |
JP2003098189A (en) * | 2001-09-26 | 2003-04-03 | Micronics Japan Co Ltd | Probe sheet and probe device |
JP4634159B2 (en) * | 2004-02-13 | 2011-02-16 | 山一電機株式会社 | Probe unit |
CN1621848A (en) * | 2004-12-17 | 2005-06-01 | 胜华科技股份有限公司 | Contact type thin film probe |
-
2007
- 2007-04-27 JP JP2007118128A patent/JP2008275406A/en active Pending
-
2008
- 2008-03-25 TW TW097110604A patent/TWI368035B/en not_active IP Right Cessation
- 2008-04-24 CN CN200810093555XA patent/CN101294984B/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN101294984B (en) | 2011-07-20 |
TW200848750A (en) | 2008-12-16 |
CN101294984A (en) | 2008-10-29 |
JP2008275406A (en) | 2008-11-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |