TWI318784B - Clamping apparatus for use in glass substrate inspection - Google Patents

Clamping apparatus for use in glass substrate inspection

Info

Publication number
TWI318784B
TWI318784B TW092137454A TW92137454A TWI318784B TW I318784 B TWI318784 B TW I318784B TW 092137454 A TW092137454 A TW 092137454A TW 92137454 A TW92137454 A TW 92137454A TW I318784 B TWI318784 B TW I318784B
Authority
TW
Taiwan
Prior art keywords
glass substrate
clamping apparatus
substrate inspection
inspection
clamping
Prior art date
Application number
TW092137454A
Other languages
English (en)
Other versions
TW200520135A (en
Inventor
Chang Ha Lee
Taek Cheon Kim
Suk Joon Kim
Ki Nam Kim
Ji Hwa Jung
Jong Yeol Lee
Kyung Chae Bae
Original Assignee
Samsung Corning Prec Glass Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Corning Prec Glass Co filed Critical Samsung Corning Prec Glass Co
Publication of TW200520135A publication Critical patent/TW200520135A/zh
Application granted granted Critical
Publication of TWI318784B publication Critical patent/TWI318784B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Liquid Crystal (AREA)
  • Jigs For Machine Tools (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW092137454A 2003-12-09 2003-12-30 Clamping apparatus for use in glass substrate inspection TWI318784B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020030088936A KR100582345B1 (ko) 2003-12-09 2003-12-09 유리기판의 검사를 위한 클램핑장치

Publications (2)

Publication Number Publication Date
TW200520135A TW200520135A (en) 2005-06-16
TWI318784B true TWI318784B (en) 2009-12-21

Family

ID=34737865

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092137454A TWI318784B (en) 2003-12-09 2003-12-30 Clamping apparatus for use in glass substrate inspection

Country Status (4)

Country Link
JP (1) JP2005172783A (zh)
KR (1) KR100582345B1 (zh)
CN (1) CN1626466B (zh)
TW (1) TWI318784B (zh)

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KR101138727B1 (ko) * 2005-08-04 2012-04-24 엘아이지에이디피 주식회사 기판 클램핑 장치, 이송장치 및 그 검사장치
KR100846682B1 (ko) * 2006-12-11 2008-07-17 (주)테크윙 테스트핸들러용 하이픽스보드 클램핑장치
KR100824028B1 (ko) * 2007-03-28 2008-04-21 (주)오성엔지니어링 엘씨디용 포토마스크 그립퍼
JP4985447B2 (ja) * 2007-05-10 2012-07-25 株式会社Ｉｈｉ 基板搬送装置
JP4560578B1 (ja) * 2009-03-26 2010-10-13 シャープ株式会社 液晶パネル点灯検査装置
KR101045277B1 (ko) * 2009-07-07 2011-06-29 (주)테크윙 테스트 핸들러용 하이픽스보드 클램핑장치
CN102603199A (zh) * 2011-01-18 2012-07-25 坤辉科技实业股份有限公司 侧固式玻璃吊架
CN102674006A (zh) * 2011-03-14 2012-09-19 无锡康力电子有限公司 玻璃镀膜机用装片架
JP5899503B2 (ja) 2011-07-13 2016-04-06 パナソニックＩｐマネジメント株式会社 描画装置及び方法
KR20140069277A (ko) * 2011-09-27 2014-06-09 어플라이드 머티어리얼스, 인코포레이티드 얇은 유리 기판들을 위한 캐리어 및 그 이용
JP2013187389A (ja) * 2012-03-08 2013-09-19 Nippon Electric Glass Co Ltd ガラス基板の搬送装置及び搬送方法
JP6061182B2 (ja) * 2012-09-07 2017-01-18 大日本印刷株式会社 金属薄板の寸法測定装置及び金属薄板の寸法測定方法
JP6142486B2 (ja) * 2012-09-07 2017-06-07 大日本印刷株式会社 金属薄板の寸法測定装置及び金属薄板の寸法測定方法
JP2014080645A (ja) * 2012-10-15 2014-05-08 I Plant:Kk 基板保持装置
CN102963726B (zh) * 2012-11-30 2015-09-30 江西沃格光电股份有限公司 无痕活动式玻璃夹具
CN103901044A (zh) * 2012-12-28 2014-07-02 鸿富锦精密工业（深圳）有限公司 检测系统
CN103245672A (zh) * 2013-05-16 2013-08-14 西北工业大学 一种用于刀具磨损检测的夹具
JP2015034071A (ja) 2013-08-08 2015-02-19 日本電気硝子株式会社 シート部材搬送装置、シート部材支持装置、シート部材検査装置、およびシート部材搬送方法
CN104003152B (zh) * 2014-04-29 2016-03-30 雄华机械(苏州)有限公司 一种可调滚轮轨道宽窄的调整机构
CN104505352B (zh) * 2014-11-28 2017-07-14 苏州晟成光伏设备有限公司 高位el检查机对中机构
CN104608075B (zh) * 2015-02-11 2016-04-06 中国工程物理研究院激光聚变研究中心 大尺寸钕玻璃片透射波面误差检测夹具
KR102186362B1 (ko) * 2015-06-02 2020-12-04 삼성디스플레이 주식회사 기판 정렬 장치 및 기판 정렬 방법
CN105116569B (zh) * 2015-09-11 2018-07-31 昆山精讯电子技术有限公司 显示面板载台及显示面板检测装置
GB2544741B (en) * 2015-11-24 2017-12-06 Robert Shillabeer Timothy Clamp for holding a workpiece for machining
FR3049940B1 (fr) * 2016-04-06 2018-04-13 Saint- Gobain Glass France Dispositif de support pour feuille de verre notamment dans une installation de lavage
KR102319387B1 (ko) * 2016-05-26 2021-11-01 주식회사 아이에스시 보정 클램핑 유닛 및 이를 구비하는 테스트 핸들러용 클램핑 장치
CN108214416B (zh) * 2018-01-03 2021-01-26 京东方科技集团股份有限公司 显示面板检测用工作台
CN109031710B (zh) * 2018-03-27 2023-11-10 中山市正科电器实业有限公司 一种液晶显示器的检查装置
CN109799627B (zh) * 2018-12-26 2021-11-26 江苏宏芯亿泰智能装备有限公司 玻璃基板的宏观检查装置
CN110076454A (zh) * 2019-04-16 2019-08-02 徐州工业职业技术学院 一种多工位智能光纤激光焊接机械工作平台
CN110053957A (zh) * 2019-04-29 2019-07-26 东莞市鸿仁自动化设备科技有限公司 一种薄板的智能化堆叠系统及堆叠方法
CN111438645B (zh) * 2020-04-02 2022-02-22 深圳市华星光电半导体显示技术有限公司 显示面板治具
CN113511548A (zh) * 2020-04-09 2021-10-19 群翊工业股份有限公司 基板摊平装置及其摊平方法
CN112851136A (zh) * 2021-02-05 2021-05-28 安徽科技学院 一种光学玻璃镀膜用自动化夹具
KR102470535B1 (ko) * 2021-05-03 2022-11-28 주식회사 티케이씨 기판처리장비의 기판 파지용 지그장치
CN114102007B (zh) * 2021-10-29 2023-10-20 上海摩太展示用品设计制作有限公司 一种钣金焊接夹具
CN114656168B (zh) * 2022-04-06 2022-11-25 南京萃智激光应用技术研究院有限公司 一种玻璃加工用激光焊接设备

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3243044B2 (ja) * 1993-03-15 2002-01-07 株式会社日立製作所 基板処理用キャリア
JP4138926B2 (ja) * 1998-02-13 2008-08-27 株式会社アマダ 板材加工装置のワーククランプ装置
KR100764313B1 (ko) * 2000-04-26 2007-10-05 올림푸스 가부시키가이샤 홀더기구
JP2002014309A (ja) * 2000-06-30 2002-01-18 Minolta Co Ltd フィルムホルダ、フィルム収容治具及びこれらを用いた液晶表示素子の製造方法
JP2003029657A (ja) * 2001-07-19 2003-01-31 Minolta Co Ltd 表示素子の製造方法及びフィルム基板保持具
JP2003270155A (ja) * 2002-03-15 2003-09-25 Olympus Optical Co Ltd 基板保持装置及び検査装置
JP2003302346A (ja) * 2002-04-12 2003-10-24 Hitachi Electronics Eng Co Ltd 薄板ワークの表面検査装置

Also Published As

Publication number Publication date
CN1626466B (zh) 2010-05-12
TW200520135A (en) 2005-06-16
JP2005172783A (ja) 2005-06-30
CN1626466A (zh) 2005-06-15
KR20050055884A (ko) 2005-06-14
KR100582345B1 (ko) 2006-05-22

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