CN109799627B - 玻璃基板的宏观检查装置 - Google Patents
玻璃基板的宏观检查装置 Download PDFInfo
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CN109799627B true CN109799627B (zh) | 2021-11-26 |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1567039A (zh) * | 2003-06-11 | 2005-01-19 | 友达光电股份有限公司 | 基板承载装置 |
CN1626466A (zh) * | 2003-12-09 | 2005-06-15 | 三星康宁精密琉璃株式会社 | 检查玻璃基板用的夹持装置 |
JP2006220495A (ja) * | 2005-02-09 | 2006-08-24 | Olympus Corp | 基板検査装置 |
CN101112939A (zh) * | 2006-07-26 | 2008-01-30 | 富士迈半导体精密工业(上海)有限公司 | 基板承载装置 |
CN205210448U (zh) * | 2015-11-09 | 2016-05-04 | 张笑多 | 一种宏观检查机定位装置 |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1567039A (zh) * | 2003-06-11 | 2005-01-19 | 友达光电股份有限公司 | 基板承载装置 |
CN1626466A (zh) * | 2003-12-09 | 2005-06-15 | 三星康宁精密琉璃株式会社 | 检查玻璃基板用的夹持装置 |
JP2006220495A (ja) * | 2005-02-09 | 2006-08-24 | Olympus Corp | 基板検査装置 |
CN101112939A (zh) * | 2006-07-26 | 2008-01-30 | 富士迈半导体精密工业(上海)有限公司 | 基板承载装置 |
CN205210448U (zh) * | 2015-11-09 | 2016-05-04 | 张笑多 | 一种宏观检查机定位装置 |
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Address after: No. 223800, Suhu Economic Development Zone, Jiangsu Province Applicant after: Jiangsu Hongxin Yitai Intelligent Equipment Co.,Ltd. Applicant after: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. Address before: 223800 178 JinJiHu Road, Suqian Economic Development Zone, Jiangsu Province Applicant before: JIANGSU DONGXU YITAI INTELLIGENT EQUIPMENT Co.,Ltd. Applicant before: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20201222 Address after: No. 223800, Suhu Economic Development Zone, Jiangsu Province Applicant after: Jiangsu Hongxin Yitai Intelligent Equipment Co.,Ltd. Address before: No. 223800, Suhu Economic Development Zone, Jiangsu Province Applicant before: Jiangsu Hongxin Yitai Intelligent Equipment Co.,Ltd. Applicant before: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. |
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