TW200520135A - Clamping apparatus for use in glass substrate inspection - Google Patents

Clamping apparatus for use in glass substrate inspection

Info

Publication number
TW200520135A
TW200520135A TW092137454A TW92137454A TW200520135A TW 200520135 A TW200520135 A TW 200520135A TW 092137454 A TW092137454 A TW 092137454A TW 92137454 A TW92137454 A TW 92137454A TW 200520135 A TW200520135 A TW 200520135A
Authority
TW
Taiwan
Prior art keywords
substrate
clamping device
clamping apparatus
glass substrate
gripping
Prior art date
Application number
TW092137454A
Other languages
Chinese (zh)
Other versions
TWI318784B (en
Inventor
Chang-Ha Lee
Taek-Cheon Kim
Suk-Joon Kim
Ki-Nam Kim
Ji-Hwa Jung
Jong Yeol Lee
Kyung Chae Bae
Original Assignee
Samsung Corning Prec Glass Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Corning Prec Glass Co filed Critical Samsung Corning Prec Glass Co
Publication of TW200520135A publication Critical patent/TW200520135A/en
Application granted granted Critical
Publication of TWI318784B publication Critical patent/TWI318784B/en

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Liquid Crystal (AREA)
  • Jigs For Machine Tools (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The present invention relates to a clamping apparatus for inspection of a glass substrate and provides a clamping apparatus including: a fixing frame disposed in an inspection zone; an upper clamping device for gripping an upper edge portion of the substrate, the upper clamping device having a first upper clamp fixed to an upper portion of the fixing frame and a second upper clamp slidably connected to the upper portion; a lower clamping device for gripping a lower edge portion of the substrate and stretching the substrate downward, the lower clamping device having a first lower clamp fixed to a lower portion of the fixing frame and a second lower clamp slidably connected to the upper portion; and a side clamping device for gripping both side edge portions of the substrate and stretching the substrate sidewards.
TW092137454A 2003-12-09 2003-12-30 Clamping apparatus for use in glass substrate inspection TWI318784B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020030088936A KR100582345B1 (en) 2003-12-09 2003-12-09 Apparatus for clamping a glass substrate for inspection

Publications (2)

Publication Number Publication Date
TW200520135A true TW200520135A (en) 2005-06-16
TWI318784B TWI318784B (en) 2009-12-21

Family

ID=34737865

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092137454A TWI318784B (en) 2003-12-09 2003-12-30 Clamping apparatus for use in glass substrate inspection

Country Status (4)

Country Link
JP (1) JP2005172783A (en)
KR (1) KR100582345B1 (en)
CN (1) CN1626466B (en)
TW (1) TWI318784B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI575114B (en) * 2012-10-15 2017-03-21 I Plant Co Ltd Substrate holding device

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Publication number Priority date Publication date Assignee Title
KR101138727B1 (en) * 2005-08-04 2012-04-24 엘아이지에이디피 주식회사 Panel display clamping apparatus and transfering and inspecting apparatuses having the same
KR100846682B1 (en) * 2006-12-11 2008-07-17 (주)테크윙 Hifix board clamping apparatus for test handler
KR100824028B1 (en) * 2007-03-28 2008-04-21 (주)오성엔지니어링 Gripper for phtomask for liquid crystal display
JP4985447B2 (en) * 2007-05-10 2012-07-25 株式会社Ihi Substrate transfer device
JP4560578B1 (en) * 2009-03-26 2010-10-13 シャープ株式会社 LCD panel lighting inspection device
KR101045277B1 (en) * 2009-07-07 2011-06-29 (주)테크윙 Hifix board clamping apparatus for test handler
CN102603199A (en) * 2011-01-18 2012-07-25 坤辉科技实业股份有限公司 Laterally fixed glass hanger frame
CN102674006A (en) * 2011-03-14 2012-09-19 无锡康力电子有限公司 Sheet loading frame for glass coating machine
CN103098118B (en) 2011-07-13 2015-11-25 松下电器产业株式会社 Drawing apparatus and method
EP2761051B1 (en) * 2011-09-27 2018-11-07 Applied Materials, Inc. Carrier for thin glass substrates and use thereof
JP2013187389A (en) * 2012-03-08 2013-09-19 Nippon Electric Glass Co Ltd Conveyance device and conveyance method of glass substrate
JP6142486B2 (en) * 2012-09-07 2017-06-07 大日本印刷株式会社 Metal thin plate dimension measuring apparatus and metal thin plate dimension measuring method
JP6061182B2 (en) * 2012-09-07 2017-01-18 大日本印刷株式会社 Metal thin plate dimension measuring apparatus and metal thin plate dimension measuring method
CN102963726B (en) * 2012-11-30 2015-09-30 江西沃格光电股份有限公司 Seamless movable glass fixture
CN103901044A (en) * 2012-12-28 2014-07-02 鸿富锦精密工业(深圳)有限公司 Detection system
CN103245672A (en) * 2013-05-16 2013-08-14 西北工业大学 Fixture for detecting tool wear
JP2015034071A (en) * 2013-08-08 2015-02-19 日本電気硝子株式会社 Sheet member conveyance device, sheet member support device, sheet member inspection device, and sheet member conveying method
CN104003152B (en) * 2014-04-29 2016-03-30 雄华机械(苏州)有限公司 A kind of adjusting mechanism of adjustable rolling wheel track width
CN104505352B (en) * 2014-11-28 2017-07-14 苏州晟成光伏设备有限公司 High-order EL check machines centering body
CN104608075B (en) * 2015-02-11 2016-04-06 中国工程物理研究院激光聚变研究中心 Large scale neodymium glass transmitted wave surface error detects fixture
KR102186362B1 (en) * 2015-06-02 2020-12-04 삼성디스플레이 주식회사 Apparatus of alligning substrate and method of allining substrate
CN105116569B (en) * 2015-09-11 2018-07-31 昆山精讯电子技术有限公司 Display panel microscope carrier and display panel testing
GB2544741B (en) * 2015-11-24 2017-12-06 Robert Shillabeer Timothy Clamp for holding a workpiece for machining
FR3049940B1 (en) * 2016-04-06 2018-04-13 Saint- Gobain Glass France SUPPORT DEVICE FOR GLASS SHEET IN PARTICULAR IN A WASHING PLANT
KR102319387B1 (en) * 2016-05-26 2021-11-01 주식회사 아이에스시 Correcting clamping unit and apparatus of clamping hifix board for test handler having the same
CN108214416B (en) * 2018-01-03 2021-01-26 京东方科技集团股份有限公司 Workbench for detecting display panel
CN109031710B (en) * 2018-03-27 2023-11-10 中山市正科电器实业有限公司 Inspection device of liquid crystal display
CN109799627B (en) * 2018-12-26 2021-11-26 江苏宏芯亿泰智能装备有限公司 Macroscopic inspection device for glass substrate
CN110076454A (en) * 2019-04-16 2019-08-02 徐州工业职业技术学院 A kind of multistation Intelligent optical fiber laser welding machinery workbench
CN110053957A (en) * 2019-04-29 2019-07-26 东莞市鸿仁自动化设备科技有限公司 A kind of intelligent stacking system and stacking method of thin plate
CN111438645B (en) * 2020-04-02 2022-02-22 深圳市华星光电半导体显示技术有限公司 Display panel jig
CN113511548A (en) * 2020-04-09 2021-10-19 群翊工业股份有限公司 Substrate flattening device and flattening method thereof
CN112851136A (en) * 2021-02-05 2021-05-28 安徽科技学院 Automatic clamp for coating optical glass
KR102470535B1 (en) * 2021-05-03 2022-11-28 주식회사 티케이씨 Jig Apparatus For Holding Plate Of Plate Processing System
CN114102007B (en) * 2021-10-29 2023-10-20 上海摩太展示用品设计制作有限公司 Metal plate welding fixture
CN114656168B (en) * 2022-04-06 2022-11-25 南京萃智激光应用技术研究院有限公司 Laser welding equipment for glass processing

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3243044B2 (en) * 1993-03-15 2002-01-07 株式会社日立製作所 Substrate processing carrier
JP4138926B2 (en) * 1998-02-13 2008-08-27 株式会社アマダ Work clamp device for plate processing equipment
JP4803940B2 (en) * 2000-04-26 2011-10-26 オリンパス株式会社 Holder mechanism
JP2002014309A (en) * 2000-06-30 2002-01-18 Minolta Co Ltd Film holder, film housing jig and method for manufacturing liquid crystal display element using those
JP2003029657A (en) * 2001-07-19 2003-01-31 Minolta Co Ltd Production method for display element and film substrate holder
JP2003270155A (en) * 2002-03-15 2003-09-25 Olympus Optical Co Ltd Substrate holding device and inspection device
JP2003302346A (en) * 2002-04-12 2003-10-24 Hitachi Electronics Eng Co Ltd Surface inspection device for sheet work

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI575114B (en) * 2012-10-15 2017-03-21 I Plant Co Ltd Substrate holding device

Also Published As

Publication number Publication date
KR100582345B1 (en) 2006-05-22
TWI318784B (en) 2009-12-21
CN1626466B (en) 2010-05-12
KR20050055884A (en) 2005-06-14
JP2005172783A (en) 2005-06-30
CN1626466A (en) 2005-06-15

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