TWI304122B - - Google Patents

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Publication number
TWI304122B
TWI304122B TW095124855A TW95124855A TWI304122B TW I304122 B TWI304122 B TW I304122B TW 095124855 A TW095124855 A TW 095124855A TW 95124855 A TW95124855 A TW 95124855A TW I304122 B TWI304122 B TW I304122B
Authority
TW
Taiwan
Prior art keywords
temperature
steam
fluid
vapor
heating
Prior art date
Application number
TW095124855A
Other languages
English (en)
Chinese (zh)
Other versions
TW200714843A (en
Inventor
Yuji Kamikawa
Kazuhiko Kobayashi
Nobutaka Kuroda
Mikio Nakashima
Osamu Tsuda
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2005199898A external-priority patent/JP2007017097A/ja
Priority claimed from JP2005231828A external-priority patent/JP4662352B2/ja
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW200714843A publication Critical patent/TW200714843A/zh
Application granted granted Critical
Publication of TWI304122B publication Critical patent/TWI304122B/zh

Links

Classifications

    • H10P52/00—
    • H10P72/0414—
    • H10P72/0404—
    • H10P72/0406—
    • H10P72/0408—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Drying Of Solid Materials (AREA)
TW095124855A 2005-07-08 2006-07-07 A vapor drying method and an apparatus TW200714843A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005199898A JP2007017097A (ja) 2005-07-08 2005-07-08 蒸気発生方法、その装置及び蒸気処理装置並びに蒸気発生用記録媒体
JP2005231828A JP4662352B2 (ja) 2005-08-10 2005-08-10 蒸気乾燥方法及びその装置並びにその記録媒体

Publications (2)

Publication Number Publication Date
TW200714843A TW200714843A (en) 2007-04-16
TWI304122B true TWI304122B (enExample) 2008-12-11

Family

ID=37102407

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095124855A TW200714843A (en) 2005-07-08 2006-07-07 A vapor drying method and an apparatus

Country Status (5)

Country Link
US (1) US7637029B2 (enExample)
EP (1) EP1742248B1 (enExample)
KR (1) KR101111008B1 (enExample)
DE (1) DE602006005992D1 (enExample)
TW (1) TW200714843A (enExample)

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Also Published As

Publication number Publication date
KR20070006602A (ko) 2007-01-11
EP1742248B1 (en) 2009-04-01
EP1742248A3 (en) 2007-03-21
EP1742248A2 (en) 2007-01-10
US20070006483A1 (en) 2007-01-11
TW200714843A (en) 2007-04-16
DE602006005992D1 (de) 2009-05-14
US7637029B2 (en) 2009-12-29
KR101111008B1 (ko) 2012-04-06

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