TWI282993B - Method and apparatus for cooling magnetic circuit elements - Google Patents

Method and apparatus for cooling magnetic circuit elements Download PDF

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Publication number
TWI282993B
TWI282993B TW093116671A TW93116671A TWI282993B TW I282993 B TWI282993 B TW I282993B TW 093116671 A TW093116671 A TW 093116671A TW 93116671 A TW93116671 A TW 93116671A TW I282993 B TWI282993 B TW I282993B
Authority
TW
Taiwan
Prior art keywords
housing
coolant
core support
core
coolant flow
Prior art date
Application number
TW093116671A
Other languages
English (en)
Chinese (zh)
Other versions
TW200509153A (en
Inventor
Richard M Ness
William N Partlo
Paul C Melcher
George X Ferguson
Robert B Saethre
Original Assignee
Cymer Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cymer Inc filed Critical Cymer Inc
Publication of TW200509153A publication Critical patent/TW200509153A/zh
Application granted granted Critical
Publication of TWI282993B publication Critical patent/TWI282993B/zh

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/24Magnetic cores
    • H01F27/26Fastening parts of the core together; Fastening or mounting the core on casing or support
    • H01F27/266Fastening or mounting the core on casing or support
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/08Cooling; Ventilating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/08Cooling; Ventilating
    • H01F27/10Liquid cooling
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F3/00Cores, Yokes, or armatures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/097Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/02Casings
    • H01F27/025Constructional details relating to cooling

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Dc-Dc Converters (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Transformer Cooling (AREA)
TW093116671A 2003-06-25 2004-06-10 Method and apparatus for cooling magnetic circuit elements TWI282993B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/607,407 US7002443B2 (en) 2003-06-25 2003-06-25 Method and apparatus for cooling magnetic circuit elements

Publications (2)

Publication Number Publication Date
TW200509153A TW200509153A (en) 2005-03-01
TWI282993B true TWI282993B (en) 2007-06-21

Family

ID=33540258

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093116671A TWI282993B (en) 2003-06-25 2004-06-10 Method and apparatus for cooling magnetic circuit elements

Country Status (7)

Country Link
US (1) US7002443B2 (enExample)
EP (1) EP1644945A4 (enExample)
JP (2) JP2007524226A (enExample)
KR (1) KR101151260B1 (enExample)
CN (1) CN1809903B (enExample)
TW (1) TWI282993B (enExample)
WO (1) WO2005001853A2 (enExample)

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US11056854B2 (en) 2018-08-14 2021-07-06 Leonardo Electronics Us Inc. Laser assembly and related methods
US11348717B2 (en) 2018-10-31 2022-05-31 Hamilton Sundstrand Corporation Thermal management of high power inductors
US11296481B2 (en) 2019-01-09 2022-04-05 Leonardo Electronics Us Inc. Divergence reshaping array
TWI749546B (zh) 2019-05-14 2021-12-11 美商希瑪有限責任公司 用於調變光源波長的裝置及方法
JP7382424B2 (ja) 2019-05-22 2023-11-16 サイマー リミテッド ライアビリティ カンパニー 複数の深紫外光発振器のための制御システム
KR102562520B1 (ko) 2019-05-22 2023-08-01 사이머 엘엘씨 다수의 레이저 빔을 생성하는 장치 및 방법
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Also Published As

Publication number Publication date
US7002443B2 (en) 2006-02-21
JP2007524226A (ja) 2007-08-23
CN1809903B (zh) 2010-06-16
KR20060035635A (ko) 2006-04-26
JP5606987B2 (ja) 2014-10-15
JP2011142354A (ja) 2011-07-21
EP1644945A4 (en) 2012-06-13
CN1809903A (zh) 2006-07-26
EP1644945A2 (en) 2006-04-12
US20040264521A1 (en) 2004-12-30
TW200509153A (en) 2005-03-01
KR101151260B1 (ko) 2012-06-14
WO2005001853A3 (en) 2005-11-24
WO2005001853A2 (en) 2005-01-06

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