CN1809903B - 用于冷却磁路元件的方法和装置 - Google Patents

用于冷却磁路元件的方法和装置 Download PDF

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Publication number
CN1809903B
CN1809903B CN2004800174332A CN200480017433A CN1809903B CN 1809903 B CN1809903 B CN 1809903B CN 2004800174332 A CN2004800174332 A CN 2004800174332A CN 200480017433 A CN200480017433 A CN 200480017433A CN 1809903 B CN1809903 B CN 1809903B
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CN
China
Prior art keywords
core support
support member
coolant
coolant flow
core
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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CN2004800174332A
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English (en)
Chinese (zh)
Other versions
CN1809903A (zh
Inventor
R·M·奈斯
W·N·帕特洛
P·C·梅尔切
G·X·菲尔古森
R·B·萨特瑞
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Cymer LLC
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Cymer Inc
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Publication of CN1809903A publication Critical patent/CN1809903A/zh
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/24Magnetic cores
    • H01F27/26Fastening parts of the core together; Fastening or mounting the core on casing or support
    • H01F27/266Fastening or mounting the core on casing or support
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/08Cooling; Ventilating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/08Cooling; Ventilating
    • H01F27/10Liquid cooling
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F3/00Cores, Yokes, or armatures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/097Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/02Casings
    • H01F27/025Constructional details relating to cooling

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Dc-Dc Converters (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Transformer Cooling (AREA)
CN2004800174332A 2003-06-25 2004-06-14 用于冷却磁路元件的方法和装置 Expired - Lifetime CN1809903B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/607,407 2003-06-25
US10/607,407 US7002443B2 (en) 2003-06-25 2003-06-25 Method and apparatus for cooling magnetic circuit elements
PCT/US2004/018941 WO2005001853A2 (en) 2003-06-25 2004-06-14 Method and apparatus for cooling magnetic circuit elements

Publications (2)

Publication Number Publication Date
CN1809903A CN1809903A (zh) 2006-07-26
CN1809903B true CN1809903B (zh) 2010-06-16

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN2004800174332A Expired - Lifetime CN1809903B (zh) 2003-06-25 2004-06-14 用于冷却磁路元件的方法和装置

Country Status (7)

Country Link
US (1) US7002443B2 (enExample)
EP (1) EP1644945A4 (enExample)
JP (2) JP2007524226A (enExample)
KR (1) KR101151260B1 (enExample)
CN (1) CN1809903B (enExample)
TW (1) TWI282993B (enExample)
WO (1) WO2005001853A2 (enExample)

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US11296481B2 (en) 2019-01-09 2022-04-05 Leonardo Electronics Us Inc. Divergence reshaping array
TWI749546B (zh) 2019-05-14 2021-12-11 美商希瑪有限責任公司 用於調變光源波長的裝置及方法
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Also Published As

Publication number Publication date
US7002443B2 (en) 2006-02-21
JP2007524226A (ja) 2007-08-23
KR20060035635A (ko) 2006-04-26
JP5606987B2 (ja) 2014-10-15
JP2011142354A (ja) 2011-07-21
EP1644945A4 (en) 2012-06-13
CN1809903A (zh) 2006-07-26
TWI282993B (en) 2007-06-21
EP1644945A2 (en) 2006-04-12
US20040264521A1 (en) 2004-12-30
TW200509153A (en) 2005-03-01
KR101151260B1 (ko) 2012-06-14
WO2005001853A3 (en) 2005-11-24
WO2005001853A2 (en) 2005-01-06

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Owner name: CYMER INC.

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Effective date: 20141219

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