TWI281746B - Liquid crystal display and method of manufacturing the same - Google Patents
Liquid crystal display and method of manufacturing the same Download PDFInfo
- Publication number
- TWI281746B TWI281746B TW094124932A TW94124932A TWI281746B TW I281746 B TWI281746 B TW I281746B TW 094124932 A TW094124932 A TW 094124932A TW 94124932 A TW94124932 A TW 94124932A TW I281746 B TWI281746 B TW I281746B
- Authority
- TW
- Taiwan
- Prior art keywords
- film
- wiring
- substrate
- forming
- terminal
- Prior art date
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 39
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 239000010408 film Substances 0.000 claims abstract description 207
- 239000000758 substrate Substances 0.000 claims abstract description 46
- 239000011347 resin Substances 0.000 claims abstract description 37
- 229920005989 resin Polymers 0.000 claims abstract description 37
- 239000004065 semiconductor Substances 0.000 claims abstract description 10
- 239000010409 thin film Substances 0.000 claims abstract description 10
- 239000010410 layer Substances 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 24
- 230000001681 protective effect Effects 0.000 claims description 18
- 239000011229 interlayer Substances 0.000 claims description 14
- 229910052736 halogen Inorganic materials 0.000 claims description 10
- 150000002367 halogens Chemical class 0.000 claims description 10
- 229910052732 germanium Inorganic materials 0.000 claims description 6
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims 2
- 206010011224 Cough Diseases 0.000 claims 1
- 239000002019 doping agent Substances 0.000 claims 1
- 239000007943 implant Substances 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000010422 painting Methods 0.000 claims 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 23
- 229910052804 chromium Inorganic materials 0.000 description 19
- 239000011651 chromium Substances 0.000 description 19
- 229910052782 aluminium Inorganic materials 0.000 description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 11
- 238000001459 lithography Methods 0.000 description 8
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 6
- 238000005260 corrosion Methods 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- 229910052707 ruthenium Inorganic materials 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 208000027418 Wounds and injury Diseases 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 150000001844 chromium Chemical class 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 208000014674 injury Diseases 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 206010036790 Productive cough Diseases 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000006722 reduction reaction Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 210000003802 sputum Anatomy 0.000 description 1
- 208000024794 sputum Diseases 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
- G02F1/13454—Drivers integrated on the active matrix substrate
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/441—Interconnections, e.g. scanning lines
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
- G02F1/13452—Conductors connecting driver circuitry and terminals of panels
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
- G02F1/136295—Materials; Compositions; Manufacture processes
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Thin Film Transistor (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004230824A JP2006047827A (ja) | 2004-08-06 | 2004-08-06 | 液晶表示装置およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200614499A TW200614499A (en) | 2006-05-01 |
| TWI281746B true TWI281746B (en) | 2007-05-21 |
Family
ID=35757040
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW094124932A TWI281746B (en) | 2004-08-06 | 2005-07-22 | Liquid crystal display and method of manufacturing the same |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US7304711B2 (enExample) |
| JP (1) | JP2006047827A (enExample) |
| KR (1) | KR100670213B1 (enExample) |
| TW (1) | TWI281746B (enExample) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100730151B1 (ko) * | 2005-09-30 | 2007-06-19 | 삼성에스디아이 주식회사 | 평판 표시 장치 |
| JP4952425B2 (ja) * | 2006-08-21 | 2012-06-13 | ソニー株式会社 | 液晶装置および電子機器 |
| KR20080019398A (ko) | 2006-08-28 | 2008-03-04 | 삼성전자주식회사 | 박막 트랜지스터 표시판 및 그 제조 방법 |
| KR101252004B1 (ko) | 2007-01-25 | 2013-04-08 | 삼성디스플레이 주식회사 | 박막 트랜지스터 표시판 및 그 제조 방법 |
| JP2009103732A (ja) * | 2007-10-19 | 2009-05-14 | Sony Corp | 表示装置およびその製造方法 |
| JP5234521B2 (ja) * | 2009-08-21 | 2013-07-10 | Ｔｄｋ株式会社 | 電子部品及びその製造方法 |
| KR101784994B1 (ko) * | 2011-03-31 | 2017-10-13 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 그 제조 방법 |
| JP2014145857A (ja) * | 2013-01-28 | 2014-08-14 | Sony Corp | 表示装置およびその製造方法、並びに電子機器 |
| JP6041984B2 (ja) * | 2013-04-25 | 2016-12-14 | シャープ株式会社 | 半導体装置および半導体装置の製造方法 |
| JP6324098B2 (ja) * | 2014-02-06 | 2018-05-16 | 株式会社ジャパンディスプレイ | 表示装置及びその製造方法 |
| CN104022233B (zh) * | 2014-05-28 | 2016-01-06 | 京东方科技集团股份有限公司 | 一种有机发光显示面板的封装方法和有机发光显示面板 |
| KR102540372B1 (ko) | 2015-05-28 | 2023-06-05 | 엘지디스플레이 주식회사 | 유기 발광 표시 장치 및 그 제조 방법 |
| KR102387880B1 (ko) * | 2015-07-03 | 2022-04-18 | 엘지디스플레이 주식회사 | 디스플레이 장치 |
| KR101951939B1 (ko) * | 2016-08-26 | 2019-02-25 | 엘지디스플레이 주식회사 | 표시장치 |
| JP6983547B2 (ja) * | 2017-06-22 | 2021-12-17 | 三菱電機株式会社 | 画像表示装置 |
| CN109273483B (zh) | 2017-07-17 | 2021-04-02 | 京东方科技集团股份有限公司 | 显示基板及其制备方法和显示装置 |
| CN108154812B (zh) * | 2017-12-26 | 2019-09-10 | Oppo广东移动通信有限公司 | 显示面板及移动终端 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0614159B2 (ja) | 1984-11-30 | 1994-02-23 | 株式会社日立製作所 | 液 晶 表 示 装 置 |
| US5187604A (en) * | 1989-01-18 | 1993-02-16 | Hitachi, Ltd. | Multi-layer external terminals of liquid crystal displays with thin-film transistors |
| JP2780673B2 (ja) * | 1995-06-13 | 1998-07-30 | 日本電気株式会社 | アクティブマトリクス型液晶表示装置およびその製造方法 |
| JPH10133216A (ja) * | 1996-11-01 | 1998-05-22 | Hitachi Ltd | アクティブマトリクス型液晶表示装置 |
| JP3119228B2 (ja) * | 1998-01-20 | 2000-12-18 | 日本電気株式会社 | 液晶表示パネル及びその製造方法 |
| JP3748158B2 (ja) * | 1998-01-29 | 2006-02-22 | シャープ株式会社 | 液晶表示装置およびその製造方法 |
| JP3975014B2 (ja) | 1998-11-20 | 2007-09-12 | 株式会社アドバンスト・ディスプレイ | 液晶表示装置の製造方法 |
| JP3517363B2 (ja) * | 1998-11-27 | 2004-04-12 | シャープ株式会社 | 液晶表示装置の製造方法 |
| JP2000275666A (ja) * | 1999-03-25 | 2000-10-06 | Hitachi Ltd | 液晶表示装置 |
| JP4627843B2 (ja) | 1999-07-22 | 2011-02-09 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| JP2001343659A (ja) * | 2000-06-02 | 2001-12-14 | Casio Comput Co Ltd | アクティブマトリクス型液晶表示パネルおよびその製造方法 |
| JP2002196363A (ja) * | 2000-12-26 | 2002-07-12 | Nec Corp | 液晶表示装置及びその製造方法 |
| KR100715943B1 (ko) * | 2001-01-29 | 2007-05-08 | 삼성전자주식회사 | 액정표시장치 및 그 제조방법 |
| KR100796756B1 (ko) * | 2001-11-12 | 2008-01-22 | 삼성전자주식회사 | 반도체 소자의 접촉부 및 그 제조 방법과 이를 포함하는표시 장치용 박막 트랜지스터 어레이 기판 및 그 제조 방법 |
| JP4488688B2 (ja) * | 2002-03-27 | 2010-06-23 | 東芝モバイルディスプレイ株式会社 | 表示装置用配線基板及びその製造方法 |
| TW554397B (en) * | 2002-07-24 | 2003-09-21 | Au Optronics Corp | Method to prevent damaging chip-on-glass pad during rework |
| JP4036154B2 (ja) * | 2002-09-12 | 2008-01-23 | セイコーエプソン株式会社 | 配線構造の製造方法、電気光学装置の製造方法、電気光学装置および電子機器 |
| JP4525011B2 (ja) * | 2002-09-12 | 2010-08-18 | セイコーエプソン株式会社 | 電気光学装置の製造方法 |
-
2004
- 2004-08-06 JP JP2004230824A patent/JP2006047827A/ja active Pending
-
2005
- 2005-07-20 KR KR1020050065664A patent/KR100670213B1/ko not_active Expired - Fee Related
- 2005-07-22 US US11/187,238 patent/US7304711B2/en not_active Expired - Fee Related
- 2005-07-22 TW TW094124932A patent/TWI281746B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| US20060028606A1 (en) | 2006-02-09 |
| TW200614499A (en) | 2006-05-01 |
| US7304711B2 (en) | 2007-12-04 |
| KR100670213B1 (ko) | 2007-01-16 |
| KR20060053923A (ko) | 2006-05-22 |
| JP2006047827A (ja) | 2006-02-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |