WO2014174902A1 - 半導体装置および半導体装置の製造方法 - Google Patents
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Abstract
Description
本発明の実施形態による半導体装置は、基板と、基板に支持された、複数の第1配線を含む第1メタル層と、第1メタル層上に形成された絶縁層と、絶縁層上に形成された、複数の第2配線を含む第2メタル層と、複数の第2配線のそれぞれの一部分を覆う絶縁性保護層と、絶縁性保護層上に形成された導電層とを備える。絶縁性保護層は、基板上に、絶縁性保護層が形成された第1領域と、絶縁性保護層が形成されていない第2領域とを規定する。第1領域と第2領域との間の境界を含む断面において、絶縁層の絶縁性保護層側の表面は、互いに隣接する2つの第2配線の間に段差を有する。第1領域と第2領域との間の境界を含む断面において、絶縁層の絶縁性保護層側の表面が、互いに隣接する2つの第2配線の間に段差を有するので、互いに隣接する2つの第2配線の間におけるリーク経路の形成が抑制される。なお、本明細書において、「メタル層」は、導電性を有する層を意味し、金属で形成されている層に限られず、例えば金属窒化物や金属酸化物で形成されている層を含み、また、単一の層に限定されず、複数の層が積層されたものであってもよい。以下では、半導体装置として、液晶表示装置に用いられるTFT基板を例示する。
次に、図4~図8を参照して、本発明の実施形態による半導体装置の製造方法を説明する。ここでは、基板上にトップゲート型のTFTが形成されたTFT基板の製造方法を例示する。基板上にボトムゲート型のTFTが形成されたTFT基板の製造方法の例については後述する。
10 第1メタル層
12 第1配線
14 島状部
20 第2メタル層
22 第2配線
30 基板
50 半導体層
70 絶縁層
80 絶縁性保護層
90 導電層
310 駆動回路
Claims (12)
- 基板と、
前記基板に支持された、複数の第1配線を含む第1メタル層と、
前記第1メタル層上に形成された絶縁層と、
前記絶縁層上に形成された、複数の第2配線を含む第2メタル層と、
前記複数の第2配線のそれぞれの一部分を覆う絶縁性保護層であって、前記基板上に、前記絶縁性保護層が形成された第1領域と、前記絶縁性保護層が形成されていない第2領域とを規定する絶縁性保護層と、
前記絶縁性保護層上に形成された導電層と
を備え、
前記第1領域と前記第2領域との間の境界を含む断面において、前記絶縁層の前記絶縁性保護層側の表面は、互いに隣接する2つの第2配線の間に段差を有する、半導体装置。 - 前記表面は、前記絶縁性保護層側に向けて突出する部分を含む、請求項1に記載の半導体装置。
- 前記突出する部分は、前記2つの第2配線のうちの少なくとも一方に重なる位置に形成されている、請求項2に記載の半導体装置。
- 前記2つの第2配線の間にある段差の数は、1である、請求項1から3のいずれかに記載の半導体装置。
- 前記突出する部分は、前記2つの第2配線の間に形成されている、請求項2に記載の半導体装置。
- 前記第1メタル層は、前記第1領域と前記第2領域とに跨がる島状部を含み、
前記段差は、前記断面における前記島状部の輪郭が反映された形状を有する、請求項1から5のいずれかに記載の半導体装置。 - 前記基板に支持された複数のスイッチング素子をさらに備え、
前記複数のスイッチング素子のそれぞれは、第1コンタクト領域、第2コンタクト領域および前記第1コンタクト領域と前記第2コンタクト領域との間に配置されたチャネル領域を含む半導体層を有し、
前記複数の第1配線のそれぞれは、前記複数のスイッチング素子のうち、対応するスイッチング素子の前記チャネル領域と重なるように配置されており、
前記島状部は、前記複数の第1配線のうち、対応する第1配線に電気的に接続されている、請求項6に記載の半導体装置。 - 前記第2領域に配置された駆動回路をさらに備え、
前記複数の第2配線は、前記駆動回路と直接に接続された第2配線を含む、請求項1から7のいずれかに記載の半導体装置。 - 前記絶縁性保護層は、有機絶縁性材料から構成された層である、請求項1から8のいずれかに記載の半導体装置。
- 複数の島状部および複数の第1配線を含む第1メタル層を基板上に形成する工程(a)と、
前記第1メタル層を覆う絶縁層を形成する工程(b)と、
複数の第2配線を含む第2メタル層を前記絶縁層上に形成する工程(c)と、
絶縁性材料を前記絶縁層上および前記第2メタル層上に付与する工程(d)と、
前記絶縁性材料を硬化させた後にパターニングすることによって、前記複数の第2配線のそれぞれにおける一部分を覆い、かつ前記複数の島状部のそれぞれにおける一部分との重なりを有する絶縁性保護層を形成する工程(e)と、
前記絶縁性保護層上に導電層を形成する工程(f)と
を含み、
前記工程(b)は、前記複数の島状部の形状を反映した段差を前記絶縁層の表面に形成する工程を含む、半導体装置の製造方法。 - 前記工程(d)において、液体状の絶縁性材料が前記絶縁層上および前記第2メタル層上に付与される、請求項10に記載の半導体装置の製造方法。
- 前記工程(d)において、有機絶縁性材料が前記絶縁層上および前記第2メタル層上に付与される、請求項10または11に記載の半導体装置の製造方法。
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WO2017099024A1 (ja) * | 2015-12-09 | 2017-06-15 | シャープ株式会社 | アクティブマトリクス基板およびそれを備える液晶表示パネル |
JP2022119776A (ja) * | 2017-10-30 | 2022-08-17 | 株式会社ジャパンディスプレイ | 半導体装置 |
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CN104392999B (zh) * | 2014-09-30 | 2017-03-29 | 合肥京东方光电科技有限公司 | 一种阵列基板及其制作方法、显示装置 |
US10607533B2 (en) * | 2018-08-03 | 2020-03-31 | Kyocera Corporation | Display apparatus with light emitting portions |
CN113644085B (zh) * | 2020-08-14 | 2023-06-02 | 友达光电股份有限公司 | 电子装置及电子装置的制造方法 |
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Also Published As
Publication number | Publication date |
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JP6041984B2 (ja) | 2016-12-14 |
US20160064423A1 (en) | 2016-03-03 |
CN105144364A (zh) | 2015-12-09 |
US9583515B2 (en) | 2017-02-28 |
CN105144364B (zh) | 2018-01-09 |
JPWO2014174902A1 (ja) | 2017-02-23 |
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