TWI247122B - TCP handling device and positional deviation correcting method for the same - Google Patents

Abstract

A TCP handler (2) is provided with a pusher stage (4) capable of moving a carrier tape (5) adsorbed by an adsorption plate (34) in the X- and Y-axis directions and driving it for rotation around a vertical axis during operation of the TCP handler (2), and a probe card stage (7) capable of moving a probe card (8) in the X- and Y-axis directions and driving it for rotation around a vertical axis during operation of the TCP handler (2). With the TCP handler (2) having such arrangement, it is possible to achieve accurate positioning between the TCP and the probe card (8) to reduce the occurrence of poor contact.

Description

1247122 V. INSTRUCTION DESCRIPTION OF THE INVENTION (1) Technical Field of the Invention The present invention relates to a Tcp (Tape Carrier package) or a C〇F (Chip such as Film) for testing one of the IC components (hereinafter, TCP C0F will be utilized). Other TAB (Tape Automated Bonding) assembly technology, a component manufactured by the company, collectively referred to as "TCP", a TCP processing device, and a TCP, and a TCP device and a positional offset compensation method at the contact portion. [Prior Art] In the process of electronic components such as 1C components, it is necessary to test the performance or function of the last manufactured 1C component or the component at the intermediate stage. In the case of TCP, the test device for Tcp is used. .

The test device for T C P consists of a test body, a test head, and a TCP processing device (hereinafter referred to as "TCP processing".

The processing device is functionally transported in the tape and tape. The TCP is connected to the volume of the TCP. The carrier tape is pressed on the roll and the test head is pressed and the hammer is 5 μ. The social f battle broadcast test. f, such as needle contact, in turn, the complex TCP is used in order to use this TCP processing to place high efficiency so that the external terminals of the TCP and the probe card are actually in contact with each other, and the alignment method to the TCP and the probe Up ft --- 8:9484 bulletin), or the probe chi-square: Kaiping Ping 1〇- 1 85996, special opening 2 () () 2_1 8 1 888 = ^ method (special opening

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:Yes' In this case, only the 2-axis control in the XY direction does not necessarily correct the alignment of the ρ-仃TCP and the probe 81, and contact failure often occurs. In particular, the number of pins and narrow pitches of future components is expected to increase the frequency of such contact failures. In the Japanese Patent Laid-Open Publication No. 20 02-1081 889, an invention is disclosed in which the angle deviation of the D-CP and the probe card is compensated by the rotation of the probe card on the rotary table relative to the TCP. .

On the 8th, the invention described in the Japanese Patent Laid-Open Publication No. 2 1 2 - 1 8 1 8 8 9 is used to complete the positioning of the probe card after the initial setting, and the fP test device In actual operation, the position deviation, condition, or initial setting of the TCP and probe card is incorrect, and the situation found in the actual operation of the TCp test device cannot be handled. [Summary of the Invention]

In view of the above, the object of the present invention is to provide a method for compensating for the positional deviation of the TCP processing device, which can correctly correct the positional alignment of the TCP and the contact portion, thereby reducing contact failure. In order to achieve the above object, the first invention provides a TCP processing load-bearing tape on which a plurality of TCPs are formed on a tape, and the load-bearing volume is electrically connected to the contact portion of the head. The TCP is connected to the contact portion, and the plurality of TCPs can be sequentially delivered to the test. The device includes: a reel of the vertical axis of the reel, which can rotate the carrier tape that is pressed against the yoke around its vertical axis (丨In the patent specification t "contact" includes the external end of the connection Tcp

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There are two concepts of the components that connect the terminals (Example 5, the connection terminals of the invention (3), such as probes, and probe cards). According to the invention (1), the Μ荽 田 挫 丰 丰 丰 丰 植 植 从 从 从 从 从 从 从 从 从 从 从 从 丰 丰 丰 丰 丰 丰 丰 丰 丰 丰 丰 丰 丰 丰 丰 丰 丰 丰 丰 丰 丰 丰The alignment can reduce the occurrence of contact failure. The TCP processing apparatus of the invention (1) further includes winding so that the carrier tape that is pressed against the contact portion faces (2). Plane moving device with plane moving

According to the invention (2), by using the web vertical axis rotating device and/or the web moving device to rotate the carrier tape around the vertical axis and/or in the plane direction, the Tcp and the contact portion are surely performed. The alignment can reduce the occurrence of contact failure. . In the far invention (2) 'the roll vertical axis rotating device and / or the tape flat moving device and the pressing device that presses the carrying tape against the contact portion together rotate the carrying tape around the vertical axis and / or The plane direction moves better (3). Further, the "pushing device" referred to herein has a function of not only pressing the carrier tape but also maintaining the function of carrying the tape.

According to the invention (3), no positional deviation occurs between the carrying tape and the pressing means for pushing the carrier tape. Preferably, the TCP processing device of the invention (2, 3) further includes a positional deviation> the information acquisition device ′ obtains τ c P and positional deviation information of the contact portion; and the position obtained by the information acquisition device according to the positional deviation The deviation information drives the web vertical axis rotating device and/or the web moving device to automatically compensate for the positional deviation.

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V. INSTRUCTIONS (4) The positional deviation information in this patent specification includes the direction of the bit (X · Y · Θ) and the amount of positional deviation. Leakage The positional deviation information acquisition device includes, for example, a combination of a camera capable of taking a tape and a contact portion, and a video processing device. 7. According to the invention (4), the TCP and the positional deviation can be automatically compensated independently, regardless of the skill of the operator or the like. σ, preferably the tape has a vertical axis, so that the TCP processing device rotating device of the invention (1 to 4) can be held by the adsorption holding carrier tape winding tape around its vertical axis (5 ).

According to a second aspect of the present invention, there is provided a Tcp processing apparatus which carries a carrier tape wound on a plurality of TCPs, and presses the tape and the test tape. The connection portion of the upper connection can be successively delivered to the test by the external terminal of the Tcp and the contact portion, and is characterized in that:

The deviation information acquisition device can obtain the position of the TCP and the contact portion: the vertical axis rotation device 4 of the moving and γ portions, so that the contact portion can be moved around the vertical axis, and in the continuous operation (not the starting material, but In order to carry out the test, according to the position deviation information obtaining device, the differential signal is driven to drive the vertical axis rotation device of the contact portion to rotate the k / and the vertical axis to automatically compensate the position deviation ( 6). According to the invention (6), by the fact that the contact portion vertical axis rotating means rotates the contact portion about the vertical axis during the actual operation of the TCP processing apparatus, the test Tcp for the vertical axis offset of each tested TCP is performed. Position alignment can significantly reduce the occurrence of good connections. The TCP processing device of the invention (6) further includes a contact plane moving device

1247122 V. Invention description (5) According to the position ί ί Ϊ J : = f : face direction f move '· In actual operation, according to the vertical axis of the contact part = position deviation information obtained by the device, drive to make the contact The partial winding and/or the contact plane moving device compensates the position: the difference (,) the straight car is rotated and/or moved in the direction of the plane, automatically right according to the invention (7), the contact portion is vertically processed at Tcp Shaft rotation device and / or the contact; ^ Each tested TCP: vertical movement = moving in the direction of the plane, due to the opposite alignment, can significantly reduce the contact between the hair and the contact position 3 The present invention provides a Tcp process with a plurality of Tcp loaded with a roll of tape 1 carried by a tape at the contact portion of the connection with the i-by the external terminal of the tcp and the connection. The test is characterized in that: the position information: the positional deviation of the contact portion allows the carrier roll pressed at the contact portion to rotate about its vertical axis; and the vertical axis of the contact portion: The obtained position deviation ratio = difference; the acquisition device condition, drive The contact portion vertical axis rotation device: the :: 2 = ±: the axis of rotation, and the position deviation amount is a predetermined value ^ 〇 straight value, driving the tape vertical axis; =: the: condition or not full If the vertical axis is rotated, the position m is automatically compensated for the winding of the carrier tape according to the invention (8) 'by driving the winding belt vertical axis rotating device or 2192-6119-PF (N2); Ahddub.ptd page 10

1247122 V. INSTRUCTIONS (6) Contact "卩The vertical axis rotation device 7 is positioned to align the position of the 罝 axis, which can reduce the occurrence of contact failure. Here, the configuration of the TCP processing device and the x command include a plurality of turns: the contact portion of the wire of the t body is moved by the contact portion of the vertical axis rotation device I 曰 "棬Ϊ: the vertical axis rotation device can compensate in a short time Position deviation = Straight-axis rotating device is used to support the damage of the TCP on the carrying tape by means of a guide wheel or a sprocket (especially::: for carrying the tape, you can do it yourself (especially Or test the base) or carry the tape itself (especially the hole in which the claw of the sprocket enters or its peripheral portion). Therefore, according to the invention (8), the positional deviation amount is large to drive the contact portion vertical axis rotation device 'Injury; and in the position deviation amount: =, brother defense (four) set, can shorten the position deviation compensation: the wheat shaft rotates the clothes time. η and then shorten the index (Index) The invention (8) TCP processing device is the most Pressing the contact portion of the contact portion to include the plane moving device of the flat belt moving portion, the person can move the food in the plane direction to offset the information at the position. Loading:: the color value is large toward the plane direction or The positional deviation obtained by the established 佶ri μ and 罝 is judged by 'on #隆,, w. The moving device and / or the contact Qiu Ya I ^ condition 'drives the contact a new a μ mouth dry surface axis rotation and / or moving in the direction of the plane, so that the contact below Or under the condition of the positional deviation device and/or the tape-receiving device, the person drives the tape i to rotate and/or to face the plane to "automatically compensate the position of the carrier tape"

This setting, and the contact movement; borrowing than the established straight axis, the vertical axis is rotated, the axis is rotated, and the vertical axis is

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According to the invention (9), by the side movement of the (4) plane, the vertical axis rotation device is disposed and/or the contact portion is rotated by the straight shaft to rotate the shaft and/or to the plane to make contact. The alignment of the part around the vertical position can reduce the movement of the brewing, and the TCP and the contact part are confirmed. (9) In the position deviation, the female is more than the right. The mysterious case is called the sister-in-law, driving contact. Part of the vertical axis 辕 · ,, and the position deviation is small, the second set == damage of the tape

And / or the tape plane moving device, VI' moving coil ^ straight axis rotating device, the time of % short position deviation compensation, and then shortening the indexing (I n d e X ) time. According to a fourth aspect of the present invention, there is provided a method for compensating for a positional deviation of a TCP processing device, which is a method for compensating for a positional deviation of a TCP and a contact portion of a TCP processing device, and carrying a carrier tape of a plurality of Tcps on a tape to carry a carrier roll The contact portion electrically connected to the test head is connected to the contact portion by the external terminal of the TCP, and the plurality of Tcps can be sequentially delivered to the test, which is characterized in that the load is pressed against the contact portion. The tape is rotated about its vertical axis to compensate for the positional deviation of the TCP and the contact (1 〇).

According to the invention (1 〇), by causing the carrier tape to rotate about the vertical axis, the alignment of the TCP and the contact portion which are offset around the vertical axis can reduce the occurrence of contact failure. According to a fifth aspect of the present invention, a method for compensating for a positional deviation of a TCP processing apparatus is a method for compensating for a positional deviation of a TCP and a contact portion of a TCP processing apparatus, and a carrier tape that forms a plurality of TCPs on a tape is transported, and a carrier roll is formed.

2192-6119-PF(N2); Ahddub.ptd Page 12 1247122

The pressure is connected to the contact point of the right side of the test head and the contact point of the electric connection from the si, and the connection is made by the mouth of the TCP and the three parts of the contact, which is characterized by: by the person, p = ff The TCP is sequentially delivered to the test, and the rotation/type of the bean is carried by the carrier tape at the contact portion about its vertical axis difference ((1) direction, the compensation TCP and the position of the contact portion are biased according to the invention (JJ), Move the person's book or move in the direction of the plane, and carry out the positional alignment of the TCP and the contact part of the vertical axis rotation of the load f T and the vertical axis offset of the #1·, 隹5 km, and the vertical axis offset. The occurrence of poor contact.

The sixth volume provides a method for processing a TCp processing device, which is based on TCP processing Meng Jin Xi ΤΓΡ $ min & straight 1 rain left complement 1 Bei Wan, i, H / m & set CP and the contact portion The position deviation compensation method ψ ^ is electrically connected to the contact portion, and by connecting the external terminal of the TCP and the contact portion, the plurality of TCPs can be sequentially delivered to the test, which is characterized in that the positional deviation information of the TCP and the contact portion is obtained. Then, by taking the positional deviation information taken by the second, the carrier tape that is pressed against the contact portion is rotated about its vertical axis to compensate for the positional deviation (12). According to the invention (12), the positional deviation of the wraparound TCP and the contact portion can be reliably compensated by rotating the carrier tape around the vertical axis in accordance with the obtained positional deviation information. Flat rain

According to a seventh aspect of the present invention, there is provided a method for compensating for a positional deviation of a TCP processing device, wherein the TCP of the TCP processing device and the positional deviation compensation side of the contact portion are formed, and the carrier tape on which the plurality of TCp is formed on the tape is transported, and the carrier roll is formed. π is pressed at the contact point that is electrically connected to the test head, by the order? The external terminal is connected to the contact portion, and the plurality of TCPs can be sequentially delivered for testing,

2192-6119-PF(N2); Ahddub.ptd Page 13 1247122 V. Description of the invention (9) The characteristic is that after obtaining the positional deviation information of the TCP and the contact portion, the dream 2 obtains the positional deviation m obtained by the location. It is pressed against the rolling belt to rotate about its vertical axis and/or to move in the plane direction thereof, y, carrying a deviation (13). According to the invention (13), according to the invention (13), the carrier is wound around the vertical axis and/or moved in the plane direction according to the obtained order. Deviation from the position of the contact. Only the eighth invention provides a TCP processing device and a location of the contact portion of the TCP and the contact portion. The bearer tape of the plurality of TCPs, the bearing part of the carrying volume ', the head is connected on the electric rolling, and the external terminal of the winding and the contact part are connected', the multiple Tcp can be successively delivered to the test, and the direct= In the actual operation of the TCP processing device, after obtaining the positional deviation information of the TCP and the contact π, by the positional deviation according to the obtained positional deviation = the carrier tape of the contact portion is rotated around its vertical axis to compensate for the 4-position deviation ( 1 4 ). According to the invention (14), by the fact that the contact portion is rotated about the vertical axis during the actual operation of the Tcp processing device, the tested TCP and the position of the contact portion can be wound around the vertical T offset for each tested Tcp. , can significantly reduce the occurrence of contact failure. According to a ninth aspect of the present invention, a positional deviation compensation method of a TCP processing device is provided in a Tcp of a TCP processing device and a positional deviation compensation method of the contact portion, and a carrier tape is formed on the tape to form a plurality of TCPs. Carrying the load coil C in the contact portion electrically connected to the test head, by making the TCp

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:2 : Connected to the contact part, the complex TCP can be delivered to the test in turn, and the TCP and the contact are obtained during the actual operation of the Tcp processing device; = after setting the difference information, by obtaining the position according to the The biasing factor A i is pressed against the bearing shaft of the contact portion to rotate about its vertical axis and/or the "^ plane direction to compensate for the positional deviation (1 5 ). According to the invention (15), by During the actual operation of the Tcp processing device, the contact portion is rotated about the vertical axis so that the carrier tape and/or the direction of the plane are shifted by four ports, and the tested TCP and the seek portion are aligned with respect to the vertical axis offset of each tested TCP. Can significantly reduce the occurrence of contact failure.

The present invention provides a positional deviation compensation method for a TCP processing device. The TCP processing device 2TCP and the positional deviation compensation unit of the contact portion carry a carrier tape that forms a plurality of TCp on the tape, and the carrier volume is: In the contact portion electrically connected with the test head, by connecting the external portion of the TCp and the contact portion, the plurality of Tcps can be sequentially delivered to the test, and the special desire is to obtain the positional deviation information of the TCP and the contact portion. Then, by the case where the obtained position deviation amount is larger than the predetermined value or the I4 month condition or more above the predetermined value, the child contact portion rotates around the vertical axis thereof, and the obtained position deviation amount is below the predetermined value or In the case of a predetermined value, it is pressed

The carrier tape of the 卩 contact α卩 is rotated about its vertical axis to compensate for the positional deviation (16). According to the invention (16), by performing the alignment of the Tcp and the contact portion which are offset around the vertical axis, the occurrence of contact failure can be reduced. Here, in the construction of the TCP processing device, generally, the time required to carry the tape reel to compensate for the positional deviation is included in the connection with the tester body.

1247122 a t V. Description of the invention (Π) The time during which the contact portion of the wire moves to compensate for the positional deviation is short. However, since the carrier tape is generally supported by a guide wheel or a sprocket, stress is applied to the carrier tape when the amount of movement of the tape is large, which may damage the TCP (especially the wire or test pedestal) or the carrier roll on the carrier tape. The belt itself (especially the hole in which the claw of the sprocket enters or its peripheral portion). Therefore, according to the invention (16), in the case where the amount of positional deviation is large, the contact portion is rotated about the vertical axis to prevent damage of the TCP or the carrier tape; and in the case where the amount of positional deviation is small, the carrier tape winding is wound. Vertical axis rotation shortens the time offset compensation time and shortens the indexing time.

According to a thirteenth aspect of the present invention, there is provided a method for compensating for a positional deviation of a TCP processing apparatus, which is a method for compensating for a positional deviation of a TCP of a TCP processing apparatus and a position of the contact portion, and carrying a carrier tape that forms a plurality of TCp on the tape. Pressing the contact portion electrically connected to the test head, by connecting the external terminal of the TCp and the contact portion, the plurality of TCp can be sequentially delivered to the test, characterized in that after obtaining the positional deviation information of the TCP and the contact portion, By making the contact portion larger than the predetermined value or a predetermined value or more, the contact portion is rotated about its vertical axis and/or moved in the plane direction, and the obtained position deviation amount is determined. In the case of a value below or less than the value of the ' value, the carrier tape that is pressed against the contact portion is rotated about its vertical axis and/or moved in the plane direction thereof to compensate for the positional deviation (i 7). According to the invention (17), by causing the carrier tape or the contact portion to rotate about the vertical axis and/or to move in the plane direction, the positional alignment of the TCP and the contact portion can be performed, and the occurrence of contact failure can be caused. Further, according to the invention U7), in the case where the positional deviation is large, the contact portion is rotated about the vertical axis and/or

1247122 -______________ V. Description of the invention (12) Directional movement to prevent damage to the TCP or the carrying tape; and in the case of a small positional deviation of 2, the carrier tape is rotated about the vertical axis and/or moved toward the plane. The time for the positional deviation compensation can be shortened, and the indexing can be shortened. [Embodiment] Hereinafter, an embodiment of the present invention will be described in detail based on the drawings. Fig. 1 shows a TCP test apparatus using a tcp processing apparatus according to an embodiment of the present invention. The TCP test device consists of the following components, the tester body, not shown, the test head 1 〇, and the tester body are electrically connected; and the Tcp processing device 2 is disposed above the test head i 。. The six TCP processing device 2 sequentially multiplexes the plurality of TCPs formed on the carrier tape 5, and in the present embodiment, in order to simplify the description, it will be replaced. Deliver one by one = try. However, the present invention is not limited to such a manner that the plurality of κρs arranged in the column direction and/or the parallel direction are simultaneously delivered to the test tape 5, and the TCP processing apparatus 2 includes the take-up reel 21 and the winding roll. The disk 22 is wound around the take-up reel 21 before the test. The carrier tape 5 is unwound from the reel and is wound up on the winding reel 22 after the delivery test. Between the take-up reel 21 and the take-up reel 22, a protective tape 51 that peels off the self-supporting tape 5 is disposed from the roll-out reel 21 to the three spacer rollers 23a and 23b of the take-up reel 22, 23c. Each of the spacer rollers 23a, 23b, and 23c is movable up and down so that the tension of the protective tape 51 can be adjusted.

2192-6119-PF(N2); Ahddub.ptd Page 17 1247122 V. Description of Invention (13) A tape guide 24a, a roll-out limit roller 2 5a, and an inlet side pair are provided on the lower side of the take-up reel 2 1 The sprocket 2 5b and the inlet side guide wheel 25c, the carrier tape 5 unwound from the take-up reel 21 is guided by the take-up guide 24a via the take-up limit roller 25a, the inlet side sub-sprocket 25b, and the inlet. The side guide wheels 25c are moved to the pusher unit 3.

Further, on the lower side of the winding reel 22, a take-up guide 24b, a take-up limit roller 25f, an exit side sub-sprocket 25e, and an exit side guide 25d are provided, and the carrier tape 5 after the test is delivered is in the take-up guide Guided by 24b, the winding side reel 2, the outlet side sub-sprocket 25e, and the unwinding limit roller 25f are wound around the winding reel 22. A pusher unit 3 is disposed between the inlet side guide wheel 2 5 c and the outlet side guide wheel 2 5 d, and a first camera 6a is disposed on the front side (the left side in FIG. 1) of the pusher unit 3, at the pusher unit 3 The lower side (the inner side of the probe card table 7 to be described later) is provided with the second camera 6b, and the second camera 6c is placed on the rear side (the right side in the figure!) e of the pusher unit 3. Further, a symbol punching machine 26a and a defective punching machine 26b are provided between the pusher unit 3 and the third camera 6c. The mark punching machine 26a drills one or a plurality of holes in the predetermined position for the TCP according to the test result, and the defective punching machine 2 6 b will judge the test result as the TCP hole of the product. ^ + k Each of the cameras 6a, 6b, 6c is connected to an image processing apparatus not shown, and the first camera 6a and the third camera 6c are used to judge whether or not the TCP and the mark punching machine 26a are processed on the carrier tape 5. The position or number of the holes, the second camera 6b is used to obtain information on the position of the Tcp and the probe on the carrying tape 5. In the second embodiment of the present embodiment, the second camera 6 b can be obtained for parallax

2192-6119-PF(N2); Ahddub.ptd Page 18 1247122 V. Description of invention (14) Plural, positional deviation information

Work: C machine 6b is loaded under the camera work Afn P. 6 1 has an actuator that can be used on the opening 61, using the camera axis direction) and the vertical and horizontal directions (Z-axis direction) 纵f in the vertical and horizontal directions (X-axis-Y plus as shown in Figures 1 and 2, A propeller 36 is mounted via a bracket 361; a frame of 703 (propeller machine 31, and a servo motor rotated by two 2-axis direction screws 32)

The guide member") 37 is mounted and the ball screw movement guide (hereinafter referred to as "LM drive drive servo ^ m. , the mouth pusher body portion 33. By the reference in the = propeller body portion 33 can be in U The guide member 37 moves in the up-and-down direction (Z-axis direction). The gas can be provided at the lower end portion of the pusher body portion 33, and the suction-carrying plate 34 is held by suction. The front portion of the pusher body portion 33 is attached. The portion (the left side in Fig. i) is provided with a tension chain 'the main chain north is provided in the rear portion of the propeller body portion 33 (the right side in Fig. 1) as shown in Fig. 2 and Fig. 3, and the propeller body in the propeller frame 36 The propeller table 4 is disposed on the back side of the portion 3 3 so as to be placed on the base 38 to fix the top table 48 of the rotating table of the propulsion table 4 to the propeller frame.

36. A servo motor 41a for rotating the ball screw 42a having the shaft in the X-axis direction and a servo motor 41b for rotating the ball screw 42b having the shaft in the Y-axis direction are provided on the base 40 of the propeller table 4, and a servo motor 41b for rotating the ball screw 42b having the shaft in the Y-axis direction is provided. The servo motor 41c having the shaft ball screw 42c rotated in the axial direction, and the servo motor 41b and the servo motor 41c are respectively located at both ends of the base 40.

2192-6119-PF(N2); Ahddub.ptd Page 19 1247122 V. Description of the Invention (15) The ball screw 42a is screwed and guided by the lm guides 43a and 43a in the X-axis direction to be slidable in the X-axis direction. Slide block 44a. The slide plate 46a is slidable in the γ-axis direction by the slide block 44a via the LM guide 45a in the ¥ axis direction. A rotating member 47& having a rolling ring is fixed to the upper side of the sliding plate 46a, and the rotating member 47a is mounted to be freely rotatable on the top table 48.

The ball screw 42b is screwed to the sliding block 44b which is guided by the lm guides 43b and 43b in the Y-axis direction and slidable in the Y-axis direction. The slide plate 46b is slidable in the X-axis direction by the slide block 44b via the LM guide 45b in the X-axis direction. A rotating member 47b having a rolling ring is fixed to the upper side of the sliding plate 46b, and the rotating member 47b is mounted to be freely rotatable on the top table 48. The ball screw 4 2 c is screwed to the slider 44c which is guided by the guide members 4 3 c and 4 3 c in the Y-axis direction and slidable in the Y-axis direction. The slide plate 46c is slidable in the X-axis direction by the slide block 44c via the LM guide 45c in the X-axis direction. A rotating member 47c having a rolling ring is fixed to the upper side of the sliding plate 46c, and the rotating member 47c is mounted to be freely rotatable on the top table 48.

In the propulsion workbench 4 having such a configuration, the servo motor 4 1 a ' is driven to slide in the X-axis direction by the sliding block 4 4 a, the sliding plate 4 6 b, and the sliding plate 4 6 c, so that the top table can be driven. 48 moves in the X-axis direction. Further, the servo motor 41b and the servo motor 41c are driven to move the top table 4 in the γ-axis direction by sliding the slider 44b, the slider 44c, and the slide plate 46a in the same direction as the Y-axis. Further, the servo motor 41a is driven to slide the slider 44a in the x-axis direction, and the servo motor 4 1 b and the servo motor 4 1 c are driven to slide the slider 44b and the slider 44c in the opposite directions of the Y-axis, and then borrow Rotating the respective rotating members 47a, 45b, 45c to allow the top table 48 to hang around it

2192-6119-PF(N2); Ahddub.ptd Page 20 1247122 V. Description of invention (16) Straight axis rotation. The 蚰古本) propeller table 4' allows the propeller unit 3 to rotate on the x-axis and the y-axis. Further, in the thruster i ϊ ζ ± / of the embodiment, the movement of the χ-γ axis direction and the movement of the y-axis direction can be simultaneously performed, and the thruster unit 3 of the moving object is relatively light, The characteristics of the positional deviation can be compensated for in a short time. As shown in Fig. 1, a probe card table 7 on which the probe card 8 is loaded is disposed above the test head 1A on the lower side of the pusher unit 3. As shown in Figs. 4 and 5, a servo motor 711 having a rotation of the ball screw 712 having an axis in the axial direction and four LM guides 713 in the X-axis direction are provided on the base 7 j of the probe card table 7. The X guides 713 are provided with a plurality of L-shaped bases 72 that are slidable in the X-axis direction. The side of one of the X bases 72 is formed to be screwed with the ball screw 712. The screwing portion 7 21 ° is placed on the X base 72 with a servo motor 722 for rotating the ball screw Kg having the shaft in the γ-axis direction and two X-axis direction 2LM guides 724. On the two LM guides 724 A Y-base 73 that is guided by a LM guide 724 to be slidable in the γ-axis direction is provided. A screw portion 731 to which the rod 723 is screwed is formed on one side of the γ-base 73. A servo motor 732 having a shaft of a ball screw 33 in the γ-axis direction and a connecting ring 734 for supporting the snap ring 735 to rotate freely are formed. A screw portion 736 which is screwed to the ball screw 733 is formed at a portion of the snap ring 735. The probe card 8 including a plurality of probes 81 is detachably mounted by using the four-ring 735.

2192-6119-PF(N2); Ahddub.ptd Page 21 1247122 V. Description of the Invention (7) Further, although not shown in FIGS. 4 and 5, each probe of the probe card 8 "via and the tester body" Electrically connected, the second camera 6 knows the inside of the probe card table 7 on the lower side of the needle card 8. In the probe card table 7 having such a configuration, the X-base 72 can be made by driving the servo And then the probe card 8 servo axis direction servo Macher, can make the Y base 73, $ and the probe card 8 needle shaft;: ίΪ二 and 'by driving the feeding motor 732 ' to rotate the ball screw 733, ^ δ The movement of 736 can cause the snap ring 735 and the probe card 8 to rotate to the position 2 about its vertical axis. The pusher unit 3 can be configured to compensate for the deviation in a short time, but the concrete element includes the plurality of members in the plane direction. The probe card table 7 has a limited space in the plane direction, and the same structure as the thruster unit 3 is used. If the same structure is adopted for the purpose of adoption and advancement, the servo motors 711, 7 22, 732 are used. Small ^ early 兀 3 service motor 71 1, 722, 732 driving force is weak, can not make the wire including the / servo, test body connection The probe card 8 is surely moved. That is, the probe card table 7 of the embodiment and the embodiment must be separated from the vertical axis by the movement of the sense axis. The axial compensation ratio of the thruster unit 3 is time-consuming, but has the feature of being able to compensate for the difference in the narrow space. The card 8 is second to explain the usage and operation of the TCP processing device 2. In the case of using the TCP processing device 2 In the case, before starting the TCP processing operation, it is necessary to perform the initial setting in advance. That is, when the Tcj actual class is changed, as the probe card 8 is changed, it is necessary to make a decision.

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1247122 V. INSTRUCTIONS (18) _ The reference position of the table 4 and the probe card table 7: the position "), so that the external terminal of the TCP (contacts the probe 81 of the probe card 8) is listed. For example, use manual operation to select multiple locations (for example, three corresponding test pedestals to determine the approximate position, then H1 and / or, or probe card table 7 shift: the feeder table 4; try In the center of the pedestal, the position of the reference position can be determined: the amount of the needle 2:: i To use the "for the decision of the approximate position, you can also use the ", operate. Work system, do not pick up this day, register together The second camera "the position coordinate of the video. The position coordinates are registered in many places, especially the registration of more than three objects in the field of view is better than the camera: position deviation information. On a given object, for example Cocoa two-precision roll alignment mark 5, located on the diagonal of TCp, selected on the carrier base or the characteristic wire, the test tip portion above it, etc. Corresponding two or more probes 81 Referring to the flowchart of FIG. 6, the TC of κρ is explained. The main operation of the P processing device 2. When the main operation of the TCP processing device 2 is started, the push card table 7 is moved to the registered position (step SO1). Then, "Γ4, and the picking plate 21 and The winding reel 22 is rotated by a predetermined angle, so that the moving, |# is rolled out of the volume ^ - ^CP ,, 34 . Τ , ΛΛ , I' ? ^ S02). The heart is set to 1π (step 23 page 2192-6119 -PF(N2);Ahddub.ptd 1247122

V. INSTRUCTION OF THE INVENTION (19) After the tcp is moved to the lower side of the suction plate 34, the propeller motor 31 is driven, via the propeller body 3). Further, the positional accuracy of m is increased by the tension sprocket 35MJ being carried (the step (4)' is given to the carrier tape 5, and the positional accuracy of m is improved. 7 Carrying the roll 5 In this state, the second camera 6b takes a picture (step s〇 4) The post-processing device transmits the image data. The image processing device obtains the position coordinates, the deviation position, and the position deviation amount of the position of the seat of the pre-registered object from the position of the predetermined object. For example, if the registration mark of the registration mark, the base, and the corresponding probes of the two or more probes are registered, the registration position of the registered position, the ticket, and the actual photographing position are obtained. Two or more test pedestals and positional deviation information of two or more corresponding position coordinates from the two tip ends. The image processing device of the wood ten is in accordance with the obtained positional deviation information, the Y-axis direction, and the positional deviation around the vertical axis (step == axis. In addition, when the complex TCp is tested at the same time, the deviation amount is determined. The average value. The result of the calculation of each TCP bit is judged as not having to compensate for the positional deviation S 0 6 — N 〇) 'Skip to the later step s 1 〇〇 month condition (the result of the step calculation is judged to be compensation The position deviation step SO6 - Yes) determines whether the position deviation amount is a predetermined value τ ρ month condition (step S07). In this case, the "positional deviation amount" is only the position of the step...the straight axis of the wheat

2192-6119-PF(N2); Ahddub.ptd第24页

1247122 V. INSTRUCTION OF THE INVENTION (20) The amount of deviation is also the object of the positional deviation amount around the vertical axis and the positional deviation amount in the x-axis direction. The positional deviation amount around the vertical axis and the position in the γ-axis direction may be used. The amount of partiality and the amount of positional deviation I in the direction of the x-axis are also applicable. There are a variety of factors in the amount of positional deviation, and it is sufficient to judge those elements in combination. In the case where the position deviation amount is more than the predetermined value (step s〇7 one)

Yes), the servo motor 711, 722, η? of the probe card table 7 is driven to operate the X base 72, the Y base 73 or the snap ring 735 by moving the probe card 8 in the direction of the x-axis / or about the vertical axis, compensation position S08) 〇 y and 'when the position deviation amount is less than the predetermined value T (step $ 〇 7 - No), the servo motor 41a, 41b, 41 driving the pusher table 4 〇 The top table 48 and the pusher unit 3 are operated to compensate the positional deviation by moving the carrier tape 5 adsorbed by the suction plate 34 in the X-axis-γ-axis direction and/or about the vertical axis (step S09). . In the case where the amount of positional deviation is large, when the propeller table 4 is used to move the carrier tape 5, stress acts on the load supported by the inlet side guide wheel 25c, the tension sprocket 35a, the main sprocket 35b, and the outlet side guide wheel 25d. The tape 5 can damage the TCP on the tape 5, and particularly the hole portion of the tension sprocket 35a and the main sprocket 35b or the peripheral portion thereof. This problem is particularly likely to occur in the case where the carrier tape 5 is rotated about the vertical axis, and may also occur in the case where the carrier tape 5 is moved in the γ-axis direction. In the present embodiment, in the case where the amount of positional deviation is large (the case of τ or more), the position of the probe card 8 is compensated by the probe card table 7 to compensate for the positional deviation.

1247122

Poor, no problem above. The value of T is different depending on the size of the TCP (especially the size of the perforation in the X-axis direction or the size of the test base), but as shown above, the port should take into consideration the appropriate setting of the T C P or the risk of damage to the tape 5 . The T value of the general deviation in the position around the vertical axis is 〇 · 1 (degrees). However, in the case where the amount of positional deviation is small (in the case of less than T), the propeller table 4, which requires a short time required to compensate for the positional deviation, allows the mobile carrier tape 5' to shorten the indexing time (from the test end to Test starting point until). After the positional deviation is compensated in accordance with step S08 or step S09, the servo motor 31 of the pusher 3 is driven to move the suction plate 34 via the pusher body portion 33 toward the lower side of the z-axis. After the adsorption plate 34 having the carrier tape 5 is lowered to the contact position, τ c P is pressed against the probe 8 1 of the probe card 8 (step s 1 〇 ). After the TCP test pedestal contacts the probe 81, the test signal is applied to the TCP from the tester body via the test head 10, and the response signal 1 read from the Tcp is transmitted to the tester body via the test head 10. Therefore, the performance or function of the test Tcp, etc., is driven according to the test result to drive the mark punching machine 26a or the poor punching machine 2 6 b 〇

The TCP processing device 2 determines whether the tested TCp is the last component (step S1 1 ), determines the last component (step SI 1 - Yes), ends the action, and determines that it is not the last component (step s 1 1 No) 'The servo motor 31 that drives the thruster unit 3 moves the suction plate % in the Z-axis direction ♦ via the pusher = 33, and pushes the device work ^ and the needle card table 7 to move to registration Position (step S1 2). Then, the adsorption plate is used to separate the adsorption carrier tape 5, release the carrier tape 5 and then move toward the Z-axis.

1247122 V. INSTRUCTIONS (22) Move ^Step S13). Then, return to step s〇2. According to the Tcp processing apparatus 2, 4 and/or the card table 7 of the present embodiment, the Tcp processing apparatus table causes the carrier tape 5 and/or the probe card 8 to move not only on the x-axis C: 2 vertical axis, The position deviation can be compensated, and the f-direction % position alignment can be reduced, and the contact Κΐ release can be reduced: the CP and the probe 81 of the injector table 4 and the probe card table 7 can be used to damage the TCP or the bearer by using f = Tape and reel. And, the short-cut time is not the embodiment described above for the sake of brevity and is not intended to limit the invention. Therefore, in the following: 七 七 七 七 七 七 七 七 七 七 七 七 七 七 七 七 七 七 七 七 七 七 七 七 七 七 七 七 七 七 七 七 七 七 七 七 。 。 。 。 。 。 。 。 。 For example, the propeller table 4 and the probe card table 7 are fixed, and the structures of the two are interchangeable, and both are used in the same manner. In the above-mentioned TCP processing device 2, the detection is omitted. The needle cardler can only compensate for the positional deviation by using the propeller table 4. In this case, the use of the pusher table 4 allows the carrier tape 5 to be aligned correctly with respect to the vertical axis and the X-axis and Y-axis directions. In addition, in the above-described TCP processing apparatus 2, the probe pusher 4 is omitted, and only the needle card table 7 can be used to compensate for the positional deviation. In this case, the needle card table 7 can be used to move the card 8 in the X-axis-Y-axis direction and rotate around the vertical axis during the actual operation of the TCP processing device 2, so that ^^丁^2192-6119-PF can be used. (N2); Ahddub.ptd Page 27 1247122 X, invention description (23; β ' ----------^ and probe 8 1 contact failure occurs. In addition, in the TCP processing device 2 The probe card table has only changed the rotating mechanism about the vertical axis to the automatic camera using the second camera and the image processing device. 'The X-axis-γ-axis moving mechanism is set to be used for the second camera. The manual operation of the image taken by the camera is also possible. In this case, the pusher unit 3 omits the rotation mechanism about the vertical axis, and only the movement mechanism of the χ-axis direction in the γ-axis direction is automatically controlled. Applicability As shown in the above description, according to the TCp processing apparatus or the positional deviation compensation method of the present invention, the correct alignment of the Tcp and the contact portion can reduce the occurrence of contact failure. That is, the TCP processing of the present invention. Device and position deviation compensation method for correct, accurate, and efficient TCP test is useful.

2192-6119-PF(N2); Ahddub.ptd Page 28 1247122 BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front elevational view showing a TCP test apparatus using a TCP processing apparatus according to an embodiment of the present invention. Fig. 2 is a side elevational view of the thruster unit of the TCP processing apparatus of the embodiment. Fig. 3 is a plan view showing a thruster unit of the TCP processing apparatus of the embodiment. Fig. 4 is a plan view showing a probe card table of the TCP processing apparatus of the embodiment. Fig. 5 is a front elevational view of the probe card stage of the TCP processing apparatus of the embodiment. 6 is a flow chart showing the main operation of the TCP processing apparatus of the embodiment. [Description of Symbols] Bu TCP Test Apparatus; 3~ Propeller Unit; 6 a~First Camera; 6 c~Third Camera; Needle card; 2 1~ roll out reel; 23a, 23b, 23c~ interval 25a~ roll out limit roller; 2 5 c~ inlet side guide wheel; 2 5 e~ outlet side 畐 1J sprocket; 2~TCP processing device 5~bearing tape; 6b~second camera; 7~probe card table; 1 0~test head; 2 2~winding reel; wheel; 24a, 24b~ tape guide; 2 5 b~ Inlet side sub-sprocket; 2 5 d~ outlet side guide wheel; 2 5 f~ roll out limit roller;

2192-6119-PF(N2); Ahddub.ptd Page 29 1247122 Schematic description 26a~mark punching machine; 3 1~servo motor; 3 3~propeller body part; 35a~ tension sprocket; 3 6~ Propeller rack; 5 1~protective tape; 8 1~probe; 2 6 b~ bad punching machine; 3 2~ball screw; 3 4~ suction plate; 3 5 b~ main sprocket; ~ LM Guide; 6 1 ~ Camera Workbench; 3 6 1 ~ Bracket.

I 2192-6119-PF(N2); Ahddub.ptd第30页

Claims (1)

1247122 VI. Application for patent scope 1. A TCP processing device 'handling a plurality of generations of carrier tapes formed on the tapes' to press the carrier roll f to the test head at the electrical connection portion' by connecting the external terminals of the TCP to the contact portion 4 complex &lt; ^1 to deliver the test in turn, p characterized by: comprising a reel of the vertical axis of the reel, which can be pressed against the vertical axis of the contact carrier. The TCP processing device of claim 1, wherein the upper TCP processing device further comprises a take-up plane moving device for moving the carrier tape compressed by the current contact portion in a planar direction. </ RTI> </ RTI> </ RTI> </ RTI> <RTIgt; </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> Together, the carrier tape is wound around and/or moved in a planar direction. 4. The TCP processing device of claim 2, wherein the TCP processing device further comprises a position deviation information obtaining device, wherein the position deviation information of the contact portion is obtained; and the mouth obtaining information obtained by the information device according to the position deviation The position deviation information drives the tape vertical axis rotation device and/or the tape flat plane shape to automatically compensate for the position deviation. 5. The Tcp processing apparatus of claim 4, wherein the web vertical axis rotating device is rotatable under the absorbing and holding carrier tape, and the erected winding tape is rotated about its vertical axis. 6. A kind of TCP processing device, which is transported on the tape to form a plurality of 1247122 Sixth, the patent application scope carries the tape, and the carrier tape is pressed into the measuring part, and the test is carried out by contacting the external terminal of the TCPI and the V-connector on the contact of the oxygen, and the contact 4 can be connected to the complex TCP. The utility model is characterized in that: the position deviation information obtaining device can take the deviation information; the 仵TCP and the contact portion are moved; the contact portion vertical sleeve rotating device can make the contact portion rotate around the vertical axis thereof. According to the position deviation f, the position deviation of the device is obtained, and the vertical axis of the contact portion is driven: the contact portion rotates around its vertical axis to automatically compensate the position deviation. "Hai connection 7. The TCP processing device of the Tcp processing according to item 6 of the patent application scope further includes the contact portion being flat π/, moving toward the plane direction thereof; and the ρ thousand-face moving device, which enables the contact portion to operate in a continuous manner according to The position deviation information of the position deviation is used to drive the contact surface plane moving device of j, σ, and clothing to make the contact part move toward the plane direction, and automatically compensate for the position deviation. Move and/or 1C intercept 8 : A kind of TCP processing device 'transports a multi-TCP carrying roll ▼ on the tape, presses the carrying tape and the test part, and delivers the test by the external terminal of the operation and the contact m-contact. The parameter TCP includes: a position deviation information obtaining device that can acquire the position of the Tcp and the contact portion 2192-6119-PF(N2); Ahddub.ptd Page 32 1247122 VI. Application for patent range deviation information; band winding around; ΐί = moving: J ' can be pressed against the bearing of the contact part; contact The vertical axis rotating device 'allows the contact portion to rotate around its vertical axis by the positional deviation obtained at the position of the positional deviation tL gjr ^ & In the straight axis, the step is turned, and the value of the eight i ^ value is used to drive the contact portion: 竿: move 4 to set the contact portion around the vertical value of the difference or below the predetermined value. The vertical axis rotates the device, causing it to drive the sigma to compensate for the positional deviation. The person 'f'% + straight-axis rotation, automatically supplemented: 9. The Tcp processing device according to claim 8 of the patent scope, wherein the package, with a plane moving device, can be pressed against the contact portion The belt is moved in the plane direction; and the contact plane moving device 'moves the contact portion in the plane direction; and the position deviation amount obtained by the deviation information acquiring device at the position is larger than a predetermined value or a predetermined value or more In the case of driving the contact portion, the linear rotation device and/or the contact portion plane moving device, the contact portion is rotated about the vertical axis and/or moved in the plane direction, and is below the predetermined value of the position In the case of a condition that is less than a predetermined value, 'driving the reeling device' and the reeling device, and/or the reeling plane moving device, the carrier tape is rotated about a vertical axis and/or moved in a plane direction, and automatically compensated. The position is biased &amp; 2192-6119-PF(N2); Ahddub.ptd 1247122 The method for compensating for the positional deviation of a strong TCP processing device is a method for compensating for the positional deviation of the Tcp of the TCP device and the position of the contact portion, and the carrier tape is formed by the multi-TCP in the =^, and the tape is carried. Pressing and measuring; 妾 = gas-connected contact portion 'by connecting the external terminal of TCP and the contact #, the plurality of Tcp can be sequentially delivered to the test, which is characterized in that: the patch is pressed against the carrier of the contact portion The belt rotates about its vertical axis, complementing k TCP and the positional deviation of the contact. I1. A positional deviation compensation method for a TCP processing device, which is a TCP and a positional offset compensation method of the contact portion of the Tcp device, and carries a carrier tape of a plurality of TCPs on the f, and presses the load and the tape to and from the test W. The electrical contact portion is connected to the external terminal of the Tcp and the 嗲 contact portion, and the plurality of TCPs can be sequentially delivered for testing. Μ The feature is: by means of a carrier tape wound around the contact portion The vertical axis rotates / or moves in the direction of its plane, compensating for the positional deviation of the TCP and the contact. 12· A generation? The position deviation compensation method of the processing device is a TCP at Tcp = I and a position deviation compensation method of the contact portion, and a carrier tape is formed on the ^f to form a plurality of TCp, and the carrier tape is pressed and tested. The contact portion electrically connected to the head can be connected to the test by connecting the external terminal of the TCP to the contact portion, and is characterized in that: after obtaining the positional deviation information of the TCP and the contact portion, by The 1247122 VI. Application of the patent range The positional deviation information obtained is such that the carrier tape that is pressed against the contact portion rotates around its vertical axis to compensate for the positional deviation. 13. The method for compensating for the positional deviation of the TCP processing device is a TCP and a positional deviation compensation method of the contact portion of the TCp processing device, and a carrier tape is formed on the tape to form a plurality of TCP, and the carrier tape is pressed at The contact portion electrically connected to the test head can be successively delivered to the test by connecting the external terminal of the Tcp and the contact portion, and is characterized in that: after obtaining the positional deviation information of the TCP and the contact portion, According to the obtained positional deviation information, the carrier tape that is pressed against the contact portion is rotated about its vertical axis and/or moved in the plane direction thereof to compensate for the positional deviation 14. A method for compensating for the positional deviation of the TCP processing device is Based on the TCP of the Tcp processing device and the positional deviation compensation method of the contact portion, a carrier tape of a plurality of TCP is formed on the 1 tape, and the carrier tape is pressed at the contact portion electrically connected with the s-type head. In order to connect with the contact department, the complex TCP can be delivered to the test in turn, σ w is characterized by: In the actual operation of the TCP processing device, after obtaining the tcp and setting the deviation information, the carrier tape of the contact portion is pressed around the vertical axis by the positional offset = the contact portion 4; . The offset compensation compensates for the position 4: The positional deviation compensation side of the TCP processing device, the TCP of the processing device, and the positional deviation compensation of the contact portion are in the TCP method, and are carried in 2192-6119-PF(N2); Ahddub.ptd Page 35 1247122 ----- π, the scope of patent application ' ~ ------ =3 formed a multi-TCP bearer tape, will carry the tape Pressing on the electrically connected contact portion 'by connecting the external contact portion of the TCP, the plurality of TGPs can be sequentially delivered to the test, and the four sub-characteristics are characterized by: lowering the actual operation of the Tfp processing device, obtaining TCP and After the position 1 of the contact portion is the difference information, the carrier tape that is pressed against the contact portion is rotated about its vertical axis and/or moved in the plane direction by the positional deviation information obtained according to the difference, and the position is compensated. deviation. \6· A method for compensating the position deviation of a TCP processing device, which is a Tcp meaning=Tcp of the device and a positional deviation compensation method of the contact portion, and carries a carrier tape of a plurality of TCPs formed on the 5 belts, and the carrier tape is pressed In the contact portion electrically connected to the test head, by connecting the external terminal of the TCp and the contact portion, the plurality of TCPs can be sequentially delivered for testing, and the feature is: ...after obtaining the positional deviation information of the TCP and the contact portion, the contact portion is rotated about its vertical axis by the case where the positional deviation amount is larger than the predetermined value or a predetermined value or more. The position deviation amount is a condition below the 疋 value or less than the predetermined value, so that the carrier tape compressed by the contact portion rotates about its vertical axis to compensate for the position deviation. It is a position deviation compensation method of the tcp processing device, which is a Tcp processing political TCP and a position deviation compensation method of the contact portion, and carries a carrier tape of a plurality of TCPs on the tape to press the tape and the tape. The test head is electrically connected to the contact portion, and by connecting the external terminal of the TCP and the contact portion, the plurality of TCPs can be sequentially delivered for testing. 2192-6119-PF(N2); Ahddub.ptd Page 36 1247122 6. The scope of the patent application is characterized in that: after obtaining the positional deviation information of the TCP and the contact portion, the position deviation amount obtained is larger than the predetermined value. In the case of a predetermined value or more, the contact portion is rotated about its vertical axis and/or moved in the direction of the plane, and when the obtained positional deviation amount is below a predetermined value or is less than a predetermined value, The carrier tape that is pressed against the contact portion is rotated about its vertical axis and/or moved in the direction of its plane to compensate for the positional deviation. 2192-6119-PF(N2); Ahddub.ptd第37页