CN1942772B

CN1942772B - TCP handling device

Info

Publication number: CN1942772B
Application number: CN2004800428023A
Authority: CN
Inventors: 村野寿; 清水洁; 金子修一
Original assignee: Advantest Corp
Current assignee: Advantest Corp
Priority date: 2004-04-20
Filing date: 2004-04-20
Publication date: 2010-04-28
Anticipated expiration: 2024-04-20
Also published as: JPWO2005103743A1; WO2005103743A1; TW200541001A; CN1942772A; JP4450831B2

Abstract

A TCP handler (2) is capable of pressing a carrier tape (5) having a plurality of TCPs formed thereon against a probe card (8) by a pusher unit (3) and capable of connecting the outer terminal of the TCPs to a probe (81), thereby successively subjecting the plurality of TCPs to a test, wherein height control guides (4) for guiding the carrier tape (5) are installed in a carrier tape (5) transfer path and in the front and rear stages of the pusher unit (3), the height control guides (4) being supported by the main body of the TCP handler (2) in a floating state so as to be displaceable planarily of the carrier tape (5).

Description

The TCP treating apparatus

Technical field

The present invention relates to a kind of TCP treating apparatus that is used to test TCP (Tape CarrierPackage) as a kind of IC device or COF (Chip On Film) (below, will be referred to as " TCP ") by TCP, COF, other the device of TAB (Tape Automated Bonding) field engineering manufacturing.

Background technology

In the manufacture process of electronic components such as IC device, need be used to test the IC device of final manufacturing or at the performance of the device in interstage etc. or the electronic component test unit of function, in the occasion of TCP, the test unit that uses TCP to use.

The test unit that TCP uses generally is made of tester body, measuring head, TCP treating apparatus (below the occasion that is called " TCP processor " is arranged).This TCP processor has such function, promptly, conveying is in the band (notion that also contains film, below identical) go up to form the carrier band of a plurality of TCP, carrier band is pressed against on the probe of the probe that is connected with test head electrical, the outside terminal of TCP is contacted with probe, thereby in turn a plurality of TCP are tested.

Such a TCP processor has the pusher (unit) that can be in the supporting carrier band it be pressed on the probe.When TCP tests, this pusher supporting carrier band and with its downwards (Z-direction) move, the TCP on the carrier band is contacted with the probe of probe.

The leading portion side and the rear section side of the described pusher in the TCP processor usually, are provided with the guiding piece of restriction carrier band height.But, in existing TCP processor, because these guiding pieces are provided with on the TCP processor regularly, so, if carrier band is along with pusher moves at its in-plane, particularly with the direction (Y direction) of throughput direction (X-direction) quadrature of carrier band or around the sense of rotation (θ direction) of Z-axis skew is taking place, such situation is then arranged, promptly, to carrier band stress application, can damage TCP (particularly lead or testing cushion) on the carrier band or carrier band self (particularly the tooth of sprocket wheel enter hole portion or its periphery) by guiding piece supporting.Such problem particularly makes pusher be easy to when mobile produce on in-plane in order to compensate by the offset of test TCP.

Summary of the invention

The present invention makes in view of such a actual conditions, even purpose provides a kind of TCP treating apparatus that also can relax the stress that puts on carrier band at carrier band with the occasion of the generation skew such as mobile of pusher.

For reaching above-mentioned purpose, the invention provides a kind of TCP treating apparatus, it can be pressed to the contact site that is connected with test head electrical by the carrier band that pusher will form a plurality of TCP on tape, the outside terminal of TCP is connected with described contact site, thereby test a plurality of TCP in turn, it is characterized in that, on the transport path of carrier band, leading portion side and/or rear section side at described pusher are provided with the guiding piece that guides carrier band, and described guiding piece is made at least can be in the in-plane displacement (invention 1) of carrier band.

And, in " pusher " of this instructions, also include carrier band pushing to the sprocket wheel of the pusher body of contact site or near supporting this pusher body/conveying carrier band, comprise these pusher bodies and sprocket wheel and any one notion of the pusher element that constitutes in addition.

According to described invention (invention 1), even,, thereby can relax the stress that puts on carrier band by the in-plane displacement of the guiding piece that guides carrier band at carrier band in the mobile occasion that waits the carrier band skew along with pusher.

Preferably, described guiding piece can be provided with (invention 2) on the in-plane slide displacement and the swing offset ground of carrier band in described invention (invention 1).

Because the such displacement of guiding piece, even carrier band along with the mobile grade of pusher with the direction (Y direction) of carrier band throughput direction (X-direction) quadrature or around the occasion of sense of rotation (θ direction) skew of Z-axis, also can relax the stress that puts on carrier band.

Preferably, described guiding piece is arranged to quick condition (invention 3) via elastic body in described invention (invention 1,2).

Guiding piece passes through with such formation setting, at least can the free displacement at the in-plane of carrier band.

In described invention (invention 1 to 3), described guiding piece also can be arranged on the height and position of regulation, the height and position of restriction carrier band (invention 4).

According to described invention (invention 4), can limit the height that moves up and down part part in addition in the carrier band by pusher, normally keep the position relation of carrier band and miscellaneous part (for example camera, tapping and plugging machine).

Preferably, described guiding piece is positioned in rotating bearing component (for example the ball castor etc.) and is gone up (invention 5) in described invention (invention 4).Thus, guiding piece can be in the in-plane displacement freely of carrier band, and displacement swimmingly.

In described invention (invention 1 to 5 in) preferably, described pusher constitutes and can keep carrier band, make this carrier band move and/or move around the rotation of its Z-axis at its in-plane, described guiding piece relaxes the stress ground displacement (invention 6) that puts on described carrier band corresponding to the carrier band of the action along with moving of described pusher.

Description of drawings

Fig. 1 is the front elevation that the TCP test unit of the TCP processor that adopts one embodiment of the present invention is shown.

Fig. 2 is the elevational sectional view of the limitation in height guiding piece in the TCP processor of this embodiment.

Fig. 3 is the side cross-sectional, view of the limitation in height guiding piece in the TCP processor of this embodiment.

Fig. 4 is the vertical view of the bottom of the limitation in height guiding piece in the TCP processor of this embodiment.

Fig. 5 is the vertical view of the limitation in height guiding piece in the TCP processor of this embodiment.

Embodiment

Below, based on accompanying drawing embodiments of the present invention are elaborated.

Figure 1 illustrates the TCP test unit of the TCP processor that adopts one embodiment of the present invention.

The measuring head 10 that TCP test unit 1 is electrically connected by not shown tester body, with the tester body and constitute at the TCP processor 2 of the upside setting of measuring head 10.

TCP processor 2 is tested a plurality of TCP that form in turn on carrier band 5, in the present embodiment, for the purpose of simplifying the description, be configured to TCP of each test.But the present invention is not limited thereto, also can test simultaneously along direction in upright arrangement and/or and column direction be arranged in a plurality of TCP on the carrier band 5.

TCP processor 2 has paying out reel 21 and spool 22, the carrier band 5 before paying out reel 21 is wound with test.Carrier band 5 is emitted from paying out reel 21, is wound onto after the test on the spool 22.

Be provided with three roller 23a, 23b, 23c at interval between paying out reel 21 and spool 22, these interval rollers will be forwarded to spool 22 from paying out reel 21 from the boundary belt 51 that carrier band 5 is peeled off.Each interval roller 23a, 23b, 23c movably are being provided with up and down respectively, thereby can adjust the tension force of boundary belt 51.

Downside at paying out reel 21, be provided with band guiding piece 24a, unwrapping wire restrict rollers 25a, input side auxiliary chain wheel 25b and input side guide reel 25c, the carrier band 5 of emitting from paying out reel 21 is guided by band guiding piece 24a, simultaneously, be delivered to pusher element 3 via unwrapping wire restrict rollers 25a, input side auxiliary chain wheel 25b and input side guide reel 25c.

In addition, downside at spool 22, be provided with band guiding piece 24b, spiral restrict rollers 25f, outgoing side auxiliary chain wheel 25e and outgoing side guide reel 25d, carrier band 5 after testing is via outgoing side guide reel 25d, outgoing side auxiliary chain wheel 25e and spiral restrict rollers 25f, by band guiding piece 24b guiding, simultaneously, be wound onto on the spool 22.

Between input side guide reel 25c and outgoing side guide reel 25d, be provided with pusher element 3, leading portion side (left side among Fig. 1) in pusher element 3 is provided with the first camera 6a, downside (inboard of probe platform 7 described later) in pusher element 3 is provided with the second camera 6b, is provided with the 3rd camera 6c at the rear section side (right side among Fig. 1) of pusher element 3.In addition, between pusher element 3 and the 3rd camera 6c, be provided with mark tapping and plugging machine (マ one Network パ Application チ) 26a and off standard tapping and plugging machine (リジエ Network トパ Application チ) 26b.

The assigned position of result on this TCP that mark tapping and plugging machine 26a is based on test offered the equipment in one or more holes, and off standard tapping and plugging machine 26b is an equipment of punching the TCP that is judged as the test findings unacceptable product.

Each camera 6a, 6b, 6c are connected in not shown image processing apparatus, the first camera 6a and the 3rd camera 6c be used to judge TCP on the carrier band 5 have or not or be used to judge the position in the hole that forms by mark tapping and plugging machine 26a or the equipment of quantity, the second camera 6b is the equipment that is used to obtain the offset information of TCP on the carrier band 5 and probe.The second camera 6b in the present embodiment makes the offset information of a plurality of objects that can obtain in the visual field.

The second camera 6b is loaded on the photograph board 61, can move by direction in length and breadth (X-axis-Y direction) and the above-below direction (Z-direction) that the actuator that photograph board 61 is had is looked on the plane.

At the body of TCP processor 2, via carriage 361 servomotor 31 that can make ball-screw 32 rotation is installed, simultaneously, the pusher body 33 that is threadedly engaged with ball-screw 32 is installed via the straight moving guiding piece 37 of two Z-directions.This pusher body 33 drives by making servomotor 31, thereby by straight moving guiding piece 37 guiding, simultaneously, can go up at above-below direction (Z-direction) and move.In addition, the framework (pusher framework) of pusher body 33 and pusher element 3 36 is being connected by not shown link gear, if pusher body 33 is moved up and down, then pusher framework 36 also moves up and down thereupon.

In the bottom of described pusher body 33, be provided with and adsorb and to keep the adsorption plate 34 of carrier band 5 by attracting air.

The leading portion side of the pusher body 33 in pusher framework 36 (among Fig. 1 left side) is provided with tension force sprocket wheel 35a, is provided with head sprocket 35b at the rear section side (right side among Fig. 1) of pusher body 33.

Head sprocket 35b carries carrier band 5 by drivings such as stepper motors, and tension force sprocket wheel 35a improves the positional precision of carrier band 5 by to the opposite spin of carrier band 5 moving directions carrier band 5 being applied the tension force of regulation.

Pusher element 3 is connected with not shown pusher platform.The pusher platform is connected (omit diagram) via a plurality of ball-screws with servomotor, the driving by servomotor can make pusher element 3 in the horizontal direction (XY in-plane) move, simultaneously, pusher element 3 is rotated around Z-axis (around the Z axle).

Top at the measuring head 10 of pusher element 3 downsides is provided with the probe platform 7 that has loaded probe 8.Probe platform 7 is connected (omit diagram) with servomotor via a plurality of ball-screws, the driving by servomotor can make probe 8 in the horizontal direction (XY in-plane) go up and move, simultaneously, probe 8 is rotated around Z-axis (around the Z axle).

Probe 8 with a plurality of probes 81 is installed in by pin on the snap ring of probe platform 7 (omitting diagram) with freely loading and unloading.And each probe 81 of probe 8 is electrically connected via measuring head 10 and tester body, locatees the second camera 6b in the inboard of the probe platform 7 of the downside of probe 8.

In this TCP test unit 1, be transferred to the downside of carrier band 5 by pusher element 3, by this carrier band 5 of pusher element 3 absorption/supportings, simultaneously, the probe 8 pushing carrier bands 5 on measuring head 10.So the TCP on the carrier band 5 contacts with the probe 81 of probe 8, and TCP is applied test signal, sends into the tester body from the response signal that TCP reads by measuring head 10.Thus, the performance of test TCP or function etc.

By carrying carrier band 5, the whole TCP on the carrier band 5 are carried out such test in turn.And, drive mark tapping and plugging machine 26a or off standard tapping and plugging machine 26b based on test findings.

[limitation in height guiding piece]

Fig. 2 to Fig. 5 is front elevation (Fig. 2), side view (Fig. 3) and the vertical view (Fig. 4, Fig. 5) that is illustrated in the limitation in height guiding piece of the TCP processor of recording and narrating among Fig. 1.In addition, Fig. 5 also is the key diagram that the action of limitation in height guiding piece is shown.

This TCP processor 2 has limitation in height guiding piece 4 (4a, 4b) at the front and back of pusher element 3 (among Fig. 1 about).Limitation in height guiding piece 4 is configured in the leading portion side and the rear section side (entrance side of carrier band 5 and outlet side) of pusher element 3 with respect to the throughput direction of carrier band 5, supporting carrier band 5 and the height of restriction carrier band 5.Particularly, the height of the carrier band 5 when entering pusher element 3 by the limitation in height guiding piece 4a of leading portion side restriction is by the height of the limitation in height guiding piece 4b restriction of the rear section side carrier band 5 when pusher element 3 is come out.

This limitation in height guiding piece 4 comprises framework 41 and a pair of up and down induction sprocket 42a, 42b and constitutes, and is arranged on be provided with (with reference to Fig. 2 to Fig. 4) on the platform 29 of stretching out from the body wall of TCP processor 2 towards face side.Framework 41 has the tetragonal frame type shape that the side is looked.A pair of up and down induction sprocket 42a, 42b are that bearing rotatably is housed in the framework 41 with the face side of framework 41 and the wall portion of rear side.In addition, these induction sprockets 42a, 42b be configuration side by side up and down in framework 41, sandwiches carrier band 5 ground therebetween and supports, and simultaneously, can cooperate the throughput direction of carrier band 5 and rotates (with reference to Fig. 2 and Fig. 3).

This limitation in height guiding piece 4, the X-direction opening be arranged on (with reference to Fig. 1) on the platform 29 be set, thereby induction sprocket 42a, 42b make turning axle sandwich carrier band 5 towards Y direction from above-below direction (Z-direction), can be along the throughput direction rotation of carrier band 5.

In addition, be provided with on the platform 29, limitation in height guiding piece 4 carries out four-point supporting (with reference to Fig. 2 to Fig. 4) in the bottom surface of framework 41 by rotating bearing component 43.This rotating bearing component 43 is for example made by four ball casters 431, is fixed on to be provided with on the platform 29.This rotating bearing component 43, with limitation in height guiding piece 4 can be in the horizontal direction the mode of slide displacement (at XY in-plane top offset) and swing offset (around the displacement of the θ of Z axle direction) swimmingly, flatly support this framework 41.

In addition, limitation in height guiding piece 4 is fixed on by mooring mechanism 44 in the bottom of framework 41 (with reference to Fig. 3 and Fig. 4) on the platform 29 is set.Mooring mechanism 44 comprises mooring pin 441 and elastomeric element 442 and constitutes.

This mooring mechanism 44 is provided with on the platform 29 by mooring pin 441 is inserted to lead to be fixed in the hole 443 of being located at framework 41 bottoms, thus mooring limitation in height guiding piece 4 on the platform 29 is being set.Here, the hole 443 of framework 41 forms greatlyyer than the diameter of mooring pin 441, and limitation in height guiding piece 4 can be provided with on the platform 29 slide displacement and swing offset and constitute in the scope of certain degree.In addition, this mooring pin 441 is provided with on the platform 29 by framework 41 is tethered in, thus the displacement of the above-below direction of maximum height limit restriction guiding piece 4.Thus, even when limitation in height guiding piece 4 is subjected to displacement, also the delivery head of carrier band 5 can be maintained in necessarily.

In this mooring mechanism 44, for example, the elastomeric element of being made by the endless member of rubber system 442 is embedded on the mooring pin 441, simultaneously, is sandwiched between the hole of mooring pin 441 and framework 41.This elastomeric element 442 is being provided with when being subjected to displacement on the platform 29 at limitation in height guiding piece 4, works as the padded coaming that the impact that is caused by framework 41 and contacting of mooring pin 441 is relaxed.

In addition, limitation in height guiding piece 4, but keeping (with reference to Fig. 2 to Fig. 4) being provided with on the platform 29 by holding member 45 elastic displacements ground.Holding member 45 comprises six roots of sensation volute spring 451.Volute spring 451 is hung on the set fixed pin 452a in framework 41 bottoms and is provided with between the fixed pin 452b set on the platform 29.In addition, these volute springs 451 are provided with two in upper edge, the plane Y direction that platform 29 is set, and are provided with four (with reference to Fig. 4) along Z-direction.Under this state, the power of effect shrinkage direction on each volute spring 451.These holding members 45 are from flexibly keeping limitation in height guiding piece 4 all around, and thus, limitation in height guiding piece 4 becomes quick condition.

[effect]

In described TCP processor 2, carrier band 5 is transferred in the mode of the downside by pusher element 3.At this moment, limitation in height guiding piece 4a, 4b lay respectively at the entrance side and the outlet side of pusher element 3, at the height place of regulation supporting carrier band 5, normally to keep carrier band 5 limits carrier band 5 with respect to the mode of the height and position of the first camera 6a except pusher element 3, the 3rd camera 6c, mark tapping and plugging machine 26a and off standard tapping and plugging machine 26b delivery head.

If pusher element 3 is mobile at above-below direction (Z-direction) when the test of TCP, perhaps for compensate made by the offset of test TCP pusher element 3 in the horizontal direction (XY in-plane) go up to move or around Z-axis (around the Z axle) rotation, then the carrier band 5 by this pusher element 3 (adsorption plate 34 of pusher body 33 and tension force sprocket wheel 35a/ head sprocket 35b) supporting is offset in X-direction, Y direction or θ direction in limitation in height guiding piece 4a, 4b.

At this moment, limitation in height guiding piece 4a, the 4b of quick condition by slide displacement and/or swing offset swimmingly on rotating bearing component 43, thereby relax the stress that puts on carrier band.Particularly, by make limitation in height guiding piece 4a, 4b on rotating bearing component 43 to X-direction, Y direction or the displacement of θ direction, thereby make the supporting direction that carrier band 5 supports is changed, make the stress that is applied on the carrier band 5 obtain relaxing by limitation in height guiding piece 4a, 4b.

Here, limitation in height guiding piece 4a, 4b flatly are positioned on the rotating bearing component 43, simultaneously, and by 44 moorings of mooring mechanism, so, (XY in-plane) top offset only in the horizontal direction.Thus, be maintained in necessarily at the delivery head of the height of stipulating carrier band 5.

In addition, because limitation in height guiding piece 4a, 4b become quick condition because of spiral winding 451, so, can relax the impact that when limitation in height guiding piece 4a, 4b displacement, produces by the elastic force of volute spring 451, simultaneously, the elastic force by volute spring 451 after displacement finishes retracts origin position (position before the displacement).

As mentioned above, TCP processor 2 according to present embodiment, because the limitation in height guiding piece 4 that is in quick condition puts on the mode displacement of the stress of carrier band 5 with mitigation, so, even the occasion in carrier band 5 generation skew along with moving of pusher element 3 also can reduce the stress that puts on carrier band 5 effectively.Particularly, even the state that is adsorbing/be supported with carrier band 5 in pusher element 3 (XY in-plane) is in the horizontal direction gone up and moved and/or the occasion that moves around Z-axis (around the Z axle) rotation, also can reduce the stress that puts on carrier band 5 thus effectively by the limitation in height guiding piece 4 that is in quick condition.

Like this, the damage of the TCP on the carrier band 5 that can prevent to cause (particularly lead or testing cushion) or carrier band 5 self (particularly the hole portion that tooth inserted or its periphery of tension force sprocket wheel 35a, head sprocket 35b and induction sprocket 42a, 42b) because of the stress that puts on carrier band 5.

[modified example]

More than Shuo Ming embodiment is recorded and narrated in order to be easy to understanding of the present invention, is not to be used to limit record of the present invention.Therefore, the meaning of disclosed each key element also comprises and belongs to whole design alteration or equipollents in the technology of the present invention scope in said embodiment.

For example, in described TCP processor 2, the rotating bearing component 43 of limitation in height guiding piece 4 is made of four ball casters 431, framework 41 is carried out four-point supporting by these ball casters 431, constitute preferably for these, framework 41 stably is bearing in is provided with on the platform 29, in addition, can slide displacement and swing offset swimmingly be set on the platform 29.But, being not limited thereto, the supporting construction of the kind of rotating bearing component 43 or the framework 41 that formed by rotating bearing component 43 is selected arbitrarily in can those skilled in the art self-evident scope.

In addition, in described TCP processor 2, though the mooring mechanism 44 of limitation in height guiding piece 4 constitute by mooring pin 441,, for such formation preferably, framework 41 can be tethered in by easy formation and be provided with on the platform.But, being not limited thereto, mooring mechanism 44 also can be made of the parts beyond such mooring pin 441, omits and also can.

In addition, in described TCP processor 2, though the holding member 45 of limitation in height guiding piece 4 constitute by volute spring 451,, be not limited thereto, holding member 45 constitutes also passable by other outer elastomeric elements of rubber member made.In addition, holding member 45 is with respect to the structure that is provided with of limitation in height guiding piece 4 (framework 41), and the structure that is not limited to record and narrate among Fig. 2 to Fig. 4 for example, also can be the formation that framework 41 is combined with the wall portion of TCP processor 2 by a plurality of spiral windings 451.

Industrial applicibility

As described above, according to TCP treating apparatus of the present invention, even at carrier band along with the mobile of pusher waited the occasion that skew takes place owing to can relax the stress that puts on carrier band, so, can not damage the TCP on the carrier band and test.

Claims

1. TCP treating apparatus can be urged to the contact site that is connected with test head electrical by the carrier band that pusher will be formed with a plurality of TCP on tape, the outside terminal of TCP is connected with described contact site, thereby tests a plurality of TCP in turn, it is characterized in that,

On the transport path of carrier band, be provided with guiding piece at the leading portion side of described pusher and/or rear section side to the carrier band channeling conduct, described guiding piece can be at least at the in-plane slide displacement and the swing offset of carrier band.

2. the TCP treating apparatus of recording and narrating in the claim 1 is characterized in that described guiding piece is being provided with quick condition via elastic body.

3. the TCP treating apparatus recorded and narrated of claim 1 is characterized in that described guiding piece is arranged on the height and position of regulation, and the height and position of carrier band is limited.

4. the TCP treating apparatus of recording and narrating in the claim 3 is characterized in that described guiding piece is loaded on the rotating bearing component.

5. the TCP treating apparatus recorded and narrated of claim 1 is characterized in that, described pusher constitutes and can keep carrier band and make this carrier band move and/or move around the Z-axis rotation of this carrier band at the in-plane of this carrier band,

The carrier band that described guiding piece moves corresponding to moving along with described pusher relaxes the stress ground displacement that is applied on the described carrier band.