TW200541001A - TCP handling device - Google Patents

Abstract

A TCP handler (2) is capable of pressing a carrier tape (5) having a plurality of TCPs formed thereon against a probe card (8) by a pusher unit (3) and capable of connecting the outer terminal of the TCPs to a probe (81), thereby successively subjecting the plurality of TCPs to a test, wherein height control guides (4) for guiding the carrier tape (5) are installed in a carrier tape (5) transfer path and in the front and rear stages of the pusher unit (3), the height control guides (4) being supported by the main body of the TCP handler (2) in a floating state so as to be displaceable planarily of the carrier tape (5).

Description

200541001 IX. Description of the invention: [Technical field to which the invention belongs] The present invention relates to a TCP (Tape Carrier package) or cOF (Chip ON Film) (hereinafter, TCP, COF) 2. Tape and reel packaging processing equipment used by other TAB (Tape Automized Bonding) components manufactured by assembly technology.

L Wuli Technology J In the process of electronic components such as 1C το, it is necessary to test the performance or function of the final manufactured ic component or the component in the middle stage, etc. The electronic component test device, in the case of Tcp, use the test for TCP Device. The measuring device used for photographing WCP is generally composed of a tester body, a test head, and an oscillating device (hereinafter sometimes referred to as "tape and reel packaging processing"). This tape and reel packaging processing machine includes a function

The belt (also includes the concept of fllm. The following-like.) Has formed a plurality of TCP transport belts. The transport belts are used to test the probes of multiple TCP probe cards, and the nr head is used to test the electrical connection. Plural TCP. 7 The external terminal of the TCP contacts the probe, and in turn this tape-and-reel packaging processor is pressed onto the probe's propeller (device). Move the transport belt and support the transport belt downwards (2 shafts, 1 probe of the propeller at the TCP contact detection card. D move, so that the transport belt is on the other side and the rear section of the TCP processor. Side setting

2192-7029-PF 200541001 A guide to limit the degree of af f a for handling. However, the flat and package processing machine is fixed on the processing machine A because of the ^ reel-to-reel type ^ The second guide is fixed to the thruster: the body, which is used to move the conveyor belt on its plane. In particular, when the belt is moved in the direction of rotation (the U-axis direction of the straight axis orthogonal to the conveying κ conveying direction α axis direction) or the rotation direction (the θ direction) of the vertical axis, the supported conveying belt μ Used for guide application belts, can be used to move the belt or test the base on the basis of tampering, tcp on g H + 6 (especially the guide application belt itself (especially the claw of the sheave i 隹 Λ ★ part or Its surroundings>, and the entrance P of the taxi.) This kind of problem is particularly easy to occur when the advancement tester moves in the plane direction in order to correct the deviation. [Summary of the Invention] Formula The package book :: 2 is based on the above-mentioned f-actuality. It is to provide-a kind of tape deviation ::, the deviation of the conveyor belt with the movement of the propeller, etc., can also reduce the stress on the conveyor belt. To achieve the above-mentioned H & F, in the brake field 4 The present invention provides A type of reel-to-reel tape is used for transporting a plurality of TCPs on a reel-to-reel packaging. A transport head is pressed against the test head as a thunder. ^ At the contact part of the electrical connection, the external terminal of the TCP and the contact part are checked. Connect, you can test multiple TCPs in sequence. On the conveying path of the special-purpose belt, guides and guide belts are installed on the side of the thruster and / or the rear section. It can be displaced by using the belt's plane in the direction of thousands to ten faces (Invention 1). In addition, the “advance state of 1 in the description of this patent” also includes the person who pushes the conveying belt to the contact part. The main body or near the thruster body supports and transports the 轮 ^ 槽 sheaves of the conveyor belt and includes those propulsion structurally

2192-7029-PF 200541001 Any of the concepts of the propulsion device of the device body and the sheave. According to this invention (invention υ, the deviation of the conveying intention due to the movement of the propeller, etc.), the displacement of the guide of the conveying belt in the plane direction of the conveying belt can also ease the effect on the conveying The stress of the belt. In this invention (invention), the guide, W, etc., W 仵 5 is placed on the plane of the conveying belt in the + plane direction, and the sliding displacement and rotational displacement are better (Invention 2). By the displacement of the guide according to this, the movement of the propeller

• The deviation of the conveying belt in the direction orthogonal to the conveying direction (X-axis direction) of the conveying belt (X-axis direction) (Y-axis direction) or the rotation direction ($ direction) about the vertical axis can also be eased. Stress acting on the conveyor belt. In this invention (Invention 2), the guide is preferably provided in a floating state via the elastic body (Invention 3). By providing the guide member with this structure, it is possible to freely displace at least the plane direction of the conveying belt. In this invention (Invention 3), the guide may be provided at a predetermined high-degree position 'to limit the height position of the transport belt (Invention 4). According to the present invention (Invention 4), the positional relationship between the conveying belt and other components (such as a camera, a punching machine, etc.) can be normally maintained at a height other than the portion of the conveying belt that restricts the use of the propeller to move up and down. . In this invention (Invention 4), the guide is preferably placed on a rotating support member (such as a ball caster, etc.) (Invention 5). Therefore, the guide can be freely displaced in the plane direction of the conveying belt, and can be smoothly displaced. In this invention (Inventions 1 to 5), the thruster is structurally transported

2192-7029-PF 200541001 The belt can be used to move the conveying belt in the direction of one thousand faces and / or rotate around the vertical axis of JL; the guide moves in accordance with the movement of the thruster; the conveying belt is displaced at first , So that the moderating effect on the 明 u Ming 6). [Embodiment] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. FIG. 1 shows a φ TCP test apparatus using a Tcp processor according to an embodiment of the present invention. The TCP test device 1 is composed of the following components, a tester body (not shown), a test head 10, and the tester body are electrically connected; and a TCP processor 2 is provided on the test head 10 side. The TCP processor 2 sequentially tests ‘in this embodiment’ for forming each of the plurality of T C Ps on the tape 5 in order to simplify the description and test τ c p one by one. However, the present invention is not limited to this, and a plurality of TCPs arranged in the tandem direction and / or the parallel direction on the conveying belt 5 can be tested simultaneously. # The TCP processor 2 includes a take-up reel 21 and a take-up reel 22, and a carrying belt 5 before the take-up reel 21 1 before the winding test. The conveying tape 5 is drawn out from the take-up reel 21 and is wound around the take-up reel 22 after the test. Between the take-up reel 21 and the take-up reel 22, three spacer rollers 23a, which stretch the protective tape 51 peeled from the self-conveying belt 5 from the take-out reel 21 to the take-up reel 22, are provided. 23b, 23c. Each of the interval rollers 2 3a, 2 3b, and 2 3c can be moved up and down, so that the stress of the protective belt 51 can be adjusted. 2192-7029-PF 8 200541001 A belt guide 24a, an extraction limit roller 仏, an inner sub-groove wheel, and an inner guide wheel 25c are provided on the lower side of the extraction reel 21, and the transportation is carried out by the extraction reel 21 The belt 5 is carried to the propulsion device 3 by being guided by the belt guide 24a via the extraction limit roller * 25a, the inner side sheave grip, and the inner guide roller ... A belt guide 24b, a winding limit roller 25f, an outer auxiliary groove * 25e, and an outer guide roller 之下 are further provided below the winding reel 22, and the conveying belt 5 after the measurement is guided on the guide 24b. The lower side is wound around the winding reel 22 through the outer auxiliary sheave 25e and the outer guide gw of the limit roller 25f for winding. A propulsion device 3 is provided between the inner guide wheel 25c and the outer guide wheel 25d. A first camera 6a is provided on the lower side of the propulsion device 3 (left side in FIG. 丨) (the inner side of the detection card table 7 described later). ) A first camera 6b is provided, and a third camera 6c is not provided on the rear side (right side in FIG. 1) of the propelling device 3. Further, a mark punch 26a and a return punch 26b are set between the propulsion device 3 and the third camera 6c. Brother punching machine 26a punches one or more holes for the TCP according to the test results, and punching machine 26b for returning parts judges the test results as TCP punching of defective products. Each camera 6a, 6b, 6c is connected to an image processing device (not shown). The first camera 6a and the third camera 6c are used to determine the presence or absence of TCP on the conveying belt 5 or the position of the hole of the punch 26a using a mark. Or the number of 'second cameras 6b' is used to obtain information on the positional deviation between the TCP and the probe on the carrying belt 5. The second camera in this embodiment

2192-7029-PF 200541001 6 " Take the position deviation information of plural objects in the field. Camera: made-;, 6 卬 口 "The actuator has a vertical and horizontal direction (X-axis direction) and an up-down direction (Z-axis direction) can be moved on the ~ γ axis diagram. In the body of the TCP processor 2 ㈣Rotating feeding motor 31 = frame 361 ... Let the roller linear motion guide 37 be installed. "It is driven by 2 M in 2 axis directions. Tai cover, # ^^ 才 才干 32 screwed propeller body part, said the drive The servo motor 31 is receiving

Under the guidance of the linear motion guide 37, it can move in the vertical direction (Z-axis direction). The main body of the propeller is connected to the rack (propulsion machine) 36 that propels the Mengjia and into the table 3 using an interlocking mechanism not shown in the figure. ^ The heartbeat mechanism moves up and down as shown above. On the sundial, the left-hand tractor, the & isocentric thruster frame 36 also moves up and down. A suction plate 34 for sucking and holding the belt 5 for conveyance by sucking air is provided at the lower part of the thruster main body. On the front side of the thruster body 33 of the thruster 帛 36 (picture)

On the work side), a tension sheave 35a is provided, and a main sheave 35b is provided on the rear side (right side in FIG. 1) of the propeller body portion 33. The main sheave 35b is driven by a stepping motor or the like, and the conveying belt 5 is conveyed. The tension sheave 35a applies a predetermined stress to the conveying belt 5 by rotating in a direction opposite to the running direction of the conveying belt 5. Use position accuracy with 5. The propulsion device 3 is connected to a propeller table not shown in the figure, and the propeller table 泾 is connected to a servo motor by a ball screw (not shown). By driving the servo motor, the propulsion device 3 can be horizontally (χγ Plane direction)

2192-7029-PF 10 200541001 can be moved ’and the propulsion device can be rotated by 3% of the vertical axis (about the Z axis). On the lower side of the propulsion device 3, the head of the head & the test head carrying〗 〇 0 is installed at the upper part of the detection card table 7 of the card 8. The probe card cup is connected to the feeding motor (omitting ^ R y-, not shown in the figure). Driven by the servo motor, two =: 8 moves in the horizontal direction (χ ”plane direction), and the cardiac test card 8 rotates around the vertical axis ( Rotate around the Z axis). Includes a plurality of probes 81. The test ring is installed for free disassembly (; slightly ^) 8 using a pin on the detection card table 7 D. In addition, the detection card 8 passes through the test head. It is electrically connected to the tester body, and the camera 6b is located within the detection card stage 7 on the lower side of the detection card δ in the TCP test device i, the lower side of the propulsion device 3, and the propulsion device 3 =. = Through the 5 side to the test head ... Up f to support the carrying 5 ... Push the probe 81 of the probe card 8: The response signal read from the TCP is transmitted to the test head U through the test head U, This is used to test the performance or function of TCP, etc. This test is carried out in order by carrying the conveying belt 5 and the conveying belt 5 TCP in turn. Then the king. The hole machine 26a or the punching for returning parts Machine tearing. M drive mark punch [height restriction guide] Figure 2 ~ Figure 5 are shown in the figure! Front view (Figure 2), side view FIG, twice FIG limit ... and, Figure 5 is two and represents the height restricting guide: = (FIG. 4, FIG. 1 explained under the profit.

2192-7029-PF 11 200541001 This TCP processor 2 has a southward-limiting guide 4 (4a, 4b) before and after advancing cluster 3 (left and right in Figure i). The height-limiting guide 4 is arranged on the front side and the rear side of the propulsion device 3 in the carrying direction of the carrying τ 5 (the entrance side and the exit side of the transportation ^ 5), the branch-side transportation belt 5 and the transportation-side belt 5 height. Specifically, the height-limiting guide ^ on the front side restricts the height of the carrying belt 5 when the person advances the equipment s 3, and the height-limiting guide 4b on the rear side limits the south degree when the carrying belt 5 exits from the propulsion device 3. • The height limit guide 4 includes a housing 41 and a pair of upper and lower guide sheaves 42a and 42b in structure, and is provided on a setting table 29 protruding from the main body wall surface of the TCP processor 2 to the front side (refer to the figure) 2 ~ Figure 4). The casing 41 has a rectangular frame shape in a side view. The upper and lower pair of guide sheaves 42a and 42b house the front and rear walls of the housing 41 as bearings in the housing 41 so as to be rotatable. In addition, these guides and Yangs are arranged up and down in the value body 41, and the middle clamp = the branch conveying belt 5 is used, and the conveying belt 5 can be moved in coordination with it: (refer to FIG. 2 and FIG. 3). -Movement + surface-restriction guide 4 is provided with a '& auxiliary guide bow | With the grooved wheels 42a, 42b from the up and down u-axis direction with the rotation axis facing the γ-axis direction), the carrying belt 5 can be moved along the Use the belt 5 to turn in the direction of direction, opening in the X-axis direction (see Figure 丨).哽 方 'On the setting table 29, the height-limiting guide 4 is supported at four points on the bottom surface by using the rotation support member (refer to FIGS. 2 to 41. The rotation support member 43 is formed by, for example, four ball casters 431, and is fixed to

2192-7029-PF 12 200541001 The rotation support member 43 on the opening 29 supports the casing 'I horizontally, so that the locality restriction guide 4 can be smoothly slid in the horizontal direction (displacement in the XY plane direction) And rotational displacement (displacement in the θ direction around the z-axis). In addition, the height-limiting guide 4 is fixed to the setting table 29 by a locking mechanism 44 at the bottom of the casing 41 (see Figs. 3 and 4). The locking mechanism 44 includes a locking pin 441 and an elastic member in structure. The locking mechanism 44 is inserted into a hole 443 provided in a portion of the casing 41 through a locking pin 441, and is fixed to the device 9 to lock the height-limiting guide 4 to the setting table 29. Here, the hole "3" of the sight body 41 is formed to be larger than the diameter of the pin 441, so that the height-limiting guide 4 can be configured to perform sliding displacement and rotational displacement on the setting table 29 within a range of degrees. The stop pin 441 locks the housing 41 to the setting table: the height of the guide 4 limits the displacement of the guide 4 in the vertical direction. Because j = the guide 4 is displaced, the conveying height of the conveying belt 5 is also ^ The stopper mechanism 44 is provided, for example, as an elastic member 44 made of a pole piece: a rubber ring structure "1 and a awning: a pin 441 and sandwiched between the stopper pins. This elastic member 442 functions as a company π degree limit guide 侔 4. π, a cushioning member that reduces the impact caused by the contact between the housings 4i and 41 during the 2 ° displacement of the locking pin 441. In addition, the height limit guide 4 elastically displaces on the setting table 29 (Refer to the figure—stay-hold structure :::::… coil springs 451. The coil springs 451 are mounted on the value body

2192-7029-PF ③ 13 200541001 4 = Between the fixed pin 4 仏 set on the bottom and the 452b set on the setting table ⑼. In addition, these coil springs 451 are installed on the mounting table. 4) 'Two in the Y-axis direction and four in the Z-axis direction (refer to Figure 51 in this state. The force in the contraction direction acts on each coil spring 4 Therefore, high yield = the holding height limit guide back to the X limit guide 4 becomes floating. [Action] In this TCP processor 2, the carrying belt 5 'is pushed to push the lower side of the dream department. At this time, the height Restriction guides 4a and 2 are located at the entrance and exit sides respectively, supporting the second belt 5 at a predetermined height, restricting the transportation belt ^ only for transportation "two degrees, so the normal holding is not = using the belt 5 for the propulsion device 3 ', and for the first camera 6a, the degree: 6C, the punching core for marking and the punching machine for returning parts, push the dream fan q when testing the d-type TCP, or to repair the downward direction ( Z pumping direction) move horizontally and horizontally: ::: wide position deviation and the propulsion device 3 when the material is pushed, " moved, or rotated around the vertical axis (Z axis), the suction wheel and ... ......: The square 5 supporting belt 5 has a deviation in the height limit guide ^ ° in the Y-axis direction or Θ direction. The height-limiting guides 4a, 4h in the floating state: Turn: Support structure ... Smoothly slide the center of displacement: Move, ease the stress of Sakuta ▲, also / 4 get the m-position "" road belt stress. Specifically, borrow着 ^^ 件 4a, 4b on the rotating support member ^ in the direction of the meaning axis, ^

2192-7029-PF 14 200541001 Direction or 0-direction motto, ancient + reversion limit guides 4a, 4b Dong Shi moving i Juntian suspect r support direction changes, 4b on the transport belt 5 Use of band stress. Here, the height-restricted guide AU m u is placed horizontally, and, furthermore, the rotary support member 43 is placed and displaced by a locking mechanism (in the XY plane direction). Therefore, 、 /, are fixed at a predetermined height in the direction of water. In order to adjust the conveying height of the conveying belt 5 to a flexible state, the guides 4a and 4b are changed to f by the coil spring 451 due to the degree restriction, and the elastic retarders 4a and 4b of the coil spring 451 are displaced when the elasticity is changed. The dancing power of 451 returns to the original position (the position before the displacement). Choose as shown above 'If τ according to this embodiment: the height of the floating guide 4 restricts the displacement of the guide 4 so as to relax the force; the force is effectively reduced by the carrying belt 5 7 as the propulsion device 3 moves. Apply stress with band 5. In particular, the case where the 彳 隹 is pushed ##, the propulsion device 3 is adsorbed and supported #the conveying belt 5 = moves in the horizontal direction ⑽ the plane direction) and / or moves around the vertical 轴 axis = moves' can also be used in a floating state The height-limiting guide is reduced, and thus the stress on the carrying belt 5 is applied. In this way, it is possible to prevent the transport belt 5 caused by the stress acting on the transport belt 5: rep (especially the lead or the test base) or the transport belt 5 itself (especially the tension sheave core and the main sheave). The holes and the peripheral parts of the guide claws 42a and 42b are damaged. [Modifications] The embodiments described above are for easy understanding of the present invention.

2192-7029-PF 15 200541001 Γ: It is not intended to limit the present invention. Therefore, each element disclosed in this example is also a design change or equivalent of the king of the technical scope of the present invention. For example, in this TCP process, the rotation support member 43 of the ancient rfe machine 2 southward limit guide 4 纟 4 ball casters 431 structure ^ 2: four-point outline body 41, this structure is stable on the setting table 29 The support body 41 is also capable of smoothly performing sliding displacement and vertical displacement on the settings af «Dingtong, Guainaqian ^ σ29. However, it is not limited to this. The type of the miscellaneous ± moving member 43 or the supporting structure of the casing 41 using the rotating supporting member 43 can be arbitrarily selected within the scope of the self-knowledge of the supplier. Also, in this TCP processor 2, the height-limiting guide 4 :: 4 is constituted by a locking lock "1, but this structure is better for simply locking the body 41 on the setting table. However, it is not It is also possible to limit the construction of the mechanism 44 using a member other than the locking lock 441. The second member 'in the TCP processing machine 2' holding member 45 of the height restriction guide 4 is constituted by a wire spring 451, but it is not limited to this: 45 may be made of an elastic member such as a rubber member. 2 Guide member body 41) The holding member 45 is not provided in the structure shown in Figs. It is also possible to combine the structure of the wall portions of the processing machine 2. The industrial applicability is as shown in the above description.

2192-7029-PF

16 The measurement device of 200541001 ’can cause the deviation of the conveying belt due to the movement of the propeller. It can also reduce the stress on the conveying belt, and can test τ C P on the conveying belt without damage. [Brief Description of the Drawings] FIG. 1 is a front view showing a TCP test device using a Tcp processor according to an embodiment of the present invention. Fig. 2 is a front sectional view of the height-limiting guide of the TCP processor in this embodiment. Fig. 3 is a side sectional view of the height-limiting guide of the TCP processor in this embodiment. Fig. 4 is a plan view of the bottom of the height-limiting guide of the TCP processor of the embodiment. Fig. 5 is a plan view of the height restriction guide of the TCP processor in this embodiment. φ [Description of main component symbols] 2 to TCP processor 5 to transport belt 6 b to second camera 7 to detection card table 1 0 to test head 2 2 to winding reels 24a and 24b to tape guide 25b to Inner sub-groove wheel 25d ~ Outside guide wheel 1 ~ TCP test device 3 ~ Propulsion device 6a ~ First camera 6c ~ Third camera 8 ~ Detection card 21 ~ Extraction reel 23a, 23b, 23c ~ Interval roller 25a ~ Extraction Extreme roller 2 5 c ~ Inner guide wheel 2192-7029-PF 17 200541001 25e ~ Outer auxiliary groove wheel 26a ~ Mark punch 3 1 ~ Servo motor 33 ~ Pusher body 35a, 35b ~ Slot wheel 3 7 ~ Linear motion guide Piece 6 1 ~ Camera table 36b bracket 2 5 f ~ Rolling limit roller 26b ~ Punching machine for returning piece 3 2 ~ Ball screw 3 4 ~ Sucking part 3 6 ~ Propeller frame 51 ~ Protection belt 81 ~ Probe

2192-7029-PF 18

Claims (1)

200541001 10. Scope of patent application: 1 'tape-and-reel packaging processing device, where multiple TCP transports are formed on the household: the propeller will be used at the contact part of the belt, and by " CP = test head is electrically You can test plural TCP in turn. The shuttlecock is connected to the contact part, which is characterized in that the conveying path of the Du Hui belt is / or α on the rear section side is to be broadcasted, and the guide belt is placed on the front section side and the secondary rear side of the delta drive 3. Carrying 燋 + Τ ^ Ή 1 The guide is displaceable at least in the plane direction of the carrying belt. You 2. If the patent application scope is the first Gandou, Zi, heart broom-type packaging processing device, the plane direction of the belt can be used for sliding displacement and rotational displacement. Adaptable / Month 3 · If the patent application scope item 1 is only a tape-and-reel packaging processing device, the guide is set in a floating state via an elastomer. 4. If the scope of patent application is the first! The tape-and-reel packaging processing device of the item, wherein the guide member is disposed at a predetermined position that is at the same degree as the existing position, and restricts the height position for moving. ^ 5. The tape-and-reel packaging processing device according to item 4 of the patent application scope, wherein the guide is placed on the rotating support member. 6 · If the tape-and-reel packaging processing device of item 1 of the declared patent scope, wherein the propeller maintains a belt for transportation in structure, the transportation ▼ can be moved in the plane direction and / or rotated about its vertical axis; The guide is displaced in accordance with the transport belt's movement following the movement of the pusher, so that the stress acting on the transport belt is relaxed. 2192-7029-PF 19