TW200538355A - TCP handler - Google Patents
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- TW200538355A TW200538355A TW094111814A TW94111814A TW200538355A TW 200538355 A TW200538355 A TW 200538355A TW 094111814 A TW094111814 A TW 094111814A TW 94111814 A TW94111814 A TW 94111814A TW 200538355 A TW200538355 A TW 200538355A
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- sheave
- tape
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
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- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
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- General Physics & Mathematics (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
Description
200538355 九、發明說明: 【發明所屬之技術領域】 本發明係有關於在測試係IC元件之一種之τ C P (T a p e200538355 IX. Description of the invention: [Technical field to which the invention belongs] The present invention relates to τ C P (T a p e
Carrier Package)或 C0F(Chip On Film)(以下,將利用 TCP、COF、其他之 TAB(Tape Automated Bonding)組裝技 術所製造之元件總稱為「TCP」)使用之捲帶式封裝處理裝 置。 【先前技術】 在1C元件等電子元件之製程,需要測試最後所製造之 1C元件或位於中間階段之元件等之性能或功能之電子元件 測試裝置,在TCP之情況使用TCP用之測試裝置。 TCP用之測試裝置一般由測試器本體、測試頭以及捲 帶式封裝處理裝置(以下有時稱為「捲帶式封裝處理機」) 構成本捲帶式封裝處理機包括一種功能,搬運在帶(也包 含film之概念。以下一樣。)上形成了複數Tcp之搬運用 帶1搬運用帶麼在和測試頭在電氣上連接之探測卡之探 藉著7 TCP之外部端子接觸探針,依次測試複數。 二種捲帶式封裝處理機一般包括推進器本體,將搬運 用帶壓在探針;及槽輪,主擔搬 桿浐八t牙搬運用帶並搬運該搬運用帶。 玲輪刀為主槽輪,在推進器本體之後段側驅動搬運用帶; =辅助槽輪’在推進器本體之前段側輔助搬運 般主槽輪和步進馬達連接,輔助槽輪和主槽輪同步Carrier Package) or C0F (Chip On Film) (hereinafter, components manufactured using TCP, COF, or other TAB (Tape Automated Bonding) assembly technology are collectively referred to as "TCP") tape and reel packaging processing equipment. [Previous technology] In the process of manufacturing electronic components such as 1C components, it is necessary to test the performance or function of the final manufactured 1C components or components in the middle stage, etc. Electronic component test equipment. In the case of TCP, a test device for TCP is used. The test device used for TCP generally consists of a tester body, a test head, and a tape and reel packaging processing device (hereinafter sometimes referred to as a “tape and reel packaging processing machine”). This tape and reel packaging processing machine includes a function for carrying on the tape. (The concept of film is also included. The following is the same.) A plurality of Tcp transport belts are formed on the 1 transport belt. Is the probe of the probe card that is electrically connected to the test head connected to the probe by 7 TCP external terminals, in order Test plural. The two types of tape-and-reel packaging processing machines generally include a thruster body that presses a conveying tape against a probe; and a sheave wheel, which is a main carrying rod and an eight-tooth conveying belt and conveys the conveying belt. Ling wheel knife is the main sheave, which drives the conveyor belt at the rear side of the propeller body. = Auxiliary sheave 'is connected to the main sheave and stepper motor like the auxiliary conveyance at the front side of the propeller body. The auxiliary sheave and main groove Round synchronization
2192-7030-PF 200538355 可疋’在如上述所示之禮,no也、丄 構仏因無法賦與搬運用帶充 分之張力,在搬運用帶搬運中搬運用帶發出聲響,有盔法 高速搬運搬運用帶之問題,或在令搬運用帶停止時也在搬 運用帶發生鬆弛,TCP無法正確的對準探針之位置之問題。 1又,為了賦與搬運用帶張力,也有強迫的令輔助槽輪 稍被反轉之手法,但是在此情況有賦與搬運用帶過度之應 【發明内容】 本發明鑑於上述之實況,其目的在於提供一種捲帶式 封裝處理裝置,賦與搬運用帶適當之張力,可將搬運用帶 (TCP)正確的定位,而且可抑制搬運中之搬運用2192-7030-PF 200538355 Can be used in the ceremony as shown above, no, and structure can not give sufficient tension to the transport belt, the transport belt makes a sound during the transport of the transport belt, the helmet method high speed The problem of conveying the conveying belt, or when the conveying belt is slack when the conveying belt is stopped, the TCP cannot correctly align the position of the probe. 1 In addition, in order to impart tension to the conveying belt, there is also a method of forcibly reversing the auxiliary sheave slightly. However, in this case, the conveying belt should be excessively applied. [Summary of the Invention] In view of the above situation, the present invention The object is to provide a tape-and-reel packaging processing device, which can impart proper tension to the transport belt, can accurately position the transport belt (TCP), and can suppress the transport during transportation.
響。 I 為達成上述之目的,第一,本發明提供一種捲帶式封 裝處理裝置,在利用搬運裝置搬運下利用推進器將在帶上 形成了複數TCP之搬運用帶壓在和測試頭在電氣上連接之 接觸部,藉著令TCP之外部端子和該接觸部連接,可依·欠 測試複數TCP,其特徵在於:㈣運裝置為了支揮搬運= 帶並令該搬運用帶行走及停止,在該推進器之前段側包 括:第-槽輪,在後段側包括第二槽輪;在該第一槽輪連 接可令該第一槽輪轉動之驅動源;控制該驅動源,使得賦 與6亥第一槽輪及該第二槽輪所支撐之搬運用帶既定之張 (發明1)。 ' 在a卷月(發明1 ),藉著控制第一槽輪之驅動源,不ring. I In order to achieve the above-mentioned object, first, the present invention provides a tape and reel packaging processing device, which uses a propeller to transport a belt with a plurality of TCPs formed on the belt and a test head electrically using a propeller while being transported by a transport device. The contact part of the connection can connect the external terminal of the TCP to the contact part, and the plural TCPs can be tested according to and under-tested. It is characterized in that the transport device transports the belt to support the belt and moves and stops the transport belt. The front side of the thruster includes: a first sheave and a second sheave on the rear side; a drive source connected to the first sheave can be connected to the first sheave; and the drive source is controlled so that 6 The predetermined tension of the transport belt supported by the first sheave and the second sheave (Invention 1). 'In a month (invention 1), by controlling the drive source of the first sheave, not
2192-7030-PF 200538355 !賦:搬運用帶過大之張力,能以適當之張力支樓搬運用 ▼在搬運用帶停止時’可將搬運用帶(tcp)正確的 定位’在搬運搬運用帶時,抑制搬運用帶發出聲響 搬運搬運用帶’進而可接古姐^tffc 1. . , ^ J徒回捲f式封裝處理裝置之處理 度。 /在料明(發明1 ),該驅動源賦與該第—槽輪之轉動 力係方向和4第一槽輪之轉向相反之轉動力較好(發明2)。 在該發明(發明卜2),在該第_槽輪和該驅動源之間 入可吸收振動之連接構件較好(發明3)。 右依據發明(3),在第一槽輪之驅動源之驅動轴發生了 振動’也可在連接構件吸收(未必m㈣收振動。在 本專利說明書相同。)驅動軸之振動後將驅動軸之轉動力傳 =槽輪。因而,第一槽輪之振動減少,有效的抑制該 '^所引起之搬運用帶之發出聲響或搬運用帶(代p)之位 置偏差。 =二’本發明係—種捲帶式封裝處理裝置,在利用搬 運^置搬運下利用推進器將在帶上形成了複數之搬運 用帶壓在和測試頭在電氣上連接之接觸部,藉著令TCP之 夕卜部端子和該接觸部連接,可依次载㈣κρ,其特徵 於.該搬運震置包括:槽輪’設置於該推進器之前段側, 可切搬運用冑;驅動源,可賦與該槽輪轉向和搬運用帶 之仃走方向相反之轉動力;以及連接構件,設於該驅動源 之驅:軸及該槽輪之轉動軸之間,可吸收振動(發明4)。 若依據該發明(發明4),在驅動源之驅動軸發生了振2192-7030-PF 200538355! Fu: Too much tension in the conveying belt can be used to support the building with appropriate tension ▼ When the conveying belt stops, 'the conveying belt (tcp) can be correctly positioned' in the conveying belt At this time, the sound of the conveying belt can be suppressed, and the conveying belt can be further connected to the ancient sister ^ tffc 1.., ^ J to rewind the processing degree of the f-type packaging processing device. / In Mingming (Invention 1), the driving source imparts better rotation force to the direction of the first sheave and the direction of rotation of the first sheave (invention 2). In this invention (Invention 2), it is preferable that a vibration absorbing connection member is inserted between the _th sheave and the driving source (Invention 3). According to the invention (3), the drive shaft of the driving source of the first sheave is vibrated. It can also be absorbed by the connecting member (not necessarily to absorb vibration. The same as in this patent specification.) Rotational power transmission = trough. Therefore, the vibration of the first sheave is reduced, and the sound of the conveying belt or the positional deviation of the conveying belt (generation p) caused by the stress is effectively suppressed. = Two 'The present invention is a tape-and-reel packaging processing device, which uses a propeller to press a plurality of transporting belts formed on the belt to a contact portion electrically connected to the test head by a propeller under the transporting and transportation. The connection between the TCP terminal and the contact part can carry ㈣κρ in sequence, which is characterized in that the transport shock set includes: a grooved wheel is provided on the front side of the thruster, and can be used to cut the transport 胄; the drive source can be A rotation force opposite to the running direction of the sheave steering and conveying belt is imparted; and a connecting member is provided between the drive of the drive source: the shaft and the rotation shaft of the sheave, and can absorb vibration (Invention 4). According to this invention (Invention 4), vibration occurs in the drive shaft of the drive source.
2192-7030-PF 200538355 動,也可在連接構件吸收驅動軸之振動後將驅動軸之轉動 力傳至槽輪之轉動軸。因而,槽輪之振動減少,有效的抑 制該振動所引起之搬運用帶之發出聲響或搬運用帶(Tcp) 之位置偏差。 該發明(發明4),該連接構件係至少在扭曲方向具有 柔軟性之構件較好(發明5)。若依據這種構件,用簡單之 構造可有效的吸收驅動軸之振動。在這種構件上,例如可 使用稱為所謂的彈性聯軸器之聯軸器,但是未限定如此。 在該發明(發明4、5) ’該連接構件係具有摺疊式構造 之構件(發明6)。若依據這種構件,利用摺疊式㈤】觀) 構造可有效的吸收驅動軸之振動,而且可高效率的將驅動 軸之轉動力傳至槽輪之轉動軸。 —在該發明(發明4〜6),該驅動源係扭矩馬達(發明7)。 右依據扭矩馬達,該槽輪之張力賦與之控制係、容^。又, 在驅動源為扭矩馬達之情況,在驅動軸易發生振動,但是 可利用連接構件吸收該振動。 在5亥發明(發明4〜7),該槽輪設置於機架,使得自上 側支撐搬運用帶,在該機架 擇構件(發明8)。 T側支投搬運用帶之帶支 自二=發明(發叫因可利用槽輪及帶支揮構件 兴動W㈣運用帶,有效的防止搬運用帶之無益之 :動’可更馬速的搬運’可令提高捲帶式封裝處理裝置之 處理速度,而且可有效的抑制搬運用帶之位置偏差。 第-,本發明係-種捲帶式封裝處理裝置,在利用搬2192-7030-PF 200538355 can also transmit the rotation force of the drive shaft to the rotation shaft of the sheave after the connection member absorbs the vibration of the drive shaft. Therefore, the vibration of the sheave is reduced, and the noise of the conveying belt caused by the vibration or the position deviation of the conveying belt (Tcp) is effectively suppressed. In the invention (Invention 4), the connecting member is preferably a member having flexibility at least in the twist direction (Invention 5). According to this structure, a simple structure can effectively absorb the vibration of the drive shaft. As such a member, for example, a coupling called a so-called elastic coupling can be used, but it is not limited to this. In this invention (Inventions 4, 5) ', the connection member is a member having a folded structure (Invention 6). According to this kind of structure, the structure of folding type can be used to effectively absorb the vibration of the drive shaft, and the rotational force of the drive shaft can be efficiently transmitted to the rotation shaft of the sheave. -In this invention (Inventions 4 to 6), the drive source is a torque motor (Invention 7). The right is based on the torque motor, the control system and capacity of the sheave tension. When the drive source is a torque motor, vibration is likely to occur on the drive shaft, but the vibration can be absorbed by the connection member. Invented in May (Inventions 4 to 7), the sheave is provided on the frame so that the conveying belt is supported from above, and a member is selected in the frame (Invention 8). The belt support of the T side throwing and conveying belt is from the second invention. (It is called because the use of the sheave and the belt support member can be used to activate the W. The use of the belt effectively prevents the use of the belt. It can be used at a faster speed. The 'transportation' can improve the processing speed of the tape-and-reel packaging processing device, and can effectively suppress the position deviation of the tape for transportation. First, the present invention is a tape-and-reel packaging processing device.
2192-7030-PF2192-7030-PF
200538355 運裝置搬運下利用推進器 用册颅产4、,丄 隹咿上形成了複數TCP之搬運 “在和測試頭在電氣上連接之接觸部,藉著令TCP之 外部端子和該接觸部連接, ^ ^ ^ 了依次測試複數TCP,其特徵 在於該搬運裝置包括槽輪, 寻伐 Μ A 牡茨推進态之前段側及/或後段 側自上側支«運用帶;及機架,切該槽輪;在該機架 設置自下侧支撐、導引搬運用帶之帶支樓構件(發明9)。 若依據該發明(發明9),因可利用槽輪及帶支揮構件 自上下方向支㈣運㈣,有效的防止搬運用帶之無益之 舉動’可更高速的搬運’可令提高捲帶式封裝處理裝置之 處理速度,而且可有效的抑制由槽輪之振動等所引起之搬 運用帶之位置偏差。 在該發明(發明9 ),還包括可吸附保持搬運用帶之吸 附裝置也可(發明1〇)。本吸附裝置可吸附固定利用導引件 抑制了位置偏差之搬運用帶,因此,可易於將被測試Tcp 定位。 【實施方式】 以下,依照圖面詳細說明本發明之實施例。 在圖1表示使用本發明之一實施例之TCP處理機之TCP 測試裝置。 TCP測試裝置1由以下之元件構成,圖上未示之測試 器本體;測試頭1 〇,和測試器本體在電氣上連接;以及TCP 處理機2,設置於測試頭1 〇之上側。200538355 When the transport device is used, the propellers are used to produce cranial products. 4. A plurality of TCP transports are formed on the cymbals. "The contact part that is electrically connected to the test head is connected by the external terminal of the TCP to the contact part. ^ ^ ^ Tested plural TCPs in sequence, which is characterized in that the handling device includes a trough wheel, and the cutting section is in the forward and / or rear section from the upper side. The application belt; and the frame, cut the trough wheel. The frame is provided with a support member (invention 9) for supporting and guiding the belt from the lower side. According to the invention (invention 9), since the sheave and the support member can be used to support from the up and down direction. Operation, effectively preventing the unhelpful move of the conveying belt 'can be transported at a higher speed' can improve the processing speed of the tape-type packaging processing device, and can effectively suppress the conveying belt caused by the vibration of the pulley, etc. This invention (Invention 9) may also include an adsorption device capable of adsorbing and holding a conveying belt (Invention 10). This adsorption device can adsorb and fix the conveying belt whose position deviation is suppressed by using a guide, therefore, It is easy to locate the Tcp to be tested. [Embodiment] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. A TCP test apparatus using a TCP processor according to an embodiment of the present invention is shown in FIG. 1. The TCP test apparatus 1 is composed of the following The component structure is a tester body not shown in the figure; the test head 10 is electrically connected to the tester body; and a TCP processor 2 is provided on the upper side of the test head 10.
TCP處理機2係依次測試在捲帶5上形成複數之各TCP 2192-7030-PF 9 200538355 的,在本實施例,為了簡化說明,逐個測試TCP。但,本 發明未限定如此,也可使得同時測試在搬運用帶5上在争 列方向及/或並列方向排列之複數TCP。 TCP處理機2包括抽出用捲盤21和捲繞用捲盤22,在 抽出用捲盤21捲繞測試前之搬運用帶5。搬運用帶5自抽 出用捲盤21抽出,在測試後捲繞於捲繞用捲盤22。 在抽出用捲盤21和捲繞用捲盤22之間設置將自搬運 用帶5所剝離之保護帶51自抽出用捲盤21架設至捲繞用 Φ 捲盤22之3個間隔滾輪23a、23b、Me。各間隔滾輪23a、 23b、23c各自可上下動,使得可調整保護帶5i之張力。 在抽出用捲盤21之下側設置導帶件24a、抽出用極限 滾輪25a、内側副槽輪25b以及内側導輪25c,自抽出用捲 盤21所抽出之搬運用帶5在導帶件24a導引下經由抽出用 極限滾輪25a、内側副槽輪25b以及内側導輪25c被搬至 推進装置3。 又’在捲繞用捲盤22之下側設置導帶件24b、捲繞用 極限滾輪25f、外側副槽輪25e以及外側導輪25d,測試後 之搬運用帶5在導帶件24b導引下經由捲繞用極限滾輪 25f、外側副槽輪25e以及外側導輪25d被捲繞於捲繞用捲 盤22。 在内側導輪25c和外側導輪25d之間設置推進裝置3, 在推進裝置3之前段側(圖1中左側)設置第一照相機6a, 在推進聚置3之下側(後述之探測卡台7之内側)設置第二 照相機6b ’在推進裝置3之後段側(圖1中右側)設置第三The TCP processor 2 sequentially tests each of the TCP 2192-7030-PF 9 200538355 forming a plurality on the tape 5. In this embodiment, in order to simplify the description, the TCP is tested one by one. However, the present invention is not limited to this, and it is also possible to simultaneously test a plurality of TCPs arranged on the conveying belt 5 in the contention direction and / or the parallel direction. The TCP processor 2 includes a take-up reel 21 and a take-up reel 22, and a transporting belt 5 before the take-up reel 21 is wound-tested. The conveying tape 5 is drawn out from the take-up reel 21 and is wound around the take-up reel 22 after the test. Between the take-up reel 21 and the take-up reel 22, three spaced rollers 23a, which stretch the protective tape 51 peeled from the self-conveying tape 5 from the take-out reel 21 to the take-up Φ reel 22, are provided. 23b, Me. Each of the interval rollers 23a, 23b, 23c can be moved up and down, so that the tension of the protective belt 5i can be adjusted. A belt guide 24a, a pull-out limit roller 25a, an inner sub-groove 25b, and an inner guide wheel 25c are provided below the pull-out reel 21, and the carrying belt 5 drawn from the pull-out reel 21 is provided on the belt guide 24a. Under the guidance, it is carried to the propulsion device 3 via the extraction limit roller 25a, the inner sub-groove 25b, and the inner guide 25c. A belt guide 24b, a winding limit roller 25f, an outer auxiliary sheave 25e, and an outer guide roller 25d are provided below the winding reel 22, and the conveying belt 5 after the test is guided on the belt guide 24b. The bottom is wound on the winding reel 22 via the winding limit roller 25f, the outer sub-groove 25e, and the outer guide pulley 25d. A propulsion device 3 is provided between the inner guide wheel 25c and the outer guide wheel 25d. A first camera 6a is provided on the front side of the propulsion device 3 (left side in FIG. 1), and a lower side of the propulsion set 3 (a detection card platform described later) Inside of 7) A second camera 6b 'is provided on the rear side of the propulsion device 3 (on the right side in FIG. 1).
2192-7030-PF 10 200538355 照相機6 c。又,在推進裝置3和第三照相機6 c之間設置 6己號衝孔機2 6 a及退件用衝孔機2 6 b。 記號衝孔機26a係依照測試之結果對於該tcp在既定 之位置衝1個或複數孔,退件用衝孔機26b係將測試之結 果被判斷為係不良品之TCP沖孔的。2192-7030-PF 10 200538355 Camera 6 c. Further, between the propulsion device 3 and the third camera 6c, a No. 6 puncher 2 6 a and a puncher 2 6 b for ejection are provided. The symbol punching machine 26a punches one or a plurality of holes for the tcp at a predetermined position according to the test result, and the punching machine 26b for returning is judged as the TCP punching of the defective product.
各照相機6a、6b、6c和圖上未示之影像處理裝置連 接,第一照相機6a及第三照相機6c係用以判斷在搬運用 帶5上有無TCP或利用記號衝孔機26a之孔之位置或個數 的,第二照相機6b係用以取得搬運用帶5上之TCP和探針 之位置偏差之資訊的。在本實施例之第二照相機讣可取得 關於視野内之複數對象之位置偏差資訊。 第二照相機6b裝載於照相機工作台61上,利用照相 機工作台61具有之致動器可在平面圖上縱橫方向(X軸 軸方向)及上下方向(z軸方向)移動。 在TCP處理機2之本體部經由托架361安裝可令滾珠 螺桿32轉動之伺服馬達31,而且經由2支z軸方向之線 運動導件37安裝滾珠螺桿32螺合之推進器本體部^。 it:林體部33藉著令驅動伺服馬達31,在受到線性 =導件37導引下可在上下方向(z軸方向)移動。又,推 圖本體^ 33和推進裝置3之機架(推進器機架)36利用 卜 之連動機構連接’如上述所示,推進器本體部33 下動時,隨著推進器機架36也上下動。 伴持本體部33之下端部設置藉著抽空氣可吸附 保持搬運用帶5之吸附板34。Each of the cameras 6a, 6b, 6c is connected to an image processing device not shown in the figure. The first camera 6a and the third camera 6c are used to determine whether there is a TCP on the conveying belt 5 or the position of the hole of the punch 26a using a mark. Or the number, the second camera 6b is used to obtain the information of the position deviation between the TCP and the probe on the carrying belt 5. In the second camera of this embodiment, position deviation information about a plurality of objects in the field of view can be obtained. The second camera 6b is mounted on a camera table 61, and the actuators provided in the camera table 61 can be moved in the vertical and horizontal directions (X-axis direction) and the up-down direction (z-axis direction) in a plan view. A servo motor 31 capable of rotating the ball screw 32 is mounted on the main body of the TCP processor 2 via a bracket 361, and a thruster main body screwed with the ball screw 32 is mounted via two linear motion guides 37 in the z-axis direction. it: The forest body 33 can drive the servo motor 31 to move in the vertical direction (z-axis direction) under the guidance of the linear guide 37. In addition, the pusher body 33 and the rack (propulsor frame) 36 of the propulsion device 3 are connected by a buoy linkage mechanism. As described above, when the pusher body portion 33 moves down, the pusher frame 36 also moves. Move up and down. A suction plate 34 is provided at the lower end portion of the holding body portion 33 to suck and hold the conveyance belt 5 by suction.
2192-7030-PF 11 200538355 在推進裔機架36之推進器本 署棋七 延杰本體部33之前段側(圖丄中 左側)自又置張力槽輪35a,在 1中右側)設置主槽輪35b。以後段側(圖 槽輪-總稱為推進㈣輪35a、有:將張力槽輪35a及主 由和圖上未示之推進器台連接,推進器台經 達和伺服馬達連接(省略圖示),藉著饲服馬 達之焉S動’可令推彳隹缺罢q v推進咸置3在水平方向(XY平面方向)移 而且可7推進裝置3繞垂直軸(繞Z軸)轉動。 在係推進裳置3之下側之測試頭10之上部設置裝載了 探測卡8之探測卡A 7。俨、目,丨本△ π 〗卞口 7。探測卡台7經由多支滾珠螺桿和 馬達連接(省略圖示),藉㈣服馬達之驅動,可令探 測卡8在水平方向(χγ平面方^ 繞垂直軸(繞Ζ轴)轉動。⑴移動’而且可令探測卡8 包括了複數探針81之探測卡8利用銷在探測卡 卡環安裝成自由拆裝(省略圖示)。此外,探測卡8之 針81經由測試頭10和測試器本體在電氣上連接,第二: 相機6b位於係探測卡8之下側之探測卡台7之内側。’、、 在本tcp測試^卜搬運肖帶5,使得通過 装置3之下側’推進裝置3邊吸附•支撐該搬運用帶 向測《式頭1 0上之探測卡8推壓。於是’搬運用帶5上 TCP接觸探測+8之探針81,測試信號作用於TCP,自Tcp 所讀出之響應信號經由測試頭1〇傳至測試器本體。藉 試TCP之性能或功能等。2192-7030-PF 11 200538355 A main groove is set on the front side (left side in the figure) of tension chute 35a on the front side of the thruster of the main frame 36 (the left side in the figure), and the main groove is set on the right side. Round 35b. Rear section side (pictured sheaves-collectively referred to as propulsion sheaves 35a, there are: tension sheaves 35a and the main reason are connected to a propeller table not shown in the figure, and the propeller table is connected to a servo motor (not shown) Through the movement of the feeding motor, the pusher can be moved in the horizontal direction (XY plane direction) and the pusher 3 can be moved in the horizontal direction (XY plane direction) and the 7 propelling device 3 can be rotated about the vertical axis (about the Z axis). A probe card A 7 loaded with a probe card 8 is set on the upper part of the test head 10 on the lower side of the pusher 3. The probe card stand 7 is connected to the motor via a plurality of ball screws and motors. (Not shown), by driving the servo motor, the detection card 8 can be rotated in the horizontal direction (χγ plane square ^ around the vertical axis (z axis). ⑴moving 'and the detection card 8 includes a plurality of probes The probe card 8 of 81 is mounted on the probe card ring with a pin for free disassembly (not shown). In addition, the probe 81 of the probe card 8 is electrically connected via the test head 10 and the tester body. Second: the camera 6b is located at It is the inside of the detection card table 7 on the lower side of the detection card 8. ',, In this tcp test ^ Transport the belt 5 so that it passes through the lower side of the device 3 and the “propulsion device 3” absorbs and supports the conveying belt to push the detection card 8 on the measuring head 10. Therefore, the TCP contact detection on the conveying belt 5+ 8 probe 81, the test signal acts on TCP, and the response signal read from Tcp is transmitted to the tester body through the test head 10. Test the performance or function of TCP.
藉著搬運搬運用帶5,對於搬運用帶5上之全部之Tcp 2192-7030-PF 12 200538355 依次進行這種測試。然後,依照測試結果驅動記號衝孔機 26a或退件用衝孔機26b。 [推進裝置] 圖2係圖1所示之tcp處理機之推進裝置之正視圖。 如上述所示,在推進裝置3之在推進器機架36之推進 器本體部33之前段側設置張力槽輪35a,在後段側設置主 槽輪35b。 —…^⑺3止轉及反轉之一般為步進馬達之主 驅動源驅動,以既定間隔搬運搬運用帶5。而,張力槽輪 35a藉著利用後述之驅動裝置在搬運用帶5之行走方向施 加負荷,對搬運用帶5賦與既定之張力。利用Tcp處理機 2之控制部(省略圖示)控制這些槽輪35a、35b之驅動。 …、、樣張力槽輪35a及主槽輪35b自推進器本體33 之兩側將搬運用帶拉直,令提高搬運用帶5之位置精度。 在測°式TCP時,利用推進器本體部33下端部之吸附板 支樓搬運用帶5下,推進裝置3向二輪,及主槽輪35b 向下方移動,將搬遂用恶 5壓在探測卡8,令搬運用帶5 針81。 上之TCP接觸探測卡8之探 [張力槽輪之驅動裝置] 圖3係在圖2所示之推進 之側視圖。圖4係在圖3 & - ^ ^㈢輪之驅動裝置 τ #固d所不之驅 體圖。 居置之連接構件之立 張力槽輪35a之驅動裝置 乂上包含驅動源41、By carrying the carrying belt 5, this test is sequentially performed on all the Tcp 2192-7030-PF 12 200538355 on the carrying belt 5. Then, the mark punch 26a or the ejection punch 26b is driven in accordance with the test result. [Propulsion device] Fig. 2 is a front view of the propulsion device of the TCP processor shown in Fig. 1. As described above, the tension sheave 35a is provided on the front side of the thruster body portion 33 of the thruster frame 36 of the propulsion device 3, and the main sheave 35b is provided on the rear side. —... ^ ⑺3 Generally, the rotation stop and reverse rotation are driven by the main drive source of the stepper motor, and the conveyor belt 5 is transported at a predetermined interval. The tension sheave 35a applies a load in the traveling direction of the conveyance belt 5 by a drive device described later, and applies a predetermined tension to the conveyance belt 5. The control unit (not shown) of the Tcp processor 2 controls the drive of these sheaves 35a, 35b. …, The sample tension sheave 35a and the main sheave 35b straighten the conveying belt from both sides of the propeller body 33 to improve the positional accuracy of the conveying belt 5. In the measurement of the TCP type, the suction plate supporting belt 5 for the lower end of the propeller body 33 is used, the propelling device 3 is moved to the second wheel, and the main groove wheel 35b is moved downward. Card 8, make the strap 5 pins 81 for transportation. Probe on the TCP contact detection card 8 [Drive device of tension sheave] FIG. 3 is a side view of the advance shown in FIG. 2. Fig. 4 is a driving diagram of the driving device τ # 固 d in Fig. 3 &-^ ^ ㈢ wheel. The driving device 张力 of the tensioning sheave 35a of the standing connecting member includes a driving source 41,
2192-7030-PF 200538355 制動構件42、連接構件43、筐體44以及轉動軸45。 ^動源41係供給驅動軸4丨丨方向和搬運用帶5之搬運 W 〃反之轉動力(扭矩)之扭矩馬達。可依據輸入驅動源 電壓等控制供給驅動軸4丨丨之扭矩之大小。本驅動源 -置成驅動車由41 j自推進器機架%之背面側插入筐體 驅動軸411經由中間齒輪46、47和轉動軸45連結。 在本實施例之制動構件42在推進器機架%之背2192-7030-PF 200538355 Brake member 42, connection member 43, housing 44 and rotation shaft 45. ^ Motion source 41 is a torque motor that supplies the direction of the drive shaft 4 and the conveyance of the conveying belt 5 〃 Conversely, the rotational force (torque). The amount of torque supplied to the drive shaft 4 丨 丨 can be controlled according to the input drive source voltage and the like. This driving source-The driving vehicle is inserted into the housing from the rear side of the propeller frame% 41. The driving shaft 411 is connected via intermediate gears 46 and 47 and the rotating shaft 45. The brake member 42 in this embodiment is on the back of the propeller frame.
裝在轉動軸45,在非通電日丰彡尸姓π 令 牡非逋電時握持轉動軸45而保持轉動軸 之停止位置,在通電時可解除該握持。 351自推進器機架36 利用該軸承352支撐 而,張力槽輪35a藉著其轉動軸 之前面側插入筐體44内之軸承352 , 成自由轉動。 在此’驅動源41側之輕叙缸/ c ^ A 褥動軸45和張力槽輪35a之韓 動軸3 51經由連接構# 4 q、* ㈣件43連接°本連接構件43係具有吸 收振動之功能的,例如,使 及 伐萌万向具有柔軟性之構 件(所明的彈性聯轴器)。在本實施例,採用如圖3及圖* P =摺4式㈤―)聯_。但連接構件43未限定如 此’例如也可使用彈性構侔 稱件黏性構件等避振構件。 在搬運用帶5停止時,主摊仏Qcu必 ㈢輪35b將主槽輪35b支撐 之搬運用帶5保持在停止& ^ …椒 Τ止狀怨。而,驅動源41因供給驅動 軸411方向和搬運用帶5之搬遠 您搬運方向相反之扭矩,經由中 間齒輪46、47、連接構件、 、、田甲 構件43以及轉動軸35卜張力槽輪It is mounted on the rotating shaft 45, and holds the rotating shaft 45 to maintain the stop position of the rotating shaft when the electric power is not applied to the Japanese corpse surname π. When the electric power is not applied, the holding can be released when the power is turned on. The 351 self-propeller frame 36 is supported by this bearing 352, and the tension sheave 35a is inserted into the bearing 352 in the housing 44 through the front side of the rotation shaft, so that it can rotate freely. Here, the light cylinder of the drive source 41 side / c ^ A mattress moving shaft 45 and tension groove pulley 35a of the Korean moving shaft 3 51 are connected via the connection structure # 4 q, * ㈣ 件 43 ° This connection member 43 has absorption The function of vibration is, for example, a flexible member (known as an elastic coupling). In this embodiment, as shown in FIG. 3 and FIG. However, the connection member 43 is not limited to this. For example, a vibration-damping member such as an elastic member or a sticky member may be used. When the conveying belt 5 is stopped, the main booth Qcu must hold the conveying belt 5 supported by the main sheave 35b at the stop & ^ ... In addition, the drive source 41 is supplied to the drive shaft 411 in the direction away from the conveyance belt 5. The torque in the opposite direction to your conveyance direction passes through the intermediate gears 46, 47, the connecting member, the spar arm member 43, and the rotation shaft 35.
2192-7030-PF2192-7030-PF
14 200538355 35a在向和搬運用f 5之搬運方向反方向拉搬運用帶看 起來處於停止狀態)。在此,藉著控制供給驅動源41之電 壓等,可將供給驅動軸411之扭矩控制成所要之大小。因 而,可賦與搬運㈣5既定之張力,可防止搬運用帶5發 生位置偏差,使TCP易於定位。 在搬運用帶5之搬運時,主槽輪挪利用主驅動源令 主槽輪35b支樓之搬運用帶5在搬運方向(圖】及圖2中右 方向)移動。藉著搬運用帶5之搬運,正轉方向之力作用於 和主槽輪35b—起支樓搬運用帶5之張力槽輪35a。而, 驅動源41供給驅動軸411方向和搬運用帶5之搬運方向相 反之扭矩。但,該反方向之扭矩之大小因比主槽輪 主驅動源驅動主槽㉟351)之扭矩之大小小 5之搬運,張力槽们53之轉動轴351、連接構件4運3^ 間齒輪46、47以及驅動源41之驅動轴411在驅動源41之 扭矩作用之狀態朝正轉方向轉動。結果,賦與搬運用帶5 =定之張力,㈣m利帶5發出聲f,高速搬運搬運用 帶5,進而可提高TCP處理機2之處理速度。 如上述所示,若依據張力槽輪35a及主槽輪挪,在 運用帶5之搬運中及停止中,都可職與搬運用帶5既定 ^張力。搬運用帶5之張力之最適當值依據搬運用帶5之 厚度、寬度、強度等;TCP之重量、大小等;搬運速度等 =二藉著將供給張力槽輪35a之驅動源41之電壓等控制 成无疋之大小,可調整搬運用帶5之張力。因而,不合賦 與搬運用帶5之槽孔過度之應力,能以適當之張力支標搬14 200538355 35a Pulls the conveying belt in the opposite direction to the conveying direction of conveying f 5 (it appears to be stopped). Here, by controlling the voltage and the like supplied to the drive source 41, the torque supplied to the drive shaft 411 can be controlled to a desired magnitude. Therefore, it is possible to apply a predetermined tension to the conveyance ㈣5, to prevent positional deviation of the conveyance belt 5, and to make TCP easy to locate. When the conveying belt 5 is conveyed, the main sheave moves the main conveyance belt 5 to move the conveying belt 5 in the conveyance direction (picture) and the right direction in FIG. 2 using the main driving source. By the conveyance of the conveying belt 5, the force in the forward direction acts on the main sheave 35b and the tension sheave 35a of the branch conveying belt 5. The drive source 41 supplies torque in the direction opposite to the direction of the drive shaft 411 and the conveyance direction of the conveyance belt 5. However, the magnitude of the torque in the opposite direction is smaller than the magnitude of the torque of the main sheave driving source driving the main groove 351). The rotation shaft 351 of the tension grooves 53 and the connecting member 4 transport 3 ^ gears 46, 47 and the drive shaft 411 of the drive source 41 rotate in the forward direction in a state where the torque of the drive source 41 acts. As a result, the conveying belt 5 is given a constant tension, the 利 m sharp belt 5 emits a sound f, and the conveying belt 5 is conveyed at a high speed, so that the processing speed of the TCP processor 2 can be increased. As described above, if the tension sheave 35a and the main sheave are moved, the belt 5 can be set to a predetermined tension during the transportation and stop of the use of the belt 5. The optimum value of the tension of the conveying belt 5 depends on the thickness, width, strength, etc. of the conveying belt 5; the weight and size of TCP; the conveying speed, etc. = the voltage of the drive source 41 to be supplied to the tension sheave 35a, etc. It can be controlled to have the size without slack, and the tension of the conveying belt 5 can be adjusted. Therefore, excessive stress is not applied to the slot of the conveying belt 5, and it can be moved with an appropriate tension support.
2192-7030-PF 15 200538355 運用帶5。此外,在控制上考慮搬運用帶5或驅動系之慣 性力矩,按照搬運速度、搬運開始、搬運停止等搬運條件 之變更適當的變更供給驅動源41之電壓等也可。 在此,依據供給驅動源41之驅動軸411之扭矩之大小 等,在驅動軸411可能發生振動,該振動經由中間齒輪、 47傳至轉動軸45。這種振動經由張力槽輪35a傳至搬運中 之搬運用帶5時,成為搬運用帶5發出聲響或發生位置偏 差之原因。 可是,在本實施例,因可吸收振動之連接構件43位於 轉動軸45和張力槽輪35a之轉動軸351之間,利用連接構 件43吸收該振動後,將轉動軸45之轉動力傳至張力槽輪 35a之轉動軸351。 在本實施例,因在連接構件43上使用摺疊式聯軸器, 有效的吸收該轉動軸45之振動,而且將轉動軸45之轉動 力高效率的傳至張力槽輪353之轉動軸351。 照這樣,係在驅動源41之驅動軸411發生了振動之情 況,也抑制該振動傳至張力槽輪35a,因此,有效的抑: 張力槽輪35a之振動所引起之搬運用帶5之發出聲響或位 置偏差。 S / 此外’在本實施例之TCP處理機2,驅動裝置4之連 接構件43係摺疊式聯軸器,這種構造在轉動力自轉動軸 45傳至張力槽輪35a時,在有效的吸收轉動軸45之振動 上車Λ好。可是,未限定如此,本業者在自知之範圍内可任 思的選擇連接構件4 3之材質及形狀•構造。具體而言,連2192-7030-PF 15 200538355 Application Band 5. In addition, the inertia moment of the conveying belt 5 or the drive system may be considered in control, and the voltage supplied to the driving source 41 may be appropriately changed in accordance with changes in the conveying conditions such as the conveying speed, the start of conveyance, and the stop of conveyance. Here, depending on the magnitude of the torque of the drive shaft 411 supplied to the drive source 41, vibration may occur in the drive shaft 411, and this vibration is transmitted to the rotation shaft 45 via the intermediate gears 47. When such vibration is transmitted to the conveying belt 5 through the tension sheave 35a, the sound may be caused by the conveying belt 5 or a positional deviation may occur. However, in this embodiment, the vibration-absorbing connection member 43 is located between the rotation shaft 45 and the rotation shaft 351 of the tension sheave 35a. After the connection member 43 absorbs the vibration, the rotation force of the rotation shaft 45 is transmitted to the tension. The rotation shaft 351 of the sheave 35a. In this embodiment, since a folding type coupling is used on the connecting member 43, the vibration of the rotation shaft 45 is effectively absorbed, and the rotation force of the rotation shaft 45 is efficiently transmitted to the rotation shaft 351 of the tension sheave 353. In this way, even if the drive shaft 411 of the drive source 41 vibrates, the vibration is also suppressed from being transmitted to the tension sheave 35a. Therefore, the transmission belt 5 caused by the vibration of the tension sheave 35a is effectively suppressed. Sound or position deviation. S / In addition, in the TCP processor 2 and the connecting member 43 of the driving device 4 of this embodiment are folding couplings, this structure effectively absorbs the rotational force transmitted from the rotating shaft 45 to the tension sheave 35a. The vibration of the rotation shaft 45 is good for getting on the car. However, it is not limited to this, and the supplier can arbitrarily select the material, shape, and structure of the connecting member 43 within the scope of his own knowledge. Specifically, even
2192-7030-PF 16 200538355 接構件43只畏係因扭曲負載等而變形後可吸收轉動軸45 之振動的即可。例如,連接構件43係由橡膠構件構成之單 純之柱狀構件也可,係由樹脂系材料構成之蛇腹狀構件也 可’係由金屬材料構成之線圈構件也可(省略圖示)。 [推進裝置之帶支撐構件] 圖5及圖6係圖2所示推進裝置之帶支撐構件之側視 圖(圖5)及之立體圖(圖6)。 在本實施例之TCP處理機2,如圖2所示,在推進裝 置3之推進器機架36之推進器本體33和張力槽輪之 間及推進器本體33和主槽輪35b之間設置一對帶支撐構件 39a、39b,利用這些帶支撐構件39a、39b自下方支撐搬運 用帶5。 运些帶支撐構件39a、39b具有在側面圖上近似L字形 形狀’設置成在其垂直部固定於推進器機帛36之壁面,而2192-7030-PF 16 200538355 Forty-three connecting members can absorb vibration of the rotating shaft 45 after being deformed due to torsional load or the like. For example, the connection member 43 may be a simple columnar member made of a rubber member, or a bellows member made of a resin material, or a coil member made of a metal material (not shown). [Band support member of propulsion device] Fig. 5 and Fig. 6 are a side view (Fig. 5) and a perspective view (Fig. 6) of the belt support member of the propulsion device shown in Fig. 2. As shown in FIG. 2, the TCP processor 2 of this embodiment is provided between the thruster body 33 and the tension sheave of the thruster frame 36 of the pushing device 3 and between the thruster body 33 and the main sheave 35 b. A pair of belt support members 39a and 39b are used to support the conveyance belt 5 from below using these belt support members 39a and 39b. These belt supporting members 39a, 39b have an approximately L-shape in a side view, and are provided so as to be fixed to a wall surface of the propeller unit 36 at a vertical portion thereof, and
且令其水平部向推進器機架36之前面側(Y軸方向)突 (參照圖5、圖6)。 AAnd the horizontal part is made to protrude toward the front surface side (Y-axis direction) of the thruster frame 36 (refer FIG. 5, FIG. 6). A
又,在帶支撐構件39a、39b之水平部之上面側形成槽 使知在搬運用帶5所形成之Tcp之外部端子和帶支撐 構件39a、39b不接觸。本帶支撐構件_、_具有自下 側支撐、導引搬運之搬運用帶5之功能。 在本T C P處理機2,你、富m册r 搬運用帶5架設於帶支撐構件 39a、39b上並自下相丨|古神 I 圖2),而且在這些帶支禮 構件3 9 a、3 9 b之前與而,丨这/么饥 幻及後&側自上側利用推進器槽輪 3 5a、3 5b支撐。於是,因在 U在推進裝置3附近自上下方向支Further, a groove is formed on the upper surface side of the horizontal portions of the belt supporting members 39a, 39b so that the external terminals of the Tcp formed in the conveying belt 5 and the belt supporting members 39a, 39b do not contact each other. This belt support member _, _ has a function of the conveying belt 5 which supports and guides the conveyance from the lower side. In this TCP processor 2, you and 5m carrying belts 5 are mounted on the belt supporting members 39a, 39b and are bottomed down || God I Figure 2), and these belt supporting members 3 9 a, 3 9 b before and after, 丨 this / me hungry and back & side from the upper side using the propeller sheaves 3 5a, 3 5b support. Therefore, since U is supported in the vertical direction near the propulsion device 3
2192-7030-PF 17 200538355 5之無盈之舉動,可更高速 2之處理速度。又,若如上 驅動源41之振動傳至張力槽 帶5發出聲響或發生位置偏 撐搬運用帶5’防止搬運用帶 的搬運’可令提高TCP處理機 述所示之來自張力槽輪35a之 輪35a ’也有效的抑制搬運用 差。2192-7030-PF 17 200538355 5 non-profitable action, can be faster 2 processing speed. In addition, if the vibration of the drive source 41 is transmitted to the tension groove belt 5 as described above, a sound is generated or a positional deviation occurs. The wheel 35a 'also effectively suppresses poor handling.
此外推進器本體33之吸附板以在測試時藉著 吸附保持搬運用帶5固定搬運心5,使被測試Tcp易於 定位,但在搬運„ 5發出聲響之狀態,可能無法安定的 吸附。可是,利用推進器槽輪35a、35b及帶支撐構件恤、 39b自上下方向支撐搬運㈣5,因抑制搬運用帶發出聲 響,吸附板34安定的吸附搬運用帶5,有效的抑制搬運用 帶5之位置偏差。因而’可將被測試Tcp正確的定位。 此外,在本實施例之TCP處理機2,設置一對帶支撐 構件39a、39b,因利用這些帶支律構件_支撲搬 運用帶5,比只設置一個帶支撑構件39之構造安定的支樓 搬運用帶5。^而,更有效的抑制搬運用帶發出聲響或發 生位置偏差。 但,本發明未限^如此,只設置—個帶支撑構件⑽也 可,設置更複數帶支#構件39也可。又,帶支撑構件Μ 之形狀未限定為在側面圖上近似L字形形狀。 工業上之可應用性 如以上之說明戶斤丨,若依據纟發明之捲帶式封震處理 裝置,賦與搬運用帶適當之張力,可將搬運用帶(Tcp)正確 2192-7030-PF 18 200538355 的定位,而且可抑制搬運中之搬運用帶發出聲響,可正確 而且以快速之處理速度測試TCP。 【圖式簡單說明】 圖1係表示使用本發明之一實施例之TCP處理機之TCP 測試裝置之正視圖。 圖2係在該實施例之TCP處理機之推進裝置之正視圖。 圖3係在該實施例之TCP處理機之張力槽輪之驅動裝 置之剖面圖。 圖4係表示在該實施例之TCP處理機之連接構件之立 體圖。 圖5係表示在該實施例之TCP處理機之帶支撐構件之 側視圖。 圖6係表示在該實施例之TCP處理機之帶支撐構件之 立體圖。 【主要元件符號說明】 1〜T C P測試裝置、 2〜TCP處理機、 3〜推進裝置、 5〜搬運用帶、 6a〜第一照相機、 6 b〜第一照相機、 6 c〜第三照相機、 7〜探測卡台、 8〜探測卡、 1 0〜測試頭、 21〜抽出用捲盤、 22〜捲繞用捲盤、 23a、23b、23c〜間隔滾輪、 24a、24b〜導帶件、In addition, the suction plate of the propeller body 33 is used to hold the conveying core 5 by holding the conveying belt 5 during the test, so that the Tcp to be tested is easily located. However, in the state of sound when the conveyance 5 is made, stable suction may not be possible. However, The propeller sheaves 35a, 35b, and the belt support member shirts 39b support the conveyance ㈣5 from the up and down direction. Since the sound of the conveyance belt is suppressed, the suction plate 34 is stabilized to adsorb the conveyance belt 5, which effectively suppresses the position of the conveyance belt 5. Deviation. Therefore, the Tcp to be tested can be correctly positioned. In addition, the TCP processor 2 of this embodiment is provided with a pair of belt supporting members 39a, 39b, because these belt supporting members _ support flap belt 5, It is more effective than a single branch supporting belt 5 with a stable structure than a belt support member 39. However, it is more effective to suppress the sound or positional deviation of the belt for transportation. However, the present invention is not limited to this, only one belt is provided. The support member may be provided, and a plurality of belt support members # 39 may be provided. In addition, the shape of the belt support member M is not limited to an approximately L-shape in a side view. The industrial applicability is as described above. Households 丨 If the tape-type shock-sealing device according to the invention is given proper tension to the transport belt, the transport belt (Tcp) can be correctly positioned 2292-7030-PF 18 200538355, and the transportation can be suppressed. The carrying belt makes a sound, which can test TCP correctly and at a fast processing speed. [Brief description of the figure] FIG. 1 is a front view showing a TCP testing device using a TCP processor according to an embodiment of the present invention. A front view of the propulsion device of the TCP processor in this embodiment. Fig. 3 is a cross-sectional view of the driving device of the tension groove sheave of the TCP processor in this embodiment. Fig. 4 shows the TCP processor in this embodiment. A perspective view of a connecting member. Fig. 5 is a side view showing a supporting member with a TCP processor in this embodiment. Fig. 6 is a perspective view showing a supporting member with a TCP processor in this embodiment. [Description of main component symbols] 1 ~ TCP test device, 2 ~ TCP processor, 3 ~ propulsion device, 5 ~ carrying belt, 6a ~ first camera, 6b ~ first camera, 6c ~ third camera, 7 ~ detection stage, 8 ~probe Cards, 10 to test heads, 21 to reels for withdrawal, 22 to reels for winding, 23a, 23b, 23c to spacer rollers, 24a, 24b to tape guides,
2192-7030-PF 19 200538355 2 5 a〜抽出用極限滾輪、 2 5 b〜内側副槽輪、 25c〜内側導輪、 25d〜外側導輪、 2 5 e〜外側副槽輪、 25f〜捲繞用極限滚輪、 26a〜記號衝孔機、 26b〜退件用衝孔機、 # 27〜支撐構件、 32〜滾珠螺桿、 33〜推進器本體、 34〜吸附部、 35a、35b〜槽輪、 36〜推進器機架、 37〜線性運動導件、 51〜保護帶、 61〜照相機工作台、 81〜探針。 〜伺服馬達、 2192-7030-PF 202192-7030-PF 19 200538355 2 5 a ~ Extraction limit roller, 2 5 b ~ inside auxiliary sheave, 25c ~ inner guide, 25d ~ outer guide, 2 5e ~ outer auxiliary groove, 25f ~ winding With extreme rollers, 26a ~ mark punching machine, 26b ~ return punching machine, # 27 ~ supporting member, 32 ~ ball screw, 33 ~ propeller body, 34 ~ adsorption section, 35a, 35b ~ groove, 36 ~ Thruster frame, 37 ~ Linear motion guide, 51 ~ Protective belt, 61 ~ Camera table, 81 ~ Probe. ~ Servo motor, 2192-7030-PF 20
Claims (1)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2004/006680 WO2005109016A1 (en) | 2004-05-12 | 2004-05-12 | Tcp handler |
Publications (1)
Publication Number | Publication Date |
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TW200538355A true TW200538355A (en) | 2005-12-01 |
Family
ID=35320340
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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TW094111814A TW200538355A (en) | 2004-05-12 | 2005-04-14 | TCP handler |
Country Status (4)
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JP (1) | JPWO2005109016A1 (en) |
CN (1) | CN100570385C (en) |
TW (1) | TW200538355A (en) |
WO (1) | WO2005109016A1 (en) |
Families Citing this family (1)
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JP2008224399A (en) * | 2007-03-13 | 2008-09-25 | Yokogawa Electric Corp | Autohandler |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS557520U (en) * | 1978-06-28 | 1980-01-18 | ||
JPS6012725U (en) * | 1983-07-04 | 1985-01-28 | 篠塚 欣三 | flexible shaft coupling |
JP3030410B2 (en) * | 1993-11-22 | 2000-04-10 | 安藤電気株式会社 | Correction method of eccentricity effect of sprocket for moving TAB tape |
JP3413976B2 (en) * | 1994-07-18 | 2003-06-09 | 日立電子エンジニアリング株式会社 | TCP test equipment |
JPH10142292A (en) * | 1996-11-13 | 1998-05-29 | Hitachi Electron Eng Co Ltd | Device for detecting service life of probe card of tcp(tape carrier package) tester |
JP2002107410A (en) * | 2000-09-29 | 2002-04-10 | Ando Electric Co Ltd | Tab automatic handler |
JP2002286798A (en) * | 2001-03-27 | 2002-10-03 | Ando Electric Co Ltd | Handler for tcp |
-
2004
- 2004-05-12 CN CNB2004800430112A patent/CN100570385C/en not_active Expired - Fee Related
- 2004-05-12 JP JP2006512911A patent/JPWO2005109016A1/en active Pending
- 2004-05-12 WO PCT/JP2004/006680 patent/WO2005109016A1/en active Application Filing
-
2005
- 2005-04-14 TW TW094111814A patent/TW200538355A/en unknown
Also Published As
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JPWO2005109016A1 (en) | 2008-03-21 |
CN1954222A (en) | 2007-04-25 |
CN100570385C (en) | 2009-12-16 |
WO2005109016A1 (en) | 2005-11-17 |
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