JP3030410B2 - Correction method of eccentricity effect of sprocket for moving TAB tape - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a TAB (Tape Automated Bonding) autohandler, in which when a TAB moving sprocket rotates to convey a TAB tape, the rotation axis of the sprocket is eccentric. This is a method for correcting the influence of the variation in the pitch feed amount of the TAB tape.

[0002]

2. Description of the Related Art A TAB auto-handler is a device for automatically transporting a TAB tape wound on a reel to a measurement position automatically and automatically sorting the TAB tape based on a test result of an IC tester. The precise positioning mechanism of the TAB and the electrode is described in Japanese Utility Model Application Laid-Open No. 64-34576, Japanese Utility Model Application Laid-Open No. 1-163335, Japanese Patent Application No. 2-106251, and the like.

Next, the configuration of a TAB tape auto-handler according to the prior art will be described with reference to FIG. 1 and 2 in FIG.
Is a sprocket, 3 is a TAB tape, 4 is a camera for image processing, 6 is a probe card, 9 is a tape clamp, 1
0 is a pusher, 11 is a supply reel, 12 and 13 are tension pulleys, 14 is a storage reel, 15 is a test head of an IC tester, and 16 is an attachment unit.

[0004] The TAB tape 3 is fed by the pitch of TAB as the sprockets 1 and 2 rotate synchronously, and moves from the supply reel 11 in the order of the tension pulley 12, the sprockets 1 and 2, the tension pulley 13, and the storage reel 14. .

[0005] The positioned TAB tape 3 is lowered to the contact position by the pusher 10 and the tape clamp 9 and pressed against the contact of the probe card 6. With the TAB tape 3 pressed against the contact, a test start request signal is sent to the tester, and the test of the IC tester is started. After the test, if the result transmitted from the tester is an open failure (the test pad of the TAB and the needle of the probe card 6 are not in contact due to a displacement or the like), the image data from the camera 4 is captured at this position. , The correction amount of the position of the TAB tape 3 is calculated. After capturing the image data, the tape clamp 9 and the pusher 10 are raised, corrected and lowered again, the TAB tape 3 is pressed against the probe card 6, and a test start request signal is sent to the tester again. After the test, the tape clamp 9 and the pusher 10 are raised by the test end signal, the sprockets 1 and 2 rotate, and the TAB tape 3 is sent to the next TAB.

In FIG. 5, the TAB tape 3 is fed from the left side to the right side in FIG. 5 by rotating the sprockets 1 and 2 in a counterclockwise direction. In FIG. 5, since an excessive force is not applied to the TAB tape 3, the TAB tape 3 is bent before the pusher 10 descends. In order to measure the deflection of the TAB tape 3, the rotation of the sprocket 2 is stopped and the sprocket 1 is reversely rotated clockwise in FIG.

[0007] The above-mentioned applicant has disclosed a mechanism for removing the deflection at the time of measuring the TAB tape in Japanese Utility Model Application No. 1-131293.
By adopting this deflection removing mechanism in the device, the TA
B test pad and probe of probe card 6 are ± 60
A positioning accuracy of μm is ensured. In this specification, the process of positioning the TAB by moving the sprocket 1 in the direction opposite to the traveling direction is referred to as a back tension process, and the correction amount is referred to as a back tension amount. In FIG. 5, the alignment function shown in FIG. 6 is required to align the TAB with an accuracy higher than the alignment accuracy of ± 60 μm.

Next, the means for positioning the TAB tape 3 will be described with reference to FIG. FIG. 6A is a configuration diagram of the position correction mechanism. The sprockets 1 and 2, the tape clamp 9 and the pusher 10 shown in FIG. 6 are integrally disposed on the XY stage 7.

FIG. 6A is a pattern diagram of the TAB tape 3, and has a reference mark 3A at one corner of the pattern diagram. An IC chip 3B is mounted in the center, and test pads 3C connected to the IC chip in a pattern on both sides of the IC chip 3B.
Is arranged. 6A is continuously formed on the TAB tape 3 at regular intervals. The unit of the pattern diagram in FIG. 6A is called TAB.

In FIG. 6, the position of TAB is corrected by the following procedure. First, the tape clamp 9 and the pusher 10 are lowered to the contact position. Next, the camera 4 is moved to T
The contact state between the test pad 1C of the AB tape 3 and the probe 6A of the probe card 6 is confirmed by the camera 4. Next, the tape clamp 9 and the pusher 10 are raised. Next, the probe card 6 is slightly moved or the sprockets 1 and 2 are slightly rotated so that the contact end of the probe 6A is located at the center of the test pad 3C, and the position is corrected.

Next, the reference mark 3A is imaged by the camera 4, and the imaged data is stored in the apparatus. This imaging data is T
This is a reference for the position where the AB tape 3 and the probe card 6 come into contact. When the apparatus operates, the camera 4 captures an image of the reference mark 3A and compares it with the reference image data. Next, a correction value is calculated from the comparison value, and the XY stage 7 is moved to align the TAB test pad 3C with the probe 6A. In FIG. 6, since the alignment function is employed, positioning can be performed with high accuracy within ± 10 μm. In addition,
5 and 6 show FIGS. 2 and 3 described in Japanese Patent Application No. 3-14672.
And technically the same.

[0012]

Next, the effect of the eccentric rotation center of the sprockets 1 and 2 in FIG. 5 will be described with reference to FIGS. 7 and 8. FIG. A of FIG. 7 is a sprocket 2.
Is the center of a circular plate, N is the rotation center of the sprocket 2, and e is the amount of eccentricity. In FIG. 7, for ease of explanation, the center A and the rotation center N are on the same vertical line,
It is assumed that rotation starts. In FIG. 7, it is assumed that the sprocket 2 makes one rotation and measures TAB four times.

In the state shown in FIG. 7A, TAB is measured at a regular position. When the sprocket 2 rotates 90 degrees from the state of FIG. 7A, the state of FIG. In FIG. 7A, the TAB tape 3 advances from the normal measurement position by the amount of eccentricity e.
When the sprocket 2 further rotates 90 degrees from the state of FIG. 7A, the state of FIG. In FIG. 7C, TAB tape 3
Is measured at the regular position. When the sprocket 2 rotates 90 degrees from the state shown in FIG. 7C, the state shown in FIG. In FIG. 7D, the TAB tape 3 retreats from the normal measurement position by the amount of eccentricity e. When the sprocket 2 rotates 90 degrees from the state of FIG. 7D, the state returns to the state of FIG. 7A.

FIG. 8 shows the rotation angle of the sprocket 2 and TAB.
This shows the relationship of the deviation of the tape 3 in the feed direction.
8, the horizontal axis is the rotation angle of the sprocket 2, and the vertical axis is TAB.
The deviation amount Δx of the tape 3 is shown. In the present invention, the deviation amount Δx shown in FIG. 8 refers to the amount of advance or retreat from the normal measurement position of the TAB tape 3 when the sprocket 2 has no eccentricity. That is, when the sprocket 2 rotates at the true center A, the TAB tape 3 moves in proportion to the rotation angle of the sprocket 2, but when the sprocket 2 rotates at the rotation center N, the TAB tape 3 is shown in FIG. Move sinusoidally as shown.

FIG. 8A shows the sprocket 2 shown in FIG.
3 shows the rotation angle and the amount of deviation at the rotation start position of FIG. In FIG. 8A, the reference TAB is aligned at an intermediate point PO between the peak point PU of the sine wave peak and the bottom point PD of the valley of the sine wave, so that there are several TABs during one rotation of the sprocket. Also, the maximum value of the displacement between TAB and the probe is the eccentric value e = Δx of the sprocket 2. On the other hand, depending on the rotation start position of the sprocket 2, as shown in FIG.
Are aligned, the maximum value of the displacement between the TAB and the probe during one rotation of the sprocket 2 may be 2Δx.

It is difficult to completely avoid eccentricity of the sprocket with the apparatus shown in FIG. In addition, while the sprocket makes one rotation in the apparatus shown in FIG. 5, a plurality of patterns are aligned in FIG. 8A. Therefore, the combination of the rotation start position of the sprocket and the number of TABs during one rotation of the sprocket causes deviation of the alignment. Can be maximized.

In the apparatus shown in FIG. 5, the eccentricity e was 40 μm as a measured value. When the pitch circle diameter of the sprocket 2 was 75 mm, the number of teeth was 50, and the TAB tape 3 was fed by a pitch of 10 teeth, the maximum deviation Δx of the TAB was ± 60 μm as a measured value. In order to eliminate the influence of such eccentricity of the sprocket, in FIG. 6A, TAB is image-recognized to correct the deviation of TAB. In the apparatus shown in FIG. 6A, the sprockets 1 and 2 are connected to a pulse motor with a gear reducer, so that TAB can be finely corrected in units of ± 10 μm.

However, there is a problem that a long processing time is required for recognizing the TAB, correcting the position by moving the XY stage, and measuring the TAB, and the index time becomes long. In the actual machine, when image recognition is performed, an index time of 3 seconds is required, and more than 50% of the time required for mechanically index feeding.

According to the present invention, when a first sprocket and a second sprocket are rotated and a TAB tape is pitch-fed for measurement, a camera for picking up a reference mark on a TAB tape pattern and a camera connected to the camera. Image processing apparatus and detecting means for detecting the rotation start position of the second sprocket.

In the preparation stage, the reference mark at the rotation start position of the second sprocket is imaged by the camera, and the reference mark is sequentially imaged by the camera while the second sprocket makes one rotation, and the respective image data are read. Is compared with a reference value at the rotation start position as each read value, each deviation value is calculated by the image processing apparatus, and each deviation value is stored in the first memory in the order of imaging,
The respective deviation values are read from the first memory, the relational expression between the rotation angle of the second sprocket and the deviation value is calculated by the calculation means, and the calculation expression is stored in the second memory.

When the apparatus of the present invention operates, the CPU
Calculates the rotation angle of the second sprocket from the rotation start position, reads the relational expression from the second memory, calculates the deviation value of the TAB by substituting the rotation angle, and calculates the deviation value of the TAB. The measurement is performed after rotating the first sprocket and the second sprocket so that the TAB moves forward and backward by the corresponding amount. An object of the present invention is to provide a method for correcting the eccentricity of a TAB tape moving sprocket having a short index time and high TAB position correction accuracy by the above-described method.

[0022]

In order to achieve this object, according to the present invention, a TAB which rotates a sprocket 1 and a sprocket 2 and feeds a TAB tape 3 at a pitch to measure the TAB tape 3 is provided.
A camera 4 for picking up an image of a reference mark 3A on the pattern of the TAB tape 3 in the auto handler for B;
The control unit 20 includes a memory 21, an arithmetic unit 22, a memory 23, and a CPU 24. The image processing device 5 is connected to the image processing device 5 and the rotation start position of the sprocket 2. At the position, the reference mark 3A on the pattern of the TAB tape 3 is imaged by the camera 4, and the image data of the reference mark 3A at the rotation start position is registered in the image processing device 5 as a reference value, while the sprocket 2 makes one rotation. The reference mark 3A is sequentially attached to the camera 4
Each image data is compared with the reference value as each read value, each deviation value is calculated by the image processing device 5, and each deviation value is stored in the memory 21 in the imaging order of the reference mark 3A. , Reading each of the deviation values from the memory 21 and calculating a relational expression between the rotation angle of the sprocket 2 and the deviation value,
When the TAB auto-handler operates, the CPU 24 calculates the rotation angle of the sprocket 2 from the rotation start position, reads the relational expression from the memory 23, and The deviation of TAB is calculated by substituting the angle, and the sprocket 1 and the sprocket 2 are rotated by an amount corresponding to the deviation of TAB to obtain TAB.
The measurement is performed after B is slightly moved in the traveling direction or the backward direction.

[0023]

According to the above construction, the TAB tape 3 is pitch-fed by rotating the sprocket 1 and the sprocket 2. The camera 4 captures an image of the reference mark 3A on the pattern of the TAB tape 3. The image processing device 5 is a camera 4
Connected to. The control unit 20 includes a memory 21 and an arithmetic unit 22
, A memory 23 and a CPU 24.

In the preparation stage, the reference mark 3A on the pattern of the TAB tape 3 is picked up by the camera 4 at the rotation start position of the sprocket 2, and the image data of the reference mark 3A at the rotation start position is used as a reference value. 5 while the sprocket 2 makes one rotation, the reference mark 3A is sequentially imaged by the camera 4, and each of the imaged data is compared with the reference value as each read value, and each deviation value is determined by an image processing device. 5, the respective deviation values are stored in the memory 21 in the order in which the reference marks 3A are imaged, the respective deviation values are read from the memory 21, and the rotational angle of the sprocket 2, the deviation value, and a relational expression are calculated. The calculation is performed at 22 and the calculation formula is stored in the memory 23.

When the TAB auto-handler operates, the CPU 24 calculates the rotation angle from the rotation start position of the sprocket 2, reads the above relational expression from the memory 23, substitutes the rotation angle, and calculates the deviation value of the TAB. The sprocket 1 and the sprocket 2 are rotated by an amount corresponding to the deviation value of the TAB to calculate the TAB, and the TAB is caused to travel slightly in the advancing direction or the retreating direction.

That is, according to the present invention, when the first sprocket and the second sprocket are rotated and the TAB tape is pitch-fed for measurement, a camera for imaging a reference mark on the TAB tape pattern, An image processing apparatus to be connected and detection means for detecting the rotation start position of the second sprocket are provided in advance.

In the preparation stage, the reference image data at the rotation start position of the second sprocket is compared with each read image data when the TAB is pitch-fed, and the deviation value of the TAB from the rotation start position is determined by the control unit. Sent to The control unit stores the progress from the rotation start position as a relational expression between the rotation angle of the second sprocket and the deviation value.

In the operating stage, when the rotation angle of the second sprocket from the rotation start position is sent to the control unit, the control unit calculates the correction amount of TAB from the relational expression, and calculates the correction amount of the first sprocket and the second sprocket. Of the sprocket is controlled by the deviation. As described above, since the position of the TAB is not corrected by the image processing, the TAB can be transported with a short index time and high position correction accuracy.

[0029]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a block diagram of a TAB auto-handler according to the present invention, in which parts corresponding to those of the conventional example shown in FIG. 5 or FIG.
1A and 2A are motors, 1B and 2B are motor drive circuits, and 8 is a detecting means. Reference numeral 20 denotes a control unit,
The control unit 20 includes a memory 21, an operation unit 22, a memory 23, and a CPU 24.

The motors 1A and 2A shown in FIG. 1 are, for example, pulse motors, and a sprocket 1
-Each is connected to 2. Motor drive circuit 1B ・ 2B
Are connected to the motors 1A and 2A, respectively, and a command from the CPU 24 is sent to the motor drive circuits 1B and 2B, and the motor drive circuits 1B and 2B control the rotation of the motors 1A and 2A.
The detecting means 8 and the image processing device 5 are connected to the CPU 24. In the control unit 20, the memory 21, the arithmetic unit 22, and the memory 23 are connected to the CPU 24, respectively. The CPU 24 in FIG. 1 inputs and outputs signals to and from the control unit 20 and also commands and controls devices outside the control unit 20. Control unit 2
When it is in 0, it performs general control of reading or writing and input / output of the memory.

Next, the configuration of the detecting means 8 will be described with reference to FIG. FIG. 2 is an enlarged perspective view of a main part near the sprocket 2 in FIG. In FIG. 2, a minute detection hole 2 </ b> C is formed on a radial surface of the sprocket 2, which is detected on a tooth unit basis of the sprocket 2. The detection means 8 includes a sensor 8A and a detection circuit 8B, and the sensor 8A is disposed on an extension of the axis of the detection hole 2C. The sensor 8A is, for example, an optical fiber reflection type sensor, and detects the rotation start position of the sprocket 2 for each tooth. The detection circuit 8B is connected to the CPU 24 and sends a signal indicating the presence or absence of the detection hole 2C to the CPU 24.

The motor 2A shown in FIG. 2 is a pulse motor with a gear reducer, and a rotation detecting plate 2D is mounted on a shaft opposite to the shaft on which the sprocket 2 is mounted. A minute slit 2E is cut out in the radial direction of the rotation detection plate 2D, and the rotation detection means 2F is arranged so as to surround the rotation detection plate 2D in the radial direction. The rotation detection means 2F is a light detection unit in which a light emitter and a light receiver are paired, and detects the rotation position of the rotation detection plate 2D. That is, in FIG. 2, a gear reducer corresponding to the number of teeth of the sprocket 2 is incorporated, and when the rotation detection plate 2D makes one rotation, the sprocket 2 rotates by one tooth. In the embodiment, when one pulse is applied to the pulse motor, it is possible to control the running of the TAB tape 3 in units of 10 μm. Further, the configuration of the sprocket 1 is the same as that of the sprocket 2 except that the detection hole 2C and the detection means 8 are not incorporated, and thus the description thereof is omitted.

Next, the operation of the present invention will be described separately for the operation at the preparation stage and the operation during the operation of the apparatus. FIG. 3 is a flowchart showing the operation procedure in the preparation stage.

In step 101 of FIG. 3, the CPU 24 instructs the sprockets 1 and 2 to rotate in synchronization and to run on the TAB tape 3 until the detecting means 8 detects the detecting hole 2C. It is assumed that the TAB tape 3 is attached to the apparatus in advance, and when the detection hole 2C is detected, the rotation of the sprocket 2 is started, and the sprocket 2 stops rotating. In step 102, the sprocket 1
Is rotated clockwise in the reverse direction. That is, the back tension processing shown in the related art is performed.

In step 103, the tape clamp 9 and the pusher 10 are lowered, and the reference mark 3A when the sprocket 2 is at the rotation start position is imaged by the camera 4, and the image data at this time is used as a reference value by the image processing device 5 sign up. In step 104, the sprocket 1 is returned by the back tension amount.

In step 105, sprockets 1 and 2
Are rotated in synchronism, and one TAB of the TAB tape 3 is transported by the pitch. In Step 106, the back tension processing of the sprocket 1 is performed.

In step 107, the reference mark 3A after the TAB has been conveyed by the pitch is imaged by the camera 4, and the imaged data at this time is sent to the image processing device 5 as a read value, and the image processing position 5 is read as the read value. The deviation value is calculated in comparison with the reference value.

In step 108, the CPU 24 stores the deviation value obtained by the image processing device 5 in the memory 21.
In step 109, the sprocket 1 is returned by the back tension amount.

In step 110, the detecting means 8 checks whether the sprocket 2 has made one rotation from the rotation start position.
In step 110, the sprocket 2 is moved 1 from the rotation start position.
When not rotating, return to the previous stage of step 105, and
When the rotation is completed, the process proceeds to step 111.

In step 111, the CPU 24 reads each deviation value stored in the memory 21 and sends the deviation value to the calculating means 22.

The arithmetic means 22 has a pseudo-relational expression Y = Y in advance, which represents the relationship between the rotation angle of the sprocket 2 and the deviation of the feed direction of the TAB tape 3 shown in FIG.
a × sin (X + b) is set. Incidentally, Y in the above relational expression is the deviation amount of TAB, and X is the rotation angle of the sprocket 2 from the rotation start position.

In step 111, the deviation value is substituted into the above-mentioned relational expression, and the values of constants a and b are calculated. In step 112, the CPU 24 stores the values of the constants a and b calculated in step 111 in the memory 23, and ends a series of operations.

Next, the operation during operation of the apparatus according to the present invention will be described with reference to the flowchart of FIG. In step 201 of FIG. 4, the CPU 24 calculates a rotation angle X of the sprocket 2 from the rotation start position.

In step 202, the constants a and b stored in the memory 23 are read, and the rotation angle X and the constants a and b of the sprocket 2 are sent to the calculating means 22. The deviation amount Y is obtained.

In step 203, the CPU 24 causes the motor drive circuit 1B to rotate the sprockets 1.2 in synchronism with the TAB deviation amount Y obtained in step 202.
Command 2B.

In step 204, the back tension processing is performed on the sprocket 2, and a series of operations is completed. In this way, the present invention measures while correcting TAB sequentially.

[0047]

According to the present invention, the first sprocket and the second sprocket
When the measurement is performed by rotating the sprocket and feeding the TAB tape at a pitch, a camera for imaging a reference mark on the pattern of the TAB tape, an image processing device connected to the camera, and a rotation start position of the second sprocket Is previously provided.

In the preparation stage, the reference image data at the rotation start position of the second sprocket is compared with each read image data when the TAB is pitch-fed, and the deviation value of the TAB from the rotation start position is determined by the control unit. Sent to The control unit stores the progress from the rotation start position as a relational expression between the rotation angle of the second sprocket and the deviation value.

In the operation stage, when the rotation angle of the second sprocket from the rotation start position is sent to the control unit, the control unit calculates the correction amount of TAB from the above relational expression, and the first sprocket and the second sprocket are corrected. Of the sprocket is controlled by the deviation. As described above, according to the present invention, the position of the TAB is not corrected by the image processing, so that the TAB can be transported with a short index time and high position correction accuracy.

[Brief description of the drawings]

FIG. 1 is a block diagram of a TAB auto-handler according to the present invention.

FIG. 2 is an enlarged perspective view of a main part near a sprocket 2 in FIG.

FIG. 3 is a flowchart showing an operation procedure in a preparation stage according to the present invention.

FIG. 4 is a flowchart showing an operation during operation of the device according to the present invention.

FIG. 5 is a configuration diagram of a conventional TAB tape auto-handler.

FIG. 6 is an explanatory diagram of a positioning means of the TAB tape 3 in FIG.

FIG. 7 is an explanatory diagram of the influence of eccentricity of a sprocket.

FIG. 8 is a diagram showing the relationship between the rotation angle of the sprocket and the deviation of the TAB tape in the feed direction.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 sprocket 2 sprocket 2C detection hole 3 TAB tape 3A fiducial mark 4 camera 5 image processing device 8 detection means 8A sensor 8B detection circuit 20 control unit 21 memory 22 arithmetic means 23 memory 24 CPU

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) B65H 23/18-23/198 H01L 21/66

Claims (3)

(57) [Claims] 1. A TAB auto-handler for measuring by rotating a first sprocket (1) and a second sprocket (2) and feeding a TAB tape (3) at a pitch. A camera (4) for imaging the reference mark (3A), an image processing device (5) connected to the camera (4), and a detecting means (8) for detecting the rotation start position of the second sprocket (2) The control unit (20) comprises a first memory (21), a calculating means (22), a second memory (23), and a CPU (24), and starts the rotation of the second sprocket (2). TAB tape in position
The reference mark (3A) on the pattern of (3) is imaged by the camera (4), and the image data of the reference mark (3A) at the rotation start position is registered as a reference value in the image processing device (5). While the second sprocket (2) makes one revolution, the reference mark (3A) is sequentially imaged by the camera (4), and each of the imaged data is compared with the reference value as each read value to calculate each deviation value. The deviation value is calculated by the image processing device (5), and the respective deviation values are stored in the first memory in the order of imaging of the reference mark (3A).
(21), and read the respective deviation values from the first memory (21), and calculate the relational expression between the rotation angle of the second sprocket (2), the deviation value, and the computing means (22). The arithmetic expression is stored in the second memory (23), and when the TAB auto-handler operates, the CPU (24)
Calculates the rotation angle from the rotation start position of the second sprocket (2), reads the relational expression from the second memory (23), substitutes the rotation angle, calculates the deviation value of TAB, A TAB tape characterized in that the first sprocket (1) and the second sprocket (2) are rotated by an amount corresponding to the deviation value of the TAB, and the TAB is caused to travel finely in the advancing direction or the retreating direction and then measured. How to compensate for the eccentric effect of the moving sprocket. 2. The amount of deflection of TAB is Y, the rotation angle of the second sprocket (2) from the rotation start position is X, and the relationship between the rotation angle of the second sprocket (2) and the deviation value is The equation is defined as Y = a × (X + b), and the arithmetic means (22) calculates the constants a and b, and stores the values of the constants a and b in the second memory (23). T described in item 1
A method for correcting the eccentric effect of the AB tape moving sprocket. 3. A minute detection hole (2C) is formed on the radial surface of the second sprocket (2), and the detection means (8) is composed of an optical fiber reflection type sensor (8A) and a detection circuit (8B). And the sensor (8
2. The second sprocket according to claim 1, wherein (A) detects the rotation start position of the second sprocket (2) in the minute detection hole (2C) for each tooth of the second sprocket (2). Detection means.