TWI312179B - Clamping apparatus, substrate transfer apparatus, and in-line fpd automatic optical inspection apparatus - Google Patents

Description

1312179 IX. Description of the invention: [Technical field to which the moon belongs], the invention relates to the automatic optical price measurement equipment for the lost device, the substrate transfer device and the flat panel display, and more specifically, the The same-line FPP automatic optics is used to increase the clamping force of the substrate to avoid the detachment of the substrate or its position change. [Prior Art] In the manufacturing process of flat panel display (FPD) Traces or all kinds of stains may be formed on a substrate. A display panel detection device is used to detect such scratches or all kinds of stains' to achieve the purpose of reducing the defect rate. For example, a common line FPD automatic optical detection device can use an optical lens and a CCD camera to capture and detect an image of an object after guiding a display substrate such as a TFT-LCD substrate, a PDP, or a color filter, and then use a visual image processing algorithm. Rules to detect all kinds of defects. Fig. 1 is a view showing a substrate transfer apparatus provided with a substrate holding device to detect a substrate 50. As shown in Fig. 1, a carrier 800 for floating the central portion of the substrate 5 is formed, and a base for transporting and receiving on the carrier 800 is mounted on two opposite surfaces of the carrier 800. Clamping device for material 500. Similarly, the substrate 500 passes through the upper portion of the carrier 800 in a state where the two opposing surfaces are supported by the lost device 7 . At this time, if the substrate is a large rule 6

With a 1312179 inch substrate, the central portion of the substrate 500 will tilt due to the static load of the substrate and will not remain flat. Accordingly, an air gap is formed on the carrier, so that the substrate 500 can be transported in an air suspension state. Further, a visual device such as a C CD camera examines whether or not the substrate conveyed is normal, and may be disposed at an upper portion of the carrier 800. However, recently, with the rapid development of the large size and high-speed conveyance of the substrate 500, when the conventional clamping device 7 is used to fix the substrate 500 by a cylindrical mechanical chuck force, there is an disadvantage. The condition is that the substrate is detached from the holding device 700 during the transfer of the substrate 500 because the chuck force of the substrate 500 is fixed. Further, even if the substrate 500 is not completely detached, the substrate 500 is slid away from the fixed position of the holding device 700 by a predetermined distance, so that cracking occurs on the substrate 500. SUMMARY OF THE INVENTION Accordingly, the present invention has been made to solve the above problems occurring in the prior art, and an object of the present invention is to provide a clamping device, a substrate transfer device, and an on-line FPD automatic optical detection. A device to tightly secure a substrate that prevents the substrate from escaping or floating from the substrate holding device. Some of the advantages, objects, and features of the invention will be set forth in the description which follows. In one aspect of the invention, a substrate holding apparatus is provided, comprising: an upper chuck; and a lower chuck configured to insert a substrate into the upper portion 7 1312179

The substrate is sandwiched between the chuck and the lower chuck, and a vacuum orifice configured to adsorb and define the substrate is formed on at least one of the pair of surfaces facing the upper and lower chucks of each other. Preferably, in order to avoid vacuum pressure leakage, the vacuum orifice protrudes from the material contact surface by a predetermined height and is made of a soft elastic material. A perforation is formed in at least one of the opposing surfaces of the upper and lower chucks and the vacuum orifices can be disposed in the perforations and disposed in one or more columns on the opposing surfaces. Further, at least one of the opposing surfaces is provided with a shock absorber comprising one of PEEK (polyetheretherketone), high molecular weight polyethylene, and a fluorinated lipid compound to prevent damage to the substrate due to substrate contact. In another aspect of the present invention, a substrate transfer apparatus is provided, comprising: a substrate susceptor device comprising a top plate and a bottom plate for inserting a substrate into the upper chuck and the lower portion Between the chucks and sandwiching the substrate, wherein at least one of the opposite surfaces of the upper and lower chucks has a substrate holding device for attaching a vacuum nozzle of the substrate; and The substrate is supported by a vacuum pressure, and the substrate holding device is disposed on one or both sides of the carrier. The carrier orifice includes a plurality of air orifices configured to float the material, and a roller unit configured to convey the substrate. Preferably, the carrier forms a coating, such as fluoroplastic or Teflon. In one aspect of the invention, an in-line FPD automated optical measuring apparatus is provided, comprising: a transfer plate disposed on a carrier One side; a clamping and a fixed alignment point, disposed on one side of the conveying plate; and a solid-phase base on the tree with 5 suction base detection 8

1312179 A variable straightening point disposed on the other side of the conveying plate, wherein the conveying plate is moved to a width direction of the substrate perpendicular to a conveying direction, and a rotation axis perpendicular to the substrate in a rotating direction Rotate for the center. The in-line FPD automatic optical detection device includes a substrate alignment unit including a drive unit configured to move and rotate the transfer plate. Referring to Fig. 1, a substrate transfer apparatus includes a carrier 80 for floating a central portion of a substrate 500, and is mounted on one or both opposite sides of the carrier 800. Clamping device 600. The gripping device 600 - a vacuum orifice is provided, formed on at least one of the opposing surfaces facing each other and the lower central disc. Fig. 2 is a side view showing a substrate holding device provided in a substrate transfer apparatus. Referring to FIG. 2, the substrate holding device configured to sandwich the edge of the substrate 500 is provided with an upper chuck 1 〇〇a formed in a plate shape and a lower chuck for clamping the insertion therein. The substrate between the upper chuck 1 0 0 a and the lower chuck is 500. Vacuum orifices configured to adsorb and fix the substrate 500 are formed on opposite surfaces of the upper and lower chucks 10a and 100b facing each other. First, the substrate holding device includes the upper chuck 1 〇 〇 a and the lower chuck 100b, which are provided with the vacuum orifice 110, which will be explained later. The substrate holding apparatus according to the present invention comprises a fixing unit 1 〇〇 having the upper and lower chucks 100a and 100b for fixing the side of the substrate 500 by mechanical pressure and vacuum suction, The vertical transfer unit 200 moves the fixed unit 100 and the horizontal moving unit 300 upward and downward toward the substrate 500 or in the opposite direction to the substrate 500 (hereinafter referred to as "substrate width direction") 9

1312179 The fixing unit 100 is moved, and the plate 400 is fed to move the fixing unit 100 toward the substrate 500 according to the size of the substrate 500. For example, 100 for gripping one side or both sides of the substrate 500 includes the upper chuck 10a and the lower chuck 100b spaced apart by a predetermined distance and movable up and down. The vacuum orifices 110 for the vacuum material 500 are disposed on the opposite surfaces of the upper 10a and 100b facing each other. The rear side of the disc 1 00b is in more detail in contact with the side of the upper chuck 100a, and the contact surface of the upper chuck l〇〇a when the substrate 500 is inserted between the upper and lower chucks 100a and 100b When moving up to fix the base, since the thickness of the substrate 500 is about 0.7 mm, the distance between the upper 10 a and the 10 Ob can be controlled by continuously moving up and down. A vertical transfer sheet for moving the fixed unit 100 up and down The fixed unit 100 is moved up and down to ensure that the size or process of the base 500 of the substrate 500 is set at a corresponding height. The vertical transmission is also contacted by a vertical moving unit unit 100 that consists of a general vacuum pressure cylinder. The horizontal transfer unit 300 for moving the fixing unit 100 to the width of the substrate 500 is connected to one side of the vertical member 200 through a horizontal transfer tool. It can be moved horizontally by a common oil pressure and vacuum pressure as the horizontal transfer unit. The feeding device 300 moves the substrate 500 to a fixed position, and the upper and lower chucks are adsorbed by the upper chuck by a fixing unit and a conveying direction. The lower cooling means that the single-force cylinder is directly conveyed according to the base unit 200 and the fixed direction by the bottom chuck chuck 100b, 200 00, and the level is transmitted. The fixed sheet 10 1312179 yuan 1 00 is moved backward from the substrate 5 Ο 0 to avoid obstructing the substrate 5 在 in the receiving process and the take-out process of the substrate 5 Ο 0, and then receiving the substrate 5 After 0 0, the fixed unit 100 moves toward the substrate 500. The transporting plate 400 for transporting the fixed unit 100 along a carrier supports the fixed unit 100, and the vertical transport unit 200 supports the horizontal transport unit 300 at its bottom, and is slidable along the The transport path formed by the longitudinal direction of one or both sides of the carrier moves.

[Embodiment] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The upper and lower chucks, which vacuum absorb a substrate, are explained in more detail at the rear.

As shown in Figures 3a through 5, the fixing unit 100 for fixing a substrate comprises an upper chuck 10a and a lower chuck 100b. The vacuum orifices 110 for adsorbing and fixing the substrate 500 are formed on at least one of the opposing surfaces of the upper and lower chucks 100a and 100b facing each other. In other words, at least one of the opposing surfaces is provided with a perforation 150 to pass through the upper and lower chucks 100a and 100b. The vacuum orifice 110 is disposed within the perforation 150. At this time, the vacuum nozzle holes 110 may be formed on one or both opposing surfaces of the upper and lower chucks 100a and 100b. If the vacuum nozzle hole 110 is formed on both of the opposite surfaces, it is expected that the vacuum nozzle hole 110 will be formed on the same axis facing the upper and lower chucks 1 〇〇a and 100b of each other to The same point is simultaneously adsorbed on one side and the other side of the substrate 500. According to an exemplary embodiment, although the vacuum orifice is provided within the perforation 150, the base 11

1312179 material can be adsorbed by connecting a suction unit 130 to the perforation 150 through the perforation 150. The vacuum orifice 110 has a contact surface (i.e., an upper surface) that contacts the substrate 500 and forms an air flow passage 120 to draw air toward the inside of the upper surface. The air flow path 120 is connected to the air extraction unit 1 30 to perform the same operation as the pump for pumping. Additionally, the vacuum orifices 1 1 〇 can be aligned in one or more rows on the opposing surfaces. For example, a plurality of vacuum orifices 110 can be aligned in a fixed pattern of matrix shapes on the opposing surfaces. A shock absorber having a lower strength than the base material 500 may be attached to the opposite surfaces of the upper and lower chucks 1 〇〇a and 100b to prevent damage to the substrate 500. The shock absorber may comprise polyetheretherketone (PEEK) of high-performance thermoplastic resin, high molecular polyethylene of thermoplastic resin, wherein ethylene is polymerized, and a fluorinated resin compound, which is a polymer of a fluorinated hydrocarbon (HFC). At least one of them. 6 through 8 illustrate an exemplary embodiment of a clamping device in accordance with the present invention. Referring to Figures 6 to 8, the fixing unit 100 for clamping one side or both sides of the substrate 500 includes the upper chuck 10a, and the lower chuck 100b movable up and down, by The upper chuck 100a is spaced apart by a predetermined distance. Further, a vacuum nozzle 1 1 1 is formed of 矽 as a soft elastic material and protrudes upward from the opposite surface to a height of 1-2 mm. At this time, if the vacuum nozzle 1 1 1 protrudes from the opposite surface by a height of more than 2 mm, a space for leaking gas may be formed by a folded layer, which is generated in the vacuum nozzle 111 made of the soft elastic material. The permeation end, and if the vacuum orifice 1 1 1 protrudes upward by a height of less than 1 mm, it is difficult to allow the protruding end of the vacuum orifice 111 to adsorb while the pomelo gas is simultaneously shrinking the substrate. 12 1312179 A contact surface contacting the substrate is formed on an upper surface of the vacuum injection hole 111, and the air flow passage 120, wherein air is sucked through a suction unit 丨3 能够 capable of playing a role of a pump, is formed in the vacuum The inside of the nozzle hole 111. On the outer surface of the vacuum orifice i 1 1 , a plurality of stages which are inclined toward the inside of the vacuum nozzle 1 1 1 are formed by extending in a plurality of stages. Furthermore, the vacuum orifices 111 can be aligned in one or more columns on opposite surfaces and, for example, aligned in a fixed pattern in the form of a matrix, when the vacuum orifices 1 1 1 are on the opposite surfaces When multiple columns are straightened. Fig. 9 is a view showing the configuration of a substrate holding device provided with the vacuum orifice according to another exemplary embodiment. As shown in Fig. 9, a vacuum pad 110' in which the fixed unit 10 〇 ' can function as a vacuum nozzle can be provided. In other words, the vacuum pad 110 may be formed in the form of a microporous adsorption plate for overall adsorption through the contact surface during contact with the substrate 500. Further, a plurality of air flow passages 1 2 0 ' may be connected by a predetermined distance from the bottom of the vacuum cushion 1 1 〇 ' to be evacuated through the suction unit 130. The operation of the present invention constructed as above will be explained below. First, when the substrate 500 is received into a substrate transfer device, the holding device fixes the substrate 500 by suction, and solidifies the substrate on the side of the substrate by a cylindrical mechanism or After both sides, the substrate 500 fixed by the holding device is then moved along the carrier of the substrate transfer device. For example, when the substrate 5〇〇 enters between the upper and lower trays 1〇〇a and i〇〇b of the holding device, the lower central tray i〇〇b moves to the upper half of the substrate 5〇〇 Part 'and the substrate 5〇〇 is fixed between the upper and lower chucks 1〇〇& and i〇〇b. 13

1312179 At this time, the shock absorber is disposed on the opposite surfaces of the upper and lower chucks i 〇〇 a and 100b to reduce the contact of the upper and lower chucks 1 0 0a and 1 by the substrate 500. The damage caused by the friction caused by 00b. Materials such as polyetheretherketone (PEEK), high molecular weight polyethylene, and fluorinated tree compounds can be used as the shock absorber. Next, when the substrate 500 is fixed by the mechanical force of the upper and lower chucks 100a and 100b, the chuck force of the substrate 500 of the holding device is used to fix the substrate 5 by suction again. The addition of 0 0 is formed by contacting the surface of the substrate 500 through the vacuum orifices 110 formed on the opposite surfaces of the upper and lower chucks 100a and 100b. At this time, the vacuum orifice 110 may be formed on one or both of the opposite surfaces of the upper and lower chucks 100a and 100b. In addition, when the vacuum nozzle hole 110 is formed on both of the opposite surfaces, it is expected that the vacuum nozzle hole 110 simultaneously adsorbs one side and the other side of the substrate 5000, by straightening the The vacuum orifices 110 are on the same axis of the upper and lower chucks 1 1 0a and 1 1 Ob. The substrate 500 is transported by the holding device along the carrier, in a state where the substrate 500 is mechanically fixed by the upper and lower chucks 100a and 100b, and the substrate of the holding device is used. The chuck force of 500 is increased by vacuum adsorption of the vacuum orifice 110. As described above, the present invention can prevent the substrate 500 from being detached from the holding device, and even when the substrate 500 is conveyed at a high speed, the substrate is mechanically fixed by a pressure cylinder and transmitted through the vacuum. The nozzle hole 110 is fixed by vacuum adsorption to the substrate 500, and the base substrate 500 is fixed by avoiding the fixing position and the straightening position of the substrate 500 to ensure substrate transfer reliability and avoiding cracking. Caused by a slide in the state. 14

1312179 Referring to FIG. 1 , the in-line FPD automatic optical detection comprises a carrier, a carrier robot, a mechanical transmission unit and a transfer floating unit. A carrier 600 is formed to extend in the longitudinal direction, i.e., the substrate transport direction of the substrate 500 is transferred, and the received substrate 500 is re-aligned. The width of the carrier 600 in the horizontal direction perpendicular to the conveying direction may be formed to be shorter than the width of the substrate 500. In addition, the carrier 600 directs the received substrate 500 in the direction of transport. The channel unit 630 of the transport device is disposed on one side of the horizontal direction of the carrier 600. The channel unit 630 is formed to extend in the vertical direction as the carrier 600, and the width in the vertical direction is shorter than that of the carrier 600. An air injection hole 610 for floating the substrate is formed on the carrier 600. The substrate 500 is disposed on the other side of the carrier 600 disposed with respect to the fixed unit 100. A roller device 260 for guiding the movement of the substrate 500 is mounted on the other side of the carrier 600. The drum unit 620, as shown in Fig. 11, includes a drum 621 and a drum support plate 622 for supporting the drum. A plurality of roller units 620 are mounted in one of the channel units 630 and are mounted on both sides of the carrier 600 in the horizontal direction. The roller 6 21 is free to rotate in the direction in which the substrate is loaded, and a rolling bearing is utilized to reduce the friction during rotation. The roller support plate 622 includes a first support plate 622a and a second support plate 622b. The roller support plate 622 is mounted in the channel unit 630, and the second support plate 622b is disposed on a vacuum pressure cylinder to be movably mounted to the first support plate 622a. The first support plate 622a can move in the direction of the substrate of the carrier 600 depending on the size of the substrate 500. 15

1312179 As shown in Fig. 12, a belt can be attached to the drum, so that a plurality of rollers 6 2 1 are joined to each other to increase the area in contact with the substrate. As shown in Figure 1, only one belt can be installed, but a plurality of belts can be installed. Next, the operation of the substrate detecting device provided with the substrate transfer device will be explained. Referring to Fig. 10, the carrier robot (not shown) takes the substrate 500 from a substrate reservoir (not shown) and then carries the substrate to the inlet of the carrier 600. When the substrate is loaded into the carrier 600, the substrate floating unit, wherein a plurality of nozzle holes 610 having a small diameter are formed, and the substrate 500 is floated through the nozzle hole 6 1 0 A predetermined distance, and then the fixing unit 100 is disposed on one side of the substrate 500. The fixing unit 100 moves in a horizontal direction perpendicular to the conveying direction, and engages the base material 500 between the upper jaw and the lower jaw to fix the base material 500. Further, as shown in FIGS. 1 3 a to 1 3 c, according to the size of the substrate 500, the roller device 620 located on the opposite side of the fixing unit 100 is disposed adjacent to the substrate 50. The other side of the 0 is at the same height. At this time, the fixing units 10 0 a and 10 0 〇 b are slightly upwards, thereby avoiding collision with the drum device 620 and moving toward the drum 260 to set the substrate 500 at the drum device. The upper part of 6 2 0. The fixing units 1 〇〇a and 1 00b are lowered to securely set the substrate 510 on the upper portion of the drum 620. After being securely disposed, the substrate 500 is aligned using a 5-point straightener that is mounted within the channel unit 630 and the carrier 600. When the substrate 500 is reliably aligned and disposed by the substrate transfer unit, the fixed units 10 0 a and 1 0 0 b start moving in the transfer direction, and 16

1312179 and the drum of the drum unit 620 starts to rotate freely in the moving direction of the substrate. When the detection unit is reached, the substrate 500 is detected while moving at a fixed speed. Pattern detection and defect detection of the substrate 500 is performed using a detecting device such as an optical lens and a C C D camera. The substrate 500 has been detected and moved by the substrate transfer unit to the outlet of the carrier 600. The take-out robot arm moves back and forth while lifting the arm to take the detected substrate 500 from the carrier 600 to store the substrate 500 in a substrate storage device (not Shown). The fixing unit 1 〇〇a and 100b' have completed the transfer of the substrate 500, started moving in the opposite direction to the carrier, and were in the original position, thus completing the process. Although not shown in the drawings, it is contemplated that the upper surface of the carrier is formed of a coating such as a fluorinated resin or Teflon, having a thickness of 1 〇 -1 〇 〇 μm. If the coating is formed, damage to the substrate can be avoided even if the substrate is in contact at high speeds along the surface of the gas floater of a coated pedestal. In addition, the present invention forms an electrode film on the surface of the substrate, forms a conductor on a portion of the upper surface of the carrier, and includes a power unit for supplying power to the electrode film or the conductor, and a contact detection. a unit to detect whether the electrode film is electrically connected to the electrical conductor, thereby avoiding scratches during substrate transfer. Separately, even when the surface of the gas floater formed on the upper surface of the carrier is out of alignment when transporting the substrate, the present invention can reliably transport the substrate by the drum, including an inductor to sense the gas pressure of the gas nozzle And a controller for controlling so that the drum can move up/down according to whether the air pressure passing through the sensor is normal. 17

1312179 Referring to FIG. 14, the same-line FDP automatic optical detection includes a transfer table 18, transfer robots 1 2 a and 1 2b, a substrate transfer device 20, a gas floater 14, and a detection unit. 1 5 and a substrate alignment unit 16 . The transfer station 18 includes a transfer pedestal 30 and a base plate 22. The transfer pedestal 30 is formed to extend in the longitudinal direction, i.e., the transport direction of the substrate 10, and guide the received substrate 1 to the transport direction. The base plate 22 of the transfer apparatus is mounted on one side of the horizontal direction of the transfer stand 30. The base plate 22 is formed to extend in the longitudinal direction of the longitudinal direction, as in the transfer pedestal 30, and its width in the horizontal direction is generally shorter than that of the transfer pedestal 30. Further, a linear track 24 is formed to extend on the upper surface of the base plate 22 in the longitudinal direction. In the transfer robot 12, a first robot arm 12a and a second robot arm 12b are respectively installed at the entrance or exit of the transfer table. The first transfer robot 1 2 a takes out the undetected substrate 10 from the substrate storage (not shown) while rotating with the multi-joint arm, moving back and forth, and receiving the undetected substrate 1 〇 toward the transfer station. The second transfer robot 1 2b takes out the substrate 10 that has completed detection to the substrate reservoir (not shown). The detecting device 15 is mounted on the upper portion of the transport base 30, and includes a supporting plate 15a and a detecting device 15b connected to the supporting plate. The detecting device 15b is mounted to be rotated up to a fixed angle in the front-rear direction with respect to the conveying direction, so that the substrate 10 can be detected in detail. The gas floater 14 is disposed on the upper surface of the transfer pedestal 30. In other words, the gas floater 14 includes a plurality of formations in the transfer 18

1312179 A nozzle hole 2 1 having a small diameter on the upper surface of the pedestal 30. The substrate 10 is floated to a predetermined height, and gas is ejected through the orifice 21 to the upper portion of the transfer pedestal 30. Similarly, if the substrate is transported in a state of being floated to a predetermined distance from the substrate transfer pedestal 30, it is possible to transport the substrate 10 at a high speed without contacting other portions, thereby avoiding the substrate 1 〇 The surface is damaged or contaminated during the transfer process. Referring to Figures 15 and 16, the substrate transfer apparatus includes a first transfer plate 60 that is configured to be movable over the linear track 24 of the base plate 22, and a substrate transfer drive unit 72 for use. In the past, the substrate transfer direction conveyed the first transfer plate 60. A second conveying plate 62 is mounted on the upper surface of the first conveying plate 60 so as to move in the horizontal direction, that is, in the width direction of the substrate 10, a vertical rotating shaft 70 is installed in the first On the upper surface of the two transfer plates 6 2, and a third transfer plate 64 is mounted to rotate about the axis of rotation. The first and second drive units 66 and 68 are coupled to the first and second transfer plates 60 and 62, and previously move and rotate the second and third transfer plates 6 2 and 6 4 . A plurality of jigs and fixed alignment points 20 and 3 6 a are disposed on the third transfer plate 64. At the same time, a variable alignment point 36b is disposed on the opposite side of the transfer plate. It is contemplated that a stepper motor is used as the first and second drive units 66 and 68 that are mounted on the upper surfaces of the first and second transfer plates 60 and 62 to move and rotate the second before/after And third transfer plates 6 2 and 6 4 . Furthermore, it is contemplated to use a linear motor as the substrate transport drive unit 72 to move the first transfer plate 60 in the longitudinal direction. Of course, the position of the drive units can be varied as appropriate. For example, the second drive 19

1312179 The moving unit 6 8 is attached adjacent to the vertical shaft so that the third conveying plate 6 4 can be rotated by pushing and pulling the third conveying plate 64. In addition, the first and second driving units 6 6 and 6 8 are mounted on both sides of the rotating shaft 70 on the first conveying plate 60, so the front/rear movement and rotation of the third conveying plate 64 It can be controlled in the push and pull method of the third transfer plate 64. Accordingly, the second transfer plate 62 may be a guide for guiding the movement of the substrate in the width direction of the first transfer plate 60 by mounting the vertical rotary shaft. As shown in Fig. 17, a conventional 4-phase stepping motor 38 includes a rotor 40 and a stator 42. The rotor 40 includes a permanent magnet 44 that is magnetized in the axial direction and upper and lower iron coils 46 and 48 on its exterior. The upper and lower iron coils 4 6 and 48 are respectively magnetized to the north and south poles of the permanent magnet 44, and a 4-phase excitation coil is wound around the stator 42. When a direct current (DC) flows over the coil 50, the stator 42 magnetizes and pulls up the rotor 40. Thereafter, the shaft 52 is rotated by the rotor 40 at a fixed angle. Similarly, the stepper motor 38 is typically used to tightly control a mechanical movement. The stepper motor 38 is inexpensive and advantageous in terms of precise control of the angle compared to servo motors. In particular, since the stepper motor 38 can be controlled by the pulse number, it is advantageous to control in units of several micrometers. In addition, because the stepper motor 38 can be rotated at a fixed angle, it stops significantly and accurately, and is easy to repair and has high reliability without feedback to detect the position of the motor shaft. In addition, since a large static torque is generated when the motor is stopped, for example, an electronic brake is not required. The jig 20 configured to clamp the substrate 1 is based on the size of the substrate 10

1312179 inches are formed on the first plate 64 in an appropriate number (e.g., 3 to 5) in one or more columns. Referring again to Fig. 16, the clamp 20 includes upper and lower jaws 3 2 a and 3 2 b configured to grip 10, a pitch controller 34 and a moving unit 36. The upper and lower jaws 32a and 32b are divided up and down at a predetermined interval and one of them is movable up and down. Accordingly, the substrate 10 is inserted into the upper and lower jaws 32a and 32b in one side of the horizontal direction. The pitch controller 34 is formed on the lower surface of the lower jaw 32b and moves one of the upper and lower jaws 32a and 32b up and down. The device 34 extends a distance between the upper and lower jaws 32b during receipt or removal of the substrate 10, and then completes the receiving of the substrate 10 to fix the substrate 10'. 1 0 and the upper and "f and 3 2 b are in contact with each other. The horizontal moving unit 36 moves the upper and lower jaws 3 2 a and 3 2b in the direction of the substrate or in the opposite direction, since the spacing must be changed according to the size. A fixed alignment point 3 6b is disposed on the first plate 64 in parallel with the jig 20. For example, the fixed alignment point 3 6 b can be set to the leftmost and rightmost sides of the clip j. At the same time, the variable alignment point 3 6 a is disposed on the opposite side of the board from the fixed alignment point 36b. In addition, the point 36 a includes an elastic unit, such as a spring, which is in contact with the substrate 10 . The fixed alignment point 36b is a fixed unit, and the variable three conveys the substrate horizontally away, and the substrate 10 is in a solid state and is controlled by a distance of 3 2 a and then shortened - the jaw 32a is horizontally moved. The base 10 is conveyed 20 and the base is straightened and telescopically aligned.

1312179 3 6 a can perform linear movement, which uses a special drive unit to move back and forth in the width direction of the substrate. Next, the operation of the substrate detecting device provided with the substrate straightening unit will be explained. Referring to Fig. 3, after the substrate 10 is taken from the substrate reservoir (not shown), the transfer robot 1 2 a moves the substrate 10 toward the inlet of the transfer table 18. When the substrate 10 is loaded into the transfer pedestal 30, the gas actuator 14 forms a plurality of injection holes 2 1 having a small diameter, starting to directly feed the substrate 10, and floating through the spray hole 2 1 The substrate 10 is after the predetermined interval. As shown in the figures 1 8 a to 18 e, if the substrate 10 is inserted in an unaligned state, the variable alignment point 3 6 a is disposed on the side of the transfer pedestal 30 The opposite side of the substrate transfer device begins to move in the direction of the substrate. At this time, the second transfer plate 6 2 on the first transfer plate 60 starts to move in the direction of the substrate by the operation of the first drive unit. The variable alignment point 3 6 a moving toward the substrate moves as shown in Fig. 18 b until the material is aligned in the width direction, together with the fixed alignment point 36b in the same column as the clamp 20 position. At this time, the jig 20 does not sandwich the substrate 10. The jig 20 understands the position of the substrate 10 to sandwich the substrate 10 as shown in Fig. 18c, by moving the upper and lower jaws and in the direction of the substrate with the bodies 3 2 and 3 3 The support plate 35 is connected, and the variable alignment point 3 6 a moves. Then, the jig 20 and the fixed alignment point 3 6 b are moved by the substrate feed driving unit 72 in the conveying direction by the predetermined pitch to selectively align the origin of the substrate conveying direction. After the completion of the straightening, the floating of the third material is transferred from the base to the base.

The 1312179 feed plate 6 4 rotates the fixed angle by driving the second drive unit 6 8 around the rotary shaft 39, thereby completing the straightening, as shown in Figs. 18d and 18e. In the drawings, the rotation angle is shown at a large angle to show a rotational movement. However, the substrate 1 is calibrated by a low angle rotation of a few microns. Referring again to Figure 14, if the substrate 10 has been firmly aligned and disposed, the clamp 20 begins to move in the direction of transport. The substrate 10, which has arrived at the detection unit 15, is detected while moving at a fixed speed. Pattern detection and defect detection of the substrate 1 are performed, and detection devices such as an optical lens and a C C D camera are used. Then, according to the pattern of the substrate 10, re-alignment and speculation of the substrate 1 重复 are repeatedly performed. Further, the substrate 1 〇 has completed the detection and is moved to the outlet of the transfer pedestal 30 by the clamp 20 . The carrier robot arm 12b for taking out the substrate rotates and moves back and forth while raising the arm. Next, the substrate 10 that has been detected is taken from the carrier pedestal 30, and the obtained substrate 10 is stored in the substrate reservoir (not shown). The jig 20, which has finished transporting the substrate 10, is aligned with the original position and the process is then completed. The holding device, the substrate transfer device, and the in-line flat panel display automatic optical detecting device, according to the present invention, produce the following effects. First of all, 'When the substrate is moved by the substrate holding device, the substrate speed is removed.' The substrate is prevented from detaching from the substrate holding device. Thus ensuring the reliability of the substrate transfer and improving the yield of the product. . Furthermore, the positional change of the substrate is avoided so that the substrate can be transported to the fixed position. Third, the substrate holding device can be used to mechanically clamp the substrate to avoid 23

1312179 Scratches or cracks are created on the surface of the substrate. Fourth, the vacuum orifice is made of a soft elastic material and is formed to protrude from the substrate contact surface by a predetermined height, thereby forming the vacuum pressure without leaking air, which can be tightly sealed by the base. The material is produced between the substrate and the vacuum orifice. Fifth, the substrate transfer unit of the substrate detecting device transports the substrate in a state of sandwiching only one end of the substrate, thereby enabling the flat display panel to be efficiently and stably transported. Sixth, by controlling the motor located on one side of the carrier pedestal instead of the existing system for synchronously controlling the motor on the opposite side of the carrier pedestal, the manufacturing cost can be reduced, and the generation during synchronization control can be eliminated. Risk factors. Seventh, even if the substrate is in contact with the surface of the gas floater along the pedestal on which the coating is formed at a high speed, the substrate can be prevented from being damaged. Eighth, even if there is any problem with the surface of the gas floater formed on the upper surface of the carrier, the substrate can be safely conveyed by the roller for supporting the substrate when the substrate is transferred. Ninth, since the substrate is inspected to be in contact with the upper surface of the carrier, it is possible to prevent the occurrence of marks on the substrate. Tenth, the alignment point of the substrate alignment unit of the substrate detecting device is disposed only on both surfaces of the substrate, so that the configuration can be simplified. Eleventh, with the use of the stepping motor, which is driven by a pulse, high-accuracy and high-accuracy straightening can be performed, and straightening correction can be performed at any time during the processing work. The preferred embodiments of the present invention have been described by way of example only, and it is understood that various modifications, additions and substitutions can be made without departing from the scope and spirit of the invention as disclosed in the appended claims. Therefore, the scope of the invention should be defined by the scope of the appended claims and their legal equivalents. [Simple description of the map]

The above and other objects, features, and advantages of the present invention will become more apparent from A side view of a substrate holding apparatus according to an exemplary embodiment of the present invention, and FIGS. 3a and 3b are diagrams showing a substrate holder provided with a vacuum orifice according to the exemplary embodiment of the present invention. FIG. 4a is a view showing a configuration of a substrate holding device provided with the vacuum 0 hole according to the exemplary embodiment of the present invention, and FIG. 4b is a view showing a configuration according to the present invention. A drawing of a configuration of a substrate holding device provided with the vacuum nozzle hole in a different embodiment, and FIG. 5 is a view showing a state in which a substrate is held by the substrate holding device Vacuum injection hole fixing according to the exemplary embodiment of the present invention; FIG. 6 is a side view showing another substrate holding device according to the exemplary embodiment of the present invention; FIG. 7 is a view showing the present invention The exemplary embodiment is provided with the 25 131 2179 is a drawing of a structure of a substrate holding device for a vacuum nozzle; FIG. 8 is a view showing a state in which a substrate is fixed by a vacuum nozzle of the substrate holding device, according to the present invention The exemplified embodiment; FIG. 9 is a view showing a configuration of a substrate holding device provided with a vacuum nozzle according to another exemplary embodiment of the present invention;

Figure 10 is a schematic view showing the automatic optical detection of the same plane flat panel display (FPD) according to the present invention; Fig. 1 is a sectional view showing the drum according to the present invention; A cross-sectional view showing a different example of the roller; a 1 3 a to 1 3 c diagram showing a cross-sectional view of a process in which the substrate is firmly disposed on the substrate transfer apparatus; A schematic diagram showing an on-line FPD automatic optical detection; Figures 15 and 16 are a plan view and a cross-sectional view of a substrate alignment unit according to the present invention; and Figure 17 shows a stepping motor The drawings; and the 18th to 18th drawings show a plan view of the operation of the substrate alignment unit according to the present invention. [Main component symbol description] 10 '500 substrate 14 gas floater 15a support plate 16 substrate alignment unit 12a > 12b transfer robot 15 detection unit 15b detection device 18 transfer table 26 1312179

20 Fixture 2 1 Spray hole 22 Base plate 24 Linear track 30 Transfer pedestal 32, 33 Main body 32a Upper jaw 32b Lower jaw 34 Pitch controller 35 Branch plate 36 Horizontal moving unit 36a Fixed alignment point 36b Variable alignment point 3 8 Step Motor 40 Rotor 42 Stator 44 Permanent magnet 46, 48' 50 Coil 52 Shaft 60 First transfer plate 62 Second transfer plate 64 Third transfer plate 66 First drive unit 68 Second drive unit 70 Vertical rotary shaft 72 Substrate transfer drive Single 100, 100' fixed unit 1 00ί i Upper chuck loot > Lower chuck 110 ' 111 Vacuum nozzle 110, vacuum pad 120, 1 2 0 'Air flow ϋ 130 Air extraction unit 150 Perforated 200 Vertical transfer unit 300 Horizontal Mobile unit 400 transfer plate 600' 700 clamping device 6 10 air injection hole 620 roller device 62 1 roller 622 roller support plate 622a first support plate 622b second support plate 630 channel unit 800 carrier 27

Claims (1)

1312179 No. 7 (Seventh) No. 7 static rubbing year/month revised cargo year | 月丨明条受)_ί10. Patent application scope 1. A substrate holding device, which at least includes: an upper disc loss; and a lower chuck, configuration Inserting a substrate between the upper chuck and the lower chuck and cooling the substrate. One of the vacuum orifices configured to adsorb and fix the substrate is formed on the upper and lower chucks facing each other. At least one of the opposite surfaces. 2. The substrate holding apparatus of claim 1, wherein the vacuum orifice is formed to protrude from a substrate contact surface by a predetermined height. 3. The substrate holding apparatus of claim 2, wherein the vacuum orifice is formed to protrude from the contact surface of the substrate by a dimension of 1-2 mm. 4. The substrate holding apparatus of claim 2, wherein the vacuum orifice is formed by extending a plurality of stages, the stages being formed such that an outer surface of the vacuum orifice faces downward The inside of the vacuum nozzle is inclined. 5. The substrate holding device of claim 1 or 2, wherein a perforation is formed on at least one of the opposing surfaces of the upper and lower chucks facing each other, and the A vacuum orifice is disposed within the perforation. 6. The substrate holding apparatus of claim 1 or 2, wherein the vacuum orifices are disposed on the opposite surfaces in one or more columns. 7. The substrate holding apparatus of claim 1 or 2, wherein the vacuum orifice is made of a neodymium elastic material. 8. The substrate holding apparatus of claim 1 or 2, wherein at least one of the opposing surfaces is provided with a shock absorber to prevent damage to the substrate. 9. The substrate holding device according to claim 8, wherein the shock absorber comprises at least one of PEEK (polyether ether ketone), high molecular polyethylene, and a fluorinated resin compound. A substrate transfer apparatus comprising: at least: a substrate holding device as described in claim 1 or 2; and a carrier configured to support the substrate under a vacuum pressure The substrate holding device is disposed on one or both sides of the carrier. The substrate transfer apparatus of claim 10, wherein the carrier of the above-mentioned 29 1312179 further comprises a plurality of air nozzles configured to float the substrate, and a roller unit configured to transmit the Substrate. The substrate transfer apparatus of claim 11, wherein the drum unit comprises a drum and a drum support plate. The substrate transfer apparatus of claim 12, wherein the plurality of roller units are disposed in a conveying direction of the carrier. 14. The substrate transfer apparatus of claim 12, wherein the drum is supported by a rolling bearing. 1 . The substrate transfer device of claim 1 or 2, wherein the roller support plate comprises a first support plate and a second support plate, wherein the first support plate is related to the first The two support plates are movably disposed in the direction of the substrate. The substrate transfer apparatus of claim 15, wherein a vacuum pressure cylinder is interposed between the first support plate and the second support plate. The substrate transfer apparatus of claim 12, wherein a belt is wound around the plurality of drum units. 30 1312179 1 8 The substrate transfer apparatus of claim 10, wherein a coating is formed on a portion of the upper surface of the carrier. The substrate transfer apparatus of claim 18, wherein the coating layer comprises a fluorinated resin. 20. The substrate transfer apparatus of claim 18, wherein the coating comprises iron gas dragon. 21. The substrate transfer apparatus of claim 18, wherein the coating is applied at a thickness of from 10 to 100 mm. 2. The substrate transfer apparatus of claim 12, further comprising: an inductor configured to sense air pressure of an air injection hole; and a controller configured to sense according to the sensor Whether the air pressure is normal to control the rise and fall of the drum. 2. The substrate transfer apparatus of claim 1, wherein an electrode film is formed on the surface of the substrate and a conductor is provided on a portion of the upper surface of the carrier. 24. The substrate transfer apparatus of claim 23, further comprising: a power supply unit configured to apply power to the electrode film or the lead 31 1312179 body; and a contact sensing unit configured to A current is sensed between the electrode film and the conductor. The substrate transfer apparatus according to claim 12, wherein the surface of the roller comprises at least one of PEEK, high molecular polyethylene, and a fluorinated resin compound. 26. A homogeneous FPD automatic optical inspection apparatus comprising the substrate transfer apparatus of claim 12 of the patent application. 2 7. The detecting device according to claim 26, further comprising: a conveying plate disposed on one side of the conveying base; a fixture and a fixed alignment point disposed on one side of the transfer plate; a variable alignment point disposed on the other side of the transfer plate; and a drive unit configured to move and rotate the transfer plate, wherein The transfer plate is moved in the width direction of the substrate perpendicular to the direction in which the substrate is conveyed, and is set to rotate in a rotation direction of a rotation axis perpendicular to the substrate. [2] The detection device of claim 27, wherein the transfer plate comprises a first transfer plate disposed on one side of the transfer pedestal, and the transfer direction of the substrate can be directed to 32 1312179 Moving, a second transfer plate disposed on the first transfer pedestal to be movable toward the width direction of the substrate, and a third transfer plate disposed to rotate about a rotation axis perpendicular to the substrate The fixture and the fixed alignment point are disposed on the third transfer board. The detection device of claim 28, wherein the driving unit comprises first and second driving units configured to move the third conveying plate in a width direction of the substrate, and to The vertical axis rotates center. The detecting device of claim 29, wherein the first and second driving units are a stepping motor. The detecting device according to any one of claims 2 to 30, wherein the conveying plate is movably disposed on the conveying base in the conveying direction of the substrate. The detecting device according to any one of claims 2-7 to 30, further comprising a substrate driving unit configured to move the conveying plate in the conveying direction of the substrate. The detection device according to any one of claims 2-7 to 30, wherein the fixed alignment point is disposed on the rightmost and leftmost sides of the third transfer plate. The detection device according to any one of claims 2-7 to 30, wherein the variable alignment point further comprises an elastic unit and is in a telescopic contact with the substrate. The detecting device according to any one of claims 2-7 to 30, wherein the variable straightening point further includes its own driving unit and moves toward the width direction of the substrate. 34