CN100437967C - Clamping device, substrate transmitting device, and on-line fpd automatic optical detection device - Google Patents
Clamping device, substrate transmitting device, and on-line fpd automatic optical detection device Download PDFInfo
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- CN100437967C CN100437967C CNB2006101038707A CN200610103870A CN100437967C CN 100437967 C CN100437967 C CN 100437967C CN B2006101038707 A CNB2006101038707 A CN B2006101038707A CN 200610103870 A CN200610103870 A CN 200610103870A CN 100437967 C CN100437967 C CN 100437967C
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- transfer
- base plate
- clamping device
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/42—Measurement or testing during manufacture
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention discloses a substrate clamping device and substrate transmitting device, used for mechanically fixing one side of the substrate and transferring the substrate through vac sorb. The substrate clamping device includes: a upper chuck; a lower chuck, wherein the structure is to put in and clamp the substrate between the upper chuck and the lower chuck; and a vacuum nozzle, to construct to adsorb and fixing the substrate on at least one of the upper chuck and the lower chuck opposite each other, so the substrate fixed by the substrate clamping device is separated during the transport process or scratched on the contact surface are prevented. When the substrate clamped by the substrate clamping device transmits rapidly, the invention prevents the substrate and the substrate clamping device separate and so assure the reliability of the substrate transmitting and advances the productivity of the product.
Description
Technical field
The present invention relates to clamping device, base plate transfer device and online (in-line) flat-panel monitor automatic optical detection device, relate more specifically to and to prevent clamping device, base plate transfer device and the online flat-panel monitor automatic optical detection device that substrate separates or its fixed position changes by the chucking power that increase is used to transmit this substrate.
Background technology
In the manufacture process of flat-panel monitor (FPD), may on substrate, form cut or various fault.Adopt the display pannel checkout equipment to detect cut or various fault, with reduction in the numbers of seconds.For example, when the display base plate of guiding such as TFT-LCD substrate, PDP or colour filter, use optical lens and CCD camera just to catch at the image of inspected object, after this, online FPD automatic optical detection device can use the visual pattern Processing Algorithm to survey various defectives.
Fig. 1 shows to be provided with the view of substrate clamping device with the base plate transfer device of detection substrate 500.
As shown in Figure 1, be formed with the supporting station 800 of the central portion that is used to float substrate 500, the clamping device that substrate drive unit is used for transmitting the substrate 500 that is placed in supporting station 800 is installed in two opposite faces of supporting station 800.Similarly, through the top of supporting station 800, wherein two of this substrate opposite faces are supported by clamping device 700 substrate 500 under following state.At this moment, if substrate is a large-size substrate, then the central portion of this substrate 500 can not keep formation state owing to the deadweight of this substrate is tilted.Therefore, be formed with air gap on this supporting station, make and under the state that air suspends, to transmit substrate 500.In addition, for example the visual apparatus (not shown) of CCD camera checks whether the substrate of this transmission is normal, and can be installed in the top of supporting station 800.
Yet, recently, fast development along with large-size substrate and high-speed transfer thereof, when traditional clamping device 700 adopts the mechanical grip power fixing base 500 of cylinder, its shortcoming is, because be used for fixing the chucking power of substrate 500, substrate 500 separates from clamping device 700 in the transport process of this substrate.In addition, even substrate 500 not exclusively separates, substrate 500 preset distance that also slides from the fixing positions of clamping device 700, thus on substrate, produce cut.
Summary of the invention
Therefore, the present invention is used for solving the problems referred to above that prior art occurs, and the purpose of this invention is to provide a kind of clamping device, a kind of base plate transfer device and online FPD automatic optical detection device, be used for closely fixing base, this can prevent that substrate from separating or float from this substrate clamping device.
Other advantage of the present invention, purpose and feature, part will be set forth in this manual subsequently, and the content below research will be clearer to those skilled in the art for part, perhaps can learn from putting into practice the present invention.
In one aspect of the invention, provide a kind of substrate clamping device, it comprises: upper chuck; And lower chuck, it is configured to put into substrate and clamps this substrate between this upper chuck and lower chuck, wherein, be configured to adsorb and the vacuum noz(zle) of fixing base is formed at least one of opposite face of this upper chuck and lower chuck, and these two opposite faces are toward each other.
Preferably, reveal in order to prevent vacuum pressure, vacuum noz(zle) is given prominence to predetermined height from the substrate contacts face, and is made by flexible resilient material.
On one of them opposite face of upper chuck and lower chuck, be formed with through hole, and vacuum noz(zle) can be arranged in this through hole and be arranged to delegation or multirow on described opposite face.In addition, one of them opposite face is provided with the wherein a kind of vibration absorber that comprises in PEEK, High molecular weight polyethylene (highpolymer polyethylene) and the fluororesin compound, to prevent owing to making substrate damage with substrate contacts.
In another aspect of this invention, a kind of base plate transfer device is provided, it comprises: the substrate clamping device, it comprises upper chuck and lower chuck, described upper chuck and lower chuck are configured to put into substrate and clamp this substrate between this upper chuck and lower chuck, wherein one of them opposite face of this upper chuck and lower chuck is provided with the substrate clamping device, and this substrate clamping device has and is used to adsorb and the vacuum noz(zle) of fixing base; And supporting station, it is configured to base plate supports on vacuum pressure, and this substrate clamping device is installed in the one or both sides of this supporting station.
This supporting nozzle comprises a plurality of air nozzles and roller unit, and these air nozzle arrangement become to float this substrate, and described roller unit is configured to transmit this substrate.
Preferably, this supporting station is formed with the coating of fluoroplastics for example or polytetrafluoroethylene (Teflon).
In one aspect of the invention, provide a kind of online FPD automated optical detection equipment, it comprises: transfer plate, and it is installed in a side of supporting station; Anchor clamps and fixing snap point, it is arranged on a side of this transfer plate; With variable snap point, it is arranged on the opposite side of this transfer plate, and wherein this transfer plate moves on perpendicular to the substrate width direction of substrate direction of transfer, and rotates on around the rotation direction perpendicular to the rotating shaft of substrate.
Online FPD automatic optical detection device comprises the substrate alignment unit, and this substrate alignment unit comprises driver element, and this driver element is configured to move and rotate described transfer plate.
With reference to Fig. 1, base plate transfer device comprises: supporting station 800, and it is used to float the central portion of substrate 500; With clamping device 600, it is installed in the one or both sides of the opposite side of this supporting station 800.Clamping device 600 is provided with vacuum noz(zle), and described vacuum noz(zle) is formed on one of them opposite face of this upper chuck and lower chuck, and these two opposite faces toward each other.
Fig. 2 is the end view that shows the substrate clamping device that is installed in the base plate transfer device.
With reference to Fig. 2, the substrate clamping device that is configured to clamp the edge of substrate 500 is equipped with upper chuck 100a and the lower chuck 100b that forms plate shape, and upper chuck 100a and lower chuck 100b are used to clamp the substrate 500 that is inserted between this upper chuck 100a and the lower chuck.The vacuum noz(zle) that is configured to adsorb and fixes this substrate 500 is formed on one of them opposite face of this upper chuck 100a and lower chuck 100b, and these two opposite faces toward each other.
At first, explanation is comprised the upper chuck 100a that is provided with vacuum noz(zle) 110 and the substrate clamping device of lower chuck 100b.
Substrate clamping device according to the present invention comprises: fixed cell 100, and it has upper chuck 100a and lower chuck 100b, is used for by mechanical pressure and vacuum suction and a side of fixing base 500; Vertical delivery unit 200, it is used to move up and down fixed cell 100; Horizontal transfer unit 300, it is used for according to the size of substrate 500 and moves this fixed cell 100 towards substrate 500 or in the direction (after this, being called " Width of substrate ") opposite with substrate 500; And transfer plate 400, it is used for sender at substrate 500 this fixed cell 100 that moves up.
For example, the fixed cell 100 that is used to clamp the one or both sides of this substrate 500 comprises upper chuck 100a and 100b, this lower chuck and this upper chuck predetermined spaced, and can move up and down.The vacuum noz(zle) 110 that is used for this substrate 500 of vacuum suction is installed in the opposite face of this upper chuck 100a and lower chuck 100b, and these two opposite faces toward each other.To explain in more detail below.The side of lower chuck 100b contact upper chuck 100a, and be configured to when substrate 500 enters between this upper chuck 100a and the lower chuck 100b, move up and fixing base 500 by the contact-making surface along upper chuck 100a.At this moment, because the thickness of substrate 500 is about 0.7mm, can control spacing between upper chuck 100a and the lower chuck 100b by critically mobile lower chuck 100b up and down.
The vertical delivery unit 200 that is used to move up and down fixed cell 100 moves up and down this fixed cell 100, makes substrate 500 to be positioned at corresponding height according to the size or the treatment process of this substrate 500.Vertically delivery unit 200 also is connected to this fixed cell 100 by the vertical delivery unit that is made of common vacuum pressure cylinder.
The horizontal transfer unit 300 that is used for mobile fixed cell 100 on the Width of substrate 500 is connected to vertical delivery unit 200 by the horizontal transmission instrument.But the oil hydraulic cylinder of the routine that along continuous straight runs moves or vacuum pressure cylinder can be used as horizontal transfer unit and use.Horizontal transmission device 300 is by moving to the fixed position from the mobile backward fixed cell 100 of substrate 500 with substrate, to prevent the operation and take out in the operation and interfere of packing into, after the substrate 500 of packing into, fixed cell 100 is moved towards substrate 500 then with substrate 500 at substrate 500.
The transfer plate 400 that is used for transmitting fixed cell 100 along supporting station in support fixation unit, its underpart 100, vertically delivery unit 200 and horizontal transfer unit 300, this transfer plate also slidably moves through transfer path, and described transfer path forms along the length direction of the one or both sides of this supporting station.
Description of drawings
By below in conjunction with the detailed description that accompanying drawing carried out, can more understand above and other objects of the present invention, feature and advantage, wherein:
Fig. 1 is the plane graph that shows the base plate transfer device that is provided with the substrate clamping device;
Fig. 2 is the end view that shows substrate clamping device according to an illustrative embodiment of the invention;
Fig. 3 a and 3b are the stereogram that shows the substrate clamping device that is provided with vacuum noz(zle) according to an illustrative embodiment of the invention;
Fig. 4 a is the view that shows the structure of the substrate clamping device that is provided with vacuum noz(zle) according to an illustrative embodiment of the invention;
Fig. 4 b is the view that shows according to the structure of the substrate clamping device that is provided with vacuum noz(zle) of variation execution mode of the present invention;
Fig. 5 is the view that shows installment state, and wherein substrate is fixed by the vacuum noz(zle) of according to an illustrative embodiment of the invention substrate clamping device.
Fig. 6 is the view that shows another substrate clamping device according to an illustrative embodiment of the invention;
Fig. 7 is the view that shows the structure of the substrate clamping device that is provided with vacuum noz(zle) according to an illustrative embodiment of the invention;
Fig. 8 is the view that shows installment state, and wherein this substrate is fixed by the vacuum noz(zle) of according to an illustrative embodiment of the invention substrate clamping device.
Fig. 9 is the view that shows according to the structure of the substrate clamping device that is provided with vacuum noz(zle) of another illustrative embodiments of the present invention;
Figure 10 is for showing the schematic diagram according to online flat-panel monitor of the present invention (FPD) automatic optical detection device;
Figure 11 is the sectional view that shows according to cylinder of the present invention;
Figure 12 is the sectional view that shows the alternate embodiment of cylinder;
Figure 13 a is the sectional view that shows treatment process to 13c, and wherein substrate is installed on this base plate transfer device safely;
Figure 14 is the schematic diagram that shows online FPD automatic optical detection device;
Figure 15 and 16 is for showing plane graph and the sectional view according to substrate alignment unit of the present invention;
Figure 17 is the view that shows stepper motor; With
Figure 18 a is the plane graph that shows according to the operation of substrate alignment unit of the present invention to 18e.
Embodiment
Below, describe preferred implementation of the present invention with reference to the accompanying drawings in detail.
To explain in more detail below can be with the upper chuck and the lower chuck of vacuum suction substrate.
Shown in Fig. 3 a to 5, the fixed cell 100 that is used for fixing substrate comprises upper chuck 100a and lower chuck 100b.Be used to adsorb and the vacuum noz(zle) 110 of fixing base 500 is formed at least one of upper chuck 100a and lower chuck 100b opposite face respect to one another.In other words, one of them opposite face is provided with the through hole 150 that connects upper chuck 100a and lower chuck 100b.Vacuum noz(zle) 110 is arranged in the through hole 150.At this moment, vacuum noz(zle) 110 can be formed on one or two opposite face of upper chuck 100a and lower chuck 100b.If vacuum noz(zle) 110 is formed on two opposite faces of upper chuck 100a and lower chuck 100b, preferably, vacuum noz(zle) 110 is formed on the same axis of upper chuck 100a and lower chuck 100b and faces with each other, to adsorb simultaneously in a side of substrate 500 and the same position of opposite side.According to this illustrative embodiments, although in through hole 150, be provided with vacuum noz(zle), can be by suction unit 130 is connected to through hole 150 by through hole 150 absorption substrates.
Vacuum noz(zle) 110 has the contact-making surface (being upper surface) that contacts with substrate 500, and is formed for towards the air duct 120 of the inboard suction air of this upper surface.This air duct 120 is connected to suction unit 130, and suction unit 130 is used to carry out and the pump identical operations that is used for suction air.In addition, vacuum noz(zle) 110 can be aligned to delegation or multirow on opposite face.For example, a plurality of vacuum noz(zle)s 110 can be aligned to the fixed pattern of matrix shape on opposite face.
The vibration isolator that intensity is lower than substrate 500 can be installed on the opposite face of upper chuck 100a and lower chuck 100b, damages to prevent substrate 500.Vibration isolator can comprise the high-performance thermoplastic resin polyether-ether-ketone (polyetheretherketone, PEEK), the high polymer polyethylene---wherein polymerization has ethene and fluororesin compound---of thermoplastic resin its be at least a in the polymer of fluorinated hydrocarbons (HFC).
Fig. 6 to 8 shows the illustrative embodiments according to clamping device of the present invention.
With reference to Fig. 6 to 8, the fixed cell 100 that is used for the one or both sides of chucking substrate 500 comprises upper chuck 100a and lower chuck 100b, and lower chuck 100b can move up and down and separate with a preset space length with upper chuck 100a.
In addition, vacuum noz(zle) 111 is made by the silicon of flexible resilient material, and gives prominence to the height of 1～2mm from opposite face.At this moment, if vacuum noz(zle) 111 is higher than 2mm from the projecting height of opposite face, may be owing to the folding space that forms leakage air, its penetrating of vacuum noz(zle) 111 of making owing to flexible resilient material is held generation, and if vacuum noz(zle) 111 projecting heights are lower than 1mm, when suction air, be difficult to make the jag of vacuum noz(zle) 111 adsorb, wrinkle this substrate simultaneously.
The contact-making surface that touches substrate is formed at the upper surface of vacuum noz(zle) 111, and air duct 120 is formed at the inboard of vacuum noz(zle) 111, wherein the suction unit 130 of the function by can realizing pump and suction air.At the outer surface of vacuum noz(zle) 111, a plurality of steps that tilt towards vacuum noz(zle) 111 inboards form by multistage extension.In addition, vacuum noz(zle) 111 can be aligned to delegation or multirow on opposite face, for example when vacuum noz(zle) 111 is aligned to delegation or multirow on opposite face, with the fixed pattern alignment of matrix form.
Fig. 9 is the view that shows according to the structure of the substrate clamping device that is provided with vacuum noz(zle) of another illustrative embodiments of the present invention.
As shown in Figure 9, fixed cell 100 ' can be provided with vacuum pad 110 ', and this vacuum pad 110 ' can be realized the function of vacuum noz(zle).In other words, vacuum pad 110 ' can form the shape of the adsorption plate with pore, thereby adsorbs on whole adsorption plane when touching substrate 500.In addition, a plurality of air ducts 120 ' can separate and be connected with the bottom of vacuum pad 110 ' by preset space length, thereby can pass through suction unit 130 suction airs.
To explain the as above operation of the present invention of structure below.
At first, when substrate 500 is loaded in the base plate transfer device, by cylinder mechanically behind the one or both sides of fixing base 500, clamping device is fixed this substrate 500 by absorbed air, and is moved by the supporting station of the fixing substrate 500 of this clamping device along this base plate transfer device.
For example, when substrate 500 was put between the upper chuck 100a of this clamping device and the lower chuck 100b, top and this substrate 500 that lower chuck 100b moves to this substrate 500 were fixed between this upper chuck 100a and the lower chuck 100b.At this moment, being installed in vibration isolator on the opposite face of upper chuck 100a and lower chuck 100b reduces owing to substrate 500 contacts the damage that friction caused that upper chuck 100a and lower chuck 100b produce.Material such as polyether-ether-ketone (PEEK), High molecular weight polyethylene and fluororesin compound can be used as vibration isolator.
Then, when substrate 500 by the mechanical force of upper chuck 100a and lower chuck 100b fixedly the time, use clamping device substrate 500 chucking power by suction air once more fixing base 500 increase, this is formed at by vacuum noz(zle) 110 on the surface of contact substrate 500, and vacuum noz(zle) 110 is formed on the opposite face of upper chuck 100a and lower chuck 100b.At this moment, vacuum noz(zle) 110 can be formed on one or two opposite face of upper chuck 100a and lower chuck 100b.And, when vacuum noz(zle) 110 is formed on two opposite faces of upper chuck 100a and lower chuck 100b, preferably, by making this vacuum noz(zle) 110 adsorb a side and the opposite side of substrate 500 simultaneously on the same axis that vacuum noz(zle) is aligned in upper chuck 100a and lower chuck 100b.Substrate 500 is transmitted along supporting station by clamping device under following state, and wherein substrate 500 is mechanically fixing by upper chuck 100a and lower chuck 100b, and uses the vacuum suction of chucking power by vacuum noz(zle) 110 of the substrate 500 of clamping device to increase.
As mentioned above, even substrate 500 high-speed transfer, the present invention can prevent that substrate from separating from apparatus for fastening, by by pressure cylinder mechanically fixing base 500 and by vacuum noz(zle) 110 by vacuum suction and fixing base 500, the present invention can guarantee to transmit reliably substrate, and avoid the fixed position of substrate 500 and aligned position to change, and avoid cut, the slip of the substrate 500 when cut results from stationary state.
With reference to Figure 10, online FPD automatic optical detection device comprises that supporting station, supporting machinery hand, substrate transferring unit and transmission float the unit.
Supporting station 600 forms and extends longitudinally, and promptly the direction of transfer that transmits along substrate 500 extends, and the substrate 500 that aligns and pack into again.Width perpendicular to the supporting station 600 of this direction of transfer can form littler than the width of substrate 500 in the horizontal direction.In addition, supporting station 600 guides the substrate 500 of packing into along direction of transfer.The path unit 630 of this conveyer is installed in a side of the horizontal direction of supporting station 600.Path unit 630 forms in the vertical direction extends, similar with supporting station 600, and the width of vertical direction is littler than the width of supporting station 600.Be formed with the air nozzle 610 that is used to float substrate on the supporting station 600.
As shown in figure 12, on cylinder, conveyer belt can be installed, make a plurality of cylinders be engaged with each other and increase the contact area of substrate.As shown in figure 12, a conveyer belt only has been installed, but also many conveyer belts can be installed.
Next, explanation is provided with the operation of the substrate detection apparatus of base plate transfer device.
With reference to Figure 10, supporting machinery hand (not shown) is from the substrate accumulator (not shown) substrate 500 of taking, and the inlet towards supporting station 600 transports substrate then.When substrate was loaded on the supporting station 600, the substrate floating unit that is formed with a plurality of minute diameter nozzles 610 made substrate 500 float preset distance by nozzle 610.Then, fixed cell 100 is positioned at an end of substrate 500.Fixed cell 100 moves on perpendicular to the horizontal direction of direction of transfer, and joins substrate 500 between upper clipping claw and following claw to and fixing base 500.And, to shown in the 13c,, be arranged on sustained height as Figure 13 a in the end of the drum apparatus 620 of the opposite side of fixed cell 100 and substrate 500 opposite sides according to the size of substrate 500 contiguously.At this moment, fixed cell 100a and 100b move up a bit, make to prevent to interfere with drum apparatus 620, and move substrate 500 is positioned at the top of drum apparatus 620 towards cylinder 620.Fixed cell 100a and 100b descend so that substrate 500 is placed on the top of cylinder 620 safely.After installing safely, substrate 500 uses the calibrator alignment of 5 types, and this calibrator is installed in path unit 630 and the supporting station 600.
When substrate 500 firmly alignd by substrate transferring unit and installs, fixed cell 100a and 100b began to move up the sender, and the cylinder of drum apparatus 620 begins freely to rotate on the direction that substrate 500 moves.When arriving detecting unit, substrate 500 is accepted detection, moves with fixed speed simultaneously.Use the checkout equipment of optical lens and CCD camera for example to carry out pattern detection and defects detection to substrate 500.The substrate 500 of finishing detection is moved to the outlet of supporting station 600 by substrate transferring unit.Take out the supporting machinery hand and move forward and backward the arm that moves up simultaneously, thereby take out the substrate 500 that has detected, and substrate 500 is stored in the substrate accumulator (not shown) from supporting station 600.The fixed cell 100a and the 100b that have finished substrate 500 transmission begin moving in the opposite direction with supporting side and be parked in initial position, thus complete operation.
Although not shown in the accompanying drawing, preferably, the upper surface of supporting station is formed with the coating of fluororesin for example or polytetrafluoroethylene (Teflon), and thickness is 10～100 microns.If be formed with coating, even substrate also can prevent substrate damage taking place to be touched when transmit at a high speed on the surface of the air sliding part that is coated with interval.
In addition, the present invention is formed with electrode film on the surface of substrate, on a part of upper surface of supporting station, be formed with electric conductor, and comprise the power supply unit that is used for providing electric power and be used for the probe unit that contacts whether the exploring electrode film is electrically connected to electric conductor, thereby prevent from when board transport, to produce cut to electrode film or electric conductor.
In addition, even being formed at the surface of the air sliding part on the upper surface of supporting station subsides when board transport singularly, the present invention can pass through cylinder transmission base plate safely, this cylinder comprises and is used to respond to the transducer of air nozzle air pressure and the controller that is used to control, and makes whether this cylinder can normally move up and down according to the air pressure that passes transducer.
With reference to Figure 14, online FPD automatic optical detection device comprises transfer station 18, transfer robot 12a and 12b, base plate transfer device 20, air sliding part 14, detecting unit 15 and substrate alignment unit 16.
In transfer robot 12, the first manipulator 12a and the second manipulator 12b are installed in the entrance and exit place of transfer station respectively.The first manipulator 12a takes out the substrate 10 that does not detect from substrate accumulator (not shown), rotates simultaneously, move forward and backward by multi-joint arm, and towards transmitting section this substrate that does not detect 10 of packing into.The substrate 10 that the second manipulator 12b will finish detection takes out and delivers to substrate accumulator (not shown).
With reference to Figure 15 and 16, base plate transfer device comprises: first transfer plate 60, and it is mounted to and can moves on the linear track 24 of base plate 22; Transmit driver element 72 with substrate, it is used for transmitting first transfer plate 60 on the substrate direction of transfer.Second transfer plate 62 is installed on the upper surface of first transfer plate 60, thereby can be in the horizontal direction---and be to move on the horizontal direction of substrate 10, vertically rotating shaft 70 is arranged on the upper surface of second transfer plate 62, and the 3rd transfer plate 62 is mounted to and can rotates around this rotating shaft.First and second driver elements 66 are connected with 62 with first and second transfer plates 60 with 68, move and rotate the second and the 3rd transfer plate 62 and 64 with front and back.A plurality of anchor clamps and fixedly snap point 20 and 36a are arranged on the 3rd transfer plate 64.Simultaneously, variable snap point 36b is arranged on the offside of transfer plate.
Preferably, stepper motor is as first and second driver elements 66 and 68, and it is installed on the upper surface of first and second transfer plates 60 and 62, moves and rotate the second and the 3rd transfer plate 62 and 64 with front and back.In addition, preferably, linear motor transmits driver element 72 as substrate, to move the first substrate plate 60 in the vertical.Certainly, the position of these driver elements can change according to practical situation.For example, second driver element 68 is mounted in abutting connection with vertical axes, by pushing away and drawing the 3rd transfer plate 64 to make the 3rd transfer plate 64 rotate.In addition, first and second driver elements 66 and 68 are installed in the both sides of rotating shaft 70 on first transfer plate 60, and making can be by pushing away and drawing the 3rd transfer plate 64 to control moving forward and backward and rotating of the 3rd transfer plate 64.Therefore, by vertical rotating shaft is set, second transfer plate 62 can be guiding piece, is used to guide the motion at the Width of first transfer plate, 60 upper edge substrates.
As shown in figure 17, common 4 phase stepper motors 38 comprise rotor 40 and stator 42.Rotor 40 comprises: be magnetized to the permanent magnet 44 of axis direction and the upper core 46 and the lower core 48 in the outside thereof.Upper core 46 and lower core 48 are magnetized to the N utmost point and the S utmost point of permanent magnet 44 respectively, and 4 phase excitation coils are wound on the stator 42.When direct current (DC) flowing through coil 50, stator 42 magnetization and pulling rotor 40.After this, axle 52 is by rotor 40 rotational fixation angles.
Similarly, stepper motor 38 generally is used for critically controlling mechanical movement.Compare with servo motor, stepper motor 38 more cheaply and is advantageously accurately controlled angle.Particularly, because stepper motor can be controlled by pulse digitally, its advantage is can be with minimum unit control.In addition, because the rotatable fixed angles of stepper motor 38 stop significantly and accurately, and can easily repair and equip and have high reliability, and need not to be used to detect the feedback of motor drive shaft position.In addition, owing to when motor stops, producing big static torque, just do not need for example maintenance equipment of electronic brake.
According to the size of substrate 10, the anchor clamps 20 that are configured to chucking substrate 10 form delegation or form multirow with the number (for example 3 to 5) that equates on the 3rd transfer plate 64.
Refer again to Figure 16, anchor clamps 20 comprise upper clipping claw 32a and following claw 32b, pitch controller 34 and the horizontal movement unit 36 that is configured to chucking substrate 10.
Because spacing changes according to the size of substrate 10, so horizontal movement unit 36 flatly mobile upper clipping claw 32a and following claw 32b on orientation substrate or its rightabout.
Fixing snap point 36b is arranged to be parallel to anchor clamps 20 on the 3rd transfer plate 64.For example, Gu Ding snap point 36b can be arranged on the leftmost side and the rightmost side of anchor clamps 20.Simultaneously, variable snap point 36a is arranged on the base plate and the fixing relative side of snap point 36b.In addition, variable snap point 36a comprises the Flexible element of for example spring that flexibly touches substrate 10.Fixedly snap point 36b is a fixed cell, and variable snap point 36a can carry out rectilinear motion, and it is by motion before and after the special driving unit is on the Width of substrate.
Next, explanation is provided with the operation of the substrate detection apparatus of substrate alignment unit.
With reference to Fig. 3, after getting substrate 10 from substrate accumulator (not shown), substrate manipulator 12a transports substrate 10 towards the inlet of transfer plate 18.After substrate 10 was loaded into transmission section 30, the air sliding part 14 that is formed with a plurality of minute diameter nozzles 21 was after making substrate 10 float preset space length by nozzle 21, and substrate 10 begins to align.
As Figure 18 a to shown in the 18e, if substrate 10 loads with unjustified state, variable snap point 36a begins to move on orientation substrate, and wherein this base plate transfer device is positioned at and transmits section 30 1 sides, and this variable snap point 36a is arranged on the opposite side of base plate transfer device.At this moment, the operation owing to first driver element on orientation substrate of second transfer plate 62 of first transfer plate, 60 tops begins to move.This variable snap point 36a that moves on orientation substrate moves shown in Figure 18 b, align on Width up to substrate, with fixing snap point 36b on the same line of anchor clamps 20.At this moment, anchor clamps 20 chucking substrate 10 not.Anchor clamps 20 keep the position of substrates 10, and with chucking substrate 10 by mobile upper clipping claw and following claw and shown in Figure 18 c, and supporting bracket 35 is connected to main body 32 and 33 on orientation substrate, and variable snap point 36a is mobile backward.Then, anchor clamps 20 and fixedly snap point 36b on direction of transfer, transmit driver element 72 and move a preset space length by substrate, with the starting point of the substrate direction of transfer that optionally aligns.After finishing alignment, make the 3rd transfer plate 64 39 rotate a predetermined angular around the shaft by driving second driver element 68, thereby finish alignment, shown in Figure 18 d and 18e.In the accompanying drawings, rotational angle is depicted as wide-angle, to show rotational motion.Yet substrate 10 is to align by the unusual rotation of minute angle.
Refer again to Figure 14, if substrate 10 firmly aligns and installs, anchor clamps 20 beginnings move up the sender.Arrive at the substrate 10 of detecting unit 15 and when moving, accept detection with fixed speed.The checkout equipment of optical lens and CCD camera comes substrate 10 is carried out pattern detection and defects detection by for example using.Then, according to the pattern of substrate 10, repeat the alignment once more and the detection of substrate 10.In addition, the substrate 10 of finishing detection moves to the outlet that transmits section 30 by anchor clamps 20.Be used to take out the supporting machinery hand 12b rotation of substrate and move forward and backward, arm simultaneously moves up.Then, getting the substrate 10 of finishing detection from supporting section 30 also is stored in this substrate of getting 10 the substrate accumulator (not shown).It 20 snaps to this initial position to finish folder that substrate 10 transmits, and this process is finished then.
Produce following beneficial effect according to clamping device of the present invention, base plate transfer device and online flat-panel monitor automatic optical detection device.
At first, when by the substrate high-speed mobile of substrate clamping device clamps, prevent that substrate from separating from the substrate clamping device, thereby guarantee the reliability that substrate transmits and improve the production rate.
The second, prevent the change in location of substrate, thereby make substrate can be sent to the fixed position.
The 3rd, by using mechanically chucking substrate of substrate clamping device, can prevent from substrate surface, to produce cut.
The 4th, vacuum noz(zle) is made by flexible resilient material, and forms the outstanding predetermined altitude from substrate contacts surface, thereby leakage air forms vacuum pressure, and this vacuum pressure can produce between substrate and vacuum noz(zle) by hermetic sealing substrate closely.
The 5th, the substrate transferring unit of substrate detection apparatus transmits substrate under the state of an end of chucking substrate only, can be effectively and firmly transmit flat-panel monitor thereby make.
The 6th, be positioned at the motor of supporting section one side by control, rather than control the existed system that is used for synchronously controlling the motor that is positioned at the supporting section opposite side, manufacturing cost can be reduced, and the risk factors that produce in the Synchronization Control can be exempted.
The 7th, even substrate can prevent also that coming in contact substrate is damaged when transmit at a high speed on the air sliding part surface that forms cated section.
The 8th, when transmitting substrate, even break down in the air sliding part surface that is formed on the supporting station upper surface, substrate also can be transmitted safely by the cylinder that is used for supporting substrate.
The 9th, owing to check whether substrate contacts the upper surface of supporting station, thus can prevent from substrate, to produce cut.
The tenth, the snap point of the substrate alignment unit of substrate detection apparatus only is arranged on two surfaces of substrate, shows and makes its structure to simplify.
The 11, by using stepper motor, can realize high accuracy and high-precision alignment by pulsed drive, and the correction of can aliging at any time during operation.
Described preferred implementation of the present invention, it will be understood by those skilled in the art that under the situation of disclosed scope and spirit in not departing from claim of the present invention, various correction forms, increase and alternative form can have been arranged based on exemplary purpose.Thereby scope of the present invention should be limited by subsidiary claim and jural equivalent thereof.
Claims (35)
1. substrate clamping device, it comprises:
Upper chuck; With
Lower chuck, it is configured to be placed in substrate between described upper chuck and the lower chuck and clamp described substrate,
Wherein, be configured to adsorb and the vacuum noz(zle) of fixing described substrate is formed in the opposite face of described upper chuck and lower chuck at least one, these two opposite faces toward each other.
2. substrate clamping device as claimed in claim 1, wherein said vacuum noz(zle) form from the outstanding predetermined height of substrate contacts face.
3. it is 1～2mm that substrate clamping device as claimed in claim 2, wherein said vacuum noz(zle) form from the outstanding height of described substrate contacts face.
4. substrate clamping device as claimed in claim 2, wherein said vacuum noz(zle) forms by extending a plurality of steps, and described step becomes makes the outer surface of described vacuum noz(zle) downwards towards the inner inclination of vacuum noz(zle).
5. substrate clamping device as claimed in claim 1 or 2 wherein be formed with through hole at least one in the opposite face respect to one another of described upper chuck and lower chuck, and vacuum noz(zle) is arranged in the described through hole.
6. substrate clamping device as claimed in claim 1 or 2, wherein said vacuum noz(zle) are arranged to delegation or multirow on described opposite face.
7. substrate clamping device as claimed in claim 1 or 2, wherein said vacuum noz(zle) is made by the silicon elastomeric material.
8. substrate clamping device as claimed in claim 1 or 2, wherein, at least one in the described opposite face is provided with vibration absorber, is used to prevent described substrate damage.
9. substrate clamping device as claimed in claim 8, wherein said vibration absorber comprise at least a in polyether-ether-ketone, High molecular weight polyethylene and the fluororesin compound.
10. base plate transfer device, it comprises:
Substrate clamping device according to claim 1 and 2; With
Supporting station, by described substrate clamping device is installed in the one or both sides of this supporting station, described supporting station is configured to base plate supports on vacuum pressure.
11. base plate transfer device as claimed in claim 10, wherein said supporting station also comprises a plurality of air nozzles and roller unit, and these air nozzle arrangement become to float this substrate, and described roller unit is configured to transmit described substrate.
12. base plate transfer device as claimed in claim 11, wherein said roller unit comprise cylinder and cylinder supporting bracket.
13. base plate transfer device as claimed in claim 12, wherein a plurality of described roller units are installed along the direction of transfer of described supporting station.
14. base plate transfer device as claimed in claim 12, wherein said cylinder is by roller bearings.
15. base plate transfer device as claimed in claim 12, wherein said cylinder supporting bracket comprises first supporting bracket and second supporting bracket, and relative second supporting bracket of this first supporting bracket is installed on orientation substrate movably.
16. base plate transfer device as claimed in claim 15 wherein has the vacuum pressure cylinder between described first supporting bracket and second supporting bracket.
17. base plate transfer device as claimed in claim 13 wherein has conveyer belt to be wound on described a plurality of roller unit.
18. base plate transfer device as claimed in claim 10 wherein is formed with coating on the part of the upper surface of described supporting station.
19. base plate transfer device as claimed in claim 18, wherein said coating comprises fluororesin.
20. base plate transfer device as claimed in claim 18, wherein said coating comprises polytetrafluoroethylene.
21. base plate transfer device as claimed in claim 18, the coating thickness of wherein said coating are 10～100mm.
22. base plate transfer device as claimed in claim 12 also comprises:
Transducer, it is configured to the air pressure of sensing air nozzle; With
Controller, it is configured to whether normally control described cylinder according to the air pressure of described transducer institute sensing and moves up and down.
23. base plate transfer device as claimed in claim 11 wherein is formed with electrode film on the surface on described surface, and the part of the upper surface of described supporting station is provided with conductor.
24. base plate transfer device as claimed in claim 23 also comprises:
Power supply unit, it is configured to provide electric power to described electrode film or conductor; With
The contact induction unit, whether it is configured to sensing has electric current to flow between described electrode film and conductor.
25. base plate transfer device as claimed in claim 12, the surface of wherein said cylinder comprise at least a in polyether-ether-ketone, High molecular weight polyethylene and the fluororesin compound.
26. online flat-panel monitor automatic optical detection device with the described base plate transfer device of claim 12.
27. checkout gear as claimed in claim 26 also comprises:
Transfer plate, it is installed in a side that transmits section;
Anchor clamps and fixing snap point, it is installed in a side of transfer plate;
Variable snap point, it is installed in the opposite side of transfer plate; With
Driver element, it is configured to move and rotate transfer plate,
Wherein said transfer plate moves on perpendicular to the substrate width direction of substrate direction of transfer, and is mounted on the rotation direction of winding perpendicular to the rotating shaft of substrate and rotates.
28. checkout gear as claimed in claim 27, wherein said transfer plate comprises: first transfer plate, and it is installed on the side of described transmission section, and is movably on described substrate direction of transfer; Second transfer plate, it is installed on this first transmission section, and is movably on described substrate width direction; With the 3rd transfer plate, it is mounted to can wind perpendicular to the rotation of substrate and rotates, wherein said chuck and fixedly snap point be arranged on the 3rd transfer plate.
29. checkout gear as claimed in claim 28, wherein said driver element comprises first and second driver elements, and it is configured to move described the 3rd transfer plate and rotates around vertical axes on the substrate width direction.
30. checkout gear as claimed in claim 29, wherein said first and second driver elements are stepper motors.
31. checkout gear as claimed in claim 27, wherein said transfer plate is being installed on the substrate direction of transfer on the described transmission section movably.
32. checkout gear as claimed in claim 27 also comprises being configured to the move up substrate drive unit of described transfer plate described substrate sender.
33. checkout gear as claimed in claim 27, wherein said fixedly snap point is arranged on the rightmost side and the leftmost side of described the 3rd transfer plate.
34. checkout gear as claimed in claim 27, wherein said variable snap point also comprises Flexible element, and flexibly contacts described substrate.
35. checkout gear as claimed in claim 27, wherein said variable snap point also comprises the driver element of controlling oneself, and moves on described substrate width direction.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020050071378 | 2005-08-04 | ||
| KR1020050071367 | 2005-08-04 | ||
| KR1020050071367A KR101139371B1 (en) | 2005-08-04 | 2005-08-04 | Panel display clamping apparatus and transfering and inspecting apparatuses having the same |
| KR1020050073713 | 2005-08-11 | ||
| KR1020050076036 | 2005-08-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1909203A CN1909203A (en) | 2007-02-07 |
| CN100437967C true CN100437967C (en) | 2008-11-26 |
Family
ID=37700250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006101038707A Expired - Fee Related CN100437967C (en) | 2005-08-04 | 2006-08-04 | Clamping device, substrate transmitting device, and on-line fpd automatic optical detection device |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR101139371B1 (en) |
| CN (1) | CN100437967C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110906980A (en) * | 2019-11-14 | 2020-03-24 | 深圳市华星光电半导体显示技术有限公司 | Detection system and detection method |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009173433A (en) * | 2008-01-28 | 2009-08-06 | Panasonic Corp | Substrate detection device and substrate carrying device |
| JP4560615B2 (en) * | 2008-09-08 | 2010-10-13 | ＡｖａｎＳｔｒａｔｅ株式会社 | Glass plate transfer roller inspection device |
| KR101056705B1 (en) * | 2011-05-09 | 2011-08-12 | 한국뉴매틱(주) | Vacuum gripper device |
| CN103135264B (en) * | 2011-11-30 | 2016-10-26 | 上海中航光电子有限公司 | Shading element processing unit (plant) |
| KR101456665B1 (en) * | 2013-04-10 | 2014-11-04 | 주식회사 선익시스템 | Apparatus for clamping substrate |
| KR101451506B1 (en) * | 2013-04-17 | 2014-10-17 | 삼성전기주식회사 | Pcb transfer device in noncontact way |
| EP2854166B1 (en) * | 2013-09-27 | 2016-06-29 | Applied Materials Italia S.R.L. | Apparatus for aligning a substrate |
| KR20240036141A (en) * | 2014-06-17 | 2024-03-19 | 카티바, 인크. | Printing system assemblies and methods |
| CN104860066B (en) * | 2015-04-30 | 2017-11-03 | 洛阳理工学院 | A kind of glass base plate transport device |
| CN105460617B (en) * | 2015-12-25 | 2017-07-14 | 重庆市合川区金星玻璃制品有限公司 | glass carrier |
| CN105712076B (en) * | 2016-04-06 | 2018-09-21 | 广州达意隆包装机械股份有限公司 | A kind of sheets clamp device |
| CN107976452B (en) * | 2016-10-24 | 2020-06-19 | 致茂电子股份有限公司 | Detection device |
| CN109292438A (en) * | 2018-10-16 | 2019-02-01 | 常州铭赛机器人科技股份有限公司 | Magazine conveying device and miniature lens module detection system with it |
| KR102015356B1 (en) * | 2019-01-31 | 2019-09-03 | 주식회사 이엔씨 테크놀로지 | Inspection equipment for inspecting flexible display device and stage apparatus used therein |
| KR102071353B1 (en) * | 2019-02-13 | 2020-01-30 | 주식회사 이엔씨 테크놀로지 | Inspection equipment for inspecting flexible display device and stage apparatus used therein |
| CN110112087A (en) * | 2019-05-23 | 2019-08-09 | 德淮半导体有限公司 | Wafer transfer box and its control method |
| KR20210137343A (en) | 2020-05-08 | 2021-11-17 | 삼성디스플레이 주식회사 | Apparatus for manufacturing display device and method for manufacturing display device |
| KR102329139B1 (en) | 2020-08-04 | 2021-11-23 | 주식회사 이엔씨 테크놀로지 | Stage apparatus for supporting foldable display device and inspection equipment thereof |
| KR102396316B1 (en) | 2020-08-13 | 2022-05-11 | 주식회사 이엔씨 테크놀로지 | Inspection equipment for inspecting foldable display device and stage apparatus used therein |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000286185A (en) * | 1999-03-31 | 2000-10-13 | Nec Kansai Ltd | Spin chuck |
| US6343905B1 (en) * | 1999-12-17 | 2002-02-05 | Nanometrics Incorporated | Edge gripped substrate lift mechanism |
| JP2003224100A (en) * | 2002-01-30 | 2003-08-08 | Tokyo Electron Ltd | Substrate treatment equipment and method therefor |
| US20030178949A1 (en) * | 2002-03-20 | 2003-09-25 | Yazaki Corporation | Arc discharge preventing device |
| JP2005172782A (en) * | 2003-12-09 | 2005-06-30 | Samsung Corning Precision Glass Co Ltd | Method and device for inspecting glass substrate |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR200173017Y1 (en) * | 1995-06-20 | 2000-03-02 | 김영환 | Wafer transporting unit |
-
2005
- 2005-08-04 KR KR1020050071367A patent/KR101139371B1/en not_active IP Right Cessation
-
2006
- 2006-08-04 CN CNB2006101038707A patent/CN100437967C/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000286185A (en) * | 1999-03-31 | 2000-10-13 | Nec Kansai Ltd | Spin chuck |
| US6343905B1 (en) * | 1999-12-17 | 2002-02-05 | Nanometrics Incorporated | Edge gripped substrate lift mechanism |
| JP2003224100A (en) * | 2002-01-30 | 2003-08-08 | Tokyo Electron Ltd | Substrate treatment equipment and method therefor |
| US20030178949A1 (en) * | 2002-03-20 | 2003-09-25 | Yazaki Corporation | Arc discharge preventing device |
| JP2005172782A (en) * | 2003-12-09 | 2005-06-30 | Samsung Corning Precision Glass Co Ltd | Method and device for inspecting glass substrate |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110906980A (en) * | 2019-11-14 | 2020-03-24 | 深圳市华星光电半导体显示技术有限公司 | Detection system and detection method |
| CN110906980B (en) * | 2019-11-14 | 2021-10-08 | 深圳市华星光电半导体显示技术有限公司 | Detection system and detection method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1909203A (en) | 2007-02-07 |
| KR101139371B1 (en) | 2012-06-28 |
| KR20070016576A (en) | 2007-02-08 |
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Effective date of registration: 20151118 Address after: Gyeonggi Do, South Korea Patentee after: Excellent vision Corporation Address before: Gyeonggi Do city on the South Korean court District compound 333-5 hole bit Patentee before: Aid Engineering Co., Ltd. |
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