CN100570385C - The TCP treating apparatus - Google Patents

The TCP treating apparatus Download PDF

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Publication number
CN100570385C
CN100570385C CNB2004800430112A CN200480043011A CN100570385C CN 100570385 C CN100570385 C CN 100570385C CN B2004800430112 A CNB2004800430112 A CN B2004800430112A CN 200480043011 A CN200480043011 A CN 200480043011A CN 100570385 C CN100570385 C CN 100570385C
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CN
China
Prior art keywords
tcp
carrier band
sprocket wheel
pusher
treating apparatus
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Expired - Fee Related
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CNB2004800430112A
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Chinese (zh)
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CN1954222A (en
Inventor
村野寿
清水洁
金子修一
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Advantest Corp
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Advantest Corp
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Publication of CN1954222A publication Critical patent/CN1954222A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2893Handling, conveying or loading, e.g. belts, boats, vacuum fingers

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

TCP processor (2) forms the carrier band (5) of a plurality of TCP on tape by pusher element (3) supporting and it is pressed on the probe (8) that is connected with test head electrical, the outside terminal of TCP is connected with probe (81), can implement test to a plurality of TCP in turn thus, wherein, pusher element (3) possesses torque motor (41) and driving that can be by this torque motor (41) carrier band (5) is paid the tension force sprocket wheel (35a) of regulation tension force, clamps the link (flexible connection) 43 that can absorb vibration between the turning axle (351) of the driving shaft (411) of torque motor (41) and tension force sprocket wheel (35a).

Description

The TCP treating apparatus
Technical field
The present invention relates to a kind of TCP treating apparatus that is used to test TCP (Tape CarrierPackage) as a kind of IC device or COF (Chip On Film) (below, will be referred to as " TCP ") by TCP, COF, other the device of TAB (Tape Automated Bonding) field engineering manufacturing.
Background technology
In the manufacture process of electronic components such as IC device, need be used to test the IC device of final manufacturing or at the performance of the device in interstage etc. or the electronic component test unit of function, in the occasion of TCP, the test unit that uses TCP to use.
The test unit that TCP uses generally is made of tester body, measuring head, TCP treating apparatus (below the occasion that is called " TCP processor " is arranged).This TCP processor has such function, promptly, conveying is in the band (notion that also contains film, below identical) go up to form the carrier band of a plurality of TCP, carrier band is pressed against on the probe of the probe that is connected with test head electrical, the outside terminal of TCP is contacted with probe, thereby in turn a plurality of TCP are tested.
Such a TCP processor usually has pusher body and sprocket wheel, and to probe, this sprocket bearing carrier band is also carried this carrier band to this pusher body with the carrier band pushing.In sprocket wheel, there is rear section side to drive the head sprocket of carrier band and the auxiliary sprocket wheel of carrying at the auxiliary carrier band of the leading portion side of pusher body at the pusher body, usually, head sprocket is connected with step motor, and auxiliary sprocket wheel and head sprocket rotate synchronously.
Yet, in formation as described above, owing to can not pay with enough tension force to carrier band, so, have in the carrier band course of conveying carrier band shake and can not be carrying the such problem of carrier band at a high speed, or when carrier band is stopped, on carrier band, producing lax and can not correctly carry out the TCP problem such with respect to the contraposition of probe.
In addition,, also have to make the reverse gimmick of some amounts of auxiliary sprocket wheel forcibly, pay difficult point to carrier band with excessive stress but exist in this occasion for carrier band is paid with tension force.
Summary of the invention
The present invention makes in view of such actual conditions, and its objective is provides a kind of TCP treating apparatus, and it can pay suitable tension force to carrier band, correctly carries out the location of carrier band (TCP), simultaneously, and the shake of the carrier band in can suppressing to carry.
For reaching above-mentioned purpose, first, the invention provides a kind of TCP treating apparatus, it is carried by conveying device by the carrier band that will form a plurality of TCP on tape, simultaneously, push to the contact site that is connected with test head electrical by pusher, the outside terminal of TCP is connected with described contact site, thereby can test a plurality of TCP in turn, it is characterized in that, described conveying device, in order to support carrier band and to make the operation of this carrier band and stop, having first sprocket wheel in the leading portion side of described pusher, have second sprocket wheel at rear section side, be connected with the drive source that can make the rotation of described first sprocket wheel on described first sprocket wheel, described drive source is to pay the mode of regulation tension force and be controlled (invention 1) being bearing in carrier band on described first sprocket wheel and described second sprocket wheel.
In described invention (invention 1), by the control in the first chain wheel driving source, can carrier band not paid with excessive stress, can be with the tension force supporting carrier band of appropriateness.Thus, when carrier band stops, can correctly carrying out the location of carrier band (TCP), when the conveying of carrier band, can suppress the shake of carrier band and at a high speed carry carrier band, and then reach the raising of the processing speed of TCP treating apparatus.
In described invention (invention 1), preferably, the revolving force that described drive source is paid described first sprocket wheel is the revolving force (invention 2) of the direction opposite with the sense of rotation of described second sprocket wheel.
In described invention (invention 1,2), preferably, between described first sprocket wheel and described drive source, clamp the link (invention 3) that can absorb vibration.
According to described invention (3), even on the driving shaft in the first chain wheel driving source, produce vibration, also can absorb the vibration (might not mean that 100% absorbs vibration, identical in this manual) of driving shaft by link, and, can be to the revolving force of first sprocket wheel transmission driving shaft.Thus, reduce the vibration of first sprocket wheel, suppress to result from the shake of carrier band of this vibration or the offset of carrier band (TCP) effectively.
Second, the invention provides a kind of TCP treating apparatus, carry by conveying device by the carrier band that will form a plurality of TCP on tape, simultaneously,, the outside terminal of TCP is connected with described contact site, thereby can tests a plurality of TCP in turn to the contact site that is connected with test head electrical by the pusher pushing, it is characterized in that described conveying device has sprocket wheel, drive source and link; This sprocket wheel is located at the leading portion side of described pusher, can support carrier band; This drive source can be paid revolving force with the sense of rotation opposite with the rotation direction of carrier band to described sprocket wheel; This link is located between the turning axle of described drive source drives axle and described sprocket wheel, can absorb vibration (invention 4).
According to described invention (4), even on the drive source drives axle, produce vibration, also can absorb the vibration of driving shaft by link, and, transmit the revolving force of driving shaft to the turning axle of sprocket wheel.Thus, reduce the vibration of sprocket wheel, suppress to result from the shake of carrier band of this vibration or the offset of carrier band (TCP) effectively.
In described invention (invention 4), preferably, described link is the parts (invention 5) that have flexibility at least at torsional direction.According to these parts, can absorb the vibration of driving shaft effectively with simple structure.As such parts, for example,, be not limited thereto though can use the so-called shaft coupling that is called as flexible connection.
In described invention (invention 4,5), preferably, described link is the parts (invention 6) with bellows configuration.According to such parts, can absorb the vibration of driving shaft by bellows configuration effectively, simultaneously, can transmit the revolving force of driving shaft efficiently to the turning axle of sprocket wheel.
In described invention (invention 4~6), preferably, described drive source is torque motor (invention 7).According to torque motor, the control that the tension force that is undertaken by described sprocket wheel is paid is easy.In addition, be the occasion of torque motor at drive source, though be easy to vibrate, can absorb its vibration by link at driving shaft.
Also can so be provided with in described invention (invention 4~7), described sprocket wheel is arranged on the framework in the mode from last side bearing carrier band, in described framework, is provided with from side bearing down and to the band support unit (invention 8) of its channeling conduct.
According to described invention (invention 8), because can support carrier band from above-below direction by sprocket wheel and band support unit, so can prevent the useless movement of carrier band effectively, can carry more at high speed, the processing speed of TCP treating apparatus is improved, simultaneously, can suppress the offset of carrier band effectively.
Second, the invention provides a kind of TCP treating apparatus, carry by conveying device by the carrier band that will form a plurality of TCP on tape, simultaneously,, the outside terminal of TCP is connected with described contact site, thereby can tests a plurality of TCP in turn to the contact site that is connected with test head electrical by the pusher pushing, it is characterized in that described conveying device has sprocket wheel and framework; This sprocket wheel the leading portion side of described pusher and/or rear section side from side bearing and carry carrier band; The described sprocket wheel of this supporting framework; In described framework, be provided with from following side bearing and guide the band support unit (invention 9) of carrier band.
According to described invention (invention 9), owing to can support carrier band from above-below direction by sprocket wheel and band support unit, so can prevent the useless movement of carrier band effectively, can carry more at high speed, the processing speed of TCP treating apparatus is improved, simultaneously, can suppress the offset of the carrier band that the vibration etc. by sprocket wheel causes effectively.
In described invention (invention 9), also can possess and to adsorb the adsorbent equipment (invention 10) that keeps carrier band.This adsorbent equipment can adsorb and fixing carrier band by guiding piece inhibition offset, the therefore location that can easily carry out being tested TCP.
Description of drawings
Fig. 1 is the front elevation that the TCP test unit of the TCP processor that adopts an embodiment of the present invention is shown.
Fig. 2 is the front elevation of the pusher element in the TCP processor of this embodiment.
Fig. 3 is the sectional view of the tension force chain wheel driving device in the TCP processor of this embodiment.
Fig. 4 is the stereographic map of the link in the TCP processor of this embodiment.
Fig. 5 is the side view of the band support unit in the TCP processor of this embodiment.
Fig. 6 is the stereographic map of the band support unit in the TCP processor of this embodiment.
Embodiment
Below, based on accompanying drawing embodiments of the present invention are elaborated.
Figure 1 illustrates the TCP test unit of the TCP processor that adopts one embodiment of the present invention.
The measuring head 10 that TCP test unit 1 is electrically connected by not shown tester body, with the tester body and constitute at the TCP processor 2 of the upside setting of measuring head 10.
TCP processor 2 is tested a plurality of TCP that form in turn on carrier band 5, in the present embodiment, for the purpose of simplifying the description, be configured to and test TCP one at a time.But the present invention is not limited thereto, also can test simultaneously along direction in upright arrangement and/or and column direction be arranged in a plurality of TCP on the carrier band 5.
TCP processor 2 has unreeling shaft 21 and Scroll 22, the carrier band 5 before unreeling shaft 21 is wound with test.Carrier band 5 is emitted from unreeling shaft 21, is wound onto after the test on the Scroll 22.
Be provided with three and isolate roller 23a, 23b, 23c between unreeling shaft 21 and Scroll 22, this isolation roller will be forwarded to Scroll 22 from unreeling shaft 21 from the boundary belt 51 that carrier band 5 is peeled off.Each isolates roller 23a, 23b, 23c movably is being provided with up and down respectively, thereby can adjust the tension force of boundary belt 51.
Downside at unreeling shaft 21, be provided with band guiding piece 24a, unwrapping wire restrict rollers 25a, input side auxiliary chain wheel 25b and input side guide reel 25c, the carrier band 5 of emitting from unreeling shaft 21 is guided by band guiding piece 24a, simultaneously, be delivered to pusher element 3 via unwrapping wire restrict rollers 25a, input side auxiliary chain wheel 25b and input side guide reel 25c.
In addition, downside at Scroll 22, be provided with band guiding piece 24b, rolling restrict rollers 25f, outgoing side auxiliary chain wheel 25e and outgoing side guide reel 25d, carrier band 5 after testing is via outgoing side guide reel 25d, outgoing side auxiliary chain wheel 25e and rolling restrict rollers 25f, by band guiding piece 24b guiding, simultaneously, be wound onto on the Scroll 22.
Between input side guide reel 25c and outgoing side guide reel 25d, be provided with pusher element 3, leading portion side (left side among Fig. 1) in pusher element 3 is provided with the first camera 6a, downside (inboard of probe platform 7 described later) in pusher element 3 is provided with the second camera 6b, is provided with the 3rd camera 6c at the rear section side (right side among Fig. 1) of pusher element 3.In addition, between pusher element 3 and the 3rd camera 6c, be provided with mark tapping and plugging machine (マ one Network パ Application チ) 26a and off standard tapping and plugging machine (リ ジ エ Network ト パ Application チ) 26b.
The assigned position of result on this TCP that mark tapping and plugging machine 26a is based on test offered the equipment in one or more holes, and off standard tapping and plugging machine 26b is an equipment of punching the TCP that is judged as the test findings unacceptable product.
Each camera 6a, 6b, 6c are connected in not shown image processing apparatus, the first camera 6a and the 3rd camera 6c be used to judge TCP on the carrier band 5 have or not or be used to judge the position in the hole that forms by mark tapping and plugging machine 26a or the equipment of quantity, the second camera 6b is the equipment that is used to obtain the offset information of TCP on the carrier band 5 and probe.The second camera 6b in the present embodiment makes the offset information of a plurality of objects that can obtain in the visual field.
The second camera 6b is loaded on the photograph board 61, can move by direction in length and breadth (X-axis-Y direction) and the above-below direction (Z-direction) that the actuator that photograph board 61 is had is watched on the plane.
At the body of TCP processor 2, via carriage 361 servo motor 31 that can make ball-screw 32 rotation is installed, simultaneously, the pusher body 33 that is threadedly engaged with ball-screw 32 is installed via the straight moving guiding piece 37 of two Z-directions.This pusher body 33 drives by making servo motor 31, thereby by straight moving guiding piece 37 guiding, simultaneously, can go up at above-below direction (Z-direction) and move.In addition, the framework (pusher framework) of pusher body 33 and pusher element 3 36 is being connected by not shown link gear, if pusher body 33 is moved up and down, then pusher framework 36 also moves up and down thereupon.
In the bottom of described pusher body 33, be provided with and adsorb and to keep the adsorption plate 34 of carrier band 5 by attracting air.
The leading portion side of the pusher body 33 in pusher framework 36 (among Fig. 1 left side) is provided with tension force sprocket wheel 35a, is provided with head sprocket 35b at the rear section side (right side among Fig. 1) of pusher body 33.Below, the occasion that tension force sprocket wheel 35a and head sprocket 35b is referred to as pusher sprocket wheel 35a, 35b is arranged.
Pusher element 3 is connected with not shown pusher platform.The pusher platform is connected (omit diagram) via a plurality of ball-screws with servo motor, the driving by servo motor can make pusher element 3 in the horizontal direction (XY in-plane) move, simultaneously, pusher element 3 is rotated around Z-axis (around the Z axle).
Top at the measuring head 10 of pusher element 3 downsides is provided with the probe platform 7 that has loaded probe 8.Probe platform 7 is connected (omit diagram) with servo motor via a plurality of ball-screws, the driving by servo motor can make probe 8 in the horizontal direction (XY in-plane) go up and move, simultaneously, probe 8 is rotated around Z-axis (around the Z axle).
Probe 8 with a plurality of probes 81 is installed in by pin on the snap ring of probe platform 7 (omitting diagram) with freely loading and unloading.And each probe 81 of probe 8 is electrically connected via measuring head 10 and tester body, is positioned with the second camera 6b in the inboard of the probe platform 7 of the downside of probe 8.
In this TCP test unit 1, be transferred to the downside of carrier band 5 by pusher element 3, by this carrier band 5 of pusher element 3 absorption/supportings, simultaneously, the probe 8 pushing carrier bands 5 on measuring head 10.So the TCP on the carrier band 5 contacts with the probe 81 of probe 8, and TCP is applied test signal, sends into the tester body from the response signal that TCP reads by measuring head 10.Thus, the performance of test TCP or function etc.
By carrying carrier band 5, the whole TCP on the carrier band 5 are carried out such test in turn.And, drive mark tapping and plugging machine 26a or off standard tapping and plugging machine 26b based on test findings.
[pusher element]
Fig. 2 is the front elevation of the pusher element of TCP processor shown in Figure 1.
As described above, the leading portion side of the pusher body 33 in the pusher framework 36 of pusher element 3 is provided with tension force sprocket wheel 35a, is provided with head sprocket 35b at rear section side.
Head sprocket 35b by the main drive source that can just change and reverse, is generally driven by step motor, carries carrier band 5 in accordance with regulations at interval.On the other hand, tension force sprocket wheel 35a by by the traffic direction imposed load of drive unit described later at carrier band 5, thereby pays the tension force of regulation to carrier band 5.The driving of these sprocket wheels 35a, 35b is by control part (the omitting diagram) control of TCP processor 2.
Like this, tension force sprocket wheel 35a and head sprocket 35b, the stretch-draw carrier band as the crow flies from the both sides of pusher body 33 improves the positional precision of carrier band 5.
When TCP tests, adsorption plate 34 absorption and maintenance carrier band 5 by pusher body 33 bottoms, by tension force sprocket wheel 35a and head sprocket 35b supporting carrier band 5, simultaneously, pusher element 3 moves downwards, to probe 8, the TCP on the carrier band 5 is contacted with the probe 81 of probe 8 carrier band 5 pushings.
[tension force chain wheel driving device]
Fig. 3 is the side view of the tension force chain wheel driving device in the pusher element shown in figure 2.Fig. 4 is the stereographic map of the link in the drive unit shown in Figure 3.
The drive unit 4 of tension force sprocket wheel 35a comprises drive source 41, brake component 42, link 43, framework 44 and turning axle 45.
Drive source 41 is for applying the torque motor of the revolving force (torque) of the direction opposite with carrier band 5 throughput directions to driving shaft 411.The size of the torque that driving shaft 411 is applied can be by voltage that drive source 41 is applied etc. and is controlled.This drive source 41 inserts driving shaft 411 and disposes from the rear side of pusher framework 36 in framework 44, driving shaft 411 links via neutral gear 46,47 and turning axle 45.
Brake component 42 in the present embodiment is such parts, that is, be installed on the turning axle 45 in the rear side of pusher framework 36, can control turning axle 45 when non-energising and keeps the stop position of turning axle 45, removes this and control when energising.
These drive sources 41 and brake component 42 are connected with the control part (omitting diagram) of TCP processor 2, by this control part controlling and driving.
On the other hand, in the turning axle 351 of tension force sprocket wheel 35a is inserted into bearing 352 in the framework 44 from the front face side of pusher framework 36, thereby by these bearing 352 free rotary ground supportings.
Here, the turning axle 45 of drive source 41 sides is connected via link 43 with the turning axle 351 of tension force sprocket wheel 35a.This link 43 is to have the parts that absorb vibrating function, for example, adopts the parts (so-called flexible connection) that have flexibility at torsional direction.In the present embodiment, adopt such corrugated tube shaft coupling shown in image pattern 3 and Fig. 4.But link 43 is not limited thereto, and for example, also can use other vibration absorption components such as elastomeric element, adhesive parts.
When carrier band 5 stopped, head sprocket 35b maintained halted state with the carrier band 5 of head sprocket 35b supporting.On the other hand, drive source 41 is in order to apply the torque of the direction opposite with carrier band 5 throughput directions to driving shaft 411, via neutral gear 46,47, link 43 and turning axle 351, tension force sprocket wheel 35a is to the direction stretch-draw carrier band 5 (be in halted state) opposite with the throughput direction of carrier band 5.Here, put on the torque of driving shaft 411, voltage that can supply to drive source 41 by control etc. is controlled at desirable size.Thus, can prevent the offset of carrier band 5, be easy to carry out the location of TCP 5 pairs of tension force of carrier band with regulation.
When carrier band 5 was carried, head sprocket 35b made the carrier band 5 of head sprocket 35b supporting move to throughput direction (right among Fig. 1 and Fig. 2) by main drive source.By the conveying of carrier band 5, to supporting the power of the tension force sprocket wheel 35a effect direct rotational direction of carrier band 5 jointly with head sprocket 35b.On the other hand, 41 pairs of driving shafts 411 of drive source apply the torque of the direction opposite with carrier band 5 throughput directions.But, because the size of torque in the other direction drives torque big or small little of head sprocket 35b than the main drive source of head sprocket 35b, so, conveying by carrier band 5, the driving shaft 411 of the turning axle 351 of tension force sprocket wheel 35a, link 43, neutral gear 46,47 and drive source 41 rotates to direct rotational direction under the state that is applied torque by drive source 41.As a result, can pay the tension force of regulation, suppress the shake of carrier band 5 and carry carrier band 5 at a high speed, and then improve the processing speed of TCP processor 2 carrier band 5.
As described above, according to tension force sprocket wheel 35a and head sprocket 35b,, also can pay the tension force of regulation to carrier band 5 even in the course of conveying of carrier band 5 and in the arbitrary process in the stopped process.The optimal size of the tension force of carrier band 5, according to the thickness of carrier band 5, width, intensity etc., the weight of TCP, size etc., transporting velocity etc. and different, voltage of drive source 41 by will putting on tension force sprocket wheel 35a etc. is controlled at the size of regulation, can adjust the tension force of carrier band 5.Thus, can not apply excessive stress to the sprocket hole of carrier band 5, can be with the tension force supporting carrier band 5 of appropriateness.Put on the voltage of drive source 41 etc., consider the moment of inertia of carrier band 5 or drive system, also can be corresponding to transporting velocity, carry beginning, carry the transport condition that stops etc. variation and in addition suitable change ground control.
Here, by the size of the torque of the driving shaft 411 that puts on drive source 41 etc., the situation that vibration takes place at driving shaft 411 is arranged, this vibration is passed to turning axle 45 via neutral gear 46,47.If this vibration is passed to carrier band 5 in the conveying via tension force sprocket wheel 35a, just become the reason that shake or offset take place carrier band 5.
Yet, in the present embodiment, because between the turning axle 351 of turning axle 45 and tension force sprocket wheel 35a, this vibration clamps the link 43 that can absorb vibration, so can be absorbed by link 43, and the revolving force of turning axle 45 is passed to the turning axle 351 of tension force sprocket wheel 35a.
In the present embodiment, because used the corrugated tube shaft coupling as link 43, so, can absorb the vibration of described turning axle 45 effectively, simultaneously, the revolving force of turning axle 45 is passed to the turning axle 351 of tension force sprocket wheel 35a efficiently.
Like this, though on the driving shaft 411 of drive source 41 vibrative occasion, also can suppress this vibration transfer to tension force sprocket wheel 35a, therefore, can suppress the shake or the offset of the carrier band 5 that the vibration of tension force sprocket wheel 35a causes effectively.
In the TCP of present embodiment processor 2, the link 43 of drive unit 4 is the corrugated tube shaft coupling, and such this aspect that is formed in is desirable,, when revolving force is passed to tension force sprocket wheel 35a from turning axle 45, absorbs the vibration of turning axle 45 effectively that is.But, being not limited thereto, the material of link 43 and shapes/configurations can at random be selected in the scope that those skilled in the art understood.Specifically, link 43 is so long as can get final product by the deform parts of the vibration that absorbs turning axle 45 such as torsional load.For example, link 43 can be the simple columnar part of being made by elastomeric material, also can be the wrinkle shape parts of being made by the resin system material, also can be the coiled type parts of being made by metal material (omitting diagram).
[the band support unit of pusher element]
Fig. 5 and Fig. 6 are the side view (Fig. 5) and the stereographic map (Fig. 6) of the band support unit of pusher element shown in figure 2.
In the TCP of present embodiment processor 2, shown in the image pattern 2 like that, between pusher body 33 in the pusher framework 36 of pusher element 3 and the tension force sprocket wheel 35a, and between pusher body 33 and head sprocket 35b, be provided with a pair of band support unit 39a, 39b, support carrier band 5 from the below by these band support units 39a, 39b.
These band support units 39a, 39b, have and be roughly L word shape when watching in the side, be fixed on the wall of pusher framework 36 with its vertical component effect, simultaneously, make its horizontal part outstanding and (with reference to Fig. 5, Fig. 6) be set in the front face side (Y direction) of pusher framework 36.
In addition, at the upper face side of the horizontal part of being with support unit 39a, 39b, be not formed with groove 391 with the mode that band support unit 39a, 39b contact with the outside terminal that is formed on the TCP on the carrier band 5.The carrier band 5 that this band support unit 39a, 39b carry from following side bearing has the function of guiding.
In this TCP processor 2, carrier band 5 is hung on band support unit 39a, 39b around striding across from downside supported (with reference to Fig. 2), simultaneously, the leading portion side of these band support units 39a, 39b and rear section side by pusher sprocket wheel 35a, 35b from side bearing.Like this, because carrier band 5 is supported from above-below direction near pusher element 3, so, can prevent the useless movement of carrier band 5, can carry out the conveying of more speed, the processing speed of TCP processor 2 is improved.In addition, though hypothesis as the vibration transfer of foregoing drive source 41 from tension force sprocket wheel 35a to tension force sprocket wheel 35a, also can suppress the shake or the offset of carrier band 5 effectively.
And by absorption and keep carrier band 5 and fixing carrier band 5, the location of test TCP becomes easily the adsorption plate 34 of pusher body 33 when the test of TCP, and still under the state that carrier band 5 generations are shaken, existence can not be stablized the situation of adsorbing.Yet carrier band 5 is supported from above-below direction by pusher sprocket wheel 35a, 35b and band support unit 39a, 39b, has suppressed its shake, so, make by the absorption of 34 pairs of carrier bands 5 of adsorption plate and stablize, suppress the offset of carrier band 5 effectively.Thus, can correctly carry out being tested the location of TCP.
In the TCP of present embodiment processor 2, be provided with a pair of band support unit 39a, 39b, support carrier band 5 by these band support units 39a, 39b, so, compare with the formation that single band support unit 39 only is set, can stably support carrier band 5.Thus, can more effectively suppress the shake or the offset of carrier band 5.
Yet the present invention is not limited thereto, and also single band support unit 39 can only be set, or more band support unit 39 also can be set.Be roughly L word shape when in addition, the shape of band support unit 3 is not limited to watch in the side.
Industrial applicibility
As described above, according to TCP treating apparatus of the present invention, can pay carrier band Suitable tension force can correctly carry out the location of carrier band (TCP), simultaneously, can suppress So the shake of carrier band in the conveying is can be correctly and carry out TCP's with processing speed faster Test.

Claims (5)

1. TCP treating apparatus, described TCP treating apparatus will form the carrier band of a plurality of TCP on tape and be carried by conveying device, simultaneously, be pressed to the contact site that is connected with test head electrical by pusher, the outside terminal of TCP is connected with described contact site, can implement test to a plurality of TCP in turn thus, it is characterized in that
Described conveying device in order to support carrier band and to make the operation of this carrier band and stop, having first sprocket wheel in the leading portion side of described pusher, has second sprocket wheel at rear section side,
Be connected with the drive source that can make described first sprocket wheel rotation on described first sprocket wheel, described drive source is controlled by control part,
Described drive source is a torque motor, and described torque motor is with to the mode of being paid regulation tension force by the described carrier band of described first sprocket wheel and described second sprocket bearing and so that the mode of the described relatively second sprocket wheel positive rotation of described first sprocket wheel is carried out torque control by described control part.
2. the TCP treating apparatus described in claim 1 is characterized in that, between described first sprocket wheel and described drive source, clamps the link that can absorb vibration.
3. the TCP treating apparatus described in claim 2 is characterized in that, described link is the parts that have flexibility at least at torsional direction.
4. the TCP treating apparatus described in claim 2 is characterized in that, described link is the parts with bellows configuration.
5. the TCP treating apparatus described in claim 1 is characterized in that, described at least first sprocket wheel is located on the framework in the mode from last side bearing carrier band, is provided with from following side bearing on described framework and guides the band support unit of carrier band.
CNB2004800430112A 2004-05-12 2004-05-12 The TCP treating apparatus Expired - Fee Related CN100570385C (en)

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PCT/JP2004/006680 WO2005109016A1 (en) 2004-05-12 2004-05-12 Tcp handler

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CN1954222A CN1954222A (en) 2007-04-25
CN100570385C true CN100570385C (en) 2009-12-16

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WO (1) WO2005109016A1 (en)

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JP2008224399A (en) * 2007-03-13 2008-09-25 Yokogawa Electric Corp Autohandler

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JPWO2005109016A1 (en) 2008-03-21
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CN1954222A (en) 2007-04-25

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