JPH07206129A - Substrate conveying device - Google Patents

Abstract

PURPOSE:To provide a substrate conveying device which is capable of stopping a substrate at a desired position with high accuracy even when force of inertia caused by conveyance acts on the substrate, and which is provided with position detecting means for detecting positions matching various substrates of different shapes, without interfering with a substrate checking device. CONSTITUTION:A substrate conveying device 30 is provided with a conveying means 3 having first and second endless belts for conveying a substrate with both side-edges of the substrate held from both front and rear sides, a position detecting means for detecting the position of the substrate to be conveyed in non-contact manner, and a control means 36 for stopping the conveying means at a specified position based on the detected position of the substrate detected by the position detecting means.

Description

Detailed Description of the Invention

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate transfer device for transferring a substrate to a predetermined position of an inspection device when inspecting the substrate.

2. Description of the Related Art A printed circuit board (bare board) on which only wiring is formed or a mounting board on which circuit components such as ICs, resistance elements and capacitors are mounted is inspected for a large amount of board inspection equipment. 2. Description of the Related Art Substrate transfer devices such as belt conveyors that quickly transfer substrates are used. Such a substrate transporting device is integrally incorporated in the substrate inspecting device, and transports a substrate placed on an endless belt. A stopper pin provided on the inspection device side is used as a position detecting means for detecting the position of the substrate and stopping it at a predetermined inspection position. The stopper pin is provided so as to project upward in the substrate transfer path. When the substrate is detected by a switch such as a limit switch, the transfer device is stopped and the transferred substrate is in contact with the stopper pin. It is stopped at the predetermined inspection position.

By the way, in a board inspecting apparatus for inspecting a board from both front and back sides, a head moving mechanism for respectively moving a plurality of heads having probes attached thereto in the X and Y axis directions is provided. It is necessary to provide multiple on both front and back sides. Therefore, in the substrate transfer device, there is a problem that it is difficult to use the stopper pin as the position detecting means because it interferes with the head moving mechanism of the substrate inspection device. Moreover, the substrate to be inspected is not limited to a rectangular shape, but has various shapes such as one corner being cut out depending on the purpose of use. For this reason, the stopper pin cannot be attached to a fixed position, and is movable in the width direction and the conveyance direction of the substrate, and if the structure is adapted to various substrate shapes, the structure becomes complicated. There is a problem that the inspection device becomes large. Therefore, if the position detection means detects the board reaching the inspection position without using the stopper pin and stops the transfer device at the time of detection, the inertial force associated with the transfer acts on the board. In some cases, the substrate to be transported overruns so much that the substrate cannot be stopped at a predetermined inspection position. If the stop position of the board deviates from the inspection position, the relative position between the board inspection probe provided in the board inspection device and the board deviates, and the probe is accurately positioned with respect to the wiring on the board. There was a problem that I could not do it. In particular, a mounting board on which various circuit components are mounted has a weight larger than that of a bare board on which only wiring is formed, so that a large inertial force is exerted and a displacement from a predetermined inspection position is large. The present invention has been made in view of the above points,
The substrate can be stopped at a desired position with high accuracy even if the inertial force associated with the transfer acts, and it does not interfere with the substrate inspection device and is equipped with position detection means for various substrates having different shapes. An object is to provide a substrate transfer device.

In order to achieve the above object, in the present invention, a conveyance means having first and second endless belts for nipping and conveying both side edges of a substrate from both front and back sides is conveyed. A position detecting means for detecting the position of the substrate in a non-contact manner, and a control means for stopping the carrying means at a predetermined position based on the position of the substrate detected by the position detecting means. is there. Preferably,
The transporting unit has a pressing unit that presses the first endless belt against the surface of the substrate. Further preferably, the carrying means is capable of adjusting the carrying width according to the width of the substrate. More preferably, the position detecting means is provided on a movable body that can move without a track in a plane parallel to the substrate surface.

The entire operation of the substrate transfer device is controlled by the control means, and the operation starts when the substrate is loaded.
The operation stops when the substrate loading stops. At the time of use, the first and second endless belts sandwich the both side edges of the substrate from both the front and back sides and convey the substrate, and the substrate is stopped at a desired position with high accuracy even if an inertial force accompanying the conveyance acts. The position detection means detects a predetermined mark such as an edge of a substrate to be conveyed or a corner mark formed on the substrate, and the conveyance means is operated in both forward and reverse directions through the control means to stop the substrate at a predetermined position. Let At this time, if the conveying means is provided with a pressing means for pressing the first endless belt against the substrate surface, the conveyed substrate is securely sandwiched between the second endless belt and the inertial force associated with the conveyance acts. However, the substrate stops at the desired position with high accuracy. Further, the transfer means changes the transfer width according to the width of the substrate to be loaded. Further, when the position detecting means is provided on a movable body which can move in a plane parallel to the substrate surface without a track, the position detecting means does not interfere with the substrate inspecting device and the position can be adjusted to correspond to various substrates having different shapes. To be detected. Here, the board used in the present specification refers to both a bare board on which only wiring is formed and on which circuit components such as an IC, a resistance element, and a capacitor are not mounted, and a mounting substrate on which circuit components are mounted.

EXAMPLE An example of the substrate transfer apparatus of the present invention will be described below.
Will be described in detail with reference to the accompanying drawings. 1 and 2
Shows a substrate inspection apparatus 1 provided with the substrate transfer device of the present invention.
The board inspection apparatus 1 is installed on the housing 2 and on the housing 2.
Of the placed frame 3 and the columns 4 at the four corners of the frame 3.
The upper platen 5 placed and fixed on the upper end and the upper surface of the housing 2
A lower platen that is horizontally arranged and fixed so as to face the upper platen 5.
6 for the upper platen 5 and the lower platen 6 respectively.
Table, for example, plane motors 7 to 10 arranged in groups of 4
11 to 14 and these planar motors 7 to 10 and 11
Probe devices 15-18 and 1 attached to
9 to 22 and an intermediate position between the upper platen 5 and the lower platen 6
In the horizontal direction and through the center of the frame 3 in the left-right direction.
Are arranged by the substrate transfer device 30 or the like for transferring the substrate.
It is configured. The upper platen 5 has a flat plate shape and high magnetic permeability.
Rectangle of pure iron having a rate, for example, composed of square planks
Has been done. The upper platen 5 has a lower surface as shown in FIG.
A groove 5b having a predetermined groove width is formed at a predetermined pitch on the side (X
Axis) and vertical (Y-axis) direction (Fig. 4) at the specified depth.
Accurately engraved across the surface, square teeth 5 between each groove 5b
It is a tooth-shaped plate-shaped iron core in which a large number of c are formed. Down
The Latin 6 is formed similarly to the upper platen 5, and
The upper surface 6a of the Latin 5 facing the tooth-shaped plate-shaped lower surface 5a (Fig.
3) also has a toothed plate shape. In the four corners of upper platen 5
Position the plane motors 7 to 10 at the respective origin positions (the upper platen
Origin return device 25 (Fig. 5)
4) is provided. The plane motor 1 is also used for the lower platen 6.
Origin return to return 1 to 14 to the origin position accurately
A device (not shown) is provided. Furthermore, on the case 2
The plane surface is adjacent to the center position on both sides of the upper platen 5.
Carrying the data 7 to 10 into the upper platen 5 or the upper platen
5 is provided with an in / out section 26, 26 'for carrying out from
There is. These inlets / outlets 26, 26 ′ are different from the flat motor 7.
A little larger than aluminum or synthetic resin
It is made of a flat plate of non-magnetic material, and the bottom surface is
It is made flush with the lower surface 5a. The plane motor 7 is
As shown in FIGS. 5 and 6, a square non-magnetic member, eg
For example, the housing 40 made of aluminum
To move the lower surface 5a of the upper platen 5 in the X-axis direction 2
A pair of electromagnets 41, 42 and two sets of magnets traveling in the Y-axis direction
Electromagnets 43 and 44 are housed respectively. That
Therefore, one set of electromagnets 41 has two electromagnets 41A and 41B.
And are arranged side by side along the X-axis direction.
A non-magnetic member is used between these electromagnets 41A and 41B.
The formed spacer 41C is interposed. In addition,
In the magnet 41A, the pair of electromagnets 41a and 41a 'are the X-axis.
The magnets 41a and 41a are arranged side by side along the direction.
A spacer 41s is interposed between a'and a '. That
The end faces of the iron cores 41c and 41c 'of the electromagnet 41a (upper
The surface) has iron cores 41d each having a groove of a predetermined width
It is provided and can face the tooth profile 5c on the lower surface 5a of the upper platen 5.
Noh (Figure 7). Further, the iron core 4 of the electromagnet 41a
An extremely strong permanent magnet 41e is provided between 1c and 41c '.
Is intervening. The permanent magnet 41e and the electromagnet 41a
Together with the thrust in the X-axis direction, the iron core 41
c, 41c 'and the upper platen 5 form a closed magnetic circuit.
A machine for strongly adsorbing the housing 40 to the upper platen 5.
Has the ability. The electromagnet 41a 'is similar to the electromagnet 41a.
Is configured. Electromagnet 41B is similar to electromagnet 41A
And each of the other electromagnets 42 to 44 is also electromagnetic.
It is constructed similarly to the stone 41. And these electromagnetics
The stone is connected to the control device 80 (FIG. 2) described later. Ha
Each of the picking parts on the upper surface 40a of the housing 40 is picked up at a predetermined position.
40c is formed and the center of each slit 40c
Each of the small holes 40d is opened at one end thereof. This
The other ends of these small holes 40d are grouped in the housing 40.
Connected to a high pressure air source (not shown) via an air hose.
Will be continued. Then, from each of these small holes 40d
Air is ejected, and the housing 40 is connected to the electromagnets 41 of each set.
Under the upper platen 5 against the attraction force of each permanent magnet of ~ 44
There is a slight gap d (for example, about 10 μm) from the surface 5a.
To separate them horizontally (Fig. 7). This allows the planar motor
7 has a slight gap d with the lower surface 5a of the upper platen 5.
That is, it is possible to freely drive while floating in the space
It The other plane motors 8 to 14 have the same structure as the plane motor 7.
Is made. And the upper four plane motors 7-1
0 is the lower side of the upper platen 5 due to the magnetic attraction force of the permanent magnet.
Held horizontally. In addition, the lower four plane motors 1
1 to 14 are spaces with a slight gap on the lower platen 6.
It is held horizontally in a floating state. In this way,
The four plane motors 7 to 10 on the lower side are on the lower side of the upper platen 5.
The four lower plane motors 11 to 14 are connected to the lower platen.
6 on each side horizontally in the X-axis and Y-axis directions
Made possible. Lower surface 4 of housing 40 of planar motor 7
0b, as shown in FIGS.
5 are provided. The probe device 15 is a circuit component.
(Various circuit elements such as IC, resistance element, capacitor)
Printed circuit board disconnection or short circuit
Or a loaded board for inspecting soldering condition
With the probe device for driving the plane motor 7,
A predetermined angle with respect to the X-axis and Y-axis directions, for example, 45
Placed in housing 40 at an angle of ° (Fig. 4)
There is. Each of the brackets 50 to 52 has a housing 4 at the upper end.
0 is fixed to the lower surface 40b and hung down.
The brackets 50 and 51 face each other at a predetermined interval, and the bracket 52
Are located behind the brackets 50, 51. bra
A holder 54 is mounted on the ket 50 via an LN guide 53.
It is mounted so that it can move downward, and the holder 54 has a holder
A probe 56 is attached via a da 55. The
The lobe 56 is a vertical line that stands on the lower surface 5 a of the upper platen 5.
(For substrates that have been horizontally transported by the substrate transport device 30.
A predetermined angle θ (for example, 9 °) with respect to the standing perpendicular
Make sure that the tip moves up and down with the tip tilted outward.
The tip end 56a is needle-shaped. The
There is a sprinkle between the rear end of the lobe 56 and the upper end of the holder 55.
The ring 57 is contracted, and the probe 56 is attached to a predetermined spring.
It is pushing down with force. Then, the probe 56
Moves upward by a predetermined stroke against the spring force of ring 57
It is possible. The spring 57 is
The tip 56a is pressed against (contacts) the substrate with a predetermined spring force.
At the same time, the probe 56 and the probe 56 are allowed to escape.
It also prevents unnecessary pressure from being applied to the board. Bu
Inside the upper and lower ends of the racket 50 are toothed pulleys.
60, 61 and idle pulley 62 are rotatably supported.
The rotating shaft of the toothed pulley 60 is attached to the outside of the bracket 50.
The toothed pulley 63 is integrally rotatably fixed to the side.
It Timing belt between toothed pulleys 60-62
64 is wound around, and the predetermined position of the timing belt 64 is
The holder 55 is fixed. Also, on the bracket 52
Is equipped with a drive motor 65 and its rotation shaft
A toothed pulley 66 is attached to the. And teeth
A timing belt 67 hangs between the attached pulleys 63 and 66.
It has been turned. When the motor 65 rotates, the timing
The pulley 60 rotates via the belt 67 and the timing
The belt 63 rotates, and the holder 55 immediately
Then, the probe 56 moves up and down. In addition, on the bracket 51
Also for inspection different from the probe 56 via the LN guide
Attach the probe so that it can move up and down like probe 56,
The holder is attached to a predetermined portion of the timing belt 64, for example,
The mounting position of the holder 55 of the probe 56 and approximately 180 °
The probe 56 can be installed at a different position, depending on the inspection target.
May be selectively used. Do this
And two different inspection functions with one probe device 15
It is possible to have it. In addition, one of the housing 40
An optical sensor 35 for position detection is provided at a predetermined position on the side.
The holder 76 is placed vertically with its surface facing directly below.
Is attached through. In addition, near the probe 56
Beside it, there is a monitor that monitors the position of the tip 56a of the probe 56.
The visual camera 77 is arranged, and the housing 78 is used to
It is attached to the group 40. Other planar motors 8-14
The probe devices 16-18 attached to the
It has the same structure as the unit 15. An optical sensor for position detection
The sensor 35 does not have to be provided on all probe devices,
Above the substrate transfer device 30 (FIG. 2), that is, above the substrate.
And two probe devices located on the front end side of the substrate.
It is sufficient to install it in one of the above. Also, the surveillance camera 7
7 is four probe devices 15-1 as shown in FIG.
Two opposing units in 8 such as probe devices 15 and 1
It is enough to attach to 8 and. In addition, the lower four
The lobe devices 19 to 22 include position detecting sensors and monitoring sensors.
It is not necessary to provide a melah or the like. And the upper four
The plane motors 7 to 10 are arranged below the upper platen 5 and
Movers 15-18 are located in the center of the platen.
(Fig. 4), the substrate transfer with the tip of each probe located below
For the upper surface of the substrate placed on the feeding device 30,
It is placed at a predetermined angle θ and faces diagonally downward (Fig.
2, FIG. 8). The lower four plane motors 11 to 14 are
On the platen 6, the probe devices 19 to 22 are respectively attached.
Facing the center of the lower platen 6 and the tip of each probe
To the lower surface of the substrate located above
It is placed facing diagonally upward at a predetermined angle θ (Fig.
2). The upper probe devices 15-18 are as described above.
45 with respect to the traveling direction of the plane motors 7 to 10, respectively.
At an angle of 0 °, and the tip of each probe is placed vertically on the substrate surface.
It is inclined at a predetermined angle θ with respect to the line. Obey
Then, these four probe devices 15 to 18 are mutually dried.
As shown in Figure 10, the tip of each probe without
Further, it is possible to contact any one point P on the upper surface of the substrate. As well
In addition, the lower four probe devices 19 to 22 also interfere with each other.
The tip of each probe without any
It is possible to touch points. Further as shown in FIG. 2 and FIG.
In addition, the plane motors 7 to 14 are separately provided in the housing 2.
Control device 80 for controlling each of the probe devices 15 to
22 drive motor is controlled to move each probe up and down.
The control device 81 and the plane motors 7 to 10 for the upper platen.
The plane motors 11 to 14 to the origin of the lower platen.
Each origin return device for returning to each origin position of 6
Table 25 (FIG. 4), a control device for controlling the substrate transfer device 30
36, input signals from each probe device 15-22
Measuring device 83 for inspecting the board, and each of these controls
To control the control devices 36, 80, 81 and the measuring device 83
The computer 84 and the like are stored. Also, in FIG.
The probe device 15 is mounted on the frame 3 as shown.
Of the probe imaged by the surveillance camera 77 (Fig. 8)
Display device 85 for displaying the tip and the substrate, the substrate
Display various input data for inspection, inspection results, etc.
A display device 86 for loading is mounted. Well
In addition, a disk that warns of inspection errors and step-out of the planar motor
A pre-apparatus 87 is also installed. Further, the housing 2 has a substrate
Data, inspection items, etc., or the computer 84
An input device (keyboard) not shown for controlling
It is arranged. Then, the plane motors 7 to 14 are controlled.
In the device 80, the probe devices 15 to 22 are connected to the control device 8
1. Cables (not shown) for the measuring device 83
It is connected. Further, the plane motors 7 to 14 are respectively
High pressure air source (both not shown) via the air hose
It is connected. Of the frame 3 and each plane motor 7-14
Flexible tubes 91 to 98 (Fig. 2 to Fig.
4) is installed substantially horizontally. These flexible tubes 9
1 to 98, each base end is the frame 3 and each tip is
It is fixed to the plane motors 7 to 14 and is flat with the frame 3.
The cable and air between the surface motors 7 to 14
The hoses are stored in the cables and air hoses for each plane motor.
Other flat motor, frame 3, lower platen 6, base
Each plane motor 7 without interfering with the plate conveying device 30 or the like.
So that it can freely curve and follow as it travels ~ 14
Supported (indicated by a chain double-dashed line in FIG. 4). This makes it flat
The surface motors 7 to 14 do not have a specific trajectory and
It is possible to drive freely. Therefore, the substrate
The inspection device 1 has an inspectable area indicated by a two-dot chain line in FIG.
A, that is, the plane motors 7 to 10 are set to the origins of the upper platen 5.
Probe device 1 in the state of returning to the position (four corners)
Size of the area surrounded by the tip of each probe of 5-18
Smaller than the size. Then configured as above
The substrate transfer device 30 of the present invention provided in the substrate inspection device 1
This will be described below with reference to FIGS. 11 to 25. substrate
The transfer device 30 includes a transfer conveyor 31, an optical sensor 35, and
A control device 36 is provided. The transport conveyor 31 is inspected
Neither side of the target board is pinched from both sides and transported
Flat belt B at the end_P(See FIGS. 14 to 16) and the round belt B._R
(See FIG. 19) and is shown in FIGS.
Between the carry-in conveyor 32 and the carry-out conveyor 33
3 division type conveyor connected by belt presser 34, 34
At four locations, the carry-in conveyor 32 and the carry-out conveyor 33
It is supported by a support plate 300 arranged at. Carry-in conveyor
32 carries in the board from the previous step into the board inspection apparatus 1.
The belt presser 34, 34 is a conveyor for
(A) Carries the board carried in by 32 to a predetermined inspection position
It is sent and stopped at that position during the inspection, and the inspection is completed.
It also has the function of a conveyor to carry out plates. Well
In addition, the carry-out conveyor 33 uses the substrate that has been inspected for the next process.
To be transported. 14 to 16 show the conveyor 3
The state which looked at the back side of 1 is shown. Here, the transport controller
Since the bear 31 is a three-division type conveyor,
Three flat belts B on each side in the transport direction_PWhen
One round belt B_RAre using. Also, the following explanation
In, the transfer conveyors 31 are on both sides in the substrate transfer direction.
The members arranged in the
Therefore, unless otherwise specified, the same members are
It is supposed to be arranged. The carry-in conveyor 32 is shown in FIG.
As shown in FIG. 1 and FIG.
Nbear Rail 320,320, Flat Belt B_PWrap around
Pulley 322a, a plurality of guide rollers 321 and a drive motor.
322. The conveyor rail 320 is shown in FIG.
As shown in FIG. 18, the upper rail 320a and the lower rail 320b
Flat belt B between_PA guide rail 320c is installed to guide
The lower rail 320b is fixed to the support plate 300.
(See FIGS. 21 and 22). Here, the upper rail 320a is
As shown in FIG. 16, the round belt B_R I will guide you smoothly
The belt retainer 34 side is inclined downward. Each
The guide roller 321 of FIG.
Fixed to the conveyor rail 320 and the conveyor rail 320.
Is attached to the auxiliary bracket 323 so that it can roll freely.
It The drive motor 322 is shown in FIGS. 12, 13 and 19.
The lower rail 320b outside and extend inside.
Pulley 322a provided at the end of the rotating shaft (see FIG. 14)
Flat belt B according to_PDrive the board forward or
Retreat. Here, the carry-out conveyor 33 is a carry-in conveyor.
Since it is configured substantially the same as the bare 32, the corresponding member
And the detailed description thereof will be omitted. belt
The presser foot 34 is a round belt B._RAnd flat belt B_PTo guide the
Belt B_R By pressing against the substrate surface
To B_P Longer shape that holds both side edges of the board between
It is a member of. The belt retainer 34 is as shown in FIG.
A support bra attached to the ends of the lower rails 320b, 330b.
It is fixed by hanging it between the kets 324 and 334. belt
As shown in FIG. 20, the presser foot 34 includes a lower plate 340, an upper plate 341, and
Hinge 342, clamp plates 343, 344, driven plate 345, drive block
A drive shaft 347. Lower plate 340
Are fixed to the support brackets 324 and 334 at both longitudinal ends.
Is connected to the upper plate 341 by a plurality of hinges 342.
It The clamp plates 343 and 344 are the lower plate 340 and the upper plate 341, respectively.
It is attached to the inside in the width direction of. Where the top plate 341
The clamp plate 344 is a round belt as shown in FIG.
B_RAnd to guide the board that is being conveyed smoothly,
Both ends in the longitudinal direction are inclined obliquely upward. Driven plate 345
Are attached to the outside of the upper plate 341 in the width direction.
A plurality of drive blocks 346 are provided in the longitudinal direction of the belt retainer 34.
It is provided and pivotally mounted on the drive shaft 347. Drive
The lock 346 has a bearing 34 at a position where it abuts the driven plate 345.
6a is attached. Drive shaft 347 is a belt
Extends to both sides of the presser foot 34 in the longitudinal direction, and the extension ends of the support plates 30
It is rotated by the driving means 348 attached to the side surface of 0.
As shown in FIGS. 19 and 22, the driving means 348 supports
Bracket 348a, clamp 348b and cylinder 348c
I have it. The support bracket 348a will be described later on the base end side.
Fixed to the side of the bearing box 303a
The body side of the cylinder 348c is connected to the lower part of the. Ku
The upper end of the lamp 348b is connected to the extended end of the drive shaft 347.
As soon as it is connected, the lower end is pulled out from the body of the cylinder 348c.
It is connected to the tip of the output shaft. Furthermore, the bell
In the presser foot 34, as shown in FIG.
B_P Is a guide roller for the carry-in conveyor 32 and the carry-out conveyor 33.
It is wrapped around between the 32 and 331. At this time,
Flat belt B_PIs a round belt B_RWith single drive motor 3
Driven by 10. That is, the drive motor 310 is
9 and 21, as shown in FIG.
The sprue that is hung between the lower parts of the support plates 300, 300 that are placed
It is attached to the end of the in-shaft 301 (on the front side of the board inspection device 1).
Has been. The spline shaft 301 rotates the drive motor 310.
The force is transmitted to the opposing belt retainer 34 side.
Pulleys 311 are attached to the outside extending from the holding plate 300.
It has been burned. Further, each support plate 300 is shown in FIG. 19 and FIG.
As shown in Fig. 3, the tension roller 312 has a shaft in the lower center.
Wearing it, the gear 313 and the pulley 314 are outside on the lower left.
The pulleys 315 are coaxially supported inside.
It In addition, a conveyor adjacent to the substrate transfer side of the support plate 300.
As shown in FIGS. 23 and 25, the rail 320 is supported by
A post 302 is attached. Support post 302 is above
Pulleys 316 and 317 are supported on the inside and outside of the part, and the
The gear 318 and the pulley 319 that mesh with the 313 are coaxial with each other.
Is supported by. Here, the support post 302 is shown in FIG.
Adjacent to the support plate 300 on the unloading conveyor 33 side, as shown in
It is also provided on the conveyor rail 330 that
A pulley 316 is pivotally supported on the. Also, FIG. 19 and FIG.
23, the pulley 311, the tension roller 312, and
Timing belt B between the pulley and the pulley 314_T1Wrapped around
And a round belt B between the pulley 317 and the pulley 319._LBut
It is wound up and down. And belt presser 3
Flat belt B guided to 4_P As shown in FIG.
The pulley 315 on the carry-in conveyor 32 side and the carry-out conveyor 33
It is wound around the guide roller 331. Also,
Round belt B_RIs the pulley 316 on the carry-in conveyor 32 side and the carry-out
Between the pulley 316 on the side of the conveyor 33,
It is guided and wrapped around. Here, belt presser 3
4 is an upper plate 34 as shown in FIGS. 12, 19 and 23.
Round belt B at both longitudinal ends of 1_R34a for guiding
Is attached. Flat belt B_PIs a round belt B_RWhen
Both are driven by a single drive motor 310. here
Then, the support plates 300, 300 arranged to face each other have both ends of the support posts 300, 300.
On each of the two guide shafts 303 supported on the 4 side
It is supported via a bearing box 303a. each
The bearing box 303a is fixed to the side surface of the support plate 300.
The guide shaft 303 can be moved in the axial direction.
Bearings (not shown) are built in. Furthermore,
Each of the support plates 300, 300 arranged facing each other is a ball
It is movably supported in the width direction by the thread 304. each
The ball screw 304 is, as shown in FIG.
Timing belt B at the end of_T2Connected by
The speed of the drive motor 305 with the speed reducer 306.
Is rotated. The drive motor 305 and the speed reducer 306 are board
It is attached to the column 4 arranged in front of the left side of the inspection device 1.
Has been. Therefore, the transport conveyor 31 is
The transfer width can be changed according to the width of the board, and the width of the board differs.
The conveyor rails 320 and 330 are always in the width of the inspection area A.
Located in the center. Here, the conveyor race of the above embodiment
Rules 320 and 330 are located on both sides in the width direction.
I explained the configuration in which both rails move, but
On the other hand, for example, the front conveyor rail is fixed.
Even if the conveyor rail on the back side moves,
Yes. The optical sensor 35 is located in the area A where the board can be inspected.
Non-contact detection of the edge of the board to stop it
This is a light-reflective sensor with the sensor surface facing directly below.
It is arranged vertically. The optical sensor 35 reflects from the substrate
The edge of the substrate is detected based on the incoming inspection light. This
Here, the optical sensor 35 is a corner mark formed on the substrate.
It is also possible to detect the position of the board by detecting a predetermined mark such as
Yes. In addition to the above-mentioned light reflection type sensor,
It may be a light transmission type optical sensor, but in this case
Needs to be equipped with a light-receiving sensor on the lower planar motor
Therefore, the reflective type is preferable. In addition,
An optical sensor is used as a position detecting means for detecting the position in a non-contact manner.
A camera (for example, a CCD camera) is used in addition to the service 35
can do. The control device 36 detects the optical sensor 35.
Based on the edge position of the printed board, the conveyor 31
Stop. The substrate transfer device 30 of the present invention is as described above.
It is configured and used as follows. First,
The substrate transfer device 30 has a substrate adjacent to the substrate inspection device 1.
It is carried in by a conveyor device such as a conveyor device
Come on. At this time, in the substrate transfer device 30,
The drive motor 305 is activated according to the width of the plate, and the ball screw 3
The transport width of the transport conveyor 31 is changed by 04 and 304.
As a result, the substrate is always in the width direction of the inspection area A described above.
It will be placed in the center of the direction. In addition, the substrate transfer device 3
0 is when the board to be inspected is transported.
The sensor (not shown) detects the board
The transport conveyor 31 operates. And the board is transported
Even if it comes, another board is inspected at the position of the belt presser 34, 34.
While being inspected by the device 1,
The substrate is waiting at the position of the carry-in conveyor 32. Next
Then, inspect the inspection device 1 at the positions of the belt pressers 34, 34.
When the board that has been received is unloaded, the unloading is also detected.
The carry-in conveyor 32 operates based on the signal from the sensor
The side edges of the board to the flat bells on the conveyor rails 320 on both sides.
To B_PPut it on the top and send it to the belt presser 34, 34 side
You By this feeding, in each belt presser 34
Means that the drive means 348 is activated and the drive shaft 347 is at a predetermined angle.
Drive shafts 347 that are pivoted around the drive shaft 347.
The dock 346 rotates to the position shown by the chain double-dashed line in FIG.
It This allows the top plate 341 to move forward around the hinge 342.
Round belt B_RFlat belt B_PThe side where the
As shown by the chain double-dashed line in the figure, a circle is formed at the front of the clamp plate 344.
Belt B_RIs pressed. As a result, it is shown in FIG.
Sea urchin, substrate P_LAre round belts B on both sides_RAnd flat belt B_P
Sandwiched by. At this time, the drive block 346
The bearing 346a is attached to the position where it abuts the driven plate 345.
The hinge of the driven plate 345, and thus the upper plate 341.
 Rotation around 342 is smoothly performed. And the substrate
Is an upper plate 341 with both longitudinal ends inclined obliquely upward.
And the clamp plate 344, and both side edges are round belts B_RWhen
Flat belt B_PCentered in the transport direction of inspection area A, sandwiched by
Be transported to. Next, the optical sensor provided on the plane motor 7
35 of the substrate based on the inspection light reflected from the substrate.
When the edge is detected, the controller 36 detects the optical sensor 35.
Based on the edge position of the printed board, the conveyor 31
Stop. At this time, the substrate has round belts B on both sides._R
And flat belt B_PSince it is sandwiched and transported by
The substrate may overrun even if the inertial force associated with the transfer acts.
There is no. However, the transfer is performed based on the command from the control device 36.
It takes a little time until the conveyor 31 stops
Due to the lugs, the board is slightly
There is a case where the position shifts. In this case
Even if there is, the optical sensor 35 detects the edge of the substrate and controls it.
Based on the command from the control device 36, the conveyor 31 moves forward
Correct the board to the normal stop position by moving it forward or backward.
To do. Next, the board is detected while stopped at this normal position.
Disconnection or short circuit of the wiring formed on the substrate by the inspection device 1
Alternatively, the soldering state and the like are inspected. This inspection ends
Then, the transfer conveyor 31 is activated and the substrate is pressed by the belt holder 3
Round belt B of 4,34_RAnd flat belt B_PCarried by being sandwiched between
It is conveyed to the exit conveyor 33 side. And carry-out conveyor
In No. 33, the board is flat belt B on both sides._P Don't support
It is transported to the next step. In the above embodiment,
Is a conveyer conveyor 31, a carry-in conveyor 32, a carry-out conveyor.
A three-divided tab connecting the bear 33 and the belt retainers 34, 34.
Although it was an Ip conveyor, these are integrated and
One drive motor holds both sides of the board from both sides
Endless flat belt B to convey_PAnd round belt B_RDrive and
May be.

As is apparent from the above description, in the substrate transfer apparatus of the present invention, the substrate can be stopped at a desired position with high accuracy even if the inertial force involved in the transfer acts, so that the substrate inspection can be performed. There is an excellent effect that it is possible to detect the position and stop the substrate at a predetermined position even if the substrates have various shapes without interfering with the apparatus.
Here, when the conveying means is provided with a pressing means for pressing the first endless belt against the substrate surface, the conveyed substrate is reliably sandwiched between the second endless belt and the inertial force associated with the conveyance acts. However, the substrate can be stopped at a desired position with high accuracy. Further, since the carrying width of the carrying means can be changed according to the width of the board to be carried in, there is an advantage that the degree of freedom in handling the board size is increased. Furthermore, if the position detecting means is provided on a movable body that can move in a plane parallel to the surface of the substrate without a track, the position detecting means does not interfere with the substrate inspecting device, and the position can be adjusted for various substrates having different shapes. Can be detected.

[Brief description of drawings]

FIG. 1 is an external view showing a substrate inspection device provided with a substrate transfer device of the present invention.

FIG. 2 is a front view of the board inspection device of FIG. 1 with a cover removed.

FIG. 3 is a side view of FIG.

FIG. 4 is an end view taken along line IV-IV in FIG.

5 is a plan view of the planar motor of FIG.

6 is a sectional view taken along line VI-VI in FIG.

7 is a cross-sectional view showing the relationship between the platen of FIG. 4 and a plane motor.

8 is a side view of a probe device provided on the planar motor of FIG. 4. FIG.

9 is a front view of FIG. 8. FIG.

10 is a partially omitted plan view showing a state where the planar motor of FIG. 4 is moved to an inspection position.

FIG. 11 is a plan view of the substrate transfer device of the present invention.

12 is a front view of the substrate transfer device of FIG.

FIG. 13 is a plan view showing one side of the substrate transfer device.

FIG. 14 is a side view of the carry-in conveyor as viewed from the inside.

FIG. 15 is a side view of the carry-out conveyor as viewed from the inside.

FIG. 16 is a side view showing how the flat belt is routed in the belt retainer.

17 is a sectional view taken along line XVII-XVII of FIG.

FIG. 18 is a sectional view taken along line XVIII-XVIII in FIG.

FIG. 19 is an enlarged front view of the carry-in conveyor.

FIG. 20 is a sectional view of a belt retainer.

FIG. 21 is an enlarged right side view of the main part of the carry-in conveyor.

FIG. 22 is a side view showing, in an enlarged manner, a belt pressing drive means.

FIG. 23 is a plan view in which a main part of the carry-in conveyor is partially broken and enlarged.

FIG. 24 is a plan view showing the arrangement of a ball screw and a drive motor for changing the carrying width of the carrying conveyor.

FIG. 25 is a side view showing a support post of the carry-in conveyor.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 board | substrate inspection apparatus 2 housing 3 frame 4 support | pillar 5,6 platen 7-14 plane motor (moving body) 15-22 probe apparatus 25 origin return device 26,26 'entry / exit 30 board | substrate conveyance apparatus 31 conveyance conveyor 32 carry-in conveyor 33 carry-out Conveyor 34 Belt pressing (pressing means) 35 Optical sensor (position detecting means) 36 Control device 35 Optical sensor 36 Control device 40 Housing 41-44 Electromagnet 50-52 Bracket 56 Probe 65 Motor 77 Monitoring camera 80, 81 Control device 83 Measuring device 84 computer 85-87 display device 91-98 cable protection flexible tube

Claims (4)

[Claims] 1. A carrying means having first and second endless belts for carrying while nipping both side edges of a substrate from both front and back sides, and position detecting means for detecting the position of the conveyed substrate in a non-contact manner. A substrate transfer apparatus comprising: a control unit that stops the transfer unit at a predetermined position based on the detection position of the substrate detected by the position detection unit. 2. The substrate transfer apparatus according to claim 1, wherein the transfer unit has a pressing unit that presses the first endless belt against the surface of the substrate. 3. The substrate transfer device according to claim 1, wherein the transfer means is capable of adjusting a transfer width according to a width of the substrate. 4. The substrate transfer apparatus according to claim 1, wherein the position detecting means is provided on a movable body that can move without a track in a plane parallel to the surface of the substrate.