CN100414417C - Apparatus for supplying ACF - Google Patents

Apparatus for supplying ACF Download PDF

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Publication number
CN100414417C
CN100414417C CNB2005101099532A CN200510109953A CN100414417C CN 100414417 C CN100414417 C CN 100414417C CN B2005101099532 A CNB2005101099532 A CN B2005101099532A CN 200510109953 A CN200510109953 A CN 200510109953A CN 100414417 C CN100414417 C CN 100414417C
Authority
CN
China
Prior art keywords
acf
clamping
spool
feedway
band
Prior art date
Application number
CNB2005101099532A
Other languages
Chinese (zh)
Other versions
CN1779539A (en
Inventor
黄一权
李俊熙
白文九
Original Assignee
三星电子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to KR20040098090 priority Critical
Priority to KR1020040098090A priority patent/KR100633159B1/en
Application filed by 三星电子株式会社 filed Critical 三星电子株式会社
Publication of CN1779539A publication Critical patent/CN1779539A/en
Application granted granted Critical
Publication of CN100414417C publication Critical patent/CN100414417C/en

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Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00Apparatus or processes specially adapted for manufacturing conductors or cables
    • H01B13/0003Apparatus or processes specially adapted for manufacturing conductors or cables for feeding conductors or cables
    • GPHYSICS
    • G02OPTICS
    • G02FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1345Conductors connecting electrodes to cell terminals
    • G02F1/13452Conductors connecting driver circuitry and terminals of panels
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/50Tape automated bonding [TAB] connectors, i.e. film carriers; Manufacturing methods related thereto
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/321Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives
    • H05K3/323Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives by applying an anisotropic conductive adhesive layer over an array of pads
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/838Bonding techniques
    • H01L2224/8385Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
    • H01L2224/83851Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester being an anisotropic conductive adhesive

Abstract

The invention provides an ACF feeder used for bonding a driver IC or a TAB package to the substrate of a flat panel display (FPD) such as an LCD, a PDP and the like. It includes a feeder for feeding ACF tape which is composed of an ACF layer and an ACF supporting layer, a bonder which draws the ACF tape from the feeder and bonds the ACF layer onto a work table, and a collecting section for collecting the ACF supporting layer from which the ACF layer is separated. The feeder of the ACF feeder also includes several reel mounting tables for rotatably supporting several ACF reels for reeling the ACF tape on the same plane, and a holding means which fixes the drawn end of the ACF tape drawn from the ACF reel mounted on either of the several reel mounting tables in a predetermined waiting position for feeding. Thus, the invention can replace the used-up ACF reel even as the device is in working, and can minimize work stop of the device caused by replacement of the ACF reel.

Description

The ACF feedway

Technical field

The present invention relates to the used device of manufacturing process of flat-panel monitor, be specifically related to be used for ACF (the Anisotropic Conductive Film) feedway of on substrate bonding driver IC or TAB encapsulation.

Background technology

In the manufacturing process of flat-panel monitors such as LCD, PDP (FPD), be included in the side portion coating ACF on the substrate, the operation of engagement with driver IC or FPC (Flexible Printed Circuit).For example, as shown in Figure 1, be formed with in the inboard in the adjacent dual-side portion on the LCD substrate 10 of a plurality of thin film transistor (TFT)s, configuration prolongs grid pad (gatepad) 11 and the data pad (data pad) 12 that forms from described a plurality of thin film transistor (TFT)s.On grid pad 11 and data pad 12, link driver IC, to described thin film transistor (TFT) external signal.Described driver IC, by directly be bonded on the substrate 10 mode (Chip On Glass mode) or by being film attached to the polyimide that is formed with metal wire, the mode (Tape Automated Bonding mode) of bonding described film on substrate 10 (being referred to as the TAB encapsulation) is electrically connected with pad 11,12.

So bonding and be electrically connected, the conductive membrane such by ACF carries out.ACF (Anisotropic Conductive Film) is the film that is scattered with conducting particles on adhesive resin, be installed between the electrode of regulation, if exert pressure from the outside, just destroy the dielectric film on described conducting particles surface, conducting particles contacts with described electrode, between described electrode electrical short takes place.

For driver IC or TAB encapsulation is bonded on the substrate 10, as shown in Figure 2, at first, must make ACF layer 13 bonding with this position of substrate 10.With not mutually attached to the mode on the ACF layer, the ACF supporting layer attached on the one side, is wound on the spool with the band forms with certain width, with this state keeping,,, supply with and give substrate 10 by the ACF feedway from described spool.

ACF feedway in the past, as shown in Figure 3, its formation comprises: supply unit 110 has the spool placing frame 112 of placing ACF spool 111; Junction surface 120, the ACF that supplies with from described supply unit 110 by pressurization is with 113, and the ACF layer is bonded on the substrate 10; Recoverer 130 is recovered in the ACF supporting layer 113a that the ACF layer is separated at junction surface 120; Carrier 140 is drawn ACF from supply unit 110 and is with 113, sends junction surface 120 to.

ACF is with 113, manually or automatically draws from the ACF spool 111 of supply unit 110, and by junction surface 120, by a plurality of rollers 133 of recoverer 130, attached to reclaiming with on the spool 131, standby condition is supplied with in formation then via a plurality of rollers 114.Then, by carrier 140, ACF is with 113 from supply unit 110 supply junction surfaces 120.

At the junction surface 120, if support from outside supplying substrate 10 and by objective table 121, then the pressing machine (press) that has of top 122 moves down by air cylinder driven, and the ACF that has supplied with by carrier 140 that pressurizes simultaneously is with 113, and the ACF layer is bonded on the substrate 10.Send the substrate 10 that is bonded with the ACF layer to other station, carry out the bonding process of TAB encapsulation or driver IC etc.Carrier 140 is after being bonded in the ACF layer on the substrate 10, and the supply ACF that moves to the left side is with 113 position, after clamping ACF and being with 113, moves to the right once more, in the inlet standby of recoverer 130.Carrier 140 draw ACF with 113 during, by drive motor, rotation is batched ACF spool 111 and is reclaimed spool placing frame 112,132 with spool 131, successfully carries out ACF respectively with 113 the recovery with ACF supporting layer 113a of drawing.

According to structure of ACF feedway so, because the ACF that is wound on the ACF spool 111 has limited length with 113, be wound on after 1 ACF on the ACF spool 111 is with 113 using up all, must temporarily interrupt the ACF bonding process, carry out the ACF spool is replaced with the operation of new spool.Therefore, exist because of described replacement operation and interrupt whole piece LCD production line, reduce the problem of production efficiency.

For solving so problem, in Korea S's publication communique 2004-5654 number, the ACF feedway of the spool arrangement portion 210 with the rotational structure shown in Fig. 4 a and Fig. 4 b is disclosed.With reference to Fig. 4 b, spool arrangement portion 210 be pair of right and left installing component 215 attached to the structure on the rotary part 216, the rotation by rotary part 216 drives, can reverse mutually in the position of installing component 215.Therefore, in engaging operation, use is placed on the ACF spool 211 on the installing component 215 of a side, if use up the ACF band, rotary part 216 Rotate 180 degree immediately then, can use the new ACF spool 211 (not shown) on the installing component 215 that is placed on opposite side, significantly reduce the break period of operation.In addition, because the described ACF spool 211 that uses up is replaced new ACF spool by the operator, at any time so have the strong point of the convenience that can seek the operator in the carrying out way of operation.

Patent documentation: Korea S's publication communique 2004-5654 number

But, under the situation of foregoing invention, because rotary part 216 rotation error occurs in its rotation amount, so in the running of equipment, in the back of supply unit 210, carry out in the process of replacement operation of ACF spool, there is the problem of the equipment error that swing that installing component 215 occurs causes.In addition, make the ACF band of drawing keep tension force, utilize stretching with pole 217, but the tension force of this mode is kept and had the difficult corresponding problem of velocity variations of adjusting certain force of strain, can not be fully being with the ACF that draws rapidly with certain inertia.

Summary of the invention

, the objective of the invention is to for this reason, a kind of ACF feedway is provided, can irrespectively replace the ACF spool with operational situation, the running that the periodic replacement operation of ACF spool is caused stops to minimize.

In addition, another object of the present invention is to, a kind of ACF feedway is provided, can prevent the instability of the device that the replacement operation of ACF spool causes, can keep certain adjustment state all the time.

For achieving the above object, the invention provides a kind of ACF feedway, comprise the ACF band that supply is made of ACF layer and ACF supporting layer supply unit, draw described ACF band from described supply unit, on operation post, engage the junction surface of described ACF layer, the recoverer that recovery has separated the described ACF supporting layer of described ACF layer, it is characterized in that described supply unit comprises: a plurality of spool placing frames, in same plane, rotatably support a plurality of ACF spools of coiling ACF band; Clamping device, the ACF band that the ACF spool on any one that will be from be placed on described a plurality of spool placing frame is drawn draw the end, be positioned on the supply position of readiness of regulation.

Herein, described a plurality of spool placing frames can be on vertical plane, configuration up and down.

And described clamping device fixedly is located at described supply position of readiness, can also comprise the drive division of the clamping of clamping part, the described clamping part of driving, the control part of the described drive division of control.In addition, described clamping device also can comprise: be attached at the transmission of the transmission guiding on the described supply position of readiness, the clamping part that transmits on described transmission guiding, the described clamping part of driving and the drive division of clamping, the control part of the described drive division of control.

In addition, described recoverer also can comprise, for the ACF supporting layer that will transmit from described junction surface wins over, and the control part of a pair of touch roll of the rotation that is meshing with each other, the drive division that drives described a pair of touch roll, the described drive division of control.

And, can also comprise that tension force keeps mechanism, to described ACF band of drawing and the described ACF supporting layer that is recovered in described recoverer, apply tension force to a certain degree from described ACF spool.Herein, described tension force is kept mechanism, can comprise a plurality of dummy rolls, described ACF band of each personal certain exert pressure and described ACF supporting layer, described a plurality of dummy roll separately also can be by deadweight, to vertical lower pressurize described ACF band and described ACF supporting layer.

As described above, according to ACF feedway of the present invention, owing to can irrespectively replace the ACF spool that uses up, stop minimized effect so have the running of the device that the periodic replacement operation that can make the ACF spool causes with the operational situation of device.

In addition, according to ACF feedway of the present invention, because by having a plurality of spool placing frames at grade, the minimum vibration that produces in the time of can making the replacement of ACF spool is so have the effect that can keep certain ACF supply condition all the time.

In addition, according to ACF feedway of the present invention, because recoverer simple in structure, so have the effect of the failure factor of the described recoverer of remarkable minimizing.

Description of drawings

Fig. 1 is the partial enlarged drawing that is illustrated in the state of bonding TAB encapsulation on the substrate.

Fig. 2 is the vertical view of the substrate of expression coating ACF.

Fig. 3 is a front view of representing ACF feedway in the past.

Fig. 4 a and Fig. 4 b are front view and the vertical views of representing the supply unit of other ACF feedway in the past.

Fig. 5 is the front view of expression according to the embodiment of ACF feedway of the present invention.

Fig. 6 is the partial enlarged drawing of the supply unit of presentation graphs 5.

Fig. 7 is the partial enlarged drawing of the recoverer of presentation graphs 5.

Among the figure: 10-substrate, 11-grid pad, 12-data pad, 13-ACF, 20-TAB encapsulation, 21-driving chip, the 22-input lead, 23-output lead, 110,210, the 310-supply unit, 111,211, the 311-ACF spool, 112,113-spool placing frame, 113, the 313-ACF band, 113a, the 313a-ACF supporting layer, 114, the 314-roller, 120, the 320-junction surface, 121, the 321-objective table, 122, the 322-pressing machine, 130, the 330-recoverer, 131-reclaims and uses spool, the 133-roller, 140, the 340-carrier, the 215-installing component, the 216-rotary part, 217-stretches and uses pole, the 315-clamping part, and 316-transmits guiding, 317, the 332-spool that dallies, 318, the 333-guiding, 331-touch roll, 334-guide roller.

Embodiment

Below, present invention will be described in detail with reference to the accompanying.

According to the embodiment of ACF feedway of the present invention, as shown in Figure 5, its formation comprises: supply unit 310 has above 2 the spool placing frames 312,312 ' that 2 ACF spools 311,311 ' mode are settled of placing down; Junction surface 320, the ACF that pressurization is supplied with from described supply unit 310 is with 313, and the ACF layer is bonded on the substrate 10; Recoverer 330 is recovered in the ACF supporting layer 313a that the ACF layer is separated at junction surface 320; Carrier 340 is drawn ACF from supply unit 310 and is with 313, sends junction surface 320 to.

Supply unit 310, as Fig. 5 and shown in Figure 6, have 2 spool placing frames 312,312 ' of arranged perpendicular up and down, on each spool placing frame 312,312 ', settle ACF spool 311,311 ' respectively, in the left side, also comprise fixing ACF clamping part 315 and the guiding of supporting in the mode of vertical transmission clamping part 315 316 with 313 or 313 ' end.The ACF that draws from the ACF spool 311 of bottom is with 313, via a plurality of rollers 314, supplies with and gives junction surface 320, is used for bonding process.The ACF that draws from ACF spool 311 is with 313, and by junction surface 320, touch roll 331 engagements with recoverer 330 so form and supply with standby condition.After, as described later, ACF is with 313 to be drawn by carrier 340, supplies with and gives junction surface 320.

The ACF that draws from the ACF spool 311 ' on top via a plurality of rollers 314 ', is held portion's 315 clampings with 313 ' the end of drawing, and forms holding state.Clamping part 315 when the ACF of described bottom ACF spool 311 is with 313 to use up, drops to supply position of readiness (S) automatically along transmitting guiding 316, supplies with ACF to carrier 340 and is with 313 '.Therefore, the operator draw from the ACF spool 311 ' on top ACF with 313 ' and supply with to give junction surface 320 during, can replace the ACF spool 311 of bottom.During the ACF that supplies with top was with 313 ', after on the spool placing frame 312 that ACF spool 311 is placed in the bottom, ACF was fixed on the clamping part 315 in the standby with 313 draw to rise on the end and reset.

In addition, substitute foregoing transmission, clamping part 315 is fixed on supplies with on the position of readiness (S).In such cases, when carrier 340 ACF in use is with 313 or 313 ' to use up, moves to and supply with position of readiness (S), draw ACF with 313 or 313 ' the end of drawing from described clamping part.

Junction surface 320, if arrange from outside supplying substrate 10 and at objective table 321, then the pressing machine that has of top 322 moves down by air cylinder driven, pushes the ACF that has supplied with downwards simultaneously and is with 313, add and be pressed on the substrate 10, the ACF layer is bonded on the substrate 10.Behind bonding described ACF layer, if adherence pressure machine 322, the carrier 340 that is positioned at the right side at junction surface 320 moves to the direction of supply unit 310 on one side, from the ACF that be bonded in substrate 10 on 313 ACF layer separate ACF supporting layer on one side.The substrate 10 of bonding ACF layer is sent to other station, carries out the operation of adhering to of TAB pad or driver IC etc.

In addition, carrier 340 is with 313 to be drawn out to recoverer 330 from supply unit 310 ACF, draw carrier 340 during, rotation drives the touch roll 331 of ACF spool 311 and recoverer 330 respectively, can carry out ACF smoothly with 313 the recovery with ACF supporting layer 313a of drawing.

Recoverer 330, as Fig. 5 and shown in Figure 7, the touch roll 331 that is rotated by pair of meshing constitutes, and each roller is driven by drive motor (not shown) rotation.

In addition, supply unit 310 and recoverer 330, as to the ACF that transmits with 313 mechanisms that apply certain force of strain, have dummy roll 317,332 respectively.The dummy roll 317 of supply unit 310 is arranged in vertical fixing on the guiding 318 on the side of spool placing frame 312, slide up and down, to the ACF that draws from the ACF spool with the 313 certain normal loads that apply the deadweight that is equivalent to roller 317.The dummy roll 332 of recoverer 330 slides on the guiding 333 that vertically has in the place ahead of touch roll 331, to being recovered in certain normal load that ACF supporting layer 313a on the touch roll 331 applies the deadweight that is equivalent to roller 332.In the left and right sides of dummy roll 332, has guide roller 334.Thus, at the junction surface 320,, respectively ACF is applied the state of certain force of strain with 313 both ends, engage operation with normal load by dummy roll 317,332.In addition, be positioned at ACF on the junction surface 320 with the spool placing frame 312 at 313 both ends and the rotation amount of touch roll 331 by variation, impose on the variation of ACF with 313 tensile force, absorbed by the vertical moving of each dummy roll 317,332, thus, the variation of tension force does not influence at the junction surface 320 ACF that engage and is with 313.

If any one ACF that draws from 2 ACF spools 311,311 ' is with 313 or 313 ' to use up, described ACF band is cut off in cutting knife (not shown) work that has on the path of the described ACF band at junction surface 320.Then, the remaining ACF on the right side of cut-out portion band reclaims by the touch roll 331 that drives recoverer 330, and the remaining ACF band in the left side of described cut-out portion drives this spool placing frame 312 or 312 ' and reverse coiling by contrary rotation.So, if the recovery of the described ACF band that uses up finishes, carrier 340 just to the left supply position of readiness (S) moves, after the new ACF of clamping is with 313 ' or 313 end, move to the right once more, stop on the position through junction surface 320 and recoverer 330.At this moment, the dummy roll 332 that is located on the mobile route of carrier 30 as one kind 4 is fixed with the state that rises, and touch roll 331 is fixed with the state that separates up and down separately.In addition, in the transport process of carrier 340, spool placing frame 312 ' or 312 rotates with 313 ' or 313 the direction of drawing to ACF, is with 313 ' or 313 to keep certain force of strain to ACF.If carrier 340 stops, dummy roll 332 and touch roll 331 turn back to original position, finish thus to engage and prepare.In addition, the described ACF that uses up is with 313 or 313 ' ACF spool 311 or 311 ', can be in the use of another ACF spool 311 ' or 311, with the operating condition of device irrespectively, take off by the operator, change new ACF spool into.

Claims (8)

1. ACF feedway, comprise: supply with the ACF band that constitutes by ACF layer and ACF supporting layer supply unit, from described supply unit draw described ACF band carrier, receive the described ACF band of drawing from described supply unit by described carrier and operation post engage described ACF layer the junction surface, reclaim the recoverer of the described ACF supporting layer that has separated described ACF layer, it is characterized in that:
Described supply unit comprises: a plurality of spool placing frames, in same plane, rotatably support a plurality of ACF spools of coiling ACF band; Clamping device, the ACF band that the ACF spool on any one that will be from be placed on described a plurality of spool placing frame is drawn draw the end, be positioned on the supply position of readiness of regulation.
2. ACF feedway as claimed in claim 1 is characterized in that:
Described a plurality of spool placing frame is configuration up and down on vertical plane.
3. ACF feedway as claimed in claim 1 is characterized in that:
Described clamping device fixedly is located on the described supply position of readiness, comprises the drive division of the clamping of clamping part, the described clamping part of driving, the control part of the described drive division of control.
4. ACF feedway as claimed in claim 1 is characterized in that,
Described clamping device comprises: be attached at the transmission guiding on the described supply position of readiness; The clamping part that on described transmission guiding, transmits; Drive the drive division of the transmission and the clamping of described clamping part; Control the control part of described drive division.
5. ACF feedway as claimed in claim 1 is characterized in that,
Described recoverer comprises: a pair of touch roll, and for the ACF supporting layer that will transmit from described junction surface wins over, and the rotation that is meshing with each other; Drive the drive division of described a pair of touch roll; Control the control part of described drive division.
6. ACF feedway as claimed in claim 1 is characterized in that:
Comprise that also tension force keeps mechanism,, apply tension force to a certain degree described ACF band of drawing and the described ACF supporting layer that is recovered in described recoverer from described ACF spool.
7. ACF feedway as claimed in claim 6 is characterized in that:
Described tension force is kept mechanism, comprises a plurality of dummy rolls, described ACF band of each personal certain exert pressure and described ACF supporting layer.
8. ACF feedway as claimed in claim 7 is characterized in that:
Described a plurality of dummy roll is separately by deadweight, to vertical lower pressurize described ACF band and described ACF supporting layer.
CNB2005101099532A 2004-11-26 2005-09-20 Apparatus for supplying ACF CN100414417C (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR20040098090 2004-11-26
KR1020040098090A KR100633159B1 (en) 2004-11-26 2004-11-26 Anisotropic Conductive Film Feeding Device

Publications (2)

Publication Number Publication Date
CN1779539A CN1779539A (en) 2006-05-31
CN100414417C true CN100414417C (en) 2008-08-27

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JP (1) JP4267595B2 (en)
KR (1) KR100633159B1 (en)
CN (1) CN100414417C (en)

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CN1385740A (en) * 2001-08-23 2002-12-18 半导体工程总公司 Feeding film remover for anisotropic conductive film adhering machine
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CN1779539A (en) 2006-05-31
JP4267595B2 (en) 2009-05-27

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