TWI312871B - - Google Patents

Description

1312871 - IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to -TCP (Tape Carrier Package) or C〇F (Chip On Film) for testing one of the ic components (hereinafter - will be utilized TCP, C0F, and other TABCTape Automated Bonding) TCp processing devices commonly referred to as "Tcp" for components manufactured by assembly technology. φ [Prior Art] In the manufacturing process of electronic components such as 1C components, it is necessary to test 70 or 70 pieces of electronic test equipment for the performance or function of the 1C component or the component at the intermediate stage. In the case of TCP, use Tcp. Test device. The test device for TCP is generally composed of a tester body, a test head, and a TCP processing device (hereinafter also referred to as a "Tcp processor"). The TCP processor includes a test function, which is formed by carrying a plurality of TCP carrier tapes on a tape (also including the concept of a film, the same below), and pushing the tape to the test head for electrical connection. The probe of the needle card and the test head of the TCP are contacted with the probe, and the plurality of Tcp are sequentially delivered to the test. Here, one or a plurality of symbols (alignment marks) for each TCP positioning are set in the carrier tape, and the position of the TCP is specified based on the alignment mark, and the positioning of the probe card by TCP is performed. Specifically, after the camera recognizes and tests the image of the predetermined alignment mark related to the TCP of the object, and obtains the position information of the alignment mark, the position deviation information of the TCP is specified according to the position information of the alignment mark, and then according to the Positional deviation information, in response to 5 2192-8567-PF; Ahddub 1312871 requires 彳τ TCP to correct the positional deviation of the probe card [Summary of the invention] However, depending on the type of carrier tape, or Because of the dirt, etc. of the tape, the image of the mark. In this way, the camera player who cannot recognize the alignment mark in the camera will make the appearance of the 龄 龄 V V V 需要 需要 需要 需要 需要 需要 需要 需要 需要 需要 需要 需要 需要 需要 需要 需要 需要 需要 需要 需要 需要 44 44 44 44 44 44 44 44 44 44 44 44 44 44 The dirt on the belt. Due to the suspension of the test device and the problem of the operator. 乍业(4) The productivity reduction of the test The present invention is based on the fact that the developer, the TCP processing device, can make the test device Stop the productivity of high tests.

Or the reflective strip carrying the tape surface is not recognized by the camera. The purpose is to provide a frequency less, and can provide a solution to the problem. To achieve the above purpose, the present invention provides a TCP processing device. 'Transporting a carrier tape that has formed a plurality of TCPs, and pushing the carrier tape to a plurality of connection terminals of the contact portion electrically connected to the test head, by contacting the external terminal of the TCP with the contact terminal of the contact portion, The multi-TCP can be sequentially delivered to the tested Tcp processing device f, which is characterized in that it includes a camera device that recognizes the image having the shape of the image on the carrier tape: The location information of a specific graphic; the location information of the TCP of the specific 4 object is measured, and the image of the first 2192-8567-PF of the TCP; the image of the Ahddub 6 1312871 feature is recognized, and the π, 杳 &amp The image of the image of the Ante diagram, which is an image of the other specific graphics that identify the TCP (Invention 1). In addition, "except for the alignment mark having a predetermined shape, although: TCP "", for example, the external terminal (test base) of the # - w. . A search, or the corner of the package, etc., is not limited. It also. 4« m 4k, 2 In the case where only the alignment mark is used as the specific pattern, τρρ / -A--r is carried on the carrying tape, and it is necessary to have one for each of the shackles, or each of them) Additional complex alignment marks are added. Second: According to the invention (invention u', even if the first specific picture = shadow is not recognized, the detection device is stopped because there is an image that can recognize other specific patterns and only recognizes an image of a specific pattern. The frequency is reduced, and the productivity of the test can be improved. In the invention (Invention 1), it is also possible to create a pattern of the TCP image in the case where the first specific shape of the shirt image cannot be recognized. Try to identify the images in order to identify the images of the specific patterns. In the invention (Inventions 1, 2), use the image recognition of the ^# ^ ^ - Β. ^ μ traits graphics to take the position of the δ 疋 疋 疋 graphics Capital, the capital is regrettable..., °, 'Based on the positional deviation information of the specific contact of the obtained pattern, and based on the specific positional deviation information, the positional deviation correction is better (Invention 3). ...CP to the contact part According to the invention (Invention 3), the TCP processing skirt further includes a tape moving to slightly move the wearing tape pushed by the clicker, and a contact moving device for moving the ground. Tape private device and / It is better to correct the positional deviation of the contact part (Invention 4). 仃(10) 2192-8567^PF of the contact part; Ahddub 7 1312871 The division of the complex KP i = the type of TCP processing device, the handling has been formed! A plurality of rags and glues are applied, and the carrier tape is pushed to the contact point electrically connected to the test head, and the plurality of TCPs can be sequentially delivered by the contact terminals of the external end of the tcp. The device is characterized in that it comprises a photographing device, and the nozzle is attached to the tape on the eve of the tape, and the image of the specific figure having the shape of the shackle is recognized, and the position of the specific figure is obtained, and the test is performed. When the position information of the Tcp of the object is detected, an image of two or more special features that can be recognized is recognized, and an image of the special feature is obtained (Invention 5).

According to the invention (invention U, even if it is impossible to recognize the shirt image of a specific figure, because of the rabbit 7th, there is a case of the image of the two specific patterns which are unique to the image of the other specific image. In comparison, the frequency of stopping the test device can be ruined, and the production of the test can be improved. According to the invention (Invention 5), as many as two or more defects can be obtained from the plurality of specific patterns - The location information of the special graphics of the park office, so by using the location information of Cheng Tian Tian... The position of the TCP contact part can be changed to 2 position information of a specific graphic, and ', can be calculated 0 The amount of positional deviation in the direction of rotation. In the invention (Invention 5), the method, the 丨田# &&<> The average value of the position information of the two specific patterns obtained is further determined based on the calculated specific map = difference T average value 'tcp of the specific test object to the contact portion, and according to the specific positional deviation Information TCP corrects the positional deviation of the contact portion (Invention 6). 8 2192-8567-PF; Ahddub 1312871 In "Hai Ming (Invention 5), using the position information of the specific graphic or more of the specific graphic, And;: consumption is 2

The position information of the specific figure of the 2 sleeve IV L obtained by the explosion, the position of the - around the vertical axis ^ KP is the deviation of the touch part, according to the specific position of the vertical axis Perform the TCp on the 7). It is preferable that the correction of the deviation of the j1 heart is set (inventions 6, 7), and the TCP processing device further includes a small movement of the tape which can be carried by the carrier. The tape transfer device and / $ can move the contact portion that moves the contact portion minutely (4), and the KP can be used to correct the positional deviation of the contact portion by using the glue device and/or the contact portion moving device (Invention 8) In the invention (Invention 5), in the case where the shirt image of two or more special patterns cannot be recognized, the positional correction of the Tcp is not performed, and the tape is pushed to the contact portion, and The external terminal of the Tcp is in contact with the contact terminal of the contact portion, and the contact inspection is performed, and it is confirmed that all the external 丨 terminals of the TCP and the corresponding contact terminals of the contact portion are connected (Invention 9). According to the invention (Invention 9) Even if it is impossible to recognize the position correction of the image of the two or more specific patterns, the external terminal of the Tcp can be brought into contact with the contact terminal of the contact portion. [Effect of the Invention] According to the present invention TCP processing device that can test The stop frequency is set becomes small, and improve testing productivity Embodiment 2192-8567-PF;. Ahddub 9 1312871

Front view, Fig. 2 is a side view of the embodiment, Fig. 3 is a plan view of the work table, Fig. 4 is a plan view of the TCP, and Fig. 5 is a TCP process, 6 to 9 is a plan view showing the work of the probe card of the pusher processor of the TCP processor of the TCP processor of the embodiment,

• Flowchart of the main action of the TCP processor. First, the overall configuration of a TCF test apparatus including a TCP processor according to an embodiment of the present invention will be described. As shown in Figure 1, the test device for TCP! A test head 电气 electrically connected between the tester body and the tester body, not shown, and a TCP processor 2 provided on the upper side of the test head 10 are formed. The TCP processor 2 sequentially transports the TCp which is formed in a row along the longitudinal direction of the carrier tape 5 by transporting the carrier tape 5 to the tester. Further, the carrier tape may be formed in a row of two or more columns along its longitudinal direction. In the present embodiment, as shown in Fig. 4, for each of the TCPs carrying the tape 5, one alignment mark 52 is provided in the vicinity of each corner portion of the rectangular TCP, and a total of four are provided. The four alignment marks 52 are each referred to as a first alignment mark 521, a second alignment mark 522, a third alignment mark 523, and a fourth alignment mark 5 2 4 . In addition, this embodiment of the TCP processor 2, although the TCP will be delivered one by one test, but can also be delivered to 2192-8567-PF at the same time each time more than 2 TCP; Ahddub 10 1312871 tester, in this case, It suffices to set the complex alignment mark 52 for the complex TCp of the simultaneous delivery test. The TCP processor 2 includes a take-up reel 21 and a take-up reel 22. The carrying tape 5 is wound up before the winding-reel 21 winding test, and the carrying tape 5 is taken up by the take-up reel 21 and conveyed in a manner of being wound around the winding reel 22 after the delivery test. Between the take-up reel 21 and the take-up reel 22, three spacer rollers 23a, 23b for staking the protective tape 51 peeled off from the carrying waist φ belt 5 from the take-up reel 21 to the take-up reel 22 are provided And 23c. Each of the spacer rollers 23a, 23b, and 23c can be moved up and down to adjust the tension of the protective tape 51. On the lower side of the unwinding reel 21, a tape guide 24a, a roll-out limit roller 25a, an inlet-side sub-groove 25b, and an inlet-side guide roller 25c are provided, and the carrier tape 5 which is unwound by the take-up reel 21 is placed. The guide roller 2 is guided by the tape guide roller 2, and is carried to the pusher unit 3 via the take-up limit roller 25a, the inlet-side auxiliary sheave 25b, and the inlet-side guide sheave 25c. • On the lower side of the winding reel 22, a tape guide wheel 24b, a take-up limit roller 25f, an exit side sub-groove 25e, and an exit side guide wheel 25d are provided, and the test carrying tape 5 is delivered through the exit side guide. The wheel 25d, the outlet-side auxiliary sheave 25e, and the take-up limit roller 25f are guided by the tape guide wheel 24b, and are wound around the winding reel 22. A pusher unit 3 is provided between the inlet side guide wheel 2 5 c and the outlet side guide wheel 2 5 d. Further, the first camera 6a is provided on the front side (the left side in the second figure) of the pusher unit 3, and the second camera 6b is provided on the lower side of the pusher unit 3 (the inside of the probe card table 7 to be described later). The third camera 6c is disposed on the rear side of the pusher unit 3 (2192-8567-PF; right side in the figure of Ahddub 11 1312871 1). Further, between the pusher unit 3 and the third camera 6c, a mark punch 26a and a return punch 26b are provided. The mark punch 26a is based on the test result, and the return punch 26b is a TCP wearer who judges that the test result is judged to be a defective product according to the TCP conforming to the predetermined position. Further, the mark punch "a" and the return punch 26b can be individually controlled so as not to operate.

Each of the cameras 6a, 6b, and 6c is connected to an image processing device (not shown). The first camera 6a and the third camera 6c are for determining whether or not the position or the number of holes drilled by the TCP or the mark punch 26a is present on the carrier tape 5. Further, the second camera 6b captures the image of the front end of the alignment mark 52, Tcp on the carrier tape 5 (hereinafter sometimes referred to as "test base") and the front end of the probe 81, and acquires it. Those location information, or the captured image is displayed on a monitor (not shown) to enable the operator to grasp the contact status. Further, the image processing apparatus sets information based on the positional deviation of the position of each of the positions acquired by the second camera 6b, and calculates that the second camera 6b is loaded on the camera to be restored to σ 61. The actuator of the stage 61 is movable toward the vertical and horizontal directions (X-axis - γ direction) and the vertical direction (the axis of the Ζ axis, the direction a) of the plan view. Thereby, the second camera 6b captures the first whistle on the carrying tape 5

All of the fourth alignment marks 521, 522, 5U 524. As shown in Figure 1 and Figure 2, the machine in the push unit 3 (Shi Shaojiao) 36, through the bracket 361 An Meng can you. A ^ machine does not push the wood. Fortunately 31 ^ " make the ball The servo j of the rotation of the screw 32 is up to... the two linear "LM guides" in the direction of the x-axis are mounted 37 and the pusher body portion 33 2192-8567-PF which is screwed with the ball 3 of the ball. 32; Ahddub 1312871 By driving the servo motor 3, the pusher body portion 33 can be guided by the linear motion guide 37y, and moved in the vertical direction (z-axis direction). At the lower end portion of the pusher main body portion 33, a suction plate 34 is attached, which is connected to a negative pressure source (not shown), and can hold and hold the carrier tape 5, and is in a fixed state. The tension sheave 35a is provided on the front side (left side in the i-th view) of the pusher main body portion 33, and the main sheave 35b is provided on the rear side φ side (the right side in Fig. 1) of the pusher main body portion 33. As shown in FIGS. 2 and 3, on the back side of the pusher main body portion 33 of the pusher frame 36, the pusher table 4' is placed on the pusher table 4 so as to be placed on the base 38. The top table 48 of the rotary table is fixed to: the frame 36. At the base n "team of the pusher table 4, the ball 4a is rotated by the ball screw 42a having the shaft in the X-axis direction; the servo motor 4ib rotates the ball screw 42b having the shaft in the Y-axis direction; and the servo horse Specifically, the ball screw 42c having the shaft in the Y-axis direction is rotated, and the servo carriage 4lb and the servo motor 41c are respectively located at both ends of the base 40. The slider 44a, which is guided by the LM guides 43a, 43a in the X-axis direction and slidable toward the x-axis, is screwed to the ball screw 42a. The slide plate 46a is mounted on the slide block 4" by the LM guide 45a in the Y-axis direction so as to be slidable in the axial direction. On the upper side of the slide plate 46a, a rotary member 47a having a scrolling table 48 is fixed inside, The rotating member 47a is rotatably mounted to the top of the MW guide 43b, 43b of the Y-axis direction and can be oriented toward the γ-axis 2192-8567-pF; the Ahddub 13 1312871 sliding sliding block 44b and the ball screw 42b screwing. In the sliding block 44b,

The slide plate 46b is mounted to be slidable in the X-axis direction via the LM guide 45b in the X-axis direction. On the upper side of the slide plate 4 6 b, a rotary member 47b having a rolling ring is fixed inside, and the rotary member 47b is rotatably attached to the top table 4 8 引导 guided by the LM guides 43c, 43c in the Y-axis direction and facing γ The slider 44c that slides in the axial direction and the ball screw 42c are screwed together. In the slide block 44c, the slide plate 46c is attached so as to be slidable in the z-axis direction via the guide 45c in the X-axis direction. On the upper side of the slide plate 4 6 c, a rotating member 47c having a rolling ring is fixed inside, and the rotating member 47c is rotatably attached to the top table 4 8 in a pusher table 4 having such a configuration, by driving the feed The top table 48 is moved in the z-axis direction by the motor ['and the slide block 44a, the slide plate, and the slide plate are slid in the X-axis direction". Further, by driving the feeding motor 41b and the feeding motor 仏, the sliding block, the slider 44c, and the slide plate 46a are slid in the γ-axis direction, so that the top table 48 can be moved toward the Υ axis. Further, by driving the servo motor 41a and causing the slider 44a to face the station 4 direction of the vehicle? The moon is moved, and the servo motor 4]b and the servo motor 4lc are driven to slide the sliding block shirt and the sliding block* in opposite directions to the γ-axis, and the rotating members MW are rotated, so that the top table 48 can be vertically rotated. The shaft rotates. According to this push rod operation 2, the pusher unit 3 can be moved toward the x-axis direction and the vertical direction: rotation. [1 glaze In addition, the pusher table is moved to a shorter time than the probe card table 2192-8567-PF; Ahddub Ϊ 312871 time. The next day, I am like Μ ^ ^ Ψ God's universal movement and Korean private + mobile I is small, but it can be used practically. The rotation is as follows: the aspect 'on the lower side of the pusher unit 3, the upper part of the test head 1G, as shown in Fig. 4, the plurality of connection terminals that are in contact with the test base of the TCP ) 探 κ κ ) 11) Probe card for loading the probe card 8 Here, the probe card operates a 7 wire and an upper port 7. The mover and the person who controls the transfer by the motor drive mechanism only have the hand, but in the present embodiment, the motor drive mechanism is employed. As shown in Fig. 4 and Fig. 5, on the basis of the probe card table 7, a ball screw 71 with a shaft in the X-axis direction and a guide member 713 in the rx-axis direction (four) are provided. At that core, each of the LM guides 713 is formed into a rectangular X base 72 which is slidable in the X-axis direction. A screw portion 721 that is screwed to the ball screw 712 at one side of the x base 72. On the X base 72, a servo motor 523 that rotates the ball screw 723 having the shaft toward the ^ direction is provided. On the two LM guides 724, a γ-base 73 having a rectangular shape which is slidable in the γ-axis direction by each of the lm guides is provided. A screw portion 731 that is screwed to the ball screw 723 is formed at one side of the γ base Μ. A servo motor 732 that rotates the ball screw 733 having the shaft toward the γ-sleeve direction is provided on the crucible base 73, and a guide 734 that supports the guard 35 to be freely rotated is provided. In the portion of the grommet 735, a screwing portion 736 which is screwed into the ball screw 733 is formed, and includes a probe card 8 of a plurality of probes 81, which is 2192-8567-PF; Ahddub 15 1312871 is freely disassembled by 4 pins 82. The ground is mounted on the retaining ring 735. Each of the probes 81 of the probe card 8 is connected via a body with an electric cymbal, a Chara, a collar, and a tester. The second camera is located under the probe card 8 and the needle card works. The inside of the table 7. The probe card table 7 of the lower structure of the lower one to the 71 , can drive the servo horse to drive the X base 72' to move the probe card 8 upward, and the servo motor 722 is moved by the drive. The probe card 8 can be moved toward the v-red a' and further in the axial direction. Further, by driving the servo motor 732, the ball screw 733 is rotated, and the screw portion 736 is moved, the probe card 8 can be rotated about its vertical axis. In the test device described above, the pusher unit 3 is held on one side and moved to the probe card table. Carrying tape 5, facing the test head :: The probe card 8 is pushed. Then, the state on the carrying tape 5 seems to be in contact with the probe 81 of the probe 10:8. In this state, first, a small DC current is applied to each of the κ terminals. A contact check is performed on the presence or absence of a current flowing through an internal circuit (for example, a protective body) of the TCP, and the voltage value is measured to confirm all the test bases. The seat is electrically contacted with the probe 81 or short-circuited between adjacent terminals. Then, a test nickname from the tester body is applied to the Tcp, and the response signal read by Tcp is transmitted to the tester body via the test head. According to the response signal, the performance of the TCP is tested or gas measurement is performed, and the TCP is judged by the pass (good judgment) or the non-conformity judgment (not judged). Next, the method and operation of the TCP processor 2 will be described. In the case of using the TCP processor 2, in order to make the TCP processor 2 actually 2192-8567-PF; Ahddub 16 1312871, it is necessary to perform the class in advance, or to change the TCP type to the test base of the library for TCP. The base 81 and the probe 81 of the 铋 铋 卡 8 接 接 接 A A A A A A A A ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) : For example, in the manual operation, the operator selects a plurality of positions (for example, 3 bits ^ probe 81 and the corresponding test pedestal, and determines the approximate position, and the receiver uses the second camera 6b Η Η Η s 田 壮 壮"The image processing device determines and registers the reference position by manually controlling or self-controlling the moving pusher table 4 and/or the probe card table 7 in such a manner that the respective probes are located as far as possible in the center of each of the job bases. Further, the determination of the approximate position may be performed by automatic control instead of the manual operation. In this case, the position coordinates of the predetermined object in the field of view of the second camera 6b are collectively registered. Form, registered in the first to fourth of the carrying tape 5 The position coordinates of the reference marks 52 522, 523, and 524. Further, at this time, the position coordinates of the first to second alignment marks 521 and 522 or the first to third alignment marks 521 and 522 may be registered. Next, the operation of the Tcp processor 2 in the actual operation will be described with reference to the flowcharts of Figs. 6 to 9. Further, in the present embodiment, the probe card table 7 moves the probe card 8 to The registration position registered in the initial setting is set to a fixed state, and the push-pull table 4 of the micro-call is used to fine-tune the positional deviation correction performed by each TCP before the test. However, the fine adjustment may be performed. A method of inverting the probe card table 7 by replacing the pusher table 4. 2192-8567-PF; Ahddub 17 1312871 [To the calculation of the positional deviation amount - using two alignment marks] First, 'S children use the first The positional deviation correction is performed by two alignment marks 52 of the fourth alignment mark 52; 1, 522, 523, and 524. Here, the position deviation correction can also be made, and the setting of the Tcp processor 2 can be performed. 'And can choose to use the fourth... Two alignment marks 52 among the sub-marks (8), 522, 523, and 524, or an alignment mark 5 2 as will be described later. When the TCP processor 2 starts the main operation, the pusher table 4 and the probe The needle card operation 纟 7 is moved to the registration position registered at the beginning (step S101). After that, it is necessary to correct the slight positional deviation caused by the transfer system of each Tcp or the like. Then, borrow & When the main sheave 35b and the tension sheave 35a are rotated by U degrees, the tape 5 is moved, and the __TCP is moved to a predetermined position on the lower side of the suction plate 34 (step si〇2). After the TCP is moved to the lower side of the suction plate 34, the servo motor 31 of the pusher unit 3 drives the movement of the suction plate 34 in the "downward direction" via the pusher body portion. Here, the tension sheave 3^3 b-曰% d5a is caused by the torsion force in the opposite direction to the traveling direction of the carrying tape 5. Since the predetermined tension is applied to the carrier tape 5, the carrier tape 5 becomes a state of no looseness, and the positional accuracy of the tape 5 is carried. The suction plate 34 adsorbs the carrier belt 5 and holds it in a fixed state, and then descends to the photographing position (step si〇3). Next, the second camera 6b is moved to and from the camera table 6i. Sending the position corresponding to the first alignment mark 521 of the first KP on the tape 5, and attempting to recognize the image of the first alignment mark 521 (step sig4). In the case where the image of the first alignment mark 521 can be recognized ( In step S1G5, YES), 2192-8567-PF; Ahddub 18 1312871 The second camera 6b captures the image data transmitted by the first alignment processing device, and proceeds to the image, and then the second camera brake alignment symbol 5... The stage 61 is moved to a position corresponding to the second half of the record 522, and Image (step S107). In the case where the ::: alignment mark 522 is identifiable (YES in step sm), the number of the image of the ^522 is 5_step...to the shadow: at the position - the phase is ^^^. The image processing device transmits the obtained image information. The image processing device obtains the average value of the position of the two alignment marks 52 obtained by the device, and uses the calculation to obtain the position of the TCP pair probe 81: difference information (position deviation The direction (X-axis direction, Y-axis direction, Θ rotation direction) and the amount of positional deviation Δ〇) (step S110). In the case where the step lake cannot recognize the image of the first alignment mark 521 (no at step sm), the second camera 6b moves to the position corresponding to the second alignment mark 522 by the camera table n, and attempts to identify the first The image of the mark 522 is aligned (step S111). In the case where the image of the second alignment mark can be recognized (YES in step S112), the second camera captures the second alignment mark 522 (step S113), and transmits the resulting image data to the image processing. Next, the second camera 6b is moved to the position corresponding to the third alignment mark 523 by the camera table 61, and attempts to recognize the third alignment mark image (step S114). In the case where the image of the third alignment mark 523 can be recognized (YES in step S115), the process moves to step si〇9. In the case where the image of the third alignment mark 523 cannot be recognized in step S115, 2l92-8567-PF; Ahddub 19 1312871 (NO in step si 15), the second camera 6b is moved to the fourth alignment by the camera table 61. The position corresponding to the symbol 524 is attempted to identify the image of the fourth alignment s 524 (step s 丨丨 6). In the case where the image of the fourth alignment mark 524 can be recognized (YES in step S117), the process proceeds to step S1 09. In the case where the image of the fourth alignment mark 524 cannot be recognized in step SI17 (NO in step S117), the operation of the TCP processor 2 is suspended (step S118), and then the 'worker performs confirmation of the alignment mark 52, The predetermined work such as the removal of the dirt or the like of the mark 52, the change in the brightness of the light that irradiates the carrier tape 5, and the change of the setting of the second camera 6b are performed. In the case where the image of the second alignment mark 522 cannot be recognized in step S108 (NO in step S108), the second camera 6b moves to the position corresponding to the third alignment mark 523 by the camera table 61, and attempts to recognize The image of the third alignment mark 523 (step S1 (8). In the case where the image of the third alignment mark 523 can be recognized (YES at step 312), the second camera captures the third alignment mark 523 (step S121). And transmitting the resulting shadow to the image processing device. The image processing device according to the position of the signal, the average value of the signal, and the calculation of the Tcp to the probe 81 Bit ^ deviation information (direction of positional deviation (X-axis direction, γ-axis direction, Θ rotation 2 direction) and position deviation amount AD) (step S122). In step S1 20, the third alignment f-force cow Q1 cannot be identified. ο η 4 λ JU 3 image of the emotion (NO in step S120), the second camera 6 » ~ with the camera work 厶 β moved to the fourth alignment mark 524 corresponding to the 6 And try to identify the image of the fourth f-half 524 (step S123). At the code fourth alignment mark 52 2192^8 567-PF; the case of the image of Ahddub 20 1312871 (YES in step S124), and moves to this step to 21. In step Si24, the situation of the fourth alignment mark-like image cannot be recognized (NO in step S124), Will the TCP virtual prize 9?

Sl25). The operation of the TCP processor 2 is suspended (step - the SU2 does not recognize the image of the image of the second alignment mark milk is NO in step S112), and the second camera 6b uses the camera table to move to and the third Aligning the position corresponding to the mark 523, and attempting to identify the image of the third pair of #准符 523 (step sm). In the case where the third alignment mark such as the image can be recognized (in step S127, m), the second camera 讥The second alignment mark 523 is photographed (step S128), and the image data is transmitted to the image processing apparatus. Then the 'second camera 6b' is moved to the position corresponding to the fourth alignment mark 524 by the camera stage 61, and an attempt is made to identify Fourth alignment mark 524

= image (step (10)). In the case where the image of the fourth alignment mark can be recognized (in the step, the second alignment mark 524 is photographed by the second camera 6b (step S131), and the obtained image data is transmitted to the image processing device. According to the position information of the two alignment marks 52 obtained, the average value is calculated, and the positional deviation information of the TCP to the probe 81 is obtained by calculation (the direction of the positional deviation (x vehicle direction, γ# direction, 0 rotation direction) And the amount of positional deviation Δ!)) (step S132). In the case where the image of the third alignment mark 虎523 is not recognized in step S127 (NO at step S127), and the image of the fourth alignment mark 524 is not recognized at step S13Q (in step §13, it is N). 〇), the action of the Tcp processor \ 2192-8567-PF; Ahddub 21 1312871 is suspended (step S133). Further, in the above example of $彳5|丨-2_ ,, although the image of the image that cannot be recognized to the alignment mark 52 is _, ff, and * 2 (1), the condition 1"

However, it is not limited to this, and it is also possible to create an image in which at least two numbers 52 are not recognized, and it is possible to obtain only one image of the alignment mark 52 by 埤τ 平5. TCP clears the offset of the probe 81. This action can also be made arbitrarily according to the setting of the TCP processor 2.乍成根[U use one alignment mark until the position deviation amount is calculated] Next, the positional deviation correction using one alignment mark 52 among the first to fourth alignment marks 521, 522 and 524 will be described. Case. Step S20 and step S2〇3 are the same as step s above. After the action of the step lake, the second camera moves to the position corresponding to the first alignment mark 521 of the first Tcp on the carrying tape 5 by the camera port 61, and tries to identify the first alignment mark 521. Image (step S204). In the case where the image of the first alignment mark 521 can be recognized (YES in step S205), the second camera 6b takes the first alignment mark 521 (step S206), and transmits the obtained image data to the image processing apparatus. The image processing device obtains the positional deviation information of the TCP-to-probe 81 based on the position information of the obtained i-alignment marks 52 (the direction of the positional deviation 轴 (axis direction, γ-axis direction, Θ rotation direction) and positional deviation). The amount Δ!)) (step S207). In the case where the image of the first alignment mark 521 cannot be recognized in step S205 (NO in step S205), the second camera 6b is moved to the position corresponding to the second alignment mark 522 by the camera table 61, and attempts to identify the first Two pairs of 2192-8567-PF; Ahddub 22 !312871 The image of the mark 522 (step S208). In the case where the image of the second alignment money (10) can be recognized (YES in step S2°9), the second camera 6b captures the ^(4)522(^S21()) 'heart' processing I to transmit the resulting image data. Then The image processing apparatus performs step s2〇7. In the case where the image of the second alignment mark is not recognized in step S2〇9 (NO in step S209), the second camera 6b moves to the third alignment with the camera m. Mark 523 corresponds to the location and try to identify the third pair

The image of the mark 523 (step S211); in the case where the image of the third alignment mark 523 can be recognized (YES at step 8212), the second camera (9) takes the third alignment mark 523 (step S213)' and processes the image The device transmits the obtained image data. Then the 'image processing device performs step S2〇7. In the case where the third alignment mark such as the image cannot be recognized in step S212 (NO in step S212), the second camera 6b utilizes the camera workbench. 6ι moves to the position corresponding to the fourth alignment mark 524, and attempts to recognize the image of the fourth alignment mark 524 (step S214> in the case where the image of the fourth alignment mark 524 can be recognized (YES in step S215) The second camera scares the fourth alignment mark 524 (step S216), and transmits the obtained image data to the image processing device. Then the 'image processing device performs step S2 〇 7. The fourth alignment mark cannot be recognized at step S215. In the case of the video of 524 (NO in step S215), the operation of the TCP processor 2 is suspended (step S217). Further, in the above example, the registration of the first to fourth alignment marks 5 21, 5 2 2 is described. , 5 2 3, 5 2 4 position coordinate, but in the case where only the coordinates of the first to second alignment marks 521, 522 are registered, in step 2192-8567-PF; Ahddub 23 1312871 S209 cannot identify the first alignment The stage of the image of the number 522 pauses the action of the tcp processor 2; and in the case where only the position coordinates of the first to third alignment marks 521, 522, 523 are registered, the third alignment mark 523 cannot be identified in step S212. The phase of the image pauses the action of the TCP processor 2. [After the positional deviation amount calculation] The positional deviation amount AD obtained in the step S110, the step S122, the step S132, or the step S207 is first determined to be that the positional deviation correction is not required. The case (N0 in step S301) skips to step S303, which will be described later. With this skip, the productivity of the test can be improved. The second 'when it is determined that the positional deviation correction is required (YES in step S3〇1) ), the pusher table 4 is driven, and positional deviation correction is performed (step S3〇2).

To correct the positional deviation and perform the positional alignment, use the motor 41&, 41, which drives the pusher table 4, and drive the top table 48, and then push; after the dry single 兀3, the suction plate 34 is adsorbed. A method of moving the carrier tape 5 toward the X-axis-Y-axis direction and/or about the vertical axis. In addition, although the servo motors 711, 722, and 732 of the probe card table 7 can be driven, the X base 72, the Y base 73 or the guard 35 are driven, and the probe card (2) is moved in the X-axis-axis direction and / or the method of rotating around the vertical axis (Θ rotation direction) but because the pusher table 4 can perform the movement control in a shorter time than the probe card 纟7, the method of moving the pusher table 4 is More favorable. The animal has a ° shifting the adsorption plate 34 toward the lower direction of the Z axis - "the knife is copied. The adsorption plate 34 of the adsorbed intercepting belt 5 is lowered to the connection _# ¥ ^, the cloth is lowered to the contact position, and the Tcp is Pushing the probe 81 of the probe 2192-8567-PF; Ahddub 24 1312871 8 (step S303). After the pressing, the suction plate 34 may be slightly pointed toward the front, rear, left, and right, as needed, while still in contact. Swing, or imparting ultrasonic vibration to the adsorption plate. Also, at this stage, a treatment may be added as needed, which is to photograph the positional relationship of the probe 81/test base in the contact state, and to contactlessly The positional deviation correction amount at the time is obtained to obtain a small amount of contact deviation at the time of contact. This additional processing can be performed simultaneously with the test, so that there is no influence on productivity. Then, by making a small amount of contact deviation and The position deviation correction amount is added next time, and a more stable contact can be realized. After the TCP test pedestal contacts the probe 81, first, a small direct current is applied to each test pedestal, and the flow is measured to the inside of the TCP. Circuit (eg protection Whether or not the current of the diode is a voltage or not, and whether all of the test pedestals are electrically contacted and whether there is a short circuit (contact inspection) between adjacent terminals (step S304). In the case where contact failure occurs in the contact inspection, While still in contact, the suction plate 34 is slightly oscillated toward the front, rear, left, and right, or ultrasonic vibration is applied to the suction plate 34, or the pusher body portion is moved up and down to perform the re-contact operation. In the case of a bad condition, it is judged that the TCP is a defective product. Here, it is assumed that the contact resistance value at the time of contact is more difficult than the allowable resistance value at the time of normal test. Then, the test is performed by the tester body. The test signal is added to the test head via the test head, and the response signal read by the Tcp is transmitted to the test body via the test head 1 (step S3〇5), thereby testing the performance or function of the Tcp, etc. TCP determines the quality, defective product, rating, etc. 2192-8567-pF; Ahddub 1312871 Then, when the TCP that is judged to be a good product is moved to the mark punch 26a_, the symbol punch 26a is used to give the good In the case of the product, the counter is punched and punched. In addition, the mark punch 26a or the return punch coffee is also designed according to the application form. In the case where the test execution is judged to be in contact failure (YES in step S306), first, the operator can be made to adjust the position of the probe 81 while looking at the monitor by manual operation. (Step S3〇7a) ^ Second, it can be automatically re-tested (step S3m). In this case, the number information of the test pedestal associated with the determination of the defective product is accepted by the tester body and corresponds to the information. The test base and its surrounding measurement base determine the position deviation amount, and when the obtained position deviation amount deviates from the contact area of the market, the degree is set to the non-contact state, and the work is performed. After the stage 4 is moved in the direction of the positional deviation correction, the test is performed after the contact state is set. Further, the extraction of the test susceptor having the possibility of becoming poor in contact is obtained based on the above test results or the results of the contact inspection. In the above manner, at the end of the TCP test, the servo motor 31 of the pusher unit 3 is driven, via the pusher body; the qw pusher is not 邛33, and the adsorption plate 34 is moved toward the z-axis direction, and is set as the start. Status (step S3〇8). When the probe card table 7 is applied to the positional deviation correction, it is returned to the registration position in advance. Then, the adsorption plate 34 stops the adsorption of the carrier tape 5, releases the carrier tape 5, and moves in the Z-axis direction (step S3 〇 9). Then, the TCP processor 2 judges whether or not the tested Tcp is the last component (step S31〇), and in the case where it is judged to be the last component (in step 2192-8567-PF; Ahddub 26 1312871 S310 is YES), the component On the wt side, if it is judged that it is not the last, (in step S31, it is N0), it returns to step 8102. In the case of the Tcp processor 2 that recognizes the action shown above, even if there is no image of the alignment mark 52 of the 'part of the tape 5, the case where the T, the image of the other alignment mark 52 is recognized 2 Compared with the case of the image of the symbol 52, the 5th frequency of the test device can be reduced. People and improve the productivity of the test. Further, in the case where the images of the two alignment marks 52 are recognized from among the first to fourth alignment marks 521, 522, 523, and 524, the average value of the position information of the symbol: 2 can be used. Detect... The position is 'accurate' and by taking the position information of the two alignment marks 52, the position deviation correction in the direction of rotation can be entered. The embodiment described above is intended to facilitate the understanding of the present invention and is intended to limit the inventors. Therefore, the respective elements of the above-described embodiments are intended to include all design changes or equivalents of the technical scope of the invention. For example, 'the plurality of TCPs may be simultaneously delivered to the measurement center to set the fourth to fourth alignment marks 521, 522, 523, 524, and the first and fourth alignment marks 521, 522, 52 are identified. Image. Alternatively, instead of the alignment mark 52, another pattern that can be used, for example, another symbol, a specific test pedestal of TCP, a corner of the device, or the like can be identified. x Further, at least 2192-8567-PF, Ahddub 27 1312871 疋 conditions (light, illuminating color) and camera setting conditions (photosensitivity, etc.) are included in the light source used for the illumination for carrying the tape 5 In the case of changing the setting conditions, the processing of changing the setting conditions and retrying may be added. That is, the second camera 6b attempts to recognize the alignment. In the steps of the image of the number 52, if the image of the image of the alignment mark 52 cannot be recognized, the setting condition can be additionally changed and the image can be recognized again.

Further, in the above-described steps S133 and S217, the operation of the TCP processing state 2 is suspended, but the following processing may be added. That is, even if the positional deviation information cannot be obtained, the Tcp is pressed against the probe 81 in the current state without the positional deviation correction, and then the contact inspection is performed. Thereby, information on the results of normal contact and poor contact can be obtained. In the usual case, 'the test action can be directly continued because the frequency of the pause can be reduced', so the productivity of the test can be improved. On the other hand, in the case where the contact is not detected, the TCP or probe card 8 is moved toward the X-axis/Y-axis direction or moved in a carry-search form, and is sequentially executed: check 'by searching for the most Good moving position, and can be turned into contact with the hanging position. In this way, the test can be continued because the frequency of pauses can be reduced' so that the productivity of the test can be improved. Hip 7 frequency [industrial applicability]

This July TCP processing device is effective for improving the test's biometric efficiency. And N [Simple description of the diagram] 2192-8567-PF; Ahddub 28 Ϊ 312871 The first TCP view. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front elevational view showing a test apparatus for a Tcp processor including an embodiment of the present invention. Fig. 2 is a plan view showing the side of the pusher unit of the Tcp processor of the embodiment in the pusher table of the TCP processor of the embodiment. α Figure 4 is a plan view of the probe card table of the TCP processor. • Figure 5 is a front view of the probe card table of the TCP processor. Fig. 6 is a flow chart showing the main operation of the TCP processor of the embodiment. μ Fig. 7 is a flow chart showing the main operation of the TCP processor of this embodiment. Fig. 8 is a flow chart showing the main operation of the TCP processor of the embodiment. Fig. 9 is a flow chart showing the flow of the main operation of the TCP processor of the embodiment. Claw [main component symbol description] 1~TCP test device; 2~TCP processor; 22~winding reel; 5~carrier tape; 6a, 6b, 6c~ camera; 8~probe card; 1 0~ Test head; 21~ roll-out reel; 3~ pusher unit; 50~TCP; 7~probe card table; 81~probe (contact terminal) 2192-8567-PF; Ahddub 29 1312871 52, 521, 522 , 523, 524~ alignment mark.

2192-8567-PF; Ahddub 30

Claims (1)

Amendment date: 98.1.5 1312 step 1148773, please patent amendments to the tenth, the scope of application for patents: ['Tcp processing device, handling has formed a plurality of TCP carrier tape and to the 'th 3 head to the electric t-type The plurality of connection terminals of the connected contact portions push the carrier tape, and the plurality of TCPs can be sequentially delivered to the test by contacting the external terminal of the TCP with the contact terminal of the contact portion, which is characterized by: a 'V device, Identifying the image of a specific pattern having a predetermined I shape on the carrier tape and obtaining the position information of the specific pattern; 'When the location information of the TCP of the test object is specifically tested, an attempt is made to identify the TCP. The image of the graphic is selected, and in the case where the image of the first specific graphic is not recognized, an attempt is made to identify an image of another specific graphic that is different from the first specific image of the TCP. 2. The TCp processing device of claim 1, wherein in the case of not recognizing the image of the first specific graphic, the specific image of the plurality of different positions of the TCP is sequentially attempted to identify the image so that one of the images can be identified. An image of a particular graphic. 3. The image identification of the Tcp processing device 'where J is opened with the special image' of the patent application scope i or 2 is obtained by the image recognition of the specific graphic, and the specific information is determined according to the location information of the specific graphic. The positional deviation information of the TCP on the contact portion of the object is based on the specific positional deviation information, and the positional deviation correction of the contact portion by the TCP is performed. 4. The TCP processing device of claim 3, wherein the TCP processing device further comprises a carrier γ that can be moved by the contact portion to be slightly moved by 31 2l 92-8567-PF1; Ahddub 1312871 The mobile device and/or the mobile unit can be moved to contact. The contact of the micro-moving device 邛 the mobile device uses the tape to move the smashing touch device and/or the contact portion moving device, and corrects the positional deviation of the contact portion by m TCP.罝 5. A TCP processing device that transports the ribbon and electrically contacts the test head with a carrier that pushes the load terminal of the plurality of connection terminals to make the external terminal of the TCP contact the contact portion. % sub, and the plurality of Tcp can be delivered to the test in turn, which is characterized in that it includes: a photographing device that recognizes a specific graphic image having a shape on the carrier tape, and can transmit a signal; The position of the TCP of the specific test object is recognized by the A-to-cho style. The TCP: complex-graphic image is used to identify images of a specific pattern of two or more different positions. 1 Straight Special 6. The TCp processing apparatus according to item 5 of the patent application scope acquires two or more different positions of specific graphics = position information 'and determines the position of the specific graphics of the obtained two or more different positions. The average value of the information is further based on the average value of the position of the calculated specific pattern, the position of the TCP of the specific test object to the contact portion, and the position of the contact portion is performed based on the specific positional deviation information. Deviation correction. 77· The TCP processing splicing according to item 5 of the patent application scope, wherein the image identification of the specific pattern of the two or more different positions is obtained by using the image recognition of the specific pattern, and the specific map of the two or more different positions obtained according to the image is obtained. 2192-8567-PFl;Ahddub 32 1312871 The position of the shape is 旬,# &, the position deviation of the axis 曰, the Tcp of the object of 冽4 is the vertical amount of the contact portion, and the second axis is made according to the specific The positional deviation of the child iCP is corrected for the positional deviation of the contact position of the nucleus. 8. As claimed in the patent application (10), the processing device further includes a TCP processing device, wherein the small-moving tape moving device 2 is carried by the contact portion, and the contact portion moving device (10) = The contact part moves minutely The device performs a positional deviation correction of the TCP pair 移动1 moving device and/or the contact portion moving portion. 9. For example, in the case of the patent application scope method, the TCP processing device of the fifth item, in which the image of the specific pattern at different positions of the helmet is not subjected to the TCP location τ ^ , band, and ...Outside =: Pushing the contact portion (4) The material « is in contact with the contact terminal of the contact portion; and the contact inspection of the contact portion confirms that all the external terminals of the TCP are connected to the corresponding contact terminals of the contact. 2192-8567-PFl; Ahddub 33