TW200903683A - TCP handling apparatus - Google Patents

Abstract

In a TCP handler (2), a carrier tape (5) whereupon a plurality of TCPs are formed is transferred, the carrier tape (5) is pressed to probe cards (8a, 8b) having a plurality of probes (81) electrically connected to a test head (10), and test pads of the TCPs are connected to the probes (81) of the probe cards (8a, 8b). Thus, the TCP handler successively tests the TCPs. The two probe cards (8a, 8b) are arranged, corresponding to the two TCPs to be tested at the same time. Moving apparatuses (7a, 7b) which move the probe cards (8a, 8b) for every probe cards (8a, 8b) are provided. Contact errors in testing the TCPs at the same time can be reduced by using the TCP handler (2).

Description

200903683 IX. Description of the Invention: [Technical Field] The present invention relates to TCP (Tape Carrier Package) or c〇F (Chip 〇n Film) for testing one of IC components (hereinafter, Tcp, COF, and TAB) ( Tape Automated Bonding) The packaged components of the package technology are collectively referred to as "TCP", and the tape and reel package control device used. [Prior Art] ...Electronic component test apparatus which must use a test for testing the performance or function of the finally manufactured electronic component or its intermediate stage component in the manufacturing process of an electronic component such as a 1C component, in the case of TCP The lower test system uses TCP. The TCP test device is generally composed of the following: and the tape and tape package control device (the following is also: the first two: package processor, can be transported on the tape (also including the film) The multi-TCP carrying belt will carry the probe of the probe card input to the test head, so that the output of the probe is '2, V: gas connection' and the test of the complex tcp is performed in sequence. The test must be... correctly It is necessary to carry out the contact, so it is necessary to carry out the position of the stage and the probe = the pin is surely advanced (four) the quasi-m-money belt together with the point-in-the-spot contact press (~3), or the method of making the probe D self- Patent

Method of moving in the Xy direction (patent text)

2192-9454-PF 5 200903683

However, in recent tcp processors, in order to improve test efficiency, multiple (for example, two) TCP delivery tests will be performed. For multiple TCPs, the knife is not open: it is on the same strip. Therefore, it is impossible to move each KP individually and the position of the needle is aligned. Furthermore, since the probe on the probe card is broken, it is impossible to move the probe individually in accordance with each TCP. Therefore, in the above case, in the past, the alignment was performed with only one reference, and the TCP that the g.. Trp gI penetrated was J thousand and the other TCP, and the position alignment was preset to make contact. Patent Document 1: Japanese Unexamined Patent Publication No. Hei No. Hei. No. Hei. No. Hei. No. Hei. SUMMARY OF THE INVENTION PROBLEMS TO BE SOLVED BY THE INVENTION Therefore, Tcp which is aligned by the above-described presets often causes contact errors, and it is impossible to perform contact under reliability. The present invention has been made in view of the above-described phenomenon, and an object thereof is to provide a tape and tape type packaging control device capable of low contact error in the case where a plurality of Tcps are simultaneously tested. Means for Solving the Problem In order to achieve the above object, the present invention provides a tape and reel package control device

2192-9454-PF 6 200903683 "This is used to transport a carrier belt that forms a plurality of TCPs, and the carrier belt has a plurality of measuring portions that are electrically connected to the connection terminals of the test heads by the external portion of the TCP The terminal and the touch of the measuring unit sequentially test a plurality of TCPs of a hard number, including n·(n is an integer of 2 or more), so that a plurality of π can be simultaneously tested. Each of at least r ν , 7 Α η of the measurement units is provided with a measurement unit moving device to move the measurement unit (invention). In addition, since the measuring unit moving device is provided for at least (n-1) measurement of each of the 邱 〃 y y 调 , , y y y y y y y y y y All devices. According to the above invention, it is possible to move all of the other measuring units independently and independently. In the former, all the measuring units are moved to perform the pairing. The positional alignment of the transport belt with respect to the fixed measurement unit U U corresponding to the measurement unit is caused by the transfer of the Tcp provided with the measurement unit of the measurement unit moving device and the simultaneous delivery test. In the latter case, the measurement unit can move independently, and the measurement units can be aligned with the simultaneous and fixed mobile devices. Thereby, the MGP can be placed at the position of the TGP for each of the Tcp I. The contact end of the contact and the jaws is "sufficient to reduce the contact error. In the above invention (the invention control device further includes n push two:: good, the tape-type seal is separately independent; Corresponding to each measurement unit, the upper f is close to/away from the measurement unit (Invention 2).

2192-9454-PF 200903683 In the case where there are a plurality of measurement sections, the high yield of these connection terminals is often different. As in the above invention (Invention 2), the individual = eight (four) "by (four)" by the amount of movement Corresponding to the connection terminal ^ degree is properly adjusted, and the connection terminal of the %JL, the benefit A ^ fixed part is enough to suppress the contact pressure of each of the measuring tubes" (invention ^ 2) 'this is better' The tape-type sealing material element can be close to/away from the plurality of thrusters; the pushing unit moving device, the reaching of the pushing unit, the fishing, the 1 position (issuing the sun and the moon 3) According to the invention (Invention 3) of the measuring unit, the positional movement of the measurement unit is fixed by the movement of the unit. In other words, ==================================================================================================== In the inventions 1 to 3), the tape-receiving package includes a specific portion capable of photographing the carrier tape and an image captured by the camera device according to the camera device, a 1-inch crotch terminal and the cymbal The position of the connection terminal is shifted! 'According to the positional offset, the measurement unit should be biased: Move 'Execute the connection terminal for the external interface of TCP' (Invention 4). Bu. The position of the dice

2192-9454-PF 200903683 According to the above invention (the invention process, it is possible to simply align the image by the image pickup device. The position of the butt connection terminal to the TCP external terminal is the above invention (Invention 4)

The position of the external terminal is the same as that of the vanadium crucible. For the TCP connection 3), the propulsion unit is moved by the propulsion unit (invention 5). In the above invention (invention 4, ^ is better) (Invention β) According to the above invention, a plurality of TCP/measurement units, _ because it is sufficient to simultaneously take a photo-recovery time. The correlation of the positional offset of the retraction is as described above. According to the invention (Invention 6), it is possible to more accurately perform the positional shift of the Tcp and the measuring unit by shifting the end amount ' of the position of the M1 and the plurality of positions by moving the plural number of photographs separately Wear #准°再再' Set 'As long as the small amount of movement can be taken and the processing time related to the acquisition of the loading amount. - In the positional shift (Inventions 4 to 7), the camera can be inserted into 4 Between the Τ and the measurement unit, the eight components are blocked by other components. According to the above invention, the specific portion of the imaging conveyance belt of the imaging device and the specific portion of the measurement unit are prevented from being smashed::: Can't shoot below -

2192-9454-PF 200903683 Contact of the test pad, Kenting extended the dust of the terminal, the position information of the part. Furthermore, since the conveyance belt can be photographed from a close position, the position information can be accurately obtained (coordinate information =; square °, the camera can also be set in the interior of the test head as in the past - In the inventions 1 to 8), between the measuring unit and the test head 2, the surface elements are used for electrically contacting the two, and the surface elements are electrically connected through the elastic wires. . According to the invention, each of the measuring devices (in the case of the above invention (invention - test head) is provided with an interface element. The measuring portion and the measuring element (four) are in electrical contact with each other, corresponding to the movement of the measuring portion The device, together with the #, 8|~ each of the "faces", can be independently moved by the measuring unit (the invention is based on the above invention (invention 1 (n should interact with the interface elements, two The measurement unit is aligned with the line. Therefore, even if the imaging unit is installed, the test head is provided with a flexible guide wire to block the field of view of the imaging device. Further, the height of the upper portion is not set to In the past, the measurement unit can be controlled to a minimum. '' Therefore, the effect of the design change of the processor can be changed. According to the tape and reel package of the present invention, when a plurality of TCPs are burned, the s-guard device is used. It can be aligned at the same time to adjust the position and reduce the connection: the two parts move separately and execute their request

2192-9454-PF 10 200903683 [Embodiment] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. Device 2: Invention-implementation type of tape-type packaged processor, propulsion single-sided diagram' Figure 2 is the tape-and-reel package processing of the same type of tape (4) propulsion unit and =m3W (four) The front view of the top of the test head is applied to the TrD. And test this: two: composition: two unshown test body, tape and reel package processor 2 / 1 〇, tcp type package processor 2 set above the test head 10 will be formed on the carrier 5 In this embodiment, the "solid (10) father pay test is taken as an example. Jixian, Shihuan η mouth ^ This month is not limited to this, for example, 4 The TCP simultaneous delivery test may also be performed. The tape and reel package processor 2 has a take-up reel 21 and a take-up reel 22, and the reel 21 is wound with the conveyance belt 5 before the test. The conveyance belt 5 is unwound from the unwinding roll 1. After the test, it is wound onto the take-up reel 22. 2. There are three spacer rollers, 23b 23c, between the take-up reel 21 and the take-up reel 22, and the protective tape 51 for peeling off the transport belt 5 from the roll = reel The winding roller 22 is spanned. Each of the spacer cores and w can be moved up and down to adjust the tension of the protective tape 51. • Below the unwinding reel 21, a reel guide, a retracting roller 25a, and an inner side are provided. The secondary sprocket and the inner guide roller 25c are transported from the take-up and retractable shaft 21 by the take-up guide rail 5 The roll-out restricting roller 25a, the inner secondary sprocket 25b, and the inner guide roller 25c

2192-9454-PF 11 200903683 Send to the propulsion unit 3. The lower outer sprocket and the outer guide roller are also provided on the outer side of the take-up reel 22 under the take-up reel 22, and the outer sprocket and the outer guide roller are delivered to the test 1, and the outer guide roller (5) and the outer sub-chain are passed. The rim is taken up by the take-up reel 25f, which is wound by the take-up reel and is wound onto the take-up reel 2 2 . ^ and 'between the inner guide roller 25c and the outer guide roller 25d. Further, as shown in Figs. 1 and 3, the propulsion unit which is movable in the two-axis direction is provided with two probe chucks a and two through the interface member 9 in the upper portion of the first end of the propulsion unit 3; Furthermore, the interface element 20° is also referred to as a fixed seat, a test cymbal chassis, a test fixture, a top plate, and the like. : As shown in Fig. 2, the two probe cassettes in this embodiment are respectively a plane view abundance [|] flower; η η five is limited thereto. Each of the probe cards 8a and 8b is slid to be a pair of two self-contained probes 81 that are simultaneously delivered for testing. Each of the probes 81 has a configuration of the probe 81 of the 81-series transmission system (external terminal). Each probe is electrically connected to the test body through the interface element 9 and the test head 1Q. As shown in Figs. 1 to 3, the probe card 8 is held by the clamp 7a in the needle card + + a, and the probe 8b is sandwiched by the clamp 7b. Chain-recognition Each of the clamps 7a, 7b can be driven by a drive mechanism that is not shown in the figure.

钿Children m 鞞 universal, Y-axis direction and move around the Z axis. Therefore, the 'probe card 8a can be 蕤^, v ± you are wrong by the clamp 7a in the X-axis direction, the Y-axis direction and around the Z-axis M, +, and the needle card 8b can be borrowed The clamp 7b moves in the X-axis direction, the γ-axis direction, and around the Z-axis.

2192-9454-PF 12 200903683 As described above, since the two probe cards 8a, 8b can be independently moved, this is sufficient for positional alignment of the D Cs that are simultaneously delivered for testing. The test pads of the respective TCPs and the probes 81 of the probe cards 8a and 8b can be surely contacted, so that contact errors can be reduced. _ Each probe card 8a, 8b is electrically connected to the interface & 9 through a flexible wire 91! · Health connection. Therefore, the probe card 8a can be moved without being hindered by the wire 91. As shown in Figures 1 and 3, the propulsion unit 3 has two propellers 3〇a and 3〇b that are driven by the frame 36 and are placed on the other side of the propeller _ (Fig. 1 The tension sprocket 3 of the left side is provided with a main chain wheel on the rear side of the propulsion 30a, 30b (the right side in the figure!). Each of the pushers 30a, 30b has a propulsion body that is screwed to the ball screw 32. P 33 is a feeding motor 31 for rotating the ball screw 32; and an adsorption plate 34 for pushing the lower end of the main body portion 33. The propulsion main body portion 33 of each of the propellers 3A, 30b is provided with a push frame 36' through the z-axis direct-moving guide rail 37, and is guided by the linear motion guide 37 while being driven in the up-and-down direction ( = movement, that is, each of the pushers, 3〇b can be moved inwardly. The suction plate 34 is connected to a negative pressure source (not shown) and the carrying belt 5 is attached.

Here, the "advanced H3Ga system" presses the pusher on the transport belt 5, and the pusher 30b presses the Tcp on the transport belt 5. When the two probe cards 18b are fabricated as described above and provided in the tape reel type processor 2, the probes 81 on the respective probe cards 8a, 8b are: 2192-9454-PF 13 200903683 The height is often slightly different . In this case, in the case of the transport belt 5, the probe of the probe having a high contact pressure has a problem that the pusher presses the touch error or the probe of the contact pressure is high. Therefore, as in the present embodiment, the probes θ are deformed by the individual thrusters _, 鸠, and can be individually used in two: respectively by using the lower end of the movement of each of the thrusters 3〇a, 3〇b: : With proper adjustment, the probe 81 of the T:8b can be pressed with the most appropriate contact pressure. That is, by using two advances: 3〇a, 30b, this is enough to absorb the difference in the height of the needles at each of the probe cards 8a. On the back side of the push frame 36, a push, Fig.) is provided. With the propulsion platform 4, the propulsion unit can be moved by: 4;=5::,::: on the Z axis. Therefore, the pusher 3〇b of the propulsion unit 3 is moved by the suction plate 34 so that the feed unit 3 moves as described above, so that the conveyance belt!::=axis: moves toward and around the Z axis' The alignment of the TCP on the carrier tape 5 and the probe 81 can be performed. As shown in the first and third figures, the first stage side (the left side in Fig. 1) of the propulsion unit 3 is provided with the first! In the camera 6a, in the test head, there is a second camera (photographing device). The third camera 6c is provided on the side of the propulsion unit 3 (the right side in Fig. 1). After 26a Γ6 " Γ ^ 6C "" ! ^ # 盗 26b. The puncher 26a is shown to open one or a plurality of holes in accordance with the test result, and exits the puncher 26b, which is judged to be a defective TCP punch in the test.

2192-9454-PF 200903683 The image of the 6A image is displayed on the display fade (not shown) so that the operation = machine shooting

confirm. The display device has an image processing unit for viewing: the provincial and the captured image (four) viewer. τ Each reading I Among these cameras, there is no TCP in the position of the third camera and the third tapped hole, or it is bought by the position or number of the puncher. On the other hand, the second camera is used to acquire the positional shift data between the Tcp and the probe 81. In the present embodiment, two second cameras 6 are provided, and the second camera 6b on one side is a probe for photographing the probe cassette, and the TCP test or alignment mark is applied to the other side. The first camera is photographed with the probe 81 of the probe card 8b and its corresponding column = alignment mark. The r 4 pad or each of the second cameras 6b, 6b, from the position of the photographed and test pad or the alignment mark, the needle 81 is calculated to calculate the positional deviation of the probe 81 and the edge, and can be 61, :: This machine is mounted on the camera platform 61, 1 'by the camera platform 61, β〗, and can be used in the vertical and horizontal directions of the plane (X-axis _ γ axis (1): In the plane view vertical and horizontal direction (two shots and TCP are far apart from each other, moving, licking the needle card 8a, 8b away from each other 'a plurality of test pads and the probe 81 located at the position of the probe extension. Find the test TCP of the TCP and the probe cards 8a, 8b (4): ^ can accurately correct the amount of shift, and can correct the position of the riddle / the TCP test pad and the probe card 8a, 8b

The position of the probe 81 of 2192-9454-PF 15 200903683 is aligned. Each camera platform 6 j, 6 j, 八 6b, this, move, also... The second camera is not independently activated. When the second cameras 6b and 6b are moved to the same position, for example, the second camera, the test pad corresponding to the position of the second camera, and the probes of the corresponding positions of the probe cards 8a and 8b are... This,: two f camera? Two machines wide focus relative. The probe 81 and the test gate or the alignment mark are both gates t. By providing the plurality of second cameras 6b and 6b', it is possible to simultaneously acquire two Tcp cameras 6b and 6b as long as the dragon=position data' Because it is a second shot, it is necessary to move a little, and it is possible to shorten the processing sensibility of the position data acquisition and the squat time. However, due to space or cost, only one second camera can be set. Here, in the present embodiment, the probe cards 8a, 8b and the interface member 9 have a flexible guide line 9 but in some cases, the wire 91 causes the second camera 6b, 6b. 'The obstacle of the vision. In this case, the camera 6b, 6b' is set to be inserted between the carrier tape 5 and the probe 81. By providing the second cameras 6b and 6b in this manner, it is possible to capture the test pads or alignment marks of the needles 81 and TCP by the second camera 视 without being blocked by the V line 91. As shown in Figures 4 and 5(a) and 5(1), the second camera 讣 and the second knives 5 are placed on the rigid end of the arm 63 extending from the camera platform 62, 62. 62, the motives you have

2192-9454-PF 16 200903683 Move in the vertical and horizontal directions of the plane (x-axis - γ-axis direction). Further, the figure shows the exit state of the second cameras 6b and 6b', and shows the insertion state of the second cameras 6b and 6b. The second camera 6b, 6b can display the upper side and the lower side. Therefore, for example, the camera second camera 6b, 6b inserts the transport belt. The second camera 6b, 6b, can simultaneously capture the 对准 alignment mark and the tip end portion of the probe 81. With the cymbal pad or 6b', it is possible to directly shoot the camera 讣 from the lower side, (and the contact surface of the test cymbal), so the tip end of the connection terminal is the position of the tip end. Obtain the test 塾 or alignment mark of the probe, so it can be two == photo-mark information). In /, location data (seat: two second camera 6b, the energy side (transport π 5) and the lower side (probe 81) are taken by the camera itself to reverse or cut the kernel, not as In the limit, the camera on the upper side (the light path in the transport belt and the m-shirt is placed separately) and the camera on the lower side (the drill camera: the camera on the upper side (handling belt 5) is set to 2 (probe 81)) Yes, the camera and the lower side of the shooting are followed by the description of the tape-and-reel package. This positional alignment action can be used to align the position of the 丄 2 with the action of the actual action t, or, ', volume The package processor 2 operates. The tape and reel package processor 2 at the initial setting before the operation of ',, and * is photographed by the cameras 6b and 6b.

2192-9454-PF 200903683 Two TCPs owed to the test position, 7m, each test pad or alignment mark, and the corresponding probe card 8a, 8b 禊4+ 81 free, the probe of the day and night 81. Obtain the coordinates of the data. , ''Luzhi, different TCP test 禊 and skew 8 clips a move the probe card 83, by the position offset of two: 1, by moving the probe card 8b with the clip, So that the positional offset is below a certain amount. As described above, by making the two probes, 8a, 8b, the positional deviation of the two TCPs is 9^rrv^Jf, respectively, so that individual alignments can be performed for each of the KPs. Therefore, it is possible to make the respective test pads and the probes 81 of the probe cards 8a and 8b have a low contact error. Surely contact, and can be reduced again. In the case where the two TCP bits are the same in the π, ..., + phantom position offset direction, the probe cards 8a, 8b can also be moved. ^ οα _ n Fine propulsion platform 4 #Advance early 3 move 'and move the carrying belt as a whole. Then, the probe cards 8a and 8b can be moved. It is to be understood that the above-described embodiments are not intended to limit the various elements of the invention, and are intended to include the invention. For all the design changes to which T belongs, for example, in the above embodiment, both of the probe card clamps 7a, 7b can be moved, but the clamp 7a (or the clamp 7b) on the side of the clip can be moved. Here, 7b (or the clamp 7a) may be fixed. - Side clamp In this case, the carrier belt 5 is initially moved by pushing the flat A, and the needle TCP: l吏 advancement: the element 3' follows the τ, execution and fixation

2192-9454-PF 18 200903683's ^ card or probe card 8a) probe 8i (four) set _ plus the amount of movement, by the movable clamp; the 'needle card 8a (or probe card 8b) moves The position of the probe 81 for the remaining probe card 83 (or the probe card 8b) is aligned with the above configuration, and is earlier than the above-described embodiment, and the space is saved. Can reduce costs. Further, a plurality of interfaces may be provided corresponding to the number of probe cards. Fig. 6: The device is moved to move with the probe card. For example, if the interface component is replaced by I, the probe card 8a and the interface component can be gripped by the clamp γ:: 'by the drive mechanism not shown by the figure, the X-axis can be moved in the 4 direction and around the 2 axis. 'The probe rib and the interface member 9b are gripped by the shaft sweetness 7b' and can be moved in the axial direction and around the two axes by the drive mechanism not shown. It is enough to form the 'probe card ^ and the interface element # 9a in the Χ 8b and the fine person ^ ,, and the probe card 8 & 〃 % % % 9 b b 所以 所以 所以 所以 所以 所以 所以 所以 所以 所以 所以 所以 所以 所以 所以 所以 所以 所以 所以 所以 所以 所以 所以 所以 所以 所以 所以 所以 所以 所以 所以 所以There is no need to provide elastic wires between 9b. 17 that the second cameras 6b and 6b' are placed on the upper portion of the test head 1 ,, and the two views of the probe card 8a and the π-disintegration are set to be the same as in the past due to the wire. Able to make use of past decisions,

And make the design changes of the processor to a minimum. In addition, in the above embodiment, the number of the probe card and the (clamp) that moves the probe card is two, but the present invention is not limited thereto, and may be set by 2192-9454-PF 19 200903683. For three or more integers, for example, α such as α is set to 3, 4, and the like. Industrial Applicability The present invention can be used to properly perform skew I& during self-operation in the initial operation of a reel or a package control device.

Only the probe of the probe card and the position of the TCP are aligned.别别 a塾 [Simplified description of the drawings] Fig. 1 shows a front view of a test apparatus using an implement of the present invention. ~ Tape and Reel Packaging Process Figure 2 is a side view of the tape and reel package of the same embodiment. 63 隹进早 Fig. 3 is a front view of the same type of tape and reel package processor ... and the upper part of the test head. 7 am. Figure 4 is a front view of the tape and reel package of another embodiment and the upper part of the test head. The propulsion sheet of the benefits is shown in Figure 5(a) and (b) are side views of the propulsion unit, probe card and camera shown in Figure 4. Fig. 6 is a front view of another embodiment of the tape and reel package 70 and the upper portion of the test head.益之推单 [Main component symbol description] TCP test device 1 Tape and reel package processor 2 Propulsion unit 3

2192-9454-PF 20 200903683 Propellers 30a and 30b Transport belts 5 Second cameras (photographic devices) 6b, 6b Clamps (measurement unit moving devices) 7a, 7b Probe cards (measurement units) 8a, 8b Probes (connections) Terminal) 81 interface component 9, 9a, 9b conductor 91 test head 1 0 2192-9454-PF 21

Claims (1)

200903683, the measurement of the patent scope = the type of tape-type material control device, the heart _ handling ▼, the carrier tape is pressed against the measuring unit having the complex-number connection terminal, and the test head of the TCP is fixed The connection terminal contacts, and sequentially tests the complex T(;w and the characteristic is: the main has n (n is an integer of 2 or more) the measuring part, so that m is tested for a plurality of TCP; = "At least the solid measurement unit (...the measurement is made to move the crotch portion. The tape and reel package tube according to claim 1 of the application scope of claim 2) wherein the tape reel package control device further comprises n thrusters to = V Corresponding to each measurement unit, each of the above-mentioned propulsion units is close to/away from each other. (5) For the measurement, the reel-type package control device includes: An ancient π thruster; χ approaching/distancing from one or a plurality of propulsion unit moving devices of the measuring unit, moving the propulsion unit in the direction of the conveying belt surface by the propulsion unit moving device Single adjustment carrier belt pair The position of the measuring unit. Movement 4 詈, 匕申4: The tape-and-reel package control f-4 roll-type package control device described in item 1 includes the ability to shoot the Xiao-handling belt 2219-9454-PF 22 200903683 The photographing device of the part and the specific part of the measuring unit obtains the positional shift amount of the connection terminal of the τ measuring unit based on the image captured by the photographing device, and the 4 terminal and the shift amount 'by the Measurement section shift (4) Move 'Execute the remote junction* Mountain work 4 疋 疋 shifting 1 connection Η For the external terminal taken 5 · As described in the patent application 帛 4 item. For the external terminal of tcp: when the official control is installed, it is moved by the push unit according to the third item of the patent application scope. The early private device is placed two: the tape type described in claim 4 The package " contains a plurality of the photographic device. The work and the second special: the tape and reel control device described in item 6 is moved independently or in conjunction with the desired position. ΜThe full-length 81帛4 item of the volume K package tube _ # set, The photographing device can be inserted into the carrying belt and the measuring unit = the tape and reel package control according to the first application of the patent application scope, " between the measuring portion and the test head, the medium is provided with φ _ I, make the two electrical contact, ... face-piece for the 玄 measured 疋 and the interface element, is electrically connected through the elastic wire. Λ 0. Zhongru / please patent scope 1 Between the measuring portion and the test head, an interface element is disposed between the measuring portion and the test head to electrically contact the two, and a plurality of interface elements are disposed corresponding to the measuring portion, 2192-9454 - PF 23 200903683 Each of the above-described interface elements can be independently moved by the measuring unit moving device together with the measuring unit. 2192-9454-PF 24