WO2008120518A1 - Tcp handling apparatus - Google Patents

Tcp handling apparatus Download PDF

Info

Publication number
WO2008120518A1
WO2008120518A1 PCT/JP2008/053516 JP2008053516W WO2008120518A1 WO 2008120518 A1 WO2008120518 A1 WO 2008120518A1 JP 2008053516 W JP2008053516 W JP 2008053516W WO 2008120518 A1 WO2008120518 A1 WO 2008120518A1
Authority
WO
WIPO (PCT)
Prior art keywords
tcps
probe cards
tcp handler
handling apparatus
probes
Prior art date
Application number
PCT/JP2008/053516
Other languages
French (fr)
Japanese (ja)
Inventor
Hisashi Murano
Yukihiro Kawamura
Takeshi Onishi
Original Assignee
Advantest Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corporation filed Critical Advantest Corporation
Priority to JP2009507436A priority Critical patent/JPWO2008120518A1/en
Publication of WO2008120518A1 publication Critical patent/WO2008120518A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889—Interfaces, e.g. between probe and tester
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2896—Testing of IC packages; Test features related to IC packages
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Environmental & Geological Engineering (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

In a TCP handler (2), a carrier tape (5) whereupon a plurality of TCPs are formed is transferred, the carrier tape (5) is pressed to probe cards (8a, 8b) having a plurality of probes (81) electrically connected to a test head (10), and test pads of the TCPs are connected to the probes (81) of the probe cards (8a, 8b). Thus, the TCP handler successively tests the TCPs. The two probe cards (8a, 8b) are arranged, corresponding to the two TCPs to be tested at the same time. Moving apparatuses (7a, 7b) which move the probe cards (8a, 8b) for every probe cards (8a, 8b) are provided. Contact errors in testing the TCPs at the same time can be reduced by using the TCP handler (2).
PCT/JP2008/053516 2007-03-29 2008-02-28 Tcp handling apparatus WO2008120518A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009507436A JPWO2008120518A1 (en) 2007-03-29 2008-02-28 TCP handling equipment

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-086230 2007-03-29
JP2007086230 2007-03-29

Publications (1)

Publication Number Publication Date
WO2008120518A1 true WO2008120518A1 (en) 2008-10-09

Family

ID=39808102

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/053516 WO2008120518A1 (en) 2007-03-29 2008-02-28 Tcp handling apparatus

Country Status (4)

Country Link
JP (1) JPWO2008120518A1 (en)
KR (1) KR20090122306A (en)
TW (1) TW200903683A (en)
WO (1) WO2008120518A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012068032A (en) * 2010-09-21 2012-04-05 Tesetsuku:Kk Tcp testing device
KR101443315B1 (en) * 2014-03-19 2014-09-26 피앤티솔루션 주식회사 Probe contact detecting device of tape carrier package
KR102016395B1 (en) * 2019-04-08 2019-10-21 류호민 Handler for film-type chip
KR102014496B1 (en) * 2019-04-08 2019-10-21 박형수 Handler for film-type chip
TWI709519B (en) * 2020-01-22 2020-11-11 鴻勁精密股份有限公司 Testing equipment and tape changing method thereof
TWI715499B (en) * 2020-05-19 2021-01-01 鴻勁精密股份有限公司 Detection device, correction method and test equipment using the same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS644044A (en) * 1987-06-25 1989-01-09 Nec Corp Handling device of tab-type ic
JPH10253688A (en) * 1997-03-10 1998-09-25 Sony Corp Apparatus and method for continuity inspection of flexible circuit board
WO2004068154A1 (en) * 2003-01-31 2004-08-12 Japan Engineering Co.,Ltd. Tcp handling device and positional deviation correcting method for the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS644044A (en) * 1987-06-25 1989-01-09 Nec Corp Handling device of tab-type ic
JPH10253688A (en) * 1997-03-10 1998-09-25 Sony Corp Apparatus and method for continuity inspection of flexible circuit board
WO2004068154A1 (en) * 2003-01-31 2004-08-12 Japan Engineering Co.,Ltd. Tcp handling device and positional deviation correcting method for the same

Also Published As

Publication number Publication date
KR20090122306A (en) 2009-11-26
JPWO2008120518A1 (en) 2010-07-15
TW200903683A (en) 2009-01-16

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