200908163 九、發明說明： 【發明所屬之技術領域】 本發明係有關於一種測試作為I c裝置的一種的捲帶 式封裝（Tape Carrier Package，TCP)及薄膜覆晶封裝（Chip On Film，C0F)(以下 ’ TCP、COF、其他 TAB 實裝技術（Tape Automated Bonding)所製造的裝置統稱為「TCp」）的捲帶 式封裝處理裝置。 【先前技術】 在1C裝置等的電子元件的製造過程中，測試最終製造 的1C裝置及中間階段的裝置等的性能及作用的電子元件 測試裝置是必要的’在TCP的情況下，使用TCP用的測試 裝置。 TCP用的測試裝詈_妒在 。 叙係由測试益本體、測試頭以及 TCP處理裝置（以下稱「 。 TCP處理益」）所構成。該TCP處理 益的作用為搬運在帶w … T(tape)(也包含薄膜的概S，以下相同） 上形成衩數個TCP的承载帶 n' Μ I- ^ ^ 將承載π壓於電性連接於測 口式頭上的板針卡的探針 收、-击W 的測滅塾接觸於探針，藉 此將稷數個TCP依次做測試。 精 於此，在承載帶上，执 °又置—個或複數個對每個TCP定 位用的標記（對準標記） 母個TCP疋 ,,7 ^ 乂 5亥對準標記為基準而ρ # ΤΓΡ200908163 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a tape carrier package (TCP) and a chip on chip (C0F) for testing an Ic device. (The following is a tape and tape type packaging processing device of 'TCP, COF, and other devices manufactured by Tape Automated Bonding, collectively referred to as "TCp"). [Prior Art] In the manufacturing process of electronic components such as 1C devices, it is necessary to test the performance and function of the final manufactured 1C device and intermediate devices, etc. In the case of TCP, use TCP. Test device. The test device for TCP is _ 妒. The narrative consists of a test benefit body, a test head, and a TCP processing device (hereinafter referred to as "TCP processing benefit"). The effect of the TCP processing is to carry a carrier tape n' Μ I- ^ ^ which is formed on the band w ... T (tape) (also including the thin film of the thin film, the same below), which will carry the π voltage to the electrical property. The probes connected to the pin card on the mouthpiece head are connected to the probe, and the number of TCPs is sequentially tested. In this case, on the carrier tape, the flag is set to one or more for each TCP positioning (alignment mark), the parent TCP 疋, 7 ^ 乂 5 对准 alignment mark as the reference and ρ # ΤΓΡ
的位置，進行TCP相對於探針卡的定位。 “TCP 具體而言，由設於攝影機附近 裝置對承載帶做照明， 、下側）的照明 错由该攝影機對測試對象的TCP的 2192-9562-PF;Chentf 200908163 既定的對準標記做爭偾 ^ 、 〜像辨識，而取得對準標記的位置資 訊’根據該對準標今沾/ 一 、 1，攄bff 、° 、置資訊而指定TCP的位置偏差資 a據此對TCP的探針卡進行位置偏差修正。 【發明内容】 發明所欲解決的問題 然而’由承载帶的種類及承載帶面的反射條 攝影機無法辨識對If H有 飞耵旱軲§己的影像的情況。特別 ⑽處理時’由於帶較薄，承載帶會捲曲，而從推進單： 的推進板浮起，此時來自照明I置的光反射而兀 攝影機無法對對準標記做影像辨識。 軍’ 下，r作此。纟攝衫機無法對對準標記做影像辨識的情況 :插作貝必須暫時停止測試裝置，變更照明裝置的4 或變更攝影機的設定，如 的冗度， 作員的作業，會有測η的產:暫時停止，藉由操 兩J 5式的產能降低的問題。 :鑑於此，本發明提供—種捲帶式 ^升攝影褒置的承载帶的影像辨識率。 置可 解決問題的手段 為達成上述的目的，本發 裝置，搬運來忐+ 種捲帶式封裝處理 i料成讀個捲帶式封n的透光性 應於具有複數個電性連接至測 载π ’對 由推進單元推壓承载帶，藉 古而子的測定部而 .. 猎由捲贡式封裝的外却*山11 於上述測定部的連接端子 。而子連接 1中卜、十，技* 4 序，則5式複數個捲帶式封穿， " 述捲V式封裝處理裝置且有從卜、+、" 有攸上述測定部側對承載 2l92-9562-PF;Chentf 6 200908163 帶的既定部位做攝影的攝影 明裝置，從該推進單元倒、’ i述推進單元設有照 所明「承載帶的既定部 u TCP的特定外# γ + f 1 σ除了對準標記之外， 定於此。 、的角邛寻，但並不限 很像上述發明（發明日 恭嫌卜X合立 ；…明4置作為背光時，在承 載π上不會產生光暈作用 ^ Μ ir 即使承载帶暫時捲曲而 攸推進早兀序起，攝影 it ^ °對承载帶的既定部位做影 像辨4。精此，起因於攝 、置的衫像辨識不良的測試裝 置的停止-人數會減少，可與4、日丨4 τ扣升測試的產能。 在上述發明（發明〗）中，上述推進單 承載帶的推進板’上述照明裝置係埋設於 佳（發明2)。 ' 元具有保持吸附 上述推進板中為 在上述發明（發明2)巾，a » ；ψ 在承載τ上附有對準標記， 上述攝影裝置對上述對準桿纪傲摄旦彡 干加屺做攝衫，上述照明裝置係埋 设於對應於由上述推進板所明附彳里技& =必 枚厅及附保持的承載帶的上述對準 標記的位置上為佳（發明3 )。 當照明裝置埋設於推進板時，在推進板上形成照明裝 置用的孔（開口部）。位於該間口部上的承載帶推壓於測定 部的連接端子時’在承載帶上開孔。但是，通常由於對準 標記非常小，根據上述發明（發明3)，形成於推進板的照 明裝置用的孔（開口部）也非常小。但是，根據上述發明（發 明3 )’由連接端子在承载帶上開孔的危險抑制到最低限度。 在上述發明（發明2、3)中，上述推進板可由金屬構成 2192-9562-PF；Chentf 7 200908163 (發明4)。根據上述發明（發明2、3)，由 必為透明’推進板可為低成本製造的金屬製推進板本身不 且備ί上述發明（發明1〜4)中，上述捲帶式封裝處理裝置 ▲上述測定部照射承载帶的第二照 根據上述發明’由於第二照明裝置照射的 端子可由崎置做清楚的攝影，操作員一邊：看 攝影裝置拍攝的影像，—邊 觀看 子的接觸狀態。 邊UP的外部端子與連接端 在上述發明(發明5)中，上述推進 i# 7?, « * / 王y及附保 :载’的面(以下稱「吸附面」）最好為黑色(發明6) 由於承載帶為光穿透性，當推進板的吸附面為里色時； =的背面為黑色，的外部端子的對比提=容： 硯看到TCP的外部端子。 更奋易 發明的效果 對承的捲帶式封裝處理裝置，可提升攝影裝置 提升測試的產能。 M裝雜止次數會減少，可 【實施方式】 广下’根據圖面詳細說明本發明的實施型態。 測試ί =為使用本發明的-實施裂態的TCP處理器的TC〗 器中 弟2圖為相同的實施型態的TCP處理 推㈣反、板針卡以及攝影機的概略側視圖。第 …相同的貫施型能 " 心勺TCP處理器中，推進板及承载帶的栖 2l92'9562~PF；〇hentf 8 200908163 略平面圖。 首先’針對具備本發明翁The location of the TCP relative to the probe card. "TCP specifically, the illumination of the carrier tape by the device located near the camera, the lower side" is erroneously circulated by the camera against the test object's TCP 2192-9562-PF; Chentf 200908163 established alignment mark ^, ~ like identification, and obtain the position information of the alignment mark 'According to the alignment of the current mark / one, 1, 摅bff, °, set the information and specify the positional deviation of the TCP a accordingly according to the probe card of the TCP The positional deviation correction is performed. [Disclosure] The problem to be solved by the invention is that the 'image of the carrier tape and the reflection strip camera carrying the belt surface cannot recognize the image of the If H. The special (10) processing When the belt is thin, the carrier belt will curl, and the propulsion plate from the propulsion sheet will float. At this time, the light from the illumination I is reflected and the camera cannot perform image recognition on the alignment mark. In this case, the camera cannot perform image recognition on the alignment mark: inserting the shell must temporarily stop the test device, changing the lighting device 4 or changing the camera settings, such as the redundancy, the staff's work, there will be a test Production: Temporarily stopped, by the problem of reducing the capacity of the two J 5 type. In view of this, the present invention provides an image recognition rate of the carrier tape of the type of tape-type photographic apparatus. In order to achieve the above object, the light-transmitting property of the present device, the handling device, the tape-reel package processing, and the reading of the tape-and-reel package n should have a plurality of electrical connections to the load-bearing π ' The unit pushes the carrier belt, and the measurement unit of the ancient one is used. The outer part of the measuring unit is the connection terminal of the measuring unit, and the sub-connection 1 is in the middle, the ten, the technical order, Then, there are a plurality of tape-type seals of the type 5, and the V-type package processing device described above has a predetermined portion of the belt of the above-mentioned measuring unit side bearing the pair of l92-9562-PF; the Chentf 6 200908163 band. A photographing device for photographing is provided from the propulsion unit, and the propulsion unit is provided with a specific outer portion #γ + f 1 σ of the predetermined portion u TCP of the carrier tape, except for the alignment mark. , the corner of the 邛, but not limited to the above invention (the invention of the day of Christ X Bu X Li Li;... When the light is set as the backlight, there is no halo effect on the bearing π ^ ir ir Even if the carrier tape is temporarily curled and pushed forward, the photographing it ^ ° makes an image discrimination on the predetermined part of the carrier tape. The number of shots caused by poorly-identified test equipment will be reduced, and the capacity of the test can be increased with 4, 4 τ 4 τ. In the above invention (invention), the above-mentioned propulsion single carrier belt The above-mentioned lighting device of the pusher plate is embedded in the invention (Invention 2). The element has the above-mentioned invention (Invention 2) in the above-mentioned propulsion plate, a » ; 对准 an alignment mark is attached to the bearing τ, the above-mentioned photography The device is used for the above-mentioned alignment rods, and the above-mentioned lighting device is embedded in the above-mentioned illuminating device corresponding to the above-mentioned pusher board, which is attached to the rig; It is preferred to position the alignment mark (Invention 3). When the illuminating device is embedded in the pusher plate, a hole (opening) for the illuminating device is formed on the pusher plate. When the carrier tape on the mouth portion is pressed against the connection terminal of the measuring portion, the hole is opened in the carrier tape. However, in general, since the alignment mark is extremely small, according to the above invention (Invention 3), the hole (opening) for the illumination device formed on the pusher plate is also extremely small. However, according to the above invention (Invention 3), the risk of opening a hole in the carrier tape by the connection terminal is suppressed to a minimum. In the above invention (Inventions 2 and 3), the pusher plate may be made of metal 2192-9562-PF; and Chentf 7 200908163 (Invention 4). According to the above invention (Inventions 2 and 3), the metal pusher plate which can be manufactured at a low cost by the transparent 'pushing plate' itself is not provided by the above invention (Inventions 1 to 4), the tape and reel type packaging processing device ▲ According to the above invention, the second irradiation of the measuring unit irradiates the carrier tape. The terminal irradiated by the second illumination device can be clearly photographed by the pick-up, and the operator can view the contact state of the child while viewing the image captured by the photographing device. In the above invention (Invention 5), the above-mentioned invention (Invention 5), the surface of the above-mentioned advancement i#7?, «*/王y and the attached: (hereinafter referred to as "adsorption surface") is preferably black ( Invention 6) Since the carrier tape is light-transmitting, when the adsorption surface of the pusher plate is in the middle color; the back surface of the = is black, and the comparison of the external terminals is: 砚 See the external terminal of the TCP. More invigorating effect of the invention The tape-and-reel packaging processing device of the bearing can improve the productivity of the photographic device. The number of times of loading and closing of the M is reduced, and the embodiment of the present invention will be described in detail based on the drawings. Test ί = TC of the TCP processor using the split-state TCP processor of the present invention. Figure 2 is a schematic view of the TCP (the fourth) reverse, board pin, and camera of the same embodiment. The same ... the same type of performance can be used in the TCP processor, propulsion plate and carrier belt habitat 2l92'9562 ~ PF; 〇hentf 8 200908163 slightly plan. First of all
.P丨丨1w 月的具施型態的TCP處理器的丁CP 測試裝置的全體構造做言兒日月 ,,... Λ /則滅裝置1係由未圖示 的測试斋本體、電性連接 .目，丨n 1n 於測斌益本體的測試頭10、設於 測试頭10的上侧的TCP處理器2所構成。 TCP處理器2依序對.P丨丨1w month The overall structure of the D-CP test device with the TCP processor of the type of application is made, and... The Λ / 灭 灭 device 1 is a test body that is not shown, The electrical connection, 丨n 1n, is formed by the test head 10 of the test body and the TCP processor 2 provided on the upper side of the test head 10. TCP processor 2 in order
...,HI _ ^ 取瓦承載V 5上的複數個TCP 做測式，在本實施型態中， 為了况月的間單化，對一個TCP :T。但是，本發明並不限於此，可對承載帶5上排列 列^向及/或亚排方向上的複數個Tcp同時做試驗。而 且’本貫施型態中的承載帶R盔 戰τ5為具有光穿透性的元件，裝 置的種類係以C0F為例。 TCP處理器2具有捲屮接般91 & μ 、 梅出捲i 21與捲取捲盤22，測試前 的承載帶5係捲繞於捲出捲盤21 i。@ _ , 砸溫“上。承載帶5從捲出捲盤 21捲出，在測試後捲繞於捲取捲盤2 2上。 在捲出捲盤2i與捲取捲盤22之間設有三個間隔滾子 23a、23b、23c，從承载帶5剝離的保護帶51架設於其上。 各間隔滾子23a、23b、23c分別為上下可動而調整保護帶 51的張力。 在捲出捲盤21的下側，設有導件24a、捲出中繼滾子 25a、内側次鍊輪25b以及内側導引滾子25c，從捲出捲盤 21捲出的承載帶5由導件24a導引之同時，經過捲出中繼 滾子25a、内側次鍊輪25b以及内側導引滾子25c而搬運 至推進單元3。 在捲取捲盤22的下側，設有導件24b、捲取中繼滾子 2192-9562-PF；Chentf 200908163 25f、外側次鍊輪25e以及外側導引滾子25d，測試後的承 載帶5經過外侧導引滾子25d、外側次鍊輪25e以及捲取 中繼滾子25f ’由導件24b導引之同時捲繞於捲取捲盤22 上。 ’、、;、後’在内側導引滾子25c與外側導引滾子25d之間 設有推進單元3。 如第1圖所示，使滾珠螺桿32旋轉的伺服馬達”經 由支架361安裝在推進單元3的框架（推進框架⑽上，同 時滚珠螺桿32螺合的推進本體部33經由二根“由方向的 線形移動導件37而安裝於推進單元3的框架（推進框架）36 上。該推進本體部33藉由驅動飼服馬達31，由線形移動 導件37導引而可於上下方向(z軸方向)上移動。 ^該推進本體部33的下端部’設有連接於負塵源（圖 不痛略)而保持吸附承載帶5的吸附板34。 在推進本體部33的前段側（第左侧） 輪-，在推進本體部33的後段側（第ι圖中糊設= 鍊輪35b，藉由所希望的張 有主 所布望的張力而保持承载帶5。 抽在推進㈣36”面侧，設有未㈣的推進台。由卞 推進台可使推進單元3在χ 由该 因此，推進單元3的推進 ：方向或〜移動。 m ^ ^ 4 3 3由及附板3 4在伴拉 的狀態Τ，使推進單元3如上所述地移Π 匕，使承載帶5在χ輛方向、υ軸方向或ζ軸移動;藉 八載^上的TCP與探針81進行位置配合。 使 另 方面，如繁彳国rtd — 所示，在推進單元3的下側，捉 2192-9562-PF；Chentf 200908163 载探針卡8 針卡載台7 旋轉移動。..., HI _ ^ takes a plurality of TCPs on the V 5 to perform the measurement. In this embodiment, for the case of the month, for a TCP: T. However, the present invention is not limited thereto, and a plurality of Tcps arranged in the direction of the carrier tape 5 and/or in the sub-row direction may be simultaneously tested. Moreover, the carrier tape R helmet τ5 in the present embodiment is a light-transmitting element, and the type of the device is exemplified by C0F. The TCP processor 2 has a roll-up 91 & μ, a roll-out i 21 and a take-up reel 22, and the carrier tape 5 before the test is wound around the take-up reel 21 i. @ _ , 砸 "". The carrier tape 5 is unwound from the take-up reel 21 and is wound on the take-up reel 22 after the test. There is three between the take-up reel 2i and the take-up reel 22 The spacer rollers 23a, 23b, and 23c are stretched over the protective tape 51 which is peeled off from the carrier tape 5. Each of the spacer rollers 23a, 23b, and 23c is vertically movable to adjust the tension of the protective tape 51. On the lower side of the 21, a guide member 24a, a take-up relay roller 25a, an inner secondary sprocket 25b, and an inner guide roller 25c are provided, and the carrier tape 5 unwound from the take-up reel 21 is guided by the guide member 24a. At the same time, the push-up relay roller 25a, the inner secondary sprocket 25b, and the inner guide roller 25c are transported to the propulsion unit 3. On the lower side of the take-up reel 22, a guide 24b and a winding guide are provided. Following the roller 2192-9562-PF; the Chentf 200908163 25f, the outer secondary sprocket 25e and the outer guiding roller 25d, the tested carrier tape 5 passes through the outer guiding roller 25d, the outer secondary sprocket 25e, and the take-up relay. The roller 25f' is wound on the take-up reel 22 while being guided by the guide 24b. ',,; and 'after the inner guide roller 25c and the outer guide roller 25d The propulsion unit 3 is provided. As shown in Fig. 1, the servo motor that rotates the ball screw 32 is attached to the frame of the propulsion unit 3 via the bracket 361 (the propulsion frame (10), and the propulsion main body portion 33 to which the ball screw 32 is screwed is via The two "moving guides 37 of the direction are attached to the frame (propulsion frame) 36 of the propulsion unit 3. The propulsion body portion 33 is guided by the linear movement guide 37 by driving the feeding motor 31. The upper end portion of the propulsion main body portion 33 is provided with a suction plate 34 that is connected to a negative dust source (not shown) to hold the adsorption carrier tape 5. The main body portion 33 is propelled. The front side (left side) wheel - on the rear side of the propulsion body portion 33 (the paste in the Fig. 1 = sprocket 35b, the carrier belt 5 is held by the desired tension of the main member. On the side of the advancing (four) 36" side, there is a propeller stage that is not (four). The propulsion unit 3 can be moved by the propulsion unit 3, so that the propulsion unit 3 advances: direction or ~ moves. m ^ ^ 4 3 3 by and attached The plate 3 4 is in a state of being pulled, and the propulsion unit 3 is moved as described above. The carrier belt 5 is moved in the direction of the vehicle, the direction of the yaw axis or the axis of the yoke; the TCP on the eight carriers is used for positional cooperation with the probe 81. On the other hand, as shown in the rtd country rtd, in the propulsion unit 3 On the lower side, catch 2192-9562-PF; Chentf 200908163 on the probe card 8 pin card stage 7 rotates.
的探針卡載台7設置於測試頭1〇的上部。該探 使探針卡8於x#i_Y軸方向移動，以及、繞W 朱針卡8具備複數個探針8卜各探針81係 頭10而電性連接於測試器本體上。 ““式 置)6bT及？所不’第—攝影機6a、第二攝影機(攝影裝 (第丨圖中六影機6C分別設置於推進單元3的前段侧 後段侧（第中右側）。 早7的 以及進單元3與第三攝影機之間設有標記衝頭26a 及退件衝頭26b。標記衝頭他隸據測試的結果 接績該TCP的既定的位置上開設一個或複數個的孔，退件 衝頭26b係將測試結果判斷為不良品@ τ(：ρ打孔。 _ 攝〜機6a、6b、6c將由該等攝影機所拍攝的影像顯 不於顯不器（未圓示）上，使操作員可目視。 ^第—攝影機6a為預先檢測出供給至推進單元3的承載 ^上的TCP的裴置。第二攝影機為觀看TCP及探針 81 :位置關係而取得兩者的位置偏差資訊。第三攝影機k 係檢測在承載帶5上的標記衝頭—或退件衝頭所製 造出的孔的位置及數量。 如第3圖所示，在本實施型態的承載帶5上，在每個 CP51上e又置對準標記52，第二攝影機對該對準標記 52攝影而做影像辨識，以該對準標記52為基準而指定 TCP51的位置。雖然本實施型態中的對準標記52為「+ 2192-9562-PF;Chentf 11 200908163 形狀，但並不限於此，可以是例如矩形。 如第 2圖及笛 中，埋m 圖所示，在本實施型態的推進板34 中埋叹有對推進板34 -照明裝置91。證—附保持的承載π 5進订照明的第 吸附保持的承載册5知明裝置91係設在對應於推進板34 承载帀5的對準標記52的位置上。 如上所述，抬治 進板34相對於推進本體部33可拙知 對每種TCP都準備。@ < 了拆卸， w q ，3又於各推進板34的第—照明穿 置91的位置視每種推進板34而不同。 裝 於此，當第—照明裝置91埋設於推谁柘4 照明裝置91用^, 埋。又於推進板34時，第一 、（開口部）形成於推進板34的吸·而 位於該開口部上 寸面。 5上開孔。M 時，在承載帶 角，第-照”置9 52的大小一般大約是“〜1_ 4置91僅照射對準標 於推進板34的，…偏52的情况下，形成 52 ί 、、、衣 的孔（開口部）係對應於對準桿 2的大小而為相當小的標記。因此，希撼卜、+. 當承載帶5推屋於探針81 Μ 匕根據上逑的構造’ 上開孔的危險抑制到最小限度、。了心針81在承载帶5 第—照明裝置91係使用例如發 定光源及延伸至推 “-極體(LED)及與既 組合等。 的吸附面的光纖等的導光路的 在本實施型態中，由於推進 進板34的材料可 £ 4本身不必是透明，推 竹丁寸J私用紹、鈦等的 推進…製造成本。而且，= 可抑制降低 好是黑色。 進板34的至少吸附面最 2192-9562-PF；chentf 200908163 过第照、明裝置91照射承载帶5時 置91的光線穿透且光 ’，、、月4 52的护狀4 $ 5’映照出對準標記 ?二:此，第—照明裝置91作為背光光源時，在 承載…不會產生光晕。因此’即使承载帶5暫時性地 從推進板34浮起，第—摄玛嬉才f地 影像辨識。 弟—攝如機此仍可對對準標記52進行 在TCP處理器2的實際動作令，第二攝 試議的對準標記52做攝影而進行影 ：被而 λλ 灯知像辨識，而取得該 對丰如§己52的位置資訊。Tcp處 52的位置眘十 益2係根據該對準標記 =移資訊，由推進台使推進單元…軸方：二 置ΙΓ方向移動，進行被測試咖與探㈣的位 根據具備上述照明裝置91設 TCP處理器，起因於第 、/、的推進板34的 ⑽第一攝衫機6b的影像辨 頻率變少，可提升測試的產能。 I的h止 於此，本實施型態的Tcp處理器2， 在第二攝影機6b的附近且備笼H 圖所不， π m迩具備苐二照明裝置 明裝置92係照射承載帶5及探針8ι。 以弟一π 上述的TCP51與探針81的位置配 〇 ^ ^ , , 口雖然在TCP處理5§ 2的貫際動作中進行，變更成為試驗對 在TCP處理器2的實際動作 、 的種類時， 们不動作之月”作為預先 進行TCP51與探針81的位置配合， 疋而 業。 σ並進仃登錄其設定的作 2192-9562-PF;Chentf 13 200908163 在該初期設定時，操作員一邊在顯示器觀看第二攝％ 機⑽所拍攝的影像，4認πρ51的測試塾是否與探針^ 接觸。此時，雖然由上述第二照明裝置92照射承载帶5及 探針81j而觀看TCP51的測試墊及探針81，但由於承載帶 5為光牙透性’當推進板34的吸附面為黑色時，承载帶5 的背面成為黑色’ TCP51的測試塾的對比變大，更容 到測試墊’藉此，操作員可容易地確認接觸的狀態。 而且’由於本實施型態的TCP處理器2具備第—照明 裝置91及第二照明裝置92’可適當地切換。例如， :CP處理器2的實際動作中，在第_照明裝置91為_而 第一照明裝置92為0N的狀態下，第二攝影機此無法對對 準標記52做影像辨識的情況下’也可使第二照明裝置μ | ^ n照明裝置91為⑽。如此，在Tcp處理器2 的實際動作中’可由第二照明裝置92照射探㈣，由°第 二攝影機6b對探針81進行攝影而取得其位置資訊，因此 TCP51與探針81的位置配合可更正確地進行。 以上說明的實施型態係為了使本發明容易理解而記 載，但並非用於限定本發明。因&，上述實施型態所揭露 的各要素係包含本發明所屬技術範圍全體的設計變 等物。 、例如，在上述實施型態中，雖然各Tcp的對準標記^ 為1個’但2個以上亦可，此日年，筮 073 , J此呀苐—照明裝置91係對鹿 於對準標記52的位置而定數 u 、 又，第一照明裝置91 也可以由與一個光源分歧的導光路徑所構成。 14 2192-956.2'PF；Chentf 200908163 在上述m施型態中，第一照明裝置91雖然照射各 T^的對準標1己52，但並不限於此’例如照射TCP的特定 則式墊及封裝的角部等，根據其位置資訊而確認的位 置偏差資訊。 產業利用的可能性 本1明白勺TCP處理裝置提升測t式的產能，巾有效地進 行TCP測試。 【圖式簡單說明】 第1圖為使用本發明的一實施型態的TCp處理器的Tcp 測試裝置的正視圖。 第2圖為相同的實施型態的TCP處理器中，推進板、 探針卡以及攝影機的概略側視圖。 第3圖為相同的實施型態的TCP處理器中，推進板及 承載帶的概略平面圖。 【主要元件符號說明】 1〜TCP測試裝置； 21〜捲出捲盤； 22〜捲取捲盤； 23a、23b、23c〜間隔 24a〜導件； 24b〜導件； 25a〜捲出中繼滾子； 25b〜内側次鍊輪； 2 5 c〜内側導引滾子； 25d〜外側導引滾子； 2 5 e〜外側次鍊輪； 25f〜捲取中繼滾子； 2192-9562-PF/Chentf 15 200908163 26a〜標記衝頭； 26b〜退件衝頭； 3〜推進單元； 31〜伺服馬達； 3 2〜滾珠螺桿； 33〜推進本體部； 3 4〜推進板； 35a〜張力鍊輪； 3 5 b〜主鍊輪； 36〜框架（推進框架） 3 7〜線形移動導件； 361〜支架； 5〜承載帶； 51 〜TCP; 52〜對準標記； 6a、6b、6c〜攝影機 6 2〜反射鏡； 6 3〜框架； 8〜探針卡（測定部）； 81〜探針（連接端子） 91、92〜照明裝置； 1 0〜測試頭； 6 1〜攝影機本體（本體部）； 2〜TCP處理器（TCP處理裝置）； 64、65、66〜馬達（旋轉裝置）。 2192-9562-PF;Chentf 16The probe card stage 7 is disposed on the upper portion of the test head 1〇. The probe card 8 is moved in the x#i_Y axis direction, and the W-pin card 8 is provided with a plurality of probes 8 and a probe 81 system 10 to be electrically connected to the tester body. ““式式”6bT and? The camera 6a and the second camera (the camera 6C are respectively disposed on the front side of the front side of the propulsion unit 3 (the middle right side). The 7th and the 3rd and 3rd Between the cameras, there are a marking punch 26a and a retreating punch 26b. The marking punch is based on the result of the test and the opening of one or more holes is established at the predetermined position of the TCP, and the retracting punch 26b is tested. As a result, it is judged as defective product @ τ(:ρ punching. _ Photographing machine 6a, 6b, 6c will display the image captured by these cameras on the display device (not shown), so that the operator can visually. ^ The first camera 6a is a device that detects the TCP supplied to the carrier of the propulsion unit 3 in advance. The second camera acquires the positional deviation information of both the TCP and the probe 81: the positional relationship. The third camera k Detecting the position and number of holes made by the marking punch on the carrier tape 5 or the ejection punch. As shown in Fig. 3, on the carrier tape 5 of the present embodiment, on each CP51 The alignment mark 52 is further disposed, and the second camera photographs the alignment mark 52 for image recognition. The position of the TCP 51 is specified based on the alignment mark 52. Although the alignment mark 52 in the present embodiment has a shape of "+ 2192-9562-PF; Chent 11 200908163, it is not limited thereto and may be, for example, a rectangle. As shown in Fig. 2 and the flute, as shown in the buried m diagram, in the propulsion plate 34 of the present embodiment, the first adsorption of the propulsion plate 34 - the illumination device 91 is sighed. The held carrier 5 device 9 is disposed at a position corresponding to the alignment mark 52 of the pusher plate 34 carrying the cassette 5. As described above, the elevation plate 34 can be known for each TCP with respect to the propulsion body portion 33. All are prepared. @ < The disassembly, wq, 3 is different from the position of the first illumination plate 91 of each of the pusher plates 34 depending on each of the pusher plates 34. Here, when the first illumination device 91 is embedded in the pusher柘4 The illuminating device 91 is buried by the illuminating device 91. When the plate 34 is pushed, the first (opening) is formed in the suction plate 34 and is located on the opening. The opening is made in the opening. The bearing belt angle, the size of the first photographing "92" is generally about "~1_4 set 91, only the illumination alignment is marked on the propulsion plate 34. In the case of the partial 52, the hole (opening) of the 52 ί, , , clothing is formed to correspond to the size of the alignment rod 2 and is relatively small. Therefore, the Greek, +. Pushing the house on the probe 81 Μ 匕 according to the structure of the upper cymbal 'the risk of the upper opening is suppressed to a minimum. The stylus 81 is on the carrier belt 5 - the illuminating device 91 uses, for example, a light source and extends to push "- In the present embodiment, the light guide path of the optical fiber or the like of the adsorption surface of the polar body (LED) or the like is combined. Since the material of the advancement plate 34 is not necessarily transparent, it is not used for private use. The promotion of Shao, titanium, etc....the manufacturing cost. Moreover, = can suppress the reduction, it is black. The at least adsorption surface of the inlet plate 34 is at most 2192-9562-PF; the chentf 200908163 passes through the first illumination, and the illumination device 91 illuminates the carrier tape 5 when the light is penetrated 91 and the light 4, 5, 4 4 5' 5' The alignment mark is reflected. Secondly, when the first illumination device 91 is used as a backlight source, no halo is generated on the bearing. Therefore, even if the carrier tape 5 temporarily floats from the pusher plate 34, the first image is recognized. The camera can still perform the actual operation command of the TCP processor 2 on the alignment mark 52, and the alignment mark 52 of the second photo session is photographed and imaged: the image is recognized by the λλ lamp. The location information of the pair is as good as § 52. According to the alignment mark=shift information, the position of the Tcp 52 is moved by the propulsion stage, the axis is moved in the direction of the two sides, and the position of the tested coffee and the probe (4) is performed according to the illumination device 91. With the TCP processor, the image recognition frequency of the (10) first camera 6b due to the (10) pusher board 34 of the first and/or is reduced, and the productivity of the test can be improved. In this case, the Tcp processor 2 of the present embodiment is in the vicinity of the second camera 6b and is not provided in the cage H, and the π m迩 is provided with the illuminating device 92 and the illuminating carrier 5 and the probe. Needle 8ι. In the case where the TCP 51 and the probe 81 are arranged in the same manner as the above, the port is changed in the TCP operation 5 § 2, and the change is made to the type of the actual operation of the TCP processor 2. "We do not move the month" as the position of the TCP51 and the probe 81 in advance, and 疋 疋 仃 仃 仃 219 219 219 219 219 219 219 219 219 219 219 219 219 219 219 219 219 219 219 219 219 219 219 219 219 219 219 219 219 219 219 219 219 219 219 219 219 219 219 The display views the image taken by the second camera (10), and the test 塾 of the πρ51 is in contact with the probe ^. At this time, the test of the TCP 51 is observed by the second illumination device 92 illuminating the carrier tape 5 and the probe 81j. Pad and probe 81, but since the carrier tape 5 is optically opaque, when the suction surface of the pusher plate 34 is black, the back side of the carrier tape 5 becomes black. The comparison of the test pieces of the TCP51 becomes larger, and the test pad is more accommodated. In this way, the operator can easily confirm the state of the contact. Further, the TCP processor 2 of the present embodiment can be appropriately switched by providing the first illumination device 91 and the second illumination device 92'. For example, the CP processor In the actual action of 2, in the first _ When the illuminating device 91 is _ and the first illuminating device 92 is at 0N, and the second camera cannot perform image recognition on the aligning mark 52, the second illuminating device μ can also be made (10) Thus, in the actual operation of the Tcp processor 2, the second illumination device 92 can be used to illuminate the probe (4), and the second camera 6b can image the probe 81 to obtain the position information thereof. Therefore, the position of the TCP 51 and the probe 81 is matched. The above-described embodiments are described in order to facilitate the understanding of the present invention, but are not intended to limit the present invention. The elements disclosed in the above embodiments include the technical scope of the present invention. For example, in the above embodiment, the alignment mark ^ of each Tcp is one 'but two or more, but this day, 筮 073, J 苐 苐 - lighting device 91 is a number u for the position of the deer at the alignment mark 52. Further, the first illumination device 91 may be constituted by a light guiding path that is different from one light source. 14 2192-956.2 'PF; Chent 200908163 in the above m Type, first illumination Although the device 91 illuminates the alignment target 1 of each T^, it is not limited to the positional deviation information confirmed by the position information, such as the specific pad of the TCP and the corner of the package. Possibility 1 The clear TCP processing device enhances the productivity of the t-type, and the towel performs the TCP test effectively. [Simplified Schematic] FIG. 1 is a Tcp test device using the TCp processor of an embodiment of the present invention. Front view. Fig. 2 is a schematic side view of a pusher plate, a probe card, and a camera in a TCP processor of the same embodiment. Fig. 3 is a schematic plan view of the pusher plate and the carrier tape in the TCP processor of the same embodiment. [Main component symbol description] 1~TCP test device; 21~roll-out reel; 22~ reel reel; 23a, 23b, 23c~ interval 24a~ guide; 24b~ guide; 25a~ roll-out relay roll 25b~ inner secondary sprocket; 2 5 c~ inner guide roller; 25d~ outer guide roller; 2 5 e~ outer secondary sprocket; 25f~ take-up relay roller; 2192-9562-PF /Chentf 15 200908163 26a~mark punch; 26b~return punch; 3~propulsion unit; 31~servo motor; 3 2~ball screw; 33~propulsion body; 3 4~propulsion plate; 35a~ tension sprocket ; 3 5 b ~ main sprocket; 36 ~ frame (propulsion frame) 3 7 ~ linear moving guide; 361 ~ bracket; 5 ~ carrying belt; 51 ~ TCP; 52 ~ alignment mark; 6a, 6b, 6c ~ camera 6 2 to mirror; 6 3 to frame; 8 to probe card (measurement unit); 81 to probe (connection terminal) 91, 92 to illumination device; 1 0 to test head; 6 1 to camera body (body portion) 2~TCP processor (TCP processing device); 64, 65, 66~ motor (rotating device). 2192-9562-PF; Chentf 16