JP3778116B2 - Handler for TCP - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a TCP handler that sequentially connects each semiconductor chip in a TCP (tape carrier package), a plurality of which are connected in a tape shape, to a probe card of a semiconductor integrated circuit test apparatus.
[0002]
[Prior art]
As is well known, TCP is a tape in which an IC chip is mounted on a film by using a TAB (tape automated bonding) technique, and a plurality of tapes are connected in the transport stage before actually being mounted on a printed circuit board. It has a form. Such a tape-shaped TCP (hereinafter referred to as a TCP tape) uses a strip-shaped film tape (film carrier tape) having a predetermined width as a base material, and a number of TCPs are connected by performing various processes on the film carrier tape. In addition, a belt-shaped transfer auxiliary portion having sprocket holes formed at predetermined intervals is provided on both sides of the TCP. Such a TCP tape is intermittently transferred in the longitudinal direction when the sprocket of the TCP autohandler meshes with the sprocket hole, and in a stopped state, the semiconductor chip in the TCP is press-contacted to the probe card of the semiconductor integrated circuit testing device. Then, an operation test of TCP is performed.
[0003]
[Problems to be solved by the invention]
By the way, depending on the manufacturing process of the semiconductor integrated circuit, the quality of the TCP on the TCP tape may be determined in the pre-process of each TCP operation test by the TCP auto handler and the semiconductor integrated circuit test apparatus. This pass / fail judgment is, for example, inspecting the quality of the appearance of the TCP. For example, a mark is written on the defective TCP by using a magic pen or the like in order to distinguish the good TCP from the defective TCP. Since this mark is manually written in each TCP, it is of course an irregularly shaped mark (standard mark).
[0004]
The conventional TCP auto handler does not perform the operation in consideration of the mark, so that the TCP test efficiency is lowered. That is, since all TCPs including defective TCPs that do not require an operation test together with non-defective TCPs are connected to the probe card and the operation test is performed, the test efficiency of TCP is improved because the operation test is also performed on defective TCPs. descend.
[0005]
The present invention has been made in view of the above-described problems, and an object of the present invention is to improve the test efficiency of TCP by selecting only the TCP that really needs to be tested and using it.
[0006]
[Means for Solving the Problems]
In order to achieve the above object, according to the present invention, as a first means, a TCP tape in which a plurality of TCPs are arranged in a tape shape is sequentially intermittently run in the longitudinal direction, and the running route is set while the TCP tape is stopped. A TCP handler that sequentially connects each TCP to a probe card connected to a semiconductor integrated circuit test apparatus by moving a measuring unit provided in the middle in a direction perpendicular to the surface of the TCP tape, and is attached to the TCP. A mark recognizing means for recognizing the presence of an indeterminate mark indicating that the test is unnecessary, and a control means for moving the measuring unit and connecting the TCP to the probe card only when the unrecognized mark is not recognized by the mark recognizing means. The structure which comprises is adopted.
[0007]
Further, as a second means, in the first means, the mark recognition means is based on a camera that captures an image of an indeterminate mark provision area preset in TCP and an image signal output from the camera. A configuration is adopted in which a pixel corresponding to the portion of the irregular mark is discriminated and a determination unit that determines the presence of the irregular mark when the number of pixels exceeds a predetermined pixel number determination threshold value is adopted. .
[0008]
As a third means, in the first means, the mark recognizing means includes a camera that captures an image of an indeterminate mark giving area preset in TCP, and an image of the indeterminate mark giving area from a plurality of pixels. The pixel set area is divided into a plurality of pixel set areas, and it is determined whether or not the number of pixels corresponding to the portion of the indeterminate mark is greater than a predetermined matching determination threshold for each pixel set area. If the number exceeds the predetermined number, the presence of the irregular mark is determined. If the pixel set area determined to be large does not exceed the predetermined number, the number of pixels corresponding to the irregular mark portion is determined as the number of pixels. A configuration is adopted in which a determination unit that determines the presence of an irregular mark by determining whether or not the threshold value is exceeded is adopted.
[0009]
As a fourth means, in the second or third means, the camera is disposed upstream of the measurement section corresponding to a specific number of TCPs in the TCP tape travel route, and the control means is not determined by the determination section. A configuration is adopted in which the movement of the measurement unit is controlled based on the recognition result of the fixed mark and the specific number.
[0010]
As a fifth means, a configuration in which the operation panel for inputting a specific number to the control means is further provided in the fourth means.
[0011]
As a sixth means, in any one of the second to fifth means, the camera captures an image of the indefinite mark providing area of each TCP by illumination light of a light source box arranged opposite to the TCP tape. Adopt the configuration.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment of a TCP handler according to the present invention will be described with reference to the drawings.
[0013]
FIG. 1 is a configuration diagram of a main part of a TCP handler according to the present embodiment. In this figure, symbol A is a TCP tape, 1 is a supply reel, 2 is a receiving reel, 3A and 3B are sprockets, 4 is a measuring unit, 5 is a probe card, 6 is a CCD camera (mark recognition means), and 7 is a light source box. , 8 is an image processing unit (mark recognition means, determination unit), 9 is a control unit (control means), 10 is an operation panel, and T is an IC tester (semiconductor integrated circuit test apparatus).
[0014]
As shown in FIG. 2, the TCP tape A is formed by connecting a plurality of TCPa1 and forming sprocket holes a2 in a row on both sides. Each TCPa1 is provided with a semiconductor chip a3 in the center and a plurality of test pads a4 connected to each connection pad on the semiconductor chip a3 via a lead pattern. In addition, in the empty portion of each TCPa1, an area (indeterminate type mark provision area R) in which an indefinite mark M for identifying a non-defective product and a defective product in the appearance inspection in the previous process is entered is set in advance.
[0015]
As shown in FIG. 3, the irregular mark M is an irregular mark that is entered on the TCPa1 by a worker using a magic pen or the like and does not have a fixed shape. In the following description, it is assumed that the indefinite mark M is written only in the defective product in the previous process. That is, the TCPa1 in which the indefinite mark M is entered is determined to be defective in the appearance inspection, and does not require an operation test by the IC tester T.
[0016]
The supply reel 1 is obtained by wrapping the TCP tape X in multiple turns, and sequentially sends out the TCP tape A as the sprockets 3A and 3B rotate. The accommodation reel 2 winds the TCP tape A sent out from the supply reel 1. The sprockets 3 </ b> A and 3 </ b> B are provided on both sides of the measurement unit 4 and are intermittently driven to rotate under the control of the control unit 9. Each of the sprockets 3A, 3B sequentially and intermittently feeds the TCP tape A to the receiving reel 2 side by engaging the protrusion formed on the peripheral surface with the sprocket hole a2.
[0017]
The measuring unit 4 contacts and connects each TCPa1 (more precisely, the test pad a4 of TCPa1) to the probe card 5 by pressing the TCP tape A from above when the TCP tape A stops. The probe card 5 is provided with measurement pins according to the arrangement of the test pad a4, and is electrically connected to an IC tester T provided separately from the TCP handler.
[0018]
The CCD camera 6 is provided upstream from the measuring unit 4 by a specific number n of TCPa1 in the travel path of the TCP tape A, and captures images (TCP images) of the TCPa1 that sequentially pass with the travel of the TCP tape A. Then, the TCP image is output to the image processing unit 8 as an image signal. The light source box 7 is disposed to face the CCD camera 6 with the TCP tape A interposed therebetween, and the CCD camera 6 irradiates the TCP tape A with illumination light for capturing a TCP image.
[0019]
The image processing unit 8 recognizes the presence of the irregular mark M by performing image processing on the TCP image, and outputs a detection signal to the control unit 9 only when the presence of the irregular mark M is recognized. The operation panel 10 is used to input various operation information necessary for the operation of the TCP handler to the control unit 9. For example, the number of TCPa 1 existing between the CCD camera 6 and the probe card 5 (that is, the specific number described above). n). The specific number n is different for each type of TCP tape A because the size of TCPa1 varies depending on the type of TCP tape A.
[0020]
The control unit 9 controls the contact connection operation of each TCPa1 to the probe card 5 according to the input / non-input of the detection signal and the specific number n. That is, the control unit 9 operates the measurement unit 4 for TCPa1 in which the indeterminate type mark M is not written and contacts and connects to the probe card 5, but for the TCPa1 in which the indefinite type mark M is entered, the measurement unit 4 The measurement unit 4 is allowed to pass through without being operated.
[0021]
Next, the detailed operation of the TCP handler will be described with reference to FIGS.
[0022]
The image processing unit 8 does not output a detection signal to the control unit 9 when it does not recognize the presence of the irregular mark M in the TCP image acquired by the CCD camera 6. In this case, the control unit 9 causes the TCP tape A to run intermittently by intermittently synchronously rotating the sprockets 3A and 3B. That is, each TCPa1 connected on the TCP tape A sequentially stops immediately below the measuring unit 4 (that is, directly above the probe card 5) in synchronization with the intermittent running of the TCP tape A.
[0023]
Then, the control unit 9 contacts and connects each test pad a4 of TCPa1 to the probe card 5 by operating the measuring unit 4 in the stopped state. That is, the control unit 9 determines at what timing TCPa1 corresponding to the TCP image reaches directly below the measurement unit 4 (that is, directly above the probe card 5) based on the specific number n input in advance from the operation panel 10. And the measurement unit 4 is activated for the TCPa1.
[0024]
On the other hand, the image processing unit 8 outputs a detection signal to the control unit 9 when the presence of the irregular mark M is recognized in the TCP image acquired by the CCD camera 6. In this case, the control unit 9 determines at what timing the TCPa1 corresponding to the TCP image arrives directly below the measuring unit 4 based on the specific number n, and the measuring unit 4 is not operated for the TCPa1. In addition, the measurement unit 4 is allowed to pass through without being paused immediately below the measurement unit 4.
[0025]
As described above, the handler for TCP operates the measuring unit 4 only for TCPa1 in which the indefinite type mark M is written to contact and connect each test pad a4 to the probe card 5. Hereinafter, the indefinite type in the image processing unit 8 will be described. The recognition operation of the mark M will be described in detail.
[0026]
The CCD camera 6 acquires the entire image of TCPa1 as shown in FIG. 2 for each TCPa1 as a TCP image, and the image processing unit 8 uses an indefinite mark provision region R designated in advance from such a TCP image. And the following image processing is performed on the irregular mark imparting region R.
[0027]
That is, the image processing unit 8 determines the irregular mark provision region R based on the luminance difference between the pixel g corresponding to the part of the irregular mark M and the pixel g not corresponding to the part of the irregular mark M in the irregular mark provision region R. Each pixel g is binarized. For example, when the irregular mark M is black, the pixel g corresponding to the portion of the irregular mark M is binarized to “1”, and the pixel g not corresponding to the portion of the irregular mark M is binarized to “0”. The hatched pixel g is a pixel g corresponding to the part of the irregular mark M, that is, a pixel g determined as “1” by the binarization process.
[0028]
Then, the image processing unit 8 divides the image of the indeterminate mark giving region R into a pixel set region m1 composed of a total of nine (3 × 3) pixels g as shown in FIG. 3, and for each pixel set region m1 It is evaluated whether or not the number of pixels g corresponding to the part of the irregular mark M is larger than a predetermined matching determination threshold value (matching determination process).
[0029]
For example, when the matching determination threshold value is set to “two”, the image processing unit 8 performs “1” by the above binarization processing on the pixel set region m1 shown in the lower right in FIG. The pixel g is determined to be a pixel set area m1 corresponding to the part of the indeterminate mark M, but the pixel set area m1 shown enlarged in the lower left is binarized. Since there is only “one” pixel g determined as “1” by the processing, it is not determined as the pixel collection region m1 corresponding to the part of the indeterminate mark M. A pixel collection area m1 shown in an enlarged manner in the lower left is a pixel collection area m1 corresponding to, for example, reflection of foreign matter or external light.
[0030]
By performing such a matching determination process, it is possible to prevent erroneous determination of the pixel set area m1 corresponding to the foreign matter or the like as the pixel set area m1 corresponding to the part of the indeterminate mark M. Since the film that is the base material of TCPa1 (that is, TCP tape A) is often brownish brown, the brightness contrast between the image part corresponding to the part of the irregular mark M and the image part not corresponding to the part of the irregular mark M Is not so big. In addition, there is a concern that the detection accuracy of the pixel collection area m1 corresponding to the part of the irregular mark M may be lowered due to disturbance elements such as the foreign matter and reflection of external light.
[0031]
From such a background, in the present embodiment, in order to more accurately detect the pixel set region m1 corresponding to the part of the irregular mark M, matching determination processing is performed as preprocessing of the pixel number determination processing described later. . In FIG. 3, each pixel aggregate region m1 is divided so as to be composed of nine pixels g. However, the number of pixels constituting the pixel aggregate region m1 is not limited to nine.
[0032]
As a result of the matching determination process, the image processing unit 8 sets “1” by the binarization process when the number of pixel aggregate areas m1 corresponding to the part of the irregular mark M exceeds a predetermined number. When a large number of determined pixels g are detected, the presence of the irregular mark M in the irregular mark imparting region R is recognized without performing the next pixel number determination process.
[0033]
On the other hand, the image processing unit 8 determines that if the number of pixel aggregate areas m1 corresponding to the part of the irregular mark M does not exceed a predetermined number as a result of the matching determination process, the irregular mark It is evaluated whether or not the number of pixels g corresponding to the part M exceeds the pixel number determination threshold value. That is, the image processing unit 8 calculates the number of pixels g determined to be “1” by the binarization process for all the pixels g constituting the irregular mark provision region R, and this number is the threshold for determining the number of pixels. Only when the value is exceeded, the existence of the irregular mark M in the irregular mark imparting region R is recognized.
[0034]
According to the present embodiment, the TCPa1 to which the irregular mark M is given, that is, the TCPa1 judged to be defective in the previous process is not subjected to an operation test, and the non-standard mark M is given to the non-defective product in the previous process. Since only the determined TCPa1 is tested for operation, the TCP test efficiency can be improved. In this embodiment, since the presence of the irregular mark M is determined by a two-stage process including a matching determination process and a pixel number determination process, the presence of the irregular mark M can be determined more accurately.
[0035]
The present invention is not limited to the above embodiment, and the presence of the indeterminate mark M may be determined based only on the pixel number determination process. In this case, since the processing in the image processing unit 8 is simplified, the cost of the image processing unit 8 can be reduced.
[0036]
【The invention's effect】
As described above, according to the present invention, a TCP tape in which a plurality of TCPs are arranged in a tape shape is intermittently run in the longitudinal direction, and the measurement provided in the middle of the running path in a state where the TCP tape is stopped. This is a TCP handler that sequentially connects each TCP to a probe card connected to a semiconductor integrated circuit test apparatus by moving the part in a direction perpendicular to the surface of the TCP tape, and eliminates the need for a test applied to the TCP. Since the mark recognition means for recognizing the presence of the irregular mark shown, and the control means for moving the measurement unit and connecting the TCP to the probe card only when the irregular mark is not recognized by the mark recognition means, In other words, when an irregular mark is recognized, TCP is passed through without being connected to the probe card. It is possible to improve the test efficiency CP.
[Brief description of the drawings]
FIG. 1 is a configuration diagram of a main part of a handler for TCP according to an embodiment of the present invention.
FIG. 2 is a plan view of a TCP tape A according to an embodiment of the present invention.
FIG. 3 is an explanatory diagram showing detection processing for an irregular mark M according to an embodiment of the present invention.
[Explanation of symbols]
T …… IC tester (semiconductor integrated circuit test equipment)
DESCRIPTION OF SYMBOLS 1 ... Supply reel 2 ... Accommodating reel 3A, 3B ... Sprocket 4 ... Measuring part 5 ... Probe card 6 ... CCD camera (mark recognition means)
7. Light source box 8. Image processing unit (mark recognition means, determination unit)
9 …… Control unit (control means)
A ... TCP tape a1 ... TCP
a2... sprocket hole a3... semiconductor chip a4... test pad M... irregular mark R.

Claims (6)

A TCP tape (A) in which a plurality of TCP (a1) tapes are continuously run in the longitudinal direction sequentially, and a measuring unit (4) provided in the middle of the travel path in a state where the TCP tape (A) is stopped. ) Is moved in a direction perpendicular to the surface of the TCP tape (A), whereby each TCP (a1) is sequentially connected to the probe card (5) connected to the semiconductor integrated circuit testing apparatus (T). And
Mark recognition means (6, 8) for recognizing the presence of an irregular mark (M) indicating that the test given to TCP (a1) is unnecessary;
Control means (9) for moving the measuring part (4) and connecting the TCP (a1) to the probe card (5) only when the irregular mark (M) is not recognized by the mark recognition means (6, 8). A TCP handler characterized by comprising: The mark recognition means (6, 8)
A camera (6) for taking an image of an indeterminate mark giving region (R) set in advance in TCP (a1);
Based on the image signal output from the camera (6), a pixel corresponding to the part of the irregular mark (M) is determined, and when the number of pixels exceeds a predetermined pixel number determination threshold value, the irregular type is determined. 2. The TCP handler according to claim 1, further comprising a determination unit (8) for determining the presence of the mark (M). The mark recognition means (6, 8)
A camera (6) that captures an image (R) of an indeterminate mark giving area set in advance in TCP (a1);
The image of the indeterminate mark giving region (R) is divided into a pixel set region (m1) composed of a plurality of pixels (g), and pixels corresponding to the portions of the indeterminate type mark (M) in each pixel set region (m1) ( g) It is determined whether or not the number of pixels is greater than a predetermined matching determination threshold value. If the pixel collection area (m1) determined to be larger than the predetermined number exceeds the predetermined number, the presence of the irregular mark (M) is determined. If the pixel set area (m1) determined to be large does not exceed the predetermined number, the number of pixels (g) corresponding to the part of the irregular mark (M) exceeds the pixel number determination threshold value. The TCP handler according to claim 1, further comprising a determination unit (8) for determining whether or not the irregular mark (M) exists by determining whether or not. The camera (6) is arranged upstream from the measuring unit (4) corresponding to the specific number of TCP (a1) in the traveling path of the TCP tape (A).
The control means (9) controls the movement of the measurement unit (4) based on the recognition result of the irregular mark (M) by the determination unit (8) and the specific number. The TCP handler described. The TCP handler according to claim 4, further comprising an operation panel (10) for inputting a specific number to the control means. The camera (6) is characterized in that it captures an image of the indeterminate mark imparting region (R) of each TCP (a1) with illumination light of the light source box (7) arranged to face each other with the TCP tape (A) interposed therebetween. The TCP handler according to claim 2.

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