200902423 九、發明說明： 【發明所屬之技術領域】 本發明係關於用以測試iC元件之一種的Tcp(Tape Carrier package)t c〇F(Chip 〇n FUm)(以下將由 Tcp、 COF、及TAB(Tape Aut⑽ated Bonding)封裝技術所封裝的 π件統稱之為「TCP」），所使用之捲帶式封裝管控裝置。 【先前技術】 …在IG元件等的電子元件製造過程中，必須使用用以測 試最終製造出的電子元件或其中間階段的元件等的性能或 功能的測試之電子元件測試裝置’在Tcp的情況 TCP用的測試裝置。 ’、 TCP測試裝置一般係由下列構成：測試本體、測試頭、 及捲帶式料管控裝置（以下亦簡稱為捲帶式封裝處理 為）。s亥捲帶式封裝處理器’能夠運送在捲帶(亦包 以下亦同）上形成複數Tcp的搬運帶，將搬運帶壓 到電氣連接於測試頭的探針卡的探針，使似的輸出輸入 k子和振針電氣連接，並依序執行複數Tcp的料。 =是’為了❹似測試裝置以效率良好並正確 仃測试，必須要使TCP的測試墊和探 相接觸。 Η㈣卡的各探針確實地 者就這點而言，在使用捲帶式封震處理器的情 :際使其動作以執行測試之前，事先對 進行初期設定，並執行將該 '封破處理益 疋予以登錄的操作，以使得 2192-9453-PF；Ahddub 5 200902423 TCP的測試塾和摄斜士 木对卡的各探針能夠確實地相接觸。 "捲π式封裝處理器的初期S $，例如為後述般執 將TCP椒運到測試位置，將被搬運㈤TCp維持在推 气 ：私動推進早凡直到可以由攝影機清楚地辨 識1 1C P的面度，u旦〃丨 乂攝衫機拍攝TCP的測試墊，將其影像 示於顯示器。操作g顴4 Μ 1豕頌 乍貝硯看顯示器，以目視方式掌握Tcp °轉角，、·1之’為了以攝影機清楚地辨識探針卡的探針'， :、單-私動直到無法由攝影機清楚地辨識⑽的声 之後’以攝影機拍攝禊 ^ 示器。操作員一邊勘丟翻_ „。 …貝 遠戒看顯不益，一邊手動操作使探針 口回轉’调整對於ΤΓΡ Γ*7 & 、CP回轉角度之探針卡的回轉角度。繼 之，移動推進單元吉$丨丨研·、，丄 夏至彳了以由攝影機清楚地辨識TCp 針的高度。操作員一 @ 4 貝邊硯看顯示器，一邊手動操作以將接 針卡平台在X軸方而e/+ v + ^ 及/或Y軸方向移動，以確認TCp的 有測試墊都能夠和尨#上a i ^ 才木針卡的探針接觸。將如此設定之位 登錄為初期設定。 【發明内容】 發明欲解決的問題 π彳攝k針卡的探針之攝影機，因為捲帶式 處理器内的空間問題，而 < 里> j 衣 ^ 而s又置在探針卡的下方。但是， 為探針係位於探針卡 u 方（搬運帶側），和TCP測試墊挺 觸之探針的尖端部係設置為 直马和抵C運π相對，所以當攝影 配置於探針卡的下侧時，吋&、+ 聛”機 J夺就無法拍攝探針的尖端部。 2192-9453-PF/Ahddub 6 200902423 因此，無法確實掌握探針的尖端部’而難以正確執疒 TCP測試墊和探針卡的探針的位置對準。若1 位置對準不正確，因為這個原因，而會發生實際二：:: 接觸不良、接觸抵抗不穩定、相鄰接腳間的短路等。 本發明係有鑑於上述現象’其目的在於提供 裝管控裝置’其能狗正破執行载部的連接端子和似姑 外部端子的位置對準。 ' 用以解決課題的手段 二達成上述目的’本發明提供-種捲帶式封褒管控事 用以搬運形成複數TCP的搬運帶，將該; 者有複數個電性連結於測試頭的連接端子的測、 如探針卡）按塵，藉由使該TCP的外部端子和 ° (例 接端子接觸，而依庠制1> I Μ測疋部的連 觸而依序測式稷數的Tcp，其包括：200902423 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a Tcp (Tape Carrier package) tc〇F (Chip 〇n FUm) for testing one of the iC components (hereinafter, Tcp, COF, and TAB ( Tape Aut (10)ated Bonding) packaged π parts are collectively referred to as "TCP", and the tape and reel package control device used. [Prior Art] In the manufacturing process of electronic components such as IG components, it is necessary to use an electronic component testing device for testing the performance or function of the finally manufactured electronic component or its intermediate stage components, etc. In the case of Tcp Test device for TCP. The TCP test device is generally composed of the following: a test body, a test head, and a tape and magazine control device (hereinafter also referred to as a tape and tape package process). The s-reel tape package processor' is capable of transporting a carrier tape that forms a plurality of Tcp on a tape (also included below), and presses the carrier tape to a probe that is electrically connected to the probe card of the test head. The output input k and the vibrating pin are electrically connected, and the plurality of Tcp materials are sequentially executed. = Yes 'In order to test the device in an efficient and correct manner, the test pad of the TCP must be in contact with the probe.各(4) Each probe of the card is exactly the same. In this case, before the test is performed using the tape-type shock-shocking processor, the initial setting is performed in advance, and the 'breaking process is performed. The operation of registering is enabled so that the test probes of 2192-9453-PF; Ahddub 5 200902423 TCP can be reliably contacted with the probes of the skewer. "The initial S$ of the volume π-package processor, for example, will transport the TCP pepper to the test position as described later, and will be carried (5) TCp maintained in the push: the private move advances until the camera can clearly recognize the 1 1C P On the face, the u-〃丨乂 〃丨乂 机 machine shoots the TCP test pad and displays its image on the display. Operation g颧4 Μ 1豕颂乍 砚 Look at the display, visually grasp the Tcp ° corner, · 1 'in order to clearly identify the probe of the probe card with the camera', :, single-private until After the camera clearly recognizes the sound of (10), 'take the camera to shoot the camera. The operator will turn over and turn over _ „....Beiyuan or the display is not good, while manually operating the probe port to turn 'adjust the angle of rotation of the probe card for ΤΓΡ Γ*7 & CP rotation angle. The mobile propulsion unit Kyrgyzstan, 丄, 丄, 丄 彳 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 以 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The e/+ v + ^ and / or Y-axis directions are moved to confirm that the test pads of the TCp can be in contact with the probes of the ai 上 上 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 上 上 上 上SUMMARY OF THE INVENTION The problem of the invention is to solve the problem of the camera of the probe of the π k k-needle card, because of the space problem in the tape-and-reel processor, and <里> j clothing ^ and s is placed under the probe card However, the probe system is located on the probe card u side (the carrier side), and the tip end of the probe that is in contact with the TCP test pad is set to be straight horse and π relative to C, so when the camera is placed on the probe At the lower side of the card, the 尖端&, + 聛" machine J can not capture the tip end of the probe. 2192-9453-PF/Ahddub 6 200902423 Therefore, it is impossible to surely grasp the tip end portion of the probe and it is difficult to correctly perform the alignment of the probes of the TCP test pad and the probe card. If the 1 position is not aligned correctly, for this reason, the actual two will occur::: poor contact, unstable contact resistance, short circuit between adjacent pins, etc. SUMMARY OF THE INVENTION The present invention has been made in view of the above-described phenomenon. The object of the present invention is to provide a control device for arranging the position of the connection terminal of the carrying portion and the external terminal of the dog. The means for solving the problem is to achieve the above-mentioned object. The present invention provides a tape-and-reel-type tube-controlling device for transporting a carrier tape forming a plurality of TCPs, which has a plurality of connection terminals electrically connected to the test head. The measurement, such as the probe card, presses the dust, by making the external terminal of the TCP and ° (the terminal is in contact with the terminal, and relying on the 1> , which includes:
上之攝影裝置，1执罢 4 ^ 口 U — 、3又置於该搬運帶和該測定部之Η ·处机 猎由該攝影裝置，拍攝該搬運 間，-夠 複數個外部端子、特 （W例如’—或 行疋铩5己、兀件的—部 定部的連接端子或姿勢針的尖端（發们）。Μ該測 依據上述發明(發明υ，因為 定部的連接端子或坎執& 攸搬運▼側拍攝測 逆按立而子或妥勢針的尖端部 接端子之和搬運帶的接觸部 此α直接拍攝連 常精確地取得這些位置資訊一。t針的尖端部，並能夠非 帶的位置拍攝搬運帶上的二者’因為可以從靠近搬運 取得該特定部位的位欠力 所以此夠非常精確地 部的逹接端子和τ 此夠正確地執行測定 7外σ卩知子的位置對準。 2l92-9453-PF；Ahddub 200902423 在上述發明（發明l)中、，〇_达&On the photographic device, 1 4 4 ^ mouth U —, 3 is placed in the carrying belt and the measuring unit Η 处 猎 由 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 该 拍摄 拍摄W such as '- or the line 5, the connection part of the part of the piece or the tip of the posture needle (the hair). According to the above invention (invention, because the connection terminal or the canned & 攸 ▼ ▼ 侧 侧 侧 侧 侧 侧 侧 侧 侧 侧 侧 侧 侧 侧 侧 侧 侧 侧 ▼ ▼ ▼ ▼ ▼ 侧 ▼ ▼ ▼ ▼ ▼ ▼ ▼ ▼ ▼ ▼ ▼ ▼ 侧 ▼ ▼ 侧 侧 侧 侧 侧 侧 侧 侧It is possible to photograph both of the carrying belts in a non-belt position' because it is possible to obtain the positional inferior force of the specific portion from the close handling, so that the terminal and the τ of the portion are sufficiently accurate, which is sufficient to perform the measurement 7 Position alignment. 2l92-9453-PF; Ahddub 200902423 In the above invention (Invention 1), 〇_达&
以此為佳，該捲帶式封裴管 控裂置更包含能夠使該,、 B 4疋。卩移動的測定部移動裝置及 或迠夠使搬運帶的位置相 7 恶吨 相對於該測定部變更的捲帶移動妒 置，藉由該攝影裝置拍攝嫌 、 特定部位的座標資料， 什°亥 、 门時，拍攝該測定部的連接端子或 安勢針的尖端並取得嗜，丨 ^ 次端部的座標資料，從上述取得之 TCP的4寸疋部位的座彳#咨少丨 A 迮祆貝枓以及上述取得之連接端子或姿 勢針的尖端的座俨眘 χ ^ 料的， 求出該似的外部端子及該連接 為子的尖端部之位置偏移量， 測定部移動f置及n h 偏移$ ’藉由該 …動裝置及/或該捲帶移動裳置使該測定部 仃㈣接端子對TCP的外部端子的位置對 準（發明2)。 』世1對 依據上述發明（發明2 )，台b约击τ Λ )此夠更正確地自動執行嗲速 接$而子對TCP的外部端子的位置對準。 Μ連 為佳，該攝影裝置 取仔该攝影裝置和該測定部的連接端子或姿勢',、：= 之間的距離資訊（發明3) 據 / 、大端部 ,、 據述發明（發明3)，能怨針 斷測定部的水平度。 勺判 在上述發明(發明3)中，以此為佳 控裝置更包括調整_定部的式封農管 ^ 卞度之水平度調整梦罢 依據上述取得之㈣f訊，控_水平度職'， 4)。依據上述發明（發明4)，能夠 、置（發明 度。 夠自動調整測定部的水平 該攝影裝置， 在上述發明（發明1)中，以此為佳，藉由 2192-9453-PF；Ahddub 8 200902423 月,夠取付该測定部的連接端子之變形資訊（連接端子 端彎曲等資訊X發明5)。依據上述攝影裝置，因為可以直 接拍攝測定部的读報#工A (、 子的尖端部是否變开二:太：部，所以能狗取得連接端 從測試頭卸下並無需要將㈣逐- 目視判斷連接端子的尖端彎曲等。 在上述發明（發明υ中’以此為佳，該攝影裝置，在 不執订拍攝時不位於該搬運帶和該測定部之間 攝時插入該搬運帶和該測定部之間（發明6)。 仃才 明D中’該攝影裝置可以具有，拍攝 ==:::rTCP攝影裝置― 的尖端的連接端子攝影裝置（發明 運册上的=A可以具有1台攝影裝置’同時拍攝該搬 :上的〜疋部位及該測定部的連接端子或 (舍明8)，該攝影裝置也可以具有1台攝 1大4 藉由攝影裝置本身反轉或切換攝影裳置内的光' 路：能夠 :拍攝該搬運帶上的特定部位及該測定部的連接：分 勢針的尖端（發明g)。 妾而子或姿 、在上述發明(發日月υ中，該搬運 為該搬運帶上的TCP的外部端子（發明 、疋#位可以 特τ也可以為附於該搬運帶的對準c 在上述發明（發明1)+，該 1)。 際運作中該測定部的連接端子的尖端:二::控裝置的實 測試TCP和該連接端子之接觸失誤 攝’係可以被 執行之(發明12)，該捲帶式封裝 低下為指標而 裝置的實際運作中該 2192-9453-PF；Ahddub 9 200902423 測定部的連接端子 標彻行之(發::拍攝’也可以測試次數為指 更包發0月D中’該捲帶式封裝管控裝置亦可 裝管控裝…攝影'置，在該捲帶式封 ，的“祭運作中’藉由該第2攝影裝置，拍摄兮 搬運帶上的特定部位及/或該測 乂 (發明14)。 旳連接糕子或姿勢針 上述攝影裝置，必須要插入讲、笛嫌< 從w 乂肩要插入搬運帶和測定部之間，及 從搬運可和測定部之 上述動作時，有… 在貫際運作時執行 裝置，益項進> ㈤^使產|下降’但是上述的第2攝影 一頁進仃上述動作，所以能夠防止產量的降低。 發明的效i ϋ的降低。 依據本發明的捲帶式封裝管 At 4k Η ·βΐ s* Λβ 6α 、 此夠非常正確地 ^疋㈣連接端子和Tcp的外部端子的位置對準。 【實施方式】 下文配合圓式，說明本發明之實施型態。 第1圖顯示使用本發明—實 器之⑽測試裝置之正面圖，第帶式封裝處理 式封裝處理器之推進單元之η圖為同貫施型態的捲帶 早π之側面圖，第3圖 的捲帶式封裝處理器的推Ώ為门貫細型態 施型態的捲帶式封裝處理 弟4圖為同- 圖為同實施3能的十卡+台的平面圖’第5 貝e i心的捲τ式封裝 圖，第6⑷及6⑻圖為同實施^^⑴木針卡平台的正面 的捲帶式《處理器中 2192-9453-PF；Ahddub 10 200902423 推進單元、探針卡及攝影機之側面圖。 的τ:、先，說明具有本發明實施型態的捲帶式封樂卢 的TCP测試裝置的整 掭f式封裝處理器 m Am - ΛΑ 成。TCP測試裝置1由下列;ft # 圖未心的測試本體、和測試 ：構成: 設於測試頭10上方的接q 电虱連、、'口的測忒頭10、 、，册iu上方的捲帶式封裝處理器2。 捲τ式封裴處理器2俜將开彡忐 TCP依序交付、，"η 運帶5上的複數個 ”…本貫施型態中，為簡化說明，传每 -人將1個TCP交付測試n 糸母 妒運*疋本發明並不以此為限，在 直列方向及/或橫列方向並列之複數TCP同時六 付測試亦可。 寺又 ,:帀式封裝處理器2具有捲出捲轴21及捲取捲軸22, 捲出捲軸21上捲了測試前的搬運帶5。搬運帶5從捲出捲 軸21捲出，在測試後再捲到捲取捲軸22上。 捲出捲軸21和捲取捲軸22之間設有3個間隔滾輪 23a' 23b、23c，用以將從搬運帶5剝離的保護帶51從捲 出捲軸21跨越到捲取捲軸22。各間隔滾輪23a、23b、23c 分別可以上下移動，以調整保護帶51的張力。 在捲出捲軸21的下方設有：捲帶導軌2 4 a、捲出限制 滾輪25a、内側次鍊輪25b及内側導執滚輪25c，從捲出捲 軸21捲出的搬運帶5，一邊由捲帶導軌24a導軌，同時經 由捲出限制滾輪25a、内側次鍊輪25b及内側導軌滾輪25c 送往推進單元3。 在捲取捲軸22的下方也設有捲帶導軌24b、捲取限制 滾輪25f、外側次鍊輪25e及外侧導轨滚輪25d，交付測試 2l92-9453-PF；Ahddub 11 200902423 後的搬運帶5 ’經過外側導軌滚輪25d、外側次鍊輪及 捲取限制滾輪25f，一邊由捲帶導軌24b導軌 — 到捲取捲軸22上。 而且，在内侧導軌滾輪2 5 c和外側導軌滾輪2 5 d之間， 設有推進單元3。 曰 如第1圖及第2圖所示，在推進單元3的框（推進 框）36，藉由托架361設置能夠使滚珠螺桿犯回轉的伺服 馬達31，並且藉由2支Z軸方向的直線運動導軌（以下稱 之為LM導軌）37而設置和滾珠螺桿32螺合的推進本體部 33。該推進本體部33,藉由使伺服馬達31驅動，在由直 線運動導執37導軌的同時可以在上下方向（z軸方向）移 動。 ,在推進本體部33的下端部，設有連接於負壓源（圖示 省略）而能夠吸附保持著搬運帶5的吸附板34。 在推進本體部33的前段側（第1圖中的左側），設有張 力鍊輪35a，在推進本體部33的後段側（第！圖中的右側） 叹有主鍊輪35b，以使得搬運帶5維持於所欲之張力。 如第2圖及第3圖所示，在推進框36之推進本體部 33的背面側，設置了推進平台4使其載於基台38上，推 進平。4的回轉台之頂台係固定於推進框％。 在推進平台4的基座40上設有：使得在χ轴方向上具 有軸之滾珠螺桿42a回轉的伺服馬達.41a、使得在γ軸方 向上具有軸之滾珠螺桿42b回轉的伺服馬達4丨b、使得在γ 轴方向上具有軸之滾珠螺桿4 2 c回轉的伺服馬達41 c，伺 2l92-9453-PF；Ahddub 12 200902423 服馬達41 b及伺服馬造/， 達41 c分別位於基座4 0的兩端部。 在滾珠螺桿4 2 a，γ ± 入輪方向的LM導軌43a和由43a引 導之可以在X軸方向湣 力门⑺動的滑動滑輪組44a螺合。在滑動 滑輪組44a，透過γ軸古 向的LM導轨45a設置在Y轴方向 可以滑動的滑動板46 在滑動板4 6 a的上側，固定了内 部有滾軸的回轉开杜/ 7 7a ’回轉元件4 7 a係設置為在頂台 48自由回轉。 口 在滾珠螺杯42b，Υ轴方向的LM導執43b和由43b引 導之可以纟Y軸方向滑動的滑動滑輪組44b螺合。在滑動 滑輪組44b，透過X轴方向的』導軌价設置在χ轴方向 可以α動的滑動板46b。在滑動板46b的上側，固定了内 部有滚軸的回轉元件47b，回轉^件仍係設置為在頂台 48自由回轉。 在滾珠螺桿42c，Y轴方向的"導執43c和由^引 導之可以纟γ軸方向滑動的滑動滑輪組44c螺合。在滑動 滑輪組44。，透過X轴方向的LM導軌—設置在χ軸方向 可以滑動的滑動板46c。在滑動板46c的上側，固定了内 部有滾軸的回轉元件47c，回轉元件47e係設置為在頂台 48自由回轉。 在具有上述構成之推進平台4，驅動伺服馬達41 a，藉 由使滑動滑輪組44a、滑動板概及滑動板46。在χ軸方 向滑動，而能夠使頂台48在Χ軸方向上移動。再者，驅動 伺服馬達41b及伺服馬達41c，藉由使滑動滑輪組4扑、滑 動滑輪組44c及滑動板46a在Y轴同方向滑動，而能夠使 2192-9453-PF;Ahddub 13 200902423 頂台48在Y轴方向上 牙夕動。再者，驅動伺服馬達4〗a，使 滑動滑輪組44a在X軸太A L、a 向上滑動，並且驅動伺服馬達41 b 及飼服馬達41 c，使得叙：风±人 m μ輪組44b和滑動滑輪組44c 在 抽上之彼此相反的方6 μ # 4 )方向上；月動，繼之藉由使各回轉元 件 47a、45b、45c 回赫 A.. — 1而月匕夠使頂台48繞著其垂直轴回 轉。猎由此推進平a j σ 4，此夠使推進單元3在χ軸_γ軸方 向移動，以及繞著垂直軸回轉移動。 另一方面，如第1园私_ 丄 … 弟〗圖所不，在推進單元3的下方，測 试頭〗〇的上部，^5·罢？· °承载了探針卡8的探針卡平台7。在 此，探針卡平台7係盔At & 1 為此夠由馬達驅動機構進行移動控制 者’以及僅具有手動調整 刀月b者但在本貫施型態中，係 為具有馬達驅動機構者。 如第4圖及第5圖所 口尸/Γ不在奴針卡平台7的基台Η上 設有：使得在X軸方向具有 7T1 _ 八有轴的/衰珠螺桿712回轉的飼服 馬達711、4個X軸方向的LM導軌7ϊ 击"1Q L 7 LM等軌713°在該等4個LM導 軌713上，設有藉由各LM導 可以在X軸方向滑動 V W的矩形之X基座72。在該 、 /主以的一側部，形成 了和滾珠螺桿71 2螺合的螺合部72 j。 在X基座72上設有：使得在γ抽方向上具有轴之 螺桿723回轉的伺服馬達722、2支 " 夂^由方向的LM導軌724。 在上述2支LM導執724上，役右葬士々 , 上°又有猎由各LM導軌724而可 以在Y軸方向滑動導引的矩形之γ 丄73。在該Υ基座73 勺—側部，形成了和滚珠螺桿723螺合的螺合部如。 在Υ基座73上設有：使得在Υ軸大 財向上具有抽之滾珠 14 2192-9453-PF/Ahddab 200902423 螺桿733回轉的飼服馬物、以自由回轉的方式支揮卡 環735的連接璟7q/1产上„ J力八义♦卞 4 _ 733 、。被 735 的一部份，Μ ΤΉPreferably, the tape-type sealing tube control splitting device further comprises the ability to make the B, 4 B. The movement measuring unit of the movement unit or the tape moving device that changes the position of the conveyance belt with respect to the measurement unit, and the coordinate information of the specific portion is captured by the imaging device, In the case of the door, the connection terminal of the measuring unit or the tip end of the ampoule needle is photographed, and the coordinate data of the end point of the sputum is obtained, and the seat of the 4-inch 疋 part of the TCP obtained from the above is used. The beak and the tip of the connection terminal or the stylus needle obtained as described above are carefully prepared, and the positional displacement of the external terminal and the tip end portion of the connection is determined, and the measurement unit moves f and nh. The offset $' is aligned with the external terminal of the TCP by the measuring device and/or the tape moving device (invention 2). According to the above invention (Invention 2), the table b is approximately τ Λ ), which is more accurate in automatically aligning the position of the external terminal of the TCP. Preferably, the photographing device takes the distance information between the photographing device and the connecting terminal of the measuring unit or the posture ',,:= (invention 3) data, and the large end portion, according to the invention (invention 3) ), can break the level of the measurement unit. The spoon is judged in the above invention (Invention 3), and this is a good control device, and the adjustment of the _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ , 4). According to the above invention (Invention 4), it is possible to set (inventive degree) the imaging device capable of automatically adjusting the level of the measuring unit, and in the above invention (Invention 1), it is preferable to use 2192-9453-PF; Ahddub 8 In the month of 200902423, it is sufficient to receive the deformation information of the connection terminal of the measuring unit (the information of the connection terminal end bending, etc. X invention 5). According to the above-mentioned imaging device, it is possible to directly capture the reading of the measuring unit. Change two: too: the part, so the dog can get the connection end to be removed from the test head, there is no need to (4) visually judge the tip end of the connection terminal to bend, etc. In the above invention (invention, 'this is better, the photography The device is inserted between the carrier tape and the measuring portion when the carrier tape and the measuring portion are not photographed at the time of unscheduled photographing (Invention 6). In the case of D, the photographing device may have, photographing = =:::rTCP imaging device - the terminal connection terminal imaging device (=A can have one imaging device on the invention booklet) and simultaneously capture the transfer: the upper part of the switch and the connection terminal of the measurement unit or Ming 8), the photography equipment It is also possible to have one camera and one large 4 to reverse or switch the light in the image capturing device by the photographing device itself. It is possible to: photograph the specific portion on the carrier tape and the connection of the measuring portion: the tip of the potential pin ( Inventive g). In the above invention (in the case of the above-mentioned invention, the external terminal of the TCP on the carrier tape is transported (the invention may be attached to the carrier belt). Alignment c in the above invention (Invention 1)+, the 1). In the operation, the tip end of the connection terminal of the measuring portion: two: the actual test TCP of the control device and the contact error of the connection terminal can be executed (Invention 12), the tape and reel type package is low as an indicator and the actual operation of the device is 2192-9453-PF; Ahddub 9 200902423 The connection terminal of the measuring part is well-formed (fam:: shooting ' can also be tested as Refers to the package in the month of October D. 'The tape-and-reel package control device can also be installed and controlled...Photographed', in the tape-type seal, in the "sacrificial operation" by the second camera, shooting 兮 handling A specific part of the belt and/or the test (Invention 14). The above-mentioned photographing device must be inserted into the whistle and the whistle. When the w-shoulder is to be inserted between the transport belt and the measuring unit, and when the above-described operation of the transportable measuring unit is performed, the apparatus is executed during the continuous operation. (Effective item)> (5) ^Production|Descent', but the above-mentioned second photographing page advances the above-described operation, so that it is possible to prevent a decrease in the yield. The effect of the invention is reduced. The tape-and-reel package tube At according to the present invention 4k Η ·βΐ s* Λβ 6α , which is very accurate (4) The positional alignment of the connection terminal and the external terminal of Tcp. [Embodiment] Hereinafter, an embodiment of the present invention will be described with reference to a circular form. 1 is a front view showing a (10) test apparatus using the present invention, and the η diagram of the push unit of the first package type package processing package is a side view of the sigmoid type of tape π, 3rd. The tape-and-reel package processor of the figure is the tape-and-seal package processing of the gate-slim type. The picture of the tape-and-reel package is the same as the figure of the ten-card + table of the same implementation. The core volume τ package diagram, the 6th (4) and 6 (8) diagrams are the same as the implementation of the ^ ^ (1) wood needle card platform on the front of the tape type "processor 2192-9453-PF; Ahddub 10 200902423 propulsion unit, probe card and camera Side view. τ: First, an integer f-package processor m Am - 具有 具有 of a TCP test apparatus having a tape and reel type of the embodiment of the present invention will be described. The TCP test apparatus 1 consists of the following; ft #图未心的测试本体, and test: constitutes: a set of electric pick-ups placed above the test head 10, a 'head of the test head 10, , a volume above the book iu The tape package processor 2. Volume τ-type sealing processor 2俜 will be opened in order to deliver TCP, "η multi-number on the belt 5"... In the pertinent mode, for the sake of simplicity, each person will be 1 TCP Delivery test n 糸 妒 妒 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 TCP TCP TCP TCP TCP TCP TCP TCP TCP TCP TCP TCP TCP TCP TCP TCP The take-up reel 21 and the take-up reel 22, the unwinding reel 21 is wound up with the conveyance belt 5 before the test. The conveyance belt 5 is unwound from the take-up reel 21, and is wound up on the take-up reel 22 after the test. There are three spacer rollers 23a' 23b, 23c between the 21 and the take-up reel 22 for escaping the protective tape 51 peeled off from the transport belt 5 from the unwinding reel 21 to the take-up reel 22. Each of the spacer rollers 23a, 23b And 23c are respectively movable up and down to adjust the tension of the protective tape 51. Below the unwinding reel 21, a take-up guide rail 24a, a take-up restricting roller 25a, an inner secondary sprocket 25b, and an inner guide roller 25c are provided. The conveyance belt 5 which is unwound from the take-up reel 21 is guided by the take-up reel 24a, and passes through the take-up restricting roller 25a and the inner sub-chain. The wheel 25b and the inner rail roller 25c are sent to the propulsion unit 3. A winding guide 24b, a take-up restricting roller 25f, an outer secondary sprocket 25e, and an outer rail roller 25d are also provided below the take-up reel 22, and the test 2l92- 9453-PF; Ahddub 11 200902423 The rear conveyance belt 5' passes through the outer rail roller 25d, the outer sub-sprocket and the take-up restricting roller 25f, and is guided by the reel guide rail 24b to the take-up reel 22. Moreover, the inner guide rail A propulsion unit 3 is provided between the roller 2 5 c and the outer rail roller 2 5 d. As shown in Figs. 1 and 2, the frame (pushing frame) 36 of the propulsion unit 3 is set by the bracket 361. The servo motor 31 that causes the ball screw to rotate is provided, and the propulsion body portion 33 that is screwed to the ball screw 32 is provided by two linear motion guides (hereinafter referred to as LM guides) 37 in the Z-axis direction. 33, by driving the servo motor 31, the guide rail 37 can be moved in the vertical direction (z-axis direction) while being guided by the linear motion guide 37. The lower end portion of the propulsion main body portion 33 is connected to the negative pressure source (Fig. Can be adsorbed and held The suction plate 34 of the conveyance belt 5 is provided with a tension sprocket 35a on the front side (the left side in the first drawing) of the propulsion main body 33, and is sighed on the rear side of the propulsion main body portion 33 (the right side in the figure: The main sprocket 35b maintains the conveyance belt 5 at a desired tension. As shown in Figs. 2 and 3, on the back side of the propulsion main body portion 33 of the push frame 36, a propulsion platform 4 is provided to be carried on the rear side. On the base 38, the top table of the turntable of the push flat 4 is fixed to the push frame %. The base 40 of the pusher platform 4 is provided with a servo motor that rotates the ball screw 42a having the shaft in the x-axis direction. .41a, the servo motor 4丨b which rotates the ball screw 42b having the shaft in the γ-axis direction, and the servo motor 41c which has the ball screw 4 2 c of the shaft in the γ-axis direction, Servo 2l92-9453-PF ; Ahddub 12 200902423 The motor 41 b and the servo horse make / 41 c are located at the two ends of the base 40 . The LM guide 43a in the ball screw 4 2 a, γ ± in the wheel direction, and the slide pulley group 44a guided by 43a and movable in the X-axis direction (7) are screwed. In the sliding pulley block 44a, a sliding plate 46 slidable in the Y-axis direction is provided through the LM guide 45a passing through the γ-axis, and the upper side of the sliding plate 46a is fixed to the upper side of the sliding plate 460a. Element 4 7 a is arranged to freely rotate on top table 48. In the ball screw cup 42b, the LM guide 43b in the x-axis direction and the slide pulley group 44b guided by 43b which can slide in the Y-axis direction are screwed. In the slide pulley group 44b, a slide plate 46b that can be moved in the x-axis direction by a guide rail price in the X-axis direction is provided. On the upper side of the slide plate 46b, a rotary member 47b having a roller inside is fixed, and the rotary member is still provided to be freely rotatable on the top table 48. In the ball screw 42c, the "lead 43c in the Y-axis direction and the sliding pulley set 44c which is guided by the ?-slidable in the γ-axis direction are screwed. Slide the pulley block 44. The LM guide that passes through the X-axis direction—provides a slide plate 46c that can slide in the direction of the x-axis. On the upper side of the slide plate 46c, a rotary element 47c having a roller inside is fixed, and the rotary element 47e is provided to be freely rotatable on the top table 48. In the propulsion platform 4 having the above configuration, the servo motor 41a is driven by the sliding pulley block 44a, the sliding plate and the sliding plate 46. The yoke is slid in the direction of the yoke, and the table 48 can be moved in the yaw axis direction. Further, by driving the servo motor 41b and the servo motor 41c, the sliding pulley block 4, the sliding pulley block 44c, and the slide plate 46a are slid in the same direction on the Y-axis, so that the 2192-9453-PF can be made; the Ahddub 13 200902423 the top table 48 is The teeth in the Y-axis direction move. Further, the servo motor 4A is driven to slide the sliding pulley block 44a upward in the X-axis too AL, a, and drive the servo motor 41b and the feeding motor 41c so that the wind: human ± μ μ wheel set 44b and sliding The pulley block 44c is in the opposite 6 μ # 4 ) direction of the pumping; the moon movement, followed by the rotation of each of the rotary elements 47a, 45b, 45c A.. 1 Its vertical axis is rotated. The hunting thus advances the flat a j σ 4 , which is sufficient to cause the propulsion unit 3 to move in the direction of the x-axis and to rotate about the vertical axis. On the other hand, if the first garden private _ 丄 ... brother map is not, under the propulsion unit 3, the upper part of the test head 〇 ,, ^5 · · The probe card platform 7 carrying the probe card 8 is carried. Here, the probe card platform 7 is helmeted At & 1 for the movement controller of the motor drive mechanism and the manual adjustment of the knife b, but in the present embodiment, the motor drive mechanism is provided. By. As shown in Figures 4 and 5, the corpse/Γ is not provided on the abutment of the slave card platform 7: a feeding motor 711 having a 7T1 _ eight-axis/a-bead screw 712 in the X-axis direction Four LM guides in the X-axis direction 7 & "1Q L 7 LM and other rails 713° On the four LM rails 713, a rectangular X-base that can slide VW in the X-axis direction by each LM guide is provided. Block 72. A screw portion 72j that is screwed to the ball screw 71 2 is formed on one side of the main body. The X base 72 is provided with a servo motor 722 that rotates the screw 723 having the shaft in the γ pumping direction, and two LM guides 724 that are oriented in the direction. On the above two LM guides 724, the right burial gentry is swayed, and the upper γ 丄 73 is hunted by the LM guides 724 so as to be slidable in the Y-axis direction. A screw portion that is screwed to the ball screw 723 is formed on the side of the scoop base 73. The cymbal base 73 is provided with a feeding ball which has a pumping ball 14 2192-9453-PF/Ahddab 200902423 screw 733 in the yoke axis, and a connection of the snap ring 735 in a freely swiveling manner.璟7q/1 produced „J力八义♦卞4 _ 733 ,. Part of 735, Μ ΤΉ
St:3螺合的螺合部736。探針卡8藉由4支接腳82, 可自由裝卸的方式設於該卡環735上。 在具有如上構成之探針卡平 , 口上稭由驅動伺服馬 月b夠使X基座7 2、以及探針卡8 / ^ 及刼針卡8在X轴方向移動》 猎由驅動伺服馬達7 2 2，能釣# v 门 ’運““夠使Y基座73、以及探針卡8 在Y轴方向移動。而且，驅動伺 π 勒彳j服馬達732使滾珠螺桿733 回轉，並使螺合部736移動， 勒糟此，旎夠使卡環735及探 .十卡8繞著其垂直軸回轉。 丹者捲f式封裝處理器2， 八有能夠自動控制伺服馬達 Η, ^ 732的驅動之控制 精此能夠自動地使探針卡8在X軸方向、γ軸方向 以及繞著垂直軸移動。 "由方。 再者’雖然圖未顯示，在探針卡平台7的基台m 有水平度調整展置，用以調整探 :口又 平声f 士 — τ下十σ 7(板針卡8)的水 十度。在本貫施型態中，該水 外邱值Λ从… 十度凋』I置’係能夠依據 外。卩傳入的訊號輸入而自動控 U]M 利上述水平度調整裝置， J如，可以由設於基台71的底部 |四個角洛，並可以藉由馬 驅動而上下移動的腳部而構成。 如第4圖〜第6圖所示，探針卡8 — 各摆杣* 卞8具有禝數支探針81， ,ι、’十1透過測試頭10和測試本體電性連結。各探 的尖端部分，係向著搬運帶5 · .万向直立，探針81的小踹 為對於TCp的測試墊之接觸部。 穴 如第1圖所示，分別在推進單 早70 3的前段侧（第1圖中 15 2192-9453-PF;Ahddub 200902423 的左側）設有第1攝影機6a，在測試頭1 〇的下侧設有 攝影機（攝影裝置）6b，在推進單元3的後段側（第Ρ圖 右側）設有第3攝影機6c。而且，如第J及6圖所示，^ 進單元3和探針8之間，設有第4攝影機6d。 、 丹有，在測 試頭10形成能夠讓第2攝影機6b拍攝Tcp的測試塾穴 針卡8的探針81的縫隙。 木 在推進單元3和第3攝影機6c之間，設有標示打孔器 26a及退出打孔器26b。標示打孔器‘依據測試結果，丄 該TCP㈣定位置開出i個或複數個孔，退出打孔器挪 在測試中被判斷為不良品的Tcp打孔。 各攝影機63鲁6。，’將由這些攝影機拍攝的影 像，顯不於顯示裝置9使得操作員可以目視確認。顯 置9具有影像處理部’以及顯示各攝影機HU 拍攝之影像的監視器。 J些Γ機之中，第1攝影機6a及第3攝影機6。， 打的孔之位置絲量m打孔器la 力万面第2攝影機6b及第4揣 影機6d係用以取得Tcp和探 ^ _ T卞b之間的位置偏移資料， ^夠針對視野内複數個對象取得其位置偏移資料。 而且，第2攝影機6b係承载於攝影機平台。上 攝影機平台61所具備的促動機 轴方幻以及上下方向;7；^平面視縱橫方向 M ^ M fih y- ^ U軸方向）移動。藉由第2 在平面視縱橫方向（“Η車由方向）移動，第2摄 影機6b能夠拍攝位於和κρ互相 <位置的複數個測試 2192-9453-PF；Ahddub 200902423 於和探針卡8互相遠離之位置的探針81。 者藉由第2攝影機6b在上下方向 使第2攝影牆n u軸方向）移動， 、表6 b的焦點位置變更，而能約脸隹 攝目標之_^ , 焦點對準在拍 ' 々所欲部位。藉此能夠取得拍摄g p Α 的清楚的輪廓影像。再者，上'…爲，拍攝目“部位 ,s _ 丹者上述弟2攝影機6 b I法吉接舶 攝探針81的^_。 ，、“&直接拍 如第1及6圖所示，第 平台62延伸之臂⑺“攝““d ’設置於從攝影機 申之# 63的前端部，藉由攝 的促動機而可以在 铽十D b2所具備 因此，第4攝旦m 橫方向（X轴—Y轴方向）移動。 也””相 能夠插入搬運帶5和探針81之間， 也此夠從搬運帶5和探 β, ^ r 之間退出。再者，藉由第4攝 汾枝6d在平面視縱橫方向（义軸1 珥 M 6d ^ ^ -iA ά 向）私動，苐4攝影 4 b夠拍攝位於和TCP互相遠離之 及位於和探針卡8 ^隹之位置的稷數個測試塾 以更佳的铲確 ^之位置的探針81 ’因此，能夠 更仫的精確度求出Tcp 第4攝影機6崎约二針卡8的位置偏移量。 上側…. 夺分別拍攝第4攝影機6d的 上側及下側。因此，當第 81 , n At,A 躡办機6d插入搬運帶5和探針 81之間日寸，迠夠藉由第4攝 墊及探針81的尖端部。葬： 同時拍攝ΚΡ的測試 接拍#9 "上述第4攝影機6d，能夠直 接拍攝第2攝影機6b無法 台匕豹非〜胜★ L 攝的仏針81的尖端部，所以 月匕夠非*知確地取得探針81 的位置資訊（座標資料）。再者*…和測試墊的接觸面） 6u a .. 因為可以在比第2攝影機 6b更近的位置拍攝Tcp的測 ,θ Έι, ^ D墊，所以，能夠更精確地取 付測武墊的位置資訊（座標資料）。 2192-9453-PF;Ahddub 17 200902423 在本實施型態中的第4攝影機6d，因 的尖端部，所以，依據該拍攝 探針 的尖端f曲等的變形資訊。例如，事先J =极針 常狀態之探針嶋作為基準影像，=有變形的正 81的㈣和基準影像細 ”木針 變形。 而此夠判斷探針81是否 男機：者η本型悲中的第4攝影機6d能夠取得第4攝 I:探針81的尖端部之間的距離資訊。例如，距離 貝=取得：可以利用攝影機的自動對焦功能來執行。 曰由以第4攝影機6d取得該第4 81 攝〜祙6d和妓數個 間的距離資料，能夠判斷探針卡8的水 =例如’相較於第4攝影義和探針卡8上位於“由 、向之探針81群的距離，第4攝影機6d及探針卡8上 轴正方向之探針81群的距離較短的情況下，能夠判 斷為祙針卡8在χ軸正方向上傾斜向上。 —將如上述取得之距離資訊或依據該距離資訊之水平資 。凡輸出至设置於探針卡平台7的基台71之水平度調整裝 :’並藉由控制該水平度調整裝置’而可以自動地將探,； 卡8 §周整到水平位置。 、再者，本實施型態中的第4攝影機6d，雖然可以同時 分別拍攝上側（搬運帶5)及下侧（探針81)’但本發明並不 以此為限’藉由攝影裝置本身反轉或切換攝影裝置内的光 線路徑分別拍攝上側（搬運帶5)及下側（探針81)亦可，設 置2台攝影機：拍攝上側（搬運f 5)的攝影機及拍攝下侧 2192-9453-PF;St: 3 screwed portion 736. The probe card 8 is detachably mounted on the snap ring 735 by four pins 82. In the probe card having the above configuration, the straw is driven by the servo horse, and the X base 7 is 2, and the probe card 8 / ^ and the needle card 8 are moved in the X-axis direction. Hunting by the servo motor 7 2 2, can fishing # v door 'transport' " enough to move the Y base 73, and the probe card 8 in the Y-axis direction. Further, the servo motor 732 is driven to rotate the ball screw 733, and the screw portion 736 is moved, so that the snap ring 735 and the probe card 8 are rotated about the vertical axis thereof. The Dan's f-package processor 2, eight can automatically control the servo motor Η, ^ 732 drive control This can automatically move the probe card 8 in the X-axis direction, the γ-axis direction and around the vertical axis. " by party. Furthermore, although the figure is not shown, the base m of the probe card platform 7 has a horizontal adjustment and is used to adjust the water of the probe port and the flat ten sigma - 7 sigma 7 (the pin card 8). degree. In the present embodiment, the value of the water outside the Λ is from ...卩Incoming signal input and automatic control U]M The above-mentioned level adjustment device, J, can be provided by the bottom of the base 71 | four corners, and can be moved up and down by the horse drive Composition. As shown in Fig. 4 to Fig. 6, the probe card 8 has a plurality of probes 81, and the first and second probes 81 are electrically connected to the test body through the test head 10. The tip end portion of each probe is erected toward the carrying belt 5 ·. The small 探针 of the probe 81 is the contact portion of the test pad for the TCp. As shown in Fig. 1, the first camera 6a is provided on the lower side of the test head 1 在 on the front side of the advancement 70 3 (15 2192-9453-PF in Fig. 1; the left side of Ahddub 200902423). A camera (photographing device) 6b is provided, and a third camera 6c is provided on the rear side (the right side of the drawing) of the propulsion unit 3. Further, as shown in Figs. J and 6, a fourth camera 6d is provided between the unit 3 and the probe 8. In addition, in the test head 10, a slit of the probe 81 of the test needle card 8 capable of causing the second camera 6b to capture Tcp is formed. Between the propulsion unit 3 and the third camera 6c, a marking punch 26a and an exit punch 26b are provided. Mark the puncher ‘According to the test result, TCP The TCP (4) position opens i or a plurality of holes, and exits the puncher. The Tcp punch that is judged to be defective in the test. Each camera 63 Lu 6. , The images taken by these cameras are not visible to the display device 9 so that the operator can visually confirm them. The display 9 has an image processing unit ’ and a monitor that displays images captured by the respective camera HUs. Among the J machines, the first camera 6a and the third camera 6 are included. The position of the punched hole is the amount of the m puncher. The force of the second camera 6b and the 4th camera 6d are used to obtain the positional offset between the Tcp and the probe _T卞b. A plurality of objects in the field of view obtain their position offset data. Further, the second camera 6b is carried on the camera platform. The camera platform 61 has a motive axis and a vertical direction; 7; ^ plane view vertical and horizontal directions M ^ M fih y- ^ U-axis direction) movement. The second camera 6b is capable of capturing a plurality of tests 2192-9453-PF located at the mutual position of κρ by the second aspect in the plane view vertical and horizontal direction ("the brake is driven by the direction"; Ahddub 200902423 and the probe card 8 The probe 81 is located at a position away from each other. The second camera 6b moves the NAND axis direction of the second imaging wall in the vertical direction, and the focus position of the table 6 b is changed, so that the target can be photographed. Focus on the part where you want to shoot. You can get a clear outline image of the gp 拍摄. Again, on the '..., the subject of the shooting, s _ 丹 上述 上述 上述 2 2 6 6 6 6 6 Take the ^_ of the probe 81. , "& direct shot as shown in Figures 1 and 6, the extension of the platform 62 arm (7) "photograph" "d" is set at the front end of the camera from the #63, by the motivation of the camera can be Since the 铽10 D b2 is equipped, the 4th radiance m moves in the horizontal direction (X-axis-Y-axis direction). The "" phase can be inserted between the carrier tape 5 and the probe 81, and is also able to exit between the carrier tape 5 and the probes β, ^ r. Furthermore, by the 4th shot lychee 6d in the plane view vertical and horizontal direction (the right axis 1 珥 M 6d ^ ^ - iA ά direction) private movement, 苐 4 photography 4 b enough to shoot and TCP away from each other and located The number of pins in the position of the needle card 8 ^ 塾 探针 探针 探针 更 更 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' T T T T T T T T T T T T Offset. The upper side .... captures the upper and lower sides of the 4th camera 6d. Therefore, when the 81st, n At, A machine 6d is inserted between the carrying belt 5 and the probe 81, it is sufficient to pass the 4th pad and the tip end portion of the probe 81. Funeral: At the same time shooting ΚΡ test shot #9 " The above 4th camera 6d, can directly shoot the second camera 6b can not be 匕 匕 le le le le le le le le le le le le le le le le le le le le le le le le le le le le le le le le le le le le le le le le le le le le le The position information (coordinate data) of the probe 81 is obtained. Furthermore, the contact surface of the test pad is 6u a.. Since the measurement of Tcp, θ Έι, ^ D pad can be taken at a position closer to the second camera 6b, the dynamometer pad can be taken more accurately. Location information (coordinate data). 2192-9453-PF; Ahddub 17 200902423 The fourth camera 6d in the present embodiment has deformation information based on the tip end of the imaging probe, such as the tip end portion. For example, the probe 事先 in the normal state of J = pin is used as the reference image, = the positive (81) of the deformed positive (the fourth and the reference image is fine), and the wooden needle is deformed. This is enough to judge whether the probe 81 is male or female: The fourth camera 6d in the middle can acquire the distance information between the tip end portions of the fourth camera I: the probe 81. For example, the distance y = acquisition can be performed by the autofocus function of the camera. 曰 is obtained by the fourth camera 6d. The distance data between the 4th 81th and the 祙6d and the 妓 number can determine that the water of the probe card 8 is, for example, 'in comparison with the fourth photographic and probe card 8 When the distance between the fourth camera 6d and the probe 81 in the positive direction of the probe card 8 is short, it can be determined that the needle card 8 is inclined upward in the positive direction of the x-axis. - the distance information obtained as described above or the level of information based on the distance information. The level adjustment device output to the base 71 provided on the probe card platform 7 can be automatically detected by controlling the level adjustment device, and the card 8 is rounded to the horizontal position. Further, in the fourth camera 6d of the present embodiment, the upper side (the transport belt 5) and the lower side (probe 81) can be simultaneously photographed, but the present invention is not limited thereto by the photographing apparatus itself. Reverse or switch the light path in the camera. You can also shoot the upper side (handling belt 5) and the lower side (probe 81). Set up two cameras: take the camera on the upper side (transport f 5) and shoot the lower side 2192-9453 -PF;
Ahddub 18 200902423 (探針81)的攝影機亦可。 繼之，針對捲帶式封裝 以說明。在使用捲帶式封裝處理；=用方法及動作加 封裝處理器2實際動 、凊况下，使捲帶式 8移動，以使得探針卡則’必須執行初期設定使探針卡 •十卡8的所有探斜2 ] μ / π 之測試墊的中央位w 、’的位置決定於對應 測气X η 4· * 田1CP的種類變更時’或者 叫忒不冋生產批次的Tc ^ 蚪，或者變更探針卡8時，必須 决疋奴針卡平台7的叉 T 乂肩 位置，並將之a錄& 由位置Μ 0轉角的基準 ό. 且（位置稱之為「登錄位置」），使得ίτρThe camera of Ahddub 18 200902423 (probe 81) is also available. This is followed by a tape and reel package. In the use of tape and reel packaging processing; = using the method and action plus the package processor 2 in actual motion, under the condition, the tape reel 8 is moved, so that the probe card must 'implement the initial setting to make the probe card · ten card All the probes of 8 2] μ / π The position of the central position of the test pad w, ' is determined by the corresponding gas X η 4 · * When the type of the field 1CP is changed' or the Tc ^ 忒 of the production batch , or when changing the probe card 8, it is necessary to determine the position of the fork T shoulder of the slave card platform 7, and record it a position from the position Μ 0 corner. (The position is called "login position" ), making ίτρ
的測試墊和探針卡8 使侍TCP 卜 的彳衣針81確實地相接觸。 第7A〜7C圖，係為上诚 定時& # & ώ 贡式封竑處理器2的初期設 疋日守的動作流程圖。 捲帶式封裝處理器2，告門仏、w 田開始初期設定的動作時，將 作為基準的TCP搬運纟丨 M位置（步驟S01)，驅動攝影機 口 6 2 ’使弟4攝影機6 d插入你，富w：[ 饵叫插入搬運帶5和探針81之間（步 驟 S02，第 6(b)圖）。 繼之，由第4攝影機6d，拍攝κρ之多個測試塾之中 位：-端部的複數測試墊，並且，拍攝對應於這些測試墊 的複數探針81的尖端部（步驟S0 3)。 者在本貫知型恶中，第4攝影機6d在上側係拍攝 TCP的測試墊，但是本發明並不以此為限，也可以拍攝附 於TCP之特定的標記，拍攝封裝的角部等特徵的部位，或 者拍攝附於搬運帶5的對準標記亦可。但是，這些都是設 置為關聯於TCP的測試墊的座標資料之物。 & 2l92-9453-PF；Ahddub 200902423 再者，在本實施型態中，# > 乂。， 弟4攝影機6d在下彻丨孫4α _ι 如針卡8的探針81的尖 任卜側係拍攝 力；r私上。 ° ’但是本發明並不以此Λ阳 在如針卡8上設置複數支” +乂此為限， 針，拍攝該姿勢針的尖端 勢之-勢 6A ^1' ^ ^.rL m ^ 在此’姿勢針為，姿熱4+ 的大知S又置為關聯於探針 次势針 1 的尖端部的座標眚料^ 即，藉由取得姿勢針的尖妒ώ 貝科者。亦 ,ά, , 5大鸲部的座標資料，可以推導 針81的大端部的座標資料。 、钕 捲帶式封裝處理器2的馬後走田* n，,, m L ,V像處理部’依據第4攝赘德 6d拍攝上側的影像（第丨上旦 ^ ，B - , 知像），取得包含於該第1上夢 像之稷數個測試墊的中心邱 上〜 „ ^之個別座標資料（XPd丨，Ypd,)(步 驟S04)。同樣地，捲帶式 ^ 祕—I處理态2的影像處理部，依 據弟4知影機6d拍攝下側的 ^^ , y彳冢c弟1下影像），取得包合 於該弟1下影像之複數個探飪S1 AA , c 3 奴針81的尖端部之個別座標資料 (Xpbi，YPbl)(步驟S04)。再者，太备 ^ 本動作中所得到的各座標蓍 料係為映射到攝影機平台62的座標系。 、The test pad and probe card 8 positively contact the pin 81 of the waiter. The 7A to 7C diagrams are the flow charts of the initial setting of the 诚 & & & & & & & & & & & & & & & & & & & & & & & & & & & & & When the tape-and-reel package processor 2 starts the operation of the initial setting, the TCP is transported to the M position as a reference (step S01), and the camera port 6 2 ' is driven to insert the camera 6 d into you. , rich w: [The bait is inserted between the transport belt 5 and the probe 81 (step S02, Fig. 6(b)). Then, the fourth camera 6d captures a plurality of test 塾 of the κρ bits: the end of the plurality of test pads, and photographs the tip end portions of the plurality of probes 81 corresponding to the test pads (step S0 3). In the local stereotype, the fourth camera 6d captures the test pad of the TCP on the upper side, but the invention is not limited thereto, and it is also possible to take a specific mark attached to the TCP and photograph the corners of the package. The part, or the alignment mark attached to the carrying belt 5, may also be taken. However, these are the coordinates of the test pad set to be associated with TCP. &2l92-9453-PF; Ahddub 200902423 Furthermore, in the present embodiment, # > 乂. , Brother 4 camera 6d in the next 丨 4 4 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ ° 'But the invention does not use this yang to set a plurality of branches on the needle card 8" 乂 为 , , , , , , , , , , 拍摄 拍摄 拍摄 拍摄 拍摄 拍摄 拍摄 拍摄 拍摄 拍摄 拍摄 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 This 'positional needle' is the coordinate of the hot spot 4+ and is set to the coordinate of the tip end portion of the probe secondary potential needle 1, that is, by obtaining the pointed needle of the posture needle. ά, , The coordinate data of the 5 large crotch parts can be used to derive the coordinate data of the large end of the needle 81. The 钕 带 tape package processor 2 is used to walk behind the field * n,,, m L , V image processing unit' According to the image of the upper side (the second ^ ^ ^ , B - , 知 像 ) of the 4th 赘 赘 6d, the center of the test pads included in the first dream image is obtained. „ ^ The individual coordinates Information (XPd丨, Ypd,) (step S04). Similarly, the image processing unit of the tape-and-reel type I-process state 2 captures the image of the lower side of the ^^, y彳冢c brother 1 according to the brother 4 camera 6d). The plurality of images S1 AA , c 3 are the individual coordinate data (Xpbi, YPbl) of the tip end portion of the slave needle 81 (step S04). Furthermore, each of the coordinate data obtained in this operation is a coordinate system mapped to the camera platform 62. ,
Ik之，捲帶式封裝處理考？，粒丄过 σ 藉由攝影機平台6 2使第 4攝影機6d移動，藉由篦4！ η ” 4攝影機6d拍攝TCP之數個測 試塾中位於別的端部的複數 稷^ ^式塾，同時’拍攝對應於這 些測試墊的複數個探針81的尖端部(步驟s〇5)。 捲帶式封裝處理器2的影像處理部，依據第4攝影機 6d拍攝上側的影像（第2上影像），取得包含於該帛2上影 像之複數個測試墊的t心部之個別座標資(步 驟s〇6)。同樣地，捲帶式封裝處理器2的影像處理部，依 據第4攝影機6d拍攝下側的影像（第2下影像），取得包含 2192-9453-PF;Ahddub 20 200902423 於該第2下影像之複數個探針81的尖端部之個別座標資料 (XPb2, YPb2)(步驟 s〇6)。 在此，第4攝影機6d，因為從靠近搬運帶5(Tcp)的位 置拍攝TCP的測試蟄，所以，能夠非常精確地取得測試塾 之中心部的座標資料（Xpdl，Ypdi)及（Xpd2, Ypd2)。再者，第4 攝影機6d，因為可以直接拍攝探_ 81的尖端部（和測試墊 的接觸面），所以能夠非常精確地取得探針8 座標〇—)及aw藉此，能夠非常正確地= TCP的測試墊和探針卡8的探針81的位置對準。 捲帶式封裝處理器2的影像處理部，依據取得之_ 墊的中心部的座標諸（XpdI，Ypdi)及（Xpd2，Ypd2)，計算通過包 含於…上影像之測試墊的中心部之座標資料 Γ 上影像之測試塾的中心部之座標資料的直物試 =列)…方向之直線的夹角(……心 再者，捲帶式封聚處理器2的影像處理部，依據取得 之探針81的接觸面的座κ课取仔 直、…人 的庄“枓(χΊ)及計 异通過包含於該第i下影像之探針8 及包含於該第2下影像之俨们 、大而。之座標貧料 办像之抓針81的尖端部之 線(探針81的配列)的X軸方向之直後… 的直 D(步驟S07)。 直線的夾角（第2角度 繼之，捲帶式封裴處理器2， 角度0 Pdl和第2角度0 v s〇7中得到第1 所r的莫ΛΑ Θ (步驟S〇8)。繼之，在 所付的差ΔΘ的絕對值大於特 ：在 的匱況下（在步驟 2192-9453-PF;Ahddub 21 200902423 7 , 捲帶式封裝處理器2依據差“使r針卡 7回轉移動(步驟_，在所得的差“的平台 值ΰ以下的情況下(在步驟SU，是），使揲 特定 回轉移動停止（步驟SI2)。另一方 卡千台7的 △“勺決定值在特定值 步驟SG9 _，差 不使探針卡平情況T(在步驟咖，否）， 妓 十σ 7回轉移動，而執行步驟Sl3。 繼之’捲帶式封裝處理器2，藉 4攝影機6d移動，/ M 办祛平台62使第 第]p 第4攝影機6d再度拍攝包含於今 心像之複數個探針8】（步驟si3)。 ； 中探針卡8繞著垂直轴移動，即使在;在步驟別 攝影機6d的視野的> ’、钕針8〗偏離第4 ””月况下’也可以再度拍攝 處=器2的影像處理部，依據拍攝的影像（第:式封裝 取得包含於該第3下f·彡傻| 下衫像）， “X步驟S14)象之稷數個探針81的座標資料 同樣地，捲帶式封裝處理器2， 第4攝影機6d移動，# a攝影機平台62使 勒藉由第4攝影機6d ㈣2下影像之複數個探針心尖端部（又^3於 式封装處理器2的影像處理部〜)。捲- 像)，取得包含於該…影像之複數下影 的座標資料（XPM，YPb〇(步驟Sl6)。 休針81的尖端部 繼之，捲帶式封裝處理 資料（XPdl，YPdl)及（XPd2，Ypd2)及探針:測山試塾之2處座標 料（XPb3，YPb3)及（XPb4,Ypb4)… 々而部之2處座標資 叶异測試墊和趑 的X成分及Y成分的差值Δ Y s 奴針81之接觸面 值ΔΧ及^(步驟Sl7)。繼之，得 2l92-9453-PF；Ahddub 200902423 到的差值△ X及Α γ的決定值大於特定值p的情況下（步驟 S18,疋）捲可式封裝處理器2依據差值△ X及△ Y使探針 卡平〇 7在X軸方向及/或Y軸方向移動（步驟S19)，在差 值Δ X及△Υ的絕料枯— ^ έ對值在特定值Ρ以下的情況下（步驟S20, 是）’停止探針卡平台7的移動（步驟S21)，並將探針卡平 台7之該位置登錄（步驟S22)。另—方面’在步驟训中， 差值△X及△γ的絕斜 — 、子值在特疋值p以下的情況下（步驟 )不使奴針卡平台7移動，而登錄該位置(步驟 以此為佳，以第4攝影機6d拍攝在該位置狀 態中的各探針81 4置狀 太缟。卩，並預先儲存作為基準影像。 驅動攝影機平台62，使第4 帶5和探針卡8之間退出（步驟奶，第6 也運 束捲帶式《處判2__定。 ° °此結 士上所述，依據本實、 能夠自動地利用特徵部I確2, 卡8的探針81的位置 的測試塾和探針 依序地分別執行”垂直V 在本實施型態中，藉由 刊仃％者垂直軸的位置 向的位置對準，而能夠更正確 方向/y軸方 卡8的探針81的位置對準。因此订Tcp的測試墊和探針 地執行捲帶式封裝處理器2的初期=在短時間内有效率 上述的初期設定結束之後， 實際運作。亦即，捲帶式封裝處理處理器2開始 序將複數TCP交付測試。 運迗搬運帶5並依 捲帶式封裝處理器2即使是在 ™-,_dub 23 中，也能夠執 200902423 墊和彳木針卡8的探針81 此情況下，不使用笛 位置對準較佳。在 用弟4攝影機6d，而 來拍攝TCP的測試塾及 用第2攝衫機6b 用“攝影機6d的情況下 在使 動攝影機平台62,將第4摄⑶的測試時都必須驅 δ!之間，並從並門、P攝衫機6d插入搬運帶5和探針 捲帶式封裝處理器2在實 時，或者接觸率降低時不'運作中，發生接觸失誤 擔… 時驅動攝影機平台62,使第4摄习 機6d插入搬運帶5和探 攝私 發生接觸失荜沾押 間，以第4攝影機6d拍攝 亦 一 °、、、木針81或接觸率低下的探針81的尖端部 準影像相,… 取伃的“象，和登錄時儲存的基 =二可以判斷該探針81是否變形。藉此，無需 , ^ *測試頭1〇卸下並以目視判_針81 的尖端彎曲等。 』ί木針81 之尖端部的拍 ’能夠事先防 再者，如上述之實際運作中的探針81 攝’可以測試次數為指標定期執行之。藉此 止接觸失誤或接觸率降低。 以協助本發明的理 上述霄施型態中揭 所屬的所有設計變 上述說明的實施型態，係記载用 解，並非記載用於限定本發明。因此’ 露的各元件，係包含本發明技術領域中 更或均等物。 例如’省略第2攝影機6b 也袖—， N4攝影機6d 采執订位置對準亦可。驻Λ m + 丁平力』猎由此種構成，就不需要為了以第 2攝影機6b拍攝而在測試頭丨〇設置空間或孔洞。 2192-9453-PF;Ahddub 24 200902423 本，例如，上述實施型態中，係 針卡8的妞荽+ 士 土 刀别執行TCP和探 们、八者垂直軸的位置對準和平 但本發明並 万向的位置對準， 个知別限疋於此，兩者同時 之，依據在步ςης , 執仃亦可。具體言 驟S03、S05取得的座桿 d，YPd2)，及捏朴W, &貝科aPdi，YPd丨）及 及探針81的尖端部的座 (X…，YPb2)，求出蟢基千古± 铋貝枓（XPbl，YPb,)及 夂出、澆者垂直軸的位置偏移 軸方向的位置低# θ ^ 及X軸方向及γ 台7在珐菩φ古， 置偏私里’使探針卡平 在％者垂直軸/X軸方向/γ軸方向 十 探針81的位罟射.隹— 動’執行測試墊和 丄白7位置封準。藉此，能夠更 位置偏攸X TCP和探針卡8的 仅1偏移修正的操作時間。 的 再者’在上述實施型態中，係 針卡8移動而執行TCP和探針卡針卡平台7使探 並不以此為限立置對準，但本發明 運〜Γ 由推進平台4移動推進單元3/搬 運-5而執行，由探針卡平台7 進…/故 台4移動推進單元_木針卡8並由推進平 早兀3/搬運帶5兩者而執行亦可。 產業上的利用性 本發明’可用於在捲 時，用以正確執行測定部(::空$置的初期設定 部端子的位置對準作業讀卡）的連接端子和取的外 【圖式簡單說明】 第1圖顯示使用本發 器之似测試裝置之正面^ 之捲帶式封裝處理 2l92-9453-PF;Ahddub 200902423 第2圖為同實施型態的捲帶式封裝^處 之側面圖。 第3圖為同實施型態的捲帶式封裝處 的平面圖。 理器之推進單 元 理器的推進平台 第4圖為同實施型態的捲帶式封裝處理器的探針卡 台的平面圖。 理器的探針卡平 第5圖為同實施型態的捲帶式封裝處 台的正面圖。 f 第6(a)及6(b)圖為同實施型態的捲帶式封裝處理器 中推進單元、探針卡及攝影機之側面圖。 第7A圖為同實施型態的捲帶式封裝處理器的初期設 定時的動作流程圖（其一）。 第7B圖為同實施型態的捲帶式封裝處理器的初期設 定時的動作流程圖（其二）。 器的初期設 第7C圖為同實施型態的捲帶式封裝處理 定時的動作流程圖（其三）。 【主要元件符號說明】 1 ~ tcp測試裝置； 3〜推進單元； 5〜搬運帶； 7〜探針卡平台； 1 〇 ~測試頭； 21〜捲出捲車由； 2〜捲帶式封裝處理器； 4〜推進平台； 6b〜第2攝影機（攝影裝置）； 6d〜第4攝影機（第2攝影裝置）； 8〜探針卡（測定部）； 捲取捲軸； 2192-9453-PF;Ahddub 26 200902423 隔滚輪 24a~捲帶導軌； 23a、23b、23c〜間 24b〜捲帶導軌； 25a~捲出限制滾輪 2 5 b〜内側次鍊輪；2 5 c ~内侧導軌滚輪 2 5 e〜外側次鍊輪；2 5 d〜外侧導軌滾輪 5卜保護帶； 25ί〜捲取限制滾輪 81〜探針（連接端子）。 2192-9453-PF;Ahddub 27Ik, tape and tape packaging processing test? , 丄 丄 σ The fourth camera 6d is moved by the camera platform 6 2, by 篦 4! The η ′ 4 camera 6d captures a plurality of 位于 ^ 位于 位于 位于 位于 位于 TCP TCP 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The image processing unit of the tape and reel type package processor 2 captures the image of the upper side (the second upper image) according to the fourth camera 6d, and acquires the individual coordinates of the t-core portion of the plurality of test pads included in the image on the 帛2 ( Step s〇6) Similarly, the image processing unit of the tape package processor 2 captures the lower image (second lower image) according to the fourth camera 6d, and obtains 2192-9453-PF; Ahddub 20 200902423 The individual coordinate data (XPb2, YPb2) of the tip end portion of the plurality of probes 81 of the second lower image (step s〇6). Here, the fourth camera 6d is photographed from a position close to the transport belt 5 (Tcp). TCP test 蛰, so the coordinates of the center of the test ( (Xpdl, Ypdi) and (Xpd2, Ypd2) can be obtained very accurately. Furthermore, the 4th camera 6d can directly capture the tip of the _ 81 (contact surface with test pad), so it can be obtained very accurately The probe 8 coordinates )—) and aw can be used to correctly align the position of the TCP test pad and the probe 81 of the probe card 8. The image processing unit of the tape and reel package processor 2 is obtained according to the _ The coordinates of the center of the pad (XpdI, Ypdi) and (Xpd2, Ypd2) are calculated by the coordinate data of the center of the test 通过 on the center of the test pad included in the image on the image. Object test = column) ... the angle of the straight line in the direction (... heart again, the image processing unit of the tape reel type processor 2, according to the seat κ of the contact surface of the obtained probe 81, take a straight, ... The human's "枓" and the difference are passed through the probe 8 included in the i-th image and the tip of the grasping needle 81 which is included in the second lower image. The line of the part (the arrangement of the probes 81) is straight D in the X-axis direction (step S07). The angle of the line (the second angle is followed by the tape-type sealing processor 2, the angle 0 Pdl and the second At the angle 0 vs〇7, the first r is obtained (step S〇8). Then, the absolute value of the difference ΔΘ paid is greater than the special: in the case of Next (in step 2192-9453-PF; Ahddub 21 200902423 7 , the tape and reel package processor 2 rotates the r-pin card 7 according to the difference (step _, in the case where the resulting difference is less than the platform value ( ( In step SU, YES, the 揲 specific slewing movement is stopped (step SI2). The other side of the card 台7 △ "spoon determination value in the specific value step SG9 _, the difference does not make the probe card flat case T (in the step coffee , No), 妓 ten σ 7 swivel movement, and step S13 is performed. Then, the tape-and-reel package processor 2 moves the camera 6d, and the /M office platform 62 causes the fourth camera 6d to retake the plurality of probes 8 included in the present image (step si3). The middle probe card 8 moves around the vertical axis, even if it is; in the step of the camera 6d, the field of view > ', the needle 8 is deviated from the 4th" month", the image of the device 2 can be re-photographed The processing unit acquires the image according to the captured image (the first type of package is included in the third lower f·彡 silo | the lower shirt image), and the “X step S14” is similar to the coordinate data of the plurality of probes 81 The package processor 2, the fourth camera 6d moves, and the #a camera platform 62 causes a plurality of probe core tips by the fourth camera 6d (4) 2 images (the image processing unit of the package processor 2) ~). Volume - like), obtain the coordinate data (XPM, YPb〇 (step S16) contained in the plural image of the image. The tip of the needle 81 is followed by the tape package processing data (XPdl, YPdl) And (XPd2, Ypd2) and probes: 2 test materials (XPb3, YPb3) and (XPb4, Ypb4) of the mountain test 々 2 2 2 2 2 2 2 2 2 2 2 及 及The difference Δ Y s of the Y component is the contact surface value ΔΧ and ^ of the slave needle 81 (step S17). Then, the difference Δ of 2l92-9453-PF; Ahddub 200902423 is obtained. When the determined values of X and γ γ are larger than the specific value p (step S18, 疋), the roll-wrapable processor 2 causes the probe card to be flat 7 in the X-axis direction and/or Y according to the difference Δ X and Δ Y . In the axial direction movement (step S19), when the value of the difference Δ X and Δ 绝 is Ρ ^ Ρ ( ( ( ( ( ( ( ( ( (step S20, YES) 'stop the movement of the probe card platform 7 (step S21), and register the position of the probe card platform 7 (step S22). On the other hand, in the step training, the absolute values of the difference ΔX and Δγ are, and the sub-values are below the special value p. The next step (step) does not move the slave card platform 7 and registers the position (this step is preferable, and the probes 81 4 in the position state are photographed by the fourth camera 6d to be too 缟. 卩, and in advance Stored as a reference image. Drive the camera platform 62 to withdraw between the 4th belt 5 and the probe card 8 (step milk, the 6th also carries the tape type "scheduled 2__ fixed. ° ° described above According to the actual situation, the feature portion I can be automatically utilized, and the test 塾 and the probe of the position of the probe 81 of the card 8 are sequentially executed respectively. In the type, the position of the vertical axis of the magazine is aligned, and the position of the probe 81 of the more correct direction/y-axis card 8 can be aligned. Therefore, the test pad and the probe ground of the Tcp are set. The initial stage of executing the tape and tape package processor 2 = the effective operation in a short time after the initial setting is completed, that is, the tape and tape type package processing processor 2 starts to deliver the complex TCP delivery test. 5, according to the tape and reel package processor 2, even in the TM-, _dub 23, can carry the 200902423 pad and the probe 81 of the eucalyptus needle card 8, in this case, it is better not to use the flute position alignment. In the case of using the 4th camera 6d, the test for capturing the TCP and the use of the second camera 6b for "camera 6d, when the camera platform 62 is activated, the test of the fourth camera (3) must be driven by δ! And inserting the transport belt 5 from the parallel door, the P-shirt machine 6d, and the probe tape-and-reel package processor 2 in real time, or when the contact rate is lowered, during operation, when the contact error occurs, the camera platform 62 is driven. The fourth camera 6d is inserted into the carrying belt 5 and the probe private contact is lost, and the fourth camera 6d is photographed at the tip end of the probe 81, which is also one, the wooden needle 81, or the contact rate is low. The image phase, ... can be judged whether the probe 81 is deformed by taking the "image" and the base stored at the time of registration. Therefore, it is not necessary to remove the test head 1 并 and visually judge the tip end of the needle 81 to bend or the like. The pat of the tip of the LYRO pin 81 can be prevented in advance, and the number of times the probe 81 can be tested in the actual operation as described above is periodically executed. This prevents contact errors or reduced contact rates. </ RTI> </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> </ RTI> <RTIgt; Thus, the various elements of the invention include more or equivalents in the technical field of the invention. For example, the second camera 6b is also omitted, and the N4 camera 6d may be aligned. In this configuration, it is not necessary to provide a space or a hole in the test head for photographing with the second camera 6b. 2192-9453-PF; Ahddub 24 200902423, for example, in the above embodiment, the girl's 荽 + 士 刀 knife of the tying card 8 performs the alignment of the TCP and the finder, the vertical axis of the eight, but the present invention The position of the universal direction is aligned, and the difference between the two is limited to this. At the same time, according to the step ς ς, the 仃 can also be executed. Specifically, the seatpost d, YPd2) obtained by S03 and S05, and the seat (X..., YPb2) of the tip end portion of the probe 81 and the seat (X..., YPb2) of the tip end of the probe 81 are obtained. The position of the vertical axis of the bl ± XP XP XP XP XP XP XP XP XP XP XP XP XP XP XP 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直The probe card is flat at the position of the vertical axis/X-axis direction/γ-axis direction of the ten-probe 81. 隹-moving 'execution test pad and 丄 white 7 position sealing. Thereby, it is possible to more positionally bias the operation time of the X TCP and the probe card 8 with only one offset correction. Furthermore, in the above embodiment, the needle card 8 is moved to perform TCP and the probe card card platform 7 so that the probe is not aligned with the vertical alignment, but the present invention is carried out by the propulsion platform 4 The movement of the propulsion unit 3/handling-5 is performed by the probe card platform 7/the table 4 moving the propulsion unit_wood needle card 8 and being carried out by both the advancement 兀3/the conveyance belt 5. INDUSTRIAL APPLICABILITY The present invention can be used for a connection terminal for accurately performing a measurement unit (:: positioning of a terminal of an initial setting unit terminal) during winding, and taking a picture outside Description: Figure 1 shows the front and back of the similar test device using the hair device. 2l92-9453-PF; Ahddub 200902423 Figure 2 is a side view of the same type of tape and reel package . Figure 3 is a plan view of the tape and reel package of the same embodiment. The propulsion platform of the advancement unit of the processor Fig. 4 is a plan view of the probe deck of the tape and reel package processor of the same embodiment. The probe card of the processor is shown in Fig. 5. Fig. 5 is a front view of the tape and reel package of the same embodiment. f Figures 6(a) and 6(b) are side views of the propulsion unit, probe card and camera in a tape and reel package processor of the same type. Fig. 7A is a flowchart (1) of the initial operation of the tape and reel type package processor of the same embodiment. Fig. 7B is a flowchart showing the operation of the initial setting of the tape and reel type package processor of the same embodiment (the second). The initial setting of the device is shown in Fig. 7C as a flow chart of the timing of the tape and tape package processing in the same embodiment (the third). [Main component symbol description] 1 ~ tcp test device; 3 ~ propulsion unit; 5 ~ carrier belt; 7 ~ probe card platform; 1 〇 ~ test head; 21 ~ roll out of the car by; 2 ~ tape and tape package processing 4~Advance platform; 6b~2nd camera (photographing device); 6d~4th camera (2nd camera); 8~probe card (measurement unit); take-up reel; 2192-9453-PF; Ahddub 26 200902423 Roller 24a~ Tape Guide; 23a, 23b, 23c~24b~ Tape Guide; 25a~ Rollout Limit Roller 2 5 b~Inside Secondary Sprocket; 2 5 c ~ Inside Rail Roller 2 5 e~Outside Secondary sprocket; 2 5 d ~ outer rail roller 5 b protective tape; 25 ί ~ winding limit roller 81 ~ probe (connection terminal). 2192-9453-PF; Ahddub 27