JPWO2008126173A1 - TCP handling equipment - Google Patents

Abstract

The carrier tape 5 on which a plurality of TCPs are formed is conveyed, the carrier tape 5 is pressed against the probe card 8 having a plurality of probes 81 electrically connected to the test head 10, and the TCP test pad is probed. In the TCP handler 2 capable of sequentially testing a plurality of TCPs by being connected to 81, a camera 6d that can be inserted between the carrier tape 5 and the probe card 8 is provided, and the carrier tape 5 is provided by the camera 6d. The upper TCP test pad) and the tip of the probe 81 of the probe card 8 are photographed. As a result, the distal end portion of the probe 81 can be directly photographed, so that the alignment between the TCP test pad and the probe 81 of the probe card 8 can be performed very accurately.

Description

  The present invention summarizes devices manufactured by TCP (Tape Carrier Package) and COF (Chip On Film) (hereinafter, TCP, COF, and other TAB (Tape Automated Bonding) mounting technologies, which are one type of IC devices. Is related to a TCP handling device used for testing.

  In the manufacturing process of electronic components such as IC devices, an electronic component testing apparatus that tests the performance and functions of the finally manufactured IC devices and devices in its intermediate stage is necessary. In the case of TCP, A test apparatus for TCP is used.

  A test apparatus for TCP is generally composed of a tester body, a test head, and a TCP handling apparatus (hereinafter also referred to as “TCP handler”). This TCP handler transports a carrier tape on which a plurality of TCPs are formed on a tape (including the concept of film; the same applies hereinafter), and the carrier tape is attached to a probe of a probe card that is electrically connected to a test head. Is pressed, and a test pad of TCP is brought into contact with the probe, whereby a plurality of TCPs are sequentially subjected to a test.

  By the way, in order to perform a test efficiently and accurately using a TCP handler, it is necessary to reliably contact the TCP test pad and each probe of the probe card.

  For this reason, when using a TCP handler, the TCP handler should be initialized in advance so that the TCP test pad and each probe of the probe card can be contacted with each other before the actual operation and testing. And registering the settings.

  The initial setting of the TCP handler is performed as follows, for example. First, the TCP is transported to the test position, and the transported TCP is held by the pusher unit. Then, the pusher unit is moved to a height at which the TCP can be clearly recognized by the camera, the TCP test pad is photographed by the camera, and the image is displayed on the monitor. The operator looks at the monitor and visually grasps the rotation angle of the TCP. Next, in order to clearly recognize the probe of the probe card by the camera, the pusher unit is moved to a height at which TCP cannot be clearly recognized by the camera, and then the probe of the probe card is photographed by the camera and the image is displayed on the monitor. indicate. The operator rotates the probe card stage by manual operation while watching the monitor, and adjusts the rotation angle of the probe card with respect to the rotation angle of the TCP. Then, the pusher unit is moved to a height at which the TCP can be clearly recognized by the camera together with the probe. The operator moves the probe card stage in the X-axis direction and / or the Y-axis direction by manual operation while watching the monitor, and confirms that all the TCP test pads can contact the probe of the probe card. The position set in this way is registered as an initial setting.

  The camera that photographs the probe of the probe card is installed below the probe card due to space problems in the TCP handler. However, the probe is provided on the upper side of the probe card (on the carrier tape side), and the tip of the probe that contacts the TCP test pad is positioned so as to face the carrier tape. Once placed, the tip of the probe cannot be imaged.

  Therefore, it is difficult to accurately grasp the position of the tip of the probe, and it is difficult to accurately align the TCP test pad and the probe of the probe card. If the alignment between the TCP and the probe is not accurate, it may cause contact failure, contact resistance instability, short-circuit between adjacent pins, and the like during actual operation.

  The present invention has been made in view of such a situation, and an object of the present invention is to provide a TCP handling device capable of accurately aligning a connection terminal of a measurement unit and an external terminal of a TCP.

  In order to achieve the above object, the present invention is directed to a measurement unit (for example, a probe card) having a plurality of connection terminals that are electrically connected to a test head by transporting a carrier tape on which a plurality of TCPs are formed. A TCP handling device capable of sequentially applying a plurality of TCPs to a test by pressing a carrier tape and connecting an external terminal of the TCP to a connection terminal of the measurement unit, the carrier tape, the measurement unit, One or two or more imaging devices that can be positioned between the predetermined positions on the carrier tape (for example, one or a plurality of external terminals, a predetermined mark, a part of the device, etc.) by the imaging device. Provided is a TCP handling device capable of photographing the connection terminal of the measurement unit or the tip of the posture needle (Invention 1).

  According to the above invention (Invention 1), since the connection terminal of the measurement unit or the tip of the posture needle can be photographed from the carrier tape side, the contact portion of the connection terminal with the carrier tape or the tip of the posture needle Can be directly captured, and the position information thereof can be obtained with high accuracy. Further, since a predetermined part on the carrier tape can be photographed from a position close to the carrier tape, position information on the predetermined part can be obtained with high accuracy. Therefore, it is possible to accurately align the connection terminal of the measurement unit and the external terminal of the TCP.

  In the above invention (Invention 1), the TCP handling device further includes a measuring unit moving device capable of moving the measuring unit and / or a tape moving device capable of changing the position of the carrier tape with respect to the measuring unit. The imaging device captures a predetermined part on the carrier tape to acquire coordinate data of the predetermined part, and photographs the connection terminal of the measurement unit or the tip of the posture needle. The positional deviation between the external terminal of the TCP and the tip of the connection terminal is obtained from the coordinate data of the predetermined part of the TCP obtained and the coordinate data of the tip of the obtained connection terminal or posture needle. An amount is obtained, and based on the displacement amount, the measuring unit moving device and / or the tape moving device is used to measure the measuring unit. Beauty / or by moving the carrier tape, it is preferable to carry out the positioning of the connecting terminal to an external terminal of the TCP (invention 2).

  According to the said invention (invention 2), position alignment of the connection terminal with respect to the external terminal of TCP can be performed automatically and correctly.

  In the said invention (invention 1), it is preferable that the said imaging device can acquire the distance information between the said imaging device and the connection terminal of the said measurement part, or the front-end | tip part of a posture needle | hook (invention 3). According to this invention (Invention 3), it is possible to determine the level of the measurement unit.

  In the said invention (invention 3), the said TCP handling apparatus is further equipped with the level adjustment mechanism which adjusts the level of the said measurement part, and controls the said level adjustment mechanism based on the acquired distance information (Invention 4) According to this invention (invention 4), it is possible to automatically adjust the level of the measuring unit.

  In the said invention (invention 1), it is preferable that the said imaging device can acquire the deformation | transformation information (information, such as a tip bending of a connection terminal) of the connection terminal of the said measurement part (invention 5). According to the imaging apparatus, since the tip of the connection terminal of the measurement unit can be directly photographed, information on whether or not the tip of the connection terminal is deformed can be acquired. As a result, it is not necessary to remove the measurement unit from the test head one by one and visually determine the bent end of the connection terminal.

  In the said invention (invention 1), the said imaging device is not located between the said carrier tape and the said measurement part at the time of non imaging | photography, and is inserted between the said carrier tape and the said measurement part at the time of imaging | photography. Is preferred (Invention 6).

  In the said invention (invention 1), as said imaging device, the TCP imaging device which image | photographs the predetermined site | part on the said carrier tape, and the connection terminal imaging device which image | photographs the connection terminal of the said measurement part, or the front-end | tip part of a posture needle | hook. It may be provided (invention 7), or may be provided with one imaging device that simultaneously images a predetermined part on the carrier tape and the connection terminal of the measurement unit or the tip of the posture needle (invention). 8) Taking an image of a predetermined part on the carrier tape and a connection terminal of the measuring unit or a tip of the posture needle by reversing the imaging device itself or switching an optical path in the imaging device. One imaging device that can be used may be provided (invention 9).

  In the above invention (Invention 1), the predetermined portion on the carrier tape may be an external terminal of the TCP on the carrier tape (Invention 10), or an alignment attached to the carrier tape (including TCP). It may be a mark (Invention 11).

  In the above invention (Invention 1), photographing of the tip of the connection terminal of the measurement unit during actual operation of the TCP handling device is based on a contact error between the TCP under test and the connection terminal or a decrease in the contact rate as an index. It may be performed (Invention 12), or may be performed periodically using the number of tests as an index (Invention 13).

  In the said invention (invention 1), the said TCP handling apparatus is further provided with the 2nd imaging device under the said measurement part, and during the actual operation of the said TCP handling apparatus, by the said 2nd imaging device, You may make it image | photograph the predetermined part on the said carrier tape and / or the connection terminal or attitude | position needle | hook of the said measurement part (invention 14).

  The imaging device needs to be inserted between the carrier tape and the measurement unit, or withdrawn from between the carrier tape and the measurement unit. If this is done during actual operation, the throughput may decrease. However, since the second imaging device does not require such movement, it is possible to prevent a decrease in throughput.

  According to the TCP handling device of the present invention, alignment between the connection terminal of the measurement unit and the external terminal of the TCP can be performed very accurately.

FIG. 1 is a front view showing a TCP test apparatus using a TCP handler according to an embodiment of the present invention. FIG. 2 is a side view of the pusher unit in the TCP handler according to the embodiment. FIG. 3 is a plan view of a pusher stage in the TCP handler according to the embodiment. FIG. 4 is a plan view of the probe card stage in the TCP handler according to the embodiment. FIG. 5 is a front view of the probe card stage in the TCP handler according to the embodiment. 6A and 6B are side views of the pusher unit, the probe card, and the camera in the TCP handler according to the embodiment. FIG. 7A is a flowchart (part 1) showing an operation at the time of initial setting of the TCP handler according to the embodiment. FIG. 7B is a flowchart (part 2) illustrating the operation at the time of initial setting of the TCP handler according to the embodiment. FIG. 7C is a flowchart (part 3) illustrating the operation at the time of initial setting of the TCP handler according to the embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 TCP test apparatus 2 TCP handler 3 Pusher unit 4 Pusher stage 5 Carrier tape 6b 2nd camera (imaging apparatus)
6d 4th camera (2nd imaging device)
7 Probe card stage 8 Probe card (measurement unit)
81 Probe (connection terminal)
10 Test head

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a front view showing a TCP testing apparatus using a TCP handler according to an embodiment of the present invention, FIG. 2 is a side view of a pusher unit in the TCP handler according to the embodiment, and FIG. FIG. 4 is a plan view of a pusher stage in the TCP handler according to the embodiment, FIG. 4 is a plan view of a probe card stage in the TCP handler according to the embodiment, and FIG. 5 is a plan view of the TCP handler according to the embodiment. It is a front view of a probe card stage, and Drawing 6 (a) and (b) is a side view of a pusher unit, a probe card, and a camera in a TCP handler concerning the embodiment.

  First, an overall configuration of a TCP test apparatus including a TCP handler according to an embodiment of the present invention will be described. The TCP test apparatus 1 includes a tester main body (not shown), a test head 10 electrically connected to the tester main body, and a TCP handler 2 provided on the upper side of the test head 10.

  The TCP handler 2 sequentially attaches a plurality of TCPs formed on the carrier tape 5 to the test. In the present embodiment, the TCP handler 2 is assumed to be attached to the test for simplification of explanation. However, the present invention is not limited to this, and a plurality of TCPs arranged in the series direction and / or the parallel direction on the carrier tape 5 may be subjected to the test simultaneously.

  The TCP handler 2 includes an unwinding reel 21 and a take-up reel 22, and a carrier tape 5 before the test is wound on the unwinding reel 21. The carrier tape 5 is unwound from the unwinding reel 21 and is wound around the winding reel 22 after being subjected to the test.

  Between the unwinding reel 21 and the take-up reel 22, three spacer rolls 23 a, 23 b, and 23 c are provided that bridge the protective tape 51 peeled from the carrier tape 5 from the unwinding reel 21 to the take-up reel 22. ing. Each spacer roll 23a, 23b, 23c is vertically movable so that the tension of the protective tape 51 can be adjusted.

  A tape guide 24a, an unwinding limit roller 25a, an in-side sub sprocket 25b, and an in-side guide roller 25c are provided below the unwinding reel 21, and the carrier tape 5 unwound from the unwinding reel 21 is While being guided by the tape guide 24a, it is conveyed to the pusher unit 3 through the unwinding limit roller 25a, the in-side sub sprocket 25b, and the in-side guide roller 25c.

  A tape guide 24b, a take-up limit roller 25f, an out-side sub-sprocket 25e, and an out-side guide roller 25d are provided below the take-up reel 22, and the carrier tape 5 after being subjected to the test is After being guided by the tape guide 24b through the side guide roller 25d, the out-side sub sprocket 25e, and the take-up limit roller 25f, the take-up reel 22 is wound.

  A pusher unit 3 is provided between the in-side guide roller 25c and the out-side guide roller 25d.

  As shown in FIGS. 1 and 2, a servo motor 31 capable of rotating a ball screw 32 is attached to a frame (pusher frame) 36 of the pusher unit 3 via a bracket 361, and the ball screw 32. The pusher main body 33 is engaged with two linear motion guides (hereinafter referred to as “LM guides”) 37 in the Z-axis direction. The pusher body 33 is movable in the vertical direction (Z-axis direction) while being guided by the linear motion guide 37 by driving the servo motor 31.

A suction plate 34 that is connected to a negative pressure source (not shown) and can suck and hold the carrier tape 5 is provided at the lower end of the pusher body 33.
A tension sprocket 35a is provided on the front side (left side in FIG. 1) of the pusher main body 33, and a main sprocket 35b is provided on the rear side (right side in FIG. 1) of the pusher main body 33. The carrier tape 5 is held with a desired tension.

  As shown in FIGS. 2 and 3, the pusher stage 4 is installed on the back side of the pusher body 33 in the pusher frame 36 so as to be placed on the base 38, and is a turntable for the pusher stage 4. The top table 48 is fixed to the pusher frame 36.

  On the base 40 of the pusher stage 4, a servo motor 41a for rotating a ball screw 42a having an axis in the X-axis direction, a servo motor 41b for rotating a ball screw 42b having an axis in the Y-axis direction, and a Y-axis direction A servo motor 41c that rotates a ball screw 42c having a shaft is provided, and the servo motor 41b and the servo motor 41c are located at both ends on the base 40, respectively.

  A sliding block 44a that is guided by LM guides 43a and 43a in the X-axis direction and that can slide in the X-axis direction is screwed into the ball screw 42a. A sliding plate 46a is attached to the sliding block 44a via a Y-axis LM guide 45a so as to be slidable in the Y-axis direction. A rotating member 47a having a roller ring inside is fixed to the upper side of the sliding plate 46a, and the rotating member 47a is rotatably attached to the top table 48.

  A sliding block 44b that is guided by LM guides 43b and 43b in the Y-axis direction and is slidable in the Y-axis direction is screwed into the ball screw 42b. A sliding plate 46b is attached to the sliding block 44b so as to be slidable in the X-axis direction via an LM guide 45b in the X-axis direction. A rotating member 47b having a roller ring inside is fixed on the upper side of the sliding plate 46b, and the rotating member 47b is rotatably attached to the top table 48.

  A sliding block 44c that is guided by LM guides 43c, 43c in the Y-axis direction and that can slide in the Y-axis direction is screwed into the ball screw 42c. A sliding plate 46c is attached to the sliding block 44c so as to be slidable in the X-axis direction via an LM guide 45c in the X-axis direction. A rotating member 47c having a roller ring inside is fixed on the upper side of the sliding plate 46c, and the rotating member 47c is rotatably attached to the top table 48.

  In the pusher stage 4 having such a configuration, the servo motor 41a is driven to slide the sliding block 44a, the sliding plate 46b, and the sliding plate 46c in the X-axis direction, so that the top table 48 is moved to the X direction. It can be moved in the axial direction. In addition, the top table 48 is moved in the Y-axis direction by driving the servo motor 41b and the servo motor 41c to slide the sliding block 44b, the sliding block 44c, and the sliding plate 46a in the same Y-axis direction. be able to. Furthermore, the servo motor 41a is driven to slide the sliding block 44a in the X-axis direction, and the servo motor 41b and the servo motor 41c are driven so that the sliding block 44b and the sliding block 44c are mutually connected to the Y axis. The top table 48 can be rotated about its vertical axis by sliding in the opposite direction and rotating each rotating member 47a, 45b, 45c. According to the pusher stage 4 as described above, the pusher unit 3 can be moved in the X-axis-Y-axis directions and rotated around the vertical axis.

  On the other hand, as shown in FIG. 1, a probe card stage 7 on which a probe card 8 is mounted is installed below the pusher unit 3 and above the test head 10. Here, the probe card stage 7 includes a type that can be moved and controlled by a motor drive mechanism and a type that has only a manual adjustment function. In this embodiment, the probe card stage 7 has a motor drive mechanism.

  4 and 5, on the base 71 of the probe card stage 7, a servo motor 711 that rotates a ball screw 712 having an axis in the X-axis direction, and four LM guides 713 in the X-axis direction, Is provided. On these four LM guides 713, rectangular X bases 72 are provided that are guided by the LM guides 713 so as to be slidable in the X-axis direction. A threaded portion 721 into which a ball screw 712 is threaded is formed on one side of the X base 72.

  On the X base 72, a servo motor 722 for rotating a ball screw 723 having an axis in the Y-axis direction and two LM guides 724 in the Y-axis direction are provided. On these two LM guides 724, a rectangular Y base 73 is provided that is slidably guided in the Y-axis direction by the LM guides 724. A threaded portion 731 into which a ball screw 723 is threaded is formed on one side of the Y base 73.

  On the Y base 73, a servo motor 732 that rotates a ball screw 733 having an axis in the Y-axis direction and a connection ring 734 that rotatably supports the card ring 735 are provided. A part of the card ring 735 is formed with a threaded portion 736 into which the ball screw 733 is threaded. The probe card 8 is detachably attached to the card ring 735 by four pins 82.

  In the probe card stage 7 having such a configuration, by driving the servo motor 711, the X base 72, and hence the probe card 8, can be moved in the X-axis direction, and by driving the servo motor 722, The Y base 73 and thus the probe card 8 can be moved in the Y-axis direction. Further, by driving the servo motor 732 to rotate the ball screw 733 and moving the screwing portion 736, the card ring 735 and the probe card 8 can be rotated around the vertical axis. The TCP handler 2 includes a control device that can automatically control the drive of the servo motors 711, 722, and 732, thereby automatically moving the probe card 8 around the X axis direction, the Y axis direction, and the vertical axis. Can be moved.

  Although not shown, the base 71 of the probe card stage 7 is provided with a leveling adjustment mechanism for adjusting the level of the probe card stage 7 (probe card 8). In the present embodiment, it is assumed that the leveling adjustment mechanism can be automatically controlled by inputting an external signal. Such a leveling adjustment mechanism can be configured by, for example, legs provided at the bottom four corners of the base 71 and movable up and down by motor drive.

  As shown in FIGS. 4 to 6, the probe card 8 includes a plurality of probes 81, and each probe 81 is electrically connected to the tester body via the test head 10. The tip of each probe 81 rises in the direction of the carrier tape 5, and the tip of the probe 81 is a contact portion with the TCP test pad.

  As shown in FIG. 1, the first camera 6 a is on the front side of the pusher unit 3 (left side in FIG. 1), the second camera (imaging device) 6 b is on the lower side of the test head 10, and the rear side of the pusher unit 3 ( A third camera 6c is provided on the right side in FIG. As shown in FIGS. 1 and 6, a fourth camera 6 d is provided between the pusher unit 3 and the probe card 8. The test head 10 is provided with a gap through which the second camera 6b can photograph the TCP test pad and the probe 81 of the probe card 8.

  A mark punch 26a and a reject punch 26b are provided between the pusher unit 3 and the third camera 6c. The mark punch 26a is one in which one or a plurality of holes are formed at a predetermined position for the corresponding TCP based on the test result, and the reject punch 26b is a TCP that is determined to be a defective product as a result of the test. It is something that punches out.

  Each camera 6a, 6b, 6c, 6d causes the display device 9 to display images taken by these cameras so that the operator can visually recognize them. The display device 9 includes an image processing unit and a monitor that displays images taken by the cameras 6a, 6b, 6c, and 6d.

  Among the above cameras, the first camera 6a and the third camera 6c are for judging the presence or absence of TCP on the carrier tape 5 and the position and number of holes by the mark punch 26a. On the other hand, the second camera 6b and the fourth camera 6d are for acquiring positional deviation information between the TCP and the probe card 8, and can acquire positional deviation information for a plurality of objects in the field of view. ing.

  The second camera 6b is mounted on the camera stage 61, and can be moved in the vertical and horizontal directions (X-axis / Y-axis direction) and in the vertical direction (Z-axis direction) in plan view by an actuator of the camera stage 61. . The second camera 6b is moved in the vertical and horizontal directions (X-axis-Y-axis direction) in plan view, so that the second camera 6b is a plurality of test pads located at positions far away from the TCP and a probe located at positions far away from the probe card 8. 81 can be photographed.

  Further, by moving the second camera 6b in the vertical direction (Z-axis direction), the focal position of the second camera 6b can be changed to focus on a desired portion of the test pad that is an imaging target. Thereby, a clear outline image of the imaging target part can be acquired. Note that the tip of the probe 81 cannot be directly photographed by the second camera 6b.

  As shown in FIGS. 1 and 6, the fourth camera 6 d is attached to the distal end portion of an arm 63 extending from the camera stage 62, and is vertically and horizontally (X-axis− It is movable in the Y axis direction). Therefore, the fourth camera 6 d can be inserted between the carrier tape 5 and the probe 81 and can be withdrawn from between the carrier tape 5 and the probe 81. In addition, the fourth camera 6d moves in the vertical and horizontal directions (X-axis-Y-axis direction) in plan view, so that the fourth camera 6d is located far from the test pads and the probe card 8 that are located far from each other in the TCP. Since a certain probe 81 can be photographed, the amount of positional deviation between the TCP and the probe card 8 can be obtained with better accuracy.

  The fourth camera 6d can simultaneously photograph the upper side and the lower side of the fourth camera 6d. Therefore, when the fourth camera 6d is inserted between the carrier tape 5 and the probe 81, the TCP test pad and the tip of the probe 81 can be simultaneously photographed by the fourth camera 6d. According to the fourth camera 6d, the distal end portion of the probe 81 that cannot be photographed by the second camera 6b can be photographed directly. Therefore, position information (coordinate data) of the distal end portion (contact surface with the test pad) of the probe 81. Can be obtained with high accuracy. Further, since the TCP test pad can be photographed at a position closer to the second camera 6b, the position information (coordinate data) of the test pad can be acquired with high accuracy.

  Since the 4th camera 6d in this embodiment can image the front-end | tip part of the probe 81, based on the image | photographed image, deformation | transformation information, such as a front-end | tip bending of the probe 81, can be acquired. For example, an image of the probe 81 in a normal state that is not deformed is stored as a reference image, and it is determined whether or not the probe 81 is deformed by comparing the photographed image of the probe 81 with the reference image. Is possible.

  In addition, the fourth camera 6d in the present embodiment can acquire distance information between the fourth camera 6d and the tip of the probe 81. The distance information can be acquired by using, for example, an autofocus function of the camera.

  When the fourth camera 6d acquires distance information between the fourth camera 6d and the tips of the plurality of probes 81, the level of the probe card 8 can be determined. For example, the distance between the fourth camera 6d and the probe 81 group located in the X-axis plus direction of the probe card 8 is the distance between the fourth camera 6d and the probe 81 group located in the X-axis minus direction of the probe card 8. If shorter, it can be determined that the probe card 8 is tilted upward in the X-axis plus direction.

  The distance information acquired as described above or the levelness information based on the distance information is output to the levelness adjustment mechanism provided on the base 71 of the probe card stage 7 to control the levelness adjustment mechanism. By doing so, the probe card 8 can be automatically adjusted to a horizontal position.

  Note that the fourth camera 6d in the present embodiment can simultaneously photograph the upper side (carrier tape 5) and the lower side (probe 81), but the present invention is not limited to this, and the camera The camera may be capable of photographing the upper side (carrier tape 5) and the lower side (probe 81) by reversing itself or by switching the optical path in the camera, or the upper side (carrier tape 5). Two cameras may be provided: a camera that shoots the camera and a camera that shoots the lower side (probe 81).

  Next, the usage method and operation of the TCP handler 2 will be described. When the TCP handler 2 is used, the probe card 8 is set so that the tips of all the probes 81 of the probe card 8 are positioned at the center position of the corresponding test pad before the TCP handler 2 is actually operated. It is necessary to make initial settings to move the. That is, when the TCP type is changed, when a TCP of a different production lot is tested, or when the probe card 8 is changed, the TCP test pad and the probe 81 of the probe card 8 are surely in contact with each other. In addition, it is necessary to determine and register the reference position of the X-axis position / Y-axis position / θ rotation angle of the probe card stage 7 (this position is referred to as “registered position”).

7A to 7C are flowcharts showing the initial setting operation of the TCP handler 2.
When the TCP handler 2 starts the initial setting operation, the TCP handler 2 transports the reference TCP to the test position (step S01) and drives the camera stage 62 to move the fourth camera 6d between the carrier tape 5 and the probe card 8. Inserted between them (step S02; FIG. 6B).

  Then, with the fourth camera 6d, a plurality of test pads located at one end of a large number of test pads in the TCP are photographed, and tips of the plurality of probes 81 corresponding to the test pads are photographed (step) S03).

  In the present embodiment, the fourth camera 6d captures a TCP test pad on the upper side, but the present invention is not limited to this, and a predetermined mark attached to the TCP is captured. Alternatively, a characteristic part such as a corner of the package or an alignment mark attached to the carrier tape 5 may be photographed. However, they are provided so as to be associated with the coordinate data of the TCP test pad.

  In the present embodiment, the fourth camera 6d captures the lower side of the tip of the probe 81 of the probe card 8. However, the present invention is not limited to this, and the probe card 8 includes the probe. A plurality of posture hands representing the posture of the card 8 may be provided, and the tip of the posture needle may be photographed. Here, it is assumed that the posture needle is provided so that the distal end portion of the posture needle is associated with the coordinate data of the distal end portion of the probe 81. That is, it is possible to estimate the coordinate data of the distal end portion of the probe 81 by acquiring the coordinate data of the distal end portion of the posture needle.

Based on the image (first upper image) obtained by photographing the upper side of the fourth camera 6d, the image processing unit of the TCP handler 2 has coordinate data (each of the center portions of the plurality of test pads included in the first upper image). X _pd1 , Y _pd1 ) is acquired (step S04). Similarly, the image processing unit of the TCP handler 2 uses each of the tips of the plurality of probes 81 included in the first lower image based on an image (first lower image) obtained by photographing the lower side of the fourth camera 6d. Coordinate data ( _Xpb1 , _Ypb1 ) is acquired (step S04). Note that each coordinate data obtained by this operation is mapped to the coordinate system of the camera stage 62.

  Next, the TCP handler 2 moves the fourth camera 6d by the camera stage 62, and photographs a plurality of test pads located at different end portions of the many test pads in the TCP by the fourth camera 6d. At the same time, the tips of the plurality of probes 81 corresponding to the test pads are photographed (step S05).

Based on an image (second upper image) obtained by photographing the upper side of the fourth camera 6d, the image processing unit of the TCP handler 2 has coordinate data (each of center portions of a plurality of test pads included in the second upper image). X _pd2 , Y _pd2 ) is acquired (step S06). Similarly, the image processing unit of the TCP handler 2 uses each of the tips of the plurality of probes 81 included in the second lower image based on an image (second lower image) obtained by photographing the lower side of the fourth camera 6d. Coordinate data ( _Xpb2 , _Ypb2 ) is acquired (step S06).

Here, the fourth camera 6d is for taking TCP test pad from a position close to the carrier tape 5 (TCP), the coordinate data of the center portion of the test pad _{(X pd1, Y pd1) (} X pd2, Y pd2) Can be obtained with high accuracy. The fourth camera 6d, the tip portion of the probe 81 to shoot (contact surface with the test pad) directly, coordinate data of the contact surface of the probe _{81 (X pb1, Y pb1)} (X pb2, Y pb2) It can be acquired with high accuracy. Thereby, alignment of the TCP test pad and the probe 81 of the probe card 8 can be performed very accurately.

The image processing unit of the TCP handler 2 determines the center part of the test pad included in the first upper image based on the acquired coordinate data (X _pd1 , Y _pd1 ) and (X _pd2 , Y _pd2 ) of the center part of the test pad. And an angle (first angle θ _pd1 ) with a straight line (test pad array) passing through the position coordinates of the center portion of the test pad included in the second upper image and a straight line in the X-axis direction (step 1) S07).

The probe image processing unit of the TCP handler 2, based on the coordinate data coordinate data of the contact surface of the obtained probe 81 _{(X pb1, Y} pb1) and _{(X pb2, Y pb2),} included in the first lower image The angle (second angle θ _pb2 ) between the straight line passing through the position coordinate of the tip of 81 and the position coordinate of the tip of the probe 81 included in the second lower image (array of the probes 81) with the straight line in the X-axis direction. Calculation is performed (step S07).

Then, TCP handler 2 calculates the difference value Δθ of the first angle theta _pd1 and second angle theta _pb2 obtained in step S07 (step S08). If the absolute value of the obtained difference value Δθ is larger than the predetermined value D (step S09, Yes), the TCP handler 2 rotates the probe card stage 7 based on the difference value Δθ (step S10). ) When the absolute value of the difference value Δθ is equal to or smaller than the predetermined value D (step S11, Yes), the rotational movement of the probe card stage 7 is stopped (step S12). On the other hand, when the absolute value of the difference value Δθ is equal to or smaller than the predetermined value D in step S09 (step S09, No), the process proceeds to step S13 without rotating the probe card stage 7.

Next, the TCP handler 2 moves the fourth camera 6d by the camera stage 62, and again images the plurality of probes 81 included in the first lower image by the fourth camera 6d (step S13). Thereby, even if the probe card 8 moves around the vertical axis in step S10 and the target probe 81 is out of the field of view of the fourth camera 6d, it is possible to take an image again. The image processing unit of the TCP handler 2 _acquires the coordinate data (X _pb3 , Y _pb3 ) of the plurality of probes 81 included in the third lower image based on the captured image (third lower image) (steps). S14).

Similarly, the TCP handler 2 moves the fourth camera 6d with the camera stage 62, and again images the tip portions of the plurality of probes 81 included in the second lower image with the fourth camera 6d (step S15). . The image processing unit of the TCP handler 2 acquires the coordinate data (X _pb4 , Y _pb4 ) of the tips of the plurality of probes 81 included in the fourth lower image based on the captured image (fourth lower image). (Step S16).

Then, TCP handler 2, the coordinate data _{(X pd1, Y} pd1) of 2 points of the test pad and _{(X pd2, Y} pd2) and the coordinate data of the two positions of the tip of the probe 81 _{(X pb3, Y} pb3 ) And (X _pb4 , Y _pb4 ), the difference values ΔX, ΔY between the X component and the Y component between the test pad and the contact surface of the probe 81 are calculated (step S17). When the absolute values of the obtained difference values ΔX and ΔY are larger than the predetermined value P (step S18, Yes), the TCP handler 2 moves the probe card stage 7 in the X-axis direction based on the difference values ΔX and ΔY. And / or moving in the Y-axis direction (step S19), and when the absolute value of the difference values ΔX and ΔY becomes equal to or smaller than the predetermined value P (step S20, Yes), the movement of the probe card stage 7 is stopped (step S20). S21), the position of the probe card stage 7 is registered (step S22). On the other hand, if the absolute value of the difference values ΔX and ΔY is equal to or smaller than the predetermined value P in step S18 (No in step S18), the position is registered without moving the probe card stage 7 (step S22). . In addition, it is preferable to image | photograph the front-end | tip part of each probe 81 in this position state with the 4th camera 6d, and memorize | store it as a reference | standard image.

  Then, the camera stage 62 is driven, and the fourth camera 6d is withdrawn from between the carrier tape 5 and the probe card 8 (step S23; FIG. 6A). In this way, the TCP handler 2 finishes the initial setting.

  As described above, according to the TCP handler 2 according to the present embodiment, the alignment between the TCP test pad and the probe 81 of the probe card 8 can be performed automatically and extremely accurately using the characteristic portion 84. Can do. In particular, in the present embodiment, the alignment between the TCP test pad and the probe 81 of the probe card 8 is further performed by sequentially performing the alignment around the vertical axis and the alignment in the X-axis direction and the Y-axis direction separately. Can be done accurately. Therefore, the initial setting of the TCP handler 2 can be performed efficiently in a short time.

  When the above initial setting is completed, the TCP handler 2 starts actual operation. That is, the TCP handler 2 conveys the carrier tape 5 and sequentially applies a plurality of TCPs to the test.

  The TCP handler 2 preferably aligns the TCP test pad and the probe 81 of the probe card 8 even during actual operation. In this case, it is preferable to photograph the TCP test pad and / or the probe 81 of the probe card 8 using the second camera 6b instead of the fourth camera 6d. When using the fourth camera 6d, it is necessary to drive the camera stage 62 for each TCP test to insert the fourth camera 6d between the carrier tape 5 and the probe card 8 or to withdraw from them. This is because the throughput is reduced.

  The TCP handler 2 drives the camera stage 62 and inserts the fourth camera 6d between the carrier tape 5 and the probe card 8 when a contact mistake occurs during actual operation or when the contact rate decreases. Then, the distal end portion of the probe 81 in which the contact error has occurred or the probe 81 in which the contact rate is reduced may be photographed by the fourth camera 6d. It is possible to determine whether or not the probe 81 is deformed by comparing the image acquired by this photographing with the reference image stored at the time of registration. This eliminates the need to remove the probe card 8 from the test head 10 one by one and visually determine the bending of the tip of the probe 81 and the like.

  In addition, you may make it image | photograph the front-end | tip part of the probe 81 in such actual operation regularly by making the frequency | count of a test into a parameter | index. Thereby, it is possible to prevent a contact mistake and a decrease in contact rate.

  The embodiment described above is described for facilitating understanding of the present invention, and is not described for limiting the present invention. Therefore, each element disclosed in the above embodiment is intended to include all design changes and equivalents belonging to the technical scope of the present invention.

  For example, the second camera 6b may be omitted, and alignment may be performed using only the fourth camera 6d. According to such a configuration, it is not necessary to provide a space or a hole in the test head 10 for photographing with the second camera 6b.

Further, for example, in the above embodiment, the alignment of the TCP and the probe card 8 around the vertical axis and the alignment in the plane direction are performed separately, but the present invention is not limited to this, and both May be performed simultaneously. Specifically, the coordinate data (X _pd1 , Y _pd1 ) and (X _pd2 , Y _pd2 ) of the test pad acquired in steps S03 and S05, the coordinate data (X _pb1 , Y _pb1 ) of the tip of the probe 81, and Based on (X _pb2 , Y _pb2 ), the amount of positional deviation about the vertical axis and the amount of positional deviation in the X-axis direction and the Y-axis direction are obtained, and the probe card stage 7 is moved to the vertical axis based on these positional deviation amounts. The test pad and the probe 81 may be aligned by moving in the rotation / X-axis direction / Y-axis direction. Thereby, the work time for correcting the misalignment between the TCP and the probe card 8 is further shortened.

  Furthermore, in the above embodiment, the TCP and the probe card 8 are aligned by the movement of the probe card 8 by the probe card stage 7. However, the present invention is not limited to this, and the pusher by the pusher stage 4 is used. The movement may be performed by the movement of the unit 3 and the carrier tape 5, or may be performed by both the movement of the probe card 8 by the probe card stage 7 and the movement of the pusher unit 3 and the carrier tape 5 by the pusher stage 4. .

  INDUSTRIAL APPLICABILITY The present invention is useful for accurately performing alignment work between a connection terminal of a measurement unit (probe card) and an external terminal of a TCP at the time of initial setting of a TCP handling device.

Claims (14)

Transporting the carrier tape on which a plurality of TCPs are formed, pressing the carrier tape against the measurement unit having a plurality of connection terminals electrically connected to the test head, and connecting the external terminals of the TCP to the measurement unit A TCP handling device capable of sequentially attaching a plurality of TCPs to a test by connecting to a terminal,
Comprising one or more imaging devices that can be positioned between the carrier tape and the measuring section;
A TCP handling device characterized in that the imaging device can photograph a predetermined portion on the carrier tape and a connection terminal of the measurement unit or a tip of a posture needle. The TCP handling device further includes a measuring unit moving device that can move the measuring unit and / or a tape moving device that can change the position of the carrier tape with respect to the measuring unit,
The imaging device captures a predetermined portion on the carrier tape to acquire coordinate data of the predetermined portion, and also captures the connection terminal of the measurement unit or the tip of the posture needle to obtain the coordinate data of the tip. Acquired,
From the acquired coordinate data of the predetermined part of the TCP and the acquired coordinate data of the connection terminal or the tip of the posture needle, the amount of positional deviation between the external terminal of the TCP and the tip of the connection terminal is obtained,
Based on the amount of displacement, the measuring unit and / or the carrier tape is moved by the measuring unit moving device and / or the tape moving device, and the connection terminal is aligned with the external terminal of the TCP. The TCP handling device according to claim 1.   The TCP handling device according to claim 1, wherein the imaging device can acquire distance information between the imaging device and a connection terminal of the measurement unit or a distal end portion of a posture needle. The TCP handling device further includes a leveling adjustment mechanism for adjusting the leveling of the measurement unit,
4. The TCP handling apparatus according to claim 3, wherein the horizontality adjusting mechanism is controlled based on the acquired distance information.   The TCP handling device according to claim 1, wherein deformation information of a connection terminal of the measurement unit can be acquired by the imaging device.   2. The imaging device according to claim 1, wherein the imaging device is not positioned between the carrier tape and the measurement unit during non-photographing, and is inserted between the carrier tape and the measurement unit during photographing. The TCP handling device described.   The imaging apparatus includes: a TCP imaging apparatus that images a predetermined part on the carrier tape; and a connection terminal imaging apparatus that images a connection terminal of the measurement unit or a tip of a posture needle. Item 2. The TCP handling device according to Item 1.   2. The imaging device according to claim 1, wherein the imaging device includes one imaging device configured to simultaneously photograph a predetermined portion on the carrier tape and a connection terminal of the measurement unit or a distal end portion of the posture needle. TCP handling device.   As the imaging device, when the imaging device itself is reversed or the optical path in the imaging device is switched, a predetermined part on the carrier tape and the connection terminal of the measurement unit or the tip of the posture needle are each photographed. The TCP handling device according to claim 1, further comprising: an imaging device that can perform the operation.   2. The TCP handling device according to claim 1, wherein the predetermined part on the carrier tape is an external terminal of the TCP on the carrier tape.   2. The TCP handling device according to claim 1, wherein the predetermined part on the carrier tape is an alignment mark attached to the carrier tape.   The imaging of the tip of the connection terminal of the measurement unit during actual operation of the TCP handling device is performed using a contact error between the TCP under test and the connection terminal or a decrease in the contact rate as an index. 2. The TCP handling apparatus according to 1.   2. The TCP handling device according to claim 1, wherein the photographing of the tip of the connection terminal of the measurement unit during the actual operation of the TCP handling device is periodically performed using the number of tests as an index. The TCP handling device further includes a second imaging device below the measurement unit,
The said 2nd imaging device image | photographs the predetermined | prescribed site | part on the said carrier tape and / or the connection terminal or the attitude | position needle | hook of the said measurement part during the actual operation of the said TCP handling apparatus. TCP handling device.

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