JP5047188B2 - TCP handling apparatus and connection terminal positioning method in the apparatus - Google Patents

Description

  The present invention summarizes devices manufactured by TCP (Tape Carrier Package) and COF (Chip On Film) (hereinafter, TCP, COF, and other TAB (Tape Automated Bonding) mounting technologies, which are one type of IC devices. It is related with the TCP handling apparatus used for testing ", and the positioning method of the connection terminal in the said apparatus."

  In the manufacturing process of electronic components such as IC devices, an electronic component testing apparatus that tests the performance and functions of the finally manufactured IC devices and devices in its intermediate stage is necessary. In the case of TCP, A test apparatus for TCP is used.

  A test apparatus for TCP is generally composed of a tester body, a test head, and a TCP handling apparatus (hereinafter also referred to as “TCP handler”). This TCP handler transports a carrier tape on which a plurality of TCPs are formed on a tape (including the concept of film; the same applies hereinafter), and the carrier tape is attached to a probe of a probe card that is electrically connected to a test head. Is pressed, and a test pad of TCP is brought into contact with the probe, whereby a plurality of TCPs are sequentially subjected to a test.

  By the way, in order to perform a test efficiently and accurately using a TCP handler, it is necessary to reliably contact the TCP test pad and each probe of the probe card.

  For this reason, when using a TCP handler, the TCP handler should be initialized in advance so that the TCP test pad and each probe of the probe card can be contacted with each other before the actual operation and testing. And registering the settings.

  The initial setting of the TCP handler is performed as follows, for example. First, the TCP is transported to the test position, and the transported TCP is held by the pusher unit. Then, the pusher unit is moved to a height at which the TCP can be clearly recognized by the camera, the TCP test pad is photographed by the camera, and the image is displayed on the monitor. The operator looks at the monitor and visually grasps the rotation angle of the TCP. Next, in order to clearly recognize the probe of the probe card by the camera, the pusher unit is moved to a height at which TCP cannot be clearly recognized by the camera, and then the probe of the probe card is photographed by the camera and the image is displayed on the monitor. indicate. The operator rotates the probe card stage by manual operation while watching the monitor, and adjusts the rotation angle of the probe card with respect to the rotation angle of the TCP. Then, the pusher unit is moved to a height at which the TCP can be clearly recognized by the camera together with the probe. The operator moves the probe card stage in the X-axis direction and / or the Y-axis direction by manual operation while watching the monitor, and confirms that all the TCP test pads can contact the probe of the probe card. The position set in this way is registered as an initial setting.

  By the way, the camera which images the probe of the probe card is installed on the lower side of the probe card due to a space problem in the TCP handler. However, since the contact surface of the probe with respect to the TCP test pad is located on the upper side of the probe card, the above-mentioned camera cannot photograph the contact surface of the probe. Therefore, the position of the contact surface of the probe (the true position of the probe) cannot be grasped, and it is difficult to accurately align the TCP test pad and the probe of the probe card. If the alignment between the TCP and the probe is not accurate, it may cause contact failure, contact resistance instability, short-circuit between adjacent pins, and the like during actual operation.

  The present invention has been made in view of such a situation, and a TCP handling device capable of accurately performing alignment between a connection terminal of a measurement unit and an external terminal of a TCP, and alignment processing in the TCP handling device It is an object of the present invention to provide a method capable of accurately performing the above.

  In order to achieve the above object, first, the present invention is a measurement unit (for example, a probe card) that transports a carrier tape on which a plurality of TCPs are formed and has a plurality of connection terminals that are electrically connected to a test head. ) Is a TCP handling device capable of sequentially attaching a plurality of TCPs to a test by pressing the carrier tape against the terminal and connecting the external terminals of the TCP to the connection terminals of the measurement unit. The measuring unit moving device that can be operated and / or the tape moving device that can change the position of the carrier tape with respect to the measuring unit, and the measuring unit provided in association with the positional information of the contact surface of the connection terminal of the measuring unit Photographing a specified feature and a predetermined part of a TCP under test (for example, one or a plurality of external terminals, a predetermined mark, a part of a device, etc.) An imaging device capable of imaging the predetermined part of the TCP under test to obtain coordinate data of the predetermined part, and photographing the characteristic part of the measurement unit to obtain the coordinates of the characteristic part. Obtaining data, estimating the position information of the contact surface of the connection terminal of the measurement unit from the coordinate data of the characteristic part, the coordinate data of the acquired predetermined part of the TCP under test and the contact surface of the estimated connection terminal A positional deviation amount between the external terminal of the TCP under test and the contact surface of the connection terminal is obtained from the positional information, and the measuring unit is measured by the measuring unit moving device and / or the tape moving device based on the positional deviation amount. And / or moving the carrier tape to position the connection terminal with respect to the external terminal of the TCP under test. (Invention 1).

  The contact surface of the connection terminal of the measuring unit is usually difficult to photograph with an imaging device. However, according to the above invention (Invention 1), the contact of the connection terminal via the coordinate data of the photographable feature part. Since the position information of the surface can be estimated with high accuracy, alignment between the external terminal of the TCP and the connection terminal of the measurement unit can be performed extremely accurately. Therefore, when using the TCP handling device, the initial setting can be efficiently performed in a short time.

  In the said invention (invention 1), the said measurement part moving apparatus can move the said measurement part to the plane direction, The said tape movement apparatus is a plane direction of the carrier tape with respect to the said measurement part. The measuring unit moving device can move the measuring unit about its vertical axis, and the tape moving device can be Although the carrier tape may be moved around the vertical axis of the plane including the carrier tape with respect to the measurement unit (invention 3), the measurement unit moving device may be configured to move the measurement unit in the plane direction. The tape moving device includes a carrier tape with respect to the measurement unit in a plane direction and the carrier tape. It is preferable that can be moved about a vertical axis of the plane (Invention 4).

  In the above invention (invention 4), first, coordinate data of a predetermined part of the TCP under test is acquired, coordinate data of a characteristic part of the measurement unit is acquired, and the measurement is performed from the coordinate data of the characteristic part. The position information of the contact surface of the connection terminal of the part is estimated, and the external terminal of the TCP under test and the connection are determined from the acquired coordinate data of the predetermined part of the TCP under test and the position information of the estimated contact surface of the connection terminal. The amount of positional deviation about the vertical axis with respect to the contact surface of the terminal is obtained, and the measuring unit and / or the carrier tape is moved by the measuring unit moving device and / or the tape moving device based on the amount of positional deviation about the vertical axis. Move around the vertical axis, and secondly, acquire the coordinate data of the feature of the measurement unit again, and estimate the position information of the contact surface of the connection terminal of the measurement unit from the coordinate data of the feature From the obtained coordinate data of the predetermined part of the TCP under test and the estimated position information of the contact surface of the connection terminal, the amount of positional deviation in the planar direction between the external terminal of the TCP under test and the contact surface of the connection terminal is calculated. It is preferable to move the measuring unit and / or the carrier tape in the plane direction by the measuring unit moving device and / or the tape moving device based on the displacement amount in the planar direction (Invention 5).

  According to the above invention (invention 5), the alignment between the TCP and the measurement unit can be more accurately performed by sequentially performing the alignment around the vertical axis and the alignment in the plane direction separately.

  In the above invention (Invention 1), the imaging device captures coordinate data of two or more predetermined parts by photographing two or more predetermined parts (especially two or more parts apart) of the TCP under test. Preferably, the coordinate data of two or more feature parts is acquired by photographing two or more feature parts (especially two or more parts separated from each other) of the measurement part (Invention 6). According to this invention (invention 6), the position of the external terminal and the characteristic portion can be specified with higher accuracy than in the case of acquiring coordinate data at only one place.

  In the above invention (invention 6), the amount of positional deviation about the vertical axis between the external terminal of the TCP under test and the contact surface of the connection terminal of the measuring unit is coordinate data of two or more predetermined portions of the TCP under test. Of the second straight line obtained from the position information of two or more locations of the contact surface of the connection terminal of the measurement unit based on the angle of the first straight line obtained from the coordinate data of two or more locations of the characteristic portion of the measurement unit It can preferably be determined from the difference from the angle (Invention 7).

  In the said invention (invention 6), the said TCP handling apparatus is further provided with the imaging device movement apparatus which can move the said imaging device, and the said imaging device is two or more places by the movement by the said imaging device movement apparatus It is preferable to photograph a predetermined part of the TCP under test and two or more characteristic parts of the measurement part (invention 8). According to this invention (invention 8), since the imaging device can capture a plurality of parts of the predetermined part that are far from each other and a plurality of parts of the feature part that are far from each other, the positional deviation between the TCP and the measurement part The amount can be determined with higher accuracy, and the alignment between the TCP and the measurement unit can be performed more accurately.

  In the said invention (invention 1), it is preferable that the said characteristic part is linked | related with the positional information on the contact surface of the some connection terminal in the said measurement part (invention 9). According to this invention (invention 9), the position information of the contact surface of the connection terminal in the entire measurement unit can be obtained with higher accuracy compared to the case where the characteristic portion is associated with the position information of the contact surface of only one connection terminal. Can be estimated.

  Secondly, the present invention conveys a carrier tape on which a plurality of TCPs are formed, presses the carrier tape against a measuring part having a plurality of connection terminals electrically connected to the test head, A method of aligning a connection terminal in a TCP handling apparatus capable of sequentially applying a plurality of TCPs to a test by connecting a terminal to the connection terminal of the measurement unit, and acquiring coordinate data of a predetermined part of the TCP under test And obtaining coordinate data of the characteristic portion provided in the measurement unit in association with positional information of the contact surface of the connection terminal of the measurement unit, and obtaining the contact surface of the connection terminal of the measurement unit from the coordinate data of the characteristic unit The position information is estimated, and from the acquired coordinate data of the predetermined part of the TCP under test and the position information of the contact surface of the estimated connection terminal of the TCP under test, Provided is a connection terminal alignment method characterized in that a positional deviation amount between a part terminal and a contact surface of the connection terminal is obtained, and the measurement part and / or carrier tape is moved based on the positional deviation amount ( Invention 10).

  In the above invention (Invention 10), the displacement amount is a displacement amount in a planar direction between the external terminal of the TCP under test and the contact surface of the connection terminal of the measurement unit, and the measurement unit and / or the carrier tape. May be moved in a plane direction (invention 11), and the displacement amount is a displacement amount around the vertical axis between the external terminal of the TCP under test and the contact surface of the connection terminal of the measurement unit, Although the measurement unit and / or the carrier tape may be moved around a vertical axis (invention 12), the amount of displacement is a plane between the external terminal of the TCP under test and the contact surface of the connection terminal of the measurement unit. It is preferable that the measurement unit and / or the carrier tape be moved about the plane direction and the vertical axis (Invention 13).

  Third, the present invention conveys a carrier tape on which a plurality of TCPs are formed, presses the carrier tape against a measuring unit having a plurality of connection terminals electrically connected to the test head, and A method of aligning a connection terminal in a TCP handling apparatus capable of sequentially applying a plurality of TCPs to a test by connecting a terminal to the connection terminal of the measurement unit, and acquiring coordinate data of a predetermined part of the TCP under test And obtaining the coordinate data of the characteristic portion provided in the measurement unit in association with the positional information of the contact surface of the connection terminal of the measurement unit, and the contact surface of the connection terminal of the measurement unit from the coordinate data of the characteristic unit The position information of the TCP under test is obtained from the acquired coordinate data of the predetermined part of the TCP under test and the position information of the contact surface of the estimated connection terminal. And the contact surface of the connecting terminal of the measuring unit around the vertical axis is obtained, the measuring unit and / or the carrier tape is moved around the vertical axis based on the positional deviation amount, and the measuring unit again Obtaining coordinate data of the characteristic part, estimating positional information of the contact surface of the connection terminal of the measurement part from the coordinate data of the characteristic part, and obtaining the coordinate data of the predetermined part of the obtained TCP under test and the estimated measurement From the positional information of the contact surface of the connection terminal of the unit, the amount of positional deviation in the planar direction between the external terminal of the TCP under test and the contact surface of the connection terminal of the measurement unit is obtained, and the measurement unit is based on the amount of positional deviation And / or providing a method for aligning connecting terminals, wherein the carrier tape is moved in the plane direction (Invention 14).

  In the above inventions (Inventions 12 to 14), the amount of misalignment around the vertical axis between the external terminal of the TCP under test and the contact surface of the connection terminal of the measurement unit is two or more of the predetermined parts of the TCP under test. The second straight line obtained from the angle information of the first straight line obtained from the coordinate data and the positional information of two or more contact surfaces of the connection terminals of the measuring unit based on the coordinate data of two or more characteristic portions of the measuring unit. It can preferably be obtained from the difference from the angle of the straight line (Invention 15).

  According to the TCP handling device or the connection terminal alignment method of the present invention, the alignment between the connection terminal of the measurement unit and the external terminal of the TCP can be performed very accurately.

FIG. 1 is a front view showing a TCP test apparatus using a TCP handler according to an embodiment of the present invention. FIG. 2 is a side view of the pusher unit in the TCP handler according to the embodiment. FIG. 3 is a plan view of a pusher stage in the TCP handler according to the embodiment. FIG. 4 is a plan view of the probe card stage in the TCP handler according to the embodiment. FIG. 5 is a front view of the probe card stage in the TCP handler according to the embodiment. FIG. 6 is a bottom view of the probe card in the TCP handler according to the embodiment. FIG. 7 is a side view of the probe card in the TCP handler according to the embodiment. FIG. 8A is a flowchart (part 1) showing an operation at the time of initial setting of the TCP handler according to the embodiment. FIG. 8B is a flowchart (part 2) illustrating the operation at the time of initial setting of the TCP handler according to the embodiment. FIG. 8C is a flowchart (part 3) illustrating the operation at the time of initial setting of the TCP handler according to the embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 TCP test apparatus 2 TCP handler 3 Pusher unit 4 Pusher stage 5 Carrier tape 6b 2nd camera (imaging apparatus)
7 Probe card stage 8 Probe card 81 Probe (connection terminal)
84 Feature 10 Test Head 21 Unwinding Reel 22 Take-up Reel

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a front view showing a TCP testing apparatus using a TCP handler according to an embodiment of the present invention, FIG. 2 is a side view of a pusher unit in the TCP handler according to the embodiment, and FIG. FIG. 4 is a plan view of a pusher stage in the TCP handler according to the embodiment, FIG. 4 is a plan view of a probe card stage in the TCP handler according to the embodiment, and FIG. 5 is a plan view of the TCP handler according to the embodiment. FIG. 6 is a front view of the probe card stage, FIG. 6 is a bottom view of the probe card in the TCP handler according to the embodiment, and FIG. 7 is a side view of the probe card in the TCP handler according to the embodiment.

  First, an overall configuration of a TCP test apparatus including a TCP handler according to an embodiment of the present invention will be described. The TCP test apparatus 1 includes a tester main body (not shown), a test head 10 electrically connected to the tester main body, and a TCP handler 2 provided on the upper side of the test head 10.

  The TCP handler 2 sequentially attaches a plurality of TCPs formed on the carrier tape 5 to the test. In the present embodiment, the TCP handler 2 is assumed to be attached to the test for simplification of explanation. However, the present invention is not limited to this, and a plurality of TCPs arranged in the series direction and / or the parallel direction on the carrier tape 5 may be subjected to the test simultaneously.

  The TCP handler 2 includes an unwinding reel 21 and a take-up reel 22, and a carrier tape 5 before the test is wound on the unwinding reel 21. The carrier tape 5 is unwound from the unwinding reel 21 and is wound around the winding reel 22 after being subjected to the test.

  Between the unwinding reel 21 and the take-up reel 22, three spacer rolls 23 a, 23 b, and 23 c are provided that bridge the protective tape 51 peeled from the carrier tape 5 from the unwinding reel 21 to the take-up reel 22. ing. Each spacer roll 23a, 23b, 23c is vertically movable so that the tension of the protective tape 51 can be adjusted.

  A tape guide 24a, an unwinding limit roller 25a, an in-side sub sprocket 25b, and an in-side guide roller 25c are provided below the unwinding reel 21, and the carrier tape 5 unwound from the unwinding reel 21 is While being guided by the tape guide 24a, it is conveyed to the pusher unit 3 through the unwinding limit roller 25a, the in-side sub sprocket 25b, and the in-side guide roller 25c.

  A tape guide 24b, a take-up limit roller 25f, an out-side sub-sprocket 25e, and an out-side guide roller 25d are provided below the take-up reel 22, and the carrier tape 5 after being subjected to the test is After being guided by the tape guide 24b through the side guide roller 25d, the out-side sub sprocket 25e, and the take-up limit roller 25f, the take-up reel 22 is wound.

  A pusher unit 3 is provided between the in-side guide roller 25c and the out-side guide roller 25d.

  As shown in FIGS. 1 and 2, a servo motor 31 capable of rotating a ball screw 32 is attached to a frame (pusher frame) 36 of the pusher unit 3 via a bracket 361, and the ball screw 32. The pusher main body 33 is engaged with two linear motion guides (hereinafter referred to as “LM guides”) 37 in the Z-axis direction. The pusher body 33 is movable in the vertical direction (Z-axis direction) while being guided by the linear motion guide 37 by driving the servo motor 31.

A suction plate 34 that is connected to a negative pressure source (not shown) and can suck and hold the carrier tape 5 is provided at the lower end of the pusher body 33.
A tension sprocket 35a is provided on the front side (left side in FIG. 1) of the pusher main body 33, and a main sprocket 35b is provided on the rear side (right side in FIG. 1) of the pusher main body 33. The carrier tape 5 is held with a desired tension.

  As shown in FIGS. 2 and 3, the pusher stage 4 is installed on the back side of the pusher body 33 in the pusher frame 36 so as to be placed on the base 38, and is a turntable for the pusher stage 4. The top table 48 is fixed to the pusher frame 36.

  On the base 40 of the pusher stage 4, a servo motor 41a for rotating a ball screw 42a having an axis in the X-axis direction, a servo motor 41b for rotating a ball screw 42b having an axis in the Y-axis direction, and a Y-axis direction A servo motor 41c that rotates a ball screw 42c having a shaft is provided, and the servo motor 41b and the servo motor 41c are located at both ends on the base 40, respectively.

  A sliding block 44a that is guided by LM guides 43a and 43a in the X-axis direction and that can slide in the X-axis direction is screwed into the ball screw 42a. A sliding plate 46a is attached to the sliding block 44a via a Y-axis LM guide 45a so as to be slidable in the Y-axis direction. A rotating member 47a having a roller ring inside is fixed to the upper side of the sliding plate 46a, and the rotating member 47a is rotatably attached to the top table 48.

  A sliding block 44b that is guided by LM guides 43b and 43b in the Y-axis direction and is slidable in the Y-axis direction is screwed into the ball screw 42b. A sliding plate 46b is attached to the sliding block 44b so as to be slidable in the X-axis direction via an LM guide 45b in the X-axis direction. A rotating member 47b having a roller ring inside is fixed on the upper side of the sliding plate 46b, and the rotating member 47b is rotatably attached to the top table 48.

  A sliding block 44c that is guided by LM guides 43c, 43c in the Y-axis direction and that can slide in the Y-axis direction is screwed into the ball screw 42c. A sliding plate 46c is attached to the sliding block 44c so as to be slidable in the X-axis direction via an LM guide 45c in the X-axis direction. A rotating member 47c having a roller ring inside is fixed on the upper side of the sliding plate 46c, and the rotating member 47c is rotatably attached to the top table 48.

  In the pusher stage 4 having such a configuration, the servo motor 41a is driven to slide the sliding block 44a, the sliding plate 46b, and the sliding plate 46c in the X-axis direction, so that the top table 48 is moved to the X direction. It can be moved in the axial direction. In addition, the top table 48 is moved in the Y-axis direction by driving the servo motor 41b and the servo motor 41c to slide the sliding block 44b, the sliding block 44c, and the sliding plate 46a in the same Y-axis direction. be able to. Further, the servo motor 41a is driven to slide the sliding block 44a in the X-axis direction, and the servo motor 41b and the servo motor 41c are driven so that the sliding block 44b and the sliding block 44c are mutually connected to the Y axis. The top table 48 can be rotated about its vertical axis by sliding in the opposite direction and rotating each rotating member 47a, 45b, 45c. According to the pusher stage 4 as described above, the pusher unit 3 can be moved in the X-axis-Y-axis directions and rotated around the vertical axis.

  On the other hand, as shown in FIG. 1, a probe card stage 7 on which a probe card 8 is mounted is installed below the pusher unit 3 and above the test head 10. Here, the probe card stage 7 includes a type that can be moved and controlled by a motor drive mechanism and a type that has only a manual adjustment function. In this embodiment, the probe card stage 7 has a motor drive mechanism.

  4 and 5, on the base 71 of the probe card stage 7, a servo motor 711 that rotates a ball screw 712 having an axis in the X-axis direction, and four LM guides 713 in the X-axis direction, Is provided. On these four LM guides 713, rectangular X bases 72 are provided that are guided by the LM guides 713 so as to be slidable in the X-axis direction. A threaded portion 721 into which a ball screw 712 is threaded is formed on one side of the X base 72.

  On the X base 72, a servo motor 722 for rotating a ball screw 723 having an axis in the Y-axis direction and two LM guides 724 in the Y-axis direction are provided. On these two LM guides 724, a rectangular Y base 73 is provided that is slidably guided in the Y-axis direction by the LM guides 724. A threaded portion 731 into which a ball screw 723 is threaded is formed on one side of the Y base 73.

  On the Y base 73, a servo motor 732 that rotates a ball screw 733 having an axis in the Y-axis direction and a connection ring 734 that rotatably supports the card ring 735 are provided. A part of the card ring 735 is formed with a threaded portion 736 into which the ball screw 733 is threaded. The probe card 8 is detachably attached to the card ring 735 by four pins 82.

  In the probe card stage 7 having such a configuration, by driving the servo motor 711, the X base 72, and hence the probe card 8, can be moved in the X-axis direction, and by driving the servo motor 722, The Y base 73 and thus the probe card 8 can be moved in the Y-axis direction. Further, by driving the servo motor 732 to rotate the ball screw 733 and moving the screwing portion 736, the card ring 735 and the probe card 8 can be rotated around the vertical axis. The TCP handler 2 includes a control device that can automatically control the drive of the servo motors 711, 722, and 732, thereby automatically moving the probe card 8 around the X axis direction, the Y axis direction, and the vertical axis. Can be moved.

  As shown in FIGS. 4 to 7, the probe card 8 includes a plurality of probes 81, and each probe 81 is electrically connected to the tester body via the test head 10. In the present embodiment, a rectangular opening 85 is formed in the center of the probe card 8, and convex pieces 83 are provided in the vicinity of the four corners of the opening 85. And as shown in FIG. 6, the characteristic part 84 is provided in the bottom face of each convex piece 83. As shown in FIG. Thus, it is preferable to provide a plurality of characteristic portions 84 in the probe card 8 at positions as far apart as possible.

  As shown in FIG. 6, the feature portion 84 in the present embodiment is a circular mark, but is not limited thereto, and may be a cross-shaped mark, for example. Moreover, although the total number of the characteristic parts 84 in the probe card 8 is four, it is not limited to this.

  Each feature 84 is formed at a position associated with the coordinate data of the contact surface of the probe 81 (contact surface in contact with the TCP test pad). That is, by acquiring the coordinate data of each feature 84, it is possible to estimate the coordinate data of the contact surface of the probe 81. In order to further improve the estimation accuracy, the position of each feature 84 is preferably associated with the coordinate data of the contact surfaces of the plurality of probes 81. For example, several positions located in the vicinity of each feature 84 are provided. It is preferably associated with the coordinate data of the contact surface of the probe 81.

  Information for associating the coordinate data of each feature portion 84 with the coordinate data of the contact surface of the probe 81 is stored in an image processing portion described later. This information is stored in advance in the probe card 8 and may be stored in the TCP handler 2 (image processing unit) when the probe card 8 is set in the TCP handler 2 or actively on the TCP handler 2 side. You may make it acquire.

  As shown in FIG. 1, the first camera 6 a is on the front side of the pusher unit 3 (left side in FIG. 1), the second camera (imaging device) 6 b is on the lower side of the test head 10, and the rear side of the pusher unit 3 ( A third camera 6c is provided on the right side in FIG. The test head 10 is formed with a gap through which the second camera 6b can photograph the probe card 8.

  A mark punch 26a and a reject punch 26b are provided between the pusher unit 3 and the third camera 6c. The mark punch 26a is one in which one or a plurality of holes are formed at a predetermined position for the corresponding TCP based on the test result, and the reject punch 26b is a TCP that is determined to be a defective product as a result of the test. It is something that punches out.

  Each camera 6a, 6b, 6c causes the display device 9 to display images taken by these cameras so that the operator can visually recognize them. Among these cameras, the first camera 6a and the third camera 6c are for determining the presence or absence of TCP on the carrier tape 5 and the position and number of holes by the mark punch 26a. And the 2nd camera 6b is for acquiring the positional offset information between TCP and the probe card 8, and can acquire positional offset information about the several object in a visual field.

  Further, the second camera 6b is mounted on the camera stage 61, and can be moved in the vertical and horizontal directions (X axis-Y axis direction) and in the vertical direction (Z axis direction) by an actuator of the camera stage 61. ing. The second camera 6b moves in the vertical and horizontal directions (X-axis-Y-axis direction) in plan view, so that the second camera 6b is located at a position far from each other of the plurality of test pads and the probe card 8 at the positions far away from each other in the TCP. Since the portion 84 can be photographed, the amount of positional deviation between the TCP and the probe card 8 can be obtained with better accuracy. Further, the second camera 6b moves in the vertical direction (Z-axis direction), thereby changing the focal position of the second camera 6b so as to focus on the desired part of the test pad or the feature part 84 that is the imaging target. Can do. As a result, a clear contour image of the imaging target region can be acquired, and the coordinate data of the test pad or the feature portion 84 can be accurately obtained. Note that the second camera 6b itself has a focus adjustment function so that the focal position of the second camera 6b is externally controlled so as to be able to focus on a desired part of the test pad or the feature part 84 that is an imaging target. Also good.

  The display device 9 includes an image processing unit and a monitor that displays an image captured by the second camera 6b.

  Next, the usage method and operation of the TCP handler 2 will be described. Here, for simplification of description, the two feature portions 84 in the probe card 8 are used. However, the present invention is not limited to this, and four or more feature portions 84 are provided. It can also be used.

  When the TCP handler 2 is used, the probe card 8 is moved so that all the probes 81 of the probe card 8 are positioned in advance at the center position of the corresponding test pad before the TCP handler 2 is actually operated. Initial setting is required. That is, when the TCP type is changed, when a TCP of a different production lot is tested, or when the probe card 8 is changed, the TCP test pad and the probe 81 of the probe card 8 are in contact with each other. It is necessary to determine and register the reference position of the X-axis position / Y-axis position / θ rotation angle of the probe card stage 7 (this position is referred to as “registered position”).

8A to 8C are flowcharts showing the initial setting operation of the TCP handler 2.
When the TCP handler 2 starts the initial setting operation, the TCP handler 2 transports the reference TCP to the test position (step S01), and the second camera 6b uses a plurality of TCPs located at one end of a number of test pads in the TCP. A test pad is photographed (step S02). In the present embodiment, the second camera 6b captures a TCP test pad. However, the present invention is not limited to this, and even if a predetermined mark attached to the TCP is captured. Alternatively, a characteristic part such as a corner of the package may be photographed.

The image processing unit of the TCP handler 2 acquires coordinate data (X _pd1 , Y _pd1 ) of each of the center portions of the plurality of test pads included in the first image based on the captured image (first image). (Step S03). Note that each coordinate data obtained by this operation is mapped to the coordinate system of the camera stage 61.

Next, the TCP handler 2 moves the second camera 6b by the camera stage 61, and photographs a plurality of test pads located at different end portions of the multiple test pads in the TCP by the second camera 6b. (Step S04). The image processing unit of the TCP handler 2 acquires the coordinate data (X _pd2 , Y _pd2 ) of the center portions of the plurality of test pads included in the second image based on the captured image (second image). (Step S05).

Based on the acquired coordinate data (X _pd1 , Y _pd1 ) and (X _pd2 , Y _pd2 ), the image processing unit of the TCP handler 2 determines the position coordinates and the second image of the center portion of the test pad included in the first image. The angle (first angle θ _pd1 ) with the straight line (horizontal line in FIG. 7) of the straight line (test pad array) passing through the position coordinates of the center part of the test pad included in is calculated (step S06). .

Next, the TCP handler 2 moves the second camera 6b by the camera stage 61, and photographs the feature portions 84 corresponding to the plurality of test pads included in the first image by the second camera 6b (step S07). ). The image processing unit of the TCP handler 2 acquires the coordinate data (X _c1 , Y _c1 ) of the feature part 84 included in the third image based on the captured image (third image) (step S08). And the coordinate data ( _Xpb1 , _Ypb1 ) of the contact surface of the some probe 81 _{linked |} related with the coordinate data ( _Xc1 , _Yc1 ) of the said characteristic part 84 are estimated (step S09).

Here, the contact surface of the probe 81 cannot be photographed by the second camera 6b, but via the coordinate data (X _c1 , Y _c1 ) of the characteristic portion 84 that can be clearly photographed by the second camera 6b. The coordinate data ( _Xpb1 , _Ypb1 ) of the contact surface can be estimated with high accuracy. Thereby, alignment of the TCP test pad and the probe 81 of the probe card 8 can be performed very accurately.

The TCP handler 2 moves the second camera 6b by the camera stage 61, and photographs the feature portions 84 corresponding to the plurality of test pads included in the second image by the second camera 6b (step S10). The image processing unit of the TCP handler 2 acquires coordinate data (X _c2 , Y _c2 ) of the feature part 84 included in the fourth image based on the captured image (fourth image) (step S11). Then, the coordinate data _{(X pb2, Y pb2)} of the contact surfaces of the plurality of probes 81 that are associated with the coordinate data of the feature 84 _{(X c2, Y} c2) estimating a (step S12).

The image processing unit of the TCP handler 2, based on the coordinate data coordinate data of the contact surfaces of the estimated probe 81 _{(X pb1, Y} pb1) and _{(X pb2, Y pb2),} the contact of the probe 81 corresponding to the third image An angle (second angle θ _pb2 ) with a straight line in the X-axis direction of a straight line (array of probes 81) passing through the position coordinates of the surface and the position coordinates of the contact surface of the probe 81 corresponding to the fourth image is calculated (step) S13).

Then, TCP handler 2 calculates the difference value Δθ of the first angle theta _pd1 and second angle theta _pb2 obtained in step S06, S13 (step S14). If the absolute value of the obtained difference value Δθ is larger than the predetermined value D (step S15, Yes), the TCP handler 2 rotates and moves the probe card stage 7 based on the difference value Δθ (step S16). ) When the absolute value of the difference value Δθ is equal to or smaller than the predetermined value D (step S17, Yes), the rotational movement of the probe card stage 7 is stopped (step S18). On the other hand, in step S15, when the absolute value of the difference value Δθ is equal to or smaller than the predetermined value D (step S15, No), the process proceeds to step S19 without rotating the probe card stage 7.

Next, the TCP handler 2 moves the second camera 6b by the camera stage 61, and the second camera 6b captures again the characteristic portions 84 corresponding to the plurality of test pads included in the first image (step S19). Thereby, even if the probe card 8 moves around the vertical axis in step S15 and the target probe 81 is out of the field of view of the second camera 6b, the image can be taken again. The image processing unit of the TCP handler 2 acquires coordinate data (X _c3 , Y _c3 ) of the feature part 84 included in the fifth image based on the captured image (fifth image) (step S20). Then, the coordinate data _{(X pb3, Y pb3)} of the contact surfaces of the plurality of probes 81 that are associated with the coordinate data of the feature 84 _{(X c3, Y} c3) estimating a (step S21).

Similarly, the TCP handler 2 moves the second camera 6b by the camera stage 61, and re-photographs the characteristic portions 84 corresponding to the plurality of test pads included in the second image by the second camera 6b (Step S1). S22). Based on the captured image (sixth image), the image processing unit of the TCP handler 2 acquires coordinate data (X _c4 , Y _c4 ) of the feature part 84 included in the sixth image (step S23). Then, the coordinate data _{(X pb4, Y pb4)} of the contact surfaces of the plurality of probes 81 that are associated with the coordinate data of the feature 84 _{(X c4, Y} c4) to estimate (step S24).

Then, TCP handler 2, the coordinate data _{(X pd1, Y} pd1) of 2 points of the test pad and _{(X pd2, Y} pd2) and the coordinate data of the two positions of the contact surface of the probe 81 _{(X pb3, Y} pb3 ) And (X _pb4 , Y _pb4 ), the difference values ΔX and ΔY between the X component and the Y component between the test pad and the contact surface of the probe 81 are calculated (step S25). Then, when the absolute values of the obtained difference values ΔX and ΔY are larger than the predetermined value P (Yes in step S26), the TCP handler 2 moves the probe card stage 7 in the X-axis direction based on the difference values ΔX and ΔY. And / or moving in the Y-axis direction (step S27), and when the absolute value of the difference values ΔX and ΔY becomes equal to or less than the predetermined value P (step S28, Yes), the movement of the probe card stage 7 is stopped (step S28). S29) The position of the probe card stage 7 is registered (step S30). On the other hand, if the absolute value of the difference values ΔX and ΔY is equal to or smaller than the predetermined value P in step S26 (No in step S26), the position is registered without moving the probe card stage 7 (step S30). . In this way, the TCP handler 2 finishes the initial setting.

  As described above, according to the TCP handler 2 according to the present embodiment, the alignment between the TCP test pad and the probe 81 of the probe card 8 can be performed automatically and extremely accurately using the characteristic portion 84. Can do. In particular, in the present embodiment, the alignment between the TCP test pad and the probe 81 of the probe card 8 is further performed by sequentially performing the alignment around the vertical axis and the alignment in the X-axis direction and the Y-axis direction separately. Can be done accurately. Therefore, the initial setting of the TCP handler 2 can be performed efficiently in a short time.

  The embodiment described above is described for facilitating understanding of the present invention, and is not described for limiting the present invention. Therefore, each element disclosed in the above embodiment is intended to include all design changes and equivalents belonging to the technical scope of the present invention.

For example, in the above-described embodiment, the alignment of the TCP and the probe card 8 around the vertical axis and the alignment in the planar direction are performed separately, but the present invention is not limited to this, and both are performed simultaneously. You may go. Specifically, the coordinate data (X _pd1 , Y _pd1 ) and (X _pd2 , Y _pd2 ) of the test pad acquired in steps S03 and S05 and the coordinate data of the contact surface of the probe 81 estimated in steps S09 and S12 ( X _pb1 , Y _pb1 ) and (X _pb2 , Y _pb2 ) are used to determine the amount of positional deviation about the vertical axis and the amount of positional deviation in the X-axis direction and Y-axis direction. The probe card stage 7 may be moved around the vertical axis / X-axis / Y-axis to align the test pad and the probe 81. Thereby, the work time for correcting the misalignment between the TCP and the probe card 8 is further shortened.

  In the above embodiment, the TCP and the probe card 8 are aligned by the movement of the probe card 8 by the probe card stage 7. However, the present invention is not limited to this, and the pusher by the pusher stage 4 is used. The movement may be performed by the movement of the unit 3 and the carrier tape 5, or may be performed by both the movement of the probe card 8 by the probe card stage 7 and the movement of the pusher unit 3 and the carrier tape 5 by the pusher stage 4. .

  INDUSTRIAL APPLICABILITY The present invention is useful for accurately performing alignment work between a connection terminal of a measurement unit (probe card) and an external terminal of a TCP at the time of initial setting of a TCP handling device.

Claims (15)

Transporting the carrier tape on which a plurality of TCPs are formed, pressing the carrier tape against the measurement unit having a plurality of connection terminals electrically connected to the test head, and connecting the external terminals of the TCP to the measurement unit A TCP handling device capable of sequentially attaching a plurality of TCPs to a test by connecting to a terminal,
The measuring unit moving device capable of moving the measuring unit and / or the tape moving device capable of changing the position of the carrier tape relative to the measuring unit and the contact surface of the connecting terminal of the measuring unit cannot be photographed. An imaging apparatus provided at a position, which is capable of imaging a characteristic portion provided on the measurement unit and a predetermined part of the TCP under test in association with positional information on a contact surface of a connection terminal of the measurement unit And
With the imaging device, a predetermined part of the TCP under test is imaged to obtain the coordinate data of the predetermined part, the characteristic part of the measurement unit is imaged to obtain the coordinate data of the characteristic part,
Estimating the position information of the contact surface of the connection terminal of the measurement unit from the coordinate data of the feature,
From the acquired coordinate data of the predetermined part of the TCP under test and the estimated positional information of the contact surface of the connection terminal, the amount of positional deviation between the external terminal of the TCP under test and the contact surface of the connection terminal is obtained,
Based on the amount of displacement, the measuring unit and / or the carrier tape is moved by the measuring unit moving device and / or the tape moving device, and the connection terminal is aligned with the external terminal of the TCP under test. Characteristic TCP handling device.   The measuring unit moving device is capable of moving the measuring unit in the plane direction, and the tape moving device is capable of moving the carrier tape in the plane direction with respect to the measuring unit. The TCP handling device according to claim 1, wherein:   The measuring unit moving device is capable of moving the measuring unit about its vertical axis, and the tape moving device is configured to move a carrier tape around the vertical axis of a plane including the carrier tape with respect to the measuring unit. The TCP handling device according to claim 1, wherein the TCP handling device can be moved to   The measuring unit moving device is capable of moving the measuring unit around its plane direction and a vertical axis, and the tape moving device moves the carrier tape with respect to the measuring unit in the plane direction and the carrier tape. The TCP handling device according to claim 1, wherein the TCP handling device can be moved around a vertical axis of a plane including 1stly, while acquiring the coordinate data of the predetermined part of the said TCP under test, the coordinate data of the characteristic part of the said measurement part is acquired, and the position of the contact surface of the connection terminal of the said measurement part from the coordinate data of the said characteristic part Information is estimated, and from the obtained coordinate data of the predetermined part of the TCP under test and the position information of the contact surface of the estimated connection terminal, the vertical axis between the external terminal of the TCP under test and the contact surface of the connection terminal determine the amount of positional deviation, on the basis of the positional shift amount of the vertical axis to move the more the measuring unit about a vertical axis to the measurement unit moving equipment,
Secondly, the coordinate data of the characteristic part of the measurement unit is acquired again, the positional information of the contact surface of the connection terminal of the measurement unit is estimated from the coordinate data of the characteristic unit, and the predetermined part of the acquired TCP under test is acquired The positional deviation amount in the plane direction between the external terminal of the TCP under test and the contact surface of the connection terminal is obtained from the coordinate data of the above and the estimated positional information of the contact surface of the connection terminal, and the positional deviation amount in the plane direction is obtained. based on, TCP handling apparatus according to claim 4, characterized in that moving further to the measuring portion in the planar direction in the measuring portion moving equipment.   Using the imaging device, two or more predetermined parts of the TCP under test are photographed to obtain coordinate data of two or more predetermined parts, and two or more characteristic parts of the measurement unit are photographed to obtain two or more parts. The TCP handling device according to claim 1, wherein the coordinate data of the characteristic portion is acquired.   The amount of positional deviation around the vertical axis between the external terminal of the TCP under test and the contact surface of the connection terminal of the measuring unit is a first straight line obtained from coordinate data of two or more predetermined parts of the TCP under test. Obtaining from the difference between the angle and the angle of the second straight line obtained from the positional information of two or more contact surfaces of the connection terminal of the measurement unit based on the coordinate data of two or more points of the characteristic part of the measurement unit The TCP handling device according to claim 6, wherein the device is a TCP handling device. The TCP handling device further includes an imaging device moving device capable of moving the imaging device,
7. The imaging device according to claim 6, wherein the imaging device images two or more predetermined portions of the TCP under test and two or more features of the measurement unit by movement by the imaging device moving device. TCP handling device.   The TCP handling apparatus according to claim 1, wherein the characteristic part is associated with positional information of contact surfaces of a plurality of connection terminals in the measurement part. Transporting the carrier tape on which a plurality of TCPs are formed, pressing the carrier tape against the measurement unit having a plurality of connection terminals electrically connected to the test head, and connecting the external terminals of the TCP to the measurement unit A method of aligning connection terminals in a TCP handling device capable of sequentially attaching a plurality of TCPs to a test by connecting to a terminal,
Obtain coordinate data of a predetermined part of the TCP under test,
In association with the position information of the contact surface of the connection terminal of the measurement unit to obtain the coordinate data of the feature portion provided at a position visible from the opposite side of the contact surface of the contact terminal of the measurement unit,
Estimating the position information of the contact surface of the connection terminal of the measurement unit from the coordinate data of the feature,
A positional deviation amount between the external terminal of the TCP under test and the contact surface of the connection terminal is obtained from the acquired coordinate data of the predetermined part of the TCP under test and the position information of the contact surface of the connection terminal of the estimated measurement unit. ,
A connection terminal positioning method, wherein the measuring unit and / or the carrier tape is moved based on the amount of displacement.   The displacement amount is a displacement amount in a planar direction between the external terminal of the TCP under test and the contact surface of the connection terminal of the measurement unit, and the measurement unit and / or the carrier tape is moved in the planar direction. The method for aligning connection terminals according to claim 10, wherein:   The amount of misalignment is the amount of misalignment about the vertical axis between the external terminal of the TCP under test and the contact surface of the connection terminal of the measuring unit, and the measuring unit and / or the carrier tape is moved about the vertical axis. The method of aligning connection terminals according to claim 10.   The amount of displacement is the amount of displacement between the external terminal of the TCP under test and the contact surface of the connection terminal of the measurement unit and the displacement around the vertical axis, and the measurement unit and / or carrier tape The connection terminal positioning method according to claim 10, wherein the connection terminal is moved about a vertical axis. Transporting the carrier tape on which a plurality of TCPs are formed, pressing the carrier tape against the measurement unit having a plurality of connection terminals electrically connected to the test head, and connecting the external terminals of the TCP to the measurement unit A method of aligning connection terminals in a TCP handling device capable of sequentially attaching a plurality of TCPs to a test by connecting to a terminal,
Obtain coordinate data of a predetermined part of the TCP under test,
Obtaining coordinate data of a feature portion provided at a position visible from the opposite side of the contact surface of the contact terminal of the measurement unit in association with position information of the contact surface of the connection terminal of the measurement unit , Estimating the position information of the contact surface of the connection terminal of the measurement unit from the coordinate data of
The position around the vertical axis between the external terminal of the TCP under test and the contact surface of the connection terminal of the measuring unit from the acquired coordinate data of the predetermined part of the TCP under test and the estimated position information of the contact surface of the connection terminal Find the amount of deviation,
Moving the measurement unit around a vertical axis based on the displacement amount;
Obtain the coordinate data of the characteristic part of the measurement unit again, estimate the position information of the contact surface of the connection terminal of the measurement unit from the coordinate data of the characteristic part,
From the acquired coordinate data of the predetermined part of the TCP under test and the positional information of the estimated contact surface of the connection terminal of the measurement unit, the plane direction between the external terminal of the TCP under test and the contact surface of the connection terminal of the measurement unit Find the amount of misalignment of
A connection terminal positioning method, wherein the measuring unit is moved in a planar direction based on the amount of positional deviation.   The amount of positional deviation around the vertical axis between the external terminal of the TCP under test and the contact surface of the connection terminal of the measuring unit is a first straight line obtained from coordinate data of two or more predetermined parts of the TCP under test. Obtaining from the difference between the angle and the angle of the second straight line obtained from the positional information of two or more contact surfaces of the connection terminal of the measurement unit based on the coordinate data of two or more points of the characteristic part of the measurement unit The method for aligning connection terminals according to claim 12, wherein the connection terminals are aligned.

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