TWI834440B - Processing equipment and processing method - Google Patents

Abstract

An object of the present invention is to provide a processing device that can appropriately process a portion to be processed of a workpiece. A processing device 1 according to one aspect of the present invention includes an imaging unit 11 having an optical element 11a facing a plate-like or sheet-like workpiece P from the normal direction, and taking pictures from the normal direction at a reference position of the workpiece P. Marked R; the workpiece fixing member 12, which fixes the workpiece P at a reference position in the normal direction near the optical element 11a when viewed from the normal direction when the imaging unit 11 is taking pictures; the specific part 13, which is based on the imaging unit 11 The imaging result specifies the processing target part of the workpiece P; the first processing part 14a and the second processing part 14b, which can sandwich the processing target part from both sides; and the first driving mechanism 15, which is based on the reference position and the The workpiece fixing member 12 is driven so that the positions in the normal direction when the first processing part 14a and the second processing part 14b are sandwiched are the same.

Description

Treatment device and treatment method

The present invention relates to a processing device and a processing method.

There is known a processing device for processing plate-shaped or sheet-shaped workpieces. Examples of the processing device include an electrical inspection device that inspects the electrical characteristics of a workpiece, a processing device that processes the workpiece, and the like. [Prior technical literature] [Patent Document]

Patent Document 1: Japanese Patent Application Publication No. 2010-237061

[Problem to be solved by the invention]

In this processing device, the processing target portion of the workpiece is positioned by photographing a reference position mark provided on the workpiece from the normal direction of the workpiece. In this processing device, if the workpiece is warped or undulated, the processing target part of the workpiece cannot be correctly positioned, and there is a risk that the processing accuracy of the workpiece cannot be fully obtained.

Patent Document 1 describes an electronic component inspection device that can inspect a plurality of electronic components by pressing both sides of the substrate with a plurality of electronic components mounted on it held between both sides by a pallet. Patent Document 1 describes that by holding a substrate with a pallet, a plurality of electronic components can be inspected simultaneously even if the substrate warps or undulates.

However, in the electronic component inspection device described in Patent Document 1, since the substrate is forcibly fixed with a pallet, there is a risk that positional deviation due to warping or undulation of the substrate may occur when the pallet is fixed, or there may be a problem on the substrate. There is a risk of generating stress that exceeds the required level. As a result, there is a risk that the measurement points of the substrate cannot be properly inspected.

The present invention was completed based on such a situation, and an object of the present invention is to provide a processing device and a processing method that can appropriately process the processing target portion of a workpiece. [Technical means to solve problems]

A processing device according to one aspect of the present invention includes: an imaging unit having an optical element facing a plate-like or sheet-like workpiece from a normal direction, and imaging a reference position mark provided on the workpiece from the normal direction; and the workpiece. A fixing member that fixes the workpiece at a reference position in the normal direction near the optical element when viewed from the normal direction when the imaging unit is taking pictures; a specific part that is based on the imaging results of the imaging unit, A processing target part of the above-mentioned workpiece is specified; a first processing part and a second processing part, which can sandwich the processing target part from both sides; and a first driving mechanism, with the above-mentioned reference position, and the above-mentioned first processing part The workpiece fixing member is driven in such a manner that the position in the normal direction when the second processing unit is clamped is the same.

A processing device according to one aspect of the present invention includes: an imaging unit having an optical element facing a plate-like or sheet-like workpiece from a normal direction, and imaging a reference position mark provided on the workpiece from the normal direction; and the workpiece. A fixing member that fixes the workpiece at a reference position in the normal direction near the optical element when viewed from the normal direction when the imaging unit is taking pictures; a specific part that is based on the imaging results of the imaging unit, A processing target part of the above-mentioned workpiece is specified; a first processing part and a second processing part, which can sandwich the processing target part from both sides; and a first driving mechanism, with the above-mentioned reference position, and the above-mentioned first processing part The workpiece fixing member is driven in such a manner that the position in the normal direction when the second processing unit is clamped is the same.

The workpiece fixing member may partially fix the workpiece at a position closer to the optical element than the processing target part when viewed from the normal direction.

The first driving mechanism may drive the workpiece fixing member away from the workpiece before the first processing part and the second processing part sandwich the processing target part.

The processing device may include a second driving mechanism that drives the first processing unit and the second processing unit, or the second driving mechanism may drive the first processing unit before the workpiece is fixed by the workpiece fixing member. At least one of the processing part and the second processing part determines the clamping position of the workpiece in the normal direction, and the first driving mechanism positions the workpiece in the normal direction position determined by the second driving mechanism. , drives the above-mentioned workpiece fixing member.

The processing device may further include a measuring unit capable of measuring the normal direction position of the workpiece during the imaging and the normal direction of the workpiece when sandwiched between the first processing unit and the second processing unit. Location.

A processing method according to another aspect of the present invention includes: an imaging unit having an optical element facing a plate-like or sheet-like workpiece from the normal direction; and a workpiece fixing member having the optical element when viewed from the normal direction. Near the component, the above-mentioned workpiece is fixed at the reference position in the above-mentioned normal direction; a specific part specifies the processing target part of the above-mentioned workpiece; and the first processing part and the second processing part can sandwich the above-mentioned processing target part from both sides. ; and a first driving mechanism that drives the processing device of the above-mentioned workpiece fixing member; in such a manner that the above-mentioned reference position is the same as the position in the normal direction when sandwiched by the above-mentioned first processing part and the above-mentioned second processing part. The workpiece fixing member photographs a reference position mark provided on the workpiece from the normal direction while the workpiece is fixed at the reference position by the workpiece fixing member, and specifies the workpiece based on the imaging result of the reference position mark. The processing object part.

In addition, in the present invention, although there is no clear distinction between "plate-like" and "sheet-like", those that do not substantially deflect due to their own weight can be called "plate-like" and have flexibility. Those that bend due to their own weight are called "flaky". In the present invention, "sheet form" includes the concept of "film form". "Viewed from the normal direction of the workpiece, near the optical element" means that when viewed from the normal direction of the workpiece, the distance from the imaging area of the workpiece is 10 mm or less. The distance is preferably 8 mm or less, more preferably 5 mm or less. In addition, the lower limit of the distance from the workpiece imaging area is not particularly limited. For example, if the workpiece fixing member is transparent, the workpiece fixing member may be disposed in the imaging area of the workpiece when the workpiece is viewed from the normal direction.

The first driving mechanism of the processing device according to one aspect of the present invention is configured so that the position of the normal direction of the workpiece is the same when the first processing part and the second processing part are sandwiched and when the imaging part is photographing. The above-mentioned workpiece fixing member is driven. Therefore, even if the workpiece is deflected, warped, undulated, etc., the processing device can easily adjust the normal direction position of the reference position mark at the time of photographing to the first processing unit and the second processing unit. The normal direction position of the above-mentioned processing target part when the part is clamped is integrated. That is, this processing device can perform imaging by the imaging unit and sandwiching of the first processing unit and the second processing unit in a state where the workpiece is arranged in the same virtual plane. As a result, the processing apparatus can easily and accurately grasp the positional relationship between the reference position mark provided on the workpiece and the processing target portion, thereby appropriately processing the processing target portion.

Hereinafter, embodiments of the present invention will be described in detail with appropriate reference to the drawings.

[First Embodiment] ＜Processing device＞ The processing device 1 of FIGS. 1 and 2 is provided with an imaging unit 11 having an optical element 11 a facing the plate-like or sheet-like workpiece P from the normal direction (the Z direction in FIG. 1 ), and taking pictures from the normal direction. a reference position mark R provided on the workpiece P; a workpiece fixing member 12 that fixes the workpiece P at the reference position in the normal direction near the optical element 11a when viewed from the normal direction when the imaging unit 11 is photographing; The specifying part 13 specifies the processing target part of the workpiece P based on the imaging result of the imaging part 11; the first processing part 14a and the second processing part 14b, which can sandwich the processing target part from both sides; and the first drive The mechanism 15 drives the workpiece fixing member 12 so that the reference position is the same as the position in the normal direction when sandwiched between the first processing part 14a and the second processing part 14b. Moreover, this processing apparatus 1 is provided with the 2nd driving mechanism 16 which drives the 1st processing part 14a and the 2nd processing part 14b, and the control part 17 which controls the operation|movement of the 1st driving mechanism 15 and the 2nd driving mechanism 16. In this embodiment, the specifying unit 13 is included in the control unit 17 . In addition, in FIG. 1 , the imaging unit 11 and the workpiece fixing member 12 are arranged on both sides of the workpiece P. However, the arrangement of the imaging unit 11 and the workpiece fixing member 12 may be set based on the specifications of the processing device 1 , and one or both of the imaging unit 11 and the workpiece fixing member 12 may be arranged on only one side of the workpiece P. In addition, in FIG. 1 , the first drive mechanism 15 , the second drive mechanism 16 , and the control unit 17 are provided in one-to-one correspondence with each of the first processing unit 14 a and the second processing unit 14 b. However, the first drive mechanism 15, the second drive mechanism 16, and the control unit 17 may be configured as the same components as the first processing unit 14a and the second processing unit 14b.

This processing device 1 can be configured as an electrical inspection device using a printed circuit board as the workpiece P, or a processing device that processes the workpiece P, for example (the electrical inspection device is shown in FIG. 1 ). The specific configurations of the first processing unit 14 a and the second processing unit 14 b can be appropriately set according to the functions required of the processing device 1 . When the processing device 1 is an electrical inspection device, the first processing part 14a and the second processing part 14b have: a plurality of probes 21 that can contact the workpiece P from the normal direction; and a support plate 22. It has a plurality of guide holes (not shown) for guiding a plurality of probes 21 and can contact the workpiece P from the normal direction. In addition, in FIG. 1 , each of the first processing unit 14 a and the second processing unit 14 b is installed to inspect the electrical characteristics of the workpiece P. However, depending on the type of the processing device 1 or the functions required of the processing device 1, one of the first processing part 14a and the second processing part 14b may only have the function of sandwiching the workpiece P with the other processing part. functions between.

[artifact] As described above, when the processing device 1 is an electrical inspection device, a printed circuit board can be used as the workpiece P. The printed circuit board is configured with a circuit pattern on a base material and is flexible. When the workpiece P is a printed circuit board, there are a plurality of processing target portions in the workpiece P. This processing device 1 is configured to continuously process a plurality of processing target portions arranged on the workpiece P.

The workpiece P is, for example, rectangular in plan view. The workpiece P is held horizontally as a whole while its four corners are held by the workpiece holder 31 . Since the workpiece P is held in the air by partially holding its peripheral portion with the workpiece holder 31, deflection, warping, heaving, etc. due to its own weight may occur. This processing device 1 is suitable for appropriately processing the processing target portion of the workpiece P in such a structure that the workpiece P may be deflected, warped, undulated, or the like.

A reference position mark R is provided on the workpiece P. The reference position mark R is not particularly limited as long as it can be used as a reference position for specifying the portion to be processed. For example, it may be the circuit pattern itself, or it may be a positioning mark provided separately from the circuit pattern. .

(Camera Department) The imaging unit 11 includes a camera that captures digital images, and an image processing unit that processes the digital images captured by the camera. The above-mentioned camera has the above-mentioned optical element 11a facing the workpiece P from the normal direction. Examples of the optical element 11a include a lens.

The above-mentioned image processing unit may be included in the control unit 17 , or may be provided separately from the control unit 17 . When the image processing unit is included in the control unit 17, the image processing unit may be a part of the program processed by the control unit 17.

The above-mentioned camera can be maintained independently, or can be directly or indirectly connected to the second driving mechanism 16 in a manner that it can move together with the first processing part 14a or the second processing part 14b. When the camera is independently maintained, it is preferable that the camera is configured to be movable in the plane direction of the workpiece P (the XY plane direction in Figure 1) and the normal direction of the workpiece P (the Z-axis direction in Figure 1).

(workpiece fixing member) The workpiece fixing member 12 has a support surface 12a that partially supports the workpiece P. The workpiece fixing member 12 fixes the workpiece P at a reference position in the normal direction by bringing the support surface 12a into contact with the workpiece P from the normal direction. For example, if the workpiece P deflects under its own weight, the processing device 1 pushes the workpiece fixing member 12 on the lower side (the second processing part 14b side) upward so that the workpiece P is located at the above-mentioned reference position. And the workpiece fixing member 12 on the upper side (the first processing part 14a side) is moved downward so that the workpiece P is sandwiched between the workpiece fixing member 12 on the lower side.

As shown in FIG. 2 , the workpiece fixing member 12 is disposed near the optical element 11 a to partially support the workpiece P when viewed from the normal direction of the workpiece P. Since the workpiece fixing member 12 only needs to partially support the workpiece P, the stress generated on the workpiece P can be sufficiently reduced. The workpiece fixing member 12 can also be viewed from the normal direction of the workpiece P, and can be disposed in such a manner that a portion around the optical element 11a supports the workpiece P.

The workpiece fixing member 12 uses the normal direction position (Z-axis direction position) of the imaging area of the workpiece P when the reference position mark R is taken, and the processing target of the workpiece P when being processed by the first processing unit 14a and the second processing unit 14b. The workpiece P is fixed by integrating the partial normal direction positions. The workpiece fixing member 12 only needs to fix the workpiece P during imaging by the imaging unit 11, and does not need to fix the workpiece P when the first processing unit 14a and the second processing unit 14b sandwich the processing target portion. Therefore, it is preferable that the workpiece fixing member 12 is disposed only in the outer edge of the first processing part 14a and the second processing part 14b when viewed in the normal direction of the workpiece P, facing the optical element 11a (close to the optical element 11a). Part of the outer edge side. According to this configuration, the processing device 1 can achieve miniaturization of the workpiece fixing member 12, and can achieve miniaturization or cost reduction of the device. At the same time, stress on the workpiece P can be easily suppressed, and the processing efficiency of the workpiece P can be improved.

It is preferable that the workpiece fixing member 12 partially fixes the workpiece P at a position closer to the optical element 11a than the above-mentioned processing target part when viewed in the normal direction of the workpiece P. According to this configuration, the processing device 1 can achieve miniaturization of the workpiece fixing member 12, can achieve downsizing or cost reduction of the device, and can quickly and reliably fix the workpiece P at a desired location when photographing the reference position mark R. Location.

(Special Department) The specifying unit 13 determines the relative position of the camera and the processing target part of the workpiece P by specifying the characteristic points of the workpiece P in the digital image captured by the camera of the free imaging unit 11 . Furthermore, the specifying unit 13 specifies the absolute position of the processing target portion in the XYZ coordinate system based on the arrangement of the camera.

(1st Processing Department and 2nd Processing Department) Each of the first processing part 14a and the second processing part 14b has a support plate 22 that is in contact with the workpiece P from the normal direction. The first processing part 14a and the second processing part 14b are provided so that the workpiece P can be sandwiched from both sides via the support plate 22.

(1st drive mechanism) The first driving mechanism 15 drives the workpiece fixing member 12 in a direction less than the normal line of the workpiece P. The first driving mechanism 15 may be configured to also drive the workpiece fixing member 12 in the plane direction of the workpiece P. The first drive mechanism 15 is configured to drive the workpiece fixing member 12 independently of the first processing unit 14a and the second processing unit 14b. The specific structure of the first driving mechanism 15 is not particularly limited, and may include, for example, a slider extending in the normal direction of the workpiece P and a guide rail that holds the slider slidably in the normal direction.

It is preferable that the first driving mechanism 15 drives the workpiece fixing member 12 away from the workpiece P before the first processing part 14a and the second processing part 14b sandwich the processing target portion. In this processing device 1, after the imaging unit 11 captures the reference position mark R, the workpiece fixing member 12 is separated from the workpiece P, and the first processing unit 14a and the second processing unit 14b are opposed to the above-mentioned processing target part, and then are at the same position as the above-mentioned reference position. By clamping the processing target part of the workpiece P in the virtual plane, the desired processing can be performed quickly and stably.

(Second drive mechanism) The second drive mechanism 16 is configured to drive the first processing unit 14a and the second processing unit 14b in three dimensions. Furthermore, the second driving mechanism 16 may be configured to drive the first processing part 14a and the second processing part 14b to rotate around an axis parallel to the normal direction of the workpiece P.

Examples of the second drive mechanism 16 include a multi-joint robot, an orthogonal coordinate drive system, and the like. By using the orthogonal coordinate drive system as the second drive mechanism 16, the cost and occupied space can be easily reduced. As the above-mentioned orthogonal coordinate drive system, for example, it can be configured as follows: an orthogonal coordinate type robot that can perform two-axis positioning in the plane direction of the workpiece P; a lifting member that is arranged on the orthogonal coordinate type robot; and The rotating member is arranged on the lifting member and is configured to rotate one or both of the first processing part 14a and the second processing part 14b.

Preferably, the second driving mechanism 16 drives at least one of the first processing part 14a and the second processing part 14b to determine the clamping position of the workpiece P in the normal direction before the workpiece fixing member 12 fixes the workpiece P. In addition, in this structure, it is preferable that the first drive mechanism 15 drives the workpiece fixing member 12 so that the workpiece P is located in the normal direction position determined by the second drive mechanism 16 . By driving the first driving mechanism 15 and the second driving mechanism 16 in this way, the processing device 1 can easily and reliably align the normal direction position of the reference position mark R when the imaging unit 11 takes the image with the first processing unit 14a. The normal direction position of the processing target part of the workpiece P during processing by the second processing unit 14b is integrated. As a result, the above-mentioned processing target part can be appropriately processed in a more stable state.

(Control Department) The control unit 17 is configured to include, for example, a computer having a CPU (Central Processing Unit) that performs data processing, or a memory unit such as a semiconductor memory that temporarily or permanently stores various information.

The control part 17 first moves at least one of the first processing part 14a and the second processing part 14b to determine the clamping position of the workpiece P in the normal direction of the first processing part 14a and the second processing part 14b. Next, the control unit 17 moves the workpiece fixing member 12 so that the workpiece P is fixed at the reference position in the normal direction during imaging by the imaging unit 11 . When the imaging by the imaging unit 11 ends, the control unit 17 moves the workpiece fixing member 12 away from the workpiece P, and then moves the first processing unit 14a and the second processing unit 14b to face the processing target portion of the workpiece P. Furthermore, the control part 17 moves the first processing part 14a and the second processing part 14b inward in the opposite direction (direction approaching each other), and clamps the workpiece P at the same normal direction position as the above-mentioned reference position. After the processing by the first processing part 14a and the second processing part 14b is completed, the control part 17 moves the first processing part 14a and the second processing part 14b away from the workpiece P. The control part 17 controls the workpiece fixing member 12, the 1st processing part 14a, and the 2nd processing part 14b with respect to each processing target part based on the said sequence. This processing device 1 can quickly and stably perform desired processing on the workpiece P by performing the above-mentioned control by the control unit 17 .

＜Processing method＞ Next, a processing method using the processing device 1 of FIGS. 1 and 2 will be described with reference to FIGS. 3 to 9 .

This processing method is performed using a processing device 1 equipped with: an imaging unit 11 having an optical element 11a facing the plate-like or sheet-like workpiece P from the normal direction; and a workpiece fixing member 12 having the above-mentioned method. Viewed in the linear direction, the workpiece P is fixed at the reference position in the normal direction near the optical element 11a; the specific part 13 specifies the processing target part of the workpiece P; the first processing part 14a and the second processing part 14b, etc. The above-mentioned processing target part can be sandwiched from both sides; the first driving mechanism 15 drives the workpiece fixing member 12; the second driving mechanism 16 drives the first processing part 14a and the second processing part 14b; and the control part 17. The operations of the first driving mechanism 15 and the second driving mechanism 16 are controlled. As shown in Figure 3, this processing method determines the clamping position in the normal direction of the workpiece P (S1), drives the workpiece fixing member 12 (S2), captures the reference position mark R (S3), and specifies the processing target part of the workpiece P. (S4), clamp the processing target part of the workpiece P (S5). In addition, this processing method includes the procedure of releasing the clamping of the workpiece P after S5. This processing method can quickly and stably perform desired processing on the workpiece P by repeating the sequence of S2 to S5 on different processing target parts of the workpiece P.

(S1) In S1, at least one of the first processing part 14a and the second processing part 14b is driven by the second driving mechanism 16, and the clamping position of the processing target part in the normal direction of the workpiece P is determined.

Referring to FIG. 4 , an example of the procedure for determining the clamping position when the workpiece P is deflected downward will be described. In S1, the second processing part 14b is moved upward so that the upper surface of the support plate 22 of the second processing part 14b is located in an imaginary plane defined by the holding positions of the workpiece P of the four workpiece holders 31. In S1, in order to eliminate the deflection of the workpiece P, the position information of the state in which the upper surface of the support plate 22 is moved to the above-mentioned virtual plane is stored in the control unit 17.

In addition, the above-mentioned sequence is an example, and in S1, the position of the upper surface of the support plate 22 of the second processing part 14b does not necessarily need to coincide with the above-mentioned virtual plane.

(S2) S2 is performed by driving the workpiece fixing member 12 using the first driving mechanism 15 . In S2, the workpiece fixing member 12 is driven so that the above-mentioned reference position is the same as the position in the normal direction when sandwiched between the first processing part 14a and the second processing part 14b.

In S2, the workpiece P is fixed by the workpiece fixing member 12 in such a manner that the position memorized in S1 coincides with the fixed position in the normal direction of the workpiece P. In S2, for example, as shown in FIG. 5 , the workpiece P may be fixed by sandwiching the workpiece P from both sides by a pair of workpiece fixing members 12 . In addition, in S2, as shown in Fig. 6, in order to partially eliminate the downward deflection of the workpiece P, the workpiece fixing member 12 located on the lower side of the workpiece P can also be moved upward, and the workpiece fixing member 12 supports the workpiece from below. P, thereby fixing the workpiece P. Furthermore, in S2, in order to partially eliminate the bulge of the workpiece P, the workpiece fixing member 12 located above the workpiece P can also be moved downward, and the workpiece fixing member 12 supports the workpiece P from above, thereby fixing the workpiece P.

(S3) S3 is performed by photographing the reference position mark R using the imaging unit 11 . In S3, while the workpiece P is fixed at the above-mentioned reference position by the workpiece fixing member 12, the reference position mark R provided on the workpiece P is photographed from the normal direction of the workpiece P. In S3, for example, as shown in FIGS. 5 and 6 , the reference position mark R is captured by a pair of opposing imaging units 11 across the workpiece P.

In addition, in S3, as shown in FIG. 7 , the reference position mark R may be captured by one imaging unit 11 disposed on one side of the workpiece P. For example, if circuit patterns are provided on both sides of the workpiece P and the sizes of the circuit patterns are different from each other, by using the circuit pattern with a smaller size as the reference position mark R, the workpiece P can be easily identified in S4 described below. The processing object part. Even when the reference position mark R is captured by one imaging unit 11, the workpiece P can be fixed from only one side by only one of the workpiece fixing members 12 disposed above or below the workpiece P.

(S4) S4 is performed by the specifying unit 13 . In S4, based on the imaging result of the reference position mark R, the processing target part of the workpiece P is specified.

(S5) In S5, with the first processing part 14a and the second processing part 14b facing both sides of the processing target part of the workpiece P, the workpiece P is sandwiched between the first processing part 14a and the second processing part 14b. Process object part. In S5, the processing target part of the workpiece P is clamped by the first processing part 14a and the second processing part 14b so that the position memorized in S1 coincides with the clamping position in the normal direction of the workpiece P.

An example of the clamping sequence of the processing target part of the workpiece P in S5 will be explained. First, in S5, as shown in FIG. 8, in a state where the fixation of the workpiece P by the workpiece fixing member 12 is released, the first processing part 14a and the second processing part are driven in the plane direction of the workpiece P by the second driving mechanism 16. portion 14b until it is located at a position opposite to the processing target portion of the workpiece P. Furthermore, in S5, as shown in FIG. 9, the processing target part of the workpiece P is pinched from both sides by the 1st processing part 14a and the 2nd processing part 14b. The above-mentioned clamping of the processing target portion can be performed by simultaneously moving the first processing part 14a and the second processing part 14b. In addition, the above-mentioned clamping may be performed by moving the second processing part 14b to a specific position so as to eliminate the deflection of the part to be processed, and then moving the first processing part 14a.

＜Advantages＞ In this processing device 1, the first driving mechanism 15 drives the workpiece fixing member so that the position of the workpiece P in the normal direction is the same when the first processing part 14a and the second processing part 14b are sandwiched and when the imaging part 11 is photographing. 12. Therefore, when the workpiece P is deflected, warped, undulated, etc., the processing device 1 can easily align the normal direction position of the reference position mark R during shooting with the first processing unit 14a and the second processing unit. 14b The normal direction position of the above-mentioned processing target part during clamping is integrated. That is, this processing device 1 can perform imaging by the imaging unit 11 and sandwiching of the first processing unit 14a and the second processing unit 14b while the workpiece P is arranged on the same virtual plane. As a result, the processing device 1 can easily and accurately grasp the positional relationship between the reference position mark R provided on the workpiece P and the processing target portion, thereby appropriately processing the processing target portion.

This processing method can easily adjust the normal direction position of the reference position mark R at the time of photographing to the first processing unit 14a and the second processing unit 14b even when the workpiece P is deflected, warped, undulated, etc. The normal direction position of the above-mentioned processing object part when clamped is integrated. As a result, this processing method can easily and accurately grasp the positional relationship between the reference position mark R provided on the workpiece P and the processing target portion, thereby making it possible to appropriately process the processing target portion.

[Second Embodiment] ＜Processing device＞ The processing device 41 of Fig. 10 is equipped with an imaging unit 11 having an optical element 11a facing the plate-like or sheet-like workpiece P from the normal direction (Z direction in Fig. 10), and is arranged to take pictures of the workpiece from the normal direction. the reference position mark R of P; the workpiece fixing member 12, which fixes the workpiece P at the reference position in the normal direction near the optical element 11a when viewed from the above-mentioned normal direction when the imaging unit 11 is photographing; the specific part 13 , which specifies the processing target part of the workpiece P based on the imaging result of the imaging unit 11; the first processing part 14a and the second processing part 14b, which can sandwich the processing target part from both sides; and the first driving mechanism 15, The workpiece fixing member 12 is driven so that the above-mentioned reference position is the same as the position in the normal direction when sandwiched between the first processing part 14a and the second processing part 14b. Furthermore, this processing device 41 is provided with: the 2nd driving mechanism 16 which drives the 1st processing part 14a and the 2nd processing part 14b; and the control part 17 which controls the operation|movement of the 1st driving mechanism 15 and the 2nd driving mechanism 16. Furthermore, the processing device 41 is provided with a measuring unit 42 that can measure the normal direction position of the workpiece P when photographed by the imaging unit 11 and the position of the workpiece P when sandwiched between the first processing unit 14a and the second processing unit 14b. Normal direction position. This processing device 41 can have the same structure as the processing device 1 of FIG. 1 except that it is provided with the measurement part 42. Therefore, only the measurement unit 42 will be described below.

(Measurement Department) The measurement unit 42 includes a non-contact sensor. Examples of the non-contact sensor include distance sensors such as laser distance sensors and ultrasonic distance sensors. The measuring unit 42 determines the relative position of the measuring point with respect to the measuring unit 42 by measuring the distance in the normal direction of the workpiece P and the measuring point of the workpiece P. The measuring unit 42 specifies the absolute position of the above-mentioned measuring point in the XYZ coordinate system based on the position of the measuring unit 42 . The measuring unit 42 may be movably provided in the plane direction of the workpiece P (the XY plane direction in FIG. 10 ) so that the distance to a desired measurement point can be measured.

＜Processing method＞ The processing method using this processing device 41 is the same as the processing method using the processing device 1 in Fig. 1 . The clamping position in the normal direction of the workpiece P is determined (S1), the workpiece fixing member 12 is driven (S2), and the reference position mark is photographed. R (S3) specifies the processing target part of the workpiece P (S4), and clamps the processing target part of the workpiece P (S5).

In this processing method, the measuring unit 42 measures the scheduled clamping position in the normal direction of the workpiece P determined in S1 and the fixed position in the normal direction of the workpiece P in S2. In addition, in this processing method, the clamping position in the normal direction of the workpiece P in S5 may also be measured by the measuring unit 42 . In this processing method, the workpiece fixing member 12 is driven in S2 so that the measured value in S1 or S5 matches the measured value in S2, or the first processing unit 14a and the second processing unit are driven in S1 or S5. 14b.

＜Advantages＞ Since the processing device 41 is provided with the measuring unit 42, even if the workpiece P is deflected, warped, undulated, etc., the workpiece P can be processed quickly and appropriately in a more stable state.

This processing method uses the measuring unit 42 to measure the normal direction position of the workpiece P. Therefore, even if the workpiece P is deflected, warped, undulated, etc., the workpiece P can be processed quickly and appropriately in a more stable state.

[Other embodiments] The above-mentioned embodiment does not limit the structure of this invention. Therefore, the above-described embodiments may omit, replace, or add constituent elements of each part of the above-described embodiments based on the description of this specification and technical common sense, and these shall be construed as falling within the scope of the present invention.

In the above embodiment, the structure of holding the workpiece in the horizontal direction has been described. However, the holding direction of the workpiece can be changed according to the specifications of the device. Furthermore, in the above-mentioned embodiment, the structure in which the corner portion of the workpiece is held by the workpiece holder has been described, but the holding direction of the workpiece in this processing device is not limited to the above-mentioned structure.

In the above embodiment, the structure in which the second driving mechanism drives at least one of the first processing part and the second processing part to determine the clamping position in the normal direction of the workpiece before fixing the workpiece by the workpiece fixing member has been explained. . However, if the clamping position of the workpiece in the normal direction of the first processing part and the second processing part is known, the clamping position of the workpiece in the normal direction does not need to be determined by the second driving mechanism. [Industrial availability]

As described above, the processing device according to one aspect of the present invention is suitable for appropriately processing the processing target portion of the workpiece.

1: Processing device 11:Camera Department 11a: Optical components 12: Workpiece fixing component 12a:Support surface 13:Specific department 14a: 1st Processing Department 14b: 2nd Processing Department 15: 1st drive mechanism 16: 2nd drive mechanism 17:Control Department 21:Probe 22:Support board 31: Workpiece holder 41: Processing device 42: Measurement Department P: workpiece R: reference position mark S1~S5: steps

FIG. 1 is a schematic side view of a processing device according to an embodiment of the present invention, viewed from a direction perpendicular to the normal direction of the workpiece. Figure 2 is a cross-sectional view of the processing device in Figure 1 taken along line II-II. FIG. 3 is a flow chart showing a processing method using the processing device of FIG. 1 . FIG. 4 is a schematic side view showing the sequence of clamping positions for determining the normal direction of the workpiece in the processing method of FIG. 3 . FIG. 5 is a schematic side view showing the sequence of photographing the reference position mark in a state where the workpiece is fixed by the workpiece fixing member in the processing method of FIG. 3 . FIG. 6 is a schematic side view of a modified example of FIG. 5 showing the sequence of photographing the reference position mark in a state where the workpiece is fixed by the workpiece fixing member in the processing method of FIG. 3 . FIG. 7 is a schematic side view of a modification example of FIG. 5 and FIG. 6 showing the sequence of photographing the reference position mark in a state where the workpiece is fixed by the workpiece fixing member in the processing method of FIG. 3 . FIG. 8 is a schematic side view showing a state before the processing target portion of the workpiece is sandwiched between the first processing part and the second processing part in the processing method of FIG. 3 . FIG. 9 is a schematic side view showing a state in which the processing target portion of the workpiece is sandwiched between the first processing part and the second processing part in the processing method of FIG. 3 . FIG. 10 is a schematic side view of a processing device of an embodiment different from the processing device of FIG. 1 , viewed from a direction perpendicular to the normal direction of the workpiece.

1: Processing device

11:Camera Department

11a: Optical components

12: Workpiece fixing component

12a:Support surface

13:Specific department

14a: 1st Processing Department

14b: 2nd Processing Department

15: 1st drive mechanism

16: 2nd drive mechanism

17:Control Department

21:Probe

22:Support board

31: Workpiece holder

P: workpiece

R: reference position mark

Claims (8)

A processing device having: The imaging unit has an optical element facing the plate-like or sheet-like workpiece from the normal direction, and takes pictures of the reference position mark provided on the workpiece from the normal direction; A workpiece fixing member that fixes the workpiece at a reference position in the normal direction near the optical element when viewed from the normal direction when the imaging unit is taking pictures; A specifying unit that specifies the processing target portion of the workpiece based on the imaging result of the imaging unit; The first processing part and the second processing part can sandwich the above-mentioned processing target part from both sides; and A first driving mechanism drives the workpiece fixing member so that the reference position is the same as the position in the normal direction when sandwiched between the first processing part and the second processing part. The processing device of claim 1, wherein the workpiece fixing member partially fixes the workpiece at a position closer to the optical element than the processing target part when viewed from the normal direction. The processing device according to claim 1, wherein the first driving mechanism drives the workpiece fixing member away from the workpiece before the first processing part and the second processing part sandwich the processing target part. The processing device according to claim 2, wherein the first driving mechanism drives the workpiece fixing member away from the workpiece before the first processing part and the second processing part sandwich the processing target part. The processing device according to any one of claims 1 to 4, which is provided with: a second driving mechanism that drives the above-mentioned first processing part and the above-mentioned second processing part, The above-mentioned second driving mechanism drives at least one of the above-mentioned first processing part and the above-mentioned second processing part to determine the clamping position of the above-mentioned workpiece in the above-mentioned normal direction before the above-mentioned workpiece is fixed by the above-mentioned workpiece fixing member, The first driving mechanism drives the workpiece fixing member so that the workpiece is positioned in a normal direction determined by the second driving mechanism. The processing device according to any one of claims 1 to 4, further comprising: a measuring unit capable of measuring the normal direction position of the workpiece during the imaging, and being sandwiched between the first processing unit and the second processing unit. The normal direction position of the above-mentioned workpiece at the time of entry. The processing device of claim 5, further comprising: a measuring unit capable of measuring the normal direction position of the workpiece during the imaging and the position of the workpiece when sandwiched between the first processing unit and the second processing unit. Normal direction position. A treatment method that uses: The imaging part has an optical element facing the plate-shaped or sheet-shaped workpiece from the normal direction; A workpiece fixing member, which is located near the optical element when viewed from the normal direction, and fixes the workpiece at a reference position in the normal direction; The specific part specifies the processing target part of the above-mentioned workpiece; The first processing part and the second processing part can sandwich the above-mentioned processing target part from both sides; and A first driving mechanism that drives the above-mentioned workpiece fixing member processing device, The above-mentioned workpiece fixing member is driven so that the above-mentioned reference position is the same as the position in the normal direction when sandwiched between the above-mentioned first processing part and the above-mentioned second processing part, With the workpiece fixed at the reference position by the workpiece fixing member, the reference position mark provided on the workpiece is photographed from the normal direction, Based on the imaging result of the reference position mark, the processing target part of the workpiece is specified.