577981 A7 B7 五、發明説明（1 ) (發明所屬之技術領域） 本發明係關於一種缺陷檢查裝置及其裝置，例如關於 一種對於形成於印刷基板的配線圖案或接合墊等。用以進 行缺陷之檢查的缺陷檢查方法及其裝置者。 (習知之技術） 例如在形成在印刷基板上之配線圖案或施加鍍金之接 合墊等，會產生依傷痕，異物，打痕，污垢等所引起之缺 陷。近年來，對於利用上述印刷基板等之電氣電子電路， 除了被要求更複雜化，另一方面不但更強烈地對於輕量化 ，精緻化之要求之外，還爲了提高製品之品質或良品率， 對於此等缺陷不可欠缺進行精緻之檢查。 在有上述缺陷之部位，由於與本來之配線圖案或接合 墊等在形狀或反射光強度等上有所不同，因此藉C C D攝 影機等之攝影機構取得上述印刷基板等之攝影畫像，在該 攝影畫像施以依據形狀或反射光強度等之畫像處理，或與 基準畫像相比等，可自動地進行上述缺陷之檢查。 檢查上述缺陷時成爲一重要檢查，爲檢查時之印刷基 板等之平坦度。上述攝影機構之光學系統，係假想通常攝 影對象爲平坦而被設定，惟成爲攝影對象之上述印刷基板 等實際上並不一定成爲平坦。又，爲了進行精緻之檢查， 被寫體深度儘量設定較小。所以，若上述攝影對象不平坦 ，則無法得到鮮明畫像或無法得到正確形狀，因而會降低 檢查精確度。 (請先閱讀背面之注意事項再填寫本頁)577981 A7 B7 V. Description of the invention (1) (Technical field to which the invention belongs) The present invention relates to a defect inspection device and its device, for example, to a wiring pattern or a bonding pad formed on a printed circuit board. Defect inspection method and device for inspecting defects. (Conventional technology) For example, a wiring pattern formed on a printed circuit board or a gold-plated bonding pad may cause defects due to scratches, foreign objects, scratches, or dirt. In recent years, electrical and electronic circuits using the above-mentioned printed substrates have been required to be more complicated. On the other hand, not only have they demanded more weight reduction and refinement, but also in order to improve product quality or yield, These defects must be examined carefully. Because the shape and reflected light intensity of the wiring pattern, bonding pads, etc. are different from those of the defective part, a photographic image of the printed circuit board or the like is obtained by an imaging mechanism such as a CCD camera. The above-mentioned defects can be automatically inspected by applying image processing based on the shape or the intensity of the reflected light, or comparing with the reference image. It becomes an important inspection when inspecting the above-mentioned defects, and it is the flatness of the printed substrate or the like during the inspection. The optical system of the above-mentioned photographing mechanism is set on the assumption that the photographic object is usually flat, but the printed circuit board and the like that are to be photographed are not necessarily flat. In addition, in order to perform delicate inspection, the depth of the object to be written is set as small as possible. Therefore, if the above-mentioned photographic subject is not flat, a sharp image cannot be obtained or a correct shape cannot be obtained, thereby reducing the inspection accuracy. (Please read the notes on the back before filling this page)
、1T 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X 297公釐） _4- 577981 A7 B7 五、發明説明（2 ) (請先閲讀背面之注意事項再填寫本頁) 由於僅將上述印刷基板等載放在平坦場所，並不能解 決上述攝影對象之撓曲等，因此如第8圖所示，將上述攝 影對象8 1夾在設於對應於攝影對象8 1兩端之位置的推 板8 2與昇降構件8 3之間，俾確保上述攝影對象8 1之 平坦度。 (發明欲解決之課題） 至今，大部分基板具某一程度之厚度，且基板本體具 有剛性性質，因此僅夾住上述攝影對象8 1之兩端即可充 分地確保平坦度。 然而在上述印刷基板等，逐漸製造0 · 0 6 m m至 0 · 6mm左右之極薄者並逐漸被使用。尤其是，BGA 或C S P用插入物基板之薄膜化係顯著。 在此等極薄基板，即使如上述地夾住該兩端部地支持 ，也藉由基板之自重而使基板撓曲，無法進行精確度優異 之檢查。又僅載放在平坦場所，大部分在一部分產生彎曲 等，而爲解決該問題在檢查上產生煩雜之工夫。 經濟部智慧財產局員工消費合作社印製 如帶B G A或T A B等之卷型印刷基板地，在其側方 部形成有孔眼部（爲了嚙合於運送機構之複數相連之孔） ，則藉在上述孔眼部施加張力，即可某一程度地防止發生 不均勻之彎曲，惟未形成上述孔眼部之薄膜基板也很多。 所以，如上述地厚度極薄之印刷基板係缺陷檢查時之 處理較難，成爲降低缺陷之檢查精確度之主要原因。 本發明係爲了解決此種習知技術之課題，改良了缺陷 -5- 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 577981 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明説明（3 ) 檢查方法及其裝置’其目的係於提供一種藉配置於檢查對 象物之照明側之具光透射性的光透射性板構件，及對於上 述檢查對象物在與上述光透射性板構件相反側平行地配置 於上述光透射性構件的板構件，並藉夾住上述檢查對象物 之狀態加以支持，即使上述檢杳對象物爲例如厚度極薄之 印刷基板時，也可進行精緻之缺陷檢查的缺陷檢查方法及 其裝置。 (解決課題所用之手段） 爲了達成上述目的，本發明之缺陷檢查裝置，屬於具 備支持板狀檢查對象物的支持機構，及得到上述檢查對象 物之攝影畫像的攝影機構，依據藉上述攝影機構所得到之 上述攝影畫像來檢查上述檢查對象物之缺陷的缺陷檢查裝 置，其特徵爲：上述支持機構係具備：配置於上述檢查對 象物之上述攝影機構側之具光透射性的光透射性板構件， 及對於上述檢查對象物在與上述光透射性板構件相反側平 行地配置於上述光透射性板構件的板構件；藉上述光透射 性板構件及上述板構件，以夾持上述檢查對象物之狀態加 以支持者。 在本發明之裝置中，由於檢查對象物以夾持狀態被支 持在互相平行地配置之板構件（光透射性板構件與板構件 )之間之間，因此即使上述檢查對象物爲例如厚度極薄之 印刷基板時，也可容易地確保上述檢查對象物之平坦度， 成爲可進行精緻之缺陷檢查。 (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -6 577981 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明説明（4 ) 又，本發明之缺陷檢查裝置中，上述光透射性板構件 與上述攝影機構之位置關係係被固定，且上述板構件係可 動而能變更與上述光透射性板構件之位置關係。 依照上述構件，成爲可容易且確實地進行上述檢查對 象物與上述攝影機構之對位。 又，本發明之缺陷檢查裝置中，具備藉上述光透射性 板構件及板構件在夾持上述檢查對象物之狀態下，將上述 光透射性板構件及上述板構件作爲一體朝板寬方向移送之 移送機構也可以。又，上述光透射性板構件及上述板構件 ，朝上述移送機構之移送方向具有上述檢查對象物之至少 兩倍之長度也可以。 依照上述構成，成爲可連續地有效率進行上述檢查對 象物之檢查與移送。 又，本發明之缺陷檢查裝置中，關於上述光透射性板 構件及上述板構件，在與上述攝影機構相反側具有第二攝 影機構，設置平行於上述光透射性板構件及上述板構件且 固定於上述第二攝影機構之位置關係的第二光透射性構件 關於上述第二光透射性板構件，在與上述第二攝影機構相 反側設置能變更與上述第二光透射性板構件之位置關係的 第二板構件，藉上述第二光透射性板構件及上述第二板構 件以夾持第二檢查對象物之狀態下加以支持也可以。 依照上述構成，成爲可有效地進行在兩面具有檢查對 象的上述檢查對象物之檢查。 又，在本發明之缺陷檢查裝置中，在上述光透射性板 (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） 577981 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明説明（5 構件及上述板 象物之緣部的 依照上述 之緣部，成爲 又，在本 述支持機構之 又，本發 所支持之板狀 像，依據取得 陷檢查方法， 置於上述檢查 透射性板構件 板構件相反側 ，以夾持上述 在本發明 被支持在互相 構件）之間之 薄之印刷基板 度，成爲可進 構件之至少一方，設置用以支持上述檢查對 突出部也可以。 構成，藉在上述突出部支持上述檢查對象物 可進行上述檢查對象物之面方向的對位。 發明之缺陷檢查裝置中，具有照明支持於上 上述檢查對象物的照明機構也可以。 明之缺陷檢查方法，屬於使用攝影機構攝影 檢查對象物俾取得上述檢查對象物之攝影畫 之上述攝影畫像來檢查上述檢查對象物之缺 其特徵爲：在支持上述檢查對象物時，藉配 對象物之上述攝影機構側之具光透射性的光 ，及對於上述檢查對象物在與上述光透射性 平行地配置於上述光透射性板構件的板構件 檢查對象物之狀態加以支持。 之檢查方法中，由於檢查對象物以夾持狀態 平行地配置之板構件（光透射性板構件與板 間，因此即使上述檢查對象物爲例如厚度極 時，也可容易地確保上述檢查對象物之平坦 行精緻之缺陷檢查。 (發明之實施形態） 以下參照所附圖式說明本發明之實施形態，並充分瞭 解本發明。又，以下之實施形態係本發明之具體例子，並 不限定本發明之技術性範圍之性格者。 (請先閱讀背面之注意事項再填寫本頁) ·!、 1T Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Cooperatives. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X 297 mm) _4- 577981 A7 B7 V. Description of the invention (2) (Please read the notes on the back first (Fill in this page again) Since the printed board and the like are placed on a flat surface, the deflection of the subject cannot be solved. Therefore, as shown in Figure 8, the subject 81 is placed between the two The flatness of the above-mentioned photographing object 81 is ensured between the push plates 82 and the elevating member 83 at the ends of the object 81. (Problems to be Solved by the Invention) Until now, most substrates have a certain thickness and the substrate body has rigid properties. Therefore, the flatness can be sufficiently ensured only by clamping both ends of the photographic object 81 described above. However, in the above-mentioned printed circuit boards and the like, extremely thin ones of about 0.6 mm to 0.6 mm are gradually manufactured and used gradually. In particular, the thickness of the interposer substrate for BGA or C S P is significantly reduced. Even if these extremely thin substrates are supported by sandwiching the both ends as described above, the substrate is deflected by the weight of the substrate, and an inspection with excellent accuracy cannot be performed. It is only placed on a flat place, and most of it is bent, etc., and it takes a lot of trouble to inspect to solve this problem. The consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs prints a roll-type printed circuit board with a BGA or TAB, etc., and an eyelet is formed on its side (to engage the multiple connected holes of the transport mechanism). Applying tension to the perforations can prevent uneven bending to a certain extent, but there are many film substrates that do not form the perforations. Therefore, as described above, the extremely thin printed circuit board is difficult to handle during defect inspection, which is the main reason for reducing the accuracy of defect inspection. In order to solve the problems of this conventional technology, the present invention improves the defects. -5- The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 577981 A7 B7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 2. Description of the invention (3) Inspection method and apparatus thereof The purpose is to provide a light-transmissive light-transmitting plate member disposed on the illumination side of the inspection object, and transmitting the inspection object to the light. The opposite side of the flexible plate member is arranged in parallel to the plate member of the light-transmitting member, and is supported by sandwiching the inspection object, even if the inspection object is, for example, an extremely thin printed substrate. Defect inspection method and device for delicate defect inspection. (Means for solving problems) In order to achieve the above-mentioned object, the defect inspection device of the present invention belongs to a support mechanism having a plate-shaped inspection object and a photographing mechanism that obtains a photographic image of the inspection object. The defect inspection device for inspecting the defect of the inspection object by obtaining the photographic image, wherein the support mechanism includes a light-transmitting light-transmitting plate member disposed on the photographing mechanism side of the inspection object. And a plate member disposed on the light-transmitting plate member in parallel to the light-transmitting plate member on the side opposite to the light-transmitting plate member; the light-transmitting plate member and the plate member are used to hold the inspection object Status supporters. In the device of the present invention, the inspection target is supported between the plate members (light-transmitting plate members and plate members) arranged in parallel with each other in a sandwiched state. Therefore, even if the inspection target is a thickness electrode, for example, When a thin printed substrate is used, the flatness of the inspection object can be easily ensured, and a delicate defect inspection can be performed. (Please read the precautions on the back before filling this page) This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) -6 577981 A7 B7 Printed by the Consumers ’Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs 4) In the defect inspection device of the present invention, the positional relationship between the light-transmitting plate member and the imaging mechanism is fixed, and the plate member is movable to change the positional relationship with the light-transmitting plate member. According to the above-mentioned means, it is possible to easily and reliably perform the alignment of the inspection object and the imaging mechanism. Moreover, the defect inspection apparatus of this invention is provided with the said light-transmitting plate member and the plate member moving the said light-transmitting plate member and the said plate member as a whole in the board width direction while holding the said inspection object. Transfer agencies are also available. The light-transmitting plate member and the plate member may have at least twice the length of the inspection object in the transfer direction of the transfer mechanism. According to the above configuration, inspection and transfer of the inspection object can be performed continuously and efficiently. In the defect inspection device of the present invention, the light-transmitting plate member and the plate member are provided with a second photographing mechanism on the side opposite to the photographing mechanism, and are provided in parallel with the light-transmitting plate member and the plate member and fixed. A second light-transmitting member in a positional relationship with the second light-transmitting mechanism is provided on the opposite side of the second light-transmitting plate member from the second light-transmitting plate member, and the positional relationship with the second light-transmitting plate member can be changed. The second plate member may be supported by the second light-transmitting plate member and the second plate member while holding a second inspection object. According to the above configuration, the inspection of the inspection object having inspection objects on both sides can be performed efficiently. In the defect inspection device of the present invention, the above-mentioned light-transmitting plate (please read the precautions on the back before filling in this page) This paper size is applicable to China National Standard (CNS) A4 (210X 297 mm) 577981 A7 B7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economy The image is placed on the opposite side of the above-mentioned inspection transmissive plate member according to the method of obtaining the pit inspection, so as to clamp the above-mentioned thin printed substrate between the members supported by the present invention, and become at least an accessible member. On one side, a protrusion may be provided to support the inspection. It is configured that the inspection object can be aligned in the plane direction of the inspection object by supporting the inspection object by the protrusion. The defect inspection device of the invention may include an illumination mechanism for supporting the inspection object. The method for inspecting defects is to use the photography agency to photograph the inspection object and obtain the photographic image of the inspection object to obtain the inspection picture. The feature is that when supporting the inspection object, the inspection object is borrowed. The light-transmitting light on the imaging mechanism side supports the state in which the inspection object is a plate member inspection object arranged on the light-transmitting plate member in parallel with the light transmittance. In the inspection method, a plate member (a light-transmitting plate member and a plate is arranged in parallel with the object to be inspected in a sandwiched state, so that the object to be inspected can be easily secured even when the object to be inspected is, for example, a thick electrode. (Exemplary Embodiments of the Invention) The embodiments of the present invention will be described below with reference to the drawings, and the present invention will be fully understood. The following embodiments are specific examples of the present invention, and do not limit the present invention. Personality of the technical scope of the invention (Please read the notes on the back before filling out this page) ·!
、1T 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） -8- 577981 A7 B7 五、發明説明（6 ) 表示於第1圖係通用於實施本發明之實施形態之缺陷 檢查方法上的缺陷檢查裝置之基本性構成。 (請先閲讀背面之注意事項再填寫本頁) 如第1圖所示，本發明之實施形態的缺陷檢查裝置係 具備：支持例如印刷基板等之板狀檢查對象物1的檢查台 部（相當於支持機構）2，及照明支持於上述檢查台部2 之上述檢查對象物1的環照明（照明機構之一例子）3， 及攝影來自藉上述環照明3所照明之上述檢查對象物1的 反射光而得到上述檢查對象物1之攝影畫像的C C D攝影 機（攝影機構之一例子）4 ;在依據藉上述C C D攝影機 4所得到之上述攝影畫像來檢查上述檢查對象物1之缺陷 上與習知裝置同樣。 經濟部智慧財產局員工消費合作社印製 另一方面，本發明之實施形態的缺陷檢查裝置，與習 知裝置不相同處爲上述檢查台部2具備：配置於上述檢查 對象物1之上述C C D攝影機側之光透射性的光透射性板 構件5，及對於上述檢查對象物1在與上述光透射性板構 件5相反側平行地配置於上述光透射性板構件5的板構件 6，藉上述光透射性板構件5及上述板構件6以夾持上述 檢查對象物1之狀態加以支持之處。 上述缺陷檢查裝置之基本性構成係大致區分成上述檢 查台部2，及包含上述C CD攝影機4與上述環照明的攝 影部7。上述檢查台部2係具備線性致動器8，對於上述 攝影部7朝水平方向可移動。表示於第1圖，上述檢查台 部2係位在上述攝影部7下方之檢查位置之狀態。 在上述檢查台部2中，設於上述線性致動器3上之構 -9 - 本紙張又度適用中國國家標準（CNS ) A4規格（210X297公釐） 577981 A7 B7 五、發明説明（7) 成，包含有用以支持例如印刷基板等之板狀檢查對象物1 的上述光透射性板構件5與上述板構件6。 (請先閲讀背面之注意事項再填寫本頁) 上述光透射性板構件5係透射可視光之例如玻璃板。 上述光透射性板構件5係安裝於被固定在上述線性致動器 8上之支持構件8 1成爲與水平方向平行之狀態。 又，上述板構件6係不透射可視光的有色板構件。上 述板構件6係與上述光透射性板構件5成爲互相地平行地 (此時成爲朝水平方向平行地），安裝於上述線性致動器 8上之氣缸8 2。藉由上述氣缸8 2之驅動，上述板構件 6係可朝上下方向移動。 另一方面，在上述攝影部7中，上述C CD攝影機4 及上述環照明3係被安裝於框架7 1。上述C C D攝影機 4係連接於未圖示之計算機構，自上述C C D攝影機4所 輸出之攝影畫像係輸出至上述計算機構。 上述環照明3係圓環狀照明，將光線均勻地照射在位 於上述檢查位置的上述檢查對象物1之表面。 經濟部智慧財產局員工消費合作社印製 上述C C D攝影機4及上述環照明3之高度位置係可 調整，進行最適當化於例如上述缺陷檢查裝置之初動運轉 時等。欲調整上述C C D攝影機4及上述環照明3之高度 位置時，特別是上述C C D攝影機4與上述檢查對象物1 之高度位置之關係極重要。 由於上述C CD攝影機4與上述檢查對象物1之高度 位置之關係，係對於藉上述C C D攝影機4所攝影的上述 檢查對象物1之攝影畫像有很大影響，因此在上述最適當 -10- 本紙張尺度適用中國國家標準（CNS ) A4規格（21〇'〆297公釐） 577981 A7 _B7___ 五、發明説明（8 ) 化後，必須儘量不變動上述C C D攝影機4與上述檢查對 象物1之高度位置之關係。 上述光透射性板構件5係(被安裝在固定於上述支持構 件8 1之狀態，乃爲了此者。若上述光透射性板構件5被 固定，則最適當化後之上述C C D攝影機4與上述光透射 性板構件5之高度位置係不會化。因此，若以上述光透射 性板構件5爲基準經常地決定上述檢查對象物1之高度位 置，即可保持上述C C D攝影機4與上述檢查對象物之高 度位置的最適當關係。 將上述檢查對象物1之搬入裝置等加設於如上述之基 ! \ - - 本上構成的上述缺陷檢查裝置之整體構成，表示於第2圖 ，又表示於第2圖的各構成之配置關係，係對應於從位於 上述C C D攝影機4之上方觀看各構成時的配置關係。 在第2圖中，箭號Y 1係表示上述檢查對象物1之移 送路徑。 上述檢查對象物1係如上述箭號Y 1所示地，從搬入 部9 1經由載入部9 2，被移送至配置有上述攝影部7之 檢查部9 3。在上述檢查部9 3進行檢查之上述檢查對象 物1，係從上述檢查部9 3經由載出部9 4，被搬出至搬 出部9 5。 在此，上述搬入部9 1係容約有複數枚上述檢查對象 物1之上述檢查對象物1之移送起點；上述載入部9 2係 位於上述搬入部91之上述檢查對象物1被移送至上述檢 查台2的場所；上述檢查部9 3係具有上述攝影部3之場 本紙張尺度適用中國國家標準（CNS ) A4規格(210X297公釐） :11 - ' (請先閱讀背面之注意事項再填寫本頁)、 1T This paper size applies the Chinese National Standard (CNS) A4 specification (210 × 297 mm) -8-577981 A7 B7 V. Description of the invention (6) Shown in Figure 1 is a defect inspection method commonly used to implement the embodiment of the present invention The basic structure of the above defect inspection device. (Please read the precautions on the back before filling in this page.) As shown in Figure 1, the defect inspection device according to the embodiment of the present invention includes: an inspection table unit (equivalent to a plate-shaped inspection object 1) In the support mechanism) 2, and ring lighting (an example of a lighting mechanism) 3 for lighting the inspection object 1 supported by the inspection table section 2, and photographing from the inspection object 1 illuminated by the ring illumination 3 A CCD camera (an example of an imaging mechanism) 4 that obtains a photographic image of the inspection object 1 by reflecting light; and is familiar with inspecting the defects of the inspection object 1 based on the photographic image obtained by using the CCD camera 4 The device is the same. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. On the other hand, the defect inspection device according to the embodiment of the present invention is different from the conventional device in that the inspection table section 2 includes the CCD camera disposed on the inspection object 1. A light-transmitting plate member 5 having a light-transmitting side, and a plate member 6 disposed on the light-transmitting plate member 5 in parallel to the light-transmitting plate member 5 on the inspection object 1 by the light The transmissive plate member 5 and the plate member 6 are supported in a state where the inspection object 1 is sandwiched. The basic structure of the defect inspection apparatus is roughly divided into the inspection table section 2 and the imaging section 7 including the CC camera 4 and the ring illumination. The inspection table section 2 is provided with a linear actuator 8 and is movable in the horizontal direction with respect to the imaging section 7. As shown in FIG. 1, the inspection table section 2 is in a state where it is located at an inspection position below the imaging section 7. In the above-mentioned inspection table section 2, the structure provided on the above-mentioned linear actuator 3-9-This paper is again applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) 577981 A7 B7 V. Description of the invention (7) It includes the light-transmitting plate member 5 and the plate member 6 for supporting a plate-shaped inspection object 1 such as a printed circuit board. (Please read the cautions on the back before filling in this page.) The light-transmitting plate member 5 is a glass plate that transmits visible light. The light-transmitting plate member 5 is mounted on a support member 81 fixed to the linear actuator 8 in a state parallel to the horizontal direction. The plate member 6 is a colored plate member that does not transmit visible light. The plate member 6 is a cylinder 82 connected to the linear actuator 8 so as to be parallel to the light transmitting plate member 5 (in this case, parallel to the horizontal direction). The plate member 6 is movable in the vertical direction by the drive of the air cylinder 82. On the other hand, in the imaging section 7, the CC camera 4 and the ring lighting 3 are mounted on the frame 71. The C C D camera 4 is connected to a calculation mechanism (not shown), and the photographic image output from the C C D camera 4 is output to the calculation mechanism. The ring illumination 3 is ring-shaped illumination, and uniformly irradiates light on the surface of the inspection object 1 at the inspection position. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. The height positions of the above-mentioned CC camera 4 and the above-mentioned ring lighting 3 are adjustable, and are optimized for, for example, the initial operation of the defect inspection device. When the height positions of the CC camera 4 and the ring lighting 3 are to be adjusted, the relationship between the height positions of the CC camera 4 and the inspection object 1 is particularly important. Since the relationship between the height position of the C CD camera 4 and the inspection object 1 has a great influence on the photographic image of the inspection object 1 photographed by the CCD camera 4, the most appropriate The paper size applies the Chinese National Standard (CNS) A4 specification (21〇 '厘 297 mm) 577981 A7 _B7___ 5. After the description of the invention (8), the height position of the CCD camera 4 and the inspection object 1 must not be changed as much as possible. Relationship. The light-transmitting plate member 5 is mounted in a state fixed to the support member 81 for this purpose. If the light-transmitting plate member 5 is fixed, the CCD camera 4 and the above-mentioned optimized camera and the The height position of the light-transmitting plate member 5 is not changed. Therefore, if the height position of the inspection object 1 is often determined based on the light-transmitting plate member 5 as a reference, the CCD camera 4 and the inspection object can be maintained. The most appropriate relationship between the height and position of the object. The above-mentioned inspection object 1 carrying device is installed on the base as described above! \--The overall structure of the above-mentioned defect inspection device is shown in Figure 2 and also shows The arrangement relationship of each component in FIG. 2 corresponds to the arrangement relationship when each component is viewed from above the CCD camera 4. In FIG. 2, the arrow Y1 indicates the transfer path of the inspection object 1. As shown by the arrow Y1, the inspection object 1 is transferred from the carry-in section 91 to the inspection section 93 where the photographing section 7 is disposed via the loading section 92. The inspection section 9 3 get on The above-mentioned inspection object 1 to be checked is carried out from the above-mentioned inspection unit 93 through the carrying-out unit 94, to the carrying-out unit 95. Here, the carrying-in unit 91 includes about a plurality of the above-mentioned inspection objects 1. The starting point for transferring the inspection object 1; the loading section 92 is a place where the inspection object 1 located in the carrying-in section 91 is transferred to the inspection table 2; the inspection section 93 is a field having the photographing section 3 This paper size applies to China National Standard (CNS) A4 specification (210X297 mm): 11-'(Please read the precautions on the back before filling this page)
、1T 經濟部智慧財產局員工消費合作社印製 577981 A7 B7 五、發明説明（1〇) (請先閲讀背面之注意事項再填寫本頁) 行。複數枚上述檢查對象物1係從上述搬入部9 1依順序 一枚一枚地供給於上述載入部9 2，惟對於此種複數枚上 述檢查對象物1爲了圓淸地進行移送與檢查，上述檢查台 2之上述光透過性板構件5與上述板構件6，係於其移送 方向具有上述檢查對象物1之至少兩倍之長度，可同時地 支持兩枚上述檢查對象物1。 此乃如第2 ( a )圖所示，爲了可同時地進行上述檢 查對象物1之移送，及對於比該移送之前被移送的上述檢 查對象物1之檢查。 以下，一面依次參照第3 (a)圖至第3 (d)圖， 及第4 (a)圖至第4 (d)圖，一面進行上述缺陷檢查 裝置之動作說明（也兼本發明之實施形態的缺陷檢查方法 之詳細說明）。在以下，上述光透過性板構件5及板構件 6之全表面部分之中，在同時地載放兩枚上述檢查對象物 1所用之各該面部分附與5a，6a，5b，6b之記號 。又，第2 (a) ，（b)圖之上述搬入用夾頭裝置 經濟部智慧財產局員工消費合作社印製 912，與第3 (a)圖至第3 (d)圖及第4 (a)圖 至第4 (d)圖之此等裝置，係在圖示之形狀有所不同， 惟在至少將上述檢查對象物1可往復移動在從上述棚架構 件9 1 1移送至上述載入部9 2之兩者間之處，動作上之 功能係相同者。對於各圖之上述搬出用夾頭裝置9 5 1， 也爲了移送上述檢查對象物1而可往復移動在上述載出部 9 4與上述搬出部9 5之間，且可朝上述方向移動之處， 動作上之功能係相同者。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -13 - 577981 經濟部智慧財產局員工消費合作社印製 A7 B7五、發明説明（9 ) 所；上述載出部9 4係上述檢查對象物1從上述檢查台2 退出之場所；上述搬出部9 5係從上述載出部9 4退出之 上述檢查對象物1暫時容納的移送終點。 在上述搬入部9 1設有棚架構件9 1 1，如第2 ( b )圖所示，複數枚上述檢查對象物1以積層於上述棚架構 件9 1 1之狀態下被容納。在上述棚架構件9 1 1中，各 檢查對象物1所載置之各棚架係同步地可朝上下方向移動 。在上述棚架構件911之近旁設有可往復移動在握持上 述檢查對象物1之上述搬入部9 1與上述載入部9 2之間 的搬入用夾頭裝置9 1 2。 在上述搬入用夾頭裝置9 1 2握持位在上述棚架構件 9 1 1之上述檢查對象物1，藉移動至上述載入部部9 2 ，上述檢查對象物1從上述搬入部91被移送至上述載入 部9 2。 又，在上述搬出部9 5之近旁，也設有與上述搬入用 夾頭裝置相類似的搬出用夾頭裝置9 5 1。該搬出用夾頭 裝置9 5 1，係可往復移動在上述載出部9 4與上述搬出 部9 5之間，且可朝上下方向移動。在上述搬出用夾頭裝 置9 5 1握持位於上述載出部9 4之上述檢查對象物1之 後，藉將上述搬出用夾頭裝置9 5 1移動至上述搬出部 9 5，上述檢查對象物從上述載出部9 4被移送至上述搬 出部9 5。 從上述載入部9 2至上述載出部9 4的上述檢查對象 物1之移送，係使用上述檢查台部2之線性致動器8所進 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -12- (請先閲讀背面之注意事項再填寫本頁) 577981 A7 ___ B7 五、發明説明（11 ) (請先閱讀背面之注意事項再填寫本頁) 第3 ( a )圖係表示上述檢查對象物1藉由上述搬入 用夾頭裝置9 1 2從上述搬入部9 2被移送至位於上述載 入部9 2之上述檢查台部2之狀態者。 將上述檢查對象物1從上述搬入部91移送至上述載 入部9 2時，首先’上下移動上述棚架構件9 1 1之各棚 架及上述搬入用夾頭裝置9 1 2，使上述棚架構件9 1 1 之成爲下一檢查對象的上述檢查對象物1之棚架高度與上 述搬入用夾頭裝置912之高度被調整成事先設定之上述 檢查對象物1之移送時的高度位置。另一方面，在上述檢 查台部2，藉由上述氣缸8 2使上述板構件6下降，而在 高度位置被固定之上述光透過性板構件5與上述板構件6 之間形成有空間。之後，上述檢查台部2係藉上述線性致 動器8被驅動而移動至上述載入部9 2之所定位置。當上 述檢查台部2移動至上述載入部9 2時，該檢查對象物1 藉上述搬入用夾頭裝置9 1 2被握持，從上述搬入部9 1 被移送至上述載入部9 2。該檢查對象物1藉上述搬入用 夾頭裝置912移動至上述檢查台部2之所定水平位置時 經濟部智慧財產局員工消費合作社印製 , 上 2 退板止上 1 3 1 22f， 物 6 9 1 上度時 象分置 9 與程此 對部裝置 5 度 。 查面頭裝件厚昇 檢之夾頭構之上 該 6 用夾板 1 6 放件入用性物件 開構搬入過.象構 係板述搬透對板 2 述上述光查述 1 上，上述檢上 9 在後當上述使 置放之。則上動 裝載 1 1 ，爲驅 頭被物 9 時成之 夾係象部 1 離 2 用 1 對入 9 距 8 入物查搬部的缸 搬象檢述入間氣 述對該上搬之述 上查放到述 6 上 則檢開退上件藉 ， 該。係到構， -14- 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 577981 A7 B7 五、發明説明（12) (請先閲讀背面之注意事項再填寫本頁) 述板構件6上之該檢查對象物1有彎曲之情形，惟隨著上 述板構件6之上昇’該檢查對象物1係抵接於位於上述板 構件6上方的上述光透過性板構件5，而藉上述光透過性 板構件5推壓該彎曲部分。該檢查對象物1之彎曲等係徐 徐地被平坦化，當上述光透過性板構件5與上述板構件6 之間的距離成爲上述檢查對象物1之厚度程度時，亦即， 當上述檢查對象物1以夾持在上述光透過性板構件5與上 述板構件6之間的狀態被支持時，則該檢查對象物1係成 爲大約平坦化之狀態。又，上述檢查對象物1夾持在上述 光透過性板構件5與上述板構件6之間之狀態被支持時的 上述檢查對象物1之高度位置，係如上所述，以上述光透 過性板構件5爲基準最適用於上述攝影機構7。 經濟部智慧財產局員工消費合作社印製 如上述地在上述載入部9 2中，當上述檢查對象物1 夾持在上述檢查台部2之上述光透過性板構件5與上述板 構件6之間的狀態被支持時，則以下如第3 ( b )圖所示 ’載放有上述檢查對象物1之上述光透過性板構件5之面 部分5 a與上述板構件6之面部分6 a，藉上述線性致動 器8移至上述檢查部9 3，上述檢查對象物1係配置於上 述C CD攝影機4及上述環照明3之下方。 當上述檢查對象物1配置於上述攝影部7之下方時， 則藉上述環照明3使上述檢查對象物1被照明，而藉上述 C C D攝影機4使來自上述檢查對象物1之反射光被攝影 ’取得上述檢查對象物1之攝影畫像。對於由上述C C D 攝影機4所取得之上述攝影畫像，藉上述計算機構施加所 1紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐) .15 - ~ 577981 A7 B7 五、發明説明（13 ) 定之畫像處理，進行缺陷之檢查。 當結束上述檢查部9 3的缺陷之檢查時，則藉氣缸 (請先閱讀背面之注意事項再填寫本頁) 8 2使上述板構件6下降，當上述板構件6下降時，則藉 未圖示之支持機構使上述板構件6之上述檢查對象物1被 抬高，從上述光透過性板構件5與上述板構件6離開。 在該狀態，藉上述線性致動器8使上述檢查台部2移 動至上述載入部9 2側。此時，藉由上述支持機構所支持 之上述檢查對象物1係如第3 ( c )圖所示，留在上述檢 查部9 3 ’成爲位在上述光透過性板構件5，及上述板構 件6之面部分5 b，6 b側。 當上述檢查台部2移動至上述載入部9 2側時，與第 3 ( a )圖之情形同樣，尙未進行檢查之上述檢查對象物 1從上述搬入部9 1被移送至上述載入部9 2。表示該狀 態爲第3 ( d )圖。 未檢查之上述檢查對象物1移動至上述光透過性板構 件5及上述板構件6之面部分5 a，6 a時，則如第4 ( a )圖所示，上述搬入用夾頭裝置9 1 2退到上述搬入部 9 1° 經濟部智慧財產局員工消費合作社印製 在第3 (a)圖之情形，與第3 (d)圖及第4 (a )圖之情形不同處，係上述檢查對象物1從上述搬入部 9 1移送至上述載入部9 2時，經檢查之上述檢查對象物 1位於上述光透過性板構件5及上述板構件6之面部分 5 b，6 b側。未檢查之上述檢查對象物1以夾持在上述 光透過性板構件5及上述板構件6之面部分5 a，6 a之 -16- 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 577981 A7 B7 五、發明説明（14 ) (請先閲讀背面之注意事項再填寫本頁) 間的狀態下被支持時，經檢查之上述檢查對象物1以夾持 在上述光透過性板構件5及上述板構件6之面部分5 b， 6 b之間的狀態下被支持。 在該狀態，藉上述線性致動器8使上述檢查台部2移 動至上述載出部9 4側，如第4 ( b )圖所示，未檢查之 上述檢查對象物1配置於上述檢查部9 3。另一方面，經 檢查之上述檢查對象物1係配置於上述載出物9 4。 當未檢查之上述檢查對象物1及經檢查之上述檢查對 象物1係分別配置於上述檢查部9 3及上述載出部9 4時 ，則對於上述檢查部9 3，進行如上述之缺陷檢查。 經濟部智慧財產局員工消費合作社印製 對於位在上述載出部9 4之經檢查之上述檢查對象物 1，在位於上述檢查部9 3之上述檢查對象物1之檢查時 ，當藉上述氣缸8 2使上述機構件6下降時，如第4 ( c )圖所不，上述搬出用夾頭裝置9 5 1移動至上述載出部 9 4。之後藉由上述搬出用夾頭裝置9 5 1握持位於上述 板構件6之上述面部6 b側之經檢查之上述檢查對象物1 ，如第4 (d)圖所示，藉上述搬出用夾頭裝置9 51使 經檢查之上述檢查對象物1從上述載出部9 4移送至上述 搬出部9 5。 表示於第4 ( d )圖之狀態，除了經檢查之上述檢查 對象物1已容納於上述搬出部9 5之點之外，與第3 ( b )圖之狀態同樣。之後，重複來自第3 ( b )圖之狀態之 順序。藉大約同時地進行上述檢查對象物1之移送與檢查 ’成爲可順利地進行複數枚上述檢查對象物1之檢查。 -17 - 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 577981 A7 B7 五、發明説明（15) (請先閱讀背面之注意事項再填寫本頁) 依照此種本發明之實施形態的缺陷檢查方法及其裝置 ，由於檢查對象物以夾持在光透過性板構件與板構件之間 的狀態下被支持，因此即使上述檢查對象物爲例如厚度極 薄之印刷基板時，也可容易地確保上述檢查對象物之平坦 度，並可進行精緻之缺陷檢查。 在上述實施形態中，對於上述檢查對象物1之一面進 行檢查。在上述檢查對象物1，雖也有在兩面形成有配線 圖案等者，惟使用上述實施形態的缺陷檢查裝置之構成進 行兩面檢查時，必須將各檢查對象物1從上述搬入部9 1 移送兩次至上述搬出部9 5。如此，則僅該分量必需增加 檢查時間。 將可迅速地進行上述檢查對象物1之兩面檢查地應用 上述實施形態的上述缺陷檢查裝置之本發明之實施例的缺 陷檢查裝置之構成表示於第5圖及第6圖。第6圖係表示 本發明之一實施例的缺陷檢查裝置之檢查台部2 /的放大 圖。 經濟部智慧財產局員工消費合作社印製 如第5圖所示，本發明之一實施例的缺陷檢查裝置， 與上述實施形態的缺陷檢查裝置不同處之一種，乃在除了 上述攝影部7之外，還具備具環照明3 /，C C D攝影機 4 /的攝影部7 >者，上述攝影部7 /係在隔著檢查台部 2 /而與上述攝影部7 /相反側，將其攝影方向配置成朝 上述檢查台部2 /側。 又，本發明之一實施例的缺陷檢查裝置，與上述實施 形態的缺陷檢查裝不同處之另一種，乃爲上述檢查台部 -18- 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 577981 A7 B7 五、發明説明（16) (請先閲讀背面之注意事項再填寫本頁) 2 之構成。如第5圖及第6圖所示，與上述實施形態的 缺陷檢查裝置不相同，在本發明之一實施例的缺陷檢查裝 置，係設有兩對上述光透過性板構件5及上述板構件6。 如放大表示於第6圖，其中一對5 a /，6 a /係對應於 上述攝影部7者，而上述光透過性板構件5 a /配置於圖 式上方。另一對5 b /，6 b —係對應於上述攝影部7 一 者，，而上述光透過性板構件5 b /配置於圖式下方。 上述光透過性板構件5及上述板構件6之各對係分別 各別地朝上下方向移動，上述板構件6 a >係藉氣缸 8 2 a被驅動，而板構件6 b /係藉上述氣缸8 2 b被驅 動。 經濟部智慧財產局員工消費合作社印製 在使用本發明之一實施例的缺陷檢查裝置時，例如在 如第3 ( b )圖之狀態下，使用上述攝影部7對於上述檢 查對象物1之單面進行缺陷檢查之後，在如第3 ( d )圖 之狀態下，在上述檢查台部2 /之上述光透過性板構件 5 a /，上述板構件6 a >側與移送未檢查之上述檢查對 象物1之同時地，對於留在上述板構件6 b /側的經單面 構檢查之上述檢查對象物1而使用上述攝影部7 /對於上 述檢查對象物1之另一面能進行缺陷檢查即可以。 構成如此，使用第3圖及第4圖所說明的上述檢查對 象物1之檢查，移送順序係幾乎沒變更，亦即，對於上述 實施形態的缺陷檢查裝置幾乎不必變更檢查所需之時間， 成爲可進行上述檢查對象物1之兩面檢查。 又在上述實施形態中，將上述檢查對象物1 一枚一枚 -19- 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 577981 A7 B7 五、發明説明（17 ) (請先閲讀背面之注意事項再填寫本頁) 地搬入於上述檢查台部2，並從上述檢查台部2 —枚一枚 地搬出，惟並不被限定於此者，而將上述檢查對象物1複 數枚複數枚地搬出入在上述檢查台部2也可以。例如將上 述檢查對象物1兩枚兩枚地搬出入在上述檢查台部2時， 至少必須將上述光透過性板構件5及上述板構件6之大小 成爲可載放四枚上述檢查對象物1之大小。又，在水平方 向配置兩件上述攝影部7。動作係基本上與上述實施形態 者同樣，惟成爲同時地進行兩枚上述檢查對象物1之移送 與檢查。 又，在上述實施形態中，使用C C D攝影機4來取得 上述檢查對象物1之攝影畫像，惟並不被限定於此者。使 用線感測器等之其他攝影元件也可以。擬使用線感測器時 ，成爲一面移動上述檢查對象物1，一面得到上述攝影畫 像。 經濟部智慧財產局員工消費合作社印製 又，在上述實施形態中，水平地配置上述光透過性板 構件5與上述板構件6，惟並不被限定於此者，如第7圖 所示，斜方向地配置上述光透過性板構件5與上述板構件 6也可以。在此時，在上述光透過性板構件5及上述板構 件6之任一或雙方設置從平面部突出的突出部，並使上述 突出部成爲下方地將上述光透過性板構件5及上述板構件 6成爲斜向，則僅藉上述突出部支持上述檢查對象物1之 緣部，即成爲可用上述突出部爲基準簡單地進行上述檢查 對象物1之面方向的對位。在第7圖之例子中，在上述板 構件6設有從其平面部6 1突出的突出部6 2，而該突出 -20- 本紙張尺度適用中國國家標準（CNS ) A4規格（2丨0乂297公釐） 577981 A7 B7 五、發明説明（18 ) 部6 2配置於下方地，也設定上述攝影部3等之位置。 (請先閱讀背面之注意事項再填寫本頁) 如此地設置上述突出部6 2，則成爲可簡單地進行上 述檢查對象物1之緣部的對位，不需要複雜之位置控制， 成爲可提高檢查速度及精確度。又，斜方向地設置各構成 ，成爲可容易地確保上述攝影部7之較大配置用空間。 又，在上述實施形態中，在上述板構件6使用未具有 有色光透射性的板構件，惟也可使用玻璃板等之光透射性 板構件。但是，在上述檢查對象物1存有依接合墊等之孔 時，藉來自上述板構件6側之透射光也入射於上述C C D 攝影機4，由於對於畫像處理也有不良影響，因此使用光 透射性板構件，僅確保對於上述C C D攝影機4之反射光 所用的上述光透過性板構件5者較理想。 (圖式之簡單說明） 第1圖係表示本發明之實施形態的缺陷檢查裝置之基 本上構成的圖式。 第2圖係表示說明本發明之實施形態的缺陷檢查裝置 之檢查對象物之移送路徑所用的圖式。 經濟部智慧財產局員工消費合作社印製 第3圖係表示說明本發明之實施形態的缺陷檢查裝置 之動作所用的圖式。 第4圖係表示說明本發明之實施形態的缺陷檢查裝置 之動作所用之其他例的圖式。 第5圖係表示本發明之一實施形態的缺陷檢查裝置之 基本上構成的圖式。 第6圖係表示說明本發明之一實施例的缺陷檢查裝置 -21 - 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 577981 A7 B7 五、發明説明（19 ) 之檢查台部之構成所用的圖式。 第7圖係表示本發明之其他實施例的缺陷檢查裝置& 主要部分構成的圖式。 (請先閲讀背面之注意事項再填寫本頁) 第8圖係表示習知之缺陷檢查裝置之槪略構成例的圖 式。 (記號之說明） 1 檢查對象物 2 檢查台部 3 環照明 4 C C D攝影機 5 光透過性板構件 6 板構件 7 攝影部 8 線性致動器 8 1 支持構件 8 2 氣缸 9 1 搬入部 經濟部智慧財產局員工消費合作社印製 9 2 載入部 9 3 檢查部 9 4 載出部 9 5 搬出部 911 棚架構件 912 搬入用夾頭裝置 951 搬出用夾頭裝置。 ^紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐）— - 22 -Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, 1T 577981 A7 B7 V. Description of the invention (10) (Please read the precautions on the back before filling this page). The plurality of inspection objects 1 are sequentially supplied to the loading unit 92 one by one from the carrying-in unit 91, but for such a plurality of inspection objects 1 to be transferred and inspected in a rounded manner, The light-transmitting plate member 5 and the plate member 6 of the inspection table 2 have at least twice the length of the inspection object 1 in the transfer direction, and can support two inspection objects 1 at the same time. This is shown in Fig. 2 (a) so that the above-mentioned inspection object 1 can be transferred at the same time, and the above-mentioned inspection object 1 that has been transferred before the transfer can be performed at the same time. Hereinafter, the operations of the defect inspection device will be described while referring to FIGS. 3 (a) to 3 (d) and FIGS. 4 (a) to 4 (d). Detailed description of the defect inspection method of the form). In the following, among the entire surface portions of the light-transmitting plate member 5 and the plate member 6, each of the surface portions used for placing the two inspection objects 1 at the same time is marked with 5a, 6a, 5b, and 6b. . In addition, the chuck device for moving in shown in Figures 2 (a) and (b) is printed 912 by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, and Figures 3 (a) to 3 (d) and 4 (a These devices shown in Figures 4 to 4 (d) are different in the shape shown in the figure, but at least the inspection object 1 can be reciprocated from the shed frame member 9 1 1 to the above loading. The function between the two parts of the part 92 is the same. The chuck device 9 5 1 for carrying out the drawings can be reciprocated between the carrying-out portion 94 and the carrying-out portion 95 in order to transfer the inspection object 1 and can be moved in the direction described above. The functions in the action are the same. This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) -13-577981 Printed by A7 B7, Employees' Cooperatives of Intellectual Property Bureau of the Ministry of Economic Affairs V. Invention Description (9); The place where the inspection object 1 exits from the inspection table 2; the carrying-out section 95 is a transfer end point where the inspection object 1 temporarily exits from the carrying-out section 94. A shed frame member 9 11 is provided in the carrying-in portion 91. As shown in FIG. 2 (b), a plurality of the inspection objects 1 are housed in a state of being stacked on the shed frame member 9 1 1. In the above-mentioned shed frame member 9 1 1, each shed frame placed on each inspection object 1 can be moved in the up-and-down direction simultaneously. Adjacent to the shed frame member 911 is provided a chuck device 9 1 2 for reciprocating movement between the carrying-in portion 91 and the loading portion 92 holding the inspection object 1. The inspection object 1 held in the chuck device 9 1 2 in the carrying-in chuck 9 1 1 is moved to the loading unit 9 2, and the inspection object 1 is removed from the carrying-in unit 91. Transfer to the loading section 92 above. Further, a chuck device 9 1 for carrying out similar to the chuck device for carrying out is also provided near the carrying-out part 95. The chuck device 9 51 for carrying out is reciprocally movable between the carrying-out portion 94 and the carrying-out portion 95, and is movable in the vertical direction. After the carrying-out chuck device 9 5 1 holds the inspection object 1 located in the carrying-out portion 94, the carrying-out chuck device 9 5 1 is moved to the carrying-out portion 95, and the inspection object It is transferred from the said carrying-out part 94 to the said carrying-out part 95. The transfer of the inspection object 1 from the loading section 92 to the loading section 94 is carried out by using the linear actuator 8 of the inspection table section 2 and the paper size is in accordance with the Chinese National Standard (CNS) A4. (210X297 mm) -12- (Please read the precautions on the back before filling out this page) 577981 A7 ___ B7 V. Invention Description (11) (Please read the precautions on the back before filling out this page) Section 3 (a) The figure shows a state where the inspection object 1 is transferred from the loading section 92 to the inspection table section 2 located in the loading section 92 by the loading chuck device 9 1 2. When the inspection object 1 is transferred from the loading section 91 to the loading section 92, first, each of the sheds of the shed frame member 9 1 1 and the loading chuck device 9 1 2 are moved up and down to make the shed The height of the scaffold of the inspection object 1 to be the next inspection object of the frame member 9 1 1 and the height of the carry-in chuck device 912 are adjusted to the preset height position when the inspection object 1 is transferred. On the other hand, in the inspection table section 2, the plate member 6 is lowered by the air cylinder 82, and a space is formed between the light-transmitting plate member 5 and the plate member 6 which are fixed at a height position. Thereafter, the inspection table section 2 is moved to a predetermined position of the loading section 92 by the linear actuator 8 being driven. When the inspection table section 2 moves to the loading section 92, the inspection object 1 is held by the loading chuck device 9 1 2 and is transferred from the loading section 9 1 to the loading section 92. . The inspection object 1 is printed by the consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs when the moving chuck device 912 is moved to the predetermined horizontal position of the inspection table section 2. It is printed on the upper 2 and retracted on the stop 1 3 1 22f. 1 When the degree is up, the image is divided into 9 and the opposite device is 5 degrees. The inspection head is mounted on the chuck structure for the thickness inspection. The 6-piece splint 1 6 is used to open the object-carrying structure. The image structure is moved to the plate 2 and the light inspection 1 is described above. Check 9 and place it as described above. Then the upper loading 1 1 is used to drive the object 9 when the clip is attached to the image section 1 away 2 with 1 pair of 9 into the 8-into the inventory inspection and transfer section of the cylinder inspection image description of the description of the upward movement If the check is placed on the 6 above, the check will be checked and returned. -14- This paper size applies to Chinese National Standard (CNS) A4 (210X297 mm) 577981 A7 B7 V. Description of the invention (12) (Please read the precautions on the back before filling this page) The inspection object 1 on 6 may be bent, but as the plate member 6 rises, the inspection object 1 is in contact with the light-transmitting plate member 5 located above the plate member 6 and borrowed from the above. The light-transmitting plate member 5 presses the curved portion. The bending of the inspection object 1 is gradually flattened, and when the distance between the light-transmitting plate member 5 and the plate member 6 becomes the thickness of the inspection object 1, that is, when the inspection object When the object 1 is supported in a state sandwiched between the light-transmitting plate member 5 and the plate member 6, the inspection target object 1 is approximately flat. The height position of the inspection object 1 when the inspection object 1 is supported between the light-transmitting plate member 5 and the plate member 6 is supported by the light-transmitting plate as described above. The component 5 is most suitable for the above-mentioned photographing mechanism 7. The consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs printed the above-mentioned loading section 92 when the inspection object 1 is clamped between the light-transmitting plate member 5 and the plate member 6 of the inspection table section 2 as described above. When the state is supported, the surface portion 5 a of the light-transmitting plate member 5 on which the inspection object 1 is placed and the surface portion 6 a of the plate member 6 are placed as shown in FIG. 3 (b). By moving the linear actuator 8 to the inspection section 93, the inspection object 1 is arranged below the CC camera 4 and the ring illumination 3. When the inspection object 1 is arranged below the imaging unit 7, the inspection object 1 is illuminated by the ring illumination 3, and the reflected light from the inspection object 1 is photographed by the CCD camera 4 ' A photographic image of the inspection object 1 is obtained. For the above-mentioned photographic images obtained by the above-mentioned CCD camera 4, the paper size applied by the above-mentioned calculation mechanism applies the Chinese National Standard (CNS) A4 specification (210X297 mm). 15-~ 577981 A7 B7 V. Description of the invention (13) Fixed image processing and inspection for defects. When the inspection of the defects in the inspection section 9 3 is completed, please borrow the cylinder (please read the precautions on the back before filling in this page) 8 2 to lower the plate member 6; when the plate member 6 is lowered, borrow The support mechanism shown raises the inspection object 1 of the plate member 6 and separates from the light-transmitting plate member 5 and the plate member 6. In this state, the inspection table section 2 is moved to the loading section 92 side by the linear actuator 8. At this time, as shown in FIG. 3 (c), the inspection object 1 supported by the support mechanism is left in the inspection section 9 3 'to become the light-transmitting plate member 5 and the plate member. The face portion of 6 is on the 5 b, 6 b side. When the inspection table section 2 is moved to the loading section 92 side, as in the case of FIG. 3 (a), the inspection object 1 that has not been inspected is transferred from the loading section 91 to the loading section. Department 9 2. This state is shown in Fig. 3 (d). When the unchecked inspection object 1 moves to the light-transmitting plate member 5 and the surface portions 5 a and 6 a of the plate member 6, as shown in FIG. 4 (a), the chuck device 9 for carrying in is shown in FIG. 1 2 Return to the above-mentioned moving-in department 9 1 ° The situation printed on Figure 3 (a) by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs is different from the situation on Figures 3 (d) and 4 (a) When the inspection object 1 is transferred from the loading section 91 to the loading section 92, the inspected inspection object 1 is located on the light-transmitting plate member 5 and the surface portion 5 of the plate member 6 b, 6b. side. The above-mentioned inspection object 1 that is not inspected is clamped between the light-transmitting plate member 5 and the surface portion 5 a, 6 a of the plate member 6-16. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 (Mm) 577981 A7 B7 V. Description of the invention (14) (Please read the precautions on the back before filling in this page) When supported, the above-mentioned inspection object 1 will be held by the above-mentioned light transmittance The plate member 5 and the surface portions 5 b and 6 b of the plate member 6 are supported in a state between them. In this state, the inspection table section 2 is moved to the side of the carrying section 94 by the linear actuator 8. As shown in FIG. 4 (b), the inspection object 1 that is not inspected is disposed in the inspection section. 9 3. On the other hand, the inspected object 1 is arranged on the carried-out object 9 4. When the uninspected inspection object 1 and the inspected inspection object 1 are respectively disposed in the inspection section 93 and the loading section 94, the inspection section 93 is subjected to the defect inspection as described above. . The Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs prints the above-mentioned inspection object 1 located in the above-mentioned loading unit 94, and when inspecting the above-mentioned inspection object 1 located in the above-mentioned inspection unit 93, the above-mentioned cylinder 8 2 When the mechanism 6 is lowered, as shown in FIG. 4 (c), the carrying-out chuck device 9 5 1 moves to the carrying-out portion 94. After that, the inspected object 1 located on the face 6 b side of the plate member 6 is held by the carrying-out chuck device 9 5 1. As shown in FIG. 4 (d), the carrying-out clamp is used. The head device 9 51 transfers the inspected inspection object 1 from the carrying-out portion 94 to the carrying-out portion 95. The state shown in Fig. 4 (d) is the same as the state shown in Fig. 3 (b), except that the inspection object 1 has been accommodated in the carrying-out section 95. Thereafter, the order of the states from Fig. 3 (b) is repeated. By carrying out the transfer and inspection of the inspection object 1 at approximately the same time, it becomes possible to smoothly perform the inspection of the plurality of inspection objects 1. -17-This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) 577981 A7 B7 V. Description of the invention (15) (Please read the notes on the back before filling this page) According to the implementation of this invention The defect inspection method and apparatus of the form are supported while the inspection object is sandwiched between the light-transmitting plate member and the plate member. Therefore, even when the inspection object is, for example, an extremely thin printed substrate, The flatness of the inspection object can be easily ensured, and delicate defect inspection can be performed. In the above embodiment, one side of the inspection object 1 is inspected. Although the inspection object 1 has wiring patterns or the like formed on both sides, when performing the inspection on both sides using the structure of the defect inspection device of the above embodiment, each inspection object 1 must be transferred twice from the carrying-in section 9 1. To the above-mentioned carrying-out section 95. As such, it is necessary to increase the inspection time only for this component. The structure of a defect inspection device according to an embodiment of the present invention in which the above-mentioned defect inspection device of the embodiment is applied so that both sides of the inspection object 1 can be quickly inspected is shown in Figs. 5 and 6. Fig. 6 is an enlarged view showing an inspection table portion 2 of a defect inspection apparatus according to an embodiment of the present invention. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, as shown in FIG. 5, a defect inspection device according to an embodiment of the present invention is different from the defect inspection device of the above embodiment except for the above-mentioned photographing department 7. And a photographing section 7 with a ring illumination 3 /, a CCD camera 4 /, and the photographing section 7 / is arranged on the side opposite to the photographing section 7 / through the inspection table section 2 /, and the photographing direction is arranged Cheng 2 / side towards the above-mentioned inspection table section. In addition, the defect inspection device according to an embodiment of the present invention is different from the defect inspection device of the above embodiment in that it is the above-mentioned inspection table section -18- This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 (Mm) 577981 A7 B7 V. Description of the invention (16) (Please read the precautions on the back before filling this page) 2 Composition. As shown in FIGS. 5 and 6, the defect inspection device of the embodiment is different from the defect inspection device of the above embodiment. The defect inspection device of an embodiment of the present invention includes two pairs of the light-transmitting plate member 5 and the plate member. 6. If it is enlarged and shown in Fig. 6, a pair of 5a /, 6a / corresponds to the above-mentioned photographing section 7, and the light-transmitting plate member 5a / is arranged above the figure. The other pair 5 b /, 6 b —corresponds to one of the above-mentioned photographing section 7, and the above light-transmitting plate member 5 b / is arranged below the drawing. Each pair of the light-transmitting plate member 5 and the plate member 6 moves in the up-down direction respectively. The plate member 6 a > is driven by a cylinder 8 2 a and the plate member 6 b / is borrowed from the above. The cylinder 8 2 b is driven. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs when using the defect inspection device according to an embodiment of the present invention, for example, in the state shown in FIG. After performing a defect inspection on the surface, in the state shown in FIG. 3 (d), the light transmitting plate member 5a /, the plate member 6a, and the side of the inspection member 2 /, and the above-mentioned non-inspection Simultaneously with the inspection object 1, the imaging unit 7 can be used for the inspection object 1 that has been subjected to a single-sided inspection and left on the plate member 6b / side, and the defect inspection can be performed for the other side of the inspection object 1. Yes. With this configuration, the inspection order using the inspection object 1 described in FIG. 3 and FIG. 4 has almost no change in the transfer order, that is, the defect inspection apparatus of the above embodiment hardly needs to change the time required for inspection. Both inspections of the inspection object 1 can be performed. Also in the above embodiment, the above-mentioned inspection objects are one by one -19- This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 577981 A7 B7 V. Description of the invention (17) (please first Read the precautions on the back and fill in this page again) and move them into the inspection table section 2 and carry them out one by one, but it is not limited to this, but the inspection object 1 is plural A plurality of pieces may be carried in and out of the inspection table section 2. For example, when the inspection objects 1 are carried in and out of the inspection table 2 in two pieces, at least the size of the light-transmitting plate member 5 and the plate member 6 must be such that four inspection objects 1 can be placed thereon. Its size. In addition, two of the above-mentioned photographing sections 7 are arranged in the horizontal direction. The operation is basically the same as that of the above-mentioned embodiment, but the transfer and inspection of the two inspection objects 1 are performed simultaneously. Furthermore, in the above-mentioned embodiment, the C C D camera 4 is used to obtain a photographic image of the inspection object 1, but the invention is not limited to this. Other imaging elements such as a line sensor may be used. When a line sensor is to be used, the above-mentioned photographic image is obtained while moving the inspection object 1 described above. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. In the above embodiment, the light-transmitting plate member 5 and the plate member 6 are horizontally arranged, but it is not limited to this, as shown in FIG. 7, The light-transmitting plate member 5 and the plate member 6 may be arranged diagonally. At this time, a protruding portion protruding from a flat portion is provided on any one or both of the light-transmitting plate member 5 and the plate member 6, and the light-transmitting plate member 5 and the plate are provided so that the protruding portion becomes downward. When the member 6 is inclined, only the edge portion of the inspection object 1 is supported by the protrusions, that is, the alignment in the plane direction of the inspection object 1 can be easily performed using the protrusions as a reference. In the example in FIG. 7, the plate member 6 is provided with a protruding portion 6 2 protruding from the flat portion 61, and the protrusion is -20-. This paper size applies the Chinese National Standard (CNS) A4 specification (2 丨 0 (297 mm) 577981 A7 B7 5. Description of the invention (18) The section 62 is arranged below, and the positions of the above-mentioned photographing section 3 and the like are also set. (Please read the precautions on the back before filling in this page.) By setting the protrusions 62 in this way, it is possible to easily align the edges of the inspection object 1 without complicated position control. Check speed and accuracy. Moreover, by providing the respective components in an oblique direction, it is possible to easily secure a large arrangement space for the above-mentioned imaging section 7. In the above embodiment, a plate member having no colored light transmittance is used for the plate member 6, but a light-transmitting plate member such as a glass plate may be used. However, when the inspection object 1 has a hole according to a bonding pad or the like, the transmitted light from the plate member 6 side also enters the CCD camera 4. Since it has an adverse effect on image processing, a light-transmitting plate is used. As the member, it is preferable to secure only the light-transmitting plate member 5 used for the reflected light of the CCD camera 4. (Brief description of the drawings) Fig. 1 is a diagram showing a basic configuration of a defect inspection device according to an embodiment of the present invention. Fig. 2 is a diagram illustrating a transfer path of an inspection target of a defect inspection apparatus according to an embodiment of the present invention. Printed by the Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs. Fig. 3 is a diagram showing the operation of the defect inspection device according to the embodiment of the present invention. Fig. 4 is a diagram showing another example for explaining the operation of the defect inspection device according to the embodiment of the present invention. Fig. 5 is a diagram showing a basic configuration of a defect inspection apparatus according to an embodiment of the present invention. FIG. 6 shows a defect inspection device illustrating an embodiment of the present invention. 21-This paper size is in accordance with Chinese National Standard (CNS) A4 (210X297 mm) 577981 A7 B7. V. Inspection Station Department The scheme used to construct it. Fig. 7 is a diagram showing the structure of a main part of a defect inspection device & (Please read the precautions on the back before filling out this page.) Figure 8 shows a schematic configuration example of a conventional defect inspection device. (Explanation of symbols) 1 Inspection object 2 Inspection table section 3 Ring illumination 4 CCD camera 5 Light-transmitting plate member 6 Plate member 7 Photographing section 8 Linear actuator 8 1 Supporting member 8 2 Air cylinder 9 1 Moving section Ministry of Economy Wisdom Printed by the employee's consumer cooperative of the Property Bureau 9 2 Loading section 9 3 Inspection section 9 4 Loading section 9 5 Moving section 911 Shelf frame member 912 Moving chuck device 951 Moving chuck device. ^ Paper size applies to China National Standard (CNS) A4 (210X297mm) —-22-