KR20080053495A - Tcp handler - Google Patents

Abstract

In a TCP handler (2), a means that can display an enlarged image of part of a captured image is used as a display (9) for displaying the image taken by a second camera (6b). With the TCP handler (2), the positional relationship between a test pad (P) of a TCP and a probe (81) of a probe card (8) can be visually checked with the aid of an enlarged image displayed on the display (9). Hence, an easy, precise, and quick positioning is possible in performing alignment for initial setting or the like.

Description

TCCP handling equipment {TCP HANDLER}

The present invention is referred to as "TCP" by integrating devices manufactured by a tape carrier package (TCP) or a chip on film (COF) (hereinafter, TCP, COF, or other tape automated bonding (TAB) mounting technology), which is a type of IC device. TCP handling device used to test.

In the manufacturing process of an electronic component such as an IC device, an electronic component test apparatus for testing the performance or function of the finally manufactured IC device or a device in the intermediate stage thereof is required. In the case of TCP, a test apparatus for TCP is used. .

The test apparatus for TCP generally consists of a tester main body, a test head, and a TCP handling apparatus (henceforth a "TCP handler"). This TCP handler conveys a carrier tape in which a plurality of TCPs are formed on a tape (the concept of film. The same applies hereinafter), and presses the carrier tape on a probe of a probe card electrically connected to a test head. The test pad is brought into contact with the probe to provide a plurality of TCPs for sequential testing.

However, in order to perform the test efficiently and accurately using the TCP handler, it is necessary to make sure that the test pad of the TCP and each probe of the probe card are in contact with each other.

From the above, when using the TCP handler, before performing the actual test to perform the test, the initial setting of the TCP handler is performed in advance so that the test pad of the TCP and each probe of the probe card can be reliably contacted. I'm working on registering a setting.

The initial configuration of the TCP handler is performed as follows, for example. First, the schematic positions of the TCP and the probe card conveyed to the test position are determined, and then the image obtained by photographing the probe of the probe card and the test pad of TCP with the camera is displayed on the display device. And the operator checks this image, and adjusts the position of each probe by manual operation so that all the probes of a probe card may contact all the test pads of TCP. The position set in this way is registered as an initial setting and used for alignment at the time of actual operation.

However, in recent years, as TCP's multi-pinning and miniaturization have made TCP test pads smaller and narrower, the probes and test pads displayed on the display have also become smaller and thinner. For this reason, the alignment work of the pad and the probe in the initial setting becomes difficult, and the working time according to the initial setting also becomes long. In addition, the alignment between the TCP and the probe may not always be accurately performed, and in this case, contact failure, destabilization of contact resistance, short circuit between adjacent pins, etc. may occur during actual operation.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a TCP handling apparatus capable of accurately and easily performing a positioning operation of a contact terminal of a contact portion and an external terminal of the TCP.

In order to achieve the above object, the present invention firstly conveys a carrier tape having a plurality of TCPs formed on the tape, presses the carrier tape to a contact portion electrically connected to the test head, and connects the external terminal of the TCP to the contact terminal of the contact portion. A TCP handling device capable of providing a plurality of TCPs for a sequential test by contacting a touch panel, and at the same time shooting an external terminal of a TCP and a contact terminal of a contact portion with an imaging device and displaying an image obtained on the display device. There is a standardized image for displaying the entire object to be photographed with the image pickup device so that the positional relationship between the external terminal of the TCP and the contact terminal of the contact can be specified and positioned, and an enlarged view for enlarged display of a part of the object to be captured with the image pickup device. Provided is a TCP handling apparatus, wherein an image is displayed (Invention 1).

According to the invention (Invention 1), since the positional relationship between the external terminal of TCP as the object of alignment and the contact terminal of the probe card can be confirmed by an enlarged image, the alignment between the external terminal of the TCP and the contact terminal of the contact portion can be accurately It can be done easily. Therefore, when using the TCP handling apparatus, the initial setting can be performed efficiently in a short time. It is also possible to confirm the situation of contact failure by an enlarged image when contact failure occurs during the actual operation of the TCP handling apparatus.

In the invention (Invention 1), the image pickup device is a high resolution image pickup device capable of positioning the two terminals because the positional relationship between the external terminal of the TCP and the contact terminal can be specified even when the enlarged image is displayed. Preferred (Invention 2). By using the high resolution image pickup device, the external terminal and the contact terminal of the TCP can be displayed clearly, so that the alignment operation can be performed more accurately. In addition, by using a high resolution image pickup device, the number of images to be taken can be reduced by enlarging the range to be shot at once, thereby reducing the frequency of moving the image pickup device, thereby making errors such as mechanical movement error or overlay processing of multiple images. Can be reduced, and it is possible to cope with TCP having an external terminal of finer narrow pitch.

The TCP handling apparatus according to the invention (Invention 1) preferably includes an imaging stage for moving the imaging device so that the external terminal of the TCP at the predetermined position and the contact terminal of the contact portion can be photographed (invention 3).

The TCP handling apparatus according to the invention (Invention 1) is provided with an enlarged display operation section, and it is preferable to enlarge the normalized image in accordance with an operation by the enlarged display operation section to make an enlarged image (Invention 4). As in the present invention (invention 4), when the enlarged display operating portion is provided, the enlarged image can be displayed alone by operating the enlarged display operating portion, and the operability is excellent.

In the TCP handling apparatus according to the invention (Invention 1), when the position shift or contact failure occurs between the external terminal of TCP and the contact terminal of the contact portion during actual operation, the position of the position shift or contact failure is used as an enlarged image. It is preferable that the display device can be displayed automatically (invention 5). According to this invention (invention 5), since the position of a position shift | offset | difference or a contact failure can be confirmed as an enlarged image, the situation of a position shift | offset | difference or contact failure can be grasped | ascertained correctly. In particular, when the alignment of the external terminal of the TCP and the contact terminal of the contact part during manual operation is performed by manual operation, the throughput of the test can be improved because the position of the misalignment or the contact failure can be quickly identified and coped with.

Secondly, the present invention performs a test by electrically contacting a plurality of contact terminals provided on a contact portion for carrying out a test signal, and a plurality of external terminals included in a test object TCP disposed on a carrier tape. A TCP handling device comprising: an image pickup device for picking up a contact terminal, an external terminal of TCP corresponding to the contact terminal, and an image of the contact terminal captured by the image pickup device and the external terminal of TCP as desired and displayed. And a zooming function, wherein the image pickup device has a zoom function, and has a resolution capable of specifying a positional relationship between a contact terminal and an external terminal of TCP corresponding to the contact terminal in a zoom state. (Invention 6).

According to the above invention (Invention 6), by bringing the image pickup device into a zoomed state, the external terminals of the TCP and the contact terminals of the probe card to be aligned can be enlarged and displayed, so that the external terminals of the TCP are aligned with the contact terminals of the contacts. Can be performed accurately and easily. Therefore, when using the TCP handling apparatus, this initial setting can be performed efficiently in a short time. It is also possible to confirm the situation of contact failure by enlarged display when a contact failure occurs during actual operation of the TCP handling apparatus.

In the invention (invention 6), the plurality of contact terminals and the corresponding contact terminals are based on image data of a plurality of contact terminals photographed by the imaging device and a plurality of external terminals of TCP corresponding to the contact terminals. It is preferable to specify the displacement amount of the plurality of external terminals (invention 7). According to this invention (invention 7), more accurate position shift correction amount can be specified.

In the above invention (Invention 7), the imaging stage is moved so that the imaging device can pick up at least two external terminals located on a diagonal line or at least two remote terminals far from each other among a plurality of external terminals of TCP. Let

On the basis of the image data obtained by photographing the image pickup device, the positional shift amount of the at least two external terminals and the contact terminals corresponding to the external terminals is specified,

It is preferable to move the carrier tape or the contact terminal group so that a stable contact can be obtained based on the position shift amount (invention 8). According to this invention (invention 7), a more accurate position shift correction amount can be specified, and in particular, correction of a shift in the θ rotational direction is also possible.

In the invention (Invention 6), first, the shape of the contact terminal is extracted based on the image data obtained by photographing by the imaging device, and from the extracted shape, the contact point at which the contact terminal contacts the external terminal of TCP is specified. And secondly, extracting the shape of the external terminal of the TCP based on the image data, specifying a center position point of the external terminal from the extracted shape, a mark indicating a contact point of the contact terminal, and a center position point of the external terminal. A mark indicating the position of may be superimposed on the display device (invention 9). According to this invention (invention 9), the operator can clearly grasp the misalignment state between the center position point of the external terminal and the contact point of the contact terminal, and can accurately perform the adjustment operation of the alignment.

In the above invention (Invention 6), by applying the contact check function, the electrical contact state of all the contact terminals and the external terminals of TCP corresponding to the contact terminals is detected while moving the carrier tape or the contact terminal group in the plane direction, It is also possible to obtain an effective moving area which can be contacted effectively without any contact terminal at any contact terminal, and to specify the optimum position of the carrier tape and the contact terminal group based on the effective moving area (invention 10). According to this invention (invention 10), even if the contact terminal is defective by, for example, pressing stress, the optimum position of the carrier tape and the contact terminal group can be efficiently specified.

In the above invention (Invention 6), the contact check function is applied to detect the electrical contact state between all the contact terminals and the external terminals of TCP corresponding to the corresponding contact terminals, and when the contact failure is detected, the corresponding contact failure is detected. The imaging device may be moved to a position of a contact terminal and an external terminal corresponding to the contact terminal so that an image obtained by photographing the defective contact portion may be displayed on the display device (Invention 11). According to this invention (invention 11), the situation of a defective contact part can be grasped | ascertained correctly by an image.

In the invention (invention 6), at least one of the positional information of the imaging device, the zoom magnification information of the imaging device, and the information about TCP captured by the imaging device may be displayed on the display device. 12).

In the invention (Invention 6), the positional relationship between the contact terminal and the external terminal corresponding to the contact terminal is specified from the non-contact state image data obtained by imaging the contact terminal and the external terminal of TCP corresponding to the contact terminal in the non-contact state. The positional relationship between the contact terminal and the external terminal corresponding to the contact terminal is specified from the contact state image data obtained by imaging the contact terminal and the TCP external terminal corresponding to the contact terminal in the contact state according to the test. The amount of change in the specific two positional relations may be obtained and the positional deviation of the contact terminal and the external terminal corresponding to the contact terminal may be corrected based on the amount of change (invention 13). According to this invention (invention 13), since the position shift correction can be performed by including the position shift amount generated from the non-contact state to the contact state, more stable contact can be realized.

In the above invention (Invention 6), all the contact terminals and external terminals corresponding to the contact terminals are imaged with respect to the TCP determined to be defective as a result of the test execution, respectively, from the image data obtained. The position shift amount of may be specified, and a contact terminal exceeding a maximum allowable deviation of a predetermined position shift amount and an external terminal corresponding to the contact terminal may be displayed on the display device (Invention 14). According to this invention (invention 14), a contact terminal and an external terminal having a high probability of contact failure can be displayed automatically, and it is possible to confirm these contact states with an image.

According to the TCP handling apparatus of the present invention, it is possible to accurately and easily perform the alignment work of the contact terminal of the contact portion and the external terminal of the TCP.

1 is a front view showing a TCP tester using a TCP handler according to an embodiment of the present invention.

Fig. 2 is a side view of the pusher unit in the TCP handler according to one embodiment of the present invention.

3 is a plan view of a pusher stage in a TCP handler according to an embodiment of the present invention.

4 is a plan view of a probe card stage in a TCP handler according to an embodiment of the present invention.

5 is a front view of a probe card stage in a TCP handler according to an embodiment of the present invention.

6A is a plan view showing an example of a display device in a state where a normalized image is displayed, and (b) is a plan view showing an example of a display device in a state where an enlarged image is displayed.

7 is a flowchart illustrating an operation during a test of a TCP handler according to an embodiment of the present invention.

Explanation of the sign

One… TCP test equipment

2… TCP handler

3... Pusher unit

4… Pusher stage

5... Carrier tape

6b... Second camera (imaging device)

7... Probe card stage

8… Probe card

81... Probe (contact terminal)

9... Display

90... Image processing unit

91... Display panel

92... Operation Buttons (Enlarged Display Control Panel)

93... Area designation button

10... Test head

21... Reel

22... Reel

P… TCP test pad (external terminal)

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described in detail based on drawing.

1 is a front view illustrating a TCP test apparatus using a TCP handler according to an embodiment of the present invention, FIG. 2 is a side view of a pusher unit in a TCP handler according to an embodiment of the present invention, and FIG. 4 is a plan view of a pusher stage in a TCP handler according to an embodiment of FIG. 4, and FIG. 4 is a plan view of a probe card stage in a TCP handler according to an embodiment of the present invention, and FIG. 5 is a TCP according to an embodiment of the present invention. 6A is a plan view showing an example of a display device in a state where a normalized image is displayed, and FIG. 6 (B) shows an example of a display device in a state where an enlarged image is displayed. 7 is a plan view, and FIG. 7 is a flowchart illustrating an operation during a test of a TCP handler according to an embodiment of the present invention.

First, the whole structure of the test apparatus for TCP provided with the handler which concerns on embodiment of this invention is demonstrated, referring FIG.

The test apparatus 1 for TCP is comprised from the tester main body which is not shown in figure, the test head 10 electrically connected to the tester main body, and the TCP handler 2 provided above the test head 10. As shown in FIG.

The TCP handler 2 provides each TCP formed in multiple numbers on the carrier tape 5 for a sequential test, and in this embodiment, TCP is provided to a test one by one for simplicity of description. However, the present invention is not limited thereto, and a plurality of TCPs arranged in the serial direction and / or the parallel direction on the carrier tape 5 may be simultaneously provided to the test.

The TCP handler 2 is provided with the unwinding reel 21 and the winding reel 22, and the carrier tape 5 before a test is wound by the unwinding reel 21. As shown in FIG. The carrier tape 5 is unwound from the unwinding reel 21 and wound around the winding reel 22 after being provided for testing.

Three spacer rolls 23a passing the protective tape 51 peeled from the carrier tape 5 from the unwinding reel 21 to the winding reel 22 between the unwinding reel 21 and the unwinding reel 22, 23b and 23c are provided. Each spacer roll 23a, 23b, 23c can be moved up and down, respectively, so that the tension of the protective tape 51 can be adjusted.

On the lower side of the unwinding reel 21, a tape guide 24a, a unwinding limit roller 25a, an inner sub sprocket 25b, and an inner guide roller 25c are provided, and the carrier tape unwound from the unwinding reel 21 ( 5) is guided by the tape guide 24a, and is conveyed to the pusher unit 3 through the unwinding limit roller 25a, the inner sub sprocket 25b, and the inner guide roller 25c.

The tape guide 24b, the winding limit roller 25f, the outer sub sprocket 25e, and the outer guide roller 25d are provided in the lower side of the winding reel 22, and the carrier tape 5 after being provided for a test is the outer side. It is wound around the winding reel 22 while being guided by the tape guide 24b through the guide roller 25d, the outer sub sprocket 25e, and the winding limit roller 25f.

And the pusher unit 3 is provided between the inner guide roller 25c and the outer guide roller 25d.

1 and 2, a servo motor 31 capable of rotating the ball screw 32 is installed in the frame (pusher frame) 36 of the pusher unit 3 via a bracket 361. At the same time, the pusher main body portion 33 in which the ball screw 32 is screwed is provided via two linear motion guides (hereinafter referred to as "LM guides") 37 in two Z-axis directions. The pusher main body 33 is movable in the vertical direction (Z-axis direction) while being guided to the linear motion guide 37 by driving the servo motor 31.

At the lower end of the pusher main body portion 33, a suction plate 34 is provided which is connected to a negative pressure source (not shown) and can hold and hold the carrier tape 5.

A tension sprocket 35a is provided on the front end side (left side in Fig. 1) of the pusher main body part 33, and a main sprocket 35b is provided on the rear end side (right side in Fig. 1) of the pusher body part 33. The carrier tape 5 is held at a desired tension.

As shown in FIG. 2 and FIG. 3, the pusher stage 4 is provided on the back side of the pusher body part 33 in the pusher frame 36 so as to be mounted on the base 38, and the pusher stage 4 is provided. The top table 48, which is a rotating table of, is fixed to the pusher frame 36.

On the base 40 of the pusher stage 4, a servo motor 41a for rotating the ball screw 42a having an axis in the X axis direction, and a servo motor 41b for rotating the ball screw 42b having an axis in the Y axis direction. ) And a servo motor 41c for rotating the ball screw 42c having an axis in the Y-axis direction, and the servomotor 41b and the servomotor 41c are located at both ends on the base 40, respectively.

A sliding block 44a guided by the LM guides 43a and 43a in the X-axis direction and slidable in the X-axis direction is screwed to the ball screw 42a. A sliding plate 46a is provided in the sliding block 44a so as to be slidable in the Y-axis direction via the LM guide 45a in the Y-axis direction. On the upper side of the sliding plate 46a, a rotating member 47a having a roller link therein is fixed, and the rotating member 47a is rotatably provided on the top table 48.

A sliding block 44b guided by the LM guides 43b and 43b in the Y-axis direction and slidable in the Y-axis direction is screwed to the ball screw 42b. The sliding plate 46b is provided in the sliding block 44b so as to be slidable in the X-axis direction via the LM guide 45b in the X-axis direction. On the upper side of the sliding plate 46b, a rotating member 47b having a roller link therein is fixed, and the rotating member 47b is rotatably provided on the top table 48. As shown in FIG.

The ball screw 42c is screwed with a sliding block 44c guided by the LM guides 43c and 43c in the Y-axis direction and slidable in the Y-axis direction. The sliding plate 46c is provided in the sliding block 44c so that the sliding plate 46c can slide in the X-axis direction via the LM guide 45c in the X-axis direction. On the upper side of the sliding plate 46c, a rotating member 47c having a roller link therein is fixed, and the rotating member 47c is rotatably provided on the top table 48.

In the pusher stage 4 having such a configuration, the top table 48 is moved by driving the servo motor 41a to slide the sliding block 44a, the sliding plate 46b, and the sliding plate 46c in the X-axis direction. Can move in the axial direction. In addition, the top table 48 is moved in the Y-axis direction by driving the servo motor 41b and the servo motor 41c to slide the sliding block 44b, the sliding block 44c, and the sliding plate 46a in the Y-axis direction. Can be moved to Further, by driving the servo motor 41a to slide the sliding block 44a in the X-axis direction, the servo motor 41b and the servo motor 41c are driven to drive the sliding block 44b and the sliding block 44c. The top table 48 can be rotated about its vertical axis by rotating the respective rotary members 47a, 47b, 47c by sliding them in directions opposite to the Y axis. According to this pusher stage 4, the pusher unit 3 can be moved in the X-Y-axis direction and can be rotated about the vertical axis.

On the other hand, the pusher stage 4 is movable in a shorter time than the probe card stage 7. However, since the pusher stage 4 moves TCP in the state which adsorbed-held the carrier tape 5, the movement amount of the movement and rotational movement of an X-axis-Y-axis direction becomes small, but can be used practically.

On the other hand, as shown in FIG. 1, as the lower side of the pusher unit 3, the probe card stage 7 in which the probe card 8 was mounted is provided in the upper part of the test head 10. As shown in FIG. Here, although the probe card stage 7 can carry out the movement control by the motor drive mechanism, and has only the manual adjustment mechanism, it is assumed that it has a motor drive mechanism in this embodiment.

4 and 5, on the base 71 of the probe card stage 7, a servo motor 711 for rotating the ball screw 712 having an axis in the X-axis direction, and four X-axis directions. The LM guide 713 is provided. On these four LM guides 713, the rectangular X base 72 guided so that sliding in the X-axis direction by each LM guide 713 is provided. One side portion of the X base 72 is formed with a screw engaging portion 721 in which a ball screw 712 is screwed.

On the X base 72, a servo motor 722 for rotating the ball screw 723 having an axis in the Y-axis direction and two LM guides 724 in the Y-axis direction are provided. On these two LM guides 724, a rectangular Y base 73 guided to be slidable in the Y-axis direction by each LM guide 724 is provided. One side portion of the Y base 73 is formed with a screw engaging portion 731 in which a ball screw 723 is screwed.

On the Y base 73, a servo motor 732 for rotating the ball screw 733 having an axis in the Y-axis direction and a connection link 734 for freely supporting the card link 735 are provided. A part of the card link 735 is formed with a screw engaging portion 736 in which the ball screw 733 is screwed. The probe card 8 including the plurality of probes 81 is detachably attached to the card link 735 by four pins 82.

Although not shown in FIG. 4 and FIG. 5, each probe 81 of the probe card 8 is electrically connected to the tester main body through the test head 10.

In the probe card stage 7 having such a configuration, by driving the servo motor 711, the X base 72, thus the probe card 8 can be moved in the X-axis direction, and the servo motor 722 is driven. The Y base 73 and thus the probe card 8 can be moved in the Y axis direction. In addition, the card link 735 and the probe card 8 can be rotated about their vertical axis by driving the servo motor 732 to rotate the ball screw 733 to move the screw coupling portion 736.

In addition, as shown in FIG. 1, the first camera 6a is located on the front end side (left side in FIG. 1) of the pusher unit 3 and the second camera (imaging device) 6b is located below the test head 10. The third camera 6c is provided at the rear end side (right side in FIG. 1) of the temporary pusher unit 3, respectively. On the other hand, the test head 10 is formed with a gap in which the second camera 6b can photograph the probe card 8.

A mark punch 26a and a reject punch 26b are provided between the pusher unit 3 and the third camera 6c. Based on the test result, the mark punch 26a drills one or a plurality of holes at a predetermined position with respect to the corresponding TCP, and the reject punch 26b punches the TCP determined as a defective test result.

Each camera 6a, 6b, 6c displays the image photographed by these cameras on the display apparatus 9 so that an operator can confirm. Among these cameras, the first camera 6a and the third camera 6c are for judging the presence or absence of TCP on the carrier tape 5 and the hole position and number by the mark punch 26a. The second camera 6b is for acquiring positional shift information between the TCP and the probe card 8, and is capable of acquiring positional shift information for a plurality of objects in the field of view.

In addition, the second camera 6b is mounted on the camera stage 61, and is viewed in a plan view by the actuator of the camera stage 61 in the vertical and horizontal directions (X-axis and Y-axis directions) and in the vertical direction (Z-axis). Direction).

The display device 9 is a magnified image obtained by the image processing unit 90 and the normalized image (image not magnified by the image processing unit 90) or the image processing unit 90 captured by the second camera 6b. A display panel 91 for displaying an image, an operation button 92 for changing the magnification of an image displayed on the display panel 91 (enlarged display operation section), and an area designation button 93 for specifying an area to be displayed; ) (Area designation section). On the other hand, although not shown, other operation means, for example, a touch panel on the display screen, buttons for scrolling the screen, or the like may be provided. The image processing unit 90 is configured by a computer capable of digitally processing image data.

The operation button 92 is provided with an enlargement button 92a given with a "+" symbol and a reduction button 92b given with a "-" symbol. When the magnification button 92a is pressed, an image processing for displaying a part of the normalized image on the image processing unit 90 is made large, and the magnified image is displayed on the display panel 91. On the other hand, when the reduction button 92b is pressed, image processing for displaying an enlarged image small in the image processing unit 90 is performed, and an enlarged image or a normalized image having a reduced magnification is displayed on the display panel 91. In this manner, in the display device 9, the magnification can be continuously changed by pressing the operation button 92. The magnification can be arbitrarily set between the lower limit (1 times) and the upper limit (for example, 5 times) of the magnification. It is possible to choose.

The area designation button 93 is composed of four buttons with arrows pointing upward, downward, leftward and rightward, and by pressing these buttons, the area displayed on the display panel 91 can be moved in an arbitrary direction in up, down, left, and right directions. . In this embodiment, a signal generated by the operation of the area designation button 93 is input to the image processing unit 90, and the image processing unit 90 displays image data to be displayed in accordance with this input. To output As the method of moving the area, in addition to the above method, for example, a method of moving the second camera 6b may be used.

Here, it is desired that the test pad P and the alignment mark 55 are simultaneously displayed on the normalized image of FIG. 6 (a). In addition, although not shown in FIG. 6 in the display panel 91, it is desired to display the information which is easy for an operator to work. For example, camera information (magnification value, camera XY movement range, current XY position information, etc.), TCP information (TCP number, distance in push direction, X-axis coordinate value, Y-axis coordinate value, etc.) to be observed, cross cursor, This intersection coordinate information (relative XY coordinate value based on the alignment mark 55), the number information of the test pad P located near the intersection point of the cross cursor, and the XY deviation value indicating the positional displacement amount for each test pad. It is desired that the back is displayed. In addition, the display panel 91 may make it possible to simultaneously display two images of the standardized image and the enlarged image, and the alignment operation can be facilitated by the display of these two images.

On the other hand, although the arrangement example of the test pad P of TCP shown in FIG. 6 is a simple arrangement example arrange | positioned by a straight line example, there exists also TCP in which the test pad P is formed by a zigzag arrangement or a complicated arrangement. .

The second camera 6b is a high resolution camera or an operator whose image processing unit 90 can obtain the position shift amount of the probe 81 / test pad P with a desired precision at the maximum magnification. It is desired that the camera be a high resolution camera capable of grasping the positional shift of the probe 81 / test pad P while viewing the enlarged image by the operation, and performing the position adjustment of the probe 81. In addition, since the operator performs the operation at any time while viewing the screen of the display device 9 so that the magnification of the image can be arbitrarily changed and accurately confirmed, as shown in Figs. It is preferable to perform a smoothing process with the image processing unit 90 so that the outline of the image does not appear jagged when the process is performed. By displaying in clear outline by a high resolution camera in this manner, the alignment operation of the probe 81 and the test pad P by the operator can be accurate. Further, by applying a high resolution camera, the test pad P can cope with a narrower pitch TCP, so that the situation of the position shift of the plurality of probes 81 / test pads P and the contour thereof can be accurately confirmed. In addition, the same image data can be used in the coarse positioning processing and the detailed positioning processing of the plurality of probes 81 / test pads P. FIG. In addition, since the mechanical movement error of the probe card stage 7 is reduced by applying a high resolution camera, it is possible to accurately position the TCP with a test pad P having a fine pitch in the future.

Next, the usage and operation of the TCP handler 2 will be described.

In the case of using the TCP handler 2, the probes are positioned so that all the probes 81 of the probe card 8 are previously positioned at the center positions of the corresponding test pads P before the TCP handler 2 is actually started. It is necessary to perform the initial setting for moving the card 8. That is, when the varieties of TCP are changed, when TCP of another production lot is tested, or when the probe card 8 is changed, the test pad P of the TCP and the probe 81 of the probe card 8 It is necessary to determine and register the reference position of the X-axis position / Y-axis position / θ rotation angle of the probe card stage 7 so as to be in contact (this position is referred to as a “registration position”). On the other hand, since the pusher stage 4 is used during test execution of TCP, it is assumed that the pusher stage 4 is in an uncontrolled state in the initial setting.

In the initial setting of the probe card 8, first, when the TCP, which is a reference, is returned to the test position, the test pad P of the TCP and the probe 81 of the probe card 8 are photographed by the second camera 6b. The captured normalized image is displayed on the display panel 91 (see Fig. 6A). Here, the operator moves the main sprocket 35b and / or the probe card stage 7 by manual operation while confirming the image displayed on the display panel 91 (for example, 9 shown in Fig. 6A). The outline position of the probe 81 of the location) and the test pad P corresponding thereto is determined. On the other hand, the determination of the outline position may be performed by automatic control instead of manual operation as desired.

Next, the area designation button (the desired probe 81 / test pad P in the probe 81 / test pad P displayed on the display panel 91 is displayed in the center of the display panel 91). Use 3) to move the display area. Then, the magnified button 92a is pressed to display an enlarged image on the display panel 91 to enlarge and display the selected probe 81 / test pad P (see FIG. 6B).

In this state, the operator moves the probe card stage 7 in the X-axis direction / Y-axis direction / θ rotation direction by manual operation so that the plurality of probes 81 contact the center position as much as possible of the test pad P. Perform the position adjustment while This adjustment is generally performed for the plurality of test pads P at four angles of the TCP and the corresponding probes 81. This adjustment operation registers the state of the probe card stage 7 which is in an optimal state with respect to all the probes 81 as a reference position.

Here, the probe 81 is deformed by a plurality of pressing. That is, each probe 81 may have a position shift in the X-axis direction / Y-axis direction / Z direction (pressing direction). Therefore, the contact ends of all the probes 81 do not necessarily become the center positions of the task pads P. FIG. For this reason, it is necessary to set it to the optimal state in which all the probes 81 can contact the test pad P stably.

By displaying the enlarged image on the display panel 91 as described above, the probe 81 and the test pad P are largely displayed even when the probe 81 and the test pad P are small and thin in the standardized image. Since it becomes easy to confirm, the alignment operation of the probe 81 with respect to the test pad P can be performed easily and correctly.

In the initial setting, the position coordinates of the predetermined position in the field of view of the second camera 6b are also registered. It is preferable to register three or more positional coordinates with respect to plural places, especially the object which fell in the visual field of a camera. As a result, the position shift information can be obtained with high accuracy. Predetermined objects include, for example, an alignment mark 55 on a carrier tape 5, two or more test pads P on a diagonal line of TCP or any lead of a feature, and two or more probes 81 corresponding to them. Etc. can be selected.

Next, the main operation of the TCP handler 2 in the case where the TCP handler 2 is actually operated to provide thousands of TCPs to the sequential test will be described with reference to the flowchart of FIG. 7. On the other hand, in the present embodiment, the probe card stage 7 moves the probe card 8 to the registration position registered in the initial setting and makes it fixed, and the position shift performed before each test of TCP sequentially transferred. The fine adjustment of the correction is performed by the fine adjustment pusher stage 4. However, this fine adjustment can also be carried out by the method of microscopically moving the probe card stage 7 instead of the pusher stage 4. In addition, the second camera 6b is moved by the camera stage 61 to the photographing position (the position at which both the alignment mark 55 and the test pad are photographed) shown in Fig. 6A in the first stage. It is assumed that the misalignment is corrected on the basis of only the test pads P and the probes 81 at the nine points in a floating state until all the TCP tests are completed.

When the TCP handler 2 starts the main operation, the probe card stage 7 moves to the registration position registered in the initial setting (step S01). Subsequently, it is necessary to correct the slight position shift caused by the transfer system or the like for each TCP. Next, by rotating the main sprocket 35b and the tension sprocket 35a at a predetermined angle, the carrier tape 5 is moved to convey the first TCP to a predetermined position below the suction plate 34 (step S02).

When the TCP is conveyed to the lower side of the suction plate 34, the servo motor 31 of the pusher unit 3 drives to move the suction plate 34 in the Z-axis direction through the pusher body part 33. . Here, since the tension sprocket 35a is given a torque in the opposite direction to the traveling direction of the carrier tape 5, the carrier tape 5 is in a state where the carrier tape 5 is not loosened. The positional accuracy of the carrier tape 5 is improved. The adsorption plate 34 adsorb | sucks the carrier tape 5, and makes TCP hold | maintain and hold | maintains, and it descend | falls to a photography position afterwards (step S03).

In this state, the second camera 6b performs shooting (step S04) and transmits the obtained image data to the image processing unit 90. The image processing unit 90 receives the received image data and displays the standardized image on the display panel 91 together with various information (X coordinate value, Y coordinate value, magnification, position information of the pusher, etc.) (step S05) and the operator confirms it. To be able.

Then, the image processing unit 90 calculates the positional shift information (the direction of the positional shift (the X-axis direction and the Y-axis direction) and the amount of positional shift) between the test pad P and the probe 81 by calculation (step S06). ). Therefore, the image processing unit 90 first identifies the alignment mark 55 and obtains the positional information of the alignment mark 55 from the position on the image of the alignment mark 55 and the stage position of the camera stage 61. From the positional information of the alignment mark 55, the deviation of the X-axis direction and the Y-axis direction of the carrier tape 5 itself can be obtained. On the other hand, the positional relationship between each test pad P and the probe 81 is relative to the position of the alignment mark 55 as a reference point.

Although the position shift information is calculated | required based on the superposition | polymerization state of the test pad P and the tip part of the probe 81 which are observation objects, it is desired that the number of observation objects is large in the range of processing capability. On the other hand, when it is desired to detect the deviation in the θ rotation direction, it is desired to target at least two test pads P located on a diagonal line of TCP or at least two spaces apart from each other on a normalized basis.

Here, when the amount of deformation deviation due to the deformation of the probe 81 exists in the positional deviation information so as to be insignificant, the plurality of observation objects can be stably contacted based on the plurality of positional deviation information obtained from the plurality of observation objects. An approximate straight line that can be obtained may be obtained, and an optimum correction amount for the X-axis direction and the Y-axis direction may be obtained from the approximated straight line.

On the other hand, by applying a high resolution camera as the second camera 6b, it is possible to clearly acquire image data of a large number of observation targets, and as a result, it is easy to specify a more accurate correction amount. In addition, by applying a high-resolution camera, it is possible to simultaneously capture a large area of TCP, so as to reduce the necessity of moving and imaging the camera stage 61 as in the prior art, and to lower the throughput according to the travel time. . Here, if a conventional low resolution camera is applied, it is necessary to apply a camera having a narrow viewing angle in order to secure image recognition, but when the viewing angle is narrow, multiple image shooting is required, and as a result, multiple image obtained Errors caused by image correction such as overlay processing and lens distortion occur. Here, by applying a high resolution camera, an image of a wide viewing angle can be obtained, and the error factor can be reduced. As a result, it is possible to cope with TCP of narrow pitch.

The test pad at a position where the probe 81 and the test pad P come in contact with the position shift amounts ΔD (Δx, Δy) in the X-axis direction and the Y-axis direction of the test pad P and the probe 81. It is a relative shift amount from the center position of (P), and the image processing unit 90 calculates the position shift amount? D (? X,? Y) by calculation. As shown in the enlarged image of Fig. 6 (b), there are the shift amount? X in the X-axis direction and the shift amount? Y in the Y-axis direction as the position shift amount? D. When a defect exists in the probe 81, for example, the position shift amounts D in the X-axis direction and the Y-axis direction with respect to each of the nine probes 81 and the test pads P corresponding thereto, D (Δ x, Δ y) may be obtained, and an approximation straight line may be obtained from the obtained 9 position misalignment amount ΔD, and the most accurate position misalignment amount ΔD (Δx, Δy) may be obtained based on this approximation straight line. By this approximate straight line, the amount of position shift in the θ rotation direction is also obtained at the same time. By performing the position shift correction based on the position shift amount D obtained using the approximate straight line, a more stable contact state is obtained with respect to the probe 81 and the test pad P of the plurality of points.

Next, in the position shift amount DELTA D obtained above, when it is determined that position shift correction is not necessary first (step S07-No), it skips to step S10 mentioned later. This skip can improve the throughput of the test. Secondly, when it is determined that the position shift correction is necessary (step S07-Yes), the image processing unit 90 displays an enlarged image of the probe 81 / test pad P causing the large position shift, and the display panel 91 ) Is displayed automatically (step S08). Then, the TCP handler 2 calculates the optimum amount of movement that can be contacted from the relationship between the probe 81 causing the large position shift as described above and the other probe 81, and then drives the pusher stage 4 to shift the position. Correction is performed (step S09). On the other hand, the correction amount for the X-axis direction and the Y-axis direction may be specified from the above approximated straight line and the correction may be performed.

In order to correct the misalignment, the servomotors 41a, 41b, and 41c of the pusher stage 4 are driven to move the top table 48, and thus the pusher unit 3, so that the suction plate 34 is moved. ), A method of moving the carrier tape 5 adsorbed by the < RTI ID = 0.0 >) < / RTI > On the other hand, the servo cards 711, 722, and 732 of the probe card stage 7 are driven to move the X base 72, the Y base 73, or the card link 735 to move the probe card 8. Although a method of moving in the X-Y-axis direction and / or rotating around the vertical axis (θ rotation direction) may be used, the pusher stage 4 can be moved and controlled in a shorter time than the probe card stage 7, so it is pusher. Moving the stage 4 is advantageous in terms of throughput.

As described above, since the high resolution is used as the second camera 6b, even when the camera stage 61 is fixed, a larger number of objects can be captured clearly, so that high-precision positioning can be performed even with a narrow pitch TCP. It is possible. On the other hand, by displaying the enlarged image of the probe 81 / test pad P causing the position shift on the display panel 91, the contour of the situation and the shape of the position shift between the test pad P and the probe 81 can be accurately corrected. It can be grasped and specified, and the positional correction can be confirmed with certainty. In addition, although this position correction is performed automatically in this embodiment, it can also be performed by manual operation. In this case, it is possible to improve the throughput of the test because the positional shift point can be identified quickly by the automatic display of the enlarged image and the positional shift correction can be reliably and easily performed.

Next, the servo motor 31 of the pusher unit 3 is driven to further move the suction plate 34 in the Z-axis direction via the pusher main body 33. The adsorption plate 34 which adsorb | sucked the carrier tape 5 descend | falls to a contact position, and presses TCP against the probe 81 of the probe card 8 (step S10).

After pressing, the adsorption plate 34 may be slightly rocked (scribed) slightly before and after and after the contact state as desired, or ultrasonic vibration may be applied to the adsorption plate 34. In this step, a process of photographing the positional relationship between the probe 81 and the test pad P in the contact state as desired and obtaining a small contact shift amount at the time of contact with respect to the position shift correction amount at the time of non-contact is performed. You may add it. This additional treatment can be carried out in parallel with the test run and therefore does not affect the throughput. And the stable contact can be implement | achieved further by adding the obtained small contact shift amount to the position shift correction amount after the next time.

When the test pad P of the TCP contacts the probe 81, a small DC current is first applied to each test pad P to measure the presence or absence of a current flowing through the TCP's internal circuit (for example, a protection diode) or a voltage value. Then, it is checked whether all test pads are in electrical contact and whether there is a short between the adjacent pins (contact check) (step S11). In the case where contact failure occurs in the contact check, the adsorption plate 34 is slightly rocked (scribed) back and forth or left and right as it is in a contact state, the ultrasonic plate is imparted to the adsorption plate 34, or the pusher body part 33 is disposed. Move up and down to perform re-contact operation. In this case, when contact failure is again caused, the TCP is determined to be a defective product. It is assumed here that it is difficult to confirm whether the contact resistance at the time of contact is larger than the allowable resistance that can be tested normally.

Subsequently, a test signal is applied to the TCP from the tester main body through the test head 10, and the response signal read out from the TCP is sent to the tester main body through the test head 10 (step S12). Accordingly, the performance and function of the TCP are tested, and the determination of good quality, defective product, classification, etc. is performed on the TCP. And when the TCP determined as good quality is conveyed to the position of the mark punch 26a, the mark which is good quality is given by the mark punch 26a, and the TCP determined as defective is conveyed to the position of the reject punch 26b. It is punched by the reject punch 26b at the time. On the other hand, the mark punch 26a and the reject punch 26b may not be operated depending on the operation mode.

The determination of the defective product may be based on the poor contact between the test pad P of the TCP and the probe 81, and in this case, the camera stage (using the probe 81 / test pad P, which may be a poor contact) may be used. 61), the enlarged image is automatically displayed on the display panel 91 together with information such as the TCP number, the test pad number, the distance in the pushing direction, the X axis coordinate value, and the Y axis coordinate value. You may also do so. Accordingly, it is possible to accurately grasp the state of the test pad of the IC pin in which contact failure is actually occurring.

In the case where it is determined that contact failure has occurred (step S13-Yes), the operator can firstly perform the position adjustment of the probe 81 while viewing the enlarged image of the display panel 91 by manual operation (step S13-Yes) (step S13-Yes). S14a). This position adjustment can be easily performed because it can be performed while viewing an enlarged image.

Secondly, the retest can be automatically performed (step S14b). In this case, receiving the number information of the test pad related to the determination of the defective product from the tester main body, the position shift amount is obtained in the same manner as above with respect to the test pad P and the surrounding test pad P corresponding to the information. In the case where the obtained positional shift amount is out of the normal contact area, the pusher stage 4 is moved in the non-contact state once in the direction for correcting the positional shift, and then the test is performed again in the contact state. It may be judged that TCP is a good product by this retest. On the other hand, extraction of the test pad P which may become a contact failure is obtained based on the test result mentioned above or the result of a contact check.

When the TCP test is completed as described above, the servo motor 31 of the pusher unit 3 is driven to move the suction plate 34 in the Z-axis direction to the initial state via the pusher main body 33. (Step S15). When the probe card stage 7 is applied to the misalignment correction, the probe card stage 7 is returned to the registered position. And the adsorption plate 34 stops adsorption of the carrier tape 5, releases the carrier tape 5, and moves it further to a Z-axis direction (step S16).

Thereafter, the TCP handler 2 judges whether the TCP which has been tested is the last device (step S17), and when it is determined that it is the last device (step S17-Yes), the main operation ends. On the other hand, when it determines with not being the last device (step S17-No), it returns to step S02.

The embodiments described above are described to facilitate understanding of the present invention and are not described to limit the present invention. Therefore, each element disclosed in the said embodiment is intended to include all the design changes and equivalents which belong to the technical scope of this invention.

For example, the image magnification processing function of the image processing unit 90 may be applied to a high resolution camera as the second camera 6b so as to have a corresponding function to the camera, or by applying a camera having an optical zoom function to the image processing unit ( The zoom operation may be performed in accordance with the instruction from 90).

The probe contact point of the probe 81 and the center position point of the test pad P may be superimposed on the screen of the display device 9. That is, the image processing unit 90 processes the image data received, first extracts the shape (outline or outline) of the probe 81, and then the position of the protruding end of the probe 81 (test pad ( Probe contact point in contact with P)). Here, the positional relationship with respect to the shape of the probe 81 of a probe contact point shall be registered beforehand. Second, the shape (outer shape or contour) of the test pad P is extracted, and the center position point of the test pad P is specified from the extracted shape. A mark indicating the position of the probe contact point and a mark indicating the position of the center position point of the test pad P are displayed on the display panel 91 together with the captured image. Thereby, since the operator can grasp | ascertain clearly the misalignment state of the center position point of a test pad P, and a probe contact point, an operator can perform alignment adjustment operation correctly. On the other hand, if desired, the probe contact point extracted above and the center position point of the test pad P are stored together with the position information of the alignment mark 55 in the storage device for recognition of deformation of the probe 81 or other statistical processing. You may make it available.

In addition, in the above-described embodiment, the camera stage 61 is positioned at a predetermined position in the first stage (the position where both the alignment mark 55 and the test pad P are photographed, as shown in Fig. 6 (a), or A simple case in which the camera stage 61 is not moved until all the TCP tests are completed after moving to the alignment mark 55 as a known position) is explained. When there is (P) or when a new high-precision positioning is required, at least two test pads P on the diagonal of the plurality of test pads P, or at least two test pads P at the far end of the camera stage are used. May be sequentially moved to obtain the position shift amounts ΔD (Δx, Δy) of the plurality of probes 81 and the test pads P corresponding thereto. Here, when the alignment mark 55 exists in several places, it is desired to image which position of the alignment mark 55. The pusher stage 4 or the probe card 8 may be moved in the X-axis direction / Y-axis direction / θ rotation direction in the direction where stable contact is obtained based on all the positional displacement amounts ΔD obtained above.

In addition, in the above-described embodiment, an example in which the position of the alignment mark 55 is first specified and then accurate positioning processing has been described, but in the case of TCP varieties having a large test pad or the like in which accurate positioning is not required, The above-described accurate positioning process may be omitted from the relation of improvement of. That is, it is good also as a test form which specifies the position of the alignment mark 55, calculates the shift | offset | difference with the position previously registered, based on the position shift | offset information, and performs a test immediately.

In addition, the plurality of probes 81 may be deformed due to thousands of times to tens of thousands of pressing stresses. For this reason, all the probes 81 which contact TCP may be in the bad state which shifted from the center position of each test pad. Here, the probe card stage 7 is sequentially moved in the X-axis direction and the Y-axis direction until the contact failure is detected in a certain probe 81 to specify the effective movement area. Based on this, the optimum position (center position in the XY direction and θ rotation amount) in the probe 81 in the present state is specified. The registration position of the probe card 8 may be specified based on the specific optimum position.

In addition, both the determination of the approximate position of the probe 81 and the corresponding test pad P and the initial setting of the reference position (or reference movement amount) may be performed automatically. That is, the main sprocket 35b and the probe card stage 7 are moved as desired, while the camera stage 61 is moved and the position of the alignment mark 55 according to the predetermined TCP by the second camera 6b. And a plurality of probes (e.g., nine locations shown in Fig. 6 (a)) in the vicinity of the alignment mark 55, based on previously determined information showing the positional relationship between the TCP and the alignment mark 55 ( 81) and the rough positions of the corresponding test pads P are determined. Subsequently, if necessary, a magnified image is set as shown in Fig. 6B, and as described above, the position shift amount is obtained from the plurality of probes 81 / test pads P to set the reference position. You may also do it. In this case, the operator can automatically perform optimal positioning without any intervention.

Further, by applying the contact check function, a valid moving area (effective moving area) with respect to the probe card 8 in the current state may be obtained in advance. That is, while the probe card 8 or the pusher stage 4 is moved at a desired amount of movement in the XY plane direction, the electrical contact state of all the probes and the corresponding test pads is detected, and any probe 81 has a poor contact. Find the effective moving area that does not work. Here, it is also possible to set the desired amount of movement as a fixed minute unit movement amount, but it is desired to perform dichotomous search (binary search) to obtain an effective movement area with a small number of movements. On the other hand, it is desirable to set the limit of the movement range in advance so that the probe 81 does not hit the convex portion of the TCP and cause damage. On the basis of the obtained effective moving area, an optimal outline position of the TCP and the probe card 8 is determined. Further, since there is a margin in the X-axis direction and the Y-axis direction from the effective movement area, the deformation state of all the probes 81 in the probe card 8 can be grasped so that the effective movement area can be determined by the corresponding probe card 8. It can also be used as maintenance information. On the other hand, it is desired to store the information of the effective moving area in the storage device.

In addition, the TCP handling apparatus in this invention does not need to be provided with the pusher stage 4 which can control movement by motor drive, and in this case, a position shift correction is performed by the movement control of the probe card stage 7. Can be.

In addition, the TCP handling apparatus of the present invention may be a manual adjustment mechanism that does not include a mechanism capable of controlling the movement of the probe card stage 7 by motor driving. In this case, in the initial registration operation, the operator manually sets the probe card stage 7 to the registration position while viewing the normalized image or the enlarged image on the display device 9. Subsequently, the position shift correction can be automatically performed by the pusher stage 4.

Further, as a result of the test execution, the positional relationship between the probe 81 and the test pad P is imaged while maintaining the current contact state with respect to TCP determined to be a defective product, and the maximum allowable deviation in the predetermined XY direction is set. In the case where position misalignment exceeding is found, the display panel 91 may display information (position misalignment amount, number of the corresponding test pad P, distance value in the pushing direction, etc.) according to the probe 81. good. By doing so, the probe 81 and the test pad P having a high probability of contact failure can be displayed automatically, and it is possible to confirm these contact states with an image.

The TCP handling apparatus according to the present invention is very useful for reducing the burden on the operator who performs the alignment work of the contact terminal of the contact portion and the external terminal of the TCP.

Claims (14)

A plurality of TCPs can be provided for the sequential test by conveying a carrier tape in which a plurality of TCPs are formed on the tape, pressing the carrier tape with a contact portion electrically connected to the test head, and contacting the external terminal of the TCP with the contact terminal of the contact portion. And a TCP handling device capable of displaying an image obtained by photographing an external terminal of a TCP and a contact terminal of a contact portion with an imaging device, The display device includes a standardized image for displaying the entire object to be photographed by the imaging device so that the positional relationship between the external terminal of the TCP and the contact terminal of the contact can be determined and the part of the object to be photographed by the imaging device is enlarged. A TCP handling device, characterized in that an enlarged image to be displayed is displayed. The method according to claim 1, And the image pickup device is a high resolution image pickup device capable of performing positioning of both terminals because the positional relationship between the external terminal and the contact terminal of TCP can be specified even when an enlarged image is displayed. The method according to claim 1, And the TCP handling apparatus includes an imaging stage for moving the imaging apparatus to photograph the external terminal of the TCP at a predetermined position and the contact terminal of the contact portion. The method according to claim 1, And the TCP handling apparatus includes an enlarged display manipulation section, and enlarges the standardized image according to an operation by the enlarged display manipulation section to form an enlarged image. The method according to claim 1, The TCP handling apparatus can automatically display the display device as an enlarged image of the position of the position shift or contact failure when there is a position shift or contact failure between the external terminal of the TCP and the contact terminal of the contact portion during actual operation. TCP handling device, characterized in that. A TCP handling device for performing a test by electrically contacting a plurality of contact terminals provided on a contact portion for carrying out a test signal, and a plurality of external terminals included in a TCP of a test object disposed on a carrier tape. An imaging device which picks up a contact terminal and an external terminal of TCP corresponding to the contact terminal; And a display device for processing and displaying images of contact terminals and TCP external terminals photographed by the imaging device as desired. And the image pickup device has a zoom function, and has a resolution capable of specifying a positional relationship between a contact terminal and an external terminal of the TCP corresponding to the contact terminal in a zoom state. The method according to claim 6, The position shift amount of the plurality of contact terminals and the plurality of external terminals corresponding to the contact terminals based on the image data of the plurality of contact terminals photographed by the imaging device and the plurality of external terminals of TCP corresponding to the contact terminals. TCP handling device characterized in that for specifying. The method according to claim 7, The imaging stage is moved so that the imaging device can image at least two external terminals located on a diagonal line or at least two remote terminals far from each other among the plurality of external terminals of TCP, On the basis of the image data obtained by photographing the image pickup device, the positional shift amount of the at least two external terminals and the contact terminals corresponding to the external terminals is specified, And a carrier tape or a group of contact terminals so that a stable contact can be obtained based on the amount of position shift. The method according to claim 6, Based on the image data obtained by capturing by the imaging device, first, the shape of the contact terminal is extracted, and from the extracted shape, the contact point at which the contact terminal contacts the external terminal of TCP is specified, and secondly, based on the image data. Extract the shape of the external terminal of TCP, specify the center position of the external terminal from the extracted shape, And a mark indicating a contact point of the contact terminal and a mark indicating a position of a center position point of the external terminal on the display device. The method according to claim 6, By applying the contact check function, all the contact terminals and the external terminals of TCP corresponding to the corresponding contact terminals are detected while moving the carrier tape or the contact terminal group in the plane direction, and any contact terminals become poor. Obtain an effective moving area that can be effectively contacted without TCP handling device characterized in that the optimum position of the carrier tape and the contact terminal group is specified based on the effective moving area. The method according to claim 6, Apply the contact check function to detect the electrical contact state of all contact terminals and external terminals of TCP corresponding to the corresponding contact terminals, When the contact failure is detected, the image pickup apparatus is moved to the position of the contact terminal which became the contact failure and the external terminal corresponding to the contact terminal, and an image obtained by photographing the contact failure portion is displayed on the display device. TCP handling device. The method according to claim 6, And at least one of the positional information of the image pickup device, the zoom magnification information of the image pickup device, and the information about TCP captured by the image pickup device, on the display device. The method according to claim 6, Specifying the positional relationship between the contact terminal and the external terminal corresponding to the contact terminal from the non-contact state image data obtained by imaging the contact terminal and the external terminal of TCP corresponding to the contact terminal in the non-contact state, From the contact state image data obtained by imaging the contact terminal and the TCP external terminal corresponding to the contact terminal in the contact state according to the test, the positional relationship of the contact terminal and the external terminal corresponding to the contact terminal is specified, And obtaining a change amount of the specific two-position relationship and correcting the positional shift of the contact terminal and the external terminal corresponding to the contact terminal based on the change amount. The method according to claim 6, With respect to the TCP determined to be defective as a result of the test execution, all the contact terminals and the external terminals corresponding to the contact terminals are imaged while the current contact state is maintained, and the respective position shift amounts are specified from the obtained image data. And a contact terminal exceeding a maximum allowable deviation of a predetermined position shift amount and an external terminal corresponding to the contact terminal on the display device.

Images