CN101263395A - TCP processing device - Google Patents
TCP processing device Download PDFInfo
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- CN101263395A CN101263395A CN 200580051587 CN200580051587A CN101263395A CN 101263395 A CN101263395 A CN 101263395A CN 200580051587 CN200580051587 CN 200580051587 CN 200580051587 A CN200580051587 A CN 200580051587A CN 101263395 A CN101263395 A CN 101263395A
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Abstract
In a TCP handler (2), a means that can display an enlarged image of part of a captured image is used as a display (9) for displaying the image taken by a second camera (6b). With the TCP handler (2), the positional relationship between a test pad (P) of a TCP and a probe (81) of a probe card (8) can be visually checked with the aid of an enlarged image displayed on the display (9). Hence, an easy, precise, and quick positioning is possible in performing alignment for initial setting or the like.
Description
Technical field
The present invention relates to a kind of being used for to a kind TCP (Tape CarrierPackage as the IC device, band carries encapsulation) and COF (Chip On Film, cover brilliant film) (below, to be generically and collectively referred to as " TCP " by the device of TCP, COF, other TAB (Tape Automated Bonding, tape automated bonding) field engineering manufacturing.) the TCP treating apparatus (TCP handling device) tested.
Background technology
In the manufacture process of electronic components such as IC device, need and be in the performance of device etc. in stage in the middle of it and the device for testing electronic parts that function is tested to the IC device of final manufacturing, under the situation of TCP, the test unit that uses TCP to use.
The test unit that TCP uses generally by test subject, measuring head (test head) and TCP treating apparatus (below be sometimes referred to as " TCP processor (TCP handler) ".) constitute.This TCP processor has following function: conveyance is in band (tape) (notion that also comprises film (film).Below identical.) on be formed with the carrying band (carrier tape) of a plurality of TCP, push the carrying band to the probe (probe) of the probe card that is electrically connected to measuring head (probe card), make the testing weld pad (test pad) of TCP touch probe, thereby a plurality of TCP are delivered in the test successively.
In addition, efficiently and correctly test, the testing weld pad of TCP and each probe of probe card are contacted reliably in order to use the TCP processor.
Therefore, under the situation of using the TCP processor,, carry out initial setting at the TCP processor in advance making before its actual act tests, and register the operation of this setting, so that each probe of the testing weld pad of TCP and probe card can contact reliably.
The for example following initial setting that carries out the TCP processor like that.At first, determining that conveyance after the rough position of the TCP of testing position and probe card, uses camera that the probe of probe card and the testing weld pad of TCP are photographed, the image of obtaining is presented on the display device.Then, the operator discerns this image on one side, by manually-operated adjust the position of each probe on one side, so that all probes of probe card can contact with all testing weld pads of TCP.The contraposition when being used for actual act is registered in the position of so setting as initial setting.
But, follow the multitube pin (pin) of TCP in recent years to change and miniaturization, the testing weld pad of TCP diminishes gradually and becomes thin space (pitch), so the probe and the testing weld pad that are presented on the display device also diminish and attenuate.Therefore, the contraposition operation of pad in the initial setting and the probe difficulty that becomes, required activity duration of initial setting is also elongated.In addition, may not necessarily correctly carry out the contraposition of TCP and probe sometimes, owing to such reason also comes in contact the instabilityization of bad, contact resistance and sometimes in abutting connection with short circuit between pin etc. in actual act.
Summary of the invention
The present invention proposes in view of actual state as described above, and its purpose is: provide a kind of can be correctly and easily carry out the TCP treating apparatus of contraposition operation of the outside terminal of the contact terminal of contact site and TCP.
In order to reach above-mentioned purpose, first, the invention provides following TCP treating apparatus, promptly in this TCP treating apparatus, conveyance is formed with the carrying band of a plurality of TCP on tape, push the carrying band to the contact site that is electrically connected to measuring head, make the outside terminal of TCP touch the contact terminal of above-mentioned contact site, thereby can be delivered to a plurality of TCP in the test successively, and use camera head that the outside terminal of TCP and the contact terminal of contact site are photographed, the image of obtaining can be presented on the display device, it is characterized in that: display standard image and enlarged image on above-mentioned display device, making the position of contact terminal of the outside terminal can determine TCP and contact site concern positions, above-mentioned standard picture shows all of the photography target thing that uses the camera head photography, and enlarged image amplifies a part (invention 1) that shows the photography target thing that uses the camera head photography.
According to foregoing invention (invention 1), can utilize enlarged image that the position relation as the contact terminal of the outside terminal of TCP of the object of location and probe card is discerned, therefore can be correctly and easily carry out the contraposition of the contact terminal of the outside terminal of TCP and contact site.Therefore, when using the TCP treating apparatus, can carry out this initial setting efficiently with the short time.In addition, when in the actual act of TCP treating apparatus, coming in contact when bad, can also utilize enlarged image that the situation of loose contact is discerned.
In foregoing invention (invention 1), even to be preferably above-mentioned camera head be in the position relation that demonstrates the outside terminal that also can determine TCP under the situation of enlarged image and contact terminal and can carry out the high-resolution camera head (invention 2) of the location of two-terminal.By using high-resolution camera head, can show outside terminal and the contact terminal of TCP brightly, can more correctly carry out the contraposition operation.In addition, by using high-resolution camera head, the scope that can enlarge a shot reduces the quantity of the image of being photographed, the frequency that camera head is moved tails off, the error of the displacement error of machinery and the coincidence processing of a plurality of images etc. is reduced, therefore, can be corresponding to the TCP of outside terminal with finer and thin space.
The TCP treating apparatus that is preferably foregoing invention (invention 1) has shooting objective table (stage), this shooting objective table moves above-mentioned camera head, makes it possible to the contact terminal of the outside terminal of the TCP in precalculated position and contact site photograph (invention 3).
The TCP treating apparatus that is preferably foregoing invention (invention 1) has the display operation of amplification parts, and according to the operation based on above-mentioned amplification display operation parts above-mentioned standard picture is amplified the enlarged image of doing (invention 3).When having the display operation of amplification parts as the present invention's (invention 3), by operating and can show enlarged image simply amplifying the display operation parts, operability is superior.
Be preferably under the situation of location deviation between the contact terminal of the outside terminal of TCP treating apparatus TCP in actual act of foregoing invention (invention 1) and contact site or loose contact, the place of this position deviation or loose contact automatically can be presented at (invention 4) on the above-mentioned display device as enlarged image.According to foregoing invention (invention 4), the place of position deviation or loose contact can be discerned as enlarged image, so can hold the situation of position deviation or loose contact exactly.Special in actual act, undertaken under the situation of contraposition of contact terminal of the outside terminal of TCP and contact site by manual operation, can promptly hold the place of position deviation or loose contact and carry out correspondence, so the handling capacity (throughput) of test is improved.
Second, the invention provides following TCP treating apparatus, promptly in this TCP treating apparatus, make a plurality of contact terminals on the contact site that is located at the transmitting-receiving of carrying out test signal, be provided in carrying with on a plurality of outside terminals that TCP had of subjects electrically contact and test, it is characterized in that having: camera head, the outside terminal of contact terminal and the TCP corresponding with this contact terminal is made a video recording; And display device, according to expectation to handling by the image of the outside terminal of the contact terminal of above-mentioned camera head photography and TCP and showing, wherein, above-mentioned camera head has image-zooming (zoom) function, under the image-zooming state, has the resolution (invention 6) of the position relation of the outside terminal that can determine contact terminal and the TCP corresponding with this contact terminal.
According to foregoing invention (invention 6), by making camera head become the image-zooming state, the outside terminal of the TCP of the object as contraposition capable of enlarged displaying and the contact terminal of probe card therefore can be correctly and easily carry out the contraposition of the contact terminal of the outside terminal of TCP and contact site.Therefore, when using the TCP treating apparatus, can carry out its initializing set efficiently with the short time.In addition, when in the actual act of TCP treating apparatus, coming in contact when bad, can also utilize to amplify to show the situation of loose contact is discerned.
In foregoing invention (invention 6), be preferably view data, determine the position deviation amount (invention 7) of above-mentioned a plurality of contact terminal and a plurality of outside terminals corresponding with this contact terminal according to a plurality of outside terminals of a plurality of contact terminals of above-mentioned camera head photography and the TCP corresponding with this contact terminal.According to foregoing invention (invention 7), can determine the more accurate position correction that staggers.
In foregoing invention (invention 7), be preferably above-mentioned shooting objective table is moved, so that in a plurality of outside terminals that above-mentioned camera head can have TCP be positioned on the diagonal line at least 2 positions or mutually away from the outside terminal of at least 2 positions make a video recording, the view data that photography obtains according to above-mentioned camera head, determine the position deviation amount of the outside terminal and the contact terminal corresponding of above-mentioned at least 2 positions with this outside terminal, according to above-mentioned position deviation amount, carrying band or contact terminal set are moved, obtain stable contact (invention 8).According to foregoing invention (invention 7), can determine more accurate position deviation correction, can also revise the deviation of θ sense of rotation especially.
In foregoing invention (invention 6), also can be according to the view data that obtains by above-mentioned camera head photography, first, extract the shape of contact terminal, determine that from the shape that extracts this contact terminal touches the contact point of the outside terminal of TCP, second, according to above-mentioned view data, extract the shape of the outside terminal of TCP, determine the middle position point of this outside terminal from the shape that extracts, the mark stacked (overlay) of the position of the middle position point of the mark (mark) of the contact point of the above-mentioned contact terminal of expression and expression said external terminal is presented on the above-mentioned display device (invents 9).According to foregoing invention (invention 9), the operator can be at the deviation state of the contact point of the middle position point of clearly holding outside terminal and contact terminal, so can carry out the adjustment operation of contraposition exactly.
In foregoing invention (invention 6), also can use the contact audit function, carrying band or contact terminal set are moved along in-plane, on one side the electric contact state to the outside terminal of all contact terminals and the TCP corresponding with this contact terminal detects, obtain the effective moving area that in which contact terminal, does not become loose contact and can contact effectively, according to above-mentioned effective moving area, determine the optimum position (invention 10) of carrying band and contact terminal set.According to foregoing invention (invention 10), though for example at contact terminal owing under the situation by compressive stress (stress) skew, can determine efficiently that also carrying is with and the optimum position of contact terminal set.
In foregoing invention (invention 6), also can use the contact audit function, electric contact state to the outside terminal of all contact terminals and the TCP corresponding with this contact terminal detects, detecting under the situation of loose contact, above-mentioned camera head is moved to the position of contact terminal that becomes this loose contact and the outside terminal corresponding with this contact terminal, photographed in this loose contact position, the image of obtaining is presented at (invention 11) on the display device.According to foregoing invention (invention 11), can utilize image to hold the situation at loose contact position exactly.
In foregoing invention (invention 6), also at least a kind of information of the information that the TCP that can make a video recording with the image-zooming multiplying power information of the positional information of above-mentioned camera head, above-mentioned camera head and with above-mentioned camera head is relevant is presented on the display device and (invents 12).
In foregoing invention (invention 6), also can be according to the contactless state view data of under contactless state, the outside terminal of contact terminal and the TCP corresponding with this contact terminal being made a video recording and obtaining, determine the position relation of above-mentioned contact terminal and the outside terminal corresponding with this contact terminal, according to the contact condition view data of under the contact condition of implementing in test the outside terminal of contact terminal and the TCP corresponding with this contact terminal being made a video recording and obtaining, determine the position relation of above-mentioned contact terminal and the outside terminal corresponding with this contact terminal, obtain the variable quantity that above-mentioned two definite positions concern, according to this variable quantity, the position deviation of contact terminal and the outside terminal corresponding with this contact terminal is revised (invention 13).According to foregoing invention (invention 13), can comprise that the position deviation amount of generation from the contactless state to the contact condition is carried out the position deviation correction, can realize more stable contact.
In foregoing invention (invention 6), also can be judged as the TCP of defective products to the result that test is carried out, former state is kept current contact condition, all contact terminals and the outside terminal corresponding with this contact terminal are made a video recording, determine every offset residual quantity according to the view data that obtains, will be presented at (invention 14) on the above-mentioned display device above the contact terminal and the outside terminal corresponding of the maximum permissible deviation of preposition departure with this contact terminal.According to foregoing invention (invention 14), can automatically show the high contact terminal and the outside terminal of possibility of loose contact, can utilize image that these contact conditions are confirmed.
According to TCP treating apparatus of the present invention, can be correctly and easily carry out the contraposition operation of the outside terminal of the contact terminal of contact site and TCP.
Description of drawings
Fig. 1 is the front view (FV) that the TCP test unit of the TCP processor that uses one embodiment of the present of invention is shown.
Fig. 2 is the outboard profile of the propeller unit in the TCP processor of this embodiment.
Fig. 3 is the planimetric map of the thruster objective table in the TCP processor of this embodiment.
Fig. 4 is the planimetric map of the probe card objective table in the TCP processor of this embodiment.
Fig. 5 is the front view (FV) of the probe card objective table in the TCP processor of this embodiment.
Fig. 6 (a) is the planimetric map of an example that the display device of the state that demonstrates standard picture is shown, and Fig. 6 (b) is the planimetric map of an example that the display device of the state that demonstrates enlarged image is shown.
Fig. 7 is the process flow diagram of the action the when test of TCP processor of one embodiment of the present of invention is shown.
(label declaration)
The test unit that 1:TCP uses; The 2:TCP processor; 3: thruster (pusher) unit; 4: thruster objective table (pusher stage); 5: carrying band (carrier tape); 6b: second camera (camera head); 7: probe card objective table (probe card stage); 8: probe card (probe card); 81: probe (probe) (contact terminal); 9: display device; 90: the Flame Image Process parts; 91: display panel; 92: action button (amplifying the display operation parts); 93: regional designated button; 10: measuring head (test head); 21: roll out spool (reel); 22: take-up reel (reel); The testing weld pad of P:TCP (testpad) (outside terminal)
Embodiment
Below, describe embodiments of the invention with reference to the accompanying drawings in detail.
Fig. 1 is the front view (FV) that the TCP test unit of the TCP processor that uses one embodiment of the present of invention is shown, Fig. 2 is the outboard profile of the propeller unit in the TCP processor of this embodiment, Fig. 3 is the planimetric map of the thruster objective table in the TCP processor of this embodiment, Fig. 4 is the planimetric map of the probe card objective table in the TCP processor of this embodiment, Fig. 5 is the front view (FV) of the probe card objective table in the TCP processor of this embodiment, Fig. 6 (a) is the planimetric map of an example that the display device of the state that demonstrates standard picture is shown, Fig. 6 (b) is the planimetric map of an example that the display device of the state that demonstrates enlarged image is shown, and Fig. 7 is the process flow diagram of the action the when test of TCP processor of one embodiment of the present of invention is shown.
At first, with reference to Fig. 1, the one-piece construction of the test unit that the TCP of processor with embodiments of the invention is used describes.
The test unit 1 that TCP uses is made of not shown test subject, the measuring head 10 that is electrically connected with test subject, the TCP processor 2 of upside that is located at measuring head 10.
TCP processor 2 has spool of rolling out 21 and take-up reel 22, and the carrying of batching on rolling out spool 21 before testing is with 5.Carrying is with 5 to roll out from rolling out spool 21, in being delivered to test after, batch on the take-up reel 22.
Rolling out between spool 21 and the take-up reel 22, be provided with and carry out the transition to 3 of take-up reel 22 at interval volume (spacer roll) 23a, 23b, 23cs with 5 boundary belts of peeling off 51 from rolling out spool 21 from carrying.Each rolls up 23a, 23b at interval, 23c can move up and down respectively, thereby can adjust the tension force of boundary belt 51.
At the downside that rolls out spool 21, be provided with band guide rod (tape guide) 24a, roll out restrict rollers 25a, go into side subband wheel (sub sprocket) 25b and go into side guiding roller 25c, for being with 5 from rolling out the carrying that spool 21 rolls out, 24a guides by the band guide rod, simultaneously via rolling out restrict rollers 25a, go into side subband wheel 25b and going into side guiding roller 25c conveyance to propeller unit 3.
Downside in take-up reel 22, be provided with band guide rod 24b, batch restrict rollers 25f, go out side subband wheel 25e and go out side guiding roller 25d, be with 5 for the carrying that is delivered to after the test, via going out side guiding roller 25d, going out side subband wheel 25e and batch restrict rollers 25f, 24b guides by the band guide rod, batches simultaneously on the take-up reel 22.
And, going into side guiding roller 25c and going out between the side guiding roller 25d, be provided with propeller unit 3.
As Fig. 1 and shown in Figure 2, on the platform (thruster platform) 36 of propeller unit 3, via carriage (bracket) 361 servomotor 31 that can make ball-screw 32 rotations is installed, and the thruster main part 33 that ball-screw 32 is screwed togather is installed via the linear movement guide rod (hereinafter referred to as " LM guide rod ") 37 of 2 Z-directions.By servomotor 31 is driven, this thruster main part 33 can be guided on linear movement guide rod 37 on one side, Yi Bian (Z-direction) moves along the vertical direction.
Be provided with absorption platform 34 in the bottom of this thruster main part 33, this absorption platform 34 is connected with negative pressure source (omitting diagram) and adsorbable maintenance carrying is with 5.
Preceding-stage side (left side among Fig. 1) at thruster main part 33, be provided with tensioning pulley (tension sprocket) 35a, at the rear-stage side (right side among Fig. 1) of thruster main part 33, be provided with main pulley (main sprocket) 35b, the tension force with expectation keeps carrying to be with 5 thus.
As Fig. 2 and shown in Figure 3, the rear side of the thruster main part 33 in propeller frame (frame) 36, be provided with thruster objective table 4 with the form of mounting on base station 38, be fixed on the propeller frame 36 as the top board (top table) 48 of the universal stage of thruster objective table 4.
On the pedestal 40 that carries thruster objective table 4, be provided with: servomotor 41a makes the ball-screw 42a rotation that has axle along X-direction; Servomotor 41b makes the ball-screw 42b rotation that has axle along Y direction; And servomotor 41c, make the ball-screw 42c rotation that has axle along the Y direction, wherein, servomotor 41b and servomotor 41c lay respectively at the both ends on the pedestal 40.
Screwed togather sliding shoe 44a on ball-screw 42a, this sliding shoe 44a can be slided along X-direction by LM guide rod 43a, the 43a of X-direction guiding.On sliding shoe 44a, the LM guide rod 45a via Y direction can be equipped with sliding panel 46a slidably along Y direction.At the upside of sliding panel 46a, be fixed with the rotating member 47a that has collars (roller ring) in inside, rotating member 47a can be installed on the top board 48 with rotating freely.
Screwed togather sliding shoe 44b on ball-screw 42b, this sliding shoe 44b can be slided along Y direction by LM guide rod 43b, the 43b of Y direction guiding.On sliding shoe 44b, the LM guide rod 45b via X-direction can be equipped with sliding panel 46b slidably along X-direction.At the upside of sliding panel 46b, be fixed with the rotating member 47b that has collars (roller ring) in inside, rotating member 47b can be installed on the top board 48 with rotating freely.
Screwed togather sliding shoe 44c on ball-screw 42c, this sliding shoe 44c can be slided along Y direction by LM guide rod 43c, the 43c of Y direction guiding.On sliding shoe 44c, the LM guide rod 45c via X-direction can be equipped with sliding panel 46c slidably along X-direction.At the upside of sliding panel 46c, be fixed with the rotating member 47c that has collars (roller ring) in inside, rotating member 47c can be installed on the top board 48 with rotating freely.
In having the thruster objective table 4 of such structure, by servomotor 41a is driven, sliding shoe 44a, sliding panel 46b and sliding panel 46c are slided along X-direction, thereby top board 48 is moved along X-direction.In addition,, sliding shoe 44b, sliding shoe 44c and sliding panel 46a are slided along the Y-axis equidirectional, thereby top board 48 is moved along Y direction by servomotor 41b and servomotor 41c are driven.In addition, by servomotor 41a is driven, sliding shoe 44a is slided along X-direction, simultaneously servomotor 41b and servomotor 41c are driven, sliding shoe 44b and sliding shoe 44c are slided along the Y-axis reverse direction mutually, and make each rotary part 47a, 45b, 45c rotation, thereby can make top board 48 around its Z-axis rotation.According to such thruster objective table 4, can realize making propeller unit 3 to move and that propeller unit 3 is rotated around Z-axis is mobile along X-axis-Y direction.
In addition, compare with probe card objective table 7, thruster objective table 4 can move with the shorter time.But, for thruster objective table 4, owing to keep carrying TCP to be moved under with 5 state, though therefore moving and amount of movement pettiness that rotation is moved of X-axis-Y direction is spendable in practicality in absorption.
On the other hand, as shown in Figure 1, at the downside of propeller unit 3, promptly the top of measuring head 10 is provided with the probe card objective table 7 that is mounted with probe card 8.Herein,, have and to move the probe card objective table of control and the probe card objective table that only has the manual adjustment function by motor operated driving mechanism, but in the present embodiment, be assumed to be and have motor operated driving mechanism for probe card objective table 7.
As Fig. 4 and shown in Figure 5, on the base station 71 of probe card objective table 7, be provided with the LM guide rod 713 of 711,4 X-directions of servomotor that make ball-screw 712 rotations that on X-direction, have axle.On these 4 LM guide rods 713, be provided with the X pedestal 72 of the rectangle that is guided slidably along X-direction by each LM guide rod 713.At a sidepiece of this X pedestal 72, be formed with the screw part 721 that ball-screw 712 screws togather.
On X pedestal 72, be provided with the LM guide rod 724 of 722,2 Y directions of servomotor that make ball-screw 723 rotations that on Y direction, have axle.On these 2 LM guide rods 724, be provided with the Y pedestal 73 of the rectangle that is guided slidably along Y direction by each LM guide rod 724.At a sidepiece of this Y pedestal 73, be formed with the screw part 731 that ball-screw 723 screws togather.
On Y pedestal 73, be provided with the servomotor 732 that makes ball-screw 733 rotations that on Y direction, have axle, the abutment ring 734 that can support retaining ring 735 with rotating freely.On the part of retaining ring 735, be formed with the screw part 736 that ball-screw 733 screws togather.Probe card 8 with a plurality of probes 81 can be installed on the retaining ring 735 by 4 latchings 82 with freely loading and unloading.
In addition, though not shown in Fig. 4 and Fig. 5, each probe 81 of probe card 8 is electrically connected to test subject via measuring head 10.
In having the probe card objective table 7 of such structure, by servomotor 711 is driven, X pedestal 72 and even probe card 8 are moved along X-direction,, Y pedestal 73 and even probe card 8 are moved along Y direction by servomotor 722 is driven.In addition, make ball-screw 733 rotations that screw part 736 is moved, retaining ring 735 and probe card 8 are rotated around its Z-axis by servomotor 732 is driven.
In addition, as shown in Figure 1, be provided with the first camera 6a at the preceding-stage side of propeller unit 3 (left side among Fig. 1), be provided with second camera (camera head) 6b, be provided with the 3rd camera 6c at the rear-stage side (right side among Fig. 1) of propeller unit 3 at the downside of measuring head 10.In addition, in measuring head 10, be formed with the gap that the second camera 6b can photograph to probe card 8.
Between propeller unit 3 and the 3rd camera 6c, be provided with designation punching device (markpunch) 26a and scrap perforator (reject punch) 26b.Designation punching device 26a leaves one or more hole at the TCP of correspondence at preposition according to the result of test, scraps perforator 26b the TCP that the result of test is judged as defective products is punched.
Each camera 6a, 6b, 6c demonstrate the image that utilizes these camera shootings on display device 9, so that the operator can discern.In these cameras, the first camera 6a and the 3rd camera 6c be used to judge in carrying have or not TCP on 5, by the position and the quantity in the hole of badge punch 26a perforation.In addition, the second camera 6b is used to obtain the position deviation information between TCP and the probe card 8, makes it possible to obtain position deviation information at a plurality of objects in the visual field.
In addition, the second camera 6b is installed on the camera objective table 61, and the driver (actuator) that has by camera objective table 61 can be looked in length and breadth direction (X-axis-Y direction) along the plane and above-below direction (Z-direction) moves.
In addition, display device 9 has: Flame Image Process parts 90; Display panel 91 shows the standard picture image of Flame Image Process parts 90 processing and amplifying (not by) of second camera 6b photography or has been carried out the enlarged image of processing and amplifying by Flame Image Process parts 90; Action button 92 (amplifying the display operation parts) is used to make the enlargement ratio that is presented at the image on the display panel 91 to change; And regional designated button 93 (regional specified parts), specify shown zone.In addition, though not shown, can also have the touch panel in other operating units, for example display frame, the button of picture rolling (scroll) usefulness etc.Flame Image Process parts 90 are by can the computing machine that view data is carried out digital processing being constituted.
Action button 92 have the additional large buttons 92a that "+" mark arranged and additional "-" mark arranged dwindle button 92b.When pressing large buttons 92a, in Flame Image Process parts 90, amplify the Flame Image Process of the part of display standard image, and on display panel 91, show enlarged image.On the other hand, pressing when dwindling button 92b, in Flame Image Process parts 90, dwindling the Flame Image Process that shows enlarged image, and on display panel 91, show enlarged image or standard picture that multiplying power diminishes.Like this, in display device 9, enlargement ratio is changed continuously, can between the lower limit (1 times) and higher limit (for example 5 times) of enlargement ratio, select enlargement ratio arbitrarily by push button 92.
Zone designated button 93 has 4 buttons towards the mark of up and down arrow to constitute by additional, moves along up and down any direction by pressing these buttons, can make the zone that is presented on the display panel 91.In the present embodiment, the signal that the operation by regional designated button 93 produces is input to Flame Image Process parts 90, and Flame Image Process parts 90 are according to this input, the view data that should show to display panel 91 outputs.In addition, as the method that the zone is moved, except this method, for example can also use method that the second camera 6b moves etc.
In the standard picture of Fig. 6 (a), preferably show testing weld pad P and alignment mark (alignment mark) 55 simultaneously herein.In addition, in display panel 91, though in Fig. 6, omit the information of preferred display operation person easy operating.For example, preferably show camera information (the XY moving range of multiplier value, camera, current XY positional information etc.), object of observation TCP information (TCP sequence number, the distance value of pushing direction, X-axis coordinate figure, Y-axis coordinate figure etc.), tracking cross (cross cursor) and intersecting point coordinate information thereof (is the relative XY coordinate figure of benchmark with alignment mark 55), be positioned at the serial number information of the testing weld pad P of the approaching position of the intersection point of tracking cross, represent the XY deviate etc. of the position deviation amount of each testing weld pad.In addition, in display panel 91, also simultaneously display standard image and these 2 images of enlarged image, by the demonstration of above-mentioned 2 images, it is easy that positioning operation can become thus.
In addition, the example arrangement of the testing weld pad P of TCP shown in Figure 6 is the simple example arrangement of shape one row that is arranged in a straight line, but also exists to be staggered or complicated arrangement forms the TCP of testing weld pad P.
The second camera 6b is preferably: Flame Image Process parts 90 can be obtained the high-resolution camera of the position deviation amount of probe 81/ testing weld pad P with expected accuracy when maximum amplification times yield; Perhaps the operator can hold the situation of the position deviation of probe 81/ testing weld pad P while observing enlarged image by manual operation, and can carry out the high-resolution camera of the position adjustment of probe 81.In addition, the operator makes the enlargement ratio make image shown in Fig. 6 (a) and (b) like that at random change exactly to confirm in order to operate at any time while the picture of observing display device 9, preferably when amplifying the processing of demonstration (digital image panntographic (zoom)), carry out level and smooth (smoothing) by Flame Image Process parts 90 and handle, do not show so that the profile of image does not become sawtooth.Like this, show with the profile of distinctness, can correctly carry out the contraposition operation of probe 81 and testing weld pad P by the operator by utilizing high-resolution camera.In addition, by the camera of application of high resolution, can also be corresponding to the narrower TCP of spacing (pitch) of testing weld pad P, can confirm the situation of position deviation of a plurality of probe 81/ testing weld pad P and their profile exactly.In addition, in the localization process of the summary of a plurality of probe 81/ testing weld pad P and detailed localization process, can utilize same view data.In addition,, reduced the displacement error of the machinery of probe card objective table 7, so even in the TCP of testing weld pad P in the future, also can position accurately with fine and thin space by the camera of application of high resolution.
Then, using method and the action to TCP processor 2 describes.
Under the situation of using TCP processor 2, before making TCP processor 2 actual act, the initial setting that need probe card 8 be moved is so that all probes 81 of probe card 8 navigate to the middle position of corresponding testing weld pad P.Promptly, under the situation of the kind that has changed TCP, the situation that the TCP of different production lot (lot) is tested or the situation that changed probe card 8, need to determine and register the reference position (this position is called " registration location ") of the X-axis position/Y-axis position/θ rotation angle of probe card objective table 7, so that the probe 81 of the testing weld pad P of TCP and probe card 8 contacts.In addition, thruster objective table 4 is non-control state owing to use when the test of TCP is carried out so be assumed to be former state in initial setting.
In the initial setting of probe card 8, at first, when testing position is arrived in the TCP conveyance that will become benchmark, by the second camera 6b testing weld pad P of TCP and the probe 81 of probe card 8 are photographed, the standard picture of being photographed is presented at (with reference to Fig. 6 (a)) on the display panel 91.Herein, the operator discerns the image that is presented on the display panel 91 on one side, on one side main pulley 35b and/or probe card objective table 7 are moved, determine the probe 81 of a plurality of positions (for example 9 positions shown in Fig. 6 (a)) and the rough position of the testing weld pad P corresponding with it by manual operation.In addition, for determining of rough position, can be undertaken by the form of automatic control according to expectation is not manual operation yet.
Then, use regional designated button 93 that the viewing area is moved, so that be presented at the central authorities that the probe 81/ testing weld pad P of the expectation among the probe 81/ testing weld pad P on the display panel 91 is presented at display panel 91.Then, press large buttons 92a, on display panel 91, show enlarged image, thus the probe 81/ testing weld pad P that selects is amplified demonstration (with reference to Fig. 6 (b)).
Under this state, while making probe card objective table 7 move to X-direction/Y direction/θ sense of rotation by manual operation, the operator carries out the position adjustment, so that a plurality of probe 81 touches the position of central authorities as far as possible of testing weld pad P.Generally carry out this adjustment operation at 4 jiaos a plurality of testing weld pad P that are positioned at TCP and the probe 81 corresponding with it.To adjust operation needle by this registers as the reference position the state that all probes 81 become the probe card objective table 7 of optimum condition.
Herein, probe 81 is followed repeatedly to push and can be produced distortion.That is it is discrete that, might there be the position of X-direction/Y direction/Z-direction (pushing direction) in each probe 81.Therefore, the contact jaw of all probes 81 may not necessarily become the middle position of testing weld pad P.Therefore, need be arranged to the optimum condition that all probes 81 can stably touch testing weld pad P.
By on display panel 91, showing enlarged image like that as mentioned above, even under the situation that standard picture middle probe 81 and testing weld pad P diminish and attenuate and be difficult to discern, be easy to also amplify to show that probe 81 and testing weld pad P discern, so can be easily and correctly carry out the contraposition operation of probe 81 with respect to testing weld pad P.
In above-mentioned initial setting, register the position coordinates in the precalculated position in the visual field of the second camera 6b in the lump.For position coordinates, preferably register a plurality of positions, particularly at the object that leaves in the visual field of camera, register 3 more than the position.Thus, can obtain position deviation information with high precision.As predetermined object, for example can select to carry with the alignment mark 55 in 5, be positioned at the testing weld pad P more than 2 on the diagonal line of TCP or have the guide line (lead) of feature, probe 2 or more 81 leading sections corresponding etc. with them.
Then, with reference to the process flow diagram of Fig. 7, the active of the TCP processor 2 when being delivered to several thousand TCP in the test successively to making TCP processor 2 actual act describes.In addition, in the present embodiment, for probe card objective table 7, make probe card 8 move and become stationary state, the inching of the position deviation correction of carrying out before each test of the TCP that the thruster objective table of being used by inching 4 is transferred successively to the registration location of in above-mentioned initial setting, registering.But, also can replace thruster objective table 4 and make the method for probe card objective table 7 fine motions carry out this inching.In addition, be assumed to be the second camera 6b in the initial stage, by camera objective table 61 after move the camera positions shown in Fig. 6 (a) (position that alignment mark 55 and these both sides of testing weld pad are photographed), till finishing, the test of all TCP becomes motionless state, therefore, only come the correction position deviation according to this 9 testing weld pad P and probe 81.
When 2 beginnings of TCP processor were initiatively done, probe card objective table 7 moved to the registration location (step S01) of registering in above-mentioned initial setting.Afterwards, need revise resulting from the transfer system of each TCP and the small position deviation of other reasons.Then,, be with 5 to move, first TCP be transplanted on the precalculated position (step S02) of the downside of absorption platform 34 thereby make to carry by making main pulley 35b and tensioning pulley 35a rotation predetermined angular.
During to the downside of absorption platform 34, driven by conveyance at TCP, absorption platform 34 is moved along direction under the Z axle via thruster main part 33 by the servomotor 31 of propeller unit 3.Herein, tensioning pulley 35a is owing to by the rightabout torque of the direct of travel of additional bearer band 5, apply predetermined tension force to carrying with 5 thus, so carrying is with 5 to become unflagging state, carrying improves with 5 positional precision.The 34 absorption carryings of absorption platform are with 5 to make TCP become the state of being maintained fixed, and afterwards, drop to camera positions (step S03).
The second camera 6b photographs (step S04) under this state, sends obtained view data to Flame Image Process parts 90.Flame Image Process parts 90 are accepted received view data, make standard picture be presented at (step S05) on the display panel 91 with various information (X coordinate figure, Y coordinate figure, multiplying power, angle of rake positional information etc.), can be confirmed by the operator thus.
Then, Flame Image Process parts 90 are obtained the position deviation information (amount of direction of position deviation (X-direction/Y direction) and position deviation) (step S06) of testing weld pad P and probe 81 by computing.For this reason, Flame Image Process parts 90 are at first determined alignment mark 55, according to the stage position of position on the image of this alignment mark 55 and camera objective table 61, obtain the positional information of this alignment mark 55.According to the positional information of this alignment mark 55, can obtain the carrying with 5 self X-direction and the deviation of Y direction.In addition, the position of each testing weld pad P and probe 81 relation is that the position with alignment mark 55 is the relative position relation of reference point.
According to obtaining position deviation information, but, preferably in the scope of processing power, set a plurality of for the number of object of observation as the testing weld pad P of object of observation and the coincidence status of probe 81 leading sections.In addition, under the situation of the deviation of also wishing to detect the θ sense of rotation, preferably will in standard picture, be positioned on the diagonal line of TCP at least 2 positions or mutually away from the testing weld pad P of at least 2 positions as object.
Herein, under the situation of the distortion departure of the distortion of following probe 81 that in position deviation information, has the degree that to ignore, also can be according to a plurality of position deviation information that obtain from a plurality of object of observations, obtain the near linear that a plurality of object of observations can stably contact, obtain correction at the best of X-direction and Y direction from this near linear.
In addition, the camera by application of high resolution can clearly be obtained the view data of a plurality of object of observations as the second camera 6b, and its result is easy to determine more accurate correction.In addition,, can make a video recording to the wide zone of TCP simultaneously, make camera objective table 61 move the necessity of making a video recording as in the past, can improve the reduction of the handling capacity of following traveling time so can reduce by the camera of application of high resolution.Herein, under the situation of the camera of using low resolution in the past, in order to ensure image recognition, need to use the narrow camera of angle of visibility, need the photography of a plurality of images if angle of visibility is narrow, consequently the error component followed of the image correction of the coincidence processing of a plurality of images of obtaining of generation and lens distortions etc.,, the image of wide angle of visibility can be obtained herein, above-mentioned error essential factor can be reduced by the camera of application of high resolution, consequently can also be corresponding to the TCP of thin space.
Position deviation amount Δ D (the Δ x of the X-direction of testing weld pad P and probe 81 and Y direction, Δ y) is the relative departure of probe 81 and the center of testing weld pad P position contacting distance test pad P, Flame Image Process parts 90 are obtained this position deviation amount Δ D (Δ x, Δ y) by computing.Shown in the enlarged image of Fig. 6 (b),, the departure Δ x of X-direction and the departure Δ y of Y direction are arranged as position deviation amount Δ D.In probe 81, exist under the situation of skew, also can be for example respectively at 9 probe 81 and the testing weld pad P corresponding with it, obtain position deviation amount Δ D (the Δ x of X-direction and Y direction, Δ y), obtain near linear according to 9 obtained position deviation amount Δ D, obtain position deviation amount Δ D (Δ x, Δ y) the most accurately according to this near linear.By this near linear, also obtain the position deviation amount of θ sense of rotation simultaneously.By carrying out the position deviation correction according to the position deviation amount Δ D that utilizes near linear to obtain, probe 81 and testing weld pad P at a plurality of points obtain more stable contact condition.
Then, among the position deviation amount Δ D that in above-mentioned, obtains, the first, being judged as (step S07-"No") under the situation that need not the position deviation correction, jump to step S10 described later.By this redirect, can improve the handling capacity of test.The second, be judged as (step S07-"Yes") under the situation that needs the position deviation correction, Flame Image Process parts 90 automatically show the enlarged image (step S08) of the probe 81/ testing weld pad P that causes big position deviation on display panel 91.Then, TCP processor 2 is obtained after the amount of movement of the best that can contact according to the relation of the probe 81 that causes big position deviation as described above with other probes 81, thruster objective table 4 is driven executing location drift correction (step S09).In addition, also can carry out this correction from the definite correction of above-mentioned near linear to X-direction/Y direction.
When position deviation correction is carried out contraposition, use following method: servomotor 41a, 41b, the 41c of thruster objective table 4 are driven make top board 48 and even propeller unit 3 actions, be with 5 to move and/or be rotated mobile around Z-axis along X-axis-Y direction and make by the carrying of absorption platform 34 absorption.In addition, can also use following method: drive by the servomotor 711,722,732 of probe card objective table 7 and make X pedestal 72, Y pedestal 73 or retaining ring 735 actions, make probe card 8 move and/or be rotated mobile thus around Z-axis (θ sense of rotation) along X-axis-Y direction, but compare with probe card objective table 7, thruster objective table 4 can move control with the shorter time, so that the method that thruster objective table 4 moves is favourable in the viewpoint of handling capacity.
As mentioned above, camera by application of high resolution, also can clearly be made a video recording to more object of observation even camera objective table 61 is stationary states as the second camera 6b, even so the TCP of thin space also can carry out high-precision location.In addition, by on display panel 91, showing the enlarged image of the probe 81/ testing weld pad P that causes position deviation, the situation of position deviation of testing weld pad P and probe 81 and the profile of shape can be held/determine exactly, and the correction of position deviation can be confirmed exactly.In addition, in the present embodiment, automatically carry out the position deviation correction, but also can be undertaken by manual operation.In this case,, can promptly hold the position deviation position, accurately and easily carry out the position deviation correction, so can improve the handling capacity of test by the automatic demonstration of enlarged image.
Then, drive, make absorption platform 34 and then move along direction under the Z axle via thruster main part 33 by the servomotor 31 of propeller unit 3.Adsorbed the absorption platform 34 that carries with 5 and dropped to contact position, TCP has been pressed into the probe 81 (step S10) of probe card 8.
After pushing, according to expectation, also can former state keep in touch state, make absorption platform 34 shake (scribe, line) forwards, backwards minutely, or absorption platform 34 is applied ultrasonic vibration.In addition, in this stage, according to expectation, also can append following processing: the position relation to the 81/ testing weld pad P of the probe under the contact condition is made a video recording, the position deviation correction during for noncontact, the small contact departure when obtaining contact.Append processing owing to can implement this concurrently, so can not exert an influence to handling capacity with the test execution.Then, be added to later position deviation correction next time, can realize more stable contact by the small contact departure that will obtain.
When the testing weld pad P of TCP touches probe card 81; at first; each testing weld pad P is applied small DC current; be determined to have or not in the internal circuit (for example protecting the diode of usefulness) of TCP and flow through electric current and current value, confirm whether (contact is checked) all testing weld pads electrically contact and have or not in abutting connection with the short circuit (step S11) between pin (pin).In checking, this contact taken place under the situation of loose contact, former state keeps in touch state, and make absorption platform 34 shake (line) forwards, backwards minutely, or absorption absorption platform 34 is added ultrasonic vibrations, or thruster main part 33 is moved up and down carry out contact action once more.Even so still becoming once more under the situation of loose contact, being judged as this TCP is defective products.Whether be assumed to be contact resistance value when being difficult to confirm to contact greater than the resistance value of allowing that can normally test herein.
Afterwards, apply test signal from test subject by 10 couples of TCP of measuring head, the answer signal of reading from TCP is sent to test subject (step S12) by measuring head 10.Thus, the performance of TCP and function etc. are tested the judgement of carrying out that non-defective unit, defective products, grade (rank) are distinguished etc. at TCP.Then, the TCP that is judged to be non-defective unit is when being arrived the position of badge punch 26a by conveyance, utilizing badge punch 26a additional is the mark of non-defective unit, the TCP that is judged to be defective products by conveyance when scrapping the position of tapping machine 26b, utilization is scrapped tapping machine 26b and is punched.In addition, according to the utilization form, do not make badge punch 26a sometimes and scrap tapping machine 26b action.
Judgement for defective products, sometimes based on the loose contact of testing weld pad P and the probe 81 of TCP, at this moment, also can make camera objective table 61 after the probe 81/ testing weld pad P that might become loose contact moves, on display panel 91,, automatically show its enlarged image with information such as the sequence number of this TCP, the sequence number of this testing weld pad, the distance value of pushing direction, X-axis coordinate figure, Y-axis coordinate figures.Thus, can hold the state of the testing weld pad of the IC pin that in fact produces loose contact exactly.
Be judged as under the situation that produces loose contact (step S13-"Yes"), the first, the operator can be by manual operation, while observe the position adjustment (step S14a) that the enlarged image of display panel 91 carries out probe 81.Owing to can carry out this position adjustment while observing enlarged image, so can easily carry out.
The second, can automatically test (step S14b) once more.In this case, accept the serial number information of the testing weld pad relevant with the judgement of defective products from test subject, testing weld pad P at testing weld pad P corresponding and periphery thereof with this information, with the above-mentioned position deviation amount of similarly obtaining, under the situation that the position deviation amount of being obtained departs from from normal contact area, be made as contactless state, after the direction that makes thruster objective table 4 to the correction position deviation moves temporarily, be made as contact condition, carry out test once more.Test once more by this, exist TCP to be judged as the situation of non-defective unit.In addition, can extract the extraction that might become the testing weld pad of loose contact P with the result who contacts inspection according to above-mentioned test findings.
When the off-test of TCP as described above, drive by the servomotor 31 of propeller unit 3, via thruster main part 33 absorption platform 34 is moved along direction on the Z axle, become original state (step S15).Probe card objective table 7 is being applied to make it get back to registration location under the situation of position deviation correction.Then, absorption platform 34 stops to carry absorption and the releasing bearing band 5 with 5, moves (step S16) simultaneously and then along direction on the Z axle.
Afterwards, TCP processor 2 judges whether the TCP that has carried out test is last device (step S17), is under the situation of last device (step S17-"Yes") being judged as, and finishes initiatively to do.On the other hand, (step S17-"No") returns step S02 under the situation that is judged as the device that is not last.
More than Shuo Ming embodiment is the embodiment that puts down in writing in order easily to understand the present invention, is not to put down in writing in order to limit the present invention.Therefore, disclosed in the above-described embodiments each key element also comprises all design alterations and the equipollent that belongs in the technical scope of the present invention.
For example, image processing and amplifying function for Flame Image Process parts 90, camera that also can application of high resolution is as the second camera 6b and make this camera have this function, also can use camera with optical image convergent-divergent (zoom) function and according to carry out the image-zooming action from the instruction of Flame Image Process parts 90.
In addition, also can on the picture of display device 9, carry out overlapping (overlay) demonstration to the probe contact point of probe 81 and the middle position point of testing weld pad P.That is, 90 pairs of received view data of Flame Image Process parts are handled, and the first, extract the shape (profile or profile) of probe 81, determine the position (touching the probe contact point of testing weld pad P) of the jag of this probe 81 according to the shape that extracts.Be assumed to be in advance registration herein, the corresponding position relation of shape with the probe 81 of probe contact point is arranged.The second, extract the shape (profile or profile) of testing weld pad P, determine the middle position point of this testing weld pad P according to the shape that extracts.Then, with the image of being made a video recording, with overlapping being shown on the display panel 91 of mark of the position of the middle position point of the mark of the position of expression probe contact point and expression testing weld pad P.Thus, the operator can clearly hold the middle position point of testing weld pad P and the deviation state of probe contact point, so can carry out the adjustment operation of contraposition exactly.In addition, according to expectation, also the middle position point of the probe contact point that extracts in above-mentioned and the testing weld pad P positional information with alignment mark 55 can be saved in the memory storage, can be used in thus in the identification and other statistical treatments of distortion of probe 81.
In addition, in the above-described embodiment, following simple situation has been described: make camera objective table 61 move to preposition (shown in Fig. 6 (a) in the initial stage, the position that alignment mark 55 and these both sides of testing weld pad P are photographed, or be the known position of benchmark with alignment mark 55) afterwards, till the off-test of all TCP, make camera objective table 61 keep motionless, but the situation that in TCP, has very many testing weld pad P, or under the situation of the location that requires higher precision, also can make at least 2 positions of camera objective table on the diagonal line of a plurality of testing weld pad P, or the testing weld pad P that is at least 2 positions of far-end mutually moves successively, similarly obtain a plurality of probes 81 respectively and the position deviation amount Δ D (Δ x, Δ y) of corresponding testing weld pad P with above-mentioned with it., be present at alignment mark 55 under the situation of a plurality of positions herein, preferably made a video recording in certain position of alignment mark 55.And, also can make thruster objective table 4 or probe card 8 to the direction that obtains stable contact according to all position deviation amount Δ D that in above-mentioned, obtain, move along X-direction/Y direction/θ sense of rotation.
In addition, in the above-described embodiment, illustrated after the position of at first determining alignment mark 55 and carried out the example that correct positioning is handled, but under the situation of the TCP kind of big testing weld pad with the correct positioning of not requiring etc., also can handle and omit above-mentioned correct positioning in order to improve handling capacity.That is, can be following test form also: determine the position of alignment mark 55 and calculate and the deviation of position of registration in advance, after positioning, directly carry out and test according to this position deviation information.
In addition, many probes 81 follow several thousand times～several ten thousand times produce by compressive stress (stress) to be out of shape sometimes.Therefore, become the discrete state that all probes 81 of contacting with TCP stagger from the middle position of pairing each testing weld pad sometimes.Therefore, till in probe 81 arbitrarily, detecting loose contact, probe card objective table 7 is moved successively to X-direction and Y direction, determine effective moving area.In view of the above, determine the optimum position (center of XY direction and θ rotation amount) of current probe 81.And, also can determine the registration location of probe card 8 according to determined optimum position.
In addition, also can all automatically carry out the determining and the initial setting of reference position (or benchmark amount of movement) of rough position of probe 81 and the testing weld pad P corresponding with it.Promptly, make main pulley 35b and probe card objective table 7 is moved according to expectation, and camera objective table 6 is moved, determine the position of the alignment mark 55 relevant with predetermined TCP by the second camera 6b, according to the fixed information of the position relation of expression TCP and alignment mark 55, determine near the probe 81 of a plurality of positions (for example 9 positions shown in Fig. 6 (a)) of this alignment mark 55 and the rough position of the testing weld pad P corresponding with it.Afterwards, also can shown in Fig. 6 (b), be made as the state of enlarged image as required like that, as mentioned above, obtain the position deviation amount according to the probe 81/ testing weld pad P of multiple spot and set the reference position.In this case, can automatically carry out best location, get involved and need not the operator.
In addition, also can use the contact audit function, obtain the effective moving area corresponding (effectively moving area) in advance with current probe card 8.Promptly, probe card 8 or thruster objective table 4 are moved along the amount of movement of X-Y plane direction with expectation, on one side the electric contact state to all probes and the testing weld pad corresponding with it detects, and obtains the effective moving area that does not become loose contact in which probe 81.Herein, the amount of movement of expectation can also be made as fixing small unit amount of movement, but preferably carry out binary search (binary search, dichotomizing search), obtain effective moving area with few mobile number of times.In addition, preferably preestablish the restriction of moving range, cause them to sustain damage to prevent probe 81 from colliding the protuberance of TCP.According to effective moving area of being obtained, determine the rough position of the best of TCP and probe card 8.In addition, also obtain the nargin corresponding,, therefore effective moving area can also be utilized as the maintenance information of this probe card 8 so can hold the deformation state of all probes 81 in the probe card 8 with X-direction and Y direction from effective moving area.In addition, preferably the information of effective moving area is kept in the memory storage.
In addition, TCP treating apparatus of the present invention also can have can move the thruster objective table 4 of control by direct motor drive, in this case, can carry out the position deviation correction by the mobile control of probe card objective table 7.
In addition, TCP treating apparatus of the present invention also can be that probe card objective table 7 does not have and can move the manual adjustment mechanism of mechanism of control by direct motor drive.In this case, in initial registration operation, the operator passes through display device 9 observation caliber image or enlarged images on one side, by manual working probe card objective table 7 be set to registration location on one side.After, can automatically carry out the position deviation correction by thruster objective table 4.
In addition, be judged as the TCP of defective products at the result of test execution, also can keep under the current contact condition in former state, position relation to probe 81/ testing weld pad P is made a video recording, under the situation of the position deviation of observing the maximum permissible deviation that surpasses predetermined XY direction, on display panel 91, show the information relevant (sequence number of position deviation amount, corresponding testing weld pad P, push the distance value of direction etc.) with this probe 81.Thus, can automatically show the high probe 81 and the testing weld pad P of possibility of loose contact, can utilize image to confirm their contact condition.
Utilizability on the industry
TCP treating apparatus of the present invention is to alleviating the contact terminal that carries out contact site and TCP The operator's of the contraposition operation of outside terminal burden is exceedingly useful.
Claims (14)
1. TCP treating apparatus, the carrying band that can conveyance be formed with a plurality of TCP on tape, push the carrying band to the contact site that is electrically connected to measuring head, make the outside terminal of TCP touch the contact terminal of above-mentioned contact site, thereby can be delivered to a plurality of TCP in the test successively, and use camera head that the outside terminal of TCP and the contact terminal of contact site are photographed, the image of obtaining be presented on the display device, it is characterized in that:
Display standard image and enlarged image on above-mentioned display device, making the position of contact terminal of the outside terminal can determine TCP and contact site concern positions, above-mentioned standard picture shows all by the photography target thing of camera head photography, and enlarged image amplifies a part that shows by the photography target thing of camera head photography.
2. TCP treating apparatus according to claim 1 is characterized in that:
Even above-mentioned camera head is in the position relation that demonstrates the outside terminal that also can determine TCP under the situation of enlarged image and contact terminal and can carries out the high-resolution camera head of the location of two-terminal.
3. TCP treating apparatus according to claim 1 is characterized in that:
Above-mentioned TCP treating apparatus has: the shooting objective table, this shooting objective table moves above-mentioned camera head, feasible can the photography to the outside terminal of the TCP in precalculated position and the contact terminal of contact site.
4. TCP treating apparatus according to claim 1 is characterized in that:
Above-mentioned TCP treating apparatus has and amplifies the display operation parts, and according to the operation of above-mentioned amplification display operation parts above-mentioned standard picture is amplified and to be used as enlarged image.
5. TCP treating apparatus according to claim 1 is characterized in that:
Above-mentioned TCP treating apparatus under the situation of location deviation or loose contact between the contact terminal of the outside terminal of TCP and contact site, can automatically be presented at the position of this position deviation or loose contact on the above-mentioned display device as enlarged image in actual act.
6. TCP treating apparatus, make a plurality of contact terminals of the contact site that is arranged on the transmitting-receiving of carrying out test signal and be provided in carrying with on a plurality of outside terminals that TCP had of subjects electrically contact and test, it is characterized in that comprising:
Camera head is made a video recording to the outside terminal of contact terminal and the TCP corresponding with this contact terminal;
Display device, according to expectation to handling by the image of the outside terminal of the contact terminal of above-mentioned camera head photography and TCP and showing, wherein
Above-mentioned camera head has the image-zooming function, under the image-zooming state, has the resolution of the position relation of the outside terminal that can determine contact terminal and the TCP corresponding with this contact terminal.
7. TCP treating apparatus according to claim 6 is characterized in that:
According to the view data of a plurality of outside terminals of a plurality of contact terminals of above-mentioned camera head photography and the TCP corresponding, determine the position deviation amount of above-mentioned a plurality of contact terminal and a plurality of outside terminals corresponding with this contact terminal with this contact terminal.
8. TCP treating apparatus according to claim 7 is characterized in that:
Above-mentioned shooting objective table is moved so that above-mentioned camera head can at least 2 positions that are positioned at position on the diagonal line in a plurality of outside terminals that TCP had or mutually away from the outside terminal of at least 2 positions make a video recording,
The view data that photography obtains according to above-mentioned camera head is determined the position deviation amount of the outside terminal and the contact terminal corresponding with this outside terminal of above-mentioned at least 2 positions,
According to above-mentioned position deviation amount, carrying band or contact terminal set are moved, make it possible to obtain stable contact.
9. TCP treating apparatus according to claim 6 is characterized in that:
According to the view data that obtains by above-mentioned camera head photography, first, extract the shape of contact terminal, determine the contact point that this contact terminal contacts with the outside terminal of TCP according to the shape that extracts, the second, according to above-mentioned view data, extract the shape of the outside terminal of TCP, determine the middle position point of this outside terminal according to the shape that extracts
Overlapping being presented on the above-mentioned display device of mark with the position of the middle position point of the mark of the contact point of the above-mentioned contact terminal of expression and expression said external terminal.
10. TCP treating apparatus according to claim 6 is characterized in that:
Use the contact audit function, carrying band or contact terminal set are moved along in-plane, on one side the electric contact state to the outside terminal of all contact terminals and the TCP corresponding with this contact terminal detects, obtain at which contact terminal and do not become loose contact and effective moving area that can contact effectively
According to above-mentioned effective moving area, determine the optimum position of carrying band and contact terminal set.
11. TCP treating apparatus according to claim 6 is characterized in that:
Use the contact audit function, the electric contact state of the outside terminal of all contact terminals and the TCP corresponding with this contact terminal detected,
Detecting under the situation of loose contact, above-mentioned camera head is moved to the position of contact terminal that becomes this loose contact and the outside terminal corresponding with this contact terminal, photographed in this loose contact position, the image of obtaining is presented on the display device.
12. TCP treating apparatus according to claim 6 is characterized in that:
At least a kind of information of the information that the TCP that makes a video recording with the image-zooming multiplying power information of the positional information of above-mentioned camera head, above-mentioned camera head and with above-mentioned camera head is relevant is presented on the display device.
13. TCP treating apparatus according to claim 6 is characterized in that:
According to the contactless state view data of under contactless state, the outside terminal of contact terminal and the TCP corresponding with this contact terminal being made a video recording and obtaining, determine the position relation of above-mentioned contact terminal and the outside terminal corresponding with this contact terminal,
According to the contact condition view data of under the contact condition of implementing in test the outside terminal of contact terminal and the TCP corresponding with this contact terminal being made a video recording and obtaining, determine the position relation of above-mentioned contact terminal and the outside terminal corresponding with this contact terminal,
Obtain the variable quantity of above-mentioned definite two positions relation,, the position deviation of contact terminal and the outside terminal corresponding with this contact terminal is proofreaied and correct according to this variable quantity.
14. TCP treating apparatus according to claim 6 is characterized in that:
The result of test execution is judged as the TCP of defective products, former state is kept current contact condition, all contact terminals and the outside terminal corresponding with this contact terminal are made a video recording, determine every offset residual quantity according to the view data that obtains, will be presented on the above-mentioned display device above the contact terminal of the maximum permissible deviation of preposition departure and the outside terminal corresponding with this contact terminal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200580051587 CN101263395A (en) | 2005-09-15 | 2005-09-15 | TCP processing device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200580051587 CN101263395A (en) | 2005-09-15 | 2005-09-15 | TCP processing device |
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| CN101263395A true CN101263395A (en) | 2008-09-10 |
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| CN 200580051587 Pending CN101263395A (en) | 2005-09-15 | 2005-09-15 | TCP processing device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102411122A (en) * | 2010-09-21 | 2012-04-11 | 株式会社泰塞克 | Tcp Testing Device |
| CN105374700A (en) * | 2015-11-26 | 2016-03-02 | 北京时代民芯科技有限公司 | High density integrated circuit bonding precision control method |
| CN112731097A (en) * | 2020-12-30 | 2021-04-30 | 前海晶云(深圳)存储技术有限公司 | Positioning method, storage device, computer equipment and testing device |
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2005
- 2005-09-15 CN CN 200580051587 patent/CN101263395A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102411122A (en) * | 2010-09-21 | 2012-04-11 | 株式会社泰塞克 | Tcp Testing Device |
| CN102411122B (en) * | 2010-09-21 | 2015-07-22 | 株式会社泰塞克 | Tcp Testing Device |
| CN105374700A (en) * | 2015-11-26 | 2016-03-02 | 北京时代民芯科技有限公司 | High density integrated circuit bonding precision control method |
| CN105374700B (en) * | 2015-11-26 | 2018-01-16 | 北京时代民芯科技有限公司 | A kind of high density integrated circuit is bonded accuracy control method |
| CN112731097A (en) * | 2020-12-30 | 2021-04-30 | 前海晶云(深圳)存储技术有限公司 | Positioning method, storage device, computer equipment and testing device |
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