CN102411122B - Tcp Testing Device - Google Patents
Tcp Testing Device Download PDFInfo
- Publication number
- CN102411122B CN102411122B CN201110140070.3A CN201110140070A CN102411122B CN 102411122 B CN102411122 B CN 102411122B CN 201110140070 A CN201110140070 A CN 201110140070A CN 102411122 B CN102411122 B CN 102411122B
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- CN
- China
- Prior art keywords
- tcp
- probe
- camera
- pad
- thruster
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
- G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N7/00—Television systems
- H04N7/18—Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast
- H04N7/181—Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast for receiving images from a plurality of remote sources
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- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Environmental & Geological Engineering (AREA)
- Signal Processing (AREA)
- Multimedia (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Tests Of Electronic Circuits (AREA)
Abstract
The invention provides a TCP (Transmission Control Protocol) testing device. The TCP testing device is provided with a camera (51) supported in a space between a probe (43) and a TCP (8) in flexibly. The probe (43) and the TCP (8) can be shot by the camera (51). The position shift value of a contact terminal (431) of the probe (43) and a gasket (81) of the TCP (8) can be measured according to the shooting data. The TCP (8) is moved according to the position shift value. Further, the position calibration of the probe (43) and the gasket (81) can be realized accurately.
Description
Technical field
The present invention relates to and the TCP proving installation tested is carried out to TCP electronic circuit component or wire model etc. being loaded into ribbon-shaped members (Tape Carrier Package, thin-film package).
Background technology
The equipment (following, to be generically and collectively referred to as " TCP ") of electronic circuit component or wire model that the film carrier tape manufactured using (hereinafter referred to as " band ") of Kapton etc. loads multiple IC, LSI chips etc. is known by people.The TCP proving installation of this detection TCP performance, comprising: by the spy plate formed at the perpendicular tabular component being equipped with probe in the face (front) of side; To the position relative with probe, the TCP treating apparatus of multiple bands that carrying TCP is formed; The band keeping and visit plate subtend to configure also makes it towards the thruster visiting plate movement.On TCP proving installation, movable propeller, makes the terminal of TCP (pad) contact with the probe visiting plate, carries out the test of TCP.
Like this, in TCP test, because probe directly contacts with the pad of TCP, therefore, before carrying out test or belt replacement time etc. in situation, the position correction of probe and pad must be carried out exactly.
Therefore, all the time, disclosed in WO2004/068154A or JP2002-181889A, by the camera being arranged on another side (back side) side visiting plate, probe and pad are taken pictures, and aim at according to the position of image to probe and pad obtained.
But, due to existing be all that camera is set visiting the rear side of plate, therefore, the contact jaw of probe is not included in the visual field of camera, or, pad because of contact jaw and TCP is overlapped and contact jaw or pad cannot be photographed, and consequently, is difficult to aim at the position of probe and pad.
Summary of the invention
Therefore, the present invention aims to provide a kind of TCP proving installation that accurately can carry out the position correction of probe and pad.
For reaching this object, TCP proving installation (1) provided by the invention, comprising: probe (43), outstanding and have contact jaw (431) to the 1st direction (Z); Thruster (3), contact jaw (431) subtend that is upper in the 1st direction (Z) and probe (43) arranges and keeps having the TCP (8) of pad (81); Camera (51), to be supported in movably in the space between probe (43) and TCP (8) and in this space, to take probe (43) and TCP (8); Measurement section (74), the probe (43) taken according to camera (51) and the image of TCP (8), the position deviation amount of the contact jaw (431) of measuring probe (43) and the pad (81) of TCP (8); Drive division (72), the position deviation amount measured according to measurement section (74) makes thruster (3) at the 2nd direction (X intersected vertically with the 1st direction (Z), Y) upper mobile, by making thruster (3) mobile along the 1st direction (Z) towards contact jaw (431), the pad (81) of the TCP (8) kept by thruster (3) is contacted with contact jaw (431); Test department (75), under the state that the contact jaw (431) of probe (43) contacts with the pad (81) of TCP (8), carries out the test of TCP (8).
Accompanying drawing explanation
Fig. 1 is for representing the front view (FV) of the formation of the TCP proving installation that the embodiment of the present invention provides.
Fig. 2 amplifies the stereographic map representing a TCP proving installation part.
Fig. 3 is the concept map representing TCP proving installation major part.
Fig. 4 is the block diagram representing that in TCP proving installation, control device is formed.
Fig. 5 is for representing the process flow diagram of the test action of the TCP proving installation that the embodiment of the present invention provides.
Fig. 6 is the schematic diagram that the position relationship visiting plate and band is described.
Embodiment
Below, with reference to accompanying drawing, the embodiment of the present invention is described in detail.
The formation > of <TCP proving installation
As shown in Figure 1, Figure 2, Figure 3 shows, the TCP proving installation 1 that the present embodiment provides, comprising: TCP treating apparatus 2, is mounted with the band T of TCP 8 along prescribed path conveyance; Propulsive mechanism (thruster) 3, is arranged in the carrying channel track of TCP 8, is keeping, by under the state of band T that transports, advancing to prescribed direction; Detection agency 4, is arranged with propulsive mechanism 3 subtend in z-direction, has the probe 43 outstanding to propulsive mechanism 3; Camera 5, supports the camera 51 with 2 visuals field movably between propulsive mechanism 3 and probe 43; Measurement section camera 6; Control device 7, controls the action of the inscape 2 ~ 6 of these TCP proving installations 1.
In addition, for simplicity, vertical direction is called " X-direction ", to intersect vertically with X-direction and the direction being connected propulsive mechanism 3 and detection agency 4 is called " Z-direction ", be called with the direction that X-direction and Z-direction intersect vertically (direction that the paper of relative Fig. 1 is vertical) " Y-direction ".Fasten in the pass with claim, corresponding 1st direction of Z-direction, X-direction and corresponding 2nd direction of Y-direction.
TCP treating apparatus 2, comprising: roll out reel 21, the band T before winding test; Winding reel 22, reels from the band T tested rolling out reel 21 and roll out.Rolling out between reel 21 and winding reel 22, be provided with: the 1st unloading part 23, sending from rolling out the band T that reel 21 rolls out to propulsive mechanism 3; 1st sprocket gear 24 and the 1st sprocket gear guide rod 25, send the band T sent here by the 1st unloading part 23 under the state of tension force applying regulation along vertical below (X-direction) towards propulsive mechanism 3; 2nd sprocket gear 26 and the 2nd sprocket gear guide rod 27, derive the band T by propulsive mechanism 3 to winding reel 22; 2nd unloading part 28, sends the band T derived from these to winding reel 22.
Propulsive mechanism 3 plays the function of travel mechanism.Propulsive mechanism 3, comprising: advance platform 31, can in X direction, Y-direction, Z-direction and supported around Z axis (θ direction) mobile (moving freely); Pushing disc 32, is installed in while advancing platform 31 and arranges with spy plate 42 (contact jaw 431 of probe 43) subtend described later, is connected (folding connects) with the surface activity of band T; Band pincers (テ mono-プ Network ラ Application パ) 33, is arranged on the two ends of the Y-direction of pushing disc 32, and extends to X-direction, retainer belt T.Carry out the band T that tests keep by band pincers 33, be with the TCP 8 on T to be arranged on pushing disc 32 thus.In addition, by the control of aftermentioned drive division 72, once advance platform 31 to move, be then installed in and advance the pushing disc 32 on platform 31 also to move together.This only shows as in this manual sometimes " pushing disc 32 being moved by the control of drive division 72 ".
Detection agency 4, comprising: pedestal 41, arranges in z-direction, be provided with opening at central portion away from propulsive mechanism 3 predetermined distance; Visit plate 42, be arranged on the opening part of pedestal 41, and pushing disc 32 subtend is arranged.On spy plate 42, be provided with to the outstanding probe 43 in propulsive mechanism 3 side (Z-direction).The syringe needle of probe 43 is the contact jaw contacted with the terminal of TCP 8 (pad) 81.Probe 43 is electrically connected with control device 7.
Camera 5, comprising: camera 51, has 2 visuals field; Moving part 52, can support this camera 51 movably in the space at least between propulsive mechanism 3 (or, be pushed into the TCP 8 that mechanism 3 keeps) and detection agency 4 (probe 43) in X-direction, Y-direction and Z-direction.
At this, camera 51, by having CCD (Charge Coupled Device, charge coupled cell) or the digital camera of 2 solid imaging devices of CMOS (Complementary Metal Oxide Semiconductor, complementary metal oxide semiconductor (CMOS)) etc. form.Therefore, camera 51, owing to can obtain image respectively from 2 solid imaging devices, therefore, it is possible to the visual field that shooting 2 is different.In the present embodiment, suppose that the position of camera 51 is the initial point of Z axis, then 2 visuals field of camera 51 are set as the positive and negative both direction of Z axis.That is, set the 1st visual field and comprise detection agency 4 (probe 43), the 2nd visual field comprises propulsive mechanism 3 (TCP 8 kept).Thus, camera 51 can take propulsive mechanism 3 and this two side of detection agency 4.Further, the normal in the normal in the 1st visual field and the 2nd visual field, be set as namely being positioned on the same straight line that parallels with Z axis along Z-direction.Therefore, 2 visuals field can reflect the rightabout position facing sustained height (X-direction).
In addition, as camera 51, be not defined as the digital camera with 2 solid imaging devices, the various digital cameras with 2 visuals field all can be suitable for.Such as, by having 1 solid imaging device, be arranged on the prism on the optical axis of this solid imaging device, the digital camera with 2 visuals field that can switch the formations such as the shutter in the visual field also can be suitable for.
Measurement section camera 6, is made up of the known digital camera with solid imaging devices such as CCD or CMOS.Measurement section camera 6, in z-direction, is arranged on and the relative side of propulsive mechanism 3 of detection agency 4 and opposite side.That is, propulsive mechanism 3, detection agency 4, measurement section camera 6, is set up in parallel in z-direction with this order.The shooting direction of measurement section camera 6, is set to along Z-direction, and, be positioned at and be maintained at the TCP8 visited on the summary central portion of plate 42 and pushing disc 32 and be on same straight line.Therefore, measurement section camera 6, can be taken pictures by the peristome described later 425 being formed in spy plate 42 central portion TCP 8.
Control device 7, comprising: input part 71, detects the operation input of user; Drive division 72, controls the driving of propulsive mechanism 3, camera 5 and measurement section camera 6; Storage part 73, stores the various information relevant to the action of TCP proving installation 1 etc.; Image processing part 74, the photographed data for camera 51 and measurement section camera 6 carries out image procossing; Test department 75, carries out the test of TCP 8 with the tester do not represented in figure; Master control part 76, the action of control TCP proving installation 1 entirety.Here, tester, is mounted on detection agency 4, is electrically connected with probe 43, measures the electrology characteristic of TCP 8.Its measurement result, is sent in control device 7.
Image processing part 74 has the function of measurement section, the probe 43 taken based on camera 51 and the image of TCP 8, the position deviation amount of the contact jaw 431 of measuring probe 43 and the pad 81 of TCP 8.The function that drive division 72 has is, based on the position deviation amount that image processing part 74 is measured, the propelling platform 31 of propulsive mechanism 3 is moved to X, Y-direction, and then by making propelling platform 31 move along Z-direction to contact jaw 431, thus the pad 81 of the TCP 8 that pushing disc 32 is kept contacts with contact jaw 431.The function that test department 75 has is, under the state that the contact jaw 431 of probe 43 contacts with the pad 81 of TCP 8, carries out the test of TCP 8.
Such control device 7, is made up of the program that computing machine and this computing machine are installed.Computing machine, comprising: the arithmetic units such as CPU; The memory storages such as internal memory, HDD (Hard Disc Drive, hard disk drive); Keyboard, mouse, positioning equipment, button, touch panel etc. detect the input media of external information input; The I/F device of various information transmit-receive is carried out by communication lines such as the Internet, LAN (Local Area Network, LAN (Local Area Network)), WAN (Wide Area Network, wide area network); The display device such as LCD (Liquid Crystal Display, liquid crystal display) or FED (Field Emission Display, Field Emission Display).This computing machine (hardware resource) is controlled by program (software), by the cooperation of hardware resource and software resource, realizes above-mentioned input part 71, drive division 72, storage part 73 and master control part 76.In addition, said procedure, also can provide with the form be stored in the storage medium such as floppy disk, CD-ROM, DVD-ROM, IC internal memory.
The test action > of <TCP proving installation
Below, with reference to Fig. 5 for TCP proving installation 1 carry out TCP 8 test action be described.Hereinafter, though be test new TCP 8 for example to be described, as described later, visit plate 42 even changed, roll out the situation of reel 21, also can test with same order.
User utilizes input part 71, the positional information of the TCP 8 that input tape T loads is (following, be called " TCP positional information ") and check that the positional information of spy plate 42 of this TCP 8 is (following, be called " detecting location information ") after, these information are stored into (step S 1) in storage part 73.At this, containing the position (coordinate in XY plane) of alignment mark on TCP 8, the position (coordinate in XY plane) etc. of the pad 81 be arranged on TCP 8 in TCP positional information.In addition, contain the position (coordinate in XY plane) of the probe 43 visited on plate 42 in detecting location information, carry out needle position (coordinate in XY plane) (hereinafter referred to as " aligned position ") of the probe 43 of position correction, the needle height (coordinate of Z-direction) etc. of probe 43.In addition, hereinafter, as shown in Figure 6, the position in conjunction with the probe 43 using being arranged on corner in multiple probe 43 is described as the situation of the 1st ~ 4th aligned position 421 ~ 424.
Under the control of drive division 72, with the state with pincers 33 retainer belt T, advance platform 31 to move, pushing disc 32 is in relatively visiting the state that plate 42 leaves predetermined distance.In addition, under the control of drive division 72, camera 51 moves to pushing disc 32 and visits between plate 42 (step S2).
After TCP positional information and detection information are transfused to, utilize camera 51, measure the needle height (step S3) being positioned at the probe 43 of the 1st ~ 4th aligned position 421 ~ 424.The needle height of this probe 43, the distance namely from the surface of the spy plate 42 Z-direction to the syringe needle of probe 43.The needle height of measuring probe 43, first, because only obtaining towards the signal in the solid imaging device of detection agency 4 side, the visual field of camera 51 is only set to detection agency 4 side, and then passing through the control of drive division 72, camera 51 moves to the position relative with the 1st aligned position 421.Then, by the focus of camera 51 being aimed at the syringe needle being positioned at the probe 43 of the 1st aligned position 421, the needle height of this probe 43 is measured.By same method, measure the needle height of the probe 43 on the 2nd ~ 4th aligned position 421 ~ 424.The needle height measured, compares with the needle height be stored in step 1 in storage part 73, and difference is that the needle height measured is stored in storage part 73.
After surveyingpin grease head highness, utilize camera 51, measure the needle position (step S4) being positioned at the probe 43 of the 1st ~ 4th aligned position 421 ~ 424.This needle position visits the coordinate (coordinate in XY plane) on propulsive mechanism 3 one side plane of plate 42.The measurement of the needle position of probe 43, first, image processing part 74, the visual field of camera 51 is only set to detection agency 4 side, and then pass through the control of drive division 72, camera 51 moves to the position relative with the 1st aligned position 421, after confirming to be positioned at the needle height of the probe 43 of the 1st aligned position 421, measures should the needle position of probe 43 of needle height according to photographed data.By same method, image processing part 74, measures the needle position of the probe 43 on the 2nd ~ 4th aligned position 421 ~ 424.The needle position measured, compares with the needle position be stored in step 1 in storage part 73 (aligned position), and difference is that the needle height measured is stored in storage part 73.
After needle position is measured, image processing part 74, the position deviation amount (step S5) of the pad 81 of the TCP 8 corresponding to the 1st ~ 4th aligned position 421 ~ 424 detected in measuring process S4.Concrete, first, image processing part 74, because only obtaining towards the signal in the solid imaging device of propulsive mechanism 3 side, being only set to propulsive mechanism 3 side, being namely set to TCP 8 side by the visual field of camera 51.Image processing part 74, according to the alignment mark of the TCP 8 comprised in its visual field, confirms the approximate location of the pad 81 on TCP8.Further, by the control of drive division 72, camera 51 moves to the relative position of the 1st aligned position 421.After camera 51 moves, image processing part 74, because only obtaining towards the signal in the solid imaging device of detection agency 4 side, switching to the visual field of camera 51 and visiting plate 42 side, detect the needle position being positioned at the probe 43 at the 1st aligned position 421 place, be stored in storage part 73.The visual field of camera 51 is switched to TCP 8 side by image processing part 74 again, the pad 81 of TCP 8 relative for the in z-direction with 1st aligned position 421 is carried out the image procossing of edge extracting etc., detect the position (coordinate in XY plane) of pad 81 thus, be stored in storage part 73.After the position of pad 81 detects, image processing part 74, by being compared in the position of this pad 81 and the needle position that detects before, measures the departure of pads placement and needle position.This departure is the distance between pad 81 in XY plane and needle position, more specifically, is the distance between the position (hereinafter referred to as " contact position ") of the pad 81 of contact probe 43 and needle position.This contact position, with the edge of pad 81 for benchmark is arranged arbitrarily.By same method, image processing part 74, measures the needle position of probe 43 on the 2nd ~ 4th aligned position 421 ~ 424 and the departure of pads placement.The departure measured, is stored in storage part 73.Like this, the measurement of the departure of pads placement, due to without the need to mobile cameras 51, just carries out the switching in the visual field, thus can prevent the displacement error including camera 51 in measurement result.
After departure is measured, master control part 76, the pin carrying out probe 43 aims at (step S6).Concrete, first, by the control of drive division 72, camera 51 migrates out the position of propulsive mechanism 3 and detection agency 4 clamping, moves to the position of not interfering propulsive mechanism 3 and detection agency 4 in the Z-axis direction.According to the departure of above-mentioned measurement, the position in the X of spy plate 42, Y-direction is set.That is, to the probe 43 on the 1st ~ 4th aligned position 421 ~ 424, position correction is carried out in the mode that the contact position of the pad 81 configured with subtend contacts.In this condition, by the control of drive division 72, pushing disc 32 moves to the position, front of contact pins 81, afterwards, moves to spy plate 42 side with arbitrary setting value unit, while confirm whether pad 81 contacts with probe 43.Whether contact, be confirm based on the signal in the tester (not shown) be connected with detection agency 4.
As mentioned above, after pushing disc 32 moves to Z-direction with arbitrary setting value unit, in multiple probes 43 that spy plate 42 comprises, the ratio that the pad 81 of the TCP 8 kept with pushing disc 32 contacts constantly increases.The position of the pushing disc 32 when this ratio being reached regulation setting rate is set as contact height.The contact height of this setting is stored in storage part 73.
After contact height setting, image processing part 74, confirms the most applicable position of contact (step S7).The most applicable position of contact is, such as, in the equidistant position, each limit apart from pad 81, each probe 43 has the position of contact more than needed from the edge of pad 81.Such as, pushing disc 32 is under the state moving to contact height, and pushing disc 32 moves with arbitrary setting value unit in the x, y direction, by confirming probe 43 pairs of non-contacting positions of pad 81, obtains contacting the most applicable position.After obtaining contacting the most applicable position, propulsive mechanism 4, makes pushing disc 32 move to this most applicable position of contact.
After pushing disc 32 moves to the most applicable position of contact, image processing part 74, is taken pictures by the alignment mark of the TCP 8 on measurement section camera 6 pairs of pushing discs 32, confirms the position (step S8) of this alignment mark.As shown in Figure 6, visiting the summary central portion of plate 42, peristome 425 is formed with.Measurement section camera 6, takes pictures to the TCP 8 exposed from this peristome 425.The position of alignment mark, is stored in storage part 73.Thereby, it is possible to the position of the alignment mark stored in storage part 73 for benchmark, differentiate goes out the most applicable position of contact.
After alignment mark on the most applicable position of contact is stored, test department 75, the test (step S9) of the TCP 8 that the band T carrying out rolling out winding on reel 21 loads.Concrete, the band T rolling out winding on reel 21 sends by pushing disc 32 successively, and band pincers 33 keep the band T of each TCP 8.Under this state be kept, the aligned position of measurement section camera 6 couples of TCP 8 is taken pictures, and calculates the departure of the position of the alignment mark measured in the position of this alignment mark and step S8, moves pushing disc 32 in the x, y direction according to this departure.Therefore, pushing disc 32, can be configured in the most applicable position of contact.Then, pushing disc 32 moves to contact height in z-direction, and the pad 81 of the TCP 8 on pushing disc 32 is contacted with the probe 43 visiting plate 42.This probe 43, is electrically connected with control device 7 by tester (not shown).Test department 75, by probe 43 and TCP 8 switching telecommunication number, confirms whether TCP 8 occurs exception thus.After having confirmed, pushing disc 32 leaves from spy plate 42, and the band T that band pincers 33 keep is decontroled, and the band T of the TCP 8 being loaded with configuration on pushing disc 32 is transported to winding reel 22 side.This series of test action, is performed until till the band T rolling out on reel 21 winding do not have.
As described above, in the present embodiment, owing to being provided with camera 51 in the space between propulsive mechanism 3 and detection agency 4, therefore, it is possible to photograph the contact jaw 431 of probe 43 and the end of pad 81.Therefore, according to these photographed datas, the position deviation amount of measuring probe 43 and pad 81, makes TCP 8 move according to this position deviation amount, thus can carry out the position correction of probe 43 and pad 81 exactly.
In addition, as shown in Figure 5, though be the explanation carried out the situation of the new TCP 8 of test, even change the situation visited plate 42, roll out reel 21, self-evident, be also to utilize above-mentioned identical method to carry out testing.Concrete, when changing spy plate 42, read the TCP positional information or detecting location information of having deposited from storage part 73 after, carry out the process of step S3 ~ step S9.In addition, when replacing rolls out reel 21, read the needle height of probe 43, needle position from storage part 73 after, the process of step S5 ~ step S9 is carried out.
In addition, in the present embodiment, though be have 2 explanations that the visual field is carried out for camera 51, if camera 51 can be arranged in the space between probe 43 and TCP 8, the camera in 1 visual field is also suitable for.Under this occasion, such as, camera is provided with the travel mechanism that can move the visual field around X-axis, by taking the positive and negative both sides of Z-direction, can realize the action effect same with above-described embodiment.
The present invention, the various devices that 2 parts be applicable to by making subtend arrange contact and carry out testing.
Claims (2)
1. a TCP proving installation (1), is characterized in that, comprising:
Central authorities are formed with the spy plate of peristome;
Probe (43), is arranged on the face of the side of described spy plate, outstanding to the 1st direction (Z), and, there is contact jaw (431);
Thruster (3), is arranged relative to contact jaw (431) subtend of described 1st direction (Z) with described probe (43), and, keep the TCP (8) with pad (81);
Camera (51), is supported in the space between described probe (43) and described TCP (8) movably, and, in this space, take described probe (43) and described TCP (8);
Measurement section (74), the described probe (43) taken according to described camera (51) and the image of described TCP (8), measure the position deviation amount of the contact jaw (431) of described probe (43) and the pad (81) of described TCP (8);
Drive division (72), the position deviation amount measured according to described measurement section (74) makes described thruster (3) at the 2nd direction (X intersected vertically with described 1st direction (Z), Y) upper mobile, by making described thruster (3) mobile along described 1st direction (Z) towards described contact jaw (431), the pad (81) of the described TCP (8) kept by described thruster (3) is contacted with described contact jaw (431);
Test department (75), under the state that the contact jaw (431) of described probe (43) contacts with the pad (81) of described TCP (8), carries out the test of TCP (8);
Measurement section camera, is disposed in the opposition side with described thruster subtend in the both sides of described spy plate;
Storage part, the alignment mark position of the TCP that the described thruster storing the most applicable position of contact obtained under the state of described thruster movement based on the position deviation amount measured by described measurement section keeps;
When testing at every turn, described measurement section camera is taken pictures across the alignment mark of peristome to the TCP brought sent of described spy plate, compare with the described TCP alignment mark contacting the most applicable position be stored in described storage part, moved by described drive division and make described thruster be configured in the most applicable position of contact.
2. TCP proving installation according to claim 1, it is characterized in that, camera (51) in the described space be supported on movably between described probe (43) and described TCP (8), has the 1st visual field towards described probe (43) direction and the 2nd visual field towards described TCP (8) direction;
The normal in described 1st visual field and the normal in described 2nd visual field, be positioned at along on the same straight line in described 1st direction (Z).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010-210578 | 2010-09-21 | ||
| JP2010210578A JP2012068032A (en) | 2010-09-21 | 2010-09-21 | Tcp testing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102411122A CN102411122A (en) | 2012-04-11 |
| CN102411122B true CN102411122B (en) | 2015-07-22 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110140070.3A Ceased CN102411122B (en) | 2010-09-21 | 2011-05-27 | Tcp Testing Device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2012068032A (en) |
| KR (1) | KR101238397B1 (en) |
| CN (1) | CN102411122B (en) |
| TW (1) | TWI456212B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6001292B2 (en) | 2012-03-23 | 2016-10-05 | 株式会社日立ハイテクサイエンス | Emitter fabrication method |
| CN103713205B (en) * | 2012-09-28 | 2016-10-26 | 名硕电脑(苏州)有限公司 | Capacitance touch screen automatic test approach |
| KR101759470B1 (en) * | 2016-11-23 | 2017-07-19 | 주식회사 디이엔티 | The lighting test apparatus for panel |
| CN114088979A (en) * | 2021-12-20 | 2022-02-25 | 百及纳米科技(上海)有限公司 | Probe calibration method, surface measurement method, and probe control apparatus |
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| NL1019775C2 (en) * | 2002-01-18 | 2003-07-21 | Integrated Production And Test | Circuit board testing device, contains removable needle board with testing needles |
| CN101263395A (en) * | 2005-09-15 | 2008-09-10 | 株式会社爱德万测试 | TCP processing device |
| JP4480253B2 (en) * | 2000-10-27 | 2010-06-16 | 株式会社アドバンテスト | Electronic device testing pressing device, electronic device testing device and control method thereof |
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| JP4036554B2 (en) * | 1999-01-13 | 2008-01-23 | 富士通株式会社 | Semiconductor device, test method thereof, and semiconductor integrated circuit |
| JP2002107438A (en) * | 2000-09-29 | 2002-04-10 | Ando Electric Co Ltd | Calibration device for semiconductor test device |
| JP2002181889A (en) * | 2000-12-13 | 2002-06-26 | Ando Electric Co Ltd | Device for positioning probe card and tab |
| WO2004068154A1 (en) * | 2003-01-31 | 2004-08-12 | Japan Engineering Co.,Ltd. | Tcp handling device and positional deviation correcting method for the same |
| JP2006186395A (en) * | 2006-03-03 | 2006-07-13 | Advantest Corp | Tcp handler, and method of detecting defective punching hole therefor |
| WO2008126173A1 (en) * | 2007-03-13 | 2008-10-23 | Advantest Corporation | Tcp handling device |
| WO2008120518A1 (en) * | 2007-03-29 | 2008-10-09 | Advantest Corporation | Tcp handling apparatus |
| WO2008120519A1 (en) * | 2007-03-29 | 2008-10-09 | Advantest Corporation | Tcp handling apparatus |
| JP5358138B2 (en) * | 2008-07-31 | 2013-12-04 | 東京エレクトロン株式会社 | Inspection device |
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2010
- 2010-09-21 JP JP2010210578A patent/JP2012068032A/en active Pending
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- 2011-05-19 TW TW100117556A patent/TWI456212B/en not_active IP Right Cessation
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4480253B2 (en) * | 2000-10-27 | 2010-06-16 | 株式会社アドバンテスト | Electronic device testing pressing device, electronic device testing device and control method thereof |
| NL1019775C2 (en) * | 2002-01-18 | 2003-07-21 | Integrated Production And Test | Circuit board testing device, contains removable needle board with testing needles |
| CN101263395A (en) * | 2005-09-15 | 2008-09-10 | 株式会社爱德万测试 | TCP processing device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012068032A (en) | 2012-04-05 |
| TWI456212B (en) | 2014-10-11 |
| CN102411122A (en) | 2012-04-11 |
| KR20120030927A (en) | 2012-03-29 |
| TW201213819A (en) | 2012-04-01 |
| KR101238397B1 (en) | 2013-02-28 |
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