201213819 * • 六、發明說明： 【明戶斤屬彳'舒>#貝-i^e_】 發明領域 本發明係有關於-種測試於帶狀構件搭載有電子電路 零件或配線圖形等之TCP(Tape Carder以咖㈣之丁⑶測試 裝置。 C先前j 發明背景 聚醯亞胺等薄膜載帶（以下稱為「帶」。）搭載有複數個 1C或LSIs曰片等電子電路零件或配線圖形之器件（以下總稱 為「TCP」。）已廣為人知。檢查此Tcp之性能之Tcp測試裝 ‘ 置包含有由探針直立設置於—面（正面）之板狀構件構成之 - ㈣卡、_財複數個TCP之帶搬送至錢針對向之位 置之TCP處理器、保持與探針卡對向配置之帶，使其向探 十卡移動之推動器。TCP測試裝置使推動器移動而使TCp 之端子(墊)接觸探針卡之探針，來進行TCP之測試。 如此在TCP之測喊，由於使探針與Tcp之塾直接接 觸故於進行測试則或更換帶時等，需正確地進行探針與 墊之對位。 因此！知如购2004/068154八或JP2002-181889A所揭 T以α又於^木針卡之另一面（背面）側之照相機，拍攝探針及 t* ’《此娜圖像’進行探針料之對位。 |[瘦^明内^ 發明概要 201213819 發明欲解決之課題 八’;、而由於s知於探針卡之背面側設有照相機，故探 針之接觸端不包含在照相機之視野内，或接觸端與之 墊重疊’而無法拍攝接觸端或塾，結果，不易正確地進行 探針與墊之對位。 疋故’本發明係以提供可正確地進行探針與墊之對位 之TCP測試裝置為目的。 用以欲解決課題之手段 為達成此目的，本發明之TCP測試裝置包含有探針、 推動器照、相機、測定部、驅動部及測試部，該探針係於 第1方向大出，且具有接觸端者；該推動器係在前述第1方 向，與前述探針之接觸端對向配置，且保持具有墊之TCP 者’ 4照相機係支樓成可S f述探針與前述TCP間之空間 移動’且在該空間内’拍攝前述探針及前述TCP者；該測 定π係依據以前述照相機所拍攝之前述探針及前述T C p之 圖像’’則定前述探針之接觸端與前述TCP之墊之位置偏移 量者’魏動部係依據以前述測定部所測定之位置偏移 量使別述推動器於與前述第i方向垂直相交之第2方向移 動，並使則述推動器沿著前述第1方向，朝前述接觸端移 動藉此，使保持在前述推動器之前述TCp之墊接觸前述 接觸端者，該測試部係在前述探針之接觸端接觸前述TCP 之螫之狀態下，進行TCP之測試者。 圖式簡單說明 第1圖係顯示本發明實施例之TCP測試裝置之結構的 201213819 * • 正面圖。 第2圖系將Tcp測試裝置之一部份放大顯示之立體圖。 第3圖係測試裝置之主要部份之概念圖。 第4圖係示Tcp測試裝置之控制裝置之結構的塊圖。 第5圖係顯不本發明實施例之T C P測試裝置之測試動 作的流程圖。 第图、用以說明探針與帶之位置關係之示意圖。 【實施冷式】 用以實施發明之形熊 以下，參照圖式，就本發明之實施例，詳細地說明。 TCP測試裝置之結構 如第1圖、第2圖、第3圖所示，本實施例之TCP測試裝 - 置1包含有將搭載有TCP8之帶丁沿著預定路徑搬送之TCP處 理器2、。又於TCP8之搬送路徑之途中，將所搬送之帶τ在保 持之狀態下推出至預定方向之推動器機構(推動器）3、在ζ 方向與推動克機構3對向設置，並具有朝推動器機構3突出 之探針43之探測機構4、將具有2個視野之照相機51支樓成 可在推動器機構3與探針43間移動之照相機機構5、測定部 照相機6、控制該等τ C ρ測試裝置〗之構成要件2〜6之動作的 控制裝置7。 此外，為方便，令鉛直方向為rx方向」，令與χ方向 垂直相交，且連結推動器機構3與探測機構4之方向為「ζ 方向」，令與X方向及Ζ方向垂直相交之方向（對第丨圖之紙面 垂直之方向）為「Υ方向」。與申請專利範圍之關係為ζ方向 201213819 對應於第1方向，χ方向及γ方向對應於第2方向。 TCP處理器2包含有捲繞有測試前之帶τ之捲出捲盤 21 '捲繞從捲出捲盤21捲出，進行了測試之帶τ之捲繞捲盤 22。於捲出捲盤21與捲繞捲盤22間設有將從捲出捲盤21捲 出之帶Τ朝推動器機構3送出之第丨送出部23、將從第丨送出 部23送出之帶Τ以朝推動器機構3施加預定張力之狀態送出 至鉛直下方(X方向）之第丨鏈輪24及第1鏈輪導件25、將通過 推動器機構3之帶Τ朝捲繞捲盤22導出之第2鏈輪26及第2鏈 輪導件27、將從該等導出之帶τ朝捲繞捲盤22送出之第2送 出部28。 推動器機構3具有作為移動機構之功能。推動器機構3 具有支樓成可於X方向、γ方向、ζ方向及繞2軸（0方向）移 動(移動自如）之推動器台3卜安裳於推動器台31，並且與後 述探針卡42(之探針43之接觸端431)對向配置，且可供帶τ 於表面滑動接觸之推動||板32、設於推動^砂之丫方向之 兩端’且於χ方向延伸’以保持帶τ之帶夾持器33。藉進行 測试之帶Τ以帶夾持器33予以保持，帶τ上之Tcp8可配置於 推動器板32上。此外，當推動胃自31藉後述之驅動部72之 控制，移動時，安裝於推動ϋ台31之推動ϋ板32也-起移 動。有將此點在本說明書中僅表現為 「推動器板32藉驅動 部7 2之控制移動」之情形。 才木測機構4具有於ζ方向距離推動器機構3預定間隔而 配置’並於中央部設有開口之基座4卜設於基座41之開口， 並與推動器板32對向配置之探針卡❿於㈣卡42設有突 6 201213819 出至推動器機構3側(Z方向）之探針43。探針43之尖端作為 與TCP8之端子（墊)81接觸之接觸端。探針43與控制裝置7電 性連接。 照相機機構5具有具2個視野之照相機51，.將此照相機 51支撐成至少可在推動器機構3(或保持在推動器機構3之 TCP8)與探測機構4(之探針43)間之空間内於X方向、γ方向 及Z方向移動之移動部52。 在此，照相機 51 由具有 2個 CCD(Charge Coupled Device) 或CMOS(Complementary Metal Oxide Semiconductor)等固 體影像感測器之數位照相機構成。因而，照相機51藉從2個 固體影像感測器分別擷取圖像，可拍攝2個不同之視野。在 本實施例中，當將照相機51之位置假設為z軸之原點時，照 相機51之2個視野設定在2軸之正負兩方向。即，第丨視野設 定成包含探測機構4(之探針43)，第2視野設定成包含推動器 機構3(予以保持之TCP8)。藉此，照相機51可拍攝推動器機 構3及探測機構4兩者。又，第丨視野之法線及第2視野之法 線設定成沿著Z軸方向，即位於與z軸平行之同一直線上。 藉此’ 2個視野便可映出在相同之高度(X方向）之相反方向 正對面之位置。 此外，照相機51不限於具有2個固態影像感測器之數位 照相機’只要為具有2個視野者，可適用各種數位照相機。 舉例言之，可適用由1個固態影像感測器、設於此固態影像 感測器之光軸上之稜鏡、切換視野之快門等構成之具有2個 視野之數位照相機。 201213819 測定部照相機6可由具有C C D或c M 〇 s等固態影像感 測器之幕所皆知之數位照相機構成。測定部照相機6配設於 在Z方向’探測機構4之與推動器機構3對向之側之對側。 即，推動機構3 '探測機構4、測定部照相機6依序於z方向 排列配設。測定部照相機6之拍攝方向設定成沿著z軸方 向’且與探針卡42之約中央部及保持在推動器板32上之 TCP8位於同一直線上。藉此，測定部照相機6可藉由形成 於探針卡42之中央部之後述開口部425，拍攝TCP8。 控制裝置7具有檢測使用者之操作輸入之輸入部71、控 制推動器機構3、照相機機構5及測定部照相機6之驅動之驅 動部72、記憶與TCP測試裝置1之動作等相關之各種資訊之 記憶部7 3、對照相機51及測定部照相機6之拍攝資料進行圖 像處理之圖像處理部74、使用圖中未示之測試器，進行 TCP8之測試之測試部75、控制TCp測試裝置丨全體之動作之 主控制部76 ^在此，測試器係安裝於探測機構4者，係與探 針43電性連接，以測定TCp8之電特性者。其測定結果可送 出至控制裝置7。 圖像處理部74具有下述測定部之功能，前述測定部係 依據以照相機51所拍攝之探針43及TCP8之圖像，測定探針 43之接觸端431與丁<：1>8之墊81之位置偏移量者。驅動部u 具有下述功能，前述功能係依據以圖像處理部74所測定之 位置偏移量，使推動器機構3之推動器台31於X、Y方向移 動’進—步’使推動器台31沿著Z方向朝接觸端431移動， 藉此，使保持在推動器板32之TCP8之墊81接觸接觸端431 8 201213819 者。測試部75具有在探針43之接觸端431接觸TCP8之墊81 之狀態下’進行TCP8之測試之功能。 此種控制裝置7由電腦、安裝於此電腦之程式構成。電 腦具有CPU等運算裝置、記憶體、HDD(Hard Disc Drive)等 記憶裝置、從鍵盤、滑鼠、指向裝置 '按鈕、觸摸面板等 外部檢測資訊之輸入之輸入裝置、藉由網際網路、 LAN(Local AreaNetwork)、WAN(Wide Area Network)等通信 線路’進行各種資訊之發送接收之I/F裝置、LCD(Liquid201213819 * • VI. Description of the invention: [Ming 斤 彳 彳 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒 舒(Tape Carder is a test device for the coffee maker (4).) Previously, the film carrier tape (hereinafter referred to as "belt") is equipped with a plurality of electronic circuit parts or wiring patterns such as 1C or LSIs. The device (hereinafter collectively referred to as "TCP") is widely known. The Tcp test device for checking the performance of this Tcp consists of a plate-like member that is placed upright on the front side (front side) - (4) Card, A plurality of TCP tapes are transported to the TCP processor to which the money is directed, and the pusher that is placed opposite the probe card to move toward the probe card. The TCP test device moves the pusher to make the TCp The terminal (pad) contacts the probe of the probe card to perform the TCP test. Therefore, in the TCP test, since the probe is directly in contact with the Tcp, it is necessary to correctly test or replace the tape. Perform the alignment of the probe and the pad. Take the camera of 2004/0681548 or JP2002-181889A, and take the probe on the other side (back side) side of the alpha needle card, and take the probe and t* 'this image” for the alignment of the probe material. [[瘦^明内^ Invention Summary 201213819 The problem to be solved by the invention is eight';] Since the camera is provided on the back side of the probe card, the contact end of the probe is not included in the field of view of the camera, or The contact end overlaps with the pad', and the contact end or the cymbal cannot be photographed. As a result, it is difficult to correctly align the probe with the pad. Therefore, the present invention provides a TCP that can correctly perform alignment of the probe and the pad. For the purpose of the test device, the TCP test device of the present invention includes a probe, a pusher lens, a camera, a measuring unit, a driving unit, and a test unit. The probe is the first one. The direction is large and has a contact end; the pusher is disposed in the first direction, and is disposed opposite to the contact end of the probe, and the TCP holder with the pad is maintained. The space between the needle and the aforementioned TCP moves 'and within the space' Shooting the probe and the TCP; the measuring π is based on the image of the probe and the image of the TC p taken by the camera, and the position of the contact end of the probe and the pad of the TCP is offset. The 'Wei moving part moves the other pusher in the second direction perpendicularly intersecting the i-th direction according to the positional shift amount measured by the measuring unit, and the pusher is along the first direction, The contact end is moved such that the pad of the TCp held by the pusher contacts the contact end, and the test portion performs the test of the TCP in a state where the contact end of the probe contacts the TCP. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front view showing the structure of a TCP test apparatus according to an embodiment of the present invention. Figure 2 is a perspective view showing an enlarged portion of a Tcp test device. Figure 3 is a conceptual diagram of the main part of the test setup. Figure 4 is a block diagram showing the structure of the control device of the Tcp test device. Figure 5 is a flow chart showing the test operation of the T C P test device of the embodiment of the present invention. The figure is a schematic diagram for explaining the positional relationship between the probe and the belt. [Implementation of Cold Type] Shape Bear for Carrying Out the Invention Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. The structure of the TCP test apparatus is as shown in Fig. 1, Fig. 2, and Fig. 3. The TCP test apparatus 1 of the present embodiment includes a TCP processor 2 that transports the tape carrying the TCP 8 along a predetermined path. . Further, in the middle of the transport path of the TCP 8, the pusher mechanism (the pusher) 3 that pushes the transported belt τ to the predetermined direction while being held is placed opposite to the pusher mechanism 3 in the ζ direction, and has a push-up The detecting mechanism 4 of the probe 43 protruding from the mechanism 3, the camera 51 having two fields of view, the camera mechanism 5 movable between the pusher mechanism 3 and the probe 43, the measuring unit camera 6, and the control of the τ The control device 7 that constitutes the operation of the requirements 2 to 6 of the C ρ test device. Further, for convenience, the vertical direction is the rx direction, so that the direction perpendicular to the χ direction is intersected, and the direction connecting the pusher mechanism 3 and the detecting mechanism 4 is "ζ direction" so that the direction intersecting the X direction and the Ζ direction is perpendicular ( The direction perpendicular to the paper surface of the figure is "Υ direction". The relationship with the patent application scope is the ζ direction 201213819 corresponds to the first direction, and the χ direction and the γ direction correspond to the second direction. The TCP processor 2 includes a take-up reel 21 that is wound with a tape τ before the test, and a winding reel 22 with a tape τ that has been unwound from the unwinding reel 21 and tested. Between the take-up reel 21 and the take-up reel 22, a second feed portion 23 that feeds the take-up roll that is unwound from the take-up reel 21 to the pusher mechanism 3 and that is fed from the second feed portion 23 is provided. The second sprocket 24 and the first sprocket guide 25, which are fed vertically downward (in the X direction), are fed to the winding reel 22 by the sprocket of the pusher mechanism 3, with a predetermined tension applied thereto. The second sprocket 26 and the second sprocket guide 27 and the second delivery unit 28 that feeds the belt τ which is derived therefrom to the winding reel 22 are provided. The pusher mechanism 3 has a function as a moving mechanism. The pusher mechanism 3 has a pusher table that is movable in the X direction, the γ direction, the ζ direction, and the 2nd axis (0 direction) (movable freely), and is mounted on the pusher table 31, and is described later with the probe The card 42 (the contact end 431 of the probe 43) is disposed oppositely, and the push plate|plate 32 which is provided with the sliding contact of the surface τ is provided at both ends of the direction of the pushing sand and extends in the χ direction. To hold the belt holder 33 with the belt τ. The tape to be tested is held by the tape holder 33, and the Tcp8 on the tape τ can be disposed on the pusher plate 32. Further, when the control of the driving portion 72, which will be described later, is pushed by the stomach 31, the pushing jaw 32 attached to the pushing platform 31 is also moved. In this specification, this point is only expressed as "the movement of the pusher plate 32 by the control of the drive unit 7 2". The wood measuring mechanism 4 has a base 4 disposed at a predetermined interval from the pusher mechanism 3 in the ζ direction, and is provided at the opening of the pedestal 41 at the center, and is disposed opposite to the pusher plate 32. The needle stuck in the (four) card 42 is provided with a probe 43 which is protruded to the side of the pusher mechanism 3 (Z direction). The tip end of the probe 43 serves as a contact end in contact with the terminal (pad) 81 of the TCP 8. The probe 43 is electrically connected to the control unit 7. The camera mechanism 5 has a camera 51 having two fields of view, which supports the camera 51 at least between the pusher mechanism 3 (or the TCP 8 held in the pusher mechanism 3) and the probe mechanism 4 (the probe 43). The moving portion 52 that moves in the X direction, the γ direction, and the Z direction. Here, the camera 51 is constituted by a digital camera having two solid image sensors such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor). Therefore, the camera 51 captures two different fields of view by capturing images from two solid image sensors. In the present embodiment, when the position of the camera 51 is assumed to be the origin of the z-axis, the two fields of view of the camera 51 are set in both positive and negative directions of the two axes. That is, the second field of view is set to include the probe mechanism 4 (the probe 43), and the second field of view is set to include the pusher mechanism 3 (the TCP 8 to be held). Thereby, the camera 51 can photograph both the pusher mechanism 3 and the detecting mechanism 4. Further, the normal line of the second field of view and the normal line of the second field of view are set along the Z-axis direction, that is, on the same line parallel to the z-axis. By this, the two fields of view can reflect the position of the opposite side in the opposite direction of the same height (X direction). Further, the camera 51 is not limited to a digital camera having two solid-state image sensors. As long as it has two fields of view, various digital cameras can be applied. For example, a digital camera having two fields of view composed of one solid-state image sensor, a 设 on the optical axis of the solid-state image sensor, and a shutter for switching the field of view can be applied. 201213819 The measuring unit camera 6 can be constituted by a digital camera known as a solid-state image sensor such as C C D or c M 〇 s. The measuring unit camera 6 is disposed on the opposite side of the Z direction 'detecting mechanism 4 from the side opposite to the pusher mechanism 3. That is, the pushing mechanism 3' detecting means 4 and the measuring section camera 6 are arranged in order in the z direction. The imaging direction of the measurement unit camera 6 is set to be along the z-axis direction and is located on the same line as the center portion of the probe card 42 and the TCP 8 held on the pusher plate 32. Thereby, the measurement unit camera 6 can image the TCP 8 by forming the opening portion 425 which is formed in the center portion of the probe card 42. The control device 7 includes an input unit 71 that detects an operation input by the user, a drive unit 72 that controls driving of the pusher mechanism 3, the camera mechanism 5, and the measurement unit camera 6, and various information related to the operation of the TCP test device 1. The memory unit 73, the image processing unit 74 that performs image processing on the image data of the camera 51 and the measurement unit camera 6, the test unit 75 that performs the test of the TCP 8 using a tester not shown, and the control TCp test device. The main operation control unit 76. Here, the tester is attached to the detecting mechanism 4, and is electrically connected to the probe 43 to measure the electrical characteristics of the TCp8. The measurement result can be sent to the control device 7. The image processing unit 74 has a function of a measurement unit that measures the contact end 431 of the probe 43 and the D1 <:1>8 based on the images of the probe 43 and the TCP 8 captured by the camera 51. The position of the pad 81 is offset. The driving unit u has a function of causing the pusher stage 31 of the pusher mechanism 3 to move 'in step' in the X and Y directions in accordance with the positional shift amount measured by the image processing unit 74. The stage 31 is moved toward the contact end 431 in the Z direction, whereby the pad 81 of the TCP 8 held by the pusher plate 32 is brought into contact with the contact end 431 8 201213819. The test portion 75 has a function of performing the test of the TCP 8 in a state where the contact end 431 of the probe 43 contacts the pad 81 of the TCP 8. Such a control device 7 is composed of a computer and a program installed on the computer. The computer has a computing device such as a CPU, a memory device, a memory device such as a HDD (Hard Disc Drive), an input device for inputting external detection information such as a keyboard, a mouse, a pointing device, a touch panel, and the like, and an Internet, a LAN. (Local Area Network), WAN (Wide Area Network) and other communication lines 'I/F devices and LCDs for transmitting and receiving various kinds of information (Liquid
Crystal Display)或 FED(Field Emission Display)等顯示裝 置。此種電腦(硬體資源）以程式（軟體)控制，藉硬體資源與 軟體共同運作，可實現上述輸入部71、驅動部72、記憶部 73及主控制部76。此外，上述程式亦可以記錄於軟碟、 CD-ROM、DVD-ROM、1C記憶體等記錄媒體之狀態來提供。 TCP測試裝置之測試動作 接著，就TCP測試裝置1之TCP8之測試動作，參照第5 圖來說明。此外’在町，舉測靖之Tm之情形為例來 說明’但如後述，關於更換探針卡42或捲出捲盤歡情形， 亦可以相同之程序來測試。Display devices such as Crystal Display) or FED (Field Emission Display). Such a computer (hardware resource) is controlled by a program (software), and the input unit 71, the drive unit 72, the memory unit 73, and the main control unit 76 can be realized by the hardware resources and the software. Further, the above program may be provided in a state of a recording medium such as a floppy disk, a CD-ROM, a DVD-ROM, or a 1C memory. Test Operation of TCP Test Device Next, the test operation of TCP 8 of the TCP test device 1 will be described with reference to FIG. In addition, in the case of the town, the case of measuring the Tm of the Jing is taken as an example. However, as will be described later, the same procedure can be used for the replacement of the probe card 42 or the winding of the reel.
TCP8上之校準標記之位置（χγ平面上之座標卜 之塾81之位置(ΧΥ平面上之座標）等。 二’ TCP位置資訊包含 之座標）、設在TCP8 又’探針位置資訊包 9 201213819 含探針卡42上之探針43之位置（χγ平面上之座標）、進行對 位之探針43之尖端位置(XY平面上之座標）(以下稱為「校準 位置」。）、探針43之尖端高度(z方向之座標）等。此外，在 以下中’如第6圖所示，就令複數個探針43中設於四個角之 探針43之位置為第丨〜第4校準位置421〜424之情形作說明。 藉驅動部72之控制，在帶夾持器33保持帶τ之狀態下， 推動器台31移動’而形成推動器板32與探針卡42距離預定 距離而對向之狀態。又，藉驅動部72之控制，照相機51於 推動器板32與探針卡42間移動（步驟S2)。 當輸入TCP位置資訊及探針資訊時，使用照相機51， 測定位於第1〜第4校準位置421〜424之探針43之尖端高度 (步驟S3)。此探針43之尖端高度係指從z方向之探針卡42之 表面至探針43之尖端之距離。探針43之尖端高度之測定係 首先藉僅擷取朝向探測機構4之固態影像感測器之信號，令 照相機51之視野僅為探測機構4側之後，藉驅動部72之控 制，照相機51移動至與第1校準位置421對向之位置。接著， 藉使照相機51之焦點對準位於第丨校準位置421之探針43之 尖端，測定其探針43之尖端高度。以同樣之方法，測定第 2〜第4校準位置421〜424之探針43之尖端高度。所測定之尖 端高度與在步驟1記憶於記憶部73之尖端高度比較，若不同 時’便將所測定之尖端高度記憶於記憶部73。 當測定尖端高度時，使用照相機51，測定位於第1〜第4 校準位置421〜424之探針43之尖端位置（步驟S4p此尖端位 置為探針卡42之推動器機構3側之平面上之座標(χγ平面上 201213819 之座標）。探針43之尖端位置之測定係首先圖像處理部74令 照相機51之視野僅為探針機構4側後，藉驅動部72之控制， 照相機51移動至與第1校準位置421對向之位置，確認位於 此第1校準位置421之探針43之尖端高度後，依據拍攝資 料’測定對應於其尖端高度之探針43之尖端位置。藉同樣 之方法，圖像處理部74測定第2〜第4校準位置422〜424之探 針43之尖端位置。所測定之尖端位置與在步驟1記憶於記憶 部73之尖端位置（校準位置）比較，若不同時，便將所測定之 尖端位置記憶於記憶部73。 當測定尖端位置時，圖像處理部74測定對應於在步驟 S4所檢測出之第丨〜第4校準位置421〜424之Tcp8之墊81之 位置的偏移量（步驟S5)。具體言之，首先，圖像處理部74 藉僅掏取朝向推動器機構3側之固態影像感測器之信號，令 照相機51之視野為推動器機構3側、亦即。圖像處 理部74依據該視野所含之TCP8之校準標記，確認TCP8上之 墊81之大概位置。然後，藉驅動部72之控制，照相機51移 動至與第1校準位置421相對之位置。當照相機51移動時， 圖像處理部74藉僅擷取朝向探測機構4側之固態影像感測 咨之信號’將照相機51之視野切換至探針卡42側，檢測位 於第1校準位置421之探針43之尖端位置，使記憶部73予以 屺憶。圖像處理部74再將照相機51之視野切換至TCP8側， 將與第1校準位置421在Z方向對向之TCP8之墊81進行邊緣 抽取等圖像處理，藉此，檢測墊81之位置(χγ平面上之座 k )’並使s己憶部73予以記憶。當檢測塾81之位置時’圖像 201213819 處理部74藉比較此墊81之位置與之前所檢測之尖端位置， 測定墊位置與尖端位置之偏移量。此偏移量係指χγ平面上 之墊81與尖端位置之距離、更具體言之係指使探針43接觸 之墊81上之位置（以下稱為「接觸位置」。）與炎端位置之距 離。該接觸位置係以塾81之邊緣為基準來任意地設定。藉 同樣之方法，圖像處理部74測定第2〜第4校準位置422〜424 之探針43之尖端位置與墊位置之偏移量。所測定之偏移量 記憶於記憶部73。如此，由於墊位置之偏移量之測定不移 動照相機51，而僅以視野之切換來進行，故可防止測定結 果包含照相機51之移動誤差。 當測定偏移量時，主控制部76進行探針43之探針對位 (步驟S6)。具體言之，首先’藉驅動部72之控制，照相機51 從爽在推動器機構3與探測機構4間之位置退離，移動至不 與推動器機構3及探測機構4於Z軸方向干擾之位置。依據如 上述所測定之偏移量，設定探針卡42之X、Y方向之位置。 即’第1〜第4校準位置421〜424之探針43對位成接觸對向配 置之墊81之接觸位置。在此狀態下，藉驅動部72之控制， 推動器板32移動至將要接觸墊81前之位置，之後，一面以 任意之設定值單位，移動至探針卡42側，一面確認塾81是 否接觸探針43。是否接觸可依據連接於探測機構4之測試器 之信號確認。 如上述’當推動器32以任意之設定值單位，於z方向移 動時’探針卡42所包含之複數個探針43 _接觸保持在推動 器板32之TCP8之墊81者之比例增加。其比例達到預定之設 12 201213819 . 定率時之推動器板32之位置便設定為接觸高度。此所設定 之接觸高度記憶於記憶部73。 當設定接觸高度時，圖像處理部74確認接觸最適合位 置（步驟S7)。接觸最適合位置係指在距離墊81之各邊等距離 之位置’各探針43與墊81之邊緣留有距離而接觸之位置。 舉例言之，在推動器板32移動至接觸高度之狀態下，推動 态板32於X、γ方向以任意之設定值單位移動，確認探針43 與墊81不接觸之位置，藉此，取得接觸最適合位置。當取 得接觸最適合位置時，推動器機構3使推動器板32移動至該 接觸最適合位置。 S推動器板32移動至接觸最適合位置時，圖像處理部 74以測定部照相機6，拍攝推動器板32上之TCP8之校準標 記，確認此校準標記之位置（步驟S8)。如第6圖所示，於探 針卡42之約中央部形成有開口部425。測定部照相機6拍攝 從該開口部425露出之TCP8。校準標記之位置記憶於記憶 部73。藉此，可以記憶於記憶部乃之校準標記之位置為基 準，導出接觸最適合位置。 當圮憶接觸最適合位置時，測試部75進行捲繞於捲出 捲盤21之帶T之TCP8之測試(步驟S9)。具體言之，推動器板 323依序送出捲繞於捲出捲盤21之帶T，帶夾持器33按各 TCP8保持帶T。在此保持之狀態下，測定部照相機6拍攝 TCP8之校準標記，算出此校準標記之位置與在步驟％所測 定之校準標記之位置之偏移量，依據此偏移量，推動器板 32於X、Y方向移動。藉此，推動器板32配置於接觸最適合 13 201213819 位置。接著，推動器板32於Z方向移動至接觸高度，而使推 動器板32上之TCP8之墊81接觸探針卡42之探針43。此探針 43藉由測試器（圖中未示）’與控制裝置7電性連接。藉測試 部75藉由探針43 ’與TCP8交換電信號，確認TCP8是否有異 常。當確認結束時，推動益板3 2離開探針卡4 2，釋放以帶· 夾持器33所保持之帶T，將搭載有配置於推動器32上之 TCP8之帶T送出至捲繞捲盤22側。此種一連串之測試動作 進行至無捲繞於捲出捲盤21之帶T為止。 如以上所說明’根據本實施例’藉於推動器機構3與探 測機構4間之空間設照相機51，可拍攝探針43之接觸端431 及墊81之端部。因此，依據該等拍攝資料，測定探針43與 墊81之位置偏移量，依據此位置偏移量，使TCP8移動，藉 此，可正確地進行探針43與墊81之對位。 此外，在第5圖中，就測試新之TCP8之情形作了說明， 關於更換探針卡42及捲出捲盤21之情形，亦可與上述同等 之方法測試是無須贅言的。具體言之，更換探針卡42時， 從記憶部73讀取已記憶之TCP位置資訊或探針位置資訊之 後，進行步驟S3〜S9之處理即可。又，更換捲出捲盤21時， 從記憶部73讀取探針43之尖端高度或尖端位置之後，進行 步驟S5〜S9之處理即可。 又，在本實施例中，以照相機51具有2個視野之情形為 例作了說明，照相機51只要可配設於探針43與TCP8間之空 間’可適用1個視野之照相機是無須贅言的。此時，藉於照 相機設可使視野繞X軸移動之移動機構，可拍攝z軸方向之 14 201213819 正負兩側，而可實現與上述本實施例同等之作用效果。 產業上之可利用性 本發明可適用於藉使對向配置之2個構件接觸，進行測 試之各種裝置。 【圖式簡單說明】 第1圖係顯示本發明實施例之TCP測試裝置之結構之 正面圖。 第2圖係將TCP測試裝置之一部份放大顯示之立體圖。 第3圖係顯示TCP測試裝置之主要部份之概念圖。 第4圖係顯示T C P測試裝置之控制裝置之結構的塊圖。 第5圖係顯示本發明實施例之TCP測試裝置之測試動 作的流程圖。 第6圖係用以說明探針與帶之位置關係之示意圖。 【主要元件符號說明】 1...TCP測試裝置 23...第1送出部 2...TCP處理器 24...第1鏈輪 3...推動器機構 25...第1鏈輪導件 4...探測機構 26...第2鏈輪 5...照相機機構 27...第2鏈輪導件 6...測定部照相機 28...第2送出部 7...控制裝置 31...推動器台 8...TCP 32...推動器板 21...捲出捲盤 33...帶夾持器 22...捲繞捲盤 41...基座 15 201213819 42...探針卡 81…墊(端子） 43...探針 421…第1校準位置 51…照相機 422...第2校準位置 52...移動部 423...第3校準位置 71...輸入部 424…第4校準位置 72...驅動部 425...開口部 73...記憶部 431...接觸端 74...圖像處理部 S1-S9.··步驟 75...測試部 T...帶 76...主控制部 X，Y，Z，0...方向 16The position of the calibration mark on TCP8 (the position of the coordinate 卜81 on the χγ plane (the coordinate on the ΧΥ plane), etc.. 2) The coordinates of the TCP location information are included in the TCP8 and the 'probe location information packet 9 201213819 The position of the probe 43 on the probe card 42 (the coordinate on the χγ plane), the tip position of the probe 43 to be aligned (the coordinate on the XY plane) (hereinafter referred to as "calibration position"), and the probe The tip height of 43 (the coordinate in the z direction) and the like. Further, in the following, as shown in Fig. 6, the case where the positions of the probes 43 provided at the four corners of the plurality of probes 43 are the second to fourth calibration positions 421 to 424 will be described. By the control of the driving unit 72, the pusher stage 31 is moved in a state where the belt gripper 33 holds the belt τ, and the pusher plate 32 and the probe card 42 are opposed to each other by a predetermined distance. Further, the camera 51 moves between the pusher plate 32 and the probe card 42 under the control of the drive unit 72 (step S2). When the TCP position information and the probe information are input, the camera 51 is used to measure the tip height of the probes 43 located at the first to fourth calibration positions 421 to 424 (step S3). The tip height of this probe 43 refers to the distance from the surface of the probe card 42 in the z direction to the tip end of the probe 43. The tip height of the probe 43 is measured by first capturing the signal of the solid-state image sensor facing the detecting mechanism 4, so that the field of view of the camera 51 is only the side of the detecting mechanism 4, and the camera 51 is moved by the control of the driving unit 72. The position is opposite to the first calibration position 421. Next, the tip height of the probe 43 is measured by focusing the camera 51 on the tip end of the probe 43 located at the second calibration position 421. In the same manner, the tip height of the probes 43 of the second to fourth calibration positions 421 to 424 is measured. The height of the tip measured is compared with the height of the tip of the memory unit 73 in step 1, and if not the same, the measured tip height is memorized in the memory unit 73. When the tip height is measured, the tip end position of the probe 43 located at the first to fourth calibration positions 421 to 424 is measured using the camera 51 (step S4p is the tip position on the side of the pusher mechanism 3 side of the probe card 42). Coordinates (coordinates of 201213819 on the χγ plane). The tip position of the probe 43 is measured. First, after the image processing unit 74 causes the field of view of the camera 51 to be only the probe mechanism 4 side, the camera 51 moves to the control of the drive unit 72. After the position of the tip end of the probe 43 located at the first calibration position 421 is confirmed at the position opposite to the first calibration position 421, the tip position of the probe 43 corresponding to the tip height is measured based on the image data '. The image processing unit 74 measures the tip end position of the probe 43 of the second to fourth calibration positions 422 to 424. The measured tip position is different from the tip position (calibration position) stored in the memory unit 73 in step 1. When the tip position is measured, the image processing unit 74 measures the pad corresponding to the Tcp8 corresponding to the fourth to fourth calibration positions 421 to 424 detected in step S4. 81 The offset of the position (step S5). Specifically, first, the image processing unit 74 captures the signal of the solid-state image sensor toward the pusher mechanism 3 side, so that the field of view of the camera 51 is the pusher mechanism. The image processing unit 74 confirms the approximate position of the pad 81 on the TCP 8 based on the calibration mark of the TCP 8 included in the field of view. Then, the camera 51 moves to the first calibration position by the control of the drive unit 72. When the camera 51 moves, the image processing unit 74 switches the field of view of the camera 51 to the side of the probe card 42 by capturing only the signal of the solid-state image sensing protocol toward the detecting mechanism 4 side. 1 The position of the tip end of the probe 43 at the calibration position 421 is restored to the memory unit 73. The image processing unit 74 switches the field of view of the camera 51 to the TCP 8 side, and the TCP 8 is aligned with the first calibration position 421 in the Z direction. The pad 81 performs image processing such as edge extraction, whereby the position of the pad 81 (the seat k on the χγ plane) is detected and the s memory portion 73 is memorized. When the position of the 塾81 is detected, the image 201213819 is processed. The portion 74 compares the position of the pad 81 with The detected tip position is used to determine the offset between the pad position and the tip position. This offset refers to the distance between the pad 81 on the χγ plane and the tip position, and more specifically, on the pad 81 that contacts the probe 43. The position (hereinafter referred to as "contact position") is the distance from the position of the inflammation end. The contact position is arbitrarily set based on the edge of the 塾 81. By the same method, the image processing unit 74 measures the second to the fourth. The offset position of the tip end of the probe 43 at the calibration positions 422 to 424 is offset from the pad position. The measured offset amount is stored in the memory portion 73. Thus, since the offset of the pad position is measured, the camera 51 is not moved, but only Since the visual field is switched, it is possible to prevent the measurement result from including the movement error of the camera 51. When the offset amount is measured, the main control unit 76 performs probe alignment of the probe 43 (step S6). Specifically, first, by the control of the driving unit 72, the camera 51 retreats from the position between the pusher mechanism 3 and the detecting mechanism 4, and moves to the Z-axis direction without interfering with the pusher mechanism 3 and the detecting mechanism 4. position. The position of the probe card 42 in the X and Y directions is set based on the offset measured as described above. Namely, the probes 43 of the first to fourth calibration positions 421 to 424 are aligned to the contact positions of the mats 81 which are opposed to each other. In this state, the pusher plate 32 is moved to the position before the pad 81 is to be contacted by the control of the driving unit 72, and then moved to the side of the probe card 42 in an arbitrary set value unit, and it is confirmed whether or not the 塾81 is in contact. Probe 43. Contact is confirmed by the signal of the tester connected to the detecting mechanism 4. As described above, when the pusher 32 moves in the z direction in any set value unit, the ratio of the plurality of probes 43 included in the probe card 42 to the pads 81 of the TCP 8 held by the pusher board 32 increases. The ratio reaches the predetermined setting. 12 201213819 . The position of the pusher plate 32 at the time of setting is set as the contact height. The contact height set here is stored in the memory unit 73. When the contact height is set, the image processing unit 74 confirms the contact optimum position (step S7). The most suitable position for contact means a position where the probes 43 are spaced apart from the edges of the pads 81 at a position equidistant from each side of the pad 81. For example, in a state where the pusher plate 32 is moved to the contact height, the pusher dynamic plate 32 is moved in an arbitrary set value unit in the X and γ directions, and the position where the probe 43 and the pad 81 are not in contact with each other is confirmed, thereby obtaining Contact is best for the location. When the contact most suitable position is obtained, the pusher mechanism 3 moves the pusher plate 32 to the most suitable position for the contact. When the S pusher plate 32 is moved to the most suitable position for contact, the image processing unit 74 photographs the calibration mark of the TCP 8 on the pusher plate 32 by the measuring unit camera 6, and confirms the position of the calibration mark (step S8). As shown in Fig. 6, an opening portion 425 is formed in a central portion of the probe card 42. The measurement unit camera 6 captures the TCP 8 exposed from the opening 425. The position of the calibration mark is memorized in the memory unit 73. Thereby, the position of the calibration mark in the memory portion can be memorized as a reference, and the most suitable position for the contact can be derived. When the memory contact is most suitable for the position, the test unit 75 performs a test of the TCP 8 of the tape T wound around the take-up reel 21 (step S9). Specifically, the pusher plate 323 sequentially feeds the tape T wound around the take-up reel 21, and the tape gripper 33 holds the tape T for each TCP8. In this state, the measurement unit camera 6 captures the calibration mark of TCP8, and calculates the offset of the position of the calibration mark from the position of the calibration mark measured in step %, and according to the offset, the pusher plate 32 is Move in the X and Y directions. Thereby, the pusher plate 32 is placed in contact with the position most suitable for 13 201213819. Next, the pusher plate 32 is moved to the contact height in the Z direction, and the pad 81 of the TCP 8 on the pusher plate 32 is brought into contact with the probe 43 of the probe card 42. The probe 43 is electrically connected to the control device 7 by a tester (not shown). The borrowing test unit 75 exchanges an electric signal with the TCP 8 by the probe 43' to confirm whether or not the TCP 8 is abnormal. When the confirmation is completed, the profit plate 3 2 is pushed away from the probe card 4 2, the tape T held by the tape holder 33 is released, and the tape T on which the TCP 8 disposed on the pusher 32 is mounted is sent out to the winding roll. Disk 22 side. This series of test actions are carried out until there is no winding T around the take-up reel 21. As described above, the camera 51 is provided in the space between the pusher mechanism 3 and the detecting mechanism 4 according to the present embodiment, and the contact end 431 of the probe 43 and the end of the pad 81 can be photographed. Therefore, based on the photographing data, the positional deviation between the probe 43 and the pad 81 is measured, and the TCP 8 is moved in accordance with the positional shift amount, whereby the alignment of the probe 43 and the pad 81 can be accurately performed. Further, in Fig. 5, the case of testing the new TCP 8 has been described, and it is needless to say that the case where the probe card 42 is replaced and the reel 21 is unwound can be tested in the same manner as described above. Specifically, when the probe card 42 is replaced, the stored TCP position information or probe position information is read from the storage unit 73, and then the processing of steps S3 to S9 is performed. When the roll-out reel 21 is replaced, the tip height or the tip end position of the probe 43 is read from the memory unit 73, and then the processes of steps S5 to S9 are performed. Further, in the present embodiment, the case where the camera 51 has two fields of view has been described as an example. The camera 51 can be disposed in the space between the probe 43 and the TCP 8. It is not necessary to say that a camera having one field of view is applicable. . At this time, by moving the camera to move the field of view around the X-axis, it is possible to capture both sides of the positive and negative sides of the 2012 axis 19 in the z-axis direction, and the same effects as those of the above-described embodiment can be achieved. Industrial Applicability The present invention is applicable to various devices that are tested by contacting two members arranged in opposite directions. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front elevational view showing the structure of a TCP test apparatus according to an embodiment of the present invention. Figure 2 is a perspective view showing an enlarged portion of a TCP test device. Figure 3 is a conceptual diagram showing the main parts of the TCP test set. Fig. 4 is a block diagram showing the structure of a control device of the T C P test device. Fig. 5 is a flow chart showing the test operation of the TCP test apparatus of the embodiment of the present invention. Figure 6 is a schematic view showing the positional relationship between the probe and the belt. [Description of main component symbols] 1...TCP test device 23...first delivery unit 2...TCP processor 24...first sprocket 3...push mechanism 25...first chain Wheel guide 4...detection mechanism 26...second sprocket 5...camera mechanism 27...second sprocket guide 6...measuring unit camera 28...second delivery unit 7. .. control device 31... pusher table 8... TCP 32... pusher plate 21... roll-out reel 33... with gripper 22... reel reel 41.. Base 15 201213819 42...probe card 81...pad (terminal) 43...probe 421...first calibration position 51...camera 422...second calibration position 52...moving unit 423.. The third calibration position 71...the input unit 424...the fourth calibration position 72...the drive unit 425...the opening 73...the memory unit 431...the contact end 74...the image processing unit S1 -S9.··Step 75...Test unit T...Band 76...Main control unit X, Y, Z, 0... Direction 16