CN102411122A - Tcp Testing Device - Google Patents
Tcp Testing Device Download PDFInfo
- Publication number
- CN102411122A CN102411122A CN2011101400703A CN201110140070A CN102411122A CN 102411122 A CN102411122 A CN 102411122A CN 2011101400703 A CN2011101400703 A CN 2011101400703A CN 201110140070 A CN201110140070 A CN 201110140070A CN 102411122 A CN102411122 A CN 102411122A
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- CN
- China
- Prior art keywords
- tcp
- probe
- camera
- pad
- contact jaw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
- G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N7/00—Television systems
- H04N7/18—Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast
- H04N7/181—Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast for receiving images from a plurality of remote sources
Abstract
The invention provides a TCP (Transmission Control Protocol) testing device. The TCP testing device is provided with a camera (51) supported in a space between a probe (43) and a TCP (8) in flexibly. The probe (43) and the TCP (8) can be shot by the camera (51). The position shift value of a contact terminal (431) of the probe (43) and a gasket (81) of the TCP (8) can be measured according to the shooting data. The TCP (8) is moved according to the position shift value. Further, the position calibration of the probe (43) and the gasket (81) can be realized accurately.
Description
Technical field
The present invention relates to TCP proving installation that the TCP (Tape Carrier Package, thin-film package) that electronic circuit component or cloth line model etc. is loaded into ribbon-shaped members is tested.
Background technology
The equipment (below, be generically and collectively referred to as " TCP ") of the electronic circuit component that loads a plurality of IC, LSI chip etc. or cloth line model of going up at the film carrier tape manufactured using of Kapton etc. (below, be called " band ") is known by people.The TCP proving installation that this detects the TCP performance comprises: by the spy plate that constitutes at the perpendicular tabular component that is equipped with probe of the face (front) of a side; To the position relative with probe, the TCP treating apparatus of the formed a plurality of bands of carrying TCP; Keep and the band of spy plate subtend configuration and the thruster that it is moved towards the spy plate.On the TCP proving installation, move thruster, the terminal (pad) of TCP is contacted with the probe of visiting plate, carry out the test of TCP.
Like this, in the TCP test,, therefore, testing preceding or more during tape swapping etc. under the situation, must carry out the position correction of probe and pad exactly because the pad of probe and TCP directly contacts.
Therefore; All the time; As WO2004/068154A or JP2002-181889A are disclosed, through the camera that is arranged on another side (back side) side of visiting plate probe and pad are taken pictures, and the position of probe and pad is aimed at according to the image that obtains.
But; Because existing all is in the rear side of visiting plate camera to be set, therefore, the contact jaw of probe is not included in the visual field of camera; Perhaps; Because of the overlapped contact jaw of the pad of contact jaw and TCP or pad can't be photographed, consequently, be difficult to the position of probe and pad is aimed at.
Summary of the invention
Therefore, the present invention aims to provide a kind of TCP proving installation that can accurately carry out the position correction of probe and pad.
For reaching this purpose, TCP proving installation provided by the invention (1) comprising: probe (43), and outstanding and have a contact jaw (431) to the 1st direction (Z); Thruster (3) is gone up and contact jaw (431) the subtend setting of probe (43) and the TCP (8) that maintenance has pad (81) in the 1st direction (Z); Camera (51) is supported in the space between probe (43) and the TCP (8) movably and in this space, takes probe (43) and TCP (8); Measurement section (74) is according to the probe (43) of camera (51) shooting and the image of TCP (8), the position deviation amount of the contact jaw (431) of measuring probe (43) and the pad (81) of TCP (8); Drive division (72); The position deviation amount of measuring according to measurement section (74) makes thruster (3) at the 2nd direction (X that intersects vertically with the 1st direction (Z); Y) upward move; Pad (81) through thruster (3) is moved, make the TCP (8) that is urged into device (3) maintenance along the 1st direction (Z) towards contact jaw (431) contacts with contact jaw (431); Test department (75) under the contacted state of pad (81) of the contact jaw (431) of probe (43) and TCP (8), carries out the test of TCP (8).
Description of drawings
Fig. 1 is the front view (FV) of the formation of the TCP proving installation that provides of the expression embodiment of the invention.
Fig. 2 is for amplifying the stereographic map of an expression TCP proving installation part.
Fig. 3 is the concept map of expression TCP proving installation major part.
The block diagram that Fig. 4 constitutes for control device in the expression TCP proving installation.
Fig. 5 is the process flow diagram of the test action of the TCP proving installation that provides of the expression embodiment of the invention.
Fig. 6 visits the synoptic diagram of the position relation of plate and band for explanation.
Embodiment
Below, with reference to accompanying drawing, the embodiment of the invention is elaborated.
< formation of TCP proving installation >
Like Fig. 1, Fig. 2, shown in Figure 3, the TCP proving installation 1 that present embodiment provides comprises: TCP treating apparatus 2 is mounted with the band T of TCP 8 along the prescribed path conveyance; Propulsive mechanism (thruster) 3 is arranged in the carrying channel track of TCP 8, under keeping by the state of the band T of conveyance, advances to prescribed direction; Detection agency 4 with propulsive mechanism 3 subtend settings, has the probe of giving prominence to propulsive mechanism 3 43 on the Z direction; Photograph mechanism 5 supports to have the camera 51 in 2 visuals field movably between propulsive mechanism 3 and probe 43; Measurement section camera 6; Control device 7 is controlled the action of the inscape 2～6 of these TCP proving installations 1.
In addition; For simplicity; Vertical direction is called " directions X ", the direction that will intersect vertically and be connected propulsive mechanism 3 and detection agency 4 with directions X is called " Z direction ", will be called " Y direction " with the direction (the vertical direction of paper of Fig. 1 relatively) that directions X and Z direction intersect vertically.Fastening corresponding the 1st direction of Z direction, corresponding the 2nd direction of directions X and Y direction with the pass of claim.
TCP treating apparatus 2 comprises: roll out reel 21, the band T before the test of reeling; Winding reel 22 is reeled from the band T of test that rolled out carrying out that reel 21 rolls out.Rolling out between reel 21 and the winding reel 22, be provided with: the 1st unloading part 23, will see off to propulsive mechanism 3 from rolling out the band T that reel 21 rolls out; The 1st sprocket gear 24 and the 1st sprocket gear guide rod 25, in the state lower edge of the tension force that applies regulation vertical below (directions X) see the band T that is sent here by the 1st unloading part 23 off towards propulsive mechanism 3; The 2nd sprocket gear 26 and the 2nd sprocket gear guide rod 27 are derived the band T that passes through propulsive mechanism 3 to winding reel 22; The 2nd unloading part 28 will be seen off to winding reel 22 from the band T of these derivation.
At this; Camera 51; Digital camera by 2 solid imaging devices with CCD (Charge Coupled Device, charge coupled cell) or CMOS (Complementary Metal Oxide Semiconductor, complementary metal oxide semiconductor (CMOS)) etc. constitutes.Therefore, camera 51 owing to can from 2 solid imaging devices, obtain image respectively, therefore can be taken 2 different visuals field.In the present embodiment, the position of supposing camera 51 is the initial point of Z axle, and then 2 of camera 51 visuals field are set at the positive and negative both direction of Z axle.That is, set the 1st visual field and comprise detection agency 4 (probe 43), the 2nd visual field comprises propulsive mechanism 3 (TCP 8 that is kept).Thus, camera 51 can be taken propulsive mechanism 3 and detection agency 4 these two sides.Have, the normal in the normal in the 1st visual field and the 2nd visual field is set at along Z-direction and promptly is positioned on the same straight line that parallels with the Z axle again.Therefore, 2 visuals field can reflect the rightabout position that faces sustained height (directions X).
In addition, as camera 51, be not defined as the digital camera with 2 solid imaging devices, the various digital cameras with 2 visuals field all can be suitable for.For example, by having 1 solid imaging device, be arranged on the prism on the optical axis of this solid imaging device, the digital camera with 2 visuals field that can switch the formations such as shutter in the visual field also can be suitable for.
Control device 7 comprises: input part 71, detect user's operation input; Drive division 72, the driving of control propulsive mechanism 3, photograph mechanism 5 and measurement section camera 6; Storage part 73 is stored the relevant various information such as action with TCP proving installation 1; Image processing part 74 carries out Flame Image Process to the photographed data of camera 51 and measurement section camera 6; Test department 75 carries out the test of TCP 8 with the tester of not representing among the figure; Master control part 76, the action of control TCP proving installation 1 integral body.Here, tester is mounted on the detection agency 4, is electrically connected the electrology characteristic of measure TCP 8 with probe 43.Its measurement result is sent in the control device 7.
Such control device 7 is made up of the program of installing on computing machine and this computing machine.Computing machine comprises: arithmetic units such as CPU; Internal memory, HDD memory storages such as (Hard Disc Drive, hard disk drives); Keyboard, mouse, positioning equipment, button, touch panel etc. detect the input media of external information input; Carry out the I/F device of various information transmit-receives through the Internet, LAN (Local Area Network, LAN), WAN communication lines such as (Wide Area Network, wide area networks); LCD (Liquid Crystal Display, LCD) or FED display device such as (Field Emission Display, Field Emission Displays).This computing machine (hardware resource) is by program (software) control, through the cooperation of hardware resource and software resource, realizes above-mentioned input part 71, drive division 72, storage part 73 and master control part 76.In addition, said procedure also can provide with the form that is stored in the storage mediums such as floppy disk, CD-ROM, DVD-ROM, IC internal memory.
< test action of TCP proving installation >
Below, describe to 1 test action of carrying out TCP 8 of TCP proving installation with reference to Fig. 5.Hereinafter, though be to be that example describes to test new TCP 8, of the back, even changed the situation of visiting plate 42, rolling out reel 21, also can test with same order.
The user utilizes input part 71; The positional information of the TCP 8 that input tape T is loaded (below; Be called " TCP positional information ") and the positional information (below, be called " detecting location information ") of the spy plate 42 of this TCP 8 of inspection after, these information stores are entered (step S 1) in the storage part 73.At this, contain in the TCP positional information alignment mark on the TCP 8 position (coordinate on the XY plane), be set at the position (coordinate on the XY plane) of the pad 81 on the TCP 8 etc.In addition; The syringe needle height (coordinate of Z direction) of the needle position (coordinate on the XY plane) that contain the position (coordinate on the XY plane) of visiting the probe 43 on the plate 42 in the detecting location information, carries out the probe 43 of position correction (below, be called " aligned position "), probe 43 etc.In addition, as shown in Figure 6 hereinafter, in conjunction with the position that is set at four jiaos probe 43 in a plurality of probes 43 is described as the situation of the 1st～the 4th aligned position 421～424.
Under the control of drive division 72, with the state of band pincers 33 retainer belt T, advance platform 31 to move, pushing disc 32 is the state that relative spy plate 42 leaves predetermined distance.In addition, under the control of drive division 72, camera 51 moves to pushing disc 32 and visits between the plate 42 (step S2).
After TCP positional information and detection information are transfused to, utilize camera 51, measure the syringe needle height (step S3) of the probe 43 that is positioned at the 1st～the 4th aligned position 421～424.The syringe needle height of this probe 43, promptly from the surface of the spy plate 42 on the Z direction to the distance of the syringe needle of probe 43.The syringe needle height of measuring probe 43; At first, because of only obtaining the signal in the solid imaging device of detection agency 4 one sides, the visual field of camera 51 only is made as detection agency 4 one sides; And then the control through drive division 72, camera 51 moves to the position relative with the 1st aligned position 421.Then, through syringe needle, measure the syringe needle height of this probe 43 with the probe that is positioned at the 1st aligned position 421 in focus 43 of camera 51.Through same method, measure the syringe needle height of the probe 43 on the 2nd～the 4th aligned position 421～424.The syringe needle height of measuring is compared with the syringe needle height that storage in the step 1 is advanced in the storage part 73, and difference is that the syringe needle height of measuring deposits in the storage part 73.
Behind the surveyingpin head height degree, utilize camera 51, measure the needle position (step S4) of the probe 43 that is positioned at the 1st～the 4th aligned position 421～424.This needle position is the coordinate of visiting on propulsive mechanism 3 one side planes of plate 42 (coordinate on the XY plane).The measurement of the needle position of probe 43; At first, image processing part 74 only is made as detection agency 4 one sides with the visual field of camera 51; And then the control through drive division 72; Camera 51 moves to the position relative with the 1st aligned position 421, confirm to be positioned at the syringe needle height of probe 43 of the 1st aligned position 421 after, measure needle position according to photographed data to probe 43 that should the syringe needle height.Through same method, image processing part 74 is measured the needle position of the probe 43 on the 2nd～the 4th aligned position 421～424.The needle position of measuring is compared with the needle position (aligned position) that storage in the step 1 is advanced in the storage part 73, and difference is that the syringe needle height of measuring deposits in the storage part 73.
After needle position is measured, image processing part 74, the position deviation amount (step S5) of the pad 81 of detected the 1st～the 4th aligned position 421～424 pairing TCP 8 among the measuring process S4.Concrete, at first, image processing part 74 because of only obtaining the signal in the solid imaging device of propulsive mechanism 3 one sides, only is made as propulsive mechanism 3 one sides with the visual field of camera 51, promptly is made as TCP 8 one sides.Image processing part 74 according to the alignment mark of the TCP that comprises in its visual field 8, is confirmed the approximate location of the pad 81 on the TCP8.And through the control of drive division 72, camera 51 moves to the relative position of the 1st aligned position 421.After camera 51 moves; Image processing part 74 because of only obtaining the signal in the solid imaging device of detection agency 4 one sides, switches to the visual field of camera 51 and visits plate 42 1 sides; Detection is positioned at the needle position of the probe 43 at the 1st aligned position 421 places, and storage is advanced in the storage part 73.Image processing part 74 switches to TCP 8 one sides with the visual field of camera 51 once more; The pad 81 of will be on the Z direction relative with the 1st aligned position 421 TCP 8 carries out the Flame Image Process of edge extracting etc.; Detect the position (coordinate on the XY plane) of pad 81 thus, storage is advanced in the storage part 73.After the position probing of pad 81 went out, image processing part 74 through the position of this pad 81 and detected before needle position are compared, was measured the departure of pads placement and needle position.This departure is pad 81 and the distance between the needle position on the XY plane, more specifically, is the position (below, be called " contact position ") of the pad 81 of contact probe 43 and the distance between the needle position.This contact position is that benchmark is provided with arbitrarily with the edge of pad 81.Through same method, image processing part 74 is measured the needle position of the probe 43 on the 2nd～the 4th aligned position 421～424 and the departure of pads placement.The departure of measuring, storage is advanced in the storage part 73.Like this, the measurement of the departure of pads placement owing to need not mobile cameras 51, is just carried out the switching in the visual field, thereby can be prevented to include in the measurement result displacement error of camera 51.
After departure is measured, master control part 76, carry out probe 43 to accurate (step S6).Concrete, at first, through the control of drive division 72, camera 51 migrates out the position of propulsive mechanism 3 and detection agency 4 clampings, moves to the position of on Z-direction, not interfering propulsive mechanism 3 and detection agency 4.According to the departure of above-mentioned measurement, the X that visits plate 42, the position on the Y direction are set.That is, to the probe 43 on the 1st～the 4th aligned position 421～424, to carry out position correction with the contacted mode of contact position of the pad 81 of subtend configuration.Under this state, through the control of drive division 72, pushing disc 32 moves to the position, front of contact pins 81, and afterwards, on one side so that setting value unit is to visiting plate 42 1 side shiftings arbitrarily, one side confirms whether pad 81 contacts with probe 43.Whether contact, be based on that signal in the tester (not shown) that is connected with detection agency 4 confirms.
As stated, pushing disc 32, is visited in a plurality of probes 43 that plate 42 comprised after the Z direction moves with setting value unit arbitrarily, and the pad 81 contacted ratios of the TCP 8 that is kept with pushing disc 32 constantly increase.The set positions of the pushing disc 32 when this ratio is reached regulation setting rate is a contact height.The contact height of this setting is stored in the storage part 73.
After contact height was set, image processing part 74 was confirmed contact the most suitable position (step S7).The most suitable position of contact is that for example, in the equidistant position, each limit apart from pad 81, each probe 43 has position contacting more than needed from the edge of pad 81.For example, pushing disc 32 is moving under the state of contact height, and pushing disc 32 moves with setting value unit arbitrarily on X, Y direction, through confirming 43 pairs of pads of probe, 81 non-contacting positions, obtains the most suitable position of contact.After obtaining the most suitable position of contact, propulsive mechanism 4 makes pushing disc 32 move to this most suitable position of contact.
After pushing disc 32 moved to the most suitable position of contact, image processing part 74 was taken pictures through the alignment mark of the TCP 8 on 6 pairs of pushing discs 32 of measurement section camera, confirms the position (step S8) of this alignment mark.As shown in Figure 6, the summary central portion visiting plate 42 is formed with peristome 425.Measurement section camera 6 is taken pictures to the TCP 8 that from this peristome 425, exposes.The position of alignment mark, storage is advanced in the storage part 73.Thus, can be benchmark with the position of the alignment mark of storage in the storage part 73, differentiate goes out the most suitable position of contact.
After contacting the most suitable locational alignment mark and being stored, test department 75 rolls out the test (step S9) of the TCP 8 that the band T that reels on the reel 21 loaded.Concrete, pushing disc 32 will roll out the band T that reels on the reel 21 and see off successively, and band pincers 33 keep the band T of each TCP 8.Under this maintained state, the aligned position of 6 couples of TCP 8 of measurement section camera is taken pictures, and calculates the departure of the position of the alignment mark of measuring among position and the step S8 of this alignment mark, on X, Y direction, moves pushing disc 32 according to this departure.Therefore, pushing disc 32 can be configured in the most suitable position of contact.Then, pushing disc 32 moves to contact height on the Z direction, and the pad 81 of the TCP 8 on the pushing disc 32 is contacted with the probe 43 of visiting plate 42.This probe 43 is electrically connected with control device 7 through the tester (not shown).Test department 75 through probe 43 and TCP 8 switching telecommunications number, confirms thus whether TCP 8 occurs unusually.After confirming to accomplish, pushing disc 32 leaves from visiting plate 42, and the band T that band pincers 33 are kept is decontroled, and the band T that has loaded the TCP 8 of configuration on the pushing disc 32 is transported to winding reel 22 1 sides.The test action that this is a succession of is performed until and rolls out on the reel 21 till the band T that reels do not have.
As described above, in the present embodiment,, therefore, can photograph the end of the contact jaw 431 and the pad 81 of probe 43 owing to be provided with camera 51 in the space between propulsive mechanism 3 and detection agency 4.Therefore, according to these photographed datas, the position deviation amount of measuring probe 43 and pad 81 moves TCP 8 according to this position deviation amount, thereby can carry out the position correction of probe 43 and pad 81 exactly.
In addition, as shown in Figure 5, though be the explanation that the situation of testing new TCP 8 is carried out, self-evident even change the situation of visiting plate 42, rolling out reel 21, also be to utilize above-mentioned identical method to test.Concrete, after changing under the situation of visiting plate 42, from storage part 73, reading the TCP positional information or detecting location information of having deposited, the processing of carrying out step S3～step S9 gets final product.In addition, roll out in replacing under the situation of reel 21, from storage part 73, read the syringe needle height, needle position of probe 43 after, the processing of carrying out step S5～step S9 gets final product.
In addition, in the present embodiment, though be that to have 2 visuals field with camera 51 be the explanation that example is carried out, if camera 51 can be arranged in the space between probe 43 and the TCP 8, the camera in 1 visual field also is suitable for.Under this occasion, for example, camera is provided with the travel mechanism that can move the visual field around the X axle, through taking the positive and negative both sides of Z-direction, can realize the action effect same with the foregoing description.
The present invention is applicable to the various devices that contact and test through 2 parts that make the subtend setting.
Claims (2)
1. a TCP proving installation (1) is characterized in that, comprising:
Probe (43), outstanding to the 1st direction (Z), and, have contact jaw (431);
Thruster (3) is gone up contact jaw (431) the subtend setting with said probe (43) in said the 1st direction (Z), and, keep having the TCP (8) of pad (81);
Camera (51) is supported in the space between said probe (43) and the said TCP (8) movably, and, in this space, take said probe (43) and said TCP (8);
Measurement section (74), said probe of taking according to said camera (51) (43) and the image of said TCP (8) are measured the position deviation amount of pad (81) of contact jaw (431) and the said TCP (8) of said probe (43);
Drive division (72); The position deviation amount of measuring according to said measurement section (74) makes said thruster (3) at the 2nd direction (X that intersects vertically with said the 1st direction (Z); Y) upward move; Through said thruster (3) is moved along said the 1st direction (Z) towards said contact jaw (431), make to be contacted with said contact jaw (431) by the pad (81) of the said TCP (8) of said thruster (3) maintenance;
Test department (75) under the contacted state of pad (81) of the contact jaw (431) of said probe (43) and said TCP (8), carries out the test of TCP (8).
2. TCP proving installation according to claim 1 is characterized in that, said camera (51) has towards the 1st visual field of said probe (43) direction and towards the 2nd visual field of said TCP (8) direction;
The normal in the normal in said the 1st visual field and said the 2nd visual field is positioned at along on the same straight line of said the 1st direction (Z).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010-210578 | 2010-09-21 | ||
| JP2010210578A JP2012068032A (en) | 2010-09-21 | 2010-09-21 | Tcp testing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102411122A true CN102411122A (en) | 2012-04-11 |
| CN102411122B CN102411122B (en) | 2015-07-22 |
Family
ID=45913312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110140070.3A Ceased CN102411122B (en) | 2010-09-21 | 2011-05-27 | Tcp Testing Device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2012068032A (en) |
| KR (1) | KR101238397B1 (en) |
| CN (1) | CN102411122B (en) |
| TW (1) | TWI456212B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103713205A (en) * | 2012-09-28 | 2014-04-09 | 名硕电脑(苏州)有限公司 | Capacitive touch screen automatic testing method |
| CN108091287A (en) * | 2016-11-23 | 2018-05-29 | De&T株式会社 | Panel lighting check device |
| CN114088979A (en) * | 2021-12-20 | 2022-02-25 | 百及纳米科技(上海)有限公司 | Probe calibration method, surface measurement method, and probe control apparatus |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6001292B2 (en) | 2012-03-23 | 2016-10-05 | 株式会社日立ハイテクサイエンス | Emitter fabrication method |
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- 2010-09-21 JP JP2010210578A patent/JP2012068032A/en active Pending
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- 2011-05-19 TW TW100117556A patent/TWI456212B/en not_active IP Right Cessation
- 2011-05-27 CN CN201110140070.3A patent/CN102411122B/en not_active Ceased
- 2011-05-31 KR KR1020110052512A patent/KR101238397B1/en active IP Right Grant
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| NL1019775C2 (en) * | 2002-01-18 | 2003-07-21 | Integrated Production And Test | Circuit board testing device, contains removable needle board with testing needles |
| CN101263395A (en) * | 2005-09-15 | 2008-09-10 | 株式会社爱德万测试 | TCP processing device |
| JP2010034482A (en) * | 2008-07-31 | 2010-02-12 | Tokyo Electron Ltd | Inspection device |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103713205A (en) * | 2012-09-28 | 2014-04-09 | 名硕电脑(苏州)有限公司 | Capacitive touch screen automatic testing method |
| CN103713205B (en) * | 2012-09-28 | 2016-10-26 | 名硕电脑(苏州)有限公司 | Capacitance touch screen automatic test approach |
| CN108091287A (en) * | 2016-11-23 | 2018-05-29 | De&T株式会社 | Panel lighting check device |
| CN108091287B (en) * | 2016-11-23 | 2021-06-08 | De&T株式会社 | Panel lighting inspection device |
| CN114088979A (en) * | 2021-12-20 | 2022-02-25 | 百及纳米科技(上海)有限公司 | Probe calibration method, surface measurement method, and probe control apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012068032A (en) | 2012-04-05 |
| CN102411122B (en) | 2015-07-22 |
| KR20120030927A (en) | 2012-03-29 |
| TW201213819A (en) | 2012-04-01 |
| KR101238397B1 (en) | 2013-02-28 |
| TWI456212B (en) | 2014-10-11 |
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