JP3336728B2 - Auto handler for TAB - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an auto handler for TAB. The TAB auto-handler is connected to an IC tester to measure and classify the electrical characteristics of the TAB. The TAB includes, for example, an IC for driving a liquid crystal display (LCD).

[0002]

2. Description of the Related Art A TAB auto-handler automatically transports a TAB wound on a reel to a measurement position automatically and sequentially.
This is a device that sorts based on the test results of the tester.
The tension mechanism of the TAB roller wound on the reel is described in Japanese Patent Application No. 2-41356. Also, T
The precision positioning mechanism of AB and the electrode is described in Japanese Utility Model Application Laid-Open No. 64-34576, Japanese Utility Model Application Laid-Open No. 1-163335, Japanese Patent Application No. 2-106251, and the like.

Next, the configuration of a TAB auto-handler according to the prior art will be described with reference to FIG. 8 is TAB,
2A is a supply reel, 2B is a storage reel, 4C and 4D are pulleys, 5C and 5D are tension pulleys, 6C and 6D are guides, 7A and 7B are sprockets, 8 is a tape clamp, and 9 and 10 are pushers.

In FIG. 8, a TA wound around a supply reel 2A is shown.
The storage reel 2B for winding B1 is taken up. On both wings of the pusher 9, sprockets 7A and 7B are arranged.
A and the sprocket 7B rotate in synchronization with each other to drive TAB1. The tape clamp 8 is arranged on the lower surface of the pusher 9, and the TAB 1 runs between the pusher 9 and the tape clamp 8. The pusher 10 raises and lowers the pusher 9, lowers the TAB 1 held by the tape clamp 8 and the pusher 9, and brings the TAB 1 into contact with the probe card 12 for testing.

[0005] The probe card 12 shown in FIG. 8 is held by the apparatus so as to face the pusher 9. The probe card 12 and the attachment unit 13 are mechanically or electrically detachably connected. The test unit 14 of the IC tester has the attachment unit 13 disposed on the upper part. TAB between probe card 12 and attachment unit 13
An image recognition camera 17 that captures the image 1 is arranged.

In FIG. 8, TAB1 is a sprocket 7A
7B is rotated in synchronism and is fed by the pitch of TAB, and moves from the supply reel 2A to the tension pulley 5C, the sprockets 7A and 7B, the tension pulley 5D, and the storage reel 2B in this order.

The pulley 4C is disposed between the supply reel 2A and the tension pulley 5C, and the pulley 4D is
And the tension pulley 5D. Pulley 4C
For 4DD, the center of rotation is fixed, the circumferential surface rolls, and TAB
Guide 1 The rotation centers of the tension pulleys 5C and 5D move freely in the horizontal direction. The guide 6C is disposed between the tension pulley 5C and the sprocket 7A.
D is arranged between the tension pulley 5D and the sprocket 7B. The guides 6C and 6D are arranged so as to face the sprockets 7A and 7B with the TAB1 interposed therebetween, and the upper surfaces of the guides 6C and 6D are formed in an arc shape to guide the TAB1.

In FIG. 8, a certain amount of tension is applied to TAB1 in order to prevent bending and waving of TAB1. That is, a force for moving the tension pulley 5C to the left side in FIG. 8 is applied. Similarly, a force for moving the tension pulley 5D to the right side in FIG. 8 is applied.

Next, the tension mechanism of the tension pulleys 5C and 5D will be described with reference to FIG. The TAB shown in FIG.
The auto-handler is symmetrical, and the structure of the tension mechanism is symmetrical. Therefore, FIG. 9 is described by taking a partial enlarged view of the tension pulley 5C as an example.

In FIG. 9, a pulley 52C is arranged in the moving direction of TAB1 sent out by a sprocket 7A, and one end of a rope 53C is connected to the center axis of a tension pulley 5C which is moved by a pulley guide 51C. The rope 53C is hung on a pulley 52C, and a weight 54 is attached to the other end of the rope 53C.
C is suspended. Use the rope 5
By transmitting the tension to the tension pulley 5C via the pulley 52C via the 3C and the pulley 52C, the tension pulley 5C is pulled to the left along the pulley guide 51C. In FIG. 9, a constant tension is applied to TAB1 by the gravity of the weight 54C regardless of the position of the tension pulley 5C.

Next, the operation of the tension pulley 5C employing the tension mechanism of FIG. 9 will be described with reference to FIGS. In FIG. 10, 55C is a detection plate attached to the tension pulley 5C, and 56C to 58C are sensors. In FIG. 10, when the tension pulley 5C moves to the right,
The detection plate 55C is detected by the sensor 56C. At this time,
The supply reel 2A rotates at a speed higher than the feed speed of TAB1 in the direction of feeding TAB1.

FIG. 11 is a diagram showing a state in which the tension pulley 5C has moved leftward from the state shown in FIG. When the supply reel 2A rotates from the state shown in FIG. 10, the tension pulley 5C moves leftward regardless of the feed of TAB1.

FIG. 12 is a view showing a state in which the tension pulley 5C has further moved leftward from the state shown in FIG. FIG.
Is continued, the tension pulley 5C comes to the position shown in FIG. In FIG. 12, the detection plate 55C is detected by the sensor 57C, and the supply reel 2A stops regardless of the feed of TAB1. By feeding TAB1 from the state of FIG. 12, the tension pulley 5C moves rightward until the state of FIG.

As shown in FIGS. 10 to 12, the tension pulley 5C moves left and right, but the tension applied to TAB1 is constant. When TAB1 is broken, the tension pulley 5C moves to the left, and the detection plate 55C is detected by the sensor 58C. Since the device is stopped by the detection of the sensor 58C, TAB1 can be protected.

FIG. 13 is a view showing the configuration in the vicinity of a tension pulley 5D employing the tension mechanism of FIG. FIG.
Then, when the tension pulley 5D moves rightward, the detection plate 55D is detected by the sensor 57D. At this time, the storage reel 2B starts rotating at a speed higher than the feed speed of TAB1 in the direction of winding TAB1. From the state of FIG.
When the storage reel 2B rotates, the tension pulley 5D moves leftward regardless of the feed of TAB1. When the tension pulley 5D moves, the detection plate 55D
When detected at D, the storage reel 2B stops regardless of the feed of TAB1. Next, by sending out TAB1, the tension pulley 5D moves rightward until the state of FIG. When the TAB 1 is broken, the tension pulley 5D moves to the left, and the detection plate 55D
8D. The device stops upon detection of the sensor 58D.

Returning to FIG. 8, the operation will be described. The TAB 1 positioned by the sprockets 7A and 7B is fixed by a tape clamp 8 and a pusher 9. Next, the pusher 10 integrates the tape clamp 8 and the pusher 9 to form a TA.
B1 is lowered, and TAB1 is brought into contact with the probe 12A of the probe card 12. With TAB1 in contact with the probe 12A, the camera 17 takes in the image data of TAB1 and calculates the correction amount of the position of TAB1. After taking in the image data, TAB1 is raised once, the position of TAB1 is corrected, and TAB1 is lowered again. Next, TAB1
Sends a test start request signal from the auto handler to the IC tester side in a state of contacting the probe 12A. When the test is completed, the pushers 9 and 10 are raised, and the sprockets 7A and 7B rotate to send the next TAB1.

In FIG. 8, the sprockets 7A and 7B rotate synchronously in a counterclockwise direction, so that TAB 1
From left to right. In FIG. 8, since excessive force is not applied to the TAB 1, the pusher 9
Before the descent, TAB1 warped. In order to measure the deflection of TAB1, the sprocket 7B is used in FIG.
Is stopped, and the sprocket 7A is reversely rotated clockwise.

The mechanism for removing deflection during the above-described TAB measurement is as follows.
This applicant discloses in Japanese Utility Model Application No. 1-131293. By adopting this deflection removal mechanism in the auto handler,
The positioning accuracy of ± 60 μm is secured between the test pad of the TAB 1 and the probe 12A of the probe card 12. T
In order to align AB1 with probe 12A with high accuracy of ± 60 μm or more, an alignment function described later is required.

Next, a method of positioning the TAB 1 and the probe 12A will be described. FIG. 14 is a pattern diagram in which TAB1 is partially enlarged, and a reference mark 1A for positioning is provided at one corner of the pattern diagram. An IC chip 1B is mounted at the center, and test pads 1C connected to the IC chip 1B in a pattern are arranged on both sides of the IC chip 1B. TAB1
In FIG. 14, the pattern diagram in FIG. 14 is formed continuously at equal intervals, and the unit of the pattern in FIG. 14 is called a device.

The position of TAB1 shown in FIG. 14 is adjusted in advance before the apparatus is operated. This positioning adjustment is called initial setting. After the initial setting, when the apparatus is operated, the position of TAB1 is automatically adjusted. This automatic adjustment is called an alignment function.

Next, the procedure for initial setting of TAB1 is shown in FIG.
This will be described below. FIG. 15 is an enlarged sectional view of a main part of FIG. 15C and 7D are sprockets 7A and 7D, respectively.
The roller which rolls to 7B and guides TAB1. 17A is an image processing device connected to the camera 17, and 17B is a television monitor connected to the camera 17 and displaying an image captured by the camera 17. The movable parts shown in FIG. 15 can be individually operated by switching buttons or switches.

In FIG. 15, the TAB 1 is fixed by the tape clamp 8 and the pusher 9. Next, TAB with pusher 10
1 to bring TAB1 into contact with the probe 12A.
Next, the camera 17 is moved to check the contact state between the test pad 1C and the probe 12A on the television monitor 17B. While checking on the TV monitor 17B, the probe 12
The probe card 12 is slightly moved or the sprocket 7A is moved so that the contact end of the probe card A is located at the center of the test pad 1C.
・ Slightly rotate 7B to correct the position. When the TAB1 is moved, the TAB1 is moved so as not to damage the probe 12A.
B1 is raised.

When the alignment between the test pad 1C and the probe 12A is completed, the reference mark 1
A is imaged, and the image data is stored in the device as reference image data. The reference image data serves as a reference for the position where the TAB 1 and the probe card 12 come into contact, and the initial setting is completed.

Next, a configuration for realizing the alignment function will be described with reference to FIGS. FIG. 16 shows the pusher 9.
FIG. 17 is an enlarged perspective view of FIG. 10, and FIG. 17 is a sectional view of FIG. In FIG. 16, 9A and 10A are motors, and 1A in FIG.
6A is an X table, 16B is a Y table, 16X and 16
Y is a motor.

In FIG. 16, the motor 7E is connected to the sprocket 7
A rotates, and the motor 7F rotates the sprocket 7B. The sprocket 7A is held by an arm 7G, and the arm 7G is attached to the first side surface of the block 9B. The sprocket 7B is held by an arm 7H, and the arm 7H is attached to a second side of the block 9B opposite to the first side.

In FIG. 17, the motor 9A is mounted on the upper surface of the block 9B, the rotating shaft of the motor 9A is connected to a ball screw 9D, and the ball screw 9D is connected to a ball nut held by the pusher 9. When the motor 9A rotates,
The pusher 9 moves up and down guided by the guide 9C.

The motor 10A is mounted on the upper surface of the front stage of the X table 16A. The rotation shaft of the motor 10A is connected to a ball screw 10D, and the ball screw 10D is connected to a ball nut held by a block 9B. When the motor 10A rotates, the block 9B moves up and down guided by the guide 10C. That is, the pusher 10 has a sprocket 7A
7B, the tape clamp 8 and the pusher 9 are moved up and down integrally. In FIG. 17, the elevation position of TAB1 is roughly adjusted by the motor 10A, and the elevation position of TAB1 by the pusher 9 is finely adjusted by the motor 9A.

Next, the configuration of the XY stage 16 will be described. The XY stage 16 includes an X table and a Y table. The motor 16X is connected to the rear stage of the X table 16A. When the motor 16X rotates, the X table 16
A slightly moves in parallel with the running direction of TAB1. That is, the motor 16X is composed of the TAB1 and the sprockets 7A and 7B.
And the pushers 9 and 10 are moved together in the X direction. The motor 16Y is connected to the lower stage of the Y table 16B to which the motor 16X is attached. When the motor 16Y rotates, the Y table 16B minutely moves parallel to a direction orthogonal to the traveling direction of the TAB1. That is, the motor 16Y moves TAB1 in the Y direction.

Next, the alignment function will be described. When the apparatus operates, the camera 17 captures an image of the reference mark 1A,
A comparison is made with the reference imaging data stored in the initial setting. Next, a correction value is calculated from the comparison value, and by moving the XY stage 16 by the correction value, the TAB test pad 1C and the probe 12A can be aligned. By adopting this alignment function, TAB1 and probe card 1
2 can be positioned with high accuracy within ± 10 μm.

The tape width W of TAB1 in FIG.
For example, there are a plurality of types such as 35 mm, 48 mm, and 70 mm. The TAB auto-handler in FIG. 8 can handle a plurality of types of TAB both mechanically and electrically. FIG.
Then, sprockets 7A and 7B and sprocket guide 7
The C · 7D, the guides 6C · 6D, and the tape clamp 8 are exchanged according to the tape width W. On the other hand, pulley 4C
D and the tension pulleys 5C and 5D can be shared without replacement even if the tape width W is changed. FIG. 18 shows an example of such a shared pulley 4C. In FIG. 18, a step is provided in the outer diameter of the rotary shaft, which is the guide surface of the TAB, corresponding to the tape width W. Since the pulleys 4C and 4D and the tension pulleys 5C and 5D are structured as shown in FIG. 18, there is no need to change them when the tape width is changed.

The detector groups 19 and 20 in FIG. 8 are for reading information such as the presence or absence of the IC chip 1B on the TAB 1. In FIG. 8, the detector group 19 is composed of three detectors, and is arranged in front of the sprocket 7A. The detector group 20 is composed of three detectors, and the punch unit 11
Is arranged at the subsequent stage. The detector group 19 and the detector group 2
0 has the same configuration.

FIG. 19 is a configuration diagram of one of the detector groups 20. The detection body 20A is formed in a U-shape, and the detection body 2A
A light emitter 20B is attached to a first end of the leading end of the light emitting device 0A, and a light emitter 20B is attached to a second end opposite to the first end.
A light receiver 2C for receiving the light output of B is attached.

In FIG. 19, the TAB1
Travels and detects TAB. The detection body 20A is the moving body 2
It is held at 0D, and can move back and forth in a direction crossing the running direction of TAB1. Moving object 20D detects object 20A with TAB
1 can be moved and held in parallel to the traveling direction. Detector group 19
All 20 detectors have the configuration shown in FIG.
Prior to the operation of the device, the detection position of TAB is adjusted.

FIG. 20 is an arrangement diagram of the detector group 20 on the TAB1. In FIG. 20, the detector K1 is moved and adjusted to a position where the detection light shields the test pad 1C. Detector K2
Is adjusted to move to a position where the detection light shields the IC chip 1B. The detector K3 is moved and adjusted to a position where the detection light shields the punch hole 1D.

In FIG. 20, the detector K1 checks whether TAB1 is a leader tape or a measured TAB based on the presence or absence of detection light.
The detector K2 confirms the presence or absence of the IC chip 1B based on the presence or absence of the detection light, and determines whether or not the measurement of the TAB1 is possible. The detector K3 confirms the presence or absence of the punch hole 1D by the presence or absence of the detection light,
Is determined whether the measurement has been classified. In FIG. 20, since the above-described function is performed and there are a plurality of types of TAB tape widths W, the position of the detector is adjusted by the mechanism shown in FIG. 19 and 20 are technically the same as FIGS. 5 and 6 described in Japanese Patent Application No. 5-254806.

The punched hole 1D on the TAB shown in FIG. 20 is different from the punched hole 1D due to various inspection processes of the TAB.
There are various cases, such as a case where the TAB with D is retested and a case where a punch hole 1D is provided in the punch unit 11 as a discrimination hole between a good product and a bad product after the test. Furthermore, the punch unit 11 may punch holes or punch out the TAB IC chip 1B determined to be defective.

FIG. 21 illustrates various T as described above.
It is an external view of the punch unit 11 corresponding to AB type and the punching method. In FIG. 21, the drive source 11A and the frame 11
B and the base 11C as the first unit, and the punch 11D
And the punch guide 11E, the punch holder 11F, and the punch die 11G are used as the second unit. Therefore, if the second unit is replaced with the first unit, the above-described various measures can be taken. FIG. 21 is the same as FIG. 3 of Japanese Patent Application No. 04-26012.

Next, the operation of FIG. 8 will be described with reference to the flowchart of FIG. At step 201 in FIG. 22, the sprockets 7A and 7B are rotated synchronously to make one device TAB.
Send 1 In step 202, the pusher 9 is lowered,
TAB 1 is sandwiched between tape clamps 8 and fixed. In step 203, the pusher 10 is lowered, and the TAB 1 is lowered to a position where the TAB 1 contacts the probe card 12. At this time,
The TAB 1 is positioned with an accuracy of ± 60 μm by the above-described deflection removing mechanism.

In step 204, the reference mark 1A is captured by the camera 17, and the correction value of the XY stage 16 is calculated. In step 205, the pusher 10 is raised.
In step 206, the X table 1 based on the correction value
6A is slightly moved. In step 207, the Y table 16B is slightly moved based on the correction value.

In step 208, the pusher 10 is lowered to bring the TAB 1 into contact with the probe card 12. In step 209, TAB1 is measured. Step 210
Then, the pusher 10 is raised to release the contact between the TAB 1 and the probe card 12. In step 211, the pusher 9 is raised to release the TAB 1 from the tape clamp 8. In step 212, the punch unit 11 is driven, TAB1 is read by the detector group 20, and one index is completed.

FIG. 23 is a time chart showing the flowchart of FIG. When the sprockets 7A and 7B complete the synchronous rotation in FIG. 23A, the pusher 9 descends in FIG. When the pusher 9 descends and stops, FIG.
At 3C, the pusher 10 descends. When the pusher 10 stops descending, the image of TAB1 is read in FIG.
Calculate the correction value. When the calculation is completed, FIG.
When the pusher 10 is completely lifted by 3C, the X table 16A moves in FIG. 23E, X table 16A
Is completed, the Y table 16B moves in FIG.

When the movement of the Y table 16B is completed in FIG. 23, the pusher 10 is raised in FIG. Pusher 1
When the rise of 0 is completed, a test start request signal is sent from the auto handler to the IC tester side. When the measurement is completed in FIG. 23, the pusher 10 is raised in FIG. When the pusher 10 is completely lifted, the pusher 9 is raised in FIG. When the pusher 9 is completely lifted, the punch unit 11 is driven in FIG. 23C, and the detector group 20 confirms TAB1. When TAB1 is confirmed in FIG. 23A, the sprockets 7A and 7B are rotated and instructed to send the next TAB1. In FIG. 23A, the time TINDEX from the start of driving of the sprockets 7A and 7B to the start of the next driving is set to 1 in this apparatus.
This is the index time.

[0043]

FIG. 24 is a partial structural view mainly showing the punch unit 11. As shown in FIG. When the pushers 9 and 10 lower the TAB 1 from the state shown in FIG. 24A, the tension pulley 5D moves to the left and enters the state shown in FIG. In the state shown in FIG. 24A, TAB1 has moved several millimeters at the positions of the punch unit 11 and the detector group 20. In the state of FIG. 24A, the position accuracy of the punched hole and the detection of the device cannot be compensated. Therefore, in the prior art, the punch unit 11 is driven or the devices are detected by the detector group 20 with the pushers 9 and 10 raised after the measurement is completed. Therefore, the index time T shown in FIG.
INDEX has a problem that it takes about 4 seconds. Further, as shown in FIG. 23, the drive control of the X table 16A and the Y table 16B and the pusher 9 and the pusher 10 individually causes a longer index time.

If the rotation speed of the sprockets 7A and 7B is increased to shorten the index time, the rotation speed of the supply reel 2A must be faster than the feed speed of the sprockets 7A and 7B in the tension mechanism shown in FIG. . However, there is a limit to the follow-up ability of the tension pulley 5C, so that the TAB 1 is impacted. The situation is the same on the storage reel 2B side, and a tension mechanism for shortening the index time is required.

In FIG. 8, when changing the tape width of the TAB 1, the sprockets 7A and 7B, the sprocket guides 7C and 7D, the guides 6C and 6D, and the tape clamp 8 are exchanged. Tension pulley 5C / 5D and pulley 4C / 4
D does not need to be replaced as shown in FIG.
The running height changes depending on the width of B1. Therefore, under the same circumstances as in FIG. 24, there is a problem that the position accuracy of the punched holes and the detection of the device are not stable.

A first object of the present invention is to provide a TAB auto-handler in which a punch hole is formed in a TAB while measuring the TAB. The second and third inventions provide a method for shortening an index time in the first invention.
The fourth and fifth inventions provide the winding mechanism according to the first invention, which does not give an impact force to the TAB. The sixth to ninth inventions are based on the first invention and provide an easy-to-switch guide structure of the TAB tape width.

[0047]

To achieve these objects, a first invention is to provide a TAB wound on a supply reel 2A.
1 is wound on the reel 2B, the sprocket 7A and the sprocket 7B rotate synchronously and run on the TAB1, and the tape clamp 8 and the pusher 9 are arranged between the sprocket 7A and the sprocket 7B, and are held by the tape clamp 8 and the pusher 9. In the TAB auto-handler for testing the TAB 1 by bringing the TAB 1 down into contact with the probe card 12 and testing the TAB 1, the TAB 1 sent out by the supply reel 2 A is moved to the pusher 9 side by the sprocket 3 A and the storage reel 2 B side. A sprocket 3B running on the TAB1, a pulley 4A interposed between the sprocket 3A and the sprocket 7A and fixing the rotation center, a pulley 4B interposed between the sprocket 7B and the sprocket 3B and fixing the rotation center, and the pulley 4A and the sprocket Placed between 7A, TAB A tension pulley 6A to press the rising direction, the tension pulley 6 is arranged between the sprockets 7B and the pulley 4B, pressed against the upward direction TAB1
B, placed between the pulley 4A and the tension pulley 6A,
A guide 5A that fixes the rotation center and guides TAB1;
The guide 5B is disposed between the tension pulley 6B and the pulley 4B, the rotation center is fixed, and the TAB 1 is guided. The guide 5B is disposed between the guide 5B and the pulley 4B.
And a punch unit 11 for forming a punched hole, while keeping the rotation of the sprocket 3B, and forming a punched hole while measuring TAB1.

The second invention is a sprocket 7A, a sprocket 7B, a tape clamp 8, a pusher 9,
The pusher 10 is disposed integrally on the XY stage 16, and the X table 16 A is provided on the TAB 1 on the XY stage 16.
Is slightly moved in the traveling direction, the Y table 16B is slightly moved TAB1 on the XY stage 16 in a direction perpendicular to the traveling direction, and the camera 15 for image processing refers to the reference mark 1A of TAB1 and moves the XY stage 16 TAB retained
When correcting the position of 1, the X table 16A and the Y table 16B start moving at the same time.

The third invention comprises a pusher 9 and a pusher 10
Starts to descend at the same time or starts to rise at the same time.

According to a fourth aspect of the present invention, a sprocket 3A is disposed below and outside the supply reel 2A, the inclined guide 21 guides the TAB 1 hanging from the supply reel 2A by its own weight, and the sensors 23 and 24 are composed of the inclined guide 21 and the sprocket. 3A
The presence / absence of the TAB1 hanging between the supply reels is detected, and when the sensors 23 and 24 do not detect the TAB1, the supply reel 2A
Sends TAB1, and the sensors 23 and 24
When B1 is detected, the supply reel 2A stops rotating.

According to a fifth aspect of the present invention, a sprocket 3B is arranged below and outside the storage reel 2B, the inclined guide 22 guides the TAB 1 hanging from the storage reel 2B by its own weight, and the sensors 25 and 26 are connected to the inclined guide 22 and the sprocket. 3B
The presence / absence of the TAB1 hanging between the two reels is detected, and when the sensor 25 and the sensor 26 do not detect the TAB1,
Stops rotating, and when the sensors 25 and 26 detect TAB1, the storage reel 2B winds up TAB1.

According to a sixth aspect of the present invention, a sprocket 3A includes a stepped sprocket 31, a stepped sprocket 32,
3 and the sprocket 3B is a stepped sprocket 3
4 and a stepped sprocket 35 and a rotating shaft 36, a plurality of grooves V corresponding to TABs having different widths are formed in the rotating shaft 33 and the rotating shaft 36 around the circumference, and a stepped sprocket 31 and a stepped sprocket 32 are formed. The stepped sprocket 34 and the stepped sprocket 35 are provided with spheres B which enter the grooves V at the steps,
A compression coil spring S that presses the spring is built in the step portion, and corresponds to a TAB having a different width.

According to a seventh aspect of the present invention, the pulley 4A comprises a stepped pulley 41, a stepped pulley 42 and a rotating shaft 43, and the pulley 4B comprises a stepped pulley 44, a stepped pulley 45 and a rotating shaft 4
6 with different widths on the rotating shaft 43 and the rotating shaft 46.
Are formed on the circumference to correspond to the stepped pulley 4.
1, a stepped pulley 42, a stepped pulley 44, and a stepped pulley 45 are provided with spheres B which enter the grooves V in the stepped portions, and a compression coil spring S for pressing the balls B is built in the stepped portions.
The first step and the step of the stepped pulley 42 are arranged facing each other,
The step of the stepped pulley 44 and the step of the stepped pulley 45 are arranged to face each other, and TABs having different widths are guided by the step.

According to an eighth aspect of the present invention, the guide 5A comprises a stepped guide 51, a stepped guide 52, and a rotating shaft 53, and the guide 5B comprises a stepped guide 54, a stepped guide 55, and a rotating shaft 5.
6 with different widths on the rotating shaft 53 and the rotating shaft 56.
A plurality of grooves V corresponding to the stepped guide 5
1, a stepped guide 52, a stepped guide 54, and a stepped guide 55 are provided with spheres B that enter the grooves V, and a compression coil spring S that presses the spheres B is built in the stepped parts.
The first step and the step of the step guide 52 are arranged facing each other,
The step of the step guide 54 and the step of the step guide 55 are arranged to face each other, and the step guides TABs having different widths.

According to a ninth aspect of the present invention, the tension pulley 6A includes a stepped arc block 61, a stepped arc block 62, and a swing plate 63, and the tension pulley 6B includes a stepped arc block 64, a stepped arc block 65, and a swinging plate. A plurality of holes H corresponding to TABs having different widths are formed in the oscillating plate 63 and the oscillating plate 66, and a stepped arc block 61, a stepped arc block 62, a stepped arc block 64, and a step are formed. The pin P that enters the hole H is projected from the bottom surface of the attached arc block 65,
The arc step of the stepped arc block 61 and the arc step of the stepped arc block 62 are arranged facing each other, and the arc step of the stepped arc block 64 and the arc step of the stepped arc block 65 are arranged facing each other. Then, TABs having different widths are guided at the arc-shaped steps.

[0056]

According to the structure of the first aspect of the present invention, the guides 5A and 5B for fixing the center of rotation are arranged on both wings of the sprockets 7A and 7B that rotate the TAB 1 synchronously. Guide 5A
On both wings of 5B, pulleys 4A and 4B for parallelizing the running of TAB1 and fixing the center of rotation are arranged. Pulley 4A
Sprockets 3A and 3B for feeding TAB1 at pitches are arranged on both wings of 4B. When the pushers 9 and 10 and the sprockets 7A and 7B are integrally moved up and down the TAB 1, the rotation of the sprocket 3B is stopped.
B1 does not travel to the pushers 9 and 10. Therefore,
The punch unit 11 can be driven irrespective of the operation of the pushers 9 and 10.
The state of 1 can be stably detected.

In the second invention, the X table 16A for correcting the small movement of the TAB1 in the running direction and the Y table 16B for correcting the small movement of the TAB1 in the direction perpendicular to the running direction start moving at the same time. Index time can be reduced.

In the third invention, the first pusher 9 and the second pusher 9
The pusher 10 starts lowering at the same time or starts raising at the same time, so that the indexing time can be reduced as compared with the conventional control method.

In the fourth aspect, the supply reel 2A always supplies TAB1 to the sprocket 3A with a margin, so that the index feed speed of the sprockets 7A and 7B can be increased. Also, since the TAB falls under its own weight, no impact force is applied.

In the fifth aspect of the present invention, since the storage reel 2B always accommodates the TAB 1 sent from the sprocket 3B with a margin, the index feed speed of the sprockets 7A and 7B can be increased. Also, since the TAB falls under its own weight, no impact force is applied.

In the sixth to eighth inventions, a plurality of grooves V are formed on the circumference of the rotary shaft corresponding to the tape width of the TAB1, and the driving wheels or the guide wheels change the holding position on the rotary shaft to the groove V. To easily change the position of the opposing drive wheels or guide wheels.

In the ninth invention, the swing plate has a different width TA.
A plurality of holes H corresponding to B are formed, and a pin P is formed in the hole H in the stepped arc block, so that the interval between the opposing stepped arc blocks can be easily changed on the rocking plate.

[0063]

Next, the configuration of a TAB auto-handler according to the present invention will be described with reference to the embodiment of FIG. In FIG. 1, 3A and 3B are sprockets, 4A and 4B are pulleys, 5A and 5B.
Is a guide, 6A and 6B are tension pulleys, 15A and 1
5B is a camera for image processing, and others are the same as those in FIG.

In FIG. 1, the sprocket 3A causes the TAB 1 sent out by the supply reel 2A to travel toward the pusher 9 side. The sprocket 3B has a TAB1 on the storage reel 2B side.
To run. The pulley 4A fixes the center of rotation and is disposed between the sprocket 3A and the sprocket 7A. The pulley 4B fixes the center of rotation, and the sprocket 7B
And a sprocket 3B.

The tension pulley 6A is arranged between the pulley 4A and the sprocket 7A, and presses the TAB 1 in the upward direction. The tension pulley 6B is disposed between the sprocket 7B and the pulley 4B, and presses the TAB 1 in the ascending direction. The guide 5A fixes the center of rotation, is disposed between the pulley 4A and the tension pulley 6A, and guides the TAB1.
The guide 5B fixes the center of rotation, and the tension pulley 6B
And the pulley 4B to guide the TAB1. The punch unit 11 is disposed between the guide 5B and the pulley 4B.

Reference numerals 21 and 22 in FIG.
3 to 26 are light reflection type sensors. In FIG. 1, the sprocket 3A is disposed below and outside the supply reel 2A, and the inclined guide 21 has a TA that hangs from the supply reel 2A by its own weight.
It is arranged to guide B1. Sensor 23 and sensor 2
Reference numeral 4 denotes a T hanging between the inclined guide 21 and the sprocket 3A.
The presence or absence of AB1 is detected. The sprocket 3B is disposed below and outside the storage reel 2B, and the inclined guide 22 is disposed so as to guide the TAB 1 hanging from the storage reel 2B by its own weight. The sensors 25 and 26 detect the presence or absence of the TAB 1 hanging between the inclined guide 22 and the sprocket 3B.

The camera 15A is arranged between the pulley 4A and the guide 5A, and the camera 15B is arranged between the punch unit 11 and the pulley 4B. The cameras 15A and 15B are connected to an image processing device 15C. The camera 15A captures an image of TAB1 before measurement, and transfers the captured data to the image processing device 15C.
To send to. The camera 15B captures an image of TAB1 and compares and matches the image data from the camera 15A with the punching command of the punch unit 11. Camera 15A
15B is obtained by replacing the detector groups 19 and 20 in FIG. 8 with image processing.

The camera 15 is disposed below the test head 14 and passes through the central hollow hole of the test head
The image of B1 is recognized. The camera 15 is an image processing device 15
It is connected to C and corrects the contact position of TAB1.

Next, the operation of the sensors 23 to 26 in FIG. 1 will be described. When the sensors 23 and 24 do not detect TAB1, the supply reel 2A rotates and sends out TAB1. When the sensors 23 and 24 detect TAB1, the supply reel 2A stops rotating and the sprocket 3A
Rotates and sends TAB1. When the sensors 25 and 26 do not detect TAB1, the storage reel 2B stops rotating, and the sprocket 3B rotates and sends TAB1.
When the sensors 25 and 26 detect TAB1,
The sprocket 3B stops rotating, and the storage reel 2B
Wind up AB1. Thus, in FIG. 1, TAB1 is always supplied and accommodated with a margin.

Next, the operation of FIG. 1 will be described with reference to the flowchart of FIG. In step 101 of FIG. 2, the sprockets 7A and 7B
A · 3B rotates and sends TAB1 for one device. In step 102, the pushers 9 and 10 are driven simultaneously,
AB1 is clamped between the tape clamps 8 and fixed.
B1 is lowered to the position where it contacts the probe card 12. At this time, TAB1 is ± 60μ by the deflection removing mechanism.
Positioning with an accuracy of m.

In step 103, the reference mark 1A is captured by the camera 15 and the correction value of the XY stage 16 is calculated. In step 104, the pusher 10 is raised.
In step 105, based on the correction value, the X table 1
6A and Y-table 16B are simultaneously micro-moved.

In step 106, the pusher 10 is lowered to bring the TAB 1 into contact with the probe card 12. In step 107, a test start request signal is sent to the IC tester, and TAB1 is measured. At the same time, the punch unit 11 is driven, the images of TAB1 are read by the cameras 15A and 15B, and the image data is compared.

When the measurement is completed in step 107, the pushers 9 and 10 are simultaneously started to rise in step 108,
The contact between the TAB 1 and the probe card 12 is released, and at the same time, the TAB 1 is released from the tape clamp 8, and one index is completed.

FIG. 3 is a time chart showing the flowchart of FIG. 3A with sprocket 7A
When the 7B and the sprockets 3A and 3B complete the TAB1 by one index, the pushers 9.1 and 9.1 in FIG.
0 starts falling at the same time. In FIG. 3D, the image of TAB1 is read, and the correction value is calculated. When the calculation is completed,
Next, the pusher 10 is raised in FIG.

When the ascent of the pusher 10 is completed, FIG.
X table 16A and Y table 16
B moves at the same time. When the pusher 10 is completely lowered in FIG. 3C, the measurement is started in FIG. 3K, and at the same time, the punch unit 11 is driven in FIG. 3C, and TAB1 is confirmed by the cameras 15A and 15B.

When the measurement is completed in FIG. 3G, the pushers 9 and 10 start rising at the same time in FIG. Pusher 9
When the ascent of 10 is completed, the next TAB1 is commanded in FIG. 3A. In FIG. 3, the pushers 9 and 10 start driving at the same time. Further, the X table 16A and the Y table 16B also start driving at the same time. Since the measurement start operation, the punch driving operation, and the image reading of TAB1 are started in parallel, the index time TINDEX is reduced.

Next, a guide structure for easily switching the TAB tape width according to the present invention will be described. 4A is a side view of the sprocket 3A, and FIG. 4A is a side view of the sprocket 3B. In FIG. 3, the sprocket 3A includes a stepped sprocket 31, a stepped sprocket 32, and a rotating shaft 33. Similarly, the sprocket 3B is a stepped sprocket 34.
And a stepped sprocket 35 and a rotating shaft 36.
Three grooves V corresponding to TABs having different widths are formed on the rotation shaft 33 and the rotation shaft 36 on the circumference. Stepped sprocket 31
The stepped sprocket 32, the stepped sprocket 34, and the stepped sprocket 35 are provided with spheres B which enter the grooves V at the steps, and a compression coil spring S for pressing the balls B is built in the steps. In FIG. 4, in order to cope with TABs having different widths, the interval W1 between the stepped sprockets facing each other can be easily switched on the rotating shaft.

FIG. 5A is a side view of the pulley 4A, and FIG. 5A is a side view of the pulley 4B. In FIG. 4, the pulley 4A includes a stepped pulley 41, a stepped pulley 42, and a rotating shaft 43. Pulley 4B includes stepped pulley 44 and stepped pulley 4
5 and a rotating shaft 46. Rotating shaft 43 and rotating shaft 46
A plurality of grooves V corresponding to TABs having different widths are formed on the circumference. A stepped pulley 41, a stepped pulley 42, a stepped pulley 44, and a stepped pulley 45 are provided with a ball B which enters the groove V at the stepped portion. A compression coil spring S for pressing the ball B is built in the step. In FIG. 5, the step of the stepped pulley 41 and the step of the stepped pulley 42 are arranged to face each other, and the step of the stepped pulley 44 and the step of the stepped pulley 45 are arranged to face each other. To guide TABs with different widths. That is, the interval W in FIG.
2 can be easily switched on the rotating shaft.

FIG. 6A is a side view of the guide 5A, and FIG. 6A is a side view of the guide 5B. In FIG. 6, the guide 5A includes a stepped guide 51, a stepped guide 52, and a rotating shaft 53. The guide 5B includes the step guide 54 and the step guide 5.
5 and a rotating shaft 56. Rotating shaft 53 and rotating shaft 56
A plurality of grooves V corresponding to TABs having different widths are formed on the circumference. The stepped guide 51, the stepped guide 52, the stepped guide 54, and the stepped guide 55 are provided with spheres B which enter the grooves V at the steps, and a compression coil spring S for pressing the balls B is built in the steps. The step of the stepped guide 51 and the step of the stepped guide 52 are arranged to face each other, the step of the stepped guide 54 and the step of the stepped guide 55 are arranged to face each other, and the tape width of the TAB1 is set to W3. To guide TABs with different widths.

FIG. 7 is a detailed view of the tension pulley 6B. Since the tension pulley 6A and the tension pulley 6B are arranged in line symmetry in FIG. 1, a detailed view of the tension pulley 6A is omitted in FIG. In FIG. 7, reference numerals in parentheses indicate components of the tension pulley 6A.

FIG. 7A is a front view, FIG. 7A is a side view, and FIG. 7C is a plan view. In FIG. 7, the tension pulley 6B includes a stepped arc block 64, a stepped arc block 65, and a swing plate 66. A plurality of holes H corresponding to TABs having different widths are formed in the swing plate 66. Pins P that enter holes H protrude from the bottom surfaces of the arc block 64 and the stepped arc block 65. The arc step of the stepped arc block 64 and the arc step of the stepped arc block 65 are arranged to face each other, and TAB
The width W4 between the stepped arc blocks 64 and 65 can be easily changed corresponding to the width W of 1.

In FIG. 7, the swing plate 66 swings about the rotation axis 66A. One end of a wire rope 67 is connected to the edge of the rotation axis 66A. The wire rope 67 is hung on a pulley 68 and a weight 69 is suspended from the other end of the wire rope 67. TAB1 with gravity on weight 69
Is always pressed in a rising direction with a constant force.

The tension pulley 6A includes a stepped arc block 61, a stepped arc block 62, and a swing plate 63. A plurality of holes H corresponding to TABs having different widths are formed in the rocking plate 63. Pins P that enter the holes H protrude from the bottom surfaces of the arc block 61 and the stepped arc block 62. Stepped arc block 61 and stepped arc block 6
The two arc-shaped steps are arranged to face each other, and the width W4 between the stepped arc blocks 61 and 62 can be easily changed corresponding to the width W of the TAB1.

The swing plate 63 swings about the rotation axis 63A. One end of a wire rope 67 is connected to the edge of the rotation axis 63A. The wire rope 67 is hung on a pulley 68 and a weight 69 is suspended from the other end of the wire rope 67. The TAB 1 is constantly pressed in the ascending direction by a constant force due to the gravity acting on the weight 69.

[0085]

According to the first invention, the first guide and the second guide for fixing the center of rotation are arranged on both wings of the first sprocket and the second sprocket which rotate the TAB synchronously. A first pulley and a second pulley for fixing the center of rotation are provided on both wings of the first guide and the second guide so that the running of the TAB is parallel.
Of the pulley. On both wings of the first pulley and the second pulley, a third sprocket and a fourth sprocket for feeding TAB at a pitch are arranged. When the first pusher, the second pusher, the first sprocket, and the second sprocket are integrally moved up and down the TAB,
TAB does not run to the pusher side because the sprocket has stopped rotating. Therefore, the punch unit can be driven irrespective of the operation of the pusher, and the TAB state can be stably detected while the punch unit is being driven.

In the second invention, the X-table for finely correcting TAB in the running direction and the Y-table for finely correcting TAB in the direction perpendicular to the running direction are simultaneously started to move. You can save time.

According to the third aspect of the present invention, the first pusher and the second pusher that move up and down the TAB start lowering or start raising at the same time, so that the index time can be reduced as compared with the conventional control method.

According to the fourth aspect of the present invention, the supply reel always supplies TAB to the third sprocket with a margin.
The index feed speed of the first sprocket and the second sprocket can be increased. Also, since the TAB falls under its own weight, no impact force is applied.

According to the fifth aspect of the present invention, since the storage reel always stores the TAB sent from the fourth sprocket with a margin, the index feed speed of the first sprocket and the second sprocket can be increased. Also, since the TAB falls under its own weight, no impact force is applied.

In the sixth to eighth inventions, a plurality of grooves V are formed on the circumference of the rotating shaft corresponding to the tape width of the TAB, and the driving wheels or the guide wheels are set to the holding positions on the rotating shaft by the grooves V. The position of the opposing drive wheel or guide wheel can be easily changed.

In the ninth invention, the swing plate has a TAB having a different width.
Are formed in the stepped arc block, and a pin is formed in the hole in the stepped arc block, so that the interval between the opposing stepped arc blocks can be easily changed on the rocking plate. In addition, the first tension pulley and the second tension pulley
Push B up.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a TAB auto handler according to the present invention.

FIG. 2 is a flowchart illustrating the operation of FIG.

FIG. 3 is a time chart of FIG. 2;

FIG. 4 is a side view of the sprockets 3A and 3B of FIG.

FIG. 5 is a side view of the pulleys 4A and 4B of FIG.

FIG. 6 is a side view of the guides 5A and 5B of FIG.

FIG. 7 is a detailed view of a tension pulley 6B.

FIG. 8 is a configuration diagram of a TAB auto handler according to the related art.

9 is a partially enlarged view of a tension pulley 5C of FIG.

FIG. 10 is a state change diagram of FIG. 9;

FIG. 11 is a state change diagram of FIG.

FIG. 12 is a state change diagram of FIG. 11;

FIG. 13 is a configuration diagram near a tension pulley 5D of FIG. 9;

FIG. 14 is a partially enlarged view of TAB1.

FIG. 15 is an enlarged sectional view of a main part of FIG.

FIG. 16 is an enlarged perspective view of pushers 9 and 10;

FIG. 17 is a sectional view of FIG. 16;

FIG. 18 is a diagram illustrating an example of a pulley 4C that is a shared pulley.

FIG. 19 is a configuration diagram of one detector of the detector group 20.

FIG. 20 is a layout diagram of the detector group 20 on the TAB1.

21 is an external view of the punch unit 11. FIG.

FIG. 22 is a flowchart illustrating the operation of FIG.

FIG. 23 is a time chart of FIG. 22.

FIG. 24 is a partial configuration diagram centering on the punch unit 11;

[Explanation of symbols]

 Reference Signs List 1 TAB 1A Reference mark 2A Supply reel 2B Storage reel 3A Sprocket 3B Sprocket 4A Pulley 4B Pulley 5A Guide 5B Guide 6A Tension pulley 6B Tension pulley 7A Pulley 7B Pulley 8 Tape clamp 9 Pusher 10 Pusher 11 Punch unit 12 Punch unit Test head 15 Camera 16 XY stage 16A X table 16B Y table 21 Tilt guide 22 Tilt guide 23 Sensor 24 Sensor 25 Sensor 26 Sensor 31 Stepped sprocket 32 Stepped sprocket 33 Rotary shaft 34 Stepped sprocket 35 Stepped sprocket 36 Rotating shaft 41 Stepped pulley 42 Stepped pulley 43 Rotary shaft 44 Stepped pulley 45 Stepped pulley 46 Rotary axis 51 Stepped guide 52 Stepped guide 53 Rotary axis 54 Stepped guide 55 Stepped guide 56 Rotary axis 61 Stepped arc block 62 Stepped arc block 63 Rocking plate 64 Stepped arc block 65 Stepped arc block 66 Rocking Moving plate B Sphere H hole P Pin S Compression coil spring V groove

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-1-282831 (JP, A) JP-A 5-77940 (JP, U) JP-A 64-34576 (JP, U) JP-A 4-34576 105541 (JP, U) (58) Field surveyed (Int. Cl. ⁷ , DB name) G01R 31/26 H01L 21/66

Claims (2)

(57) [Claims] 1. A reel (2B) for winding a TAB (1) wound on a supply reel (2A) is wound up, and a first sprocket (7A) and a second sprocket (7B) are rotated synchronously to form a TAB (1). 1), the first sprocket (7A) and the second sprocket (7
B), a tape clamp (8) and a first pusher (9) are arranged, and TAB (1) held by the tape clamp (8) and the first pusher (9) is moved to a second pusher (10). ) Is lowered, and in the TAB auto handler for testing by bringing the TAB (1) into contact with the probe card (12), the TAB (1) sent out by the supply reel (2A) is pushed by the first pusher.
(9) The third sprocket (3A) running on the side, the fourth sprocket (3B) running on the TAB (1) on the storage reel (2B) side, the third sprocket (3A) and the first A first pulley (4A) interposed between the sprockets (7A) and fixing the rotation center, and a second pulley interposed between the second sprocket (7B) and the fourth sprocket (3B) and fixing the rotation center A first tension pulley (6A) disposed between the first pulley (4A) and the first sprocket (7A) to press the TAB (1) in an ascending direction; A second tension pulley (6B) disposed between the sprocket (7B) and the second pulley (4B) and pressing the TAB (1) in an ascending direction; a first pulley (4A) and a first tension pulley (6A), the center of rotation is fixed, and the first guide (5A) for guiding the TAB (1) and the second tension pulley (6B) and the second pulley (4B) are arranged. , Times The center is fixed and a second guide (5B) for guiding the TAB (1) is arranged between the second guide (5B) and the second pulley (4B). A punch unit (11) for making holes , and simultaneously lowering the first pusher (9) and the second pusher (10).
An auto handler for TAB, characterized in that the lower sprocket is started at the same time as the lower sprocket, and a punch hole is made during the measurement of the TAB (1) in which the fourth sprocket (3B) stops rotating. 2. A first sprocket (7A), a second sprocket (7B), a tape clamp (8), a first pusher (9), and a second pusher (10). The X table (16A) is placed on the XY stage (16) and the XY stage (1
6) Move the upper TAB (1) slightly in the running direction
(16B) moves the TAB (1) on the XY stage (16) minutely in the direction perpendicular to the running direction, and moves the camera (15) for image processing.
Refer to the reference mark (1A) of TAB (1) with XY stage
When correcting the position of TAB (1) held in (16), X
2. The TAB auto handler according to claim 1, wherein the table (16A) and the Y table (16B) start moving at the same time.